Clamp for wafer cassette and handling robot

Abstract

The present application relates to the technical field of clamps, and discloses a clamp for a wafer box and a carrying robot, the clamp comprising a mounting bracket, a clamp jaw assembly and a driving assembly, the clamp jaw assembly comprising two clamp jaws, the driving assembly comprising a driving motor and two driving blocks, the driving motor being arranged on the mounting bracket, the two driving blocks being slidingly arranged on the mounting bracket, each clamp jaw being connected to each driving block in a one-to-one correspondence, the driving motor being used to drive the two driving blocks to move in a direction of approaching each other or moving away from each other, so that the two clamp jaws clamp or release the wafer box; wherein the two clamp jaws are each provided with a first clamping portion and a second clamping portion, the first clamping portion being used to clamp a first side wall of the wafer box when the opening of the wafer box faces a first direction, and the second clamping portion being used to clamp a second side wall of the wafer box when the opening of the wafer box faces a second direction. The present application aims to solve the technical problem of clamping wafer boxes in various position states, so as to improve the applicability of the clamp.

Description

Technical Field

[0001] This invention relates to the field of clamping technology, and more particularly to a clamping device and handling robot for wafer cassettes. Background Technology

[0002] In the wafer fabrication process, wafer cassettes serve as wafer carriers, holding multiple wafers and acting as a place and transporter for them.

[0003] In related technologies, handling robots are used to grip or place wafer cassettes. However, in practical applications, it is often necessary to design handling robots capable of gripping wafer cassettes in various positions, which requires the gripper of the handling robot to be very large, thus limiting the gripping space. Summary of the Invention

[0004] The purpose of this invention is to provide a fixture and a handling robot for wafer cassettes, in order to solve the technical problem that the fixture of the handling robot needs to be designed to be very large and the gripping space is limited in order to grip wafer cassettes stored in various positions.

[0005] To achieve the above objectives, the present invention provides a fixture for a wafer cassette, comprising: a mounting bracket, a gripper assembly, and a drive assembly. The gripper assembly includes two grippers, and the drive assembly includes a drive motor and two drive blocks. The drive motor is mounted on the mounting bracket, and the two drive blocks are slidably mounted on the mounting bracket. Each gripper is connected to each drive block in a corresponding manner. The drive motor drives the two drive blocks to move in directions that are close to or away from each other, so that the two grippers can grip or release the wafer cassette.

[0006] Each of the two grippers has a first clamping part and a second clamping part on its facing side. The first clamping part is used to clamp the first sidewall of the wafer cassette when the opening faces a first direction, and the second clamping part is used to clamp the second sidewall of the wafer cassette when the opening faces a second direction.

[0007] Optionally, a clamping frame is provided below the clamping positions of the two grippers. The clamping frame is connected and fixed to the mounting bracket. The clamping frame is used to clamp the wafer cassette after the fixture is flipped.

[0008] Optionally, the first clamping part is provided with a first pressure detection device, which is used to abut against the wafer cassette.

[0009] Optionally, the second clamping part is provided with a second pressure detection device, which is used to abut against the wafer cassette.

[0010] Optionally, the gripper includes a first gripping rod and a second gripping rod, the second gripping rod extends vertically and is connected to the drive block, the first gripping rod extends horizontally in a direction away from the drive block, and the first gripping rod is connected to the second gripping rod to form an L-shaped structure;

[0011] The first clamping rod is provided with a first slot and a second slot. The first slot extends along the length direction of the first clamping rod to form the first clamping part, and the second slot extends along the length direction of the first clamping rod to form the second clamping part.

[0012] Optionally, the first pressure detection device is mounted on the first clamping rod, and the second pressure detection device is mounted on the second clamping rod.

[0013] Optionally, the clamping frame includes a frame body and a mounting part, the mounting part is fixed to the top of the frame body, and the frame body is connected and fixed to the mounting bracket through the mounting part.

[0014] Optionally, the mounting bracket includes a fixing part extending toward the mounting portion, the mounting portion and the fixing part being detachably connected, the fixing part being provided with a third pressure detection device, the third pressure detection device abutting against the mounting portion.

[0015] Optionally, the mounting bracket is equipped with a monitoring device for monitoring whether the wafer cassette is in front of the two grippers.

[0016] Secondly, the present invention provides a handling robot, which includes a robotic arm and the aforementioned fixture for a wafer cassette, the fixture being connected to the robotic arm.

[0017] This invention provides a fixture for a wafer cassette, which has the following advantages:

[0018] In practical applications, wafer cassettes can be placed in different configurations after being loaded with wafers, such as with the opening facing horizontally or vertically. This invention features a first and second gripping part in the grippers. When the wafer cassette opening faces the first direction, a drive motor drives two drive blocks to move closer together, and the first gripping part of the two grippers engages with the first sidewall of the wafer cassette to grip it. If the wafer cassette opening faces the second direction, the second gripping part of the two grippers engages with the second sidewall of the wafer cassette to grip it. This invention achieves flexible gripping of wafer cassettes with different opening directions through the first and second gripping parts, enabling the gripping of wafer cassettes in various positions. This improves the flexibility and applicability of the gripper. The gripper has a simple and compact structure, solving the technical problem of requiring a large gripper volume in handling robots, which limits the gripping space. Attached Figure Description

[0019] To more clearly illustrate the technical solutions of the embodiments of this application, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a schematic diagram of the fixture provided in an embodiment of the present invention;

[0021] Figure 2 This is another structural schematic diagram of the clamp provided in an embodiment of the present invention;

[0022] Figure 3 This is a schematic diagram of the structure of the clamp removal and holding frame provided in an embodiment of the present invention;

[0023] Figure 4 An exploded view of the fixture provided in an embodiment of the present invention;

[0024] Figure 5 This is a schematic diagram of the gripper structure provided in an embodiment of the present invention;

[0025] Figure 6 This is a schematic diagram of the structure of the fixture holding the wafer box provided in an embodiment of the present invention;

[0026] Figure 7 This is another structural schematic diagram of the fixture holding a wafer box provided in an embodiment of the present invention;

[0027] Figure 8 This is another structural schematic diagram of the clamp provided in an embodiment of the present invention.

[0028] The markings in the image are as follows:

[0029] 10. Mounting bracket; 11. Fixing part; 12. Third pressure detection device; 20. Gripper; 21. First clamping part; 22. Second clamping part; 23. First pressure detection device; 24. Second pressure detection device; 25. First clamping rod; 26. Second clamping rod; 27. First slot; 28. Second slot; 30. Drive assembly; 31. Drive motor; 32. Drive block; 40. Clamping frame; 41. Frame body; 42. Mounting part; 50. Monitoring device; 100. Fixture; 200. Wafer box. Detailed Implementation

[0030] The specific embodiments of the present invention will be described in further detail below with reference to the accompanying drawings and examples. The following examples are for illustrative purposes only and are not intended to limit the scope of the invention.

[0031] In the description of this invention, it should be noted that the terms "upper," "lower," "front," "rear," "inner," and "outer," etc., used in this invention to indicate the orientation or positional relationship are based on the positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this invention and simplifying the description, and are not intended to indicate or imply that the device and element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0032] In the description of this invention, it should be understood that the terms "first," "second," etc., are used to describe various types of information, but these terms are not limited to them; they are only used to distinguish information of the same type from one another. For example, without departing from the scope of this invention, "first" information may also be referred to as "second" information, and similarly, "second" information may also be referred to as "first" information.

[0033] like Figures 1 to 8 As shown, this embodiment of the invention provides a jig 100 for a wafer cassette, which includes a mounting bracket 10, a gripper assembly, and a drive assembly 30. The gripper assembly includes two grippers 20, and the drive assembly 30 includes a drive motor 31 and two drive blocks 32. The drive motor 31 is mounted on the mounting bracket 10, and the two drive blocks 32 are slidably mounted on the mounting bracket 10. Each gripper 20 is connected to each drive block 32 in a one-to-one correspondence. The drive motor 31 is used to drive the two drive blocks 32 to move in directions that are close to each other or away from each other, so that the two grippers 20 can grip or release the wafer cassette 200. The two grippers 20 are provided with a first clamping part 21 and a second clamping part 22 on their facing sides. The first clamping part 21 is used to clamp the first sidewall of the wafer cassette 200 when the opening faces a first direction, and the second clamping part 22 is used to clamp the second sidewall of the wafer cassette 200 when the opening faces a second direction.

[0034] In this embodiment, the mounting bracket 10 is the main structure of the clamp 100, used to support and fix other components. The drive motor 31 is fixed to the mounting bracket 10 to provide power. Two drive blocks 32 are slidably disposed on the mounting bracket 10, and each gripper 20 is connected to each drive block 32 in a corresponding manner. The drive motor 31 can drive the two drive blocks 32 to move in directions that are closer to or further away from each other via a transmission mechanism (e.g., a guide rail is provided inside the mounting bracket 10, not shown in the figure), thereby causing the two grippers 20 to grip or release the wafer cassette 200.

[0035] Based on the above technical solution, the wafer cassette 200, after loading multiple wafers, can be arranged in different ways, such as with the opening of the wafer cassette 200 facing horizontally (e.g., ...). Figure 6 As shown), or the opening of the wafer cassette 200 is placed in a vertical direction (e.g. Figure 7(As shown). In this embodiment, the gripper 20 is provided with a first gripping part 21 and a second gripping part 22. When the opening of the wafer cassette 200 is placed in the horizontal direction (i.e., the first direction), the drive motor 31 drives the two drive blocks 32 to move in a direction that approaches each other. The first gripping part 21 of the two grippers 20 engages with the first side wall of the wafer cassette 200 to grip the wafer cassette 200. If the opening of the wafer cassette 200 is in the vertical direction (i.e., the second direction), since the structure of the second side wall of the wafer cassette 200 is different from that of the first side wall, if the first gripping part 21 of the gripper 20 cannot engage with the second side wall of the wafer cassette 200, the second gripping part 22 of the two grippers 20 engages with the second side wall of the wafer cassette 200 to grip the wafer cassette 200. The fixture 100 of this embodiment can grip the wafer cassette 200 stored in various position states through the first gripping part 21 and the second gripping part 22, which improves the flexibility and applicability of the fixture 100. The fixture 100 has a simple and compact structure, which solves the technical problem that the fixture 100 of the handling robot is large in size, resulting in limited gripping space.

[0036] In some embodiments, such as Figure 1 and Figure 2 As shown, a clamping frame 40 is provided below the clamping position of the two grippers 20. The clamping frame 40 is connected and fixed to the mounting bracket 10. The clamping frame 40 is used to clamp the wafer cassette 200 after the fixture 100 is flipped.

[0037] Specifically, in this embodiment, the clamp 100 is modified by adding a clamping frame 40. The clamping frame 40 is located below the clamping positions of the two grippers 20, meaning that the clamping frame 40 and the two grippers 20 are arranged vertically, making full use of the vertical space of the clamp 100. The clamping frame 40 and the mounting bracket 10 can be connected and fixed by some fasteners. The shape and size of the clamping frame 40 match the shape and size of the wafer cassette 200 to ensure that the clamping frame 40 can securely clamp the wafer cassette 200.

[0038] In this embodiment, the clamping frame 40 can be made of high-strength, corrosion-resistant materials, such as stainless steel or aluminum alloy, and the clamping frame 40 can be manufactured into a structure similar to a metal flower basket.

[0039] In normal use, the grippers 20 clamp different sidewalls of the wafer cassette 200 via the first clamping part 21 or the second clamping part 22, while the clamping frame 40 is in an idle state. If the wafer cassette 200 is not clamped by the grippers 20, the entire fixture 100 can be rotated 180 degrees, such as... Figure 8As shown, the clamping frame 40 is placed above the clamping positions of the two grippers 20, and then the wafer cassette 200 is placed inside the clamping frame 40 for transport. In this embodiment, the fixture 100, by adding the clamping frame 40, achieves stable clamping and support of the wafer cassette 200 after the fixture 100 is flipped, thereby improving the applicability of the fixture 100.

[0040] In some embodiments, such as Figure 3 and Figure 4 As shown, the first clamping part 21 is provided with a first pressure detection device 23, which is used to abut against the wafer cassette 200.

[0041] Specifically, in this embodiment, the clamp 100 is provided with a first pressure detection device 23 on the first clamping part 21. After the jaw 20 clamps the first side wall of the wafer cassette 200 through the first clamping part 21, the first pressure detection device 23 abuts against the first side wall of the wafer cassette 200 to monitor the clamping pressure of the jaw 20 on the wafer cassette 200 in real time, determine whether the clamping of the wafer cassette 200 is stable, and prevent the wafer cassette 200 from loosening during transportation due to improper clamping.

[0042] In this embodiment, the first pressure detection device 23 is a pressure sensor, such as a piezoresistive, capacitive, or piezoelectric sensor, which can convert pressure changes during the clamping process into electrical signal outputs. The control system then performs real-time monitoring and analysis based on the electrical signals.

[0043] During clamping, if the detected clamping pressure is lower than a preset minimum threshold, the control system will send a command to drive the two grippers 20 to increase the clamping force to ensure that the wafer cassette 200 is firmly clamped. If the detected clamping pressure is higher than a preset maximum threshold, the control system will send a command to drive the two grippers 20 to decrease the clamping force to avoid damage to the wafer cassette 200 due to excessive pressure.

[0044] In some embodiments, the second clamping part 22 is provided with a second pressure detection device 24, which is used to abut against the wafer cassette 200.

[0045] Similarly, in this embodiment, the clamp 100 is provided with a second pressure detection device 24 on the second clamping part 22. After the gripper 20 clamps the second side wall of the wafer cassette 200 through the second clamping part 22, the second pressure detection device 24 abuts against the second side wall of the wafer cassette 200 to monitor the clamping pressure of the gripper 20 on the wafer cassette 200 in real time, determine whether the clamping of the wafer cassette 200 is stable, and prevent the wafer cassette 200 from loosening during transportation due to improper clamping. The second pressure detection device 24 is similar to the first pressure detection device 23, and will not be described again in this embodiment.

[0046] In some embodiments, such as Figure 4 and Figure 5 As shown, the gripper 20 includes a first gripping rod 25 and a second gripping rod 26. The second gripping rod 26 extends vertically and is connected to the drive block 32. The first gripping rod 25 extends horizontally in a direction away from the drive block 32. The first gripping rod 25 is connected to the second gripping rod 26 to form an L-shaped structure. The first gripping rod 25 is provided with a first slot 27 and a second slot 28. The first slot 27 extends along the length direction of the first gripping rod 25 to form a first gripping part 21. The second slot 28 extends along the length direction of the first gripping rod 25 to form a second gripping part 22.

[0047] Specifically, when the opening of the wafer cassette 200 is placed in a horizontal direction (i.e., the first direction), the control clamp 100 approaches the wafer cassette 200, and the drive motor 31 drives the two drive blocks 32 to move in a direction that approaches each other. The first sidewall of the wafer cassette 200 is inserted into the first slot 27 of the gripper 20 to clamp the wafer cassette 200. When the opening of the wafer cassette 200 is placed in a vertical direction (i.e., the second direction), the second sidewall of the wafer cassette 200 is inserted into the second slot 28 of the gripper 20 to clamp the wafer cassette 200, so that the gripper 20 can flexibly clamp the wafer cassette 200 placed in different directions. The shape and size of the first slot 27 and the second slot 28 are designed according to the specific size and shape of the first sidewall and the second sidewall of the wafer cassette 200, so as to achieve stable clamping of the wafer cassette 200.

[0048] In some embodiments, such as Figure 5 As shown, the first pressure detection device 23 is mounted on the first clamping rod 25, and the second pressure detection device 24 is mounted on the second clamping rod 26.

[0049] Specifically, the first pressure detection device 23 is located on the first clamping rod 25 near the first slot 27. When the first side wall of the wafer cassette 200 is inserted into the first slot 27 of the gripper 20, the first pressure detection device 23 detects the clamping pressure of the gripper 20 on the wafer cassette 200.

[0050] In this embodiment, a third slot (not shown in the attached figure) is also provided on the second clamping rod 26. The second pressure detection device 24 is provided in the third slot. When the opening of the wafer cassette 200 faces the vertical direction (i.e., the second direction), the second side wall of the wafer cassette 200 is inserted into the second slot 28 of the gripper 20, and the third side wall of the wafer cassette 200 is inserted into the third slot. The second pressure detection device 24 detects the clamping pressure of the gripper 20 on the wafer cassette 200.

[0051] In some embodiments, such as Figure 4 As shown, the clamping frame 40 includes a frame body 41 and a mounting part 42. The mounting part 42 is fixed to the top of the frame body 41, and the frame body 41 is connected and fixed to the mounting bracket 10 through the mounting part 42.

[0052] Specifically, the frame body 41, as the main structure of the clamping frame 40, has a contour that matches the shape and size of the wafer cassette 200 to ensure stable clamping of the wafer cassette 200. The mounting portion 42 is fixed to the top of the frame body 41 for connection and fixation with the mounting bracket 10. During installation, the clamping frame 40 is first connected and fixed to the mounting bracket 10 via the mounting portion 42, and then the wafer cassette 200 is placed on the clamping frame 40. By adding the clamping frame 40, the vertical space of the clamp 100 is fully utilized.

[0053] In some embodiments, such as Figure 4 As shown, the mounting bracket 10 includes a fixing part 11 extending to the mounting part 42. The mounting part 42 and the fixing part 11 are detachably connected. The fixing part 11 is provided with a third pressure detection device 12, which abuts against the mounting part 42.

[0054] Specifically, the fixing part 11 extends towards the mounting part 42 of the clamping frame 40 and is provided with a connection structure that matches the mounting part 42. A groove or mounting hole for mounting the third pressure detection device 12 is provided on the connection structure of the fixing part 11. The third pressure detection device 12 abuts against the mounting part 42 of the clamping frame 40. When the clamping frame 40 is connected and fixed to the fixing part 11 via the mounting part 42, the third pressure detection device 12 can monitor the clamping pressure of the mounting part 42 in real time, thereby determining whether the installation of the clamping frame 40 is stable, preventing the clamping frame 40 from loosening during clamping and transporting of the wafer cassette 200, and improving the reliability of the fixture 100. The third pressure detection device 12 is similar to the first pressure detection device 23, and will not be described again in this embodiment.

[0055] In some embodiments, such as Figures 1 to 4 as well as Figures 6 to 7 As shown, the mounting bracket 10 is equipped with a monitoring device 50, which is used to monitor whether there is a wafer cassette 200 in front of the two grippers 20.

[0056] Specifically, the monitoring device 50 can be a camera, an infrared sensor, or other type of sensor, and its installation position should ensure that it can clearly capture images or signals of the area in front of the two grippers 20.

[0057] In this embodiment, the monitoring device 50 is preferably a high-definition camera, which is mounted on the top of the mounting bracket 10 and connected to the control system (not shown in the figure) via a cable. When the wafer cassette 200 is placed in front of the two grippers 20, the monitoring device 50 captures images of the wafer cassette 200 in real time and transmits them to the control system. The control system then determines, based on the received image information, whether the wafer cassette 200 exists, whether its position is correct, and whether the position or clamping force of the grippers 20 needs to be adjusted.

[0058] In some embodiments, the monitoring device 50 may be connected to an alarm system. When the monitoring device 50 detects that the wafer cassette 200 is not placed in the predetermined position or that there is no wafer cassette in front of the gripper 20, it triggers the alarm system to issue an audible and visual alarm signal to remind the operator to take appropriate measures.

[0059] Secondly, embodiments of the present invention provide a handling robot (not shown in the accompanying drawings), which includes a robotic arm and a clamp 100 for a wafer cassette, the clamp 100 being connected to the robotic arm.

[0060] Specifically, the handling robot is equipped with a robotic arm and a gripper 100. The gripper 100 is specifically used to grip the wafer cassette 200. By combining the gripper 100 with the robotic arm, the robot can automatically complete tasks such as gripping, transporting and placing the wafer cassette 200. The gripper 100 can hold the wafer cassette 200 stored in different positions, reducing the risk of the wafer cassette 200 shaking during the gripping process.

[0061] It should be understood that the term "and / or" as used in this specification and the appended claims refers to any combination and all possible combinations of one or more of the associated listed items, and includes such combinations. It should be noted that, herein, the terms "comprising," "including," or any other variations thereof are intended to cover a non-exclusive inclusion, such that a process, method, article, or system that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or system. Without further limitation, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or system that includes that element.

[0062] The sequence numbers of the above embodiments of the present invention are merely for descriptive purposes and do not represent the superiority or inferiority of the embodiments. The above descriptions are only specific embodiments of the present invention, but the scope of protection of the present invention is not limited thereto. Any person skilled in the art can easily conceive of various equivalent modifications or substitutions within the technical scope disclosed in the present invention, and these modifications or substitutions should all be covered within the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be determined by the scope of the claims.

Claims

1. A gripper for a wafer boat, characterized by, The utility model relates to a wafer box clamping device, including: A mounting bracket, a clamping jaw assembly and a driving assembly, the clamping jaw assembly includes two clamping jaws, the driving assembly includes a driving motor and two driving blocks, the driving motor is arranged on the mounting bracket, two driving blocks are slidingly arranged on the mounting bracket, each clamping jaw is connected to each driving block, the driving motor is used for driving two driving blocks to move in the direction of approaching or moving away from each other, so that two clamping jaws clamp or release the wafer box; Wherein, the surface of two clamping jaws facing each other is provided with a first clamping part and a second clamping part, the first clamping part is used for clamping the first side wall when the opening of the wafer box faces the first direction, and the second clamping part is used for clamping the second side wall when the opening of the wafer box faces the second direction. The clamping position of two clamping jaws is provided with a clamping frame below, the clamping frame is connected and fixed with the mounting bracket, and the clamping frame is used for clamping the wafer box after the clamp is turned over, the clamping frame includes a frame body and a mounting part, the mounting part is fixed on the top of the frame body, and the frame body is connected and fixed with the mounting bracket through the mounting part. The mounting bracket includes a fixed part extending to the mounting part, and the mounting part and the fixed part are detachably connected.

2. The gripper for a wafer boat according to claim 1, wherein The first clamping part is provided with a first pressure detection device, and the first pressure detection device is used for abutting against the wafer box.

3. The gripper for a wafer boat of claim 2, wherein, The second clamping part is provided with a second pressure detection device, and the second pressure detection device is used for abutting against the wafer box.

4. The gripper for a wafer boat of claim 3, wherein, The clamping jaw includes a first clamping rod and a second clamping rod, the second clamping rod extends in the vertical direction and is connected with the driving block, the first clamping rod extends horizontally in the direction away from the driving block, and the first clamping rod is connected with the second clamping rod to form an L-shaped structure. The first clamping rod is provided with a first clamping groove and a second clamping groove, the first clamping groove extends along the length direction of the first clamping rod to form the first clamping part, and the second clamping groove extends along the length direction of the first clamping rod to form the second clamping part.

5. The gripper for a wafer boat of claim 4, wherein, The first pressure detection device is arranged on the first clamping rod, and the second pressure detection device is arranged on the second clamping rod.

6. The gripper for a wafer boat of claim 1, wherein, The fixed part is provided with a third pressure detection device, and the third pressure detection device abuts against the mounting part.

7. The gripper for a wafer boat of claim 1, wherein, The mounting bracket is provided with a monitoring device, and the monitoring device is used for monitoring whether the wafer box exists in front of two clamping jaws.

8. A transport robot characterized by The utility model relates to a wafer box clamping device, including a mechanical hand and the clamp for wafer box as claimed in any one of claims 1 to 7, and the clamp is connected to the mechanical hand.

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