A free-type planetary wheel capable of improving the grinding and polishing surface of square blades
By setting a free state cruise ship structure between the inner ring and outer ring of the polishing cruise ship, friction and centrifugal force are used to form a unique grinding and polishing movement trajectory, the problems of large difference in square wear and large TTV deviation are solved, and uniform wear after grinding and polishing of square blades are achieved and processing errors are improved.
Patent Information
- Application Number
- CN202411833128.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-13
- Publication Date
- 2025-04-15
- Estimated Expiration
- 2044-12-13
AI Technical Summary
During the grinding and polishing process, existing polishing cruise ships cause large wear variations in each position of the square sheet, resulting in large TTV deviations and large processing errors, especially during the grinding and polishing of aluminum oxide/aluminum nitride square sheets of more than two inches.
A free-type star wheel is designed. By setting several groups of free-state cruise ship structures between the inner ring and the outer ring, it rotates on the main body of the grinding disc, and tilts the cruise ship structure with friction and centrifugal force to form a unique free-type grinding and polishing movement trajectory, thereby equalizing the wear amount of wear at each position of the square sheet.
The TTV of the square sheet is effectively reduced, and the grinding performance indicators such as five-point dispersion, warpage and bending are improved. The surface shape after grinding and polishing of the square sheet is corrected and improved, which significantly reduces processing errors. The grinding TTV is improved from ≤15μm to ≤6μm.
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Figure CN119282916B_ABST
Abstract
Description
Technical Field
[0001] The invention relates to the technical field of polishing equipment, and in particular to a free-type planetary wheel capable of improving the grinding and polishing surface of a square piece. Background Art
[0002] The total thickness variation (TTV) during grinding refers to the maximum deviation of each point on the surface from the average thickness after grinding. TTV is an important indicator for measuring grinding quality.
[0003] In the grinding and polishing process of aluminum oxide / aluminum nitride square pieces larger than two inches, polishing wheels are generally used for grinding and polishing. The working principle is to put the quartz crystal square piece into the mold and apply pressure to the square piece against the grinding disc. As the grinding disc rotates, the square piece is continuously worn until it meets the standard.
[0004] In the existing polished cruise ship settings, such as Figure 1 As shown in the figure, the square plate mold is generally evenly distributed along the circumference of the grinding disc. After the square plate is placed in the mold, it rotates with the disc surface during the grinding and polishing process. The angular velocity of the entire grinding disc is consistent, which will inevitably lead to a large difference in the linear velocity of the square plate at various positions during the wear process, and then cause the total length of the trajectory passed by the same square plate at various positions during the wear process to be different, which will lead to a large difference in the wear amount at various positions of the square plate. In the process of continuous rotation, the four corners or edges of the square plate are prone to collapse, resulting in a large overall TTV deviation. In addition, the larger the size of the processed product, the greater the processing errors such as five-point dispersion, warping, and curvature will be.
[0005] Based on the above background, the inventor has designed a free-floating planetary wheel that can improve the polishing surface of the square plate and solve at least one of the above problems, thereby proposing the present application. Summary of the invention
[0006] The purpose of the present application is to provide a free-type planetary wheel which can improve the grinding and polishing surface of a square plate, so as to solve the problem of large processing errors in the grinding and polishing process of a quartz crystal square plate.
[0007] In order to solve the above technical problems, the present invention adopts the following solutions:
[0008] The present application provides a free-type planetary wheel capable of improving the polishing surface of a square plate, comprising a circular outer gear ring and an inner gear ring, and a grinding disc body, and also comprising a plurality of planetary wheel structures having the same structure and used for placing square plates, wherein:
[0009] The diameter of the cruise ship structure is smaller than the radius difference between the outer gear ring and the inner gear ring. The cruise ship structure is laid on the grinding disc body in a free state and is located between the outer gear ring and the inner gear ring.
[0010] The cruise ship structure is driven to rotate on the grinding disc body by an outer gear ring or an inner gear ring.
[0011] Optionally, the outer peripheries of several of the cruise ship structures are provided with several transmission teeth adapted to the outer gear ring and the inner gear ring, and at the same time, the same cruise ship structure is meshed with at most one of the outer gear ring or the inner gear ring.
[0012] Optionally, the cruise ship structure is provided with a square hole for placing the square piece, and the four corners of the square hole are provided with rounded corners.
[0013] Optionally, the grinding disc body is provided with a plurality of quicksand holes for facilitating the outflow of sand and liquid, and the plurality of quicksand holes are evenly distributed along the circumference of the grinding disc body.
[0014] Optionally, the quicksand holes are arranged close to the peripheral area of the grinding disc body.
[0015] Optionally, twice the diameter of the cruise ship structure is greater than the radius difference between the outer gear ring and the inner gear ring.
[0016] Optionally, the number of the cruise ship structures is 2n, where n is a natural number, and n is greater than or equal to 2 and less than or equal to 6.
[0017] Optionally, n=3 or 4.
[0018] Optionally, the grinding disc body has a circular center free area;
[0019] The center-of-circle free trajectory line generated during the free movement of the cruise ship structure is located within the center-of-circle free zone;
[0020] The radial width of the center free zone is: the difference between the diameter of twice the cruise ship structure minus the radius difference between the outer gear ring and the inner gear ring.
[0021] Optionally, the center free trajectory lines generated by several of the cruise ship structures during the free movement process overlap with each other.
[0022] Beneficial effects of the present invention:
[0023] The present application sets several groups of cruise ship structures laid in a free state on the grinding disc body between the inner gear ring and the outer gear ring, so that when the grinding disc body rotates, the cruise ship structure on the grinding disc body will tilt and move toward the outer gear ring under the action of friction and centrifugal force until the transmission teeth on the outer periphery of the cruise ship structure mesh with the outer gear ring, and the rotating outer gear ring can drive the entire cruise ship structure to rotate through the transmission teeth, and when the cruise ship structure is meshed with the outer gear ring, since the side of the cruise ship structure away from the outer gear ring has no limit, the cruise ship structure will tilt and move toward the inner gear ring under the state of rotation after briefly meshing with the outer gear ring and being driven to rotate, until the side of the cruise ship structure close to the inner gear ring meshes with the inner gear ring, so that the cruise ship structure whose rotation speed has been reduced due to friction is increased again through the inner gear ring, and tilted and moves freely in the direction of the outer gear ring under the state of rotation, and the cruise ship structure repeats the above movement process, which is the unique free grinding and polishing movement trajectory of the cruise ship structure of the present application during the grinding and polishing process.
[0024] Therefore, the core concept of the present application is: to make the cruise ship structure in a free state, and to utilize the synergistic effect of centrifugation and self-rotation to make the moving trajectory of the cruise ship structure form the above-mentioned free moving trajectory, so that after the square piece is placed in the cruise ship structure, when the angular velocity of the grinding wheel body is constant, the square piece in the cruise ship structure can appear in various positions and areas of the grinding wheel body along the radial direction during the free moving grinding and polishing process of the cruise ship structure, so that the square piece can achieve the technical effect of balanced wear at various positions after long-term grinding and polishing, and can effectively reduce the TTV of the square piece, improve the grinding and polishing performance indicators such as the five-point dispersion, warpage and curvature of the square piece, correct and improve the surface shape of the square piece after grinding and polishing, and effectively solve the problem of large processing error of quartz crystal square pieces in the prior art during the grinding and polishing process. For aluminum oxide and aluminum nitride square pieces larger than two inches, the grinding TTV of the present application can be improved from ≤15μm in the prior art to ≤6μm, which can greatly improve the processing error and surface shape of the square piece.
[0025] At the same time, for the grinding wheel main body, it avoids the problem that after long-term grinding and polishing, the grinding wheel main body will continue to produce different amounts of wear in the radial direction for a long time, resulting in an uneven surface of the grinding wheel main body along its radial direction. When grinding and polishing square pieces, the TTV and processing errors will be further expanded, and the surface of the grinding wheel main body needs to be frequently maintained and trimmed. BRIEF DESCRIPTION OF THE DRAWINGS
[0026] Figure 1 This is a schematic diagram of the structure of a polishing cruise ship equipment for grinding and polishing square pieces in the prior art of this application.
[0027] Figure 2 This is a structural diagram of Example 1 of the present application.
[0028] Figure 3Schematic diagram of the trajectory of the center of a circle of a single cruise ship structure during the freeing process in Example 1 of the present application.
[0029] Figure 4 Schematic diagram of the free movement trajectory of a single cruise ship structure in Example 1 of the present application.
[0030] Figure 5 This is a structural diagram of Example 2 of the present application.
[0031] Description of reference numerals:
[0032] 1- grinding disc body, 11- quicksand hole, 2- outer gear ring, 3- inner gear ring, 4- cruise ship structure, 41- square hole, 411- rounded corner, 5- center free area, 6- center free trajectory line. DETAILED DESCRIPTION
[0033] The present invention will be further described in detail below in conjunction with embodiments and drawings, but the embodiments of the present invention are not limited thereto.
[0034] In the description of the present invention, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "longitudinal", "lateral", "horizontal", "inside", "outside", "front", "back", "top", "bottom" and the like indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings, or are the directions or positional relationships in which the inventive product is usually placed when used. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore should not be understood as a limitation on the present invention.
[0035] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "disposed", "opened", "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.
[0036] The present invention will be described in detail below with reference to the accompanying drawings and in combination with embodiments.
[0037] Example 1
[0038] like Figures 2 to 4As shown, the present embodiment is a free-type planetary wheel capable of improving the polishing surface of a square plate, comprising a circular outer gear ring 2 and an inner gear ring 3 (teeth of the outer gear ring 2 and the inner gear ring 3 are not shown in the figure), and a grinding disc body 1, and also comprising a plurality of cruise wheel structures 4 having the same structure and used for placing square plates, wherein:
[0039] The diameter of the cruise ship structure 4 is smaller than the radius difference between the outer gear ring 2 and the inner gear ring 3. The cruise ship structure 4 is laid on the grinding disc body 1 in a free state and is located between the outer gear ring 2 and the inner gear ring 3.
[0040] The cruise ship structure 4 is driven to rotate on the grinding disc body 1 through the outer gear ring 2 or the inner gear ring 3 .
[0041] In the field of grinding and polishing, for the grinding and polishing of circular sheets, under the action of the rotation and revolution of the circular sheets, generally speaking, the deviation of the grinding TTV is relatively small. However, for the grinding and polishing of square sheets, due to the fact that the square has corners and the distances from its center point to its end faces are different, under the action of rotation and revolution, the four corners of the square sheet are worn more after grinding and polishing, resulting in a larger deviation of the grinding TTV of the square sheet and a larger processing error.
[0042] In the prior art, such as Figure 1 As shown, the square mold is generally evenly distributed along the circumference of the grinding disc body 1. When the angular velocity of the grinding disc body 1 is the same, the linear velocity of each position of the square is different, resulting in different wear amounts, resulting in large errors in each position of the square after grinding and polishing. Moreover, after the grinding disc body 1 has been working for a long time, the upper surface of the grinding disc body 1 will also have uneven surface shape.
[0043] In this embodiment, a plurality of cruise ship structures 4 are arranged between the inner gear ring 3 and the outer gear ring 2 in a free state on the grinding disc body 1, so that when the grinding disc body 1 rotates, the cruise ship structure 4 on the grinding disc body 1 will tilt and move toward the outer gear ring 2 under the action of friction and centrifugal force until the transmission teeth on the outer periphery of the cruise ship structure 4 mesh with the outer gear ring 2, and the rotating outer gear ring 2 can drive the entire cruise ship structure 4 to rotate through the transmission teeth, and in the state where the cruise ship structure 4 is meshed with the outer gear ring 2, since the side of the cruise ship structure 4 away from the outer gear ring 2 is not It has a limit, so after the cruise ship structure 4 briefly meshes with the outer gear ring 2 and is driven to rotate, it will tilt toward the inner gear ring 3 in the state of rotation until the cruise ship structure 4 is close to the side of the inner gear ring 3 and meshes with the inner gear ring 3, so that the cruise ship structure 4, whose rotation speed has been reduced due to friction, is increased again through the inner gear ring 3, and moves freely in the direction of the outer gear ring 2 in the state of rotation. The cruise ship structure 4 repeats the above movement process, which is the unique free grinding and polishing movement trajectory of the cruise ship structure 4 of the present application during the grinding and polishing process.
[0044] Therefore, the core concept of this embodiment is: to make the cruise ship structure 4 in a free state, and to utilize the synergistic effect of centrifugation and self-rotation to make the movement trajectory of the cruise ship structure 4 form the above-mentioned free movement trajectory, so that after the square piece is placed in the cruise ship structure 4, when the angular velocity of the grinding wheel main body 1 is constant, the square piece in the cruise ship structure 4 can appear in various positions and areas along the radial direction of the grinding wheel main body 1 during the free movement grinding and polishing process of the cruise ship structure 4, so that the square piece can achieve the technical effect of balanced wear at various positions after long-term grinding and polishing, and can effectively reduce the TTV of the square piece, improve the grinding and polishing performance indicators such as the five-point dispersion, warpage and curvature of the square piece, correct and improve the surface shape of the square piece after grinding and polishing, and effectively solve the problem of large processing error of quartz crystal square pieces in the prior art during the grinding and polishing process. For aluminum oxide and aluminum nitride square pieces larger than two inches, the grinding TTV of the present application can be improved from ≤15μm in the prior art to ≤6μm, which can greatly improve the processing error and surface shape of the square piece.
[0045] At the same time, for the grinding wheel main body 1, it avoids the problem that after long-term grinding and polishing, the grinding wheel main body 1 continues to produce different amounts of wear in the radial direction for a long time, resulting in an uneven surface of the grinding wheel main body 1 along its radial direction. When grinding and polishing square pieces, the TTV and processing errors will be further expanded, and the surface shape of the grinding wheel main body 1 needs to be frequently maintained and trimmed.
[0046] Specifically, in this embodiment, if Figure 2 and Figure 3 As shown, the outer periphery of the several cruise ship structures 4 is provided with several transmission teeth (not shown in the figure) adapted to the outer gear ring 2 and the inner gear ring 3. At the same time, the same cruise ship structure 4 is meshed with at most one of the structures of the outer gear ring 2 or the inner gear ring 3. In this embodiment, the pressure angles of the teeth of the outer gear ring 2 and the inner gear ring 3, as well as the transmission teeth are all 20°.
[0047] Specifically, in this embodiment, if Figure 2 and Figure 3 As shown, the cruise ship structure 4 is provided with a square hole 41 for placing the square piece, and the four corners of the square hole 41 are provided with rounded corners 411. By providing the rounded corners 411 at the four corners of the square hole 41, after the square piece is installed in the square hole 41, the four corners of the square piece will not directly contact the cruise ship structure 4, which can avoid stress concentration and further cause the problem of square piece breakage. At the same time, it is convenient to remove the square piece after processing.
[0048] Specifically, in this embodiment, if Figure 2 and Figure 3As shown, the grinding disc main body 1 is provided with a plurality of quicksand holes 11 for facilitating the outflow of sand and liquid, and the plurality of quicksand holes 11 are evenly distributed along the circumference of the grinding disc main body 1. In this embodiment, the grinding sand and liquid drip from the top of the grinding disc main body 1 to the upper surface of the grinding disc main body 1, and after the square piece is ground, it flows out of the grinding disc main body 1 from the quicksand holes 11, which can improve the grinding efficiency and effect.
[0049] Specifically, in this embodiment, if Figure 2 and Figure 3 As shown, the quicksand holes 11 are arranged near the outer peripheral area of the grinding disc body 1 , so as to make full use of the grinding sand liquid and increase the retention time of the grinding sand liquid on the upper surface of the grinding disc body 1 .
[0050] Specifically, in this embodiment, if Figure 2 and Figure 3 As shown, twice the diameter of the cruise ship structure 4 is larger than the radius difference between the outer gear ring 2 and the inner gear ring 3, which can prevent the cruise ship structures 4 from colliding with each other, affecting the free movement trajectory of the cruise ship structure 4, and further affecting the grinding effect of the square piece, and preventing the free movement trajectory of the cruise ship structure 4 from becoming uncontrollable.
[0051] Specifically, in this embodiment, if Figure 2 and Figure 3 As shown, the number of the cruise ship structures 4 is 2n, where n is a natural number, which is greater than or equal to 2 and less than or equal to 6. In some embodiments, the number of the cruise ship structures 4 can also be controlled to be an odd number, such as 5, 7, 9, etc., depending on specific equipment parameters such as the size of the square piece and the size of the grinding disc, which will not be described in detail here.
[0052] Specifically, in this embodiment, if Figure 2 and Figure 3 As shown, n=3. In this embodiment, the number of the cruise ship structures 4 is 6. Figure 2 At the grinding moment shown, the line connecting the centers of the three cruise structures 4 meshing with the inner gear ring 3 forms an inverted equilateral triangle, and the lines connecting the centers of the other three cruise structures 4 meshing with the outer gear ring 2 form an upright equilateral triangle.
[0053] Specifically, in this embodiment, if Figure 2 and Figure 3 As shown, the grinding disc body 1 has a circular center free area 5;
[0054] The center free trajectory line 6 generated during the free movement of the cruise ship structure 4 is located in the center free area 5;
[0055] The radial width of the center free zone 5 is: the difference between the diameter of twice the cruise ship structure 4 and the radius difference between the outer gear ring 2 and the inner gear ring 3 .
[0056] Specifically, in this embodiment, if Figure 2 and Figure 3 As shown, the center free trajectory lines 6 generated by the plurality of cruise ship structures 4 during the free movement process overlap with each other.
[0057] like Figure 3 and Figure 4 As shown, Figure 3 It is a schematic diagram of the free movement trajectory of a single cruise ship structure 4. When the cruise ship structures 4 are evenly distributed along the circumference of the grinding disc body 1, the center free trajectory lines 6 generated by the cruise ship structures 4 during the free movement process overlap with each other.
[0058] Embodiment 2:
[0059] On the basis of the above-mentioned embodiment 1, Figure 5 As shown, in this embodiment, the number of the cruise ship structures 4 is 8. The remaining structures in this embodiment are the same as those in the above-mentioned embodiment 1, and will not be described in detail here.
[0060] It is to be understood that the above embodiments are merely exemplary embodiments used to illustrate the principles of the present invention, but the present invention is not limited thereto. For those skilled in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also considered to be within the scope of protection of the present invention.
Claims
1. A free-type planetary wheel capable of improving the polishing surface of a square disc, comprising a circular outer gear ring (2) and an inner gear ring (3), and a grinding disc body (1), characterized in that: Also included are a number of cruise ship structures (4) having the same structure and used for placing the square pieces, wherein: The diameter of the cruise ship structure (4) is smaller than the radius difference between the outer gear ring (2) and the inner gear ring (3); the cruise ship structure (4) is laid on the grinding disc body (1) in a free state and is located between the outer gear ring (2) and the inner gear ring (3); The cruise ship structure (4) is driven by the outer gear ring (2) or the inner gear ring (3) to rotate on the grinding disc body (1); The outer circumferences of the plurality of cruise ship structures (4) are each provided with a plurality of transmission teeth adapted to the outer gear ring (2) and the inner gear ring (3); at the same time, the same cruise ship structure (4) is meshed with at most one of the outer gear ring (2) and the inner gear ring (3); The cruise ship structure (4) is provided with a square hole (41) for placing a square piece, and the four corners of the square hole (41) are provided with rounded corners (411); The motion trajectory of the square hole area inside the cruise ship structure (4) is formed by combining three motion trajectories: the orbital motion along the center of the grinding disc body (1), the radial reciprocating motion along the grinding disc body (1), and the rotational motion along the center of the cruise ship structure (4).
2. A free-type planetary wheel capable of improving the polishing surface of a square piece according to claim 1, characterized in that: The grinding disc body (1) is provided with a plurality of quick-sand holes (11) for facilitating the flow of sand and liquid out, and the plurality of quick-sand holes (11) are evenly distributed along the circumference of the grinding disc body (1).
3. A free-type planetary wheel capable of improving the polishing surface of a square piece according to claim 2, characterized in that: The quicksand hole (11) is arranged close to the outer peripheral area of the grinding disc body (1).
4. The free-type planetary wheel capable of improving the polishing surface of the square piece according to claim 1, characterized in that: Two times the diameter of the cruise ship structure (4) is greater than the radius difference between the outer gear ring (2) and the inner gear ring (3).
5. The free-type planetary wheel capable of improving the polishing surface of the square piece according to claim 1, characterized in that: The number of the cruise ship structures (4) is 2n, where n is a natural number, and n is greater than or equal to 2 and less than or equal to 6.
6. A free-type planetary wheel capable of improving the polishing surface of a square piece according to claim 5, characterized in that: Said n=3 or 4.
7. The free-type planetary wheel capable of improving the polishing surface of the square piece according to claim 1, characterized in that: The grinding disc body (1) has a circular center free area (5); The center free trajectory line (6) generated during the free movement of the cruise ship structure (4) is located in the center free area (5); The radial width of the center free zone (5) is: the difference between the diameter of twice the cruise ship structure (4) minus the radius difference between the outer gear ring (2) and the inner gear ring (3).
8. The free-type planetary wheel capable of improving the polishing surface of the square piece according to claim 7, characterized in that: The center free trajectory lines (6) generated by the plurality of cruise ship structures (4) during the free movement process overlap with each other.
Citation Information
Patent Citations
Ultrathin single-layer ceramic capacitor substrate vacuumizing tool and manufacturing process
CN111958482A
Surface lapping machine constructs based on planetary motion and eccentric motion
CN208391780U
Moving device and surface polisher using planetary gear mechanism
TW200636176A