A device control apparatus based on a vacuum gauge

Abstract

The application discloses a device control device based on a vacuum gauge, and relates to the technical field of vacuum gauges. The method comprises the following steps: a vacuum gauge and a control module, two ends of the control module are connected with the vacuum gauge and a controlled device respectively, the control module is used for receiving a pressure signal measured by the vacuum gauge, and the working state of the controlled device is controlled according to the pressure signal and a preset trigger pressure. The application can increase the control function of the vacuum gauge, reduce the manufacturing cost, and be compatible with the old model device.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of vacuum gauges, in particular to a device control device based on a vacuum gauge. BACKGROUND

[0002] Vacuum gauges are used for process pressure monitoring in various semiconductor devices. Vacuum gauges also play a key role in modern semiconductor industry and mechanical control system pressure trigger automation execution, which can monitor and provide accurate pressure data in real time, ensuring that the system operates within the optimal pressure range.

[0003] Traditional vacuum gauges are mainly used for measuring pressure and transmitting pressure signals to control systems or display devices, and their functions are relatively simple. With the upgrading of semiconductor equipment technology, the process flow is more complex, and the control requirements are more stringent, requiring vacuum gauges not only to measure pressure but also to have certain control and processing functions.

[0004] At present, although vacuum gauges with control functions can reduce dependence on external devices. However, such vacuum gauges are integrated and have more complex structures, higher initial costs, and relatively complex maintenance. If either the pressure testing part or the control part is damaged, they cannot work normally. In addition, existing vacuum gauges with control functions are designed as a whole, which are more suitable for new equipment and have poor versatility for old models. SUMMARY

[0005] Therefore, the present application provides a device control device based on a vacuum gauge, which can not only increase the control function of the vacuum gauge but also reduce the manufacturing cost and adapt to old models.

[0006] The present application provides a device control device based on a vacuum gauge, which comprises a vacuum gauge and a control module, both ends of the control module are connected with the vacuum gauge and the controlled device respectively; the control module is used for receiving the pressure signal measured by the vacuum gauge and controlling the working state of the controlled device according to the pressure signal and the preset trigger pressure.

[0007] Optionally, the control module comprises a signal processing circuit and a drive control circuit, the input end of the signal processing circuit is connected with the output end of the vacuum gauge, the output end of the signal processing circuit is connected with the input end of the drive control circuit, and the output end of the drive control circuit is connected with the controlled device; the signal processing circuit is used for processing the pressure signal measured by the vacuum gauge and transmitting the processed pressure signal to the drive control circuit; the drive control circuit is used for controlling the working state of the controlled device according to the processed pressure signal and the preset trigger pressure.

[0008] Optionally, each of the drive control circuits controls at least one controlled device.

[0009] Optionally, the drive control circuit comprises a relay, an input end of the relay being connected with an output end of the signal processing circuit; the relay is used for comparing a pressure value corresponding to the processed pressure signal with a preset trigger pressure, and controlling a contact switch state inside the relay according to a comparison result; and based on the contact switch state, the working state of the controlled device is controlled.

[0010] Optionally, the drive control circuit further comprises a slide rheostat, the slide rheostat being connected with the relay, and being used for adjusting the preset trigger pressure of the relay.

[0011] Optionally, the drive control circuit further comprises a function selection chip, the function selection chip being connected with the relay, and being used for selecting a function of the relay.

[0012] Optionally, the signal processing circuit comprises a triode, a diode and a capacitor, the triode, the diode and the capacitor being respectively used for amplifying, shaping and filtering processing the pressure signal.

[0013] Optionally, the control module is further connected with a machine table; the machine table is used for receiving the pressure signal sent by the control module, and displaying.

[0014] Optionally, the machine table is further used for providing a power supply signal to the control module; and the control module is further used for providing a power supply signal to the vacuum gauge.

[0015] Optionally, the device further comprises a voltage stabilizing module, the voltage stabilizing module being connected with the signal processing circuit, and the voltage stabilizing chip being used for stabilizing the power supply signal provided by the machine table.

[0016] Through the above technical solution, the device control device based on the vacuum gauge provided by the present application grafts the control module on the vacuum gauge, controls the working state of the controlled device based on the pressure signal and the preset trigger pressure, can not only expand the control function of the vacuum gauge, but also reduce the manufacturing cost, and is compatible with the old model device. At the same time, through the control module, the vacuum gauge can also be provided with electrical isolation protection, and when the controlled device works abnormally, the pressure sensor of the vacuum gauge can be prevented from being damaged. Since the control module can be used instead, the maintenance cost is also low.

[0017] The above description is only a summary of the technical solutions of the present application. In order to more clearly understand the technical means of the present application, the specific embodiments of the present application can be implemented according to the content of the specification, and in order to make the above and other purposes, features and advantages of the present application more obvious and easy to understand, the following specific embodiments of the present application are described. Attached Figure Description

[0018] The accompanying drawings, which are included to provide a further understanding of this application and form part of this application, illustrate exemplary embodiments and are used to explain this application, but do not constitute an undue limitation of this application. In the drawings:

[0019] Figure 1 This paper shows a schematic diagram of the structure of a device control device based on a vacuum gauge according to an embodiment of this application;

[0020] Figure 2 This invention provides a schematic diagram of another device control device based on a vacuum gauge, according to an embodiment of this application.

[0021] Figure 3 A schematic diagram of the control module provided in an embodiment of this application is shown;

[0022] Figure 4 The circuit structure diagram inside the control module provided in the embodiment of this application is shown;

[0023] Figure 5 The diagram shows the input and output interfaces of the control module provided in an embodiment of this application. Detailed Implementation

[0024] The present application will be described in detail below with reference to the accompanying drawings and embodiments. It should be noted that, unless otherwise specified, the embodiments and features described in the embodiments of the present application can be combined with each other.

[0025] Existing vacuum gauges are manufactured as integrated systems, resulting in more complex structures, higher initial costs, and relatively complex maintenance. If either the pressure testing or control components are damaged, the gauges will not function properly, and they have poor compatibility with older models.

[0026] To address the aforementioned problems, embodiments of the present invention provide a device control apparatus based on a vacuum gauge, such as... Figure 1 As shown, it includes: a vacuum gauge 1 and a control module 2. The two ends of the control module 2 are connected to the vacuum gauge 1 and the controlled device 3, respectively. The control module 2 is used to receive the pressure signal measured by the vacuum gauge 1 and control the working state of the controlled device 3 according to the pressure signal and the preset trigger pressure.

[0027] Specifically, vacuum gauge 1 can be a thin-film vacuum gauge or other types of vacuum gauges; this embodiment of the invention does not specifically limit the type of vacuum gauge. The preset trigger pressure can be set according to actual business needs. The controlled equipment can be a valve, pump, etc., and the working state of the controlled equipment includes stopping or starting operation.

[0028] Specifically, the vacuum gauge is used for process pressure monitoring of various semiconductor devices, and usually contains a pressure sensor inside. The input interface of the control module 2 is connected with the pressure sensor of the vacuum gauge, and the output interface of the control module 2 is connected with the controlled device 3. When the vacuum gauge monitors the semiconductor device, the pressure sensor inside the vacuum gauge transmits the collected pressure signal to the control module 2, and the control module 2 compares the size of the pressure signal with the preset trigger voltage, and controls the working state of the controlled device according to the comparison result.

[0029] The control module of the embodiment of the present application can adapt to various types and models of vacuum gauges, and has high adaptability. In addition, the modular design of the embodiment of the present application allows flexible configuration and upgrading according to specific needs, and appropriate modules can be selected according to actual needs to reduce initial investment. Only when necessary, a certain module needs to be replaced or upgraded, so as to reduce the overall maintenance and upgrading cost.

[0030] In some embodiments, as shown in Figure 2 The machine table 4 is used for receiving the pressure signal transmitted by the control module 2 and displaying.

[0031] Specifically, the control module 2 transmits the received pressure signal to the machine table 4 for statistics and display.

[0032] In some embodiments, the machine table 4 is also used for providing a power signal to the control module; and the control module 2 is also used for providing a power signal to the vacuum gauge.

[0033] Specifically, the machine table 4 can provide a power signal to the control module 2, and the control module 2 can provide a power signal to the vacuum gauge 1.

[0034] The vacuum gauge of the embodiment of the present application can cut off the power supply when the system pressure is too high or too low, so as to protect the system from damage. For example, the power supply of the pump is automatically cut off when the pressure is too high, so as to avoid excessive work of the pump or potential damage to the system.

[0035] In some embodiments, as shown in Figure 3 The control module 2 includes a signal processing circuit 21 and a drive control circuit 22, the input end of the signal processing circuit 21 is connected with the output end of the vacuum gauge 1, the output end of the signal processing circuit 21 is connected with the input end of the drive control circuit 22, and the output end of the drive control circuit 22 is connected with the controlled device 3; the signal processing circuit 21 is used for processing the pressure signal measured by the vacuum gauge 1, and transmitting the processed pressure signal to the drive control circuit 22; and the drive control circuit 22 is used for controlling the working state of the controlled device according to the processed pressure signal and the preset trigger pressure.

[0036] Each of the drive control circuits 22 controls at least one controlled device 3 to Figure 3 For example, each drive control circuit controls one controlled device.

[0037] The vacuum gauge of the embodiments of the present application can be integrated with other automatic control systems to realize more complex control logic. For example, the operating state of other devices can be automatically adjusted according to different pressure readings to optimize the efficiency of the entire system.

[0038] In some embodiments, the drive control circuit 22 includes a relay, an input end of the relay is connected with an output end of the signal processing circuit 21; the relay is used for comparing the pressure value corresponding to the processed pressure signal with a preset trigger pressure, and controlling the contact switch state inside the relay according to the comparison result; based on the contact switch state, the working state of the controlled device is controlled.

[0039] For example, each drive control circuit includes a relay, and CN2 and CN3 are relays in two drive control circuits. When the relay receives the processed pressure signal, it compares the pressure value corresponding to the processed pressure signal with the preset trigger pressure, and controls the contact switch state according to the comparison result, thereby controlling the working state of the controlled device. For example, if the pressure value corresponding to the processed pressure signal is greater than the preset trigger pressure, the contact switch is open, and the controlled device stops working; on the contrary, if the pressure value corresponding to the processed pressure signal is less than or equal to the preset trigger pressure, the contact switch is closed, and the controlled device starts working. Figure 4 The relay used in the embodiments of the present application can realize electrical isolation to protect the pressure sensor from high voltage or current. Signal isolation is extremely important in electrical systems, which can prevent electrical fault propagation and increase the safety and reliability of the system.

[0040] In some embodiments, the drive control circuit 22 further includes a sliding rheostat, the sliding rheostat is connected with the relay, and is used for adjusting the preset trigger pressure of the relay.

[0041] For example, each drive control circuit includes a relay, and CN2 and CN3 are relays in two drive control circuits. When the relay receives the processed pressure signal, it compares the pressure value corresponding to the processed pressure signal with the preset trigger pressure, and controls the contact switch state according to the comparison result, thereby controlling the working state of the controlled device. For example, if the pressure value corresponding to the processed pressure signal is greater than the preset trigger pressure, the contact switch is open, and the controlled device stops working; on the contrary, if the pressure value corresponding to the processed pressure signal is less than or equal to the preset trigger pressure, the contact switch is closed, and the controlled device starts working.

[0042] Figure 4 In some embodiments, the drive control circuit 22 further includes a function selection chip, the function selection chip is connected with the relay, and is used for selecting the function of the relay.

[0043] In some embodiments, the drive control circuit 22 further includes a function selection chip, the function selection chip is connected with the relay, and is used for selecting the function of the relay.

[0044] ​by Figure 4 For example, SP1 and SP2 are function selection chips in the two-way drive control circuit. These chips allow selection of the relay's function. For instance, one function of the relay is to compare the input pressure signal with a preset trigger pressure. When the input pressure signal is greater than the preset trigger pressure, the relay closes; when the input pressure signal is less than or equal to the preset trigger pressure, the relay remains stationary. Another function is to input two pressure signals A and B for comparison. When pressure signal A is greater than pressure signal B, the relay closes; when pressure signal A is less than or equal to pressure signal B, the relay remains stationary. A third function is to compare the input pressure signal with a preset trigger pressure. When the input pressure signal is less than the preset trigger pressure, the relay closes; when the input pressure signal is greater than or equal to the preset trigger pressure, the relay remains stationary. This embodiment of the invention allows selection of either function one or function three based on actual business needs. This involves comparing the processed input pressure signal with the preset trigger pressure to control the relay's closing state, thereby controlling the operating state of the controlled equipment.

[0045] It should be noted that, in the embodiments of the present invention, the relays of each drive control circuit can select the triggering mode corresponding to function one or function three according to the actual business needs. The triggering mode of each drive control circuit is set separately and is independent of each other.

[0046] The drive control method and preset trigger pressure of this invention embodiment are both adjustable, with complete functions. It can be adjusted according to actual business needs during use, and the adjustment method is convenient.

[0047] In some embodiments, the signal processing circuit includes a transistor, a diode, and a capacitor, wherein the transistor, the diode, and the capacitor are used to amplify, shape, and filter the pressure signal, respectively.

[0048] like Figure 4 As shown, the signal processing circuit includes transistors Q1 and Q2, diode D2, and capacitors C1, C2, C3, and C4, as well as resistors R8, R9, R10, and R11. The transistors, diodes, and capacitors are used for amplification, shaping, and filtering of the pressure signal, respectively. Furthermore, the signal processing circuit also includes capacitors EC1, EC2, and EC3, resistors R1, R2, R3, R4, R5, R6, R7, R12, R13, R14, and R15, and diodes D1, D3, D4, D5, and D6.

[0049] In some embodiments, the device further includes a voltage regulator module connected to the signal processing circuit, the voltage regulator module being used to regulate the power signal provided by the machine tool.

[0050] Specifically, the voltage stabilizing module comprises a voltage stabilizing chip, such as Figure 4 As shown, the voltage stabilizing chip U1 is connected with the signal processing circuit, and the voltage stabilizing chip U1 is used for stabilizing the power supply signal.

[0051] The appearance shape of the control module 2 provided by the embodiment of the present application is as shown in the figure. Figure 5 As shown, the input interface and the output interface of the control module adopt DB15 interfaces respectively, the pin of the input interface can be designed to receive the pressure signal and provide the power supply signal to the vacuum gauge, the pin of the output interface can be designed to output the pressure signal to the machine table 4, output the relay switch signal to the controlled equipment, and receive the power supply signal of the machine table 4. The preset trigger pressure value can be independently set by adjusting the knob.

[0052] The connection mode of the embodiment of the present application is reliable and simple, the control module can be directly inserted on the vacuum gauge, the other end can be directly connected with the machine table cable, and both ends are provided with thread locking design, so that the installation and use are convenient and stable. In addition, the control module of the embodiment of the present application has high overall integration and small volume, and has low requirement on the installation space of the machine table.

[0053] The embodiment of the present application can make the ordinary thin film vacuum gauge increase the function of controlling the state switching of the controlled equipment such as pump and valve by adopting the control module, and expand the application range of the pressure sensor. In addition, the embodiment of the present application also provides electrical isolation protection, so that the pressure sensor is not affected by high voltage or current, and the safety performance of the pressure sensor is improved. At the same time, the embodiment of the present application can adapt to pressure sensors of different models and different ranges, and the replacement and maintenance cost is much lower than that of the pressure sensor, which has better economic applicability.

[0054] Those skilled in the art can understand that the above-mentioned entity device structure provided by the embodiment does not constitute a limitation on the entity device, and can include more or fewer components, or combine certain components, or different component arrangements.

[0055] Those skilled in the art can understand that the modules in the device in the embodiment scenario can be distributed in the device in the embodiment scenario according to the description of the embodiment scenario, or can be changed and located in one or more devices different from the embodiment scenario. The modules of the above-mentioned embodiment scenario can be combined as one module, or can be further split into multiple sub-modules.

[0056] The above-mentioned serial number of the present application is only for description, and does not represent the advantages and disadvantages of the embodiment scenario. The above disclosure is only some specific embodiment scenarios of the present application, but the present application is not limited thereto, and any changes that can be thought of by those skilled in the art should fall within the protection scope of the present application.

Claims

1. A vacuum-gauge-based apparatus control device, characterized by comprising: The device comprises: a vacuum gauge and a control module, two ends of the control module being connected with the vacuum gauge and a controlled device respectively; the control module is used for receiving a pressure signal measured by the vacuum gauge and controlling a working state of the controlled device according to the pressure signal and a preset trigger pressure; wherein the control module comprises a signal processing circuit and a driving control circuit, an input end of the signal processing circuit being connected with an output end of the vacuum gauge, an output end of the signal processing circuit being connected with an input end of the driving control circuit, and an output end of the driving control circuit being connected with the controlled device; the signal processing circuit is used for processing the pressure signal measured by the vacuum gauge and transmitting the processed pressure signal to the driving control circuit; the driving control circuit is used for controlling the working state of the controlled device according to the processed pressure signal and the preset trigger pressure; the driving control circuit comprises a relay, an input end of the relay being connected with an output end of the signal processing circuit; the relay is used for comparing a pressure value corresponding to the processed pressure signal with the preset trigger pressure and controlling a contact switch state in the relay according to a comparison result; the working state of the controlled device is controlled based on the contact switch state.

2. The apparatus of claim 1, wherein, Each driving control circuit controls at least one controlled device.

3. The apparatus of claim 1, wherein, The driving control circuit further comprises a slide rheostat, the slide rheostat being connected with the relay and being used for adjusting the preset trigger pressure of the relay.

4. The apparatus of claim 1, wherein, The driving control circuit further comprises a function selection chip, the function selection chip being connected with the relay and being used for selecting a function of the relay.

5. The apparatus of claim 1, wherein, The signal processing circuit comprises a triode, a diode and a capacitor, the triode, the diode and the capacitor being respectively used for amplifying, shaping and filtering processing the pressure signal.

6. The apparatus of claim 1, wherein, The control module is further connected with a machine table; the machine table is used for receiving the pressure signal transmitted by the control module and displaying the pressure signal.

7. The apparatus of claim 6, wherein, The machine table is further used for providing a power signal to the control module; the control module is further used for providing a power signal to the vacuum gauge.

8. The apparatus of claim 7, wherein, The device further comprises a voltage stabilizing module, the voltage stabilizing module being connected with the signal processing circuit, and the voltage stabilizing module being used for performing voltage stabilizing processing on the power signal provided by the machine table.

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