A silicon wafer basket lifting and transporting device

Abstract

The present invention discloses a silicon wafer flower basket lifting and transporting device, which specifically relates to the photovoltaic panel production technology field, including a transport frame, a low-position conveying mechanism and a high-position conveying mechanism are arranged on the transport frame, a lifting assembly is arranged between the low-position conveying mechanism and the high-position conveying mechanism, a clamping and flipping assembly is arranged at the position of the high-position conveying mechanism corresponding to the lifting assembly, and the clamping and flipping assembly includes a flip frame, which is rotatably arranged above the transport frame, and two groups of clamping plates are arranged on one side of the flip frame corresponding to the lifting assembly, and a limited blocking frame is fixedly connected to the clamping plate on the side corresponding to the open mouth of the flower basket. When the present invention performs a flipping operation on the flower basket, the limiting blocking frame can be used as the final restriction to avoid the silicon wafer from having a large range of movement due to excessive rotation speed, thereby causing impact damage and detachment from the flower basket, thereby ensuring the transportation safety of the flower basket, and further improving the flipping operation speed of the flower basket and improving the transportation efficiency.

Description

Technical Field

[0001] The present invention relates to the technical field of photovoltaic panel production, and more specifically, to a silicon wafer basket lifting and transporting device. Background Art

[0002] As a clean, safe and renewable energy, solar energy is the development direction of global new energy. The production process of solar panels covers multiple links from silicon material purification, silicon wafer manufacturing, cell processing to component assembly, and each link requires strict quality control and technical guarantee. With the advancement of technology, the production process is constantly optimized, production efficiency is improved, and costs are reduced, making solar panels an increasingly economical and viable clean energy solution. Among them, silicon wafers are the core component of photovoltaic cells and are responsible for converting light energy into electrical energy. The quality and characteristics of silicon wafers directly determine the efficiency and performance of solar panels. Therefore, the production of silicon wafers is particularly important.

[0003] The formation of silicon wafers requires the steps of raw material preparation, silicon material purification, polysilicon or monocrystalline silicon growth, silicon wafer cutting, cleaning and testing, surface treatment, texturing, diffusion bonding, electrode production, rapid sintering, etc. After cutting, the silicon wafers are mainly in a thin sheet state and are fragile. Therefore, in order to facilitate the transportation of silicon wafers and subsequent processing, silicon wafer baskets are usually used to store silicon wafers, and then use silicon wafer baskets to support and protect silicon wafers. By arranging silicon wafers neatly in the basket, multiple processes of the same process can be processed at one time, reducing the time required for single-wafer processing.

[0004] The silicon wafer basket is mainly composed of a rectangular frame (usually made of corrosion-resistant, high-strength materials such as Teflon, quartz, stainless steel or a specific type of plastic. These materials have good chemical stability and mechanical strength and can maintain performance in high temperature and corrosive environments, thereby providing overall support and structural stability to ensure that the basket will not be deformed or damaged during transportation and handling). A plurality of parallel grids or slots are arranged inside the frame along its length to fix the silicon wafers. The spacing between each grid or slot is precisely designed according to the size of the silicon wafer to ensure that the silicon wafers will not collide or shift during transportation, thereby arranging the silicon wafers neatly to prevent them from rubbing or colliding with each other during transportation and handling, thereby reducing the risk of scratches and cracks. Among them, since the silicon wafers need to be loaded into or taken out of the basket using loading equipment (such as a telescopic conveyor belt), the basket and the grid or slot inside it need to reserve one side opening to form three-side positioning. In order to avoid damage to the silicon wafers and sufficient processing in subsequent processing operations (such as cleaning), it is necessary to ensure that the thickness of the grid or slot is greater than the thickness of the silicon wafer, so that the surface of the silicon wafer can be fully exposed and will not be worn with the basket when loaded and taken out.

[0005] Due to the highly centralized and automated production method of silicon wafers, in the production workshop, conveying devices are usually used to transport and transfer flower baskets so that the silicon wafers can be transferred to various workstations for processing. In addition, as the operational requirements of each process and the location of the equipment vary, the flower baskets loaded with silicon wafers need to be lifted and transferred as needed during the transfer process. For some processing processes, the vertical flower baskets also need to be adjusted to a horizontal state to meet the processing requirements.

[0006] Among them, in order to improve the overall production efficiency and increase the one-time processing volume, the flower basket can be set to be higher, that is, by increasing the height of the flower basket, the storage capacity of the internal silicon wafers can be increased, thereby improving the transportation efficiency, speeding up the production speed, and reducing the production cost. However, when there are many processing processes that require the flower basket to be turned over, the flower basket needs to be turned over multiple times during the transportation process. At this time, for the conventional shorter flower basket, the linear speed of the end of the flower basket is relatively small, and the kinetic energy of the silicon wafers at the end position of the flower basket is relatively small. However, for the flower basket with an extended (high) design, at the same rotation speed, the kinetic energy of the silicon wafers at the end of the flower basket is relatively large, and they are greatly affected by inertia. Especially when the rotation starts and stops, it is easy to cause the silicon wafers located near the end to shake and move inside the flower basket, and even cause collision or throwing out in severe cases, thereby damaging the silicon wafers, which is not conducive to subsequent processing operations and affects the production quality of the silicon wafers. When the direct blocking structure in the prior art is used to directly contact and block the silicon wafers, the silicon wafers will be deformed due to inertial impact during the turning process. In severe cases, the silicon wafers and the direct blocking structure will be reversely extruded, thereby causing excessive pressure and breakage. Summary of the invention

[0007] The present invention provides a silicon wafer basket lifting and transporting device to solve the problem that: for a longer (higher) basket, the existing transport equipment is likely to cause the silicon wafers located near the end to shake and move inside the basket when the rotation speed is high, and even cause collision or throwing out in severe cases, thereby damaging the silicon wafers, which is not conducive to subsequent processing operations and affects the production quality of the silicon wafers. When the direct blocking structure in the prior art is used to directly contact and block the silicon wafers, the silicon wafers will be deformed due to inertial impact during the flipping process. In severe cases, it will cause the silicon wafers and the direct blocking structure to form reverse extrusion, thereby causing excessive pressure and breakage.

[0008] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a silicon wafer basket lifting and transporting device, comprising a transport frame, a low-position conveying mechanism and a high-position conveying mechanism are arranged on the transport frame, a lifting component is arranged at the end of the high-position conveying mechanism, and a clamping and flipping component is arranged at the position of the high-position conveying mechanism corresponding to the lifting component;

[0009] The lifting assembly includes a lifting frame, a bracket is arranged at the bottom of the lifting frame, the lifting frame is vertically slidably arranged on the transfer frame, and the bracket is used to support the flower basket;

[0010] The clamping and flipping assembly includes a flipping frame, which is rotatably arranged above the transfer frame. Two groups of clamping plates are arranged on one side of the flipping frame corresponding to the jacking assembly. The two groups of clamping plates move toward or away from each other on the flipping frame. A limited blocking frame is fixedly connected to the clamping plate on the side corresponding to the opening of the flower basket. The limited blocking frame is arranged corresponding to the silicon wafer and is arranged along the height direction of the flower basket.

[0011] A plurality of air nozzle assemblies are arranged on one side of the limiting frame corresponding to the silicon wafer, an even flow channel is arranged inside the limiting frame, the air nozzle assembly is communicated with the even flow channel, the even flow channel is connected to an air flow driving device through a joint pipe and a pipeline, the air flow driving device forms a flowing air flow between two layers of silicon wafers through the air nozzle assembly, a group of air nozzle assemblies is arranged every two silicon wafers, and the air nozzle assemblies are arranged corresponding to the area between two adjacent silicon wafers, and air flow windows are arranged at the positions corresponding to the air nozzle assemblies on the side of the silicon wafer away from its open mouth;

[0012] At least two groups of limit frames and air nozzle assemblies are arranged, and the two groups of limit frames and air nozzle assemblies are arranged corresponding to the positioning grooves on both sides of the silicon wafer respectively. Two groups of uniform air flow channels are arranged in the limit frames, and the two groups of uniform air flow channels are distributed up and down with the clamping plate as the boundary. Each uniform air flow channel is independently connected to a group of air flow driving equipment, and the air flow driving equipment includes a blowing pump and an air suction pump, and the blowing pump and the air suction pump are connected to the uniform air flow channel through a control valve.

[0013] In a preferred embodiment, the air nozzle assembly includes a rotating seat, which is rotatably mounted on a limit frame. A flat flow channel is provided on the side of the rotating seat facing away from the limit frame. The rotating seat is connected to the flow channel. The flat flow channel is used to blow out or inhale a flat airflow. A damping structure is provided between the rotating seat and the limit frame.

[0014] In a preferred embodiment, the flat flow channel includes a flat flow channel and an oblique flow channel. The airflow direction of the flat flow channel is set along a direction parallel to the length direction of the positioning grooves on both sides of the flower basket, and the airflow direction of the oblique flow channel is set along a direction inclined to the length direction of the positioning grooves on both sides of the flower basket.

[0015] In a preferred embodiment, a flower basket top fixer is provided on the top of the lifting frame, a flower basket bottom fixer is provided on the bracket, and slot structures plugged into the output ends of the flower basket top fixer and the flower basket bottom fixer are respectively provided on the top and bottom of the flower basket.

[0016] In a preferred embodiment, a lifting rail is provided on the transfer frame at a position corresponding to between the low-position conveying mechanism and the high-position conveying mechanism, the lifting frame is slidably arranged on the lifting rail through a bracket, and the lifting frame is provided with a lifting drive for driving the lifting frame to rise and fall.

[0017] In a preferred embodiment, the clamping and flipping assembly also includes a lifting frame and a lifting guide rail, the lifting guide rail is fixedly mounted on the transfer frame, the lifting frame is slidably arranged on the lifting guide rail, the lifting guide rail is provided with a lifting drive for driving the lifting frame to lift and lower, and the lifting frame is provided with a rotating drive for driving the flipping frame to rotate.

[0018] In a preferred embodiment, two groups of transfer conveying mechanisms are arranged on the bracket, a reserved space is arranged between the two groups of transfer conveying mechanisms, and the bottom fixture of the flower basket is arranged in the reserved space.

[0019] The beneficial effects of the present invention are as follows: by arranging a low-position conveying mechanism, a high-position conveying mechanism, a lifting assembly and a clamping and flipping assembly, the present invention can perform multi-directional transport and lifting operations on the flower basket, and can also flip the flower basket according to needs, thereby being able to adapt to most silicon wafer processing techniques and equipment and improve processing efficiency. At the same time, during the flipping process, a limit frame can be used as the final restriction to prevent the silicon wafer from having a large range of movement due to excessive rotation speed, thereby preventing impact damage and detachment from the flower basket, thereby ensuring the safe transportation of the flower basket, and further improving the flipping operation speed of the flower basket and improving the transportation efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic diagram of the overall structure of the present invention.

[0021] Figure 2 It is a schematic diagram of the jacking state of the present invention.

[0022] Figure 3 This is a schematic diagram of the state in which the flower basket of the present invention is transported and exported in a vertical posture.

[0023] Figure 4 This is a state diagram of the present invention using a buffer pad to limit and block the silicon wafer.

[0024] Figure 5 It is a schematic diagram of the clamping and flipping assembly of the present invention controlling the flipping of a flower basket.

[0025] Figure 6 This is a schematic diagram of the state in which the flower basket is turned over and transported in a horizontal posture according to the present invention.

[0026] Figure 7 This is a schematic structural diagram of the present invention using an air nozzle assembly to replace the buffer pad to assist the silicon wafer in blocking.

[0027] Figure 8 This is a state diagram of two groups of air nozzle assemblies of the present invention blowing airflow on the surface of a silicon wafer.

[0028] Fig. 9 This is a state diagram of the air nozzle assembly of the present invention blowing air to form airflow between the side silicon wafers.

[0029] Fig.10 This is a state diagram of the air nozzle assembly of the present invention sucking air to form an air flow between two layers of silicon wafers.

[0030] Fig.11 It is a schematic structural diagram of the improved air nozzle assembly of the present invention.

[0031] Fig.12 This is a schematic diagram of the distribution of the improved air nozzle assembly between the corresponding two layers of silicon wafers of the present invention.

[0032] Fig.13 This is a state diagram of the airflow being blown out when the flat air channel of the present invention is flush with the silicon wafer.

[0033] Fig.14 This is a state diagram of the airflow being blown out when the flat air duct of the present invention is relatively tilted to the silicon wafer.

[0034] Fig.15 This is a schematic diagram of the structure of the improved flat airway of the present invention.

[0035] Fig.16 This is a state diagram of two groups of air nozzle assemblies blowing airflow on the surface of a silicon wafer after the flat airway is improved according to the present invention.

[0036] The accompanying drawings are marked as follows: 1. transfer rack; 11. low-position conveying mechanism; 12. high-position conveying mechanism; 13. lifting guide rail; 14. lifting drive; 2. lifting assembly; 21. lifting rack; 22. bracket; 23. top fixture of flower basket; 24. transfer conveying mechanism; 25. bottom fixture of flower basket; 3. clamping and turning assembly; 31. turning rack; 32. clamping plate; 33. lifting rack; 34. lifting guide rail; 35. lifting drive; 4. flower basket; 41. silicon wafer; 42. positioning groove; 43. air flow window; 5. limit rack; 51. buffer pad; 52. air nozzle assembly; 521. rotating seat; 522. flat flow channel; 5221. flat flow channel; 5222. oblique blowing flow channel; 53. uniform flow channel; 54. joint pipe. DETAILED DESCRIPTION

[0037] The present application is further described in detail below in conjunction with the accompanying drawings. It is necessary to point out here that the following specific implementation methods are only used to further illustrate the present application and cannot be understood as limiting the scope of protection of the present application. Technical personnel in this field can make some non-essential improvements and adjustments to the present application based on the above application content.

[0038] Refer to the instruction manual Figures 1 to 16A silicon wafer flower basket lifting and transferring device comprises a transfer frame 1, on which a low-position conveying mechanism 11 and a high-position conveying mechanism 12 are arranged, a lifting component 2 is arranged between the low-position conveying mechanism 11 and the high-position conveying mechanism 12, and a clamping and flipping component 3 is arranged at the position of the high-position conveying mechanism 12 corresponding to the lifting component 2.

[0039] The lifting assembly 2 includes a lifting frame 21, a bracket 22 is provided at the bottom of the lifting frame 21, the lifting frame 21 is vertically slidably arranged on the transfer frame 1, the bracket 22 is used to support the flower basket 4, and the lifting frame 21 realizes the lifting of the flower basket 4 by lifting and lowering on the transfer frame 1. Specifically, it can be lifted upward from the low-position conveying mechanism 11 to the high-position conveying mechanism 12, or the flower basket 4 can be driven from the high-position conveying mechanism 12 to the low-position conveying mechanism 11, thereby realizing the height change of the flower basket 4, and then output by the low-position conveying mechanism 11 or the high-position conveying mechanism 12, wherein one side of the flower basket 4 is set as an open mouth, that is, the silicon wafer enters and exits the flower basket 4 through the open mouth, and the other inner walls of the flower basket 4 are provided with positioning grooves 42 for clamping the silicon wafer 41, and the height of the positioning grooves 42 is greater than the thickness of the silicon wafer 41.

[0040] The clamping and flipping assembly 3 includes a flip frame 31, which is rotatably arranged above the transfer frame 1. Two groups of clamping plates 32 are arranged on one side of the flip frame 31 corresponding to the jacking assembly 2. The two groups of clamping plates 32 move towards or away from each other on the flip frame 31, thereby realizing the clamping function of the flower basket 4. A limited blocking frame 5 is fixedly connected to the clamping plate 32 on the open side of the flower basket 4. The limited blocking frame 5 is arranged corresponding to the unrestricted side of the silicon wafer 41, that is, corresponding to the side of the silicon wafer 41 without the positioning groove 42. The limited blocking frame 5 is arranged along the height direction of the flower basket 4, that is, the limited blocking frame 5 can cover all the silicon wafers 41.

[0041] It should be noted that, in the above-mentioned embodiment, the low-position conveying mechanism 11 and the high-position conveying mechanism 12 are only one of the embodiments provided in this embodiment. Correspondingly, more conveying mechanisms can be provided, or the low-position conveying mechanism 11 and the high-position conveying mechanism 12 can be provided on both sides of the jacking component 2, so as to realize the transfer and transportation in more directions. The clamping and flipping component 3 is mainly provided at the rising position of the jacking component 2, that is, the position corresponding to the jacking component 2 and the high-position conveying mechanism 12. According to the use requirements, if the flower basket 4 needs to be flipped, the flip frame 31 is controlled to reach the output position of the jacking component 2 (corresponding to the jacking end position), and then the two groups of clamping plates 32 are controlled to approach each other to clamp the flower basket 4, and then the flip frame 31 is driven to rotate to drive the flower basket 4 to flip. It should be noted that the open mouth of the flower basket 4 is set upward during flipping. During the flipping process, the limit frame 5 can be used as the final limit to avoid the silicon wafer 41 from having a large range of movement due to excessive rotation speed, thereby causing impact damage and separation from the flower basket 4, thereby ensuring the safe transportation of the flower basket 4.

[0042] For further information, please refer to the attached manual. Figure 4 Based on the above-mentioned limiting effect on the flower basket 4, in this embodiment, a buffer plate 51 can be set on the inner side of the limiting frame 5. The buffer plate 51 is a plastic structure, and after the two groups of clamping plates 32 clamp the flower basket 4, the buffer plate 51 fits against the edge of the silicon wafer 41, that is, the edge of the silicon wafer 41 is rigidly positioned with the help of the buffer plate 51 to prevent the silicon wafer 41 from moving along the positioning groove 42.

[0043] Furthermore, a flower basket top fixer 23 is provided on the top of the lifting frame 21, and a flower basket bottom fixer 25 is provided on the bracket 22. The top and bottom of the flower basket 4 are respectively provided with slot structures plugged into the output ends of the flower basket top fixer 23 and the flower basket bottom fixer 25. Among them, the transfer conveying mechanism 24 and the flower basket top fixer 23 can select a cylinder structure (other commonly used fixing structures such as locking and clamping can also be used). With the help of the cylinder lifting, the upper and lower ends of the flower basket 4 are squeezed and limited to ensure the stability of the flower basket 4 during the lifting process and it will not fall off. At the same time, the clamping plate 32 is provided with a slot structure that engages with the outer wall of the flower basket 4 at the position corresponding to the flower basket 4. When the clamping plate 32 clamps the flower basket 4, the stability of the flower basket 4 is guaranteed.

[0044] In the above-mentioned embodiments, refer to the attached specification. Figure 1 and Figure 2 A lifting guide rail 13 is provided on the transfer frame 1 at a position corresponding to the position between the low-position conveying mechanism 11 and the high-position conveying mechanism 12. The lifting frame 21 is slidably provided on the lifting guide rail 13 through a bracket 22. The lifting frame 21 is provided with a lifting driver 14 for driving the lifting frame 21 to rise and fall.

[0045] Furthermore, the clamping and flipping assembly 3 also includes a lifting frame 33 and a lifting guide rail 34. The lifting guide rail 34 is fixedly installed on the transfer frame 1, and the lifting frame 33 is slidably set on the lifting guide rail 34. The lifting guide rail 34 is provided with a lifting driver 35 for driving the lifting frame 33 to rise and fall, and the lifting frame 33 is provided with a rotating driver for driving the flipping frame 31 to rotate.

[0046] It should be noted that in the above scheme, the lifting drive 14 and the lifting drive 35 are both commonly used linear drive structures, such as cylinders, gear racks, etc. Considering that the flower basket 4 is relatively high and the lifting stroke is relatively large, the lifting drive 14 and the lifting drive 35 in this embodiment are preferably motor screw structures, so as to realize the lifting and lowering drive of the lifting frame 21 and the turning frame 31, and the rotating drive between the lifting frame 33 and the turning frame 31 is preferably a motor structure. At the same time, the clamping plate 32 is connected to the turning frame 31 through a linear drive structure. The linear drive motor structure is preferably a cylinder, and other clamping drives can also be selected. For the above-mentioned various types of drive structures, the commonly used drive equipment in industrial production can be used. Therefore, this embodiment will not be explained in detail.

[0047] In the above embodiment, the flower basket 4 to be transported can be first transported to the bracket 22 by the low-position conveying mechanism 11, and then the lifting frame 21 and the bracket 22 can be controlled by the lifting driver 14 to rise, and the flower basket 4 can be brought to the high-position conveying mechanism 12. At this time, if the flower basket 4 does not need to be turned over, the turning frame 31 can be controlled to rise away from the flower basket 4, and the flower basket 4 can be output to the outside by means of the high-position conveying mechanism 12 (refer to the attached figure of the specification). Figure 3 ), if the flower basket 4 needs to be turned over, after the flower basket 4 is lifted up, the turning frame 31 is controlled to descend so that the two groups of clamping plates 32 are respectively located at the front and rear sides of the flower basket 4, and then the two groups of clamping plates 32 are driven to approach each other by the linear drive structure to clamp the flower basket 4, and then the turning frame 31 is driven to rotate by the rotary driver to turn the flower basket 4, and then the flower basket 4 turned over to the horizontal distribution is output by the high-position conveying mechanism 12 (refer to the attached manual). Figure 5 and Figure 6 ).

[0048] Among them, the clamping plate 32 preferentially clamps the middle position of the flower basket 4, shortens the turning diameter of the flower basket 4, reduces the turning linear speed of the end of the flower basket 4, and in order to avoid interference during turning, after clamping the flower basket 4, the lifting frame 33 can be driven to drive the turning frame 31 to rise a certain distance, and then the turning frame 31 is driven to turn over. During the turning process, the limiting frame 5 limits and blocks the open mouth of the flower basket 4 to protect the silicon wafer 41. The above transportation process is only one of the examples made for understanding the present invention. In actual use, the above components can be freely set according to needs and the corresponding transportation method can be selected. This embodiment will not explain too much.

[0049] In order to facilitate the output of the flower basket 4 from the bracket 22, this embodiment also provides the following technical solutions. For details, refer to the attached manual. Figure 3 and Figure 6Two groups of transfer conveying mechanisms 24 are arranged on the bracket 22, and a reserved space is arranged between the two groups of transfer conveying mechanisms 24. The bottom fixture 25 of the flower basket is arranged in the reserved space, and then after the flower basket 4 is lifted, the flower basket 4 can be directly output with the help of the transfer conveying mechanism 24, so that it is transported to the high-position conveying mechanism 12 for transfer. When the flower basket 4 needs to be turned over, after the clamping plate 32 clamps the flower basket 4 to turn it horizontally, when the turning frame 31 is controlled to descend, the clamping plate 32 at the bottom can be inserted into the above-mentioned reserved space, and then the clamping plate 32 is controlled to be loosened, and the horizontal flower basket 4 can be output with the help of the transfer conveying mechanism 24, thereby improving the transportation efficiency of the flower basket 4.

[0050] It should be noted that the transfer conveying mechanism 24, the low-level conveying mechanism 11 and the high-level conveying mechanism 12 referred to in this embodiment are all conveyor belt structures commonly used in the field of flower basket transportation. Therefore, their specific structure and drive will not be explained in detail in this embodiment.

[0051] In the above embodiment, the buffer pad 51 is mainly used to rigidly limit the contact of the silicon wafer 41 for protection. However, for a thin single silicon wafer 41, when the buffer pad 51 is used to rigidly limit the silicon wafer 41, since the height of the positioning groove 42 is greater than the thickness of the silicon wafer 41, the silicon wafer 41 will be deformed due to inertial impact during the flipping process. In severe cases, the silicon wafer 41 and the buffer pad 51 will be reversely extruded, resulting in excessive stress and breakage. For this reason, the present embodiment also provides the following protection structure that is more suitable for thinner silicon wafers 41. For details, refer to the attached manual. Figures 7 to 16 A plurality of air nozzle assemblies 52 are arranged on one side of the limiting frame 5 corresponding to the silicon wafer 41, and an even flow channel 53 is arranged inside the limiting frame 5. The air nozzle assembly 52 is connected to the even flow channel 53, and the even flow channel 53 is connected to an air flow driving device through a joint pipe 54 and a pipeline. The air flow driving device forms a flowing airflow between two layers of silicon wafers 41 through the air nozzle assembly 52, wherein a group of air nozzle assemblies 52 is arranged for every two silicon wafers 41, and the air nozzle assembly 52 is arranged in the area between two adjacent silicon wafers 41 in the area, and correspondingly, an air flow window 43 is arranged at the position of the air nozzle assembly 52 on the side of the silicon wafer 41 away from its open mouth.

[0052] When the flower basket 4 is controlled to flip, the limiting frame 5 does not contact the edge of the silicon wafer 41. At this time, the air nozzle assembly 52 is evacuated or blown through the air flow driving device, thereby forming an air flow penetrating the flower basket 4 in the area between the two corresponding silicon wafers 41. Since the air nozzle assemblies 52 are arranged at intervals, there is air flow in the area inside the two corresponding silicon wafers 41, but no air flow outside. Fig. 9 and Fig.10The air pressure in the area with airflow is small, and the air pressure in the area without airflow is large, so that the corresponding two silicon wafers 41 can be squeezed toward the area with airflow, and the squeezing is flexible and has no rigid contact. At the same time, since the flower basket 4 is mainly made of highly tolerant materials, such as Teflon (polytetrafluoroethylene) or a specific type of plastic, it can itself effectively protect the silicon wafer 41, and under the above-mentioned airflow squeezing action, a friction resistance to the silicon wafer 41 is formed, and then during the flipping process of the flower basket 4, it can ensure that the silicon wafer 41 is fixed relative to the flower basket 4 without moving or shaking, thereby improving the stability of the silicon wafer 41 during the flipping process, without friction or collision, and will not be thrown out, thereby realizing a fast flipping operation and improving the operating efficiency.

[0053] It should be noted that, in addition to being able to produce a pressure-fixing effect on the thin silicon wafer 41, the above-mentioned airflow can also form an airflow to clean or dry the surface of the silicon wafer 41. Especially after cleaning, with the help of the above-mentioned airflow, the drying of the silicon wafer 41 can also be accelerated. At the same time, the airflow formed by the air nozzle assembly 52 will pass through the surface of the silicon wafer 41, and then form a reverse resistance to the silicon wafer 41. For example, when the air nozzle assembly 52 blows air, the direction of the airflow is from outside to inside, and the silicon wafer 41 has a tendency to be driven toward the inside of the flower basket 4, thereby enabling the silicon wafer 41 to be close to the inside of the flower basket 4.

[0054] Refer to the instruction manual Figure 8 Since the main contact limiting effect on the silicon wafer 41 is played by the positioning grooves 42 on both sides of the silicon wafer 41 in the flower basket 4, at least two groups of limiting frames 5 and air nozzle assemblies 52 are provided, and the two groups of limiting frames 5 and air nozzle assemblies 52 are provided corresponding to the positioning grooves 42 on both sides of the silicon wafer 41, respectively, so as to form a pressure difference near the positioning grooves 42 as much as possible, and preferentially apply pressure to the position close to the positioning grooves 42.

[0055] In the above embodiment, it should be noted that, since the flipping drive of the flower basket 4 needs to go through the acceleration, uniform speed and deceleration process from the beginning to the end, the acceleration directions are opposite during the acceleration and deceleration process, and the inertia directions of the silicon wafers 41 at both ends of the flower basket 4 are different, so the inertial motion of the silicon wafers 41 is different. For example, during the acceleration stage, the silicon wafer 41 at the top of the flower basket 4 has a tendency to move outward relative to the flower basket 4 due to the inertia, while the silicon wafer 41 at the bottom of the flower basket 4 has a tendency to move toward the inside of the flower basket 4 due to the inertia. Therefore, if the airflow direction of the above-mentioned air nozzle assembly 52 is the same as the above-mentioned inertial movement trend direction, it will accelerate the movement of the silicon wafer 41. Therefore, different airflow directions need to be used for the silicon wafer 41 in the upper and lower areas of the flower basket 4, and the above-mentioned airflow directions also need to be different for the different inertial movement trend directions during acceleration or deceleration. Therefore, this embodiment also provides the following technical solutions. Specifically, two groups of uniform airflow channels 53 are provided in the limiting frame 5. The two groups of uniform airflow channels 53 are distributed up and down with the clamping plate 32 as the boundary, and each uniform airflow channel 53 are each independently connected to a set of airflow driving devices, that is, with the clamping plate 32 as the boundary, the airflows of the upper and lower air nozzle assemblies 52 can be independently controlled, and the airflow driving device includes an air blowing pump and an air suction pump, which are connected to the uniform air flow channel 53 through a control valve, and can then independently drive the air nozzle assemblies 52 in the upper and lower regions to blow or exhaust air. For example, during the process of accelerating the flipping, the upper silicon wafer 41 has an inertial movement tendency to move outward, so the upper air nozzle assembly 52 can blow air outward, and the silicon wafer 41 is tightly fixed to the positioning groove 42 by means of the pressure difference. At the same time, the above-mentioned airflow can also provide a reverse thrust to the inside of the flower basket 4 for the silicon wafer 41, so as to further improve the stability of the silicon wafer 41 relative to the flower basket 4 during the flipping process. The lower silicon wafer 41 has an inertial movement tendency inward, so the air nozzle assembly 52 can be evacuated to form an opposite airflow, which offsets the inertial movement tendency of the silicon wafer 41, reduces the squeezing force of the lower silicon wafer 41 on the flower basket 4, and avoids excessive stress. In the deceleration process, the airflow direction of the air nozzle assembly 52 can be adjusted accordingly, which is the same as the above-mentioned principle.

[0056] In the above embodiment, since the silicon wafer 41 closer to the rotation center, i.e., closer to the clamping plate 32, has a smaller flip diameter and a smaller flipping linear speed, it hardly needs too high an airflow pressure, i.e., from the end to the center, the driving capacity of the airflow required by the corresponding silicon wafer 41 along its flow direction needs to be relatively weakened. For this purpose, refer to the attached manual. Fig.11In this embodiment, the air nozzle assembly 52 is improved as follows. The air nozzle assembly 52 includes a rotating seat 521, which is rotatably mounted on the limiting frame 5. A flat flow channel 522 is provided on the side of the rotating seat 521 away from the limiting frame 5. The rotating seat 521 is connected to the uniform flow channel 53. The flat flow channel 522 is used to blow out or inhale a flat airflow. Through the above arrangement, the plane of the airflow formed by the flat flow channel 522 is adjustable relative to the plane of the silicon wafer 41, that is, the rotating seat 521 can be rotated and adjusted, and a damping structure (such as a rubber pad, and other types of locking structures can also be used) is provided between the rotating seat 521 and the limiting frame 5, which can be self-locking after the rotation angle of the rotating seat 521 is adjusted.

[0057] Specifically, by rotating the rotating seat 521, the plane angle of the flat flow channel 522 can be adjusted. Fig.13 and Fig.14 When the airflow plane of the flat flow channel 522 is relatively inclined, the direct contact area between the blown airflow and the buffer pad 51 increases, and the direct reverse resistance effect on the buffer pad 51 is larger. On the contrary, it is smaller, that is, from the end of the flower basket 4 to the middle of the flower basket 4, the inclination angle of the flat flow channel 522 gradually decreases. Therefore, under the condition that the pressure difference caused by the airflow formed by the flat flow channel 522 squeezes the silicon wafer 41, the direct blowing effect of the airflow on the silicon wafer 41 gradually decreases to adapt to the inertia effect of the silicon wafer 41 at different positions (the above-mentioned airflow blowing effect does not blow the silicon wafer 41, but only forms a thrust along the airflow direction on the silicon wafer 41 by virtue of the airflow flowing through the surface of the silicon wafer 41, thereby offsetting a part of the inertia force generated by the flipping inertia, and reducing the risk of damage to the silicon wafer 41).

[0058] In the above embodiment, during the turning process of the flower basket 4, the turning linear speed of the end of the flower basket 4 is the largest. The corresponding silicon wafer 41 is affected by its own inertia and centrifugal force. The more silicon wafers 41 are stored in the flower basket 4, the higher its height is. The centrifugal force at the end position during the turning is also greater. Since there is no pulling force on both sides of the silicon wafer 41, the center of the silicon wafer 41 is prone to deformation along the direction of the centrifugal force. If the deformation is too large, it will also cause damage to the silicon wafer 41. For this reason, the flat flow channel 522 is further improved in this embodiment. For details, refer to the attached manual. Fig.15 and Fig.16The flat flow channel 522 includes a flat flow channel 5221 and an oblique blowing flow channel 5222. The airflow direction of the flat flow channel 5221 is set along a direction parallel to the length direction of the positioning grooves 42 on both sides of the flower basket 4, and the airflow direction of the oblique blowing flow channel 5222 is set along a direction inclined to the length direction of the positioning grooves 42 on both sides of the flower basket 4. In actual use, the oblique airflow blown out by the flat flow channel 522, when it blows toward the surface of the silicon wafer 41, generates a small thrust for the silicon wafer 41 to approach the positioning groove 42. Since the air nozzle assembly 52 is set on both sides of the flower basket 4, therefore, refer to the attached manual Fig.16 , a pulling force can be formed on both sides of the silicon wafer 41 to make the silicon wafer 41 as straight as possible, reduce the risk of excessive deformation and breakage due to excessive centrifugal force, and further improve the protection performance of the silicon wafer 41.

[0059] It should be noted that, since the present invention forms an airflow by blowing out or sucking in the air nozzle assembly 52, air pressure is applied to the silicon wafer 41, so that it is tightly attached to the positioning groove 42, thereby ensuring that the silicon wafer 41 can be stably and safely stored in the flower basket 4 during the flipping process of the flower basket 4. Therefore, the flipping operation speed of the flower basket 4 can be further improved, and the transportation efficiency can be further improved.

[0060] The above-mentioned embodiments only express several implementation methods of the present invention, and the description thereof is relatively specific and detailed, but it cannot be understood as limiting the scope of the present invention. It should be pointed out that, for ordinary technicians in this field, several variations and improvements can be made without departing from the concept of the present invention, which all belong to the protection scope of the present invention.

Claims

1. A silicon wafer basket lifting and transporting device, characterized in that: The invention comprises a transfer frame (1), wherein a low-position conveying mechanism (11) and a high-position conveying mechanism (12) are arranged on the transfer frame (1), a lifting assembly (2) is arranged at the end of the high-position conveying mechanism (12), and a clamping and flipping assembly (3) is arranged at a position of the high-position conveying mechanism (12) corresponding to the lifting assembly (2); The lifting assembly (2) comprises a lifting frame (21), a bracket (22) is arranged at the bottom of the lifting frame (21), the lifting frame (21) is vertically slidably arranged on the transfer frame (1), and the bracket (22) is used to support the flower basket (4); The clamping and flipping assembly (3) comprises a flipping frame (31), the flipping frame (31) is rotatably arranged above the transfer frame (1), two groups of clamping plates (32) are arranged on one side of the flipping frame (31) corresponding to the lifting assembly (2), the two groups of clamping plates (32) move towards or away from each other on the flipping frame (31), and a limiting block frame (5) is fixedly connected to the clamping plate (32) on the side of the opening of the flower basket (4), the limiting block frame (5) is arranged corresponding to the silicon wafer (41), and the limiting block frame (5) is arranged along the height direction of the flower basket (4); A plurality of air nozzle assemblies (52) are arranged on one side of the limiting frame (5) corresponding to the silicon wafer (41), and an even flow channel (53) is arranged inside the limiting frame (5), the air nozzle assembly (52) is in communication with the even flow channel (53), the even flow channel (53) is connected to an air flow driving device through a joint pipe (54) and a pipeline, and the air flow driving device forms a flowing air flow between two layers of silicon wafers (41) through the air nozzle assembly (52), a group of air nozzle assemblies (52) is arranged every two silicon wafers (41), and the air nozzle assembly (52) is arranged corresponding to the area between two adjacent silicon wafers (41), and an air flow window (43) is arranged at a position corresponding to the air nozzle assembly (52) on a side of the silicon wafer (41) away from its open mouth; At least two groups of the limiting frames (5) and the air nozzle assemblies (52) are provided, and the two groups of the limiting frames (5) and the air nozzle assemblies (52) are respectively provided corresponding to the positioning grooves (42) on both sides of the silicon wafer (41); two groups of uniform flow channels (53) are provided in the limiting frames (5); the two groups of uniform flow channels (53) are distributed up and down with the clamping plate (32) as the boundary; each of the uniform flow channels (53) is independently connected to a group of air flow driving equipment, and the air flow driving equipment includes an air blowing pump and an air suction pump, and the air blowing pump and the air suction pump are connected to the uniform flow channel (53) through a control valve; The air nozzle assembly (52) comprises a rotating seat (521), the rotating seat (521) is rotatably mounted on the limiting frame (5), a flat flow channel (522) is provided on a side of the rotating seat (521) away from the limiting frame (5), the rotating seat (521) is communicated with the flow channel (53), the flat flow channel (522) is used to blow out or inhale a flat airflow, and a damping structure is provided between the rotating seat (521) and the limiting frame (5); The flat flow channel (522) comprises a straight flow channel (5221) and an oblique blowing flow channel (5222); the airflow direction of the straight flow channel (5221) is arranged in parallel with the length direction of the positioning grooves (42) on both sides of the flower basket (4); and the airflow direction of the oblique blowing flow channel (5222) is arranged in a direction inclined with respect to the length direction of the positioning grooves (42) on both sides of the flower basket (4).

2. The silicon wafer basket lifting and transporting device according to claim 1, characterized in that: A flower basket top fixer (23) is arranged on the top of the lifting frame (21), a flower basket bottom fixer (25) is arranged on the bracket (22), and slot structures for plugging into the output ends of the flower basket top fixer (23) and the flower basket bottom fixer (25) are respectively arranged on the top and bottom of the flower basket (4).

3. The silicon wafer basket lifting and transporting device according to claim 2, characterized in that: A lifting guide rail (13) is provided on the transfer frame (1) at a position corresponding to between the low-position conveying mechanism (11) and the high-position conveying mechanism (12); the lifting frame (21) is slidably arranged on the lifting guide rail (13) via a bracket (22); and a lifting driver (14) is provided on the lifting frame (21) for driving the lifting frame (21) to rise and fall.

4. The silicon wafer basket lifting and transporting device according to claim 3, characterized in that: The clamping and flipping assembly (3) also includes a lifting frame (33) and a lifting guide rail (34), wherein the lifting guide rail (34) is fixedly mounted on the transfer frame (1), and the lifting frame (33) is slidably arranged on the lifting guide rail (34), and the lifting guide rail (34) is provided with a lifting driver (35) for driving the lifting frame (33) to rise and fall, and the lifting frame (33) is provided with a rotating driver for driving the flipping frame (31) to rotate.

5. The silicon wafer basket lifting and transporting device according to claim 4, characterized in that: Two groups of transfer conveying mechanisms (24) are arranged on the bracket (22), a reserved space is arranged between the two groups of transfer conveying mechanisms (24), and the flower basket bottom fixer (25) is arranged in the reserved space.

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