Holding device of upward-opening type substrate container

Abstract

The invention provides a fixing device of an upward-opening type substrate container, which comprises a fixing assembly used for pushing a substrate moving part to act, and the substrate moving part is arranged at the outer side part of a substrate. The fixing assembly comprises a fixing body and a pushing and abutting movable part, the pushing and abutting movable part comprises a first guiding inclined face and a second guiding inclined face used for abutting against the inner surface of the container door body, and the first guiding inclined face enables the first guiding inclined face and the second guiding inclined face to correspondingly move in a pushing and abutting mode according to the abutting force of the container door body. And the pushing part is connected to the first guide inclined surface and can correspondingly push the substrate moving part to act according to the pushing displacement degree of the first guide inclined surface, so that the substrate moving part displaces the substrate and the substrates are mutually stacked and positioned. The holding device is suitable for the upward-opening type substrate container and the semiconductor workpiece carried and stored by the upward-opening type substrate container.

Description

Technical Field

[0001] The invention provides a holding device, in particular a holding device for a top-opening substrate container which can stably hold a substrate carried in the container and prevent it from being damaged and can adjust the number of different carrying substrates. Background Art

[0002] Industrial electronic component-related sheet products, such as circuit boards, wafers, glass and other sheet semiconductor workpieces, often need to be contained in containers and protected, carried or transported. The containers that carry these electronic component-related products or semiconductor process-related components need to be well designed with protection measures and holding devices to prevent damage to the substrates or semiconductor workpieces stored and carried inside.

[0003] Common factors that damage substrates or semiconductor workpieces include wear, scratches, particle dust pollution caused by vibration or friction, or the container or the internal structure of the container is not stable enough, causing the substrate to shake, jump, jump, and cause the substrate to hit or break. All of these will cause the quality and yield of the substrate to decline during the storage, loading, and transportation of the substrate container, as well as damage to the substrate or semiconductor workpiece products. Therefore, how to stably hold multi-layer substrates and avoid vibration, collision, displacement or friction between substrates is an issue that the industry urgently needs to solve.

[0004] In addition, the existing substrate container's carrying space design specifications can only limit the stacking of a certain number of substrates, and its function and size are single. The substrate container must be re-molded and manufactured according to the number of different substrates. Not only is the cost high and the utilization rate is poor, but it also has no function of stably holding and fixing the substrates.

[0005] For another example, if the existing substrate container carries a large size or a large number of substrates, resulting in an overall heavy weight, the door body used to cover the substrate container is prone to cause the weight to concentrate and fall due to gravity during transportation, causing the door body to deform and affect the airtightness. Therefore, how to maintain the airtightness under the condition of carrying a heavy substrate container is a very challenging solution. Summary of the invention

[0006] In view of this, the holding device of the top-opening substrate container provided by the present invention has many functions such as being able to stably support and fix multiple layers of substrates, maintain airtightness, and share containers for different numbers of substrates, as well as having solutions to avoid vibration, collision, displacement or friction between substrates.

[0007] An embodiment of the present invention provides a holding device for a top-opening substrate container. The top-opening substrate container includes a container body and a container door. The container door is configured to be combined with the container body to define a storage space. The storage space is used to store a plurality of substrates. The holding device includes: a substrate movable member, which is arranged on the outer side of the substrate; and a holding component, which is arranged in the storage space. The holding component is used to push the substrate movable member to actuate. The holding component includes: a holding body, which is arranged on the inner side of the container body; and a pushing movable member. Part, arranged on the holding body, the pushing movable part includes: a first guide slope, a second guide slope for resisting the inner surface of the container door body, the first guide slope causes a corresponding pushing displacement between the first guide slope and the second guide slope according to the resisting force of the container door body; and a pushing portion is connected to the first guide slope, the pushing portion corresponds to the position of the substrate movable part, the pushing portion pushes the substrate movable part accordingly according to the pushing displacement degree of the first guide slope, so that the substrate movable part displaces the substrate until multiple substrates are stacked and positioned on each other.

[0008] In one embodiment, the holding body includes an inclined guide groove, and the pushing movable member includes a guide portion connected to the pushing portion, the guide portion is protruding in the inclined guide groove, and the guide portion moves in the inclined guide groove corresponding to the holding force of the container door body, so that the pushing movable member is close to or away from the holding body.

[0009] In one embodiment, the retaining assembly further includes: an elastic member, disposed between the retaining body and the pushing movable member, the elastic member being configured to provide an elastic change in displacement of the guide portion along the inclined guide groove away from the retaining body, or displacement of the guide portion along the inclined guide groove toward the retaining body, based on the resisting force of the container door body.

[0010] In one embodiment, the substrate movable part includes: a connecting portion fixedly connected to the outer side of the substrate; an elastic deformation portion connected to the connecting portion, the elastic deformation portion corresponds to the position of the pushing portion, and the elastic deformation portion provides elastic deformation and displacement of the pushing substrate according to the pushing displacement degree of the pushing portion; and a first fixed portion, arranged on one side of the elastic deformation portion, and the first fixed portion is used to fix a second fixed portion of an adjacent substrate.

[0011] In one embodiment, the bottom of the inner surface of the container body further includes a bottom positioning piece, and the substrate has a substrate positioning piece corresponding to the bottom positioning piece, and the bottom positioning piece is used to position the substrate located in the storage space closest to the bottom of the inner surface.

[0012] In one embodiment, the bottom of the inner surface of the container body further includes a bottom engaging member for engaging and fixing between a substrate located in the receiving space closest to the bottom of the inner surface and a substrate movable member disposed thereon.

[0013] In one embodiment, each substrate has an adapted stacking fixing portion on the upper and lower surfaces, and adjacent substrates are stacked and fixed to each other via the stacking fixing portion.

[0014] In one embodiment, the device further comprises at least one elastic supporting member disposed on the bottom side of the substrate for elastically supporting a semiconductor workpiece on the supporting substrate.

[0015] In one embodiment, the elastic supporting member includes a fixed end and an elastic supporting arm, wherein the fixed end is detachably disposed on the bottom side of the substrate, one end of the elastic supporting arm is connected to the fixed end, and the other end of the elastic supporting arm elastically supports the edge surface of the semiconductor workpiece.

[0016] In one embodiment, an error proofing member is disposed on the inner side wall of the container body to limit the direction in which the substrates are stored in the storage space.

[0017] An embodiment of the present invention provides a holding device for a top-opening substrate container. The top-opening substrate container includes a container body and a container door. The container door is configured to be combined with the container body to define a storage space. The storage space is used to store a plurality of substrates. The holding device includes: a frame body, which is arranged in the storage space and is used to carry the substrates; a plurality of quick-release parts, which are respectively arranged on the outer side of the frame body, each of the quick-release parts includes a support member and a pair of shoulders, and the shoulders are connected to both sides of the support member. The inner side wall of the container body is also provided with a plurality of pressing fasteners, the support member is against the inner side wall, and each pressing fastener is pressed on the shoulder to fix the frame body; and a plurality of clearance parts, which provide clearance space for a holding component arranged in the storage space.

[0018] In one embodiment, when the abutting member is forced to move away from the inner wall by a distance, the shoulder is separated from the buckle, so that the frame body is in a detachable state.

[0019] In one embodiment, the bottom of the inner surface of the container body also includes a bottom positioning piece, the frame body has a frame positioning piece corresponding to the bottom positioning piece, the bottom positioning piece is used to position the frame positioning piece to define a height distance between the frame body and the bottom of the inner surface of the container body, and the bottom positioning piece and the buckle are at the same horizontal height.

[0020] In one embodiment, an error proofing member is disposed on the inner side wall of the container body to limit the direction in which the frame body is disposed in the storage space.

[0021] An embodiment of the present invention provides a holding device for a top-opening substrate container. The top-opening substrate container includes a container body and a container door. The container door is configured to be combined with the container body. The container door has a receiving space for receiving a latch mechanism. The holding device includes: at least one leveling element disposed in the receiving space. The leveling element extends as a whole to abut against two opposite inner walls of the container door. The leveling element and the latch mechanism are disposed in parallel.

[0022] In one embodiment, the flattening element is a carbon rod, and the overall height of the carbon rod is lower than the total depth of the accommodating space.

[0023] By means of the holding device of the top-opening substrate container of the present invention, by means of the arrangement of the pushing movable member and the inclined guide groove, during the process of the container door closing to the container body, a holding force is provided to the pushing movable member, so that the pushing movable member is actuated and displaced along the direction of the inclined guide groove, and then the pushing portion of the pushing movable member is displaced toward the substrate to push against the substrate movable member and fix the substrate, thereby achieving the effect of stably holding and fixing the carried substrate. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is a schematic diagram of the three-dimensional appearance of a top-opening substrate container according to an embodiment of the present invention;

[0025] Figure 2A It is an exploded schematic diagram of an upper opening substrate container according to an embodiment of the present invention;

[0026] Figure 2B Another exploded schematic diagram of a top-opening substrate container according to an embodiment of the present invention;

[0027] Figure 3A A schematic diagram of an installation method of a retaining component in one embodiment of the present invention;

[0028] Figure 3B A schematic side view of a holding assembly according to an embodiment of the present invention;

[0029] Figure 3C It is a three-dimensional schematic diagram of a container door and a retaining assembly in one embodiment of the present invention;

[0030] Figure 4A It is a three-dimensional schematic diagram of a substrate and a substrate movable part in one embodiment of the present invention;

[0031] Figure 4B It is a partially enlarged top view schematic diagram of a substrate and a substrate movable part in one embodiment of the present invention;

[0032] Figure 4C An exploded schematic diagram of a substrate, a substrate movable part and a holding assembly in one embodiment of the present invention;

[0033] Figure 4DA schematic diagram of an elastic deformation portion of a substrate movable member in an undeformed state according to an embodiment of the present invention;

[0034] Figure 4E It is a schematic diagram of the holding component before pushing in one embodiment of the present invention;

[0035] Figure 4F It is a schematic diagram of a holding component after being pushed in one embodiment of the present invention;

[0036] Figure 5A It is a partially enlarged three-dimensional schematic diagram of a stacking fixing portion of a substrate in one embodiment of the present invention;

[0037] Figure 5B It is a partially enlarged three-dimensional schematic diagram of a container body in one embodiment of the present invention;

[0038] Figure 5C It is an enlarged three-dimensional schematic diagram of another part of the container body in one embodiment of the present invention;

[0039] Fig. 6A It is a schematic diagram of the assembly method of the elastic supporting member in one embodiment of the present invention;

[0040] Figure 6B A three-dimensional schematic diagram of an elastic resisting member in one embodiment of the present invention;

[0041] Figure 6C is a three-dimensional schematic diagram of an elastic supporting member in one embodiment of the present invention from another viewing angle;

[0042] Fig. 7A It is an exploded schematic diagram of an upper opening substrate container according to an embodiment of the present invention;

[0043] Figure 7B It is a schematic diagram of the installation of the frame body in one embodiment of the present invention;

[0044] Fig. 8A It is a top view schematic diagram of the frame body and the quick-release member in one embodiment of the present invention;

[0045] Figure 8B It is a partially enlarged schematic diagram of a frame body in one embodiment of the present invention;

[0046] Figure 8C is a cross-sectional schematic diagram of a frame body in one embodiment of the present invention;

[0047] Fig.8D is a cross-sectional schematic diagram of a variant of the frame body in one embodiment of the present invention;

[0048] Fig. 8E is a cross-sectional schematic diagram of another variant of the frame body in one embodiment of the present invention;

[0049] Fig. 9 Schematic diagram of the explosion of a container door in one embodiment of the present invention.

[0050] Reference numerals

[0051] 10 Top-opening substrate container

[0052] 100 container body

[0053] 110 bottom snap-fit ​​piece

[0054] 120 inner mounting part

[0055] 130 bottom positioning piece

[0056] 140 Support

[0057] 150 Press Fasteners

[0058] 160 Support auxiliary parts

[0059] 170 foolproof parts

[0060] 180 storage space

[0061] 190 inner surface bottom

[0062] 200 container door

[0063] 210 inner surface

[0064] 211 second guide slope

[0065] 220 door panel

[0066] 230 Latch mechanism

[0067] 231 control components

[0068] 232 Latch Arm

[0069] 240 leveling element

[0070] 250 door shell

[0071] 251 Accommodation Space

[0072] 252 Ear

[0073] 300 holding components

[0074] 310 holding body

[0075] 311 inclined guide groove

[0076] 320 push against active parts

[0077] 321 Guidance Department

[0078] 322 first guide slope

[0079] 323 Pushing part

[0080] 330 elastic parts

[0081] 400 substrate moving parts

[0082] 410 first fixing part

[0083] 420 elastic deformation part

[0084] 430 connection

[0085] 500 elastic support

[0086] 510 fixed end

[0087] 520 elastic support arm

[0088] 600 frame body

[0089] 610 quick release parts

[0090] 611 abutment

[0091] 612 pairs of shoulders

[0092] 620 Give Way

[0093] 631 frame positioning piece

[0094] 640 stacking alignment unit

[0095] 650 raised bearing surface

[0096] 660 recessed bearing surface

[0097] 700 substrate

[0098] 710 stacking fixing part

[0099] 720 second fixed part

[0100] 800 semiconductor parts DETAILED DESCRIPTION

[0101] In order to explain the technical content of the present invention in detail, the following is further explained in combination with the implementation mode and the accompanying drawings. It should be noted that in the content of this article, terms such as "first", "second" and "third" are used to distinguish the differences between components, rather than to limit the components themselves or to indicate a specific order of components. In addition, in the content of this article, when a specific number is not specifically specified, the article "a" refers to one component or more than one component.

[0102] In order to fully understand the purpose, features and effects of the present invention, the present invention is described in detail through the following specific embodiments and the accompanying drawings.

[0103] Figure 1 It is a schematic diagram of the three-dimensional appearance of a top-opening substrate container according to an embodiment of the present invention; Figure 2A It is an exploded schematic diagram of an upper opening substrate container according to an embodiment of the present invention; Figure 2B FIG. 1 is another exploded schematic diagram of a top-opening substrate container according to an embodiment of the present invention, and the angle of components is adjusted to facilitate illustration.

[0104] Please also refer to Figure 1 , Figure 2A and Figure 2B As shown, a top-opening substrate container 10 applicable to the holding device of the top-opening substrate container according to one embodiment of the present invention comprises a container body 100 and a container door 200. The container door 200 is suitable for combining with the container body 100 to define a storage space 180. The storage space 180 of the container body 100 is used to store a plurality of substrates 700. The substrate 700 can be a tray for carrying semiconductor workpieces (such as wafers or PCBs); of course, the container body 100 is also suitable for storing various forms of sheet substrates, and is suitable for storing and carrying sheet products such as electronic components related to industry, including but not limited to circuit boards, wafers, substrates, glass and other sheet semiconductor workpieces. In one embodiment of the present invention, the container door 200 is located at the upper opening of the container body 100 to close the upper opening of the container body 100. The internal space formed by the container door 200 and the container body 100 is the storage space 180, which can be used to store a plurality of stacked sheet substrates 700.

[0105] like Figure 2A and Figure 2B As shown, the container body 100 of the top-opening substrate container 10 can accommodate a substrate 700. In this embodiment, the substrate 700 is described by taking Tray as an example. The substrate 700 is used to carry and hold a sheet-like semiconductor workpiece. Each semiconductor workpiece can be supported by a substrate 700 alone. The number of substrates 700 can be one or more, and multiple substrates 700 can be stacked on each other so that the carried semiconductor workpieces are kept at a certain distance from each other and are kept stored in the top-opening substrate container 10. It should be noted that the shape of the substrate 700 shown in the figure is only an example, and a device for carrying semiconductor workpieces of any shape and structure can be a variation of the substrate 700.

[0106] like Figure 2A and Figure 2BAs shown, the holding device is suitable for the top-opening substrate container 10. The holding device includes a holding assembly 300 and a substrate movable member 400 disposed on the container body 100. The substrate movable member 400 is disposed on the outer side of the substrate 700. The holding assembly 300 is disposed in the storage space 180. The holding assembly 300 is used to push the substrate movable member 400 to operate to hold the substrate 700. Among them, the holding assembly 300 includes a holding body 310 and a pushing movable member 320. The holding body 310 is disposed on the inner side of the container body 100. The pushing movable member 320 is disposed on the holding body 310. The pushing movable member 320 includes a first guiding inclined surface 322 and a pushing portion 323. Among them, the first guiding inclined surface 322 is used to push against the second guiding inclined surface 211 of the inner surface 210 of the container door body 200, please refer to Figure 3C. The first guiding slope 322 causes the first guiding slope 322 and the second guiding slope 211 to push and displace accordingly according to the holding force of the container door 200. The pushing portion 323 is connected to the first guiding slope 322, and the pushing portion 323 corresponds to the position of the substrate movable member 400. The pushing portion 323 pushes the substrate movable member 400 accordingly according to the pushing and displacement degree of the first guiding slope 322, so that the substrate movable member 400 displaces the substrate 700 until the multiple substrates 700 are stacked and positioned. In one embodiment of the present invention, the holding assembly 300 further includes an elastic member 330, which will be described in detail below.

[0107] In one embodiment of the present invention, there are multiple retaining components 300, for example eight, which are respectively arranged around the side of the container body 100 facing the storage space 180 to provide a stable clamping edge of the substrate 700 to ensure that the substrate 700 does not vibrate, shake or collide with each other; the number of retaining components 300 can be adjusted according to needs and is not limited here.

[0108] Please also see Figures 3A to 3C . Figure 3A Schematic diagram of the installation method of the holding component 300 in one embodiment of the present invention; Figure 3B It is a schematic side view of a holding component 300 according to an embodiment of the present invention; Figure 3C It is a three-dimensional schematic diagram of a container door and a retaining assembly in one embodiment of the present invention.

[0109] The retaining component 300 is arranged on the inner mounting portion 120 of the inner side of the container body 100 facing the storage substrate 700. The inner mounting portion 120 can be, for example, a groove or a card slot, and has a snap-on structure to snap-on and fix with the retaining body 310 of the retaining component 300 to stably fix the retaining component 300 and make the retaining component 300 elastically detachable and adjustable.

[0110] Here, the operation of the holding assembly 300 is described. The holding body 310 includes an inclined guide groove 311, and the push movable member 320 includes a guide portion 321 connected to the push portion 323. The guide portion 321 is protruded in the inclined guide groove 311 so that the guide portion 321 can only move along the axis of the inclined guide groove 311. Figure 4C The elastic member 330 is disposed between the holding body 310 and the pushing movable member 320, and is protruded in the inclined guide groove 311 through the guide portion 321, so that the pushing movable member 320 can be installed on the holding body 310 without falling off. When the container door 200 is closed onto the container body 100, the inner surface 210 of the container door 200 faces the pushing movable member 320, so that the second guiding slope 211 downwardly pushes against the first guiding slope 322 of the pushing movable member 320, and the first guiding slope 322 pushes and displaces the first guiding slope 322 and the second guiding slope 211 accordingly according to the holding force of the container door 200. At the same time, the pushing portion 323 is connected to the first guiding slope 322, so the pushing portion 323 will act accordingly according to the displacement stroke of the first guiding slope 322. Among them, only the end point of the first guiding inclined surface 322 contacts the second guiding inclined surface 211 , which can not only increase the concentration of force application points, but also reduce the contact area to avoid the problem of dust generated by friction.

[0111] Specifically, the pushing portion 323 corresponds to the position of the substrate movable member 400. When the pushing portion 323 pushes the first guide slope 322 to move, the guide portion 321 moves along the central axis of the inclined guide groove 311 until the guide portion 321 is limited to the closed end 312 of the inclined guide groove 311. Figure 3B As shown in the direction of the arrow, the push movable member 320 is moved away from the holding body 310. The elastic member 330 is configured to provide an elastic change amount (elastic stretch) for the guide portion 321 to move away from the holding body 310 along the inclined guide groove 311 according to the holding force of the container door 200. In other words, the guide portion 321 of the push movable member 320 performs a downward guiding displacement stroke in the inclined guide groove 311 of the holding body 310, so that the elastic member 330 is gradually stretched, and the push movable member 320 is slightly away from the holding body 310. At this time, the push movable member 320 moves toward the substrate movable member 400 that clamps the substrate 700.

[0112] On the contrary, when the container door 200 is opened toward the container body 100, the elastic member 330 provides the guide portion 321 with an elastic change amount (elastic reset) according to the resisting force of the container door 200, so as to move away from the closed end 312 along the inclined guide groove 311 and toward the holding body 310. In other words, when the container door 200 is removed, the elastic member 330 releases the elastic potential energy, and the guide portion 321 of the push movable member 320 moves upward in the inclined guide groove 311 of the holding body 310, and the push movable member 320 moves toward the holding body 310, and the push movable member 320 moves away from the substrate movable member 400 and is in a state of removing the resisting state to the substrate movable member 400. At the same time, the force applied to the substrate movable member 400 is released, and the elastic deformation portion 420 is also released, so that the first fixing portion 410 and the second fixing portion 720 are no longer interfered with, and the stacked substrates 700 are no longer fixed to each other. The first fixing portion 410 of the substrate movable member 400 installed at the bottom substrate 700 also no longer interferes with the bottom clamping member 110 at the bottom of the container body 100, thereby facilitating a machine or a robot arm or manually taking out multiple substrates 700 one by one or in a stack.

[0113] Thus, through the elastic locking and releasing mechanism of the substrate 700, the top-opening substrate container 10 with the holding device of the present invention has many advantages such as easy operation, intuitiveness and foolproofness. The operator or the automated machine only needs to cover the container door 200 to perform a stable and effective locking and fixing of the substrate 700 without additional operation procedures; and the substrate 700 can be naturally restored to a non-interference state by simply removing the container door 200.

[0114] The elastic member 330 is, for example, disposed on the other side of the pushing movable member 320 relative to the holding body 310 , and one end of the elastic member 330 is fixed to the holding body 310 , and the other end is fixed to the pushing movable member 320 .

[0115] The normal vector of the first guiding slope 322 is parallel to the normal vector of the second guiding slope 211, that is, they have the same slope angle. The angle and size of the second guiding slope 211 are adapted to the first guiding slope 322. The slope length of the first guiding slope 322 is the same as the displacement stroke length of the inclined guide groove 311. Thus, by setting the second guiding slope 211 on the container door body 200, it can be ensured that when the container door body 200 vertically abuts against the push movable member 320, the first guiding slope 322 part can be displaced synchronously during the displacement of the push movable member 320 along the inclined guide groove 311, thereby ensuring that the push movable member 320 provides a stable downward force.

[0116] The first guiding slope 322 of the pushing movable member 320 and the second guiding slope 211 of the container door body 200 may be other structural forms, as long as they can slide with each other and contact each other with a small contact area, they all fall within the scope of patent protection of the present invention.

[0117] Next, the operational relationship between the holding assembly 300 and the substrate movable member 400 and the detailed structure of the substrate movable member 400 are described. 4A to 4F . Figure 4A It is a three-dimensional schematic diagram of a substrate and a substrate movable part in one embodiment of the present invention; Figure 4B It is a partially enlarged top view schematic diagram of a substrate and a substrate movable part in one embodiment of the present invention; Figure 4C An exploded schematic diagram of a substrate, a substrate movable part and a holding assembly in one embodiment of the present invention; Figure 4D FIG. 1 is a schematic diagram of an elastic deformation portion of a substrate movable member in an undeformed state according to an embodiment of the present invention. Figure 4E It is a schematic diagram of the holding component before pushing in one embodiment of the present invention; Figure 4F is a schematic diagram of a holding component after being pushed in one embodiment of the present invention, and, FIG. 4E to FIG. 4F Tie Figure 1 Cross-sectional view along line segment A-A'.

[0118] The substrate movable part 400 is suitable for being used as a buffering elastic element for buffering, clamping and fixing between the push movable part 320 and the substrate 700. The substrate movable part 400 includes a connecting part 430, an elastic deformation part 420 and a first fixed part 410. The connecting part 430 is fixedly connected to the outer side of the substrate 700, such as the edge. The connecting part 430 is located at both ends of the elastic deformation part 420, and is fixedly connected to the outer side of the substrate 700 in a clamping form. The elastic deformation part 420 is connected to the connecting part 430, and the elastic deformation part 420 is configured to correspond to the position of the push part 323. The first fixed part 410 is arranged on one side of the elastic deformation part 420, such as the lower position, and the first fixed part 410 is used to fix a second fixed part 720 of an adjacent substrate 700.

[0119] When the pushing movable member 320 is subjected to the resisting force of the container door 200 and moves away from the holding body 310 and exerts the resisting force toward the elastic deformation portion 420, the elastic deformation portion 420 corresponds to the position of the pushing portion 323, and the elastic deformation portion 420 provides elastic deformation and displacement of the pushing substrate 700 according to the degree of pushing displacement of the pushing portion 323. In other words, the pushing portion 323 of the pushing movable member 320 abuts against the elastic deformation portion 420, and the elastic deformation portion 420 drives the first fixing portion 410 to move toward the second fixing portion 720 of the adjacent substrate 700, until the container door 200 completely covers the container body 100, and the elastic deformation portion 420 is subjected to the maximum resisting force and fixes the first fixing portion 410 on the second fixing portion 720 of the adjacent substrate 700. Since the storage space 180 is used to store multiple substrates, through the coordinated actuation between the holding assembly 300 and the substrate movable member 400, each first fixing portion 410 can be sequentially interlocked with adjacent substrates 700 layer by layer, thereby achieving the effect of stacking and positioning multiple substrates 700.

[0120] According to the above operation principle, the pushing movable member 320 applies force to the elastic deformation portion 420 of the substrate movable member 400, so that multiple stacked substrates 700 can be docked with each other through the cooperation of the first fixing portion 410 and the second fixing portion 720, so as to achieve the effect of layer-by-layer positioning of the substrates 700, and the pushing action of the pushing movable member 320 is stopped until the container door 200 covers the container body 100. Among them, the substrate 700 located at the top may not carry a semiconductor workpiece to reduce the risk of substrate damage.

[0121] The elastic deformation part 420 can elastically deform so that the substrate movable member 400 has good deformation elasticity and buffering effect. When the pushing movable member 320 is close to abutment, the substrate movable member 400 can smoothly and firmly fix the substrate 700.

[0122] Thus, through the push and hold of the push and hold movable member 320 of the holding assembly 300, in addition to being able to stably fix the substrate 700 connected and fixed by the substrate movable member 400, the adjacent substrates 700 can also be held and held, thereby achieving the effect of stably locking the stacked multiple substrates 700. In addition, each substrate 700 has its corresponding substrate movable member 400, thereby being able to interlock and hold each substrate 700 layer by layer, thereby achieving the effect of stably clamping and fixing all the substrates 700 in the entire set of top-opening substrate container 10, without being affected by friction and impact of the substrates 700 caused by shaking and vibration of the container body 100.

[0123] Among them, the elastic deformation part 420 can achieve the snap-fit ​​connection between the first fixing part 410 and the second fixing part 720 without deforming too much. Moreover, through the corresponding structural features of the snap-fit ​​connection, in addition to providing horizontal abutting fixation, the snap-fit ​​structure itself can also further provide vertical snap-fit ​​fixation to increase the strength of the abutting fixation.

[0124] Please also see FIG. 5A to FIG. 5C . Figure 5A It is a partially enlarged three-dimensional schematic diagram of a stacking fixing portion 710 of a substrate 700 in one embodiment of the present invention; Figure 5B It is a partially enlarged three-dimensional schematic diagram of a container body 100 according to an embodiment of the present invention; Figure 5C It is an enlarged three-dimensional schematic diagram of another part of the container body 100 in one embodiment of the present invention.

[0125] The inner surface bottom 190 of the container body 100 also includes a bottom positioning member 130, which is used to engage and fix between the substrate 700 located closest to the inner surface bottom 190 in the storage space 180 and the substrate movable member 400 arranged thereon. The bottom positioning member 130 is preferably arranged at the inner edge corner of the storage space 180 to stably fix the corners of the substrate 700; of course, it is not limited to the location and number of the bottom positioning member 130, as long as it can match the shape of the substrate 700, it falls within the scope of protection of this patent. Among them, the upper and lower surfaces of each substrate 700 have a stacking fixing portion 710 that is adapted, and adjacent substrates 700 are stacked and fixed to each other via the stacking fixing portion 710. The stacking fixing portion 710 of the substrate 700 closest to the inner surface bottom 190 is also adapted to the bottom positioning member 130, and the stacking fixing portion 710 can be aligned and fixed to the position of the bottom positioning member 130.

[0126] The container body 100 further has a bottom engaging member 110 below the inner mounting portion 120 where the holding assembly 300 is mounted, for contacting the first fixing portion 410 of the substrate movable member 400 corresponding to the bottom substrate 700, so as to stably hold the bottom substrate 700. The bottom engaging member 110 has an undercut structure, so as to be engaged and fixed with the first fixing portion 410 corresponding to the bottom substrate 700, thereby enhancing the fixation of the entire set of substrates 700 and the container body 100.

[0127] An error proofing 170 is provided on the inner wall of the container body 100 to limit the direction in which the substrate 700 is stored in the storage space 180, wherein the error proofing 170 is, for example, a protruding columnar structure corresponding to the concave structure at the edge of the substrate 700 so that the substrate 700 can be placed in the container body 100 in the correct direction.

[0128] The stacking fixing part 710 may be a concave-convex corresponding structure, thereby achieving the effect of positioning and aligning the stacking. It should be noted that the stacking fixing part 710 is not limited to the concave-convex corresponding stacking structure, and any other stackable limiting structure is within the scope of the present invention, including but not limited to other types of structural structures or principles other than applied mechanics, such as magnetic attraction to stack all substrates 700 on each other, so that multiple substrates 700 are stacked on top of each other and the left and right shaking between the substrates 700 is reduced.

[0129] Please also see FIG. 6A to FIG. 6C . Fig. 6A It is a schematic diagram of the assembly method of the elastic supporting member 500 in one embodiment of the present invention; Figure 6B is a three-dimensional schematic diagram of an elastic resisting member 500 in one embodiment of the present invention; Figure 6C FIG. 5 is a three-dimensional schematic diagram of the elastic resisting member 500 in another viewing angle according to an embodiment of the present invention.

[0130] The holding device further includes an elastic abutment 500, which is disposed on the bottom side of the substrate 700, such as the bottom side of the edge of the substrate 700. The elastic abutment 500 is used to elastically abut the semiconductor workpiece 800 carried on the substrate 700, such as the plane close to the edge of the substrate 700, to elastically abut the edge surface of the semiconductor workpiece 800 carried by the adjacent substrate 700. The elastic abutment of the elastic abutment 500 suppresses the semiconductor workpiece 800 carried by the adjacent substrate 700 below to prevent the semiconductor workpiece 800 from moving. The substrate 700 located at the top may not carry the semiconductor workpiece 800, and the elastic abutment of the elastic abutment 500 is sufficient to use it to press and fix the semiconductor workpiece 800 carried by the adjacent substrate 700 below. In this way, when the substrates 700 are stacked layer by layer, the elastic abutment 500 can provide abutment and fixation of the semiconductor workpiece 800 carried by the substrate 700, thereby reducing and preventing the displacement, vibration and friction between the substrates 700 or the semiconductor workpiece 800.

[0131] The elastic abutting member 500 includes a fixed end 510 and an elastic abutting arm 520. The fixed end 510 is detachably disposed adjacent to the bottom side of the edge of the substrate 700. One end of the elastic abutting arm 520 is connected to the fixed end 510, and the other end of the elastic abutting arm 520 elastically abuts against the edge surface of the semiconductor workpiece 800. The elastic abutting arm 520 extends from the fixed end 510 to both ends and elastically abuts against the edge surface of the semiconductor workpiece 800. The horizontal point contact can not only stably abut the substrate 700, but also reduce the friction area.

[0132] Next, the structural design and operation method of the holding device of the present invention which can adjust the number of different supporting substrates are described. 7A to 8E . Fig. 7AIt is an exploded schematic diagram of an upper opening substrate container according to an embodiment of the present invention; Figure 7B It is a schematic diagram of the installation of the frame body in one embodiment of the present invention; Fig. 8A It is a top view schematic diagram of the frame body and the quick-release member in one embodiment of the present invention; Figure 8B It is a partially enlarged schematic diagram of a frame body in one embodiment of the present invention.

[0133] The holding device of the present invention is applicable to a top-opening substrate container 10. The present invention uses the same top-opening substrate container 10, substrate movable member 400 and holding assembly 300. The same structure, same functionality and same element symbols are not described here, and only the differences are described. In this embodiment, the present invention only describes the novel structure of the holding device to solve the problem that the top-opening substrate container 10 of a single functional size lacks application flexibility due to the limitation of the load weight and the load quantity, and solves the problem that when the number of loaded substrates 700 is less than the preset load quantity of the container, the space between the upper part of the container body 100 and the container opening is not filled, so that the substrate 700 cannot be effectively supported, and is easy to shake, vibrate, jump and break in the container body 100, so as to achieve the effect of solving the problem that the container body 100 can usually only carry exactly the preset number of substrates 700, and cannot carry more or less number of substrates 700.

[0134] First, the detailed structural design of the holding device is described. The holding device includes a frame body 600, a plurality of quick-release parts 610, and a plurality of clearance parts 620. The frame body 600 is disposed in the storage space 180 to carry the substrate 700. The frame body 600 includes a frame positioning member 631, and the container body 100 includes a support member 140. The support member 140 can be designed with different heights in the storage space 180. According to the installation position of the frame body 600, it serves as the bottom positioning member of the frame body 600, thereby raising the frame body 600 to a height from the bottom 190 of the inner surface of the storage space 180. The frame positioning member 631 is fixedly matched with the support member 140 to provide weight support and position limiting functions. Among them, the support member 140 can be a protruding structure, and the shape and structure design are not limited here, so as to be snapped on the frame positioning member 631 to limit the frame body 600. The container body 100 has a supporting auxiliary member 160 to cooperate with the frame body 600 to provide weight support and / or position limiting.

[0135] A plurality of quick release parts 610 are respectively disposed on the outer side of the frame body 600, such as the edge, and each quick release part 610 includes a support part 611 and a pair of shoulders 612. The shoulders 612 are connected to both sides of the support part 611. The inner side wall of the container body 100 is also provided with a plurality of pressing parts 150. The support part 611 is pressed against the inner side wall, and each pressing part 150 is pressed against the shoulder 612 to fix the frame body 600. A plurality of clearance parts 620 provide clearance space for the retaining assembly 300 disposed in the storage space 180, so that the structural features or structures in the original container body 100 do not need to be adjusted in response to the frame body 600.

[0136] An anti-foolproofing component 170 is provided on the inner side wall of the container body 100 to limit the direction in which the frame body 600 is set in the storage space 180, wherein the anti-foolproofing component 170 is, for example, a protruding columnar structure corresponding to the corresponding concave structure on the edge of the frame body 600, so that the frame body 600 can be placed in the container body 100 in the correct position.

[0137] The quick release part 610 is arranged at the edge of the frame body 600 and has a feature of a yielding part. The abutting part 611 is connected to the frame body 600 and is bent downward and hooked at the end to form an elastic abutting hook. The end of the abutting hook may have a plane to increase the area of ​​abutment with the container body 100. The shoulder part 612 is located at the end of the abutting part 611 and has a feature of protruding at both ends compared to the plane at the end of the top hook to be limited in the pressing part 150 of the container body 100. When the abutting part 611 is forced to leave the inner wall for a distance, the shoulder part 612 is separated from the pressing part 150, so that the frame body 600 is in a detachable state.

[0138] The shoulder 612 may be an annular structure or a semi-annular structure to provide a buckle limit structure with deformation buffer, and may provide a corresponding force for removing the clamping and fixing tool to separate the clamping member 150. The abutment member 611 may be adjusted to a higher hardness by means of structure or material to prevent the frame body 600 from being easily removed due to human error, resulting in the occurrence of errors in the type and quantity of the carrier substrate 700 in the subsequent process. It should be noted that the present embodiment is not limited to the structure or form of the quick release member 610 and the clamping member 150, and any structure that can clamp and fix the frame body 600 in the container body 100 is within the scope of patent protection of the present invention.

[0139] The frame body 600 is disposed in the storage space 180 in different installation modes. For example, the frame body 600 includes a raised carrying surface 650 for carrying the substrate 700, so as to further increase the carrying plane of the carried substrate 700, that is, to increase the height of the frame body 600 from the bottom 190 of the inner surface of the storage space 180, thereby reducing the number of the carried substrates 700 and allowing the carried substrates 700 to be closer to the container door 200.

[0140] In another embodiment, the frame body 600 includes a recessed carrying surface 660 for carrying the substrate 700, so as to further lower the carrying plane of the carried substrate 700 compared to the height of the original carrying pad, that is, to reduce the height of the frame body 600 from the bottom 190 of the inner surface of the storage space 180, so as to increase the number of substrates 700 that can be carried. Thus, through the different variants of the raised carrying surface 650 and the recessed carrying surface 660 of the frame body 600, the frame body 600 can be more flexibly and freely applied to substrates 700 of different types, sizes, and thicknesses, greatly expanding the versatility of the top-opening substrate container 10.

[0141] The frame body 600 of the holding device provided by one embodiment of the present invention can not only bring a smaller number of substrates 700 closer to the container opening and elevate its overall center of gravity when loading, thereby increasing the safety and stability of the substrates 700 that are not easily shaken therein, but also achieve the effect that a container body 100 of one size can be effectively used to load substrates 700 of different types, sizes, and thicknesses.

[0142] The frame body 600 includes a stacking alignment portion 640 for snapping and fixing the substrate 700, wherein the substrate 700 is used to carry the semiconductor workpiece 800. As mentioned above, the substrate 700 has stacking fixing portions 710 on the upper and lower surfaces, and the stacking alignment portion 640 is a structural or functional feature adapted to the stacking fixing portion 710, so that the substrate 700 can be fixed and limited to the frame body 600. The structural features of the frame body 600 are configured on both the front and back sides of the frame body 600, so that it can be fixed to the container body 100 from any surface and can maintain its structural function, greatly increasing the convenience of use.

[0143] The frame body 600 of the present invention can raise the substrate 700 to be carried, and in addition to solving the problem that the container body 100 is easy to shake when a small number of substrates 700 are loaded, it can also further improve its overall center of gravity, so that when the substrate 700 is very heavy, the top-opening substrate container 10 can be safely and effectively carried and transported. Furthermore, the frame body 600 of the present invention also solves the problem that the top-opening substrate container 10 must be re-molded and designed to meet the different types and specifications of substrates 700 in order to cope with the design of substrates 700 of different types, sizes, thicknesses, and density specifications. Through the frame body 600 provided by the present invention, only the frame body 600 needs to be redesigned to make the top-opening substrate container 10 of a single functional size applicable to substrates 700 of different types, sizes, thicknesses, and density specifications, thereby achieving the effect of greatly reducing manufacturing costs and improving usage efficiency.

[0144] Fig. 9 Schematic diagram of an exploded view of a container door body to which a holding device in one embodiment of the present invention is applicable. The holding device of the present invention is applicable to a top-opening substrate container 10. The present invention uses the same top-opening substrate container 10, substrate movable member 400 and holding assembly 300. The same structure, same functionality and same element symbols are not repeated here, and only the differences are described. In this embodiment, only the holding device of the present invention with a novel structure is described to achieve the function that the container door body 200 can still maintain airtightness under the condition of carrying a heavy top-opening substrate container 10.

[0145] The holding device of the present invention includes at least one flattening element 240. The container door body 200 includes a door shell 250 and a door plate 220. The door plate 220 is used to combine with the door shell 250 to define a receiving space 251. The receiving space 251 is used to receive the latch mechanism 230. The flattening element 240 is disposed in the receiving space 251. The flattening element 240 is integrally extended to abut against two opposite inner walls of the container door body 200, that is, two opposite inner walls of the door shell 250. The flattening element 240 and the latch mechanism 230 are disposed in parallel. The flattening element 240 is a carbon rod, and the overall height of the carbon rod is lower than the total depth of the receiving space 251. The flattening element 240 may also be other ductile material elements with high rigidity and light weight.

[0146] The leveling element 240 is used to provide structural support and force transmission sharing for the door shell 250 by extending the extension length of the two opposite inner walls of the door shell 250, thereby providing structural reinforcement and uniform force effect for the door shell 250. The leveling element 240 is disposed at a transport position adjacent to the container door body 200, for example Fig. 9 The ears 252 at both ends are shown.

[0147] Thus, by setting the leveling element 240 of the holding device in the container door 200, the leveling element 240 can concentrate the stress points of the container door 200 during transportation at the locking point between the latch mechanism 230 and the container body 100 and the ears on both sides, and distribute the large amount of stress to the door shell 250 through the extended length of the leveling element 240, thereby solving the limitation of the load-bearing weight of the top-opening substrate container 10, and at the same time solving the problem that when the load-bearing weight reaches the upper limit value, the container door 200 of the top-opening substrate container 10 is easily twisted and deformed during complicated handling and transportation, thereby affecting the airtightness or even worse, the container door 200 is deformed and separated, resulting in falling and damage.

[0148] In addition, since the weight of the leveling element 240 is much lighter than that of the latching structure 230, the problem of using a plurality of latching structures 230 to be distributed and installed at various locations of the container door 200 for stable locking of the top-opening substrate container 10 is solved. Although this approach can disperse the load lifted upward to improve the deformation of the door when the top-opening substrate container 10 is transferred, it is necessary to use a plurality of latching structures 230, which in turn increases the overall weight of the top-opening substrate container 10, makes the assembly more complicated and the manufacturing cost high, and makes it difficult to design the container door 200 and the plurality of latching structures 230 to disperse the load. However, the leveling element 240 of the present invention is much lighter than the latching structure 230, so that the deformation problem of the container door 200 can be solved by the leveling element 240 while maintaining a small number of latching structures 230, and the air tightness of the door can be enhanced with a lightweight element.

[0149] In one embodiment of the present invention, there may still be multiple latch mechanisms 230 to provide more locking positions or different structural combinations, such as two latch mechanisms 230 to effectively achieve a balance between locking and weight distribution.

[0150] In one embodiment of the present invention, there are multiple leveling elements 240 to provide structural support and force dispersion at multiple different positions and different stress hot spots of the door shell 250. The multiple leveling elements 240, for example two, are respectively fixed on both sides of the door shell 250 to provide uniform force dispersion at the edge of the door shell 250 and strengthen the structural support and force dispersion of the ear portion 252 of the door shell 250.

[0151] In one embodiment of the present invention, the extension length of the leveling element 240 extends from one end of the door shell 250 to the other end of the door shell 250 and extends to support the two opposite inner walls of the container door body 200 to completely disperse the force on the long side of the entire door shell 250 and provide structural support for the long side of the entire door shell 250.

[0152] In one embodiment of the present invention, the leveling element 240 and the latch mechanism 230 are arranged in parallel to provide force distribution and structural support close to the locking position of the latch mechanism 230. The leveling element 240 and the latch mechanism 230 are arranged in parallel to evenly distribute the force of the ear force point and the locking force point of the latch mechanism 230, and it is also beneficial to the space allocation design in the door shell 250. The leveling element 240 and the latch mechanism 230 are arranged symmetrically to make the support structure and force distribution symmetrical to prevent the container door body 200 from being deflected or deformed.

[0153] In one embodiment of the present invention, the latch mechanism 230 includes a control element 231 and a latch arm 232. The control element 231 controls the latch arm 232 to selectively protrude outside the door shell 250 to control the container door 200 to be locked to the container body 100, or controls the latch arm 232 to be retracted to release the locking of the container door 200 and the container body 100. The control element 231 is, for example, a cam, and the latch arm 232 connected to the cam is driven to protrude or retract by rotating the cam. The leveling element 240 and the latch arm 232 of the latch mechanism 230 are arranged in parallel, providing force dispersion and structural support close to the locking position of the latch arm 232 and the container door 200, and evenly distributing the force of the force point of the ear 252 and the locking force point of the latch arm 232, and also facilitating the space allocation design in the door shell 250, so as to reduce the situation of overlapping the leveling element 240 and the latch arm 232, so as to maintain the extension length of the leveling element 240 and achieve effective structural support and force dispersion. It should be noted that the number and position of the leveling element 240 and the latch mechanism 230 are not limited to the examples of this embodiment.

[0154] Through the flattening element 240 of the holding device provided by an embodiment of the present invention, the overall load of the container door body 200 can be dispersed through the flattening element 240, and the flatness of the door shell 250 can be enhanced to prevent the airtight rubber strip between the container door body 200 and the container body 100 from exposing the gap, while improving the strength of the container door body 200 to achieve the effect of flatness and airtightness. In addition, the flattening element 240 can replace a part of the latch mechanism 230 to minimize the number of latch mechanisms 230, which not only reduces the weight of the entire container door body 200, but also saves the consumption of parts and reduces the production cost.

[0155] Thus, the holding device of the present invention can not only tightly and stably fix the substrates carried by the top-opening substrate container to prevent the substrates from shaking and impacting, but also maintain its stability when loading different numbers of substrates to avoid the hazards of shaking and low center of gravity, and can maintain the structural strength and airtightness of the container door to protect the cleanliness of the substrates inside and reduce the risk of falling, thereby achieving the effect of protecting the container carrying the substrates.

[0156] The present invention has been disclosed in the above with preferred embodiments, but it should be understood by those skilled in the art that the embodiments are only used to describe the present invention and should not be interpreted as limiting the scope of the present invention. It should be noted that all changes and substitutions equivalent to the embodiments should be included in the scope of the present invention. Therefore, the protection scope of the present invention shall be based on the scope of the patent application, and the scope of the attached claims shall be interpreted in the broadest sense to include all modifications, similar arrangements and processes, etc.

Claims

1. A holding device for a top-opening substrate container, characterized in that: The top-opening substrate container includes a container body and a container door body, wherein the container door body is configured to be combined with the container body to define a storage space, and the storage space is used to store a plurality of substrates. The holding device includes: A substrate movable member is disposed on the outer side of the substrate; as well as A holding component is disposed in the receiving space, and the holding component is used to push the substrate movable part to move. The holding component includes: A holding body, disposed on the inner side of the container body; and A push-pushing movable member is disposed on the holding body, and the push-pushing movable member includes: a first guiding slope for resisting a second guiding slope on the inner surface of the container door, wherein the first guiding slope is pushed and displaced correspondingly with the second guiding slope according to the resisting force of the container door; and A push portion is connected to the first guide slope, the push portion corresponds to the position of the substrate movable part, and pushes the substrate movable part accordingly according to the displacement degree of the first guide slope, so that the substrate movable part displaces the substrate until multiple substrates are stacked and positioned.

2. The holding device according to claim 1, characterized in that: The holding body includes an inclined guide groove, and the pushing movable member includes a guiding portion connected to the pushing portion, the guiding portion is protruding in the inclined guide groove, and the guiding portion is displaced in the inclined guide groove according to the holding force of the container door body, so that the pushing movable member is close to or away from the holding body.

3. The holding device according to claim 2, characterized in that: The holding assembly also includes: An elastic member is arranged between the retaining body and the pushing movable member. The elastic member is configured to provide an elastic change in the displacement of the guide portion along the inclined guide groove away from the retaining body or the displacement of the guide portion along the inclined guide groove toward the retaining body according to the holding force of the container door body.

4. The holding device according to claim 1, characterized in that: The substrate movable parts include: a connecting portion fixedly connected to the outer side of the substrate; an elastic deformation portion connected to the connection portion, the elastic deformation portion corresponding to the position of the pushing portion, the elastic deformation portion providing elastic deformation and pushing displacement of the substrate according to the pushing displacement degree of the pushing portion; and A first fixing portion is disposed on one side of the elastic deformation portion, and the first fixing portion is used to fix a second fixing portion of the adjacent substrate.

5. The holding device according to claim 1, characterized in that: The bottom of the inner surface of the container body further comprises a bottom positioning piece, and the substrate has a substrate positioning piece corresponding to the bottom positioning piece, and the bottom positioning piece is used to position the substrate located in the receiving space closest to the bottom of the inner surface.

6. The holding device according to claim 1, characterized in that: The bottom of the inner surface of the container body also includes a bottom engaging member for engaging and fixing between the substrate located in the receiving space closest to the bottom of the inner surface and the substrate movable member disposed thereon.

7. The holding device according to claim 1, characterized in that: The upper and lower surfaces of each substrate are provided with an adapted stacking fixing portion, and the adjacent substrates are stacked and fixed to each other via the stacking fixing portion.

8. The holding device according to claim 1, characterized in that: The invention also comprises at least one elastic supporting member, which is arranged on the bottom side of the substrate and is used for elastically supporting a semiconductor workpiece carried on the substrate.

9. The holding device according to claim 8, characterized in that: The elastic abutment member includes a fixed end and an elastic abutment arm. The fixed end is detachably arranged on the bottom side of the substrate. One end of the elastic abutment arm is connected to the fixed end. The other end of the elastic abutment arm elastically abuts against the edge surface of the semiconductor workpiece.

10. The holding device according to claim 1, characterized in that: The inner side wall of the container body is provided with a foolproof part for limiting the direction in which the substrates are stored in the storage space.

11. A holding device for a top-opening substrate container, characterized in that: The top-opening substrate container includes a container body and a container door body, wherein the container door body is configured to be combined with the container body to define a storage space, and the storage space is used to store a plurality of substrates. The holding device includes: A frame body is disposed in the receiving space and is used to carry the substrate; A plurality of quick-release parts are respectively disposed on the outer side of the frame body, each of the quick-release parts includes a support member and a pair of shoulders, the pair of shoulders are connected to both sides of the support member, and the inner side wall of the container body is further provided with a plurality of pressing fasteners, the support member is against the inner side wall, and each of the pressing fasteners is pressed on the pair of shoulders to fix the frame body; and A plurality of accommodating portions provide accommodating space for a retaining component disposed in the receiving space.

12. The holding device according to claim 11, characterized in that: When the abutting member is forced to leave the inner wall by a distance, the pair of shoulders are separated from the pressing member, so that the frame body is in a detachable state.

13. The holding device according to claim 11, characterized in that: The bottom of the inner surface of the container body also includes a bottom positioning piece, and the frame body has a frame positioning piece corresponding to the bottom positioning piece. The bottom positioning piece is used to position the frame positioning piece to define a height distance between the frame body and the bottom of the inner surface of the container body. The bottom positioning piece and the buckles are at the same horizontal height.

14. The holding device according to claim 11, characterized in that: The inner side wall of the container body is provided with an anti-fouling component for limiting the direction in which the frame body is arranged in the storage space.

15. A holding device for a top-opening substrate container, characterized in that: The top-opening substrate container comprises a container body and a container door, wherein the container door is configured to be combined with the container body, and the container door has an accommodating space for accommodating a latch mechanism. The holding device comprises: At least one leveling element is disposed in the accommodating space. The leveling element integrally extends to abut against two opposite inner walls of the container door body, and the leveling element and the latch mechanism are disposed in parallel.

16. The holding device according to claim 15, characterized in that: The flattening element is a carbon rod, and the overall height of the carbon rod is lower than the total depth of the accommodating space.

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