Laser water-guided nozzle, laser water-guided assembly and water-guided laser equipment

Abstract

The present application discloses a laser water-guiding nozzle, a laser water-guiding assembly, and a water-guiding laser device. The laser water-guiding nozzle includes a nozzle base and a metal glass plate. The nozzle base is provided with a through hole extending in a first direction. The metal glass plate is arranged on one side of the nozzle base along the first direction, and one side of the metal glass plate faces the nozzle base. The metal glass plate is provided with a water-spraying hole extending in the first direction, and the water-spraying hole penetrates the metal glass plate, and the aperture of the water-spraying hole is less than or equal to 50 μm. One end of the water-spraying hole is aligned and connected with one end of the through hole, and the minimum aperture of the through hole is greater than or equal to the aperture of the water-spraying hole. The embodiment of the present application forms a water-spraying hole by processing a metal glass sheet, and can ensure the structural strength of the metal glass sheet while making the aperture of the water-spraying hole not exceed 50 μm, so that the diameter of the high-pressure water column sprayed from the water-spraying hole is smaller, and the laser in the water column is more concentrated, so as to improve the cutting accuracy and cutting efficiency of the water-guiding laser device.

Description

Technical Field

[0001] The present application relates to the field of laser technology, and in particular to a laser water-guided nozzle, a laser water-guided component and a water-guided laser device. Background Art

[0002] Water-guided laser equipment is a composite processing technology that uses water jet to guide the laser beam to cut the workpiece. It has the characteristics of no taper, high aspect ratio, and low heat-affected zone processing. It is mainly used in semiconductors and microelectronics, diamond processing, aerospace, watch processing, medical devices, tool processing, etc. It is a widely used high-precision precision cutting and drilling processing equipment.

[0003] Among them, the laser water-guided nozzle of the water-guided laser equipment is used to spray a high-pressure water column. The laser is transmitted in the high-pressure water column, and the high-pressure water column fully reflects the internal laser, so that the high-pressure water column replaces the optical fiber. The smaller the diameter of the high-pressure water column, the higher the laser energy density inside it, and the higher the cutting accuracy and cutting efficiency of the water-guided laser equipment. Therefore, how to reduce the diameter of the water column of the water-guided laser equipment has become a technical problem that needs to be solved urgently. Summary of the invention

[0004] The embodiments of the present application provide a laser water-guiding nozzle, a laser water-guiding assembly and a water-guiding laser device, which are intended to solve the technical problem of how to reduce the water column diameter of the water-guiding laser device.

[0005] The present application provides a water-guided laser device, including:

[0006] A laser emitting component, used for emitting laser;

[0007] A laser water guide assembly comprises a laser water guide nozzle, a containing structure and a protective lens, wherein the containing structure comprises a containing cavity, the containing structure is provided with a light-transmitting hole and a mounting hole extending along a first direction, the light-transmitting hole and the mounting hole are distributed on both sides of the containing cavity along the first direction and are respectively connected with the containing cavity, and a water inlet is provided on the inner surface of the containing cavity; the protective lens is connected to the containing structure, the protective lens is located in the containing cavity and seals the light-transmitting hole; the laser water guide nozzle is installed in the mounting hole;

[0008] A moving assembly connected to the laser water guide assembly and used to drive the laser water guide assembly to move in three mutually perpendicular directions;

[0009] The laser water guide nozzle comprises a nozzle base and a metal glass plate welded together, a mounting groove is provided on a side of the nozzle base facing the protective lens, the metal glass plate is installed in the mounting groove, and a through hole extending along a first direction is provided on the bottom surface of the mounting groove; one side surface of the metal glass plate faces the bottom surface of the mounting groove, the metal glass plate is provided with a water spray hole extending along the first direction, the water spray hole penetrates the metal glass plate, and the aperture of the water spray hole is less than or equal to 50 μm; the water spray hole is coaxially arranged with the through hole, and the minimum aperture of the through hole is greater than or equal to the aperture of the water spray hole;

[0010] The inner surface of the accommodating cavity is provided with an accommodating groove, the accommodating groove is located on the side of the accommodating cavity away from the laser water guide nozzle, the light transmission hole is provided on the bottom surface of the accommodating groove, the protective lens is installed in the accommodating groove, the side of the protective lens facing the accommodating cavity is provided with an anti-reflection film, and the side of the protective lens away from the accommodating cavity is provided with a hydrophobic film; the bottom surface of the accommodating groove is provided with an annular groove, the annular groove is located on the outer periphery of the light transmission hole, a sealing member is provided in the annular groove, the sealing member abuts against the side of the protective lens facing the bottom surface, so that the bottom surface of the accommodating groove and the protective lens are sealed and matched; the inner side surface of the accommodating groove and the outer peripheral surface of the protective lens are both conical surfaces, the inner side surface of the accommodating groove and the outer peripheral surface of the protective lens have the same taper, and the inner diameter of the accommodating groove and the inner diameter of the protective lens gradually decrease in the direction away from the accommodating groove, and a sealant is provided between the inner peripheral surface of the accommodating groove and the outer peripheral surface of the protective lens, and the sealant extends along the circumference of the protective lens, so that the side surface of the accommodating groove and the protective lens are sealed and matched.

[0011] The present application also provides a laser water guide nozzle, including:

[0012] A nozzle base, wherein the nozzle base is provided with a through hole extending along a first direction;

[0013] A metal glass plate is arranged on one side of the nozzle base along the first direction, one side surface of the metal glass plate faces the nozzle base, the metal glass plate is provided with a water spray hole extending along the first direction, the water spray hole penetrates the metal glass plate, and the aperture of the water spray hole is less than or equal to 50 μm; one end of the water spray hole is aligned and connected with one end of the through hole, and the minimum aperture of the through hole is greater than or equal to the aperture of the water spray hole.

[0014] In some embodiments, the material of the metallic glass plate includes a non-gold alloy; and / or the metallic glass plate is welded to the nozzle base as a whole.

[0015] In some embodiments, a mounting groove is provided on one side of the nozzle base along the first direction, the metal glass plate is at least partially installed in the mounting groove, and one side surface of the metal glass plate faces the bottom surface of the mounting groove, and the through hole is provided on the bottom surface of the mounting groove; the inner side wall of the mounting groove is welded to the outer side surface of the metal glass plate, and the minimum distance between the outer side surface of the metal glass plate and the inner side surface of the water spray hole is greater than or equal to 100 μm.

[0016] In some embodiments, the metal glass plate is a ring-shaped plate; the outer diameter of the metal glass plate is greater than or equal to 1 mm; the aperture of the water spray hole is greater than or equal to 5 μm and less than or equal to 20 μm; the mounting groove is a cylindrical groove, and the inner diameter of the mounting groove is greater than or equal to 1.5 mm; the through hole is a conical hole, and the aperture of the through hole gradually increases in the direction away from the metal glass plate; the minimum aperture of the through hole is greater than or equal to 50 μm.

[0017] In some embodiments, a mounting base is further included, wherein a threaded hole is formed on one side of the mounting base along the first direction, the nozzle base is mounted in the threaded hole, and an outer circumference of the nozzle base is provided with an external thread engaged with the threaded hole.

[0018] The present application also provides a laser water guide assembly, including:

[0019] A containing structure, comprising a containing cavity, the containing structure is provided with a light-transmitting hole and a mounting hole extending along a first direction, the light-transmitting hole and the mounting hole are distributed on both sides of the containing cavity along the first direction and are respectively connected to the containing cavity, and a water inlet is provided on the inner surface of the containing cavity;

[0020] A protective lens connected to the containing structure, the protective lens is located in the containing cavity and seals the light-transmitting hole;

[0021] A laser water-guiding nozzle, wherein the laser water-guiding nozzle is the laser water-guiding nozzle as described above, the laser water-guiding nozzle is installed in the installation hole, the water spray hole of the metal glass plate of the laser water-guiding nozzle is connected to the accommodating cavity, and the water spray hole is connected to the light path of the light-transmitting hole through the accommodating cavity.

[0022] In some embodiments, the inner surface is provided with a receiving groove, the receiving groove is located on a side of the receiving cavity away from the laser water guide nozzle, the light-transmitting hole is provided on the bottom surface of the receiving groove, and the protective lens is installed in the receiving groove;

[0023] Wherein, the bottom surface of the accommodating groove and / or the side surface of the accommodating groove are sealed and matched with the protective lens.

[0024] In some embodiments, an annular groove is provided on the bottom surface of the receiving groove, the annular groove is located at the outer periphery of the light-transmitting hole, a sealing member is provided in the annular groove, the sealing member abuts against a side of the protective lens facing the bottom surface, so that the bottom surface of the receiving groove and the protective lens are sealed and matched; and / or,

[0025] A sealant is provided between the inner side surface of the receiving groove and the outer peripheral surface of the protection lens, and the sealant extends along the circumference of the protection lens to make the side surface of the receiving groove and the protection lens sealably matched.

[0026] The present application also provides a water-guided laser device, including:

[0027] A laser emitting component, used for emitting laser;

[0028] A laser water guide assembly, wherein the laser water guide assembly is the laser water guide assembly as described above, and the laser water guide assembly is in optical communication with the laser emission assembly, so that the laser passes through the light transmission hole, the accommodating cavity, the water spray hole and the through hole of the laser water guide assembly in sequence, and is emitted from an end of the through hole away from the water spray hole;

[0029] The moving component is connected to the laser water guide component and is used to drive the laser water guide component to move in three mutually perpendicular directions.

[0030] The embodiment of the present application forms a water spray hole on a metallic glass sheet made of metallic glass, so that the diameter of the water spray hole does not exceed 50 μm while ensuring the structural strength of the metallic glass sheet. Compared with the existing laser water-guided nozzle, the diameter of the water spray hole can be greatly reduced, so that the diameter of the high-pressure water column sprayed from the water spray hole is smaller, thereby making the laser in the water column more concentrated, and the laser energy density is higher, so as to improve the cutting accuracy and cutting efficiency of the water-guided laser device. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] The technical solution and other beneficial effects of the present application will be made apparent by describing in detail the specific implementation methods of the present application in conjunction with the accompanying drawings.

[0032] Figure 1 A partial cross-sectional view of an embodiment of a water-guided laser device provided in an embodiment of the present application;

[0033] Figure 2 for Figure 1 The enlarged view of point A in the middle;

[0034] Figure 3 A schematic structural diagram of an embodiment of a water-guided laser nozzle provided in an embodiment of the present application;

[0035] Figure 4A cross-sectional view of an embodiment of a water-guided laser nozzle provided in an embodiment of the present application, wherein the cross-sectional plane is parallel to the first direction;

[0036] Figure 5 and Figure 6 A simulation diagram of a water column and a laser at a water spray hole provided in an embodiment of the present application;

[0037] Figure 7 A simulation diagram of the laser provided in an embodiment of the present application.

[0038] Water-guided laser device 100; laser water-guided assembly 110; containing structure 111; containing cavity 1111; water inlet 1112; containing groove 1113; light-transmitting hole 1114; annular groove 1115; mounting hole 1116; sealing member 1117; protective lens 112; laser water-guided nozzle 113; nozzle base 1131; through hole 1132; mounting groove 1133; metal glass plate 1134; water-spraying hole 1135; mounting base 1136; threaded hole 1137; moving assembly 120. DETAILED DESCRIPTION

[0039] The technical solutions in the embodiments of the present application will be described clearly and completely below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present application.

[0040] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first" and "second" are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present application, the meaning of "multiple" is two or more, unless otherwise clearly and specifically defined.

[0041] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, an electrical connection, or mutual communication; it can be a direct connection, or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0042] In the present application, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0043] The disclosure below provides many different embodiments or examples to realize the different structures of the present application. In order to simplify the disclosure of the present application, the parts and settings of specific examples are described below. Of course, they are only examples, and the purpose is not to limit the present application. In addition, the present application can repeat reference numbers and / or reference letters in different examples, and this repetition is for the purpose of simplification and clarity, which itself does not indicate the relationship between the various embodiments and / or settings discussed. In addition, the present application provides various specific processes and examples of materials, but those of ordinary skill in the art can appreciate the application of other processes and / or the use of other materials.

[0044] The embodiments of the present application provide a laser water-guiding nozzle, a laser water-guiding assembly, and a water-guiding laser device, which are described in detail below.

[0045] First, an embodiment of the present application provides a laser water guide nozzle.

[0046] Figure 1 A partial cross-sectional view of an embodiment of a water-guided laser device provided in an embodiment of the present application. Figure 2 for Figure 1 The enlarged view of A in the figure. Figure 1 and Figure 2 As shown, the laser water guide nozzle 113 is mainly used for the laser water guide component 110 , and the laser water guide component 110 is used to communicate with the laser emitting component optical path so that the laser emitted by the laser emitting component is transmitted in the water column sprayed by the laser water guide nozzle 113 .

[0047] Among them, Figure 3 and Figure 4 As shown, the laser water guide nozzle 113 includes a nozzle base 1131 and a metal glass plate 1134, the nozzle base 1131 is provided with a through hole 1132 extending along a first direction, the metal glass plate 1134 is arranged on one side of the nozzle base 1131 along the first direction, one side surface of the metal glass plate 1134 faces the nozzle base 1131, the metal glass plate 1134 is provided with a water spray hole 1135 extending along the first direction, the water spray hole 1135 penetrates the metal glass plate 1134, and one end of the water spray hole 1135 is aligned and connected with one end of the through hole 1132, the minimum aperture of the through hole 1132 is greater than or equal to the aperture of the water spray hole 1135, so that the water column sprayed from one end of the water spray hole 1135 can pass through the through hole 1132 and be ejected from the other end of the through hole 1132, and the inner circumferential surface of the through hole 1132 can maintain a certain distance from the water column to improve the stability of the water column. At the same time, when the minimum aperture of the through hole 1132 is larger than the aperture of the water spray hole 1135, Figure 5 and Figure 6 As shown, a zero-flow area can also be formed between the inner circumferential surface of the through hole 1132 and the water column sprayed out of the water spray hole 1135 to form a water column constriction to keep the structure of the water column stable.

[0048] In some embodiments, the diameter of the water spray hole 1135 can be less than or equal to 50 μm. Figure 7 As shown, the diameter of the water column sprayed from the water spray hole 1135 of the metallic glass plate 1134 can be made smaller, so that the laser in the water column is more concentrated, and the laser energy density is higher, so as to improve the cutting accuracy and cutting efficiency of the water-guided laser device 100. The aperture of the water spray hole 1135 can be 45 μm, 40 μm, 35 μm, 30 μm, etc., which can be determined according to the type of the water-guided laser device 100.

[0049] The embodiment of the present application forms the water spray hole 1135 on a metallic glass sheet made of metallic glass, and can ensure the structural strength of the metallic glass sheet while making the aperture of the water spray hole 1135 not exceed 50 μm. Compared with the existing laser water-guided nozzle 113, the aperture of the water spray hole 1135 can be greatly reduced, so that the diameter of the high-pressure water column sprayed from the water spray hole 1135 is smaller, thereby making the laser in the water column more concentrated, and the laser energy density is higher, so as to improve the cutting accuracy and cutting efficiency of the water-guided laser device 100.

[0050] Among them, the material of the metal glass plate 1134 can include a non-gold alloy (also called an amorphous alloy) to make the metal glass plate 1134 have higher strength, hardness, toughness and rigidity, so that the water spray hole 1135 on the metal glass plate 1134 can have a smaller aperture and a more stable structure.

[0051] It should be noted that the entire material of the metal glass plate 1134 can be a non-gold alloy, or part of the material of the metal glass plate 1134 can be a non-gold alloy, as long as the aperture of the nozzle hole can be made smaller and can remain stable.

[0052] In some embodiments, the aperture of the water jet hole 1135 can be greater than or equal to 5 μm and less than or equal to 20 μm, so that the aperture of the water jet hole 1135 is smaller, a thinner water column can be formed, and the laser in the water column is more concentrated, and the laser energy density is higher. The aperture of the water jet hole 1135 can be 7 μm, 10 μm, 12 μm, 13 μm, 15 μm, 18 μm, etc.

[0053] In some embodiments, the metal glass plate 1134 may be made of a non-light-transmitting material to prevent the metal glass from affecting the spot area of ​​the laser, thereby helping to maintain the beam density of the laser.

[0054] In some embodiments, the metal glass plate 1134 of the laser water guide nozzle 113 can be welded to the nozzle base 1131 as a whole, so that the connection between the metal glass plate 1134 and the nozzle base 1131 is more secure and helps to improve the structural strength of the metal glass plate 1134.

[0055] In some embodiments, Figure 3 and Figure 4 As shown, a mounting groove 1133 may be provided on one side of the nozzle base 1131 along the first direction, and the metal glass plate 1134 may be at least partially mounted in the mounting groove 1133, with one side of the metal glass plate 1134 facing the bottom surface of the mounting groove 1133. The inner surface of the mounting groove 1133 may limit the metal glass plate 1134 to a certain extent, so that the position of the metal glass plate 1134 relative to the nozzle base 1131 is more stable.

[0056] A through hole 1132 may be provided on the bottom surface of the mounting groove 1133 of the nozzle base 1131 , so that after the metal glass plate 1134 is installed in the mounting groove 1133 , one end of the water spray hole 1135 is aligned and connected with one end of the through hole 1132 .

[0057] In addition, the inner side wall of the mounting groove 1133 of the nozzle base 1131 may be welded to the outer side of the metal glass plate 1134 to make the connection between the nozzle base 1131 and the metal glass plate 1134 more firmly. Specifically, the inner side wall of the mounting groove 1133 is welded to the outer side of the metal glass plate 1134 to form a weld, which extends in a ring shape along the circumference of the metal glass plate 1134 to improve the welding stability between the metal glass plate 1134 and the nozzle base 1131.

[0058] The minimum distance between the outer side of the metal glass plate 1134 and the inner side of the water spray hole 1135 can be greater than or equal to 100 μm, so as to avoid the problem that the water spray hole 1135 of the metal glass plate 1134 and the weld between the metal glass plate 1134 and the nozzle base 1131 are too small, which may cause the water spray hole 1135 to deform. The minimum distance between the outer side of the metal glass plate 1134 and the inner side of the water spray hole 1135 can be 110 μm, 120 μm, 130 μm, 150 μm, etc., which is not limited here.

[0059] Specifically, the metal glass plate 1134 is a circular ring plate, and the mounting groove 1133 of the nozzle base 1131 is a cylindrical groove, so that the shape of the mounting groove 1133 can be adapted to the shape of the metal glass plate 1134, so that the metal glass plate 1134 can be stably held in the mounting groove 1133.

[0060] The outer diameter of the metal glass plate 1134 is greater than or equal to 1 mm, so that a sufficient distance can be maintained between the outer side of the metal glass plate 1134 and the inner side of the water spray hole 1135. The inner diameter of the mounting groove 1133 of the nozzle base 1131 is greater than or equal to 1.5 mm, so that there is enough space between the metal glass plate 1134 and the nozzle base 1131 for welding, and the size of the mounting groove 1133 of the nozzle base 1131 and the metal glass plate 1134 is too small, which makes it inconvenient to weld the nozzle base 1131 and the metal glass plate 1134.

[0061] In some embodiments, Figure 4 As shown, the through hole 1132 of the nozzle base 1131 can be a conical hole, and the aperture of the through hole 1132 gradually increases in the direction away from the metal glass plate 1134, so that the nozzle base has a sufficient area at the edge of the through hole 1132 close to the metal glass plate 1134 to support the metal glass plate 1134, and at the same time, a large distance is provided between the inner circumference of the through hole 1132 and the water column sprayed from the water spray hole 1135. Among them, the angle formed by the generatrix of the inner circumference of the through hole 1132 and the center line can be 30°~80°. In addition, the material of the nozzle base 1131 can be a metal material with rust-proof effect.

[0062] In some embodiments, the minimum aperture of the through hole 1132 of the nozzle base 1131 can be greater than or equal to 50 μm, so that the minimum aperture of the through hole 1132 is greater than or equal to the aperture of the water spray hole 1135 .

[0063] In some embodiments, Figure 2As shown, the laser water-guided nozzle 113 may further include a mounting base 1136, a threaded hole 1137 is provided on one side of the mounting base 1136 along the first direction, the nozzle base 1131 is mounted on the threaded hole 1137, and an outer circumference of the nozzle base 1131 is provided with an external thread engaged with the threaded hole 1137, so that the connection between the nozzle base 1131 and the mounting base 1136 is more stable, and the mounting base 1136 is connected to the containing structure 111 of the water-guided laser device 100, so that the position of the metal glass plate 1134 relative to the containing structure 111 is kept stable.

[0064] The embodiment of the present application further provides a laser water guide assembly 110, which includes a laser water guide nozzle 113. The specific structure of the laser water guide nozzle 113 refers to the above embodiment. Since the laser water guide assembly 110 adopts all the technical solutions of all the above embodiments, it at least has all the beneficial effects brought by the technical solutions of the above embodiments, which will not be described one by one here.

[0065] Among them, Figure 1 and Figure 2 As shown, the laser water guide assembly 110 may include a containing structure 111, a protective lens 112 and a laser water guide nozzle 113. The containing structure 111 includes a containing cavity 1111. The inner surface of the containing cavity 1111 is provided with a water inlet 1112, and the water inlet 1112 is used to communicate with a water supply device so as to supply water to the water supply device box containing cavity 1111. The containing structure 111 is also provided with a light-transmitting hole 1114 and a mounting hole 1116 extending along a first direction. The light-transmitting hole 1114 and the mounting hole 1116 are distributed on both sides of the containing cavity 1111 along the first direction and are respectively connected to the containing cavity 1111.

[0066] The protective lens 112 is connected to the containing structure 111, and the protective lens 112 is located in the containing cavity 1111 and seals the light-transmitting hole 1114. Thus, the laser can pass through the light-transmitting hole 1114 and the protective lens 112 and enter the containing cavity 1111, and at the same time, it can also prevent the water in the containing cavity 1111 from leaking out from the light-transmitting hole 1114.

[0067] The laser water guide nozzle 113 is installed in the installation hole 1116, and the water spray hole 1135 of the metal glass plate 1134 of the laser water guide nozzle 113 is connected to the accommodating chamber 1111, and the water spray hole 1135 is optically connected to the light transmission hole 1114 through the accommodating chamber 1111. Thus, the water in the accommodating chamber 1111 can be sprayed out from the water spray hole 1135 of the metal glass plate 1134 to form a water column, and after the laser enters the accommodating chamber 1111, it can pass through the water spray hole 1135 and then be emitted from the side of the laser water guide nozzle 113 away from the accommodating chamber 1111.

[0068] In some embodiments, a receiving groove 1113 may be provided on the inner surface of the receiving cavity 1111 of the receiving structure 111. The receiving groove 1113 is located on the side of the receiving cavity 1111 away from the laser water guide nozzle 113, and the light-transmitting hole 1114 is provided on the bottom surface of the receiving groove 1113. The protective lens 112 is installed in the receiving groove 1113, thereby making the connection between the protective lens 112 and the receiving structure 111 more stable, which is beneficial to improving the sealing effect of the protective lens 112 on the light-transmitting hole 1114.

[0069] The bottom surface of the receiving groove 1113 can be sealed with the protective lens 112, so that the protective lens 112 seals the light-transmitting hole 1114. Specifically, an annular groove 1115 can be provided on the bottom surface of the receiving groove 1113, and the annular groove 1115 is located at the periphery of the light-transmitting hole 1114. A sealing member 1117 is provided in the annular groove 1115, and the sealing member 1117 abuts against the side of the protective lens 112 facing the bottom surface, so that the bottom surface of the receiving groove 1113 and the protective lens 112 are sealed. The sealing member 1117 can be a sealing ring, and its material includes silicone, rubber, etc., which is not limited here.

[0070] Alternatively, the side of the receiving groove 1113 may be sealed with the protective lens 112 so that the protective lens 112 seals the light-transmitting hole 1114. Specifically, a sealant may be provided between the inner side of the receiving groove 1113 and the outer peripheral surface of the protective lens 112, and the sealant extends along the circumference of the protective lens 112 so that the side of the receiving groove 1113 and the protective lens 112 are sealed. Glue may be applied to the inner side of the receiving groove 1113 or the outer peripheral surface of the protective lens 112. When the protective lens 112 is installed in the receiving groove 1113, the glue is clamped between the inner side of the receiving groove 1113 and the outer peripheral surface of the protective lens 112 and solidifies to form a sealant.

[0071] It should be noted that only one of the bottom surface and the side surface of the accommodating groove 1113 can be sealed with the protective lens 112, or both the bottom surface and the side surface of the accommodating groove 1113 can be sealed with the protective lens 112. Of course, the latter can further improve the sealing effect of the protective lens 112 on the light-transmitting hole 1114.

[0072] In some embodiments, the inner side surface of the receiving groove 1113 and the outer peripheral surface of the protective lens 112 can both be conical surfaces, the inner side surface of the receiving groove 1113 and the outer peripheral surface of the protective lens 112 have the same taper, and the inner diameter of the receiving groove 1113 and the inner diameter of the protective lens 112 gradually decrease in the direction away from the receiving groove 1113, so that after the protective lens 112 is installed in the receiving groove 1113, the outer peripheral surface of the protective lens 112 is more adapted to the shape of the inner side surface of the receiving groove 1113 and can fit more closely.

[0073] At the same time, under the action of the water pressure in the accommodating cavity 1111 , the protective lens 112 can create a large pressure between the inner side and bottom surface of the accommodating groove 1113 and the protective lens 112 , so as to further improve the sealing effect of the protective lens 112 on the light-transmitting hole 1114 .

[0074] In some embodiments, an anti-reflection film may be provided on the surface of the side of the protective lens 112 facing the accommodating cavity 1111 to reduce the loss of the laser when passing through the protective lens 112. In addition, a hydrophobic film may be provided on the surface of the side of the protective lens 112 facing away from the accommodating cavity 1111 to prevent the water vapor on the side of the protective lens 112 facing away from the accommodating cavity 1111 from condensing to form water droplets on the surface of the side of the protective lens 112 facing away from the accommodating cavity 1111, thereby affecting the laser from entering the protective lens 112.

[0075] The embodiment of the present application further provides a water-guided laser device 100, which includes a laser water-guided assembly 110. The specific structure of the laser water-guided assembly 110 refers to the above embodiment. Since the water-guided laser device 100 adopts all the technical solutions of all the above embodiments, it at least has all the beneficial effects brought by the technical solutions of the above embodiments, which will not be described one by one here.

[0076] The water-guided laser device 100 may include a laser emitting component and a laser water-guided component 110, wherein the laser emitting component is used to emit laser; the laser water-guided component 110 is the laser water-guided component 110 in any of the above-mentioned embodiments, and the laser water-guided component 110 is optically connected with the laser emitting component, so that the laser passes through the light-transmitting hole 1114, the accommodating cavity 1111, the water-spraying hole 1135 and the through hole 1132 of the laser water-guided component 110 in sequence, and is emitted from an end of the through hole 1132 away from the water-spraying hole 1135.

[0077] The water-guided laser device 100 may further include a moving component 120, which is connected to the laser water-guided component 110 and is used to drive the laser water-guided component 110 to move in a first direction, a second direction, and a third direction, wherein the first direction, the second direction, and the third direction are perpendicular to each other. Thus, the positions of the laser and the water column can be flexibly adjusted.

[0078] The embodiment of the present application also provides a water-guided laser device 100 . The water-guided laser device 100 includes a laser emitting assembly, a laser water-guided assembly 110 and a moving assembly 120. The laser emitting assembly is used to emit laser. The laser water-guided assembly 110 includes a laser water-guided nozzle 113, a containing structure 111 and a protective lens 112. The containing structure 111 includes a containing cavity 1111. The containing structure 111 is provided with a light-transmitting hole 1114 and a mounting hole 1116 extending along a first direction. The light-transmitting hole 1114 and the mounting hole 1116 are distributed on both sides of the containing cavity 1111 along the first direction and are respectively connected to the containing cavity 1111. A water inlet 1112 is provided on the inner surface of the containing cavity 1111. The protective lens 112 is connected to the containing structure 111. The protective lens 112 is located in the containing cavity 1111 and seals the light-transmitting hole 1114. The laser water-guided nozzle 113 is installed in the mounting hole 1116. The moving assembly 120 is connected to the laser water-guided assembly 110 and is used to drive the laser water-guided assembly 110 to move in three mutually perpendicular directions.

[0079] The laser water guide nozzle 113 includes a nozzle base 1131 and a metal glass plate 1134 which are welded together. A mounting groove 1133 is provided on the side of the nozzle base 1131 facing the protective lens 112. The metal glass plate 1134 is installed in the mounting groove 1133. A through hole 1132 extending along a first direction is provided on the bottom surface of the mounting groove 1133. One side surface of the metal glass plate 1134 faces the bottom surface of the mounting groove 1133. The metal glass plate 1134 is provided with a water spray hole 1135 extending along the first direction. The water spray hole 1135 penetrates the metal glass plate 1134. The aperture of the water spray hole 1135 is less than or equal to 50 μm. The water spray hole 1135 is coaxially arranged with the through hole 1132, and the minimum aperture of the through hole 1132 is greater than or equal to the aperture of the water spray hole 1135.

[0080] The inner surface of the accommodating chamber 1111 is provided with an accommodating groove 1113, which is located on the side of the accommodating chamber 1111 away from the laser water guide nozzle 113, and the light transmission hole 1114 is provided on the bottom surface of the accommodating groove 1113. The protective lens 112 is installed in the accommodating groove 1113, and the side of the protective lens 112 facing the accommodating chamber 1111 is provided with an anti-reflection film, and the side of the protective lens 112 away from the accommodating chamber 1111 is provided with a hydrophobic film; the bottom surface of the accommodating groove 1113 is provided with an annular groove 1115 , the annular groove 1115 is located at the periphery of the light-transmitting hole 1114, a sealing member 1117 is arranged in the annular groove 1115, and the sealing member 1117 abuts against the side of the protective lens 112 facing the bottom surface, so that the bottom surface of the receiving groove 1113 and the protective lens 112 are sealed and matched; a sealant is arranged between the inner circumference of the receiving groove 1113 and the outer circumference of the protective lens 112, and the sealant extends along the circumference of the protective lens 112, so that the side surface of the receiving groove 1113 and the protective lens 112 are sealed and matched. In the above embodiments, the description of each embodiment has its own emphasis, and for the part not described in detail in a certain embodiment, reference can be made to the relevant description of other embodiments.

[0081] The above is a detailed introduction to a laser water-guide nozzle, a laser water-guide assembly and a water-guide laser device provided in the embodiments of the present application. Specific examples are used herein to illustrate the principles and implementation methods of the present application. The description of the above embodiments is only used to help understand the technical solutions and core ideas of the present application. Ordinary technicians in this field should understand that they can still modify the technical solutions recorded in the aforementioned embodiments, or replace some of the technical features therein by equivalents; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A water-guided laser device, characterized in that: include: A laser emitting component, used for emitting laser; A laser water guide assembly comprises a laser water guide nozzle, a containing structure and a protective lens, wherein the containing structure comprises a containing cavity, the containing structure is provided with a light-transmitting hole and a mounting hole, the light-transmitting hole and the mounting hole are distributed on both sides of the containing cavity, the water spray hole is connected with the light-transmitting hole through the containing cavity, and a water inlet is provided on the inner surface of the containing cavity; the protective lens is connected with the containing structure, the protective lens is located in the containing cavity and seals the light-transmitting hole; the laser water guide nozzle is installed in the mounting hole; A moving assembly connected to the laser water guide assembly and used to drive the laser water guide assembly to move in three mutually perpendicular directions; The laser water guide nozzle comprises a nozzle base and a metal glass plate welded together, a mounting groove is provided on a side of the nozzle base facing the protective lens, the metal glass plate is installed in the mounting groove, the inner side wall of the mounting groove is welded to the outer side of the metal glass plate, and the distance between the outer side of the metal glass plate and the inner side of the water spray hole is greater than or equal to 100 μm; the mounting groove is provided with a through hole; the metal glass plate is provided with the water spray hole, the water spray hole penetrates the metal glass plate, and the aperture of the water spray hole is greater than or equal to 5 μm and less than or equal to 15 μm; the water spray hole is coaxially arranged with the through hole, and the minimum aperture of the through hole is greater than or equal to the aperture of the water spray hole; An accommodating groove is provided on the inner surface of the accommodating cavity, and the accommodating groove is located on the side of the accommodating cavity away from the laser water guide nozzle. The protective lens is installed in the accommodating groove, and an anti-reflection film is provided on the side of the protective lens facing the accommodating cavity, and a hydrophobic film is provided on the side of the protective lens away from the accommodating cavity; an annular groove is provided in the accommodating groove, and the annular groove is located on the outer periphery of the light-transmitting hole. A sealing member is provided in the annular groove, and the sealing member abuts against one side of the protective lens; the inner side surface of the accommodating groove and the outer peripheral surface of the protective lens are both conical surfaces, and the inner side surface of the accommodating groove and the outer peripheral surface of the protective lens have the same taper. A sealant is provided between the inner peripheral surface of the accommodating groove and the outer peripheral surface of the protective lens, and the sealant extends along the circumference of the protective lens so that the side surface of the accommodating groove and the protective lens are sealed and matched.

2. A laser water guide assembly, characterized in that: include: The containing structure comprises a containing cavity, the containing structure is provided with a light-transmitting hole and a mounting hole, the light-transmitting hole and the mounting hole are distributed on both sides of the containing cavity, and the inner surface of the containing cavity is provided with a water inlet; A protective lens connected to the containing structure, the protective lens is located in the containing cavity and seals the light-transmitting hole; A laser water-guiding nozzle, the laser water-guiding nozzle comprising a nozzle base and a metal glass plate welded together, the nozzle base having a mounting groove on a side facing the protective lens, the metal glass plate being mounted in the mounting groove, the inner side wall of the mounting groove being welded to the outer side of the metal glass plate, the distance between the outer side of the metal glass plate and the inner side of the water-spraying hole being greater than or equal to 100 μm; the mounting groove having a through hole; the metal glass plate having a water-spraying hole, the water-spraying hole penetrating the metal glass plate, the aperture of the water-spraying hole being greater than or equal to 5 μm and less than or equal to 15 μm; the water-spraying hole being coaxially arranged with the through hole, and the minimum aperture of the through hole being greater than or equal to the aperture of the water-spraying hole; The inner surface of the accommodating cavity is provided with an accommodating groove, the accommodating groove is located on the side of the accommodating cavity away from the laser water guide nozzle, the protective lens is installed in the accommodating groove, the side of the protective lens facing the accommodating cavity is provided with an anti-reflection film, and the side of the protective lens away from the accommodating cavity is provided with a hydrophobic film; the accommodating groove is provided with an annular groove, the annular groove is located on the outer periphery of the light-transmitting hole, a sealing member is arranged in the annular groove, and the sealing member abuts against one side of the protective lens; the inner side surface of the accommodating groove and the outer peripheral surface of the protective lens are both conical surfaces, the inner side surface of the accommodating groove and the outer peripheral surface of the protective lens have the same taper, a sealant is arranged between the inner peripheral surface of the accommodating groove and the outer peripheral surface of the protective lens, the sealant extends along the circumference of the protective lens so that the side surface of the accommodating groove is sealed and matched with the protective lens, the laser water guide nozzle is installed in the mounting hole, the water spray hole of the metal glass plate of the laser water guide nozzle is connected with the accommodating cavity, and the water spray hole is connected with the optical path of the light-transmitting hole through the accommodating cavity.

3. The laser water guide assembly according to claim 2, characterized in that: The metal glass plate is a circular ring plate; the outer diameter of the metal glass plate is greater than or equal to 1 mm; the mounting groove is a cylindrical groove, and the inner diameter of the mounting groove is greater than or equal to 1.5 mm; the through hole is a conical hole, and the aperture of the through hole gradually increases in the direction away from the metal glass plate; the minimum aperture of the through hole is greater than or equal to 50 μm.

4. The laser water guide assembly according to claim 2 or 3, characterized in that: It also includes a mounting base, one side of which is provided with a threaded hole, the nozzle base is mounted on the threaded hole, and the outer periphery of the nozzle base is provided with an external thread engaged with the threaded hole.

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