Drying device

Abstract

The invention discloses a drying device which comprises an upper cavity, a lower cavity, a substrate tray and a rotating mechanism, and the upper cavity is provided with a first locking part; the lower cavity is arranged below the upper cavity, and the lower cavity is provided with a second locking part matched with the first locking part; the substrate tray is arranged in the lower cavity and is used for bearing the substrate; and the rotating mechanism is used for driving at least one of the upper cavity and the lower cavity to rotate, so that the upper cavity and the lower cavity are screwed through the first locking part and the second locking part to form a pressure-resistant closed cavity. According to the invention, the upper cavity and the lower cavity are screwed to form the closed cavity in a screwing manner, so that the substrate is dried in the closed cavity by using the supercritical fluid.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor manufacturing, and in particular to a drying device. Background Art

[0002] In the process of manufacturing integrated circuits, the substrate needs to be dried after wet etching or cleaning process. It is known that a supercritical fluid with zero surface tension can be used to dry the substrate. For example, a substrate covered with IPA (Isopropyl alcohol) is transferred from a cleaning chamber to a drying device, and the upper cavity and the lower cavity of the drying device are closed to form a closed chamber, and then a supercritical fluid is supplied to the closed chamber, so that the IPA on the surface of the substrate is dissolved into the supercritical fluid to form a mixture of IPA and supercritical fluid. As the closed chamber is continuously supplied with supercritical fluid, and the mixture of IPA and supercritical fluid is continuously discharged, the replacement between the supercritical fluid and the IPA covered on the surface of the substrate is completed, and the purpose of removing IPA from the substrate is achieved. Then the supercritical fluid is gasified and discharged, and the closed chamber is opened after the pressure in the closed chamber returns to atmospheric pressure, and finally the substrate after drying is taken out.

[0003] In view of the above description, the closed chamber formed by locking the upper and lower chambers should be able to maintain the high pressure required during the substrate drying process to keep the supercritical fluid in a supercritical state. Therefore, how to lock the upper and lower chambers to form a pressure-resistant closed chamber is particularly important. Summary of the invention

[0004] The purpose of the present invention is to solve the problem in the prior art of how to lock the upper cavity and the lower cavity to form a closed chamber.

[0005] In order to solve the above problems, an embodiment of the present invention provides a drying device, comprising:

[0006] The upper cavity has a first locking portion;

[0007] A lower cavity is disposed below the upper cavity, and has a second locking portion adapted to match the first locking portion;

[0008] A substrate tray is disposed in the lower cavity and is used to carry the substrate;

[0009] The rotating mechanism is used to drive at least one of the upper cavity and the lower cavity to rotate, so that the upper cavity and the lower cavity are tightened through the first locking part and the second locking part to form a pressure-resistant closed chamber.

[0010] The drying device provided by the present invention has a first locking part on the upper cavity and a second screwing part matched with the first locking part on the lower cavity. After the upper cavity and the lower cavity are close to each other, at least one of the upper cavity and the lower cavity is driven to rotate by a rotating mechanism, so that the first locking part and the second locking part are locked with each other, and the upper cavity and the lower cavity form a pressure-resistant closed chamber to meet the high pressure requirements required in the substrate drying process, so that the supercritical fluid is in a supercritical state to dry the substrate.

[0011] Other features and corresponding beneficial effects of the present invention are described in the latter part of the specification, and it should be understood that at least part of the beneficial effects become obvious from the description in the specification of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 This is a schematic diagram of the three-dimensional structure of the drying device provided in Example 1 of the present invention;

[0013] Figure 2 This is a schematic diagram of the three-dimensional structure of the drying device provided in Example 1 of the present invention when the sealed chamber is opened;

[0014] Figure 3 It is a schematic diagram of the three-dimensional structure of the lower cavity and the upper cavity of the drying device provided in Example 1 of the present invention when they are closed but not tightened;

[0015] Figure 4 This is a schematic diagram of the three-dimensional structure of the lower cavity and the upper cavity of the drying device provided in Example 1 of the present invention after being screwed together;

[0016] Figure 5 It is a partial schematic diagram of the drying device provided in Example 1 of the present invention;

[0017] Figure 6 It is a schematic cross-sectional structure diagram of the lower cavity and the upper cavity of the drying device provided in Example 1 of the present invention after being screwed together;

[0018] Figure 7 It is a schematic diagram of the three-dimensional structure of the upper cavity provided in Example 1 of the present invention;

[0019] Figure 8 It is a schematic diagram of the three-dimensional structure of the lower cavity provided in Example 1 of the present invention;

[0020] Fig. 9 It is a schematic diagram of the three-dimensional structure of the lifting mechanism, the rotating mechanism and the supporting member provided in Example 1 of the present invention;

[0021] Fig.10 It is a structural schematic diagram of the lifting mechanism and the rotating mechanism provided in Example 2 of the present invention;

[0022] Fig.11It is a schematic diagram of the three-dimensional structure of the lower cavity and the upper cavity of the drying device provided in Example 2 of the present invention after being screwed together;

[0023] Fig.12 It is a bottom view structural schematic diagram of the lower cavity provided in Example 2 of the present invention;

[0024] Fig.13 This is a schematic diagram of the three-dimensional structure of the lower cavity and the upper cavity of the drying device provided in Example 3 of the present invention after being screwed together;

[0025] Fig.14 It is a structural schematic diagram of the lifting mechanism and the rotating mechanism provided in Example 4 of the present invention;

[0026] Fig.15 A schematic structural diagram of the lifting mechanism and the rotating mechanism provided in Embodiment 4 of the present invention from another perspective; and

[0027] Fig.16 This is a schematic diagram of the three-dimensional structure of the drying device provided in Example 4 of the present invention when the closed chamber is opened. DETAILED DESCRIPTION

[0028] The following specific embodiments illustrate the implementation of the present invention, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. Although the description of the present invention will be introduced in conjunction with the preferred embodiment, this does not mean that the features of this invention are limited to this implementation. On the contrary, the purpose of introducing the invention in conjunction with the implementation is to cover other options or modifications that may extend based on the claims of the present invention. In order to provide a deep understanding of the present invention, the following description will include many specific details. The present invention can also be implemented without using these details. In addition, in order to avoid confusion or blurring the focus of the present invention, some specific details will be omitted in the description. It should be noted that the embodiments of the present invention and the features in the embodiments can be combined with each other without conflict.

[0029] It should be noted that in this specification, similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further defined and explained in the subsequent drawings.

[0030] The technical solution of the present invention will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0031] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0032] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0033] In order to make the objectives, technical solutions and advantages of the present invention more clear, the embodiments of the present invention will be further described in detail below with reference to the accompanying drawings.

[0034] Embodiment 1:

[0035] Combination Figures 1 to 5 , this embodiment 1 provides a drying device for drying a cleaned substrate. In this embodiment 1, the surface of the cleaned substrate is covered with a layer of IPA (isopropyl alcohol).

[0036] The drying device includes a frame 100, an upper cavity 200, a lower cavity 300, a substrate tray 400, a lifting mechanism 500 and a rotating mechanism 600. The upper cavity 200 is fixed to the frame 100 and has a first locking portion 210. The lower cavity 300 is arranged below the upper cavity 200 and has a second locking portion 310 for matching with the first locking portion 210. The substrate tray 400 is arranged in the lower cavity 300 for carrying a substrate. Driven by the lifting mechanism 500, the lower cavity 300 moves relative to the upper cavity 200 in the vertical direction, and the rotating mechanism 600 is used to drive the lower cavity 300 to rotate around the axial direction O of the lower cavity 300, for example, rotating in the clockwise direction R1, so that the first locking portion 210 and the second locking portion 310 are locked with each other, and the upper cavity 200 and the lower cavity 300 are tightened to form a closed chamber 233 (combined with reference Figure 6), to dry the substrate covered with IPA. The rotation mechanism 600 drives the lower chamber 300 to rotate at an angle ranging from 10° to 40°, preferably, the rotation mechanism 600 drives the lower chamber 300 to rotate at an angle ranging from 20° to 30°.

[0037] When the sealed chamber 233 is to be opened, the rotating mechanism 600 first drives the lower chamber 300 to rotate around the axis direction O of the lower chamber 300, for example, in the counterclockwise direction R2, so that the first locking portion 210 and the second locking portion 310 are mutually unlocked, that is, separated from each other. Then, the lifting mechanism 500 drives the lower chamber 300 to move downward in the vertical direction, so that the lower chamber 300 and the upper chamber 200 are separated from each other, and the sealed chamber 233 is opened.

[0038] In some embodiments, the lower cavity 300 may be fixed to the frame, and the lifting mechanism drives the upper cavity 200 to move in the vertical direction. When the upper cavity 200 and the lower cavity 300 are closed, the rotating mechanism 600 drives the upper cavity 200 to rotate around the axis direction of the upper cavity 200. In some embodiments, two lifting mechanisms and two rotating mechanisms may be provided, wherein one lifting mechanism drives the upper cavity 200 to move in the vertical direction, and the other lifting mechanism drives the lower cavity 300 to move in the vertical direction, so that the upper cavity 200 and the lower cavity 300 move relative to each other in the vertical direction. One rotating mechanism drives the upper cavity 200 to rotate in a first direction, and the other rotating mechanism drives the lower cavity 300 to rotate in a second direction, the first direction being opposite to the second direction, so that the upper cavity 200 and the lower cavity 300 rotate simultaneously and tighten to form a closed chamber.

[0039] Combination Figure 7 and Figure 8 The drying device provided in the present application has an upper cavity 200 and a lower cavity 300 which are respectively circular in shape, a hollow portion of the closed chamber 233 is circular, a first locking portion 210 is integrally formed with the upper cavity 200, and a second locking portion 310 is integrally formed with the lower cavity 300.

[0040] Specifically, Figure 7 As shown, the first locking portion 210 of the upper cavity 200 includes a plurality of upper teeth, and the plurality of upper teeth are evenly spaced and distributed along the outer circumference of the upper cavity 200. Figure 8As shown, the second locking portion 310 includes a plurality of lower teeth, and the plurality of lower teeth are evenly spaced and distributed along the circumferential direction of the lower cavity 300, and the plurality of upper teeth are matched with the plurality of lower teeth and correspond one to one. Among them, the plurality of lower teeth extend radially outward along the side wall of the lower cavity 300 in a convex shape, and the upper surface of the lower teeth is flush with the upper surface of the lower cavity 300 and is lower than the upper surface of the substrate tray 400. The plurality of upper teeth extend downward along the side wall of the upper cavity 200, and are provided with grooves 211 for matching with the lower teeth. The upper teeth are in an "L" shape. When the upper teeth and the lower teeth are locked with each other (such as Figure 5 As shown), a closed chamber 233 is formed between the upper chamber 200 and the lower chamber 300 (as shown Figure 6 When the sealed chamber 233 is to be opened, the lower chamber 300 is first rotated to rotate the lower teeth out of the grooves 211 of the upper teeth, that is, the lower teeth and the upper teeth are unlocked from each other, and then the lower chamber 300 is moved downward in the vertical direction to separate from the upper chamber 200 to open the sealed chamber 233. Figure 2 As shown in FIG. 1 , the distance between the upper cavity 200 and the lower cavity 300 only needs to meet the requirements for taking and placing the substrate.

[0041] In other embodiments, the shapes of the upper teeth and the lower teeth can be interchangeable, that is, the upper teeth can be arranged to extend radially outward along the upper cavity 200 in a convex shape, and the lower teeth are arranged to form grooves that match the upper teeth. The upper cavity 200 and the lower cavity 300 are screwed together by the upper teeth and the lower teeth to form a closed chamber.

[0042] In the drying device provided in the present application, the outer shapes of the upper cavity 200 and the lower cavity 300 are preferably circular, and the plurality of upper teeth and the plurality of lower teeth are evenly spaced and distributed along the circumference of the upper cavity 200 and the lower cavity 300, respectively. Therefore, the upper cavity 200 and the lower cavity 300 in the present application are subjected to more uniform force under high temperature and high pressure conditions, and as a pressure vessel that is frequently opened and closed, it has a longer service life and is more in line with the design standards of pressure vessels.

[0043] In addition, in the present application, a plurality of upper teeth are integrally formed with the upper cavity 200, a plurality of lower teeth are integrally formed with the lower cavity 300, and the locking structure of the upper teeth and the lower teeth is simple, making the locking process simple. For the sealed chamber 233 of the same volume, the locking structure of the upper teeth and the lower teeth also has the advantage of making the overall weight of the upper cavity 200 and the lower cavity 300 lighter after tightening.

[0044] See also Fig. 9The lifting mechanism 500 includes a lifting platform 510, a driving device 520 and a transmission device. The driving device 520 drives the lifting platform 510 to move up and down in the vertical direction through the transmission device. The transmission device includes a screw rod 531, a synchronous pulley and a synchronous belt 532. The driving device 520 can be a servo motor. Specifically, the output end of the servo motor is connected to a synchronous pulley, and is connected to the synchronous pulley at one end of the screw rod 531 through the synchronous belt 532. The other end of the screw rod 531 is connected to the lifting platform 510. The servo motor drives the screw rod 531 to move linearly through the synchronous pulley and the synchronous belt 532 to realize the lifting and lowering of the lifting platform 510.

[0045] The rotating mechanism 600 includes a first rotating mechanism 610 and a second rotating mechanism 620. The first rotating mechanism 610 is disposed on the lifting mechanism 500, and the second rotating mechanism 620 is used to drive the first rotating mechanism 610 to drive the lower cavity 300 to rotate. Specifically, the first rotating mechanism 610 includes a guide rail 611, a slider 612 and a driven gear 613 (combined with reference Figure 8 The guide rail 611 is fixed to the lifting platform 510 of the lifting mechanism 500 and extends around the axis direction O of the lower cavity 300. The slider 612 is slidably connected to the guide rail 611, and the slider 612 is also fixedly connected to the bottom of the lower cavity 300 (see FIG. 2 ). Figure 4 ). The slider 612 can be fixed to the lower cavity 300 by a fixing member, such as a screw or a bolt. Fig. 9 As shown, the first rotating mechanism 610 includes two symmetrically arranged guide rails 611, each guide rail 611 is provided with two sliders 612, and each slider 612 is fixedly connected to the bottom of the lower cavity 300. The guide rails 611 are arc-shaped, and limit blocks can be installed at both ends of each guide rail 611 to limit the sliders 612, so that the rotation angle of the lower cavity 300 is limited within a predetermined rotation angle range. In other embodiments, the guide rails 611 can also be in a full circle, which can meet the rotation direction and rotation angle of the lower cavity 300.

[0046] Combination Figure 8 and Fig. 9 , the driven gear 613 is fixedly connected to the lower cavity 300. The driven gear 613 is in the shape of an arc, and its circumference is sufficient to allow the lower cavity 300 to rotate by a predetermined rotation angle. Fig. 9As shown, the second rotating mechanism 620 includes a rotating driving part 621 and a driving gear 622. The rotating driving part 621 includes a servo motor 6211 and a reducer 6212. The servo motor 6211 drives the driving gear 622 to rotate through the reducer 6212, and the driving gear 622 drives the driven gear 613 to rotate through meshing. Since the driven gear 613 is fixedly connected to the lower cavity 300, and the lower cavity 300 is also fixedly connected to the slider 612, when the driven gear 613 rotates, the lower cavity 300 on the slider 612 is driven to rotate along the direction of the guide rail 611, so that the lower cavity 300 and the upper cavity 200 are tightened to form a closed chamber.

[0047] like Fig. 9As shown, the rotating mechanism 600 also includes a fixed frame 630, a mounting plate 640 and an adjustment assembly. The rotating driving part 621 and the driving gear 622 of the second rotating mechanism 620 are fixed to the mounting plate 640, and the mounting plate 640 is movably mounted to the fixed frame 630 by a fastener 641. The fixed frame 630 is fixedly connected to the lifting platform 510 of the lifting mechanism 500. The mounting plate 640 and the driving gear 622 are located above the fixed frame 630, and the rotating driving part 621 is located below the fixed frame 630, and is connected to the driving gear 622 through the fixed frame 630 and the mounting plate 640. When the lifting platform 510 moves up and down in the vertical direction, the fixed frame 630 carries the rotating driving part 621 and the driving gear 622 and rises and falls simultaneously with the lifting platform 510. During this lifting process, the rotating driving part 621 is in a suspended state. The adjustment assembly and the mounting plate 640 are mounted on the same mounting surface of the fixing frame 630. The adjustment assembly is used to adjust the displacement of the mounting plate 640 on the fixing frame 630 so that the center distance between the driving gear 622 and the driven gear 613 is reduced or increased. The adjustment assembly includes an adjustment block 651 and a screw (not shown in the figure). A threaded hole 652 is provided in the adjustment block 651, and the screw is threadedly connected with the threaded hole 652. When it is necessary to reduce the center distance between the driving gear 622 and the driven gear 613, the fastener 641 is loosened to make the mounting plate 640 movable, and then the screw in the adjustment block 651 is rotated to increase the length of the screw extending out of the adjustment block 651, so that the screw pushes against the mounting plate 640, and then the mounting plate 640 carries the driving gear 622 and the rotation drive part 621 together to move toward the driven gear 613 fixed to the lower cavity 300, so as to reduce the center distance between the driving gear 622 and the driven gear 613, until the driving gear 622 is meshed with the driven gear 613. When it is necessary to increase the center distance between the driving gear 622 and the driven gear 613, the fastener 641 on the mounting plate 640 is loosened to make the mounting plate 640 movable, and then the screw in the adjustment block 651 is turned to return the screw to the predetermined position in the adjustment block 651, and then the mounting plate 640 is manually pulled back to make the mounting plate 640 move with the driving gear 622 and the rotation drive unit 621 away from the driven gear 613 to increase the center distance between the driving gear 622 and the driven gear 613. It should be noted that when the mounting plate 640 moves on the fixing frame 630, the fixing frame 630 is provided with a guide groove for the mounting plate 640 to move with the rotation drive unit 621 and the driving gear 622.

[0048] In addition, if Figure 2As shown, the drying device also includes two groups of symmetrically arranged support members 700, which can be lifted and lowered and moved horizontally, and are used to lift the substrate and place it on the substrate tray 400, or remove the substrate from the substrate tray 400. The two groups of support members 700 are respectively provided with weighing sensors 710, which are used to weigh the substrate to determine whether the amount of IPA on the surface of the substrate needs to be supplemented. If supplementation is required, the IPA supplement device of the drying device can be used to supplement the IPA on the surface of the substrate. The IPA supplement device can use the IPA supplement device in the existing drying device.

[0049] The drying device further includes a first fluid supply pipe 810, a second fluid supply pipe 820, a fluid discharge pipe 830, and a vacuum line 840. The first fluid supply pipe 810 and the vacuum line 840 are disposed at intervals on the top wall of the upper cavity 200, and the second fluid supply pipe 820 and the fluid discharge pipe 830 are disposed on two opposite side walls of the upper cavity 200. The vacuum line 840 is used to pass through the vacuum groove 240 of the upper cavity 200 (combined with reference to Figure 7 ) for vacuuming. The substrate tray 400 of the lower chamber 300 is surrounded by two annular grooves 320 and 330 for placing sealing rings (see reference Figure 8 When the upper cavity 200 and the lower cavity are screwed together to form a closed chamber, the vacuum groove 240 is located between the two annular grooves 320 and 330 .

[0050] The working process of the drying device provided in this embodiment to dry the substrate is as follows:

[0051] When the drying device starts working, the two sets of support members 700 are first raised from the initial position to a predetermined height, and then the two sets of support members 700 move toward the substrate tray 400 to the minimum stroke; then the robot transfers the substrate to between the upper cavity 200 and the lower cavity 300, and places the substrate on the support member 700 and withdraws. The weighing sensor 710 on the support member 700 weighs the substrate to detect the amount of IPA on the surface of the substrate. After that, the two sets of support members 700 carry the substrate and descend to the initial position, place the substrate on the substrate tray 400, move backward to the maximum stroke, and withdraw from the lower cavity 300.

[0052] Then the lifting mechanism 500 lifts the lower cavity 300 and moves it upward in the vertical direction until the lower cavity 300 and the upper cavity 200 are closed, and the rotating mechanism 600 drives the lower cavity 300 to rotate a predetermined angle, so that the upper cavity 200 and the lower cavity 300 are locked by the upper teeth and the lower teeth to form a closed chamber 233. In this embodiment, because the slider 612 and the lower cavity 300 are fixedly connected by a fixing member, after the upper cavity 200 and the lower cavity 300 are tightened to form the closed chamber 233, the lifting platform 510 of the lifting mechanism 500 can be kept in the lower cavity 300 during the operation of the drying device.

[0053] After the closed chamber 233 is formed, the vacuum groove 240 of the upper cavity 200 is evacuated through the vacuum line 840. When the pressure in the vacuum line 840 is detected to be within the target pressure range, it means that the sealing is completed and supercritical fluid can be supplied to the closed chamber 233.

[0054] Open the first fluid supply pipe 810 to supply supercritical fluid from the top of the closed chamber 233. As the supercritical fluid is supplied, the air and fluid inside the closed chamber 233 are discharged from the closed chamber 233 through the fluid discharge pipe 830, so that all the air inside the closed chamber 233 is replaced by fluid, and the supply amount of supercritical fluid is continuously increased, so that the pressure inside the closed chamber 233 rises to above the critical pressure.

[0055] After the sealed chamber 233 reaches a supercritical state, the first fluid supply pipe 810 is closed to stop supplying the supercritical fluid from the top of the sealed chamber 233. The supercritical fluid is supplied from one side of the sealed chamber 233 through the second fluid supply pipe 820, and the supercritical fluid dries the substrate inside the sealed chamber 233. At this time, the fluid discharged from the fluid discharge pipe 830 is the supercritical fluid.

[0056] After the drying process is completed, the second fluid supply pipe 820 is closed, and the fluid inside the closed chamber 233 is continuously discharged through the fluid discharge pipe 830, which reduces the internal pressure of the closed chamber 233, so that the supercritical fluid inside the closed chamber 233 becomes gas, and is discharged from the closed chamber 233 through the fluid discharge pipe 830, and the vacuum line 840 is closed, and the vacuum groove 240 of the upper cavity 200 is kept in a vacuum state. When the pressure in the closed chamber 233 reaches atmospheric pressure, the rotating mechanism 600 drives the lower cavity 300 to rotate in the opposite direction by a predetermined angle, and the upper teeth and the lower teeth unlock each other. The lifting mechanism 500 drives the lower cavity 300 to move downward in the vertical direction, and the closed chamber 233 is opened.

[0057] Finally, the two groups of support members 700 move toward each other from the maximum stroke to the minimum stroke, and the substrate after the drying process is lifted from the substrate tray 400, and finally the drying device is taken out by the robot.

[0058] In this embodiment, the supercritical fluid is supercritical carbon dioxide.

[0059] Embodiment 2:

[0060] Combination Figures 10 to 12 , this embodiment 2 provides another drying device. The difference between this embodiment 2 and embodiment 1 is that the structure of the driven gear is different, and the connection relationship between the driven gear, the lower cavity and the slider is different.

[0061] Combination Fig.10 and Fig.11 In this embodiment, the driven gear 613A of the first rotating mechanism 610A is in the shape of a disc. The driven gear 613A connects the slider 612A and the lower cavity 300A, the bottom of the driven gear 613A is fixedly connected to the slider 612A, and the top of the driven gear 613A is detachably connected to the lower cavity 300A. Fig.10 As shown, the driven gear 613A includes a gear body 6101A, an upper support plate 6102A and a lower support plate 6103A. The upper support plate 6102A is fixed to the upper side of the gear body 6101A. The lower support plate 6103A is fixed to the lower side of the gear body 6101A and is fixedly connected to the slider 612A. A plurality of fixing pins 6104A are provided on the top of the upper support plate 6102A, and the driven gear 613A supports the lower cavity 300A through the fixing pins 6104A. The bottom of the lower cavity 300A is provided with a fixing groove 340A (combined with reference Fig.12 ), the fixing groove 340A is matched with the fixing pin 6104A. The fixing pin 6104A is inserted into the fixing groove 340A at the bottom of the lower cavity 300A, so that the lower cavity 300A is installed on the upper supporting plate 6102A, so that the driven gear 613A drives the lower cavity 300 to rotate and is tightened with the upper cavity 200 to form a closed chamber.

[0062] When the second rotating mechanism 620A drives the driven gear 613A to rotate, the driven gear 613A fixed on the slider 612A drives the lower cavity 300A to rotate together, so that the lower cavity 300A and the upper cavity 200A are tightened to form a closed chamber (please refer to the embodiment 1). Figure 6After the closed chamber is formed, the lifting platform 510A moves downward, the fixing pin 6104A is disengaged from the fixing groove 340A at the bottom of the lower chamber 300A, and the lifting platform 510A and the rotating mechanism 600A are withdrawn from the lower chamber 300A, so that when the substrate is dried in the closed chamber, the deformation force generated by the upper chamber 200A and the lower chamber 300A will not be applied to the rotating mechanism 600A and the lifting mechanism 500A. After the lifting platform 510A and the rotating mechanism 600A are withdrawn from the lower chamber 300A, the upper chamber 200A is still fixed on the frame (please refer to the frame 100 in Example 1), and the lower chamber 300A is in a suspended state, suspended on the upper chamber 200A.

[0063] Embodiment 3:

[0064] See also Fig.13 , this embodiment 3 provides another drying device. The difference between this embodiment 3 and embodiment 2 is that: the lifting mechanism includes a six-degree-of-freedom robot platform.

[0065] In this embodiment, the six-degree-of-freedom robot platform includes an upper platform 510B, a lower platform 541B, a telescopic cylinder 542B and a Hooke's hinge 543B. The second rotating mechanism 620B is fixed to the upper platform 510B through a fixed frame 630B, and rises and falls synchronously with the upper platform 510B. The arrangement of the second rotating mechanism 620B on the fixed frame 630B is the same as the arrangement of the second rotating mechanism 620 on the fixed frame 630 in Example 1, which will not be repeated here.

[0066] The guide rail 611B of the first rotating mechanism 610B is fixed to the upper platform 510B. In some embodiments, the guide rail 611B can be fixed to the upper platform 510B through a base 670B. In some embodiments, the guide rail 611B can be directly fixed to the upper platform 510B. The upper platform 510B and the lower platform 541B are connected by six telescopic cylinders 542B and a Hooke's hinge 543B. The Hooke's hinge 543B is located at the connection between the telescopic cylinder 542B and the upper platform 510B and the lower platform 541B. Through the coordinated action of the six telescopic cylinders 542B, the lower cavity 300B is lifted and lowered in the vertical direction. After the lower cavity 300B is tightened with the upper cavity 200B to form a closed chamber, the six-degree-of-freedom robot and the rotating mechanism 600B evacuate the lower cavity 300B.

[0067] Embodiment 4:

[0068] Combination Figures 14 to 16 , this embodiment 4 provides another drying device. The difference between this embodiment 4 and embodiment 2 is that the structures and settings of the first rotating mechanism and the lifting mechanism are different, and the fixing method between the second rotating mechanism and the lifting mechanism is different.

[0069] In this embodiment, the first rotating mechanism 610C of the rotating mechanism includes a driven gear 613C, and the driven gear 613C is cylindrical. The second rotating mechanism 620C of the rotating mechanism includes a rotating driving part 621C and a driving gear 622C. The rotating driving part 621C includes a servo motor and a reducer. The servo motor drives the driving gear 622C to rotate through the reducer, and the driving gear 622C drives the driven gear 613C to rotate through meshing.

[0070] The structure and arrangement of the driven gear 613C will be described below in conjunction with the structure and arrangement of the lifting mechanism 500C.

[0071] Combination Fig.14 and Fig.15 The lifting mechanism 500C is a gear screw transmission mechanism, which includes a lifting platform 510C, a driving device 520C, a lifting driving wheel 521C, a lifting driven wheel 522C, a screw 523C, a nut 524C and a base 525C. The driving device 520C is connected to the lifting driving wheel 521C, the lifting driving wheel 521C and the lifting driven wheel 522C are meshed with each other, the lifting driven wheel 522C is fixedly connected to the screw 523C, the screw 523C is threadedly connected to the nut 524C, the nut 524C is fixedly connected to the lower part of the driven gear 613C, the upper part of the driven gear 613C is fixed with the lifting platform 510C, the lifting platform 510C has a fixing pin 511C, and the fixing pin 511C is inserted into the fixing groove at the bottom of the lower cavity 300C (please refer to Example 2) Fig.12 The fixing groove 340A) is provided so that the lower chamber 300C is fixed on the lifting platform 510C (combined with reference Fig.16 In addition, the second rotating mechanism 620C is installed on the fixing frame 630C, and the fixing frame 630C is fixed to the base 525C. The second rotating mechanism 620C does not rise or fall with the lifting platform 510C.

[0072] The working principle of the gear screw transmission mechanism and the second rotating mechanism 620C driving the lower cavity 300C to rise and rotate is described below:

[0073] When the gear-screw transmission mechanism drives the lower cavity 300 to rise, the driving device 520C of the gear-screw transmission mechanism drives the lifting active wheel 521C to rotate, and the lifting active wheel 521C drives the lifting driven wheel 522C to rotate through engagement, the screw 523C rotates with the lifting driven wheel 522C, and the driven gear 613C moves linearly upward on the screw 523C along with the nut 524C, and the lifting platform 510C rises with the driven gear 613C.

[0074] When the lower cavity 300C on the lifting platform 510C contacts the upper cavity 200C, the rotating driving part 621C of the second rotating mechanism 620C drives the driving gear 622C to rotate, and the driving gear 622C drives the driven gear 613C to rotate through meshing, and the lifting platform 510C rotates with the driven gear 613C, and drives the lower cavity 300C to rotate, so that the first locking part 210C and the second locking part 310C are locked with each other, and the upper cavity 200C and the lower cavity 300C are locked to form a closed chamber. Afterwards, the gear screw transmission mechanism drives the lifting mechanism 500C to descend and evacuate the lower cavity 300C.

[0075] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A drying device, characterized in that: include: The upper cavity has a first locking portion; A lower cavity is disposed below the upper cavity, and the lower cavity has a second locking portion adapted to match the first locking portion; A substrate tray, disposed in the lower cavity, for carrying a substrate; The rotating mechanism is used to drive at least one of the upper cavity and the lower cavity to rotate, so that the upper cavity and the lower cavity are tightened through the first locking part and the second locking part to form a pressure-resistant closed chamber.

2. The drying device according to claim 1, characterized in that: The first locking portion includes a plurality of upper teeth, which are spaced apart along the circumferential direction of the upper cavity; the second locking portion includes a plurality of lower teeth, which are spaced apart along the circumferential direction of the lower cavity; the plurality of upper teeth correspond to and fit with the plurality of lower teeth respectively.

3. The drying device according to claim 2, characterized in that: The plurality of lower teeth extend outwardly along the radial direction of the lower cavity in a convex shape, and the plurality of upper teeth are provided with grooves for matching with the plurality of lower teeth.

4. The drying device according to claim 1, characterized in that: The rotation mechanism drives at least one of the upper cavity and the lower cavity to rotate at an angle ranging from 10° to 40°.

5. The drying device according to claim 1, characterized in that: The upper cavity and the lower cavity are circular in shape, and the hollow portion of the sealed chamber is circular.

6. The drying device according to claim 1, characterized in that: The first locking portion is integrally formed with the upper cavity, and the second locking portion is integrally formed with the lower cavity.

7. The drying device according to claim 1, characterized in that: Also includes: A lifting mechanism, used to drive at least one of the upper cavity and the lower cavity to move in a vertical direction, so that the upper cavity and the lower cavity move relative to each other; When the upper cavity and the lower cavity are close to each other, the rotating mechanism drives at least one of the upper cavity and the lower cavity to rotate, so that the upper cavity and the lower cavity are tightened by the first locking part and the second locking part to form the closed chamber.

8. The drying device according to claim 7, characterized in that: The lifting mechanism is used to drive the lower cavity to move in a vertical direction, and the rotating mechanism is used to drive the lower cavity to rotate.

9. The drying device according to claim 8, characterized in that: The lifting mechanism comprises a lifting platform, a driving device and a transmission device. The lifting platform is used to lift the lower cavity, and the driving device drives the lifting platform to move in a vertical direction through the transmission device.

10. The drying device according to claim 8, characterized in that: The lifting mechanism includes a six-degree-of-freedom robot platform or a gear screw transmission mechanism.

11. The drying device according to claim 8, characterized in that: The rotating mechanism comprises: A first rotating mechanism, disposed on the lifting mechanism; The second rotating mechanism is used to drive the first rotating mechanism to drive the lower cavity to rotate.

12. The drying device according to claim 11, characterized in that: The first rotating mechanism comprises: A guide rail fixed to the lifting mechanism; A slider, slidably connected to the guide rail and fixedly connected to the lower cavity; A driven gear fixedly connected to the lower cavity; When the second rotating mechanism drives the first rotating mechanism to drive the lower cavity to rotate, the second rotating mechanism drives the driven gear to rotate, and the driven gear drives the lower cavity on the sliding block to rotate along the direction of the guide rail.

13. The drying device according to claim 11, characterized in that: The first rotating mechanism comprises: A guide rail fixed to the lifting mechanism; A slider, slidably connected to the guide rail; A driven gear connected between the slider and the lower cavity; When the second rotating mechanism drives the first rotating mechanism to drive the lower cavity to rotate, the second rotating mechanism drives the driven gear to rotate, and the driven gear drives the lower cavity to rotate along the direction of the guide rail on the sliding block.

14. The drying device according to claim 13, characterized in that: The bottom of the driven gear is fixedly connected to the sliding block, and the top of the driven gear is provided with a fixing pin; The bottom of the lower cavity is provided with a fixing groove; wherein, The fixing pin is used to be inserted into the fixing groove so that the lower cavity is mounted on the driven gear.

15. The drying device according to claim 11, characterized in that: The first rotating mechanism comprises: The driven gear is rotatably arranged on the lifting mechanism, and the second rotating mechanism drives the lower cavity to rotate by driving the driven gear.

16. The drying device according to any one of claims 12 to 15, characterized in that: The second rotating mechanism includes a rotating driving part and a driving gear. The rotating driving part drives the driving gear to rotate, so that the driving gear drives the driven gear to rotate.

17. The drying device according to claim 16, characterized in that: The rotating mechanism further comprises a fixing frame, the fixing frame is fixedly connected to the lifting mechanism, and the rotating driving part and the driving gear are mounted on the fixing frame together.

18. The drying device according to claim 17, characterized in that: The rotating mechanism also includes: A mounting plate, movably mounted on the fixing frame, wherein the rotary drive unit and the driving gear are mounted on the fixing frame through the mounting plate; The adjusting component reduces or increases the center distance between the driving gear and the driven gear by adjusting the displacement of the mounting plate on the fixing frame.

Images