Probe card testing system and probe card testing method

Abstract

Provided are a probe card testing system and a probe card testing method, the probe card testing system including: a loader for loading and placing a probe card for testing electrical characteristics of a substrate on a holder; a turner for transferring the probe card placed on the holder to an initial position by turning over the probe card; the transmitter is used for transmitting the probe card transmitted to the initial position to a test board; a test bench mover for accurately moving the test bench in a first direction to test the probes of the probe card; an optical system for optically testing the probe of the probe card; and an optical system mover for accurately moving the optical system or the test bench in a second direction perpendicular to the first direction to test all the probes of the probe card.

Description

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS

[0002] This application claims the benefit of Korean Patent Application No. 10-2023-0089117 filed in the Korean Intellectual Property Office on July 10, 2023, the disclosure of which is incorporated herein by reference in its entirety. Technical Field

[0003] The present invention relates to a probe card testing system and a probe card testing method, and more particularly, to a probe card testing system and a probe card testing method capable of automating a series of processes for testing probes of a probe card. Background Art

[0004] Generally, a semiconductor device such as an integrated circuit device can be formed by repeatedly performing a series of semiconductor processes on a substrate such as a semiconductor wafer. For example, a semiconductor circuit device such as a bare chip can be formed on a substrate by repeatedly performing a deposition process for depositing a thin film on a wafer, an etching process for etching the thin film into a pattern having electrical characteristics, an ion implantation or diffusion process for implanting or diffusing impurities into the pattern, and a cleaning and rinsing process for removing impurities from the wafer having the pattern.

[0005] After the die is formed through a series of processes, a test process may be performed to test the electrical characteristics of the die. The test process may be performed by a probe station including a probe card having a plurality of probe pins and a tester connected to the probe card to provide an electrical signal.

[0006] The probe card may be detachably mounted at the upper portion of the test chamber, and a platform for supporting the wafer may be provided below the probe card. The platform may be configured to move in vertical and horizontal directions so as to bring the die into contact with the probes of the probe card.

[0007] In the test process, probes of the probe card come into contact with the wafer, and then a test signal output from a tester is applied to the wafer through the probes.

[0008] As described above, since the probes of the probe card contact the wafer to apply the test signal, the probes may be broken due to friction with the wafer. When the probes are severely broken, the probe card may not be used for the test process and needs to be replaced.

[0009] Therefore, the arrangement, height, or wear of the probes should be managed to determine whether to replace the probe card.

[0010] Typically, probe cards are tested based on a manual method in which a user turns over each probe card by hand and inspects the probes with a microscope or a camera.

[0011] However, according to the existing manual probe card testing method, difficulties may arise as the diameter or weight of the probe cards gradually increases beyond human transportation capabilities, and the probe cards, which are often stacked on each other in a waiting area with the probes facing downward, may not be easily turned over for testing.

[0012] In addition, since the existing manual probe card testing method requires a long time, a large number of probe cards may not be tested using the short waiting time of the probe cards stored in the waiting area, and thus defects of the probes may not be prevented in advance before wafer testing.

[0013] Because an automated test system capable of testing probe cards of various diameters may not be easily mechanically configured, existing manual probe card testing methods are often used. Summary of the invention

[0014] The present invention provides a probe card testing system and a probe card testing method, which can automate a series of testing processes to quickly and accurately test not only probe cards of small diameters but also probe cards of large diameters; which can test a large number of probe cards by using a short waiting time of probe cards stored in a waiting area to prevent defects of probes in advance before wafer testing; and which can test probe cards of various diameters. However, the scope of the present invention is not limited thereto.

[0015] According to aspects of the present invention, a probe card testing system is provided, comprising: a loader for loading and placing a probe card for testing electrical characteristics of a substrate on a holder; a flipper for transferring the probe card placed on the holder to an initial position by flipping the probe card; a conveyor for transferring the probe card transferred to the initial position to a test bench; a test bench mover for precisely moving the test bench in a first direction to test probes of the probe card; an optical system for optically testing the probes of the probe card; and an optical system mover for precisely moving the optical system or the test bench in a second direction perpendicular to the first direction to test all the probes of the probe card.

[0016] The flipper may include: a first clamp for clamping both sides of the probe card placed on the holder with the probes facing downward; and a rotating arm connected to the first clamp at one end and to a rotating shaft at the other end, and the rotating arm rotates around the rotating shaft to flip the first clamp so that the probes of the probe card face upward.

[0017] The first clamp may include: a first head body provided to correspond to the probe card; a first finger-shaped member provided to move forward or backward on a portion of the first head body so as to contact a first portion of the probe card; and a second finger-shaped member provided to move forward or backward on another portion of the first head body so as to contact a second portion of the probe card.

[0018] The first finger-shaped member may include: a first horizontal portion, provided in a shape corresponding to a portion of the top surface of the first head body to slide along the first head body; a first vertical portion, connected to the first horizontal portion to move toward or away from the first portion of the probe card; and a first recessed portion, provided in a surface of the first vertical portion facing the probe card and provided in a concave shape or an arc shape to correspond to the first portion of the probe card, and the second finger-shaped member may include: a second horizontal portion, provided in a shape corresponding to another portion of the top surface of the first head body to slide along the first head body; a second vertical portion, connected to the second horizontal portion to move toward or away from the second portion of the probe card; and a second recessed portion, provided in a surface of the second vertical portion facing the probe card and provided in a concave shape or an arc shape to correspond to the second portion of the probe card.

[0019] The first clamp may also include: a pin pusher for pushing the pin toward the pin hole provided in the probe card to fix the probe card, and the pin pusher may include: the pin, which is provided in a shape corresponding to the pin hole provided in the probe card so that it can be inserted into the pin hole and is provided to move forward or backward through a through hole provided in the first head body; an elastic member for applying a restoring force in the direction of backward movement of the pin; and a cam protrusion mounted on a surface of the first horizontal portion facing the pin so as to press the pin forward according to the position where the first finger-shaped member slides.

[0020] In order to fix probe cards of various diameters according to the sliding position of the first finger, the pin pusher may include: a first pin pusher installed at a first sliding position; and a second pin pusher installed at a second sliding position different from the first sliding position.

[0021] The conveyor may include: a second chuck for clamping the other two sides of the probe card conveyed to the initial position so as not to interfere with the first chuck of the flipper; a first movable plate connected to the second chuck and capable of reciprocating to convey the second chuck from the initial position to the test bench; and a first guide rail installed above the second chuck to guide the first movable plate in the first direction.

[0022] The second clamp may include: a second head body provided to correspond to the probe card; a third finger-shaped member provided to move forward or backward on a portion of the second head body so as to contact a third portion of the probe card; and a fourth finger-shaped member provided to move forward or backward on another portion of the second head body so as to contact a fourth portion of the probe card.

[0023] The third finger-shaped member may include: a third horizontal portion, provided in a shape corresponding to a portion of the top surface of the second head body to slide along the second head body; a third vertical portion, connected to the third horizontal portion, to move toward or away from the third portion of the probe card; and a third recessed portion, provided in a surface of the third vertical portion facing the probe card and provided in a concave shape or an arc shape to correspond to the third portion of the probe card, and the fourth finger-shaped member may include: a fourth horizontal portion, provided in a shape corresponding to another portion of the top surface of the second head body to slide along the second head body; a fourth vertical portion, connected to the fourth horizontal portion, to move toward or away from the fourth portion of the probe card; and a fourth recessed portion, provided in a surface of the fourth vertical portion facing the probe card and provided in a concave shape or an arc shape to correspond to the fourth portion of the probe card.

[0024] A first virtual line connecting the first and second portions of the probe card may pass through a center point of the probe card, and a second virtual line connecting the third and fourth portions of the probe card may pass through the center point of the probe card perpendicular to the first virtual line.

[0025] The first virtual line may extend in the same direction as the first direction, and the second virtual line may extend in the same direction as the second direction.

[0026] The conveyor may further include an elevator provided between the second clamping head and the first movable plate to raise or lower the second clamping head.

[0027] The test bench mover may include: a second movable plate connected to the test bench and capable of reciprocating from a first test position to a second test position; a second guide rail installed under the second movable plate to guide the second movable plate in the first direction; and a base for supporting the second guide rail.

[0028] The optical system may include: a scanning test camera for scanning and testing the probes of the probe card at a low magnification; and a precision test camera disposed beside the scanning test camera for precisely testing the probes that require precise testing at a high magnification.

[0029] The precision test camera may be at least partially raised or lowered to move the focus.

[0030] The optical system mover may include: a third movable plate connected to the optical system and capable of reciprocating from a first imaging position to a second imaging position; a third guide rail for guiding the third movable plate in the second direction; and a base for supporting the third guide rail.

[0031] The holder may substantially have a ring shape or a short tube shape having a hollow space to protect the probes provided on the bottom surface of the probe card.

[0032] The loader may be a loader / unloader for unloading the probe card that has been completely tested and returned to the holder through the conveyor and the flipper.

[0033] According to another aspect of the present invention, there is provided a probe card testing method, comprising: (a) loading and placing a probe card for testing electrical characteristics of a substrate on a holder; (b) transferring the probe card placed on the holder to an initial position by flipping the probe card; (c) transferring the probe card transferred to the initial position to a test bench; (d) precisely moving the test bench in a first direction to test probes of the probe card; (e) testing the probes of the probe card by using an optical system; and (f) precisely moving the optical system or the test bench in a second direction perpendicular to the first direction to test all the probes of the probe card.

[0034] According to another aspect of the present invention, a probe card testing system is provided, comprising: a loader for loading and placing a probe card for testing electrical characteristics of a substrate on a holder; a flipper for transferring the probe card placed on the holder to an initial position by flipping the probe card; a conveyor for transferring the probe card transferred to the initial position to a test bench; a test bench mover for accurately moving the test bench in a first direction to test probes of the probe card; an optical system for optically testing the probes of the probe card; and an optical system mover for accurately moving the optical system or the test bench in a second direction perpendicular to the first direction to test the probes of the probe card. The probe is provided, wherein the flipper includes: a first clamp for clamping both sides of the probe card placed on the holder with the probe facing downward; and a rotating arm connected to the first clamp at one end and to a rotating shaft at the other end, and the rotating arm rotates around the rotating shaft to flip the first clamp so that the probe of the probe card faces upward, wherein the first clamp includes: a first head body provided to correspond to the probe card; a first finger-shaped member provided to move forward or backward on a part of the first head body so as to contact with a first part of the probe card; and a second finger-shaped member provided to move forward or backward on another part of the first head body so as to contact with The second part of the probe card is contacted with the first finger-shaped member, wherein the first finger-shaped member includes: a first horizontal portion provided in a shape corresponding to a portion of the top surface of the first head body to slide along the first head body; a first vertical portion connected to the first horizontal portion to move toward or away from the first part of the probe card; and a first recessed portion provided in a surface of the first vertical portion facing the probe card and provided in a concave or arc shape to correspond to the first part of the probe card, wherein the second finger-shaped member includes: a second horizontal portion provided in a shape corresponding to another portion of the top surface of the first head body to slide along the first head body; a second vertical portion, connected to the second horizontal portion to move toward or away from the second portion of the probe card; and a second recessed portion provided in a surface of the second vertical portion facing the probe card and provided in a concave or arc shape to correspond to the second portion of the probe card, wherein the first chuck further includes a pin pusher for pushing a pin toward a pin hole provided in the probe card to fix the probe card, wherein the conveyor includes: a second chuck for clamping the other two sides of the probe card conveyed to the initial position so as not to interfere with the first chuck of the flipper; a first movable plate connected to the second chuck and capable of reciprocating to convey the second chuck from the initial position to the test bench;and a first guide rail mounted above the second clamp to guide the first movable plate in the first direction, wherein the conveyor further comprises an elevator provided between the second clamp and the first movable plate to raise or lower the second clamp, wherein the test bench mover comprises: a second movable plate connected to the test bench and capable of reciprocating from a first test position to a second test position; a second guide rail mounted below the second movable plate to guide the second movable plate in the first direction; and a base for supporting the second guide rail, wherein the optical system comprises: a scanning test camera for for scanning and testing the probes of the probe card at a low magnification; and a precision test camera, disposed beside the scanning test camera, for accurately testing the probes that require precise testing at a high magnification, wherein the optical system mover comprises: a third movable plate connected to the optical system and capable of reciprocating from a first imaging position to a second imaging position; a third guide rail for guiding the third movable plate in the second direction; and a base for supporting the third guide rail, and wherein the holder substantially has an annular shape or a short tube shape with a hollow space to protect the probes provided on the bottom surface of the probe card. ; BRIEF DESCRIPTION OF THE DRAWINGS

[0035] The above and other features and advantages of the present invention will become more apparent by describing in detail embodiments of the present invention with reference to the accompanying drawings, in which:

[0036] Figure 1 is a plan view of a probe card testing system according to some embodiments of the present invention;

[0037] Figure 2 yes Figure 1 A perspective view of a probe card test system;

[0038] Figure 3 yes Figure 1 A perspective view of a flipper of a probe card test system;

[0039] Figure 4 yes Figure 3 The plan view of the tumbler;

[0040] Figure 5 yes Figure 3 A side view of a flipper;

[0041] Figure 6 yes Figure 1 A perspective view of a conveyor of a probe card test system;

[0042] Figure 7 yes Figure 6 A plan view of the transmitter;

[0043] Figure 8 yes Figure 6 A side view of a conveyor;

[0044] Fig. 9 yes Figure 1 A perspective view of a first chuck or a second chuck of a probe card testing system;

[0045] Fig.10 yes Fig. 9 a side view of the first chuck or the second chuck;

[0046] Fig.11 It is shown Figure 1 A conceptual diagram of a clamping state of a probe card at an initial position of a probe card test system;

[0047] Fig.12 It is shown Figure 1 A cross-sectional view of a clamped state of a small diameter probe card in a probe card test system;

[0048] Fig.13 It is shown Figure 1 A cross-sectional view of a clamped state of a medium diameter probe card in a probe card test system;

[0049] Fig.14 It is shown Figure 1 A cross-sectional view of a clamped state of a large diameter probe card in a probe card test system of FIG.

[0050] Fig.15 is a flow chart of a probe card testing method according to some embodiments of the present invention. DETAILED DESCRIPTION

[0051] Hereinafter, the present invention will be described in detail by explaining embodiments of the invention with reference to the attached drawings.

[0052] However, the present invention can be implemented in many different forms and should not be construed as being limited to the embodiments set forth herein; on the contrary, these embodiments are provided so that the present disclosure will be thorough and complete and fully convey the concept of the present invention to those of ordinary skill in the art. In the accompanying drawings, the thickness or size of the layers is exaggerated for clarity and ease of description.

[0053] The terms used herein are for the purpose of describing specific embodiments and are not intended to limit the present invention. As used herein, the singular forms "a", "one (kind / person)" and "said" are also intended to include plural forms, unless the context clearly indicates otherwise. It will also be understood that the terms "include" and / or "comprise" when used in this specification represent the existence of stated features, integers, steps, operations, elements, components and / or groups thereof, but do not exclude the existence or addition of one or more other features, integers, steps, operations, elements, components and / or groups thereof.

[0054] Embodiments of the invention are described herein with reference to schematic diagrams of idealized embodiments (and intermediate structures) of the invention. As such, variations from the illustrated shapes as a result, for example, of manufacturing techniques and / or tolerances, are to be expected. Thus, embodiments of the invention should not be construed as limited to the particular shapes of regions shown herein but are to include deviations in shapes that result, for example, from manufacturing.

[0055] Figure 1 is a plan view of a probe card test system 100 according to some embodiments of the present invention, and Figure 2 yes Figure 1 1 is a perspective view of a probe card testing system 100 .

[0056] First, if Figure 1 and Figure 2 As shown in , the probe card test system 100 according to some embodiments of the present invention may mainly include a base B, a loader 10 , a flipper 20 , a conveyor 30 , a test stage mover 40 , an optical system 50 , an optical system mover 60 , and a controller 70 .

[0057] The base B may be provided at a certain height from the ground and may be a frame structure having sufficient strength and durability to support the loader 10 , the turner 20 , the conveyor 30 , the test table mover 40 , the optical system 50 , the optical system mover 60 , and the controller 70 .

[0058] On the base B, a loader 10, a flipper 20, a conveyor 30, a test bench mover 40, an optical system 50, and an optical system mover 60 may be sequentially arranged, so that a probe card 1 for testing electrical properties of a substrate such as a wafer or a display panel may be loaded on the loader 10 on one side, flipped by the flipper 20, conveyed by the conveyor 30, and accurately tested by the optical system 50.

[0059] The base B may include vertical members, horizontal members, and plate members of various shapes to support the above elements, and is not limited to the illustrations, and may include members of various shapes and types assembled together to fit in the installation space.

[0060] The loader 10 may include a holder 11 on which the probe card 1 is loaded and placed by a transfer robot (not shown) or a user. The holder 11 may substantially have a ring shape or a short circular tube shape having a hollow space A to accommodate and protect the probes 2 provided on the bottom surface of the probe card 1.

[0061] In addition to the circular ring shape and the short circular tube shape, the retainer 11 may also include support members of various shapes such as a polygonal ring shape, a polygonal tube shape or a lifting pin shape to support the flange or edge of the probe card 1 other than the probe 2 of the probe card 1 without interfering with the probe 2 provided on the bottom surface of the probe card 1.

[0062] Therefore, the probe cards 1 which are usually stacked in multiple layers and waiting in the waiting area with the probes 2 facing downward can be safely loaded onto the holder 11 of the loader 10 by the transfer robot or the user without damaging the probes 2 .

[0063] In this case, the reason why the probe cards 1 are stacked in multiple layers with the probes 2 facing downward in the waiting area such as the stacker is because the probe cards 1 are transferred and replaced in the tester with the probes 2 facing downward. In the probe card testing system 100 according to some embodiments of the present invention, since the probe cards 1 waiting in the waiting area with the probes 2 facing downward can be loaded as they are and then automatically turned over, the user does not need to manually turn over the bulky probe cards 1, and thus the convenience of testing can be significantly increased.

[0064] The loader 10 may be a loader / unloader for unloading the probe card 1 that has been completely tested and returned to the holder 11 through the conveyor 30 and the flipper 20 .

[0065] However, the loader 10 is not limited to the illustration. For example, the loader 10 may be used only as a loader, and an unloader (not shown) may be provided separately. Although not shown in the figure, the loader 10 may be a stacker (not shown) where the probe card 1 waits, and, in this case, the holder 11 may be a holder provided in the stacker, and the flipper 20 may directly clamp and flip the probe card 1 waiting on the holder in the stacker.

[0066] The flipper 20 may be a device for transferring the probe card 1 placed on the holder 11 with the probes 2 facing downward to an initial position by flipping the probe card 1 so that the probes 2 face upward.

[0067] The flipper 20 may include: a first clamp 21 for clamping both sides of the probe card 1 placed on the holder 11 with the probes 2 facing downward; and a rotating arm 22, which is connected to the first clamp 21 at one end and to a rotating shaft 22a at the other end, and swings around the rotating shaft 22a to flip the first clamp 21 so that the probes 2 of the probe card 1 face upward.

[0068] However, the flipper 20 is not limited to swinging, and various rotation methods capable of flipping the probe card 1 may be used.

[0069] Therefore, the flipper 20 can automatically flip the probe card 1 by clamping both sides of the probe card 1 placed on the holder 11 with the probes 2 facing downward with the first clamp 21, and swinging the rotating arm 22 around the rotating axis 22a so that the probes 2 of the probe card 1 face upward. Here, a driving motor or a rotary actuator can be installed on the rotating axis 22a of the rotating arm 22 to swing the rotating arm 22.

[0070] The conveyor 30 may be a device for conveying the probe card 1 flipped by the flipper 20 and conveyed to the original position to the test stage 41 for precise testing.

[0071] The conveyor 30 may include: a second chuck 31, used to clamp the other two sides of the probe card 1 conveyed to the initial position so as not to interfere with the first chuck 21 of the flipper 20; a first movable plate M1, connected to the second chuck 31 and capable of reciprocating to convey the second chuck 31 from the initial position to the test table 41; and a first guide rail R1, installed above the second chuck 31 to guide the first movable plate M1 in the first direction I.

[0072] However, the conveyor 30 is not limited to the first movable plate M1 that reciprocates along the first rail R1 , and may include conveyors of various shapes and types capable of conveying the probe card 1 from the initial position to the test stage 41 .

[0073] Therefore, using the conveyor 30, the other two sides of the probe card 1 conveyed to the initial position can be clamped so as not to interfere with the first clamp 21 of the flipper 20, and the probe card 1 can be conveyed from the initial position to the test station 41 through the first movable plate M1 capable of reciprocating along the first guide rail R1.

[0074] The test stage mover 40 may be a device for accurately moving a test stage 41 in a first direction I to test the probes 2 of the probe card 1 .

[0075] The test bench mover 40 may include: a second movable plate M2, connected to the test bench 41 and capable of reciprocating from a first test position to a second test position; a second guide rail R2, installed under the second movable plate M2 to guide the second movable plate M2 in a first direction I; and a base B for supporting the second guide rail R2.

[0076] However, the test stage mover 40 is not limited to the second movable plate M2 that reciprocates along the second rail R2 , and may include movers of various shapes and types that can accurately move the probe card 1 in the first direction I.

[0077] Therefore, the probe card 1 placed on the test stage 41 can be accurately moved in the first direction I from the first test position to the second test position using the test stage mover 40 .

[0078] The optical system 50 is an optical device for optically testing the probes 2 of the probe card 1, and may include a scanning test camera 51 for scanning the probes 2 of the probe card 1 at a low magnification, and a precision test camera 52 provided next to the scanning test camera 51 for precisely testing the probes 2 that require precise testing at a high magnification. The precision test camera 52 may be at least partially raised or lowered to move the focus.

[0079] However, the optical system 50 is not limited to the scanning test camera 51 or the precision test camera 52 , and may include various shapes and types of test devices capable of testing the probe 2 , for example, a laser scanner or various sensors.

[0080] Therefore, by using the optical system 50 , when a defect is found during the primary scanning test of the probes 2 of the probe card 1 , the probes 2 that need to be accurately tested can be accurately tested for a second time by adjusting the magnification.

[0081] The optical system mover 60 may be a device for accurately moving the optical system 50 or the test stage 41 in a second direction II perpendicular to the first direction I to test all the probes 2 of the probe card 1 .

[0082] The optical system mover 60 may include: a third movable plate M3 connected to the optical system 50 and capable of reciprocating from the first imaging position to the second imaging position; a third guide rail R3 for guiding the third movable plate M3 in the second direction II; and a base B for supporting the third guide rail R3.

[0083] However, the optical system mover 60 is not limited to the third movable plate M3 that reciprocates along the third guide rail R3, and may include movers of various shapes and types that can accurately move the optical system 50 in the second direction II.

[0084] Here, the first direction I, the second direction II, and the third direction III may be directions perpendicular to each other. For example, the first direction I may be an X-axis direction, the second direction II may be a Y-axis direction, and the third direction III may be a Z-axis direction. However, the directions are not limited to the illustration and may include various directions.

[0085] Therefore, the X and Y coordinates, defects, wear, contamination, deformation, two-dimensional (2D) shape, three-dimensional (3D) shape, etc. of the probe 2 can be accurately inspected using the scanning test camera 51 or the precision test camera 52 that can accurately test the probes 2 of the probe card 1.

[0086] The controller 70 may include various electronic control devices capable of applying control signals to the loader 10, the flipper 20, the conveyor 30, the test table mover 40, the optical system 50 and the optical system mover 60 to automatically perform the above-mentioned series of testing processes, such as a microprocessor, a central processing unit, a computing unit, a semiconductor chip, an integrated circuit, a printed circuit board, an electronic component, a computer, a server computer, a smart phone, a smart tablet, a smart device, a control panel, a control circuit, a memory, a storage device having a program stored therein, a command input device, a communication device or a network device.

[0087] Therefore, through the control of the controller 70, a series of testing processes can be automatically performed: for loading and placing a probe card 1 for testing the electrical characteristics of a substrate on the holder 11; transferring the probe card 1 placed on the holder 11 to an initial position by flipping the probe card 1; transferring the probe card 1 transferred to the initial position to the test table 41; precisely moving the test table 41 in a first direction I to test the probes 2 of the probe card 1; testing the probes 2 of the probe card 1 by using the optical system 50; precisely moving the optical system 50 or the test table 41 in a second direction II perpendicular to the first direction I to test all the probes 2 of the probe card 1; and returning the probe card 1 that has been fully tested to the holder 11 and unloading the probe card 1.

[0088] Therefore, a series of testing processes can be automated to quickly and accurately test not only small-diameter probe cards 1 but also large-diameter probe cards 1, a large number of probe cards 1 can be tested using the short waiting time of the probe cards 1 stored in the waiting area, and thus defects in the arrangement, height, wear, etc. of the probes 2 can be prevented in advance before wafer testing.

[0089] Figure 3 yes Figure 1 A perspective view of the flipper 20 of the probe card testing system 100, Figure 4 yes Figure 3 A plan view of the flipper 20, and Figure 5 yes Figure 3 A side view of the flipper 20 is shown.

[0090] like Figures 1 to 5 As shown in the figure, the flipper 20 can be a device for transferring the probe card 1 placed on the holder 11 with the probe 2 facing downward to an initial position by flipping the probe card 1 so that the probe 2 faces upward, and includes a first clamp 21 for clamping both sides of the probe card 1 placed on the holder 11 with the probe 2 facing downward.

[0091] The first clamp 21 may include: a first head body H1, provided to correspond to the probe card 1; a first finger-shaped member F1, provided to move forward or backward on a part of the first head body H1 so as to contact the first part P1 of the probe card 1; and a second finger-shaped member F2, provided to move forward or backward on another part of the first head body H1 so as to contact the second part P2 of the probe card 1.

[0092] Figure 6 yes Figure 1 A perspective view of the conveyor 30 of the probe card testing system 100, Figure 7 yes Figure 6 A plan view of the conveyor 30, and Figure 8 yes Figure 6 30 is a side view of the conveyor.

[0093] like Figures 1 to 8 As shown in Figure 1 The conveyor 30 of the probe card testing system 100 may be a device including a second chuck 31 , a first movable plate M1 , and a first guide rail R1 , and may further include a lift LF provided between the second chuck 31 and the first movable plate M1 to raise or lower the second chuck 31 having clamped the probe card 1 .

[0094] Therefore, using the lift LF, the second clamp 31 may descend toward the probe card 1 to clamp the probe card 1 , ascend and be transferred along the first rail R1 by the first movable plate M1 , and descend again to place the probe card 1 on the test stage 41 .

[0095] Fig. 9 yes Figure 1 A perspective view of the first chuck 21 or the second chuck 31 of the probe card test system 100, and Fig.10 yes Fig. 9 A side view of the first chuck 21 or the second chuck 31 is shown.

[0096] like Figures 1 to 10 As shown in , the first clamp 21 may be identical or similar in structure to the second clamp 31 .

[0097] The first clamp 21 may be a device for clamping both sides of the probe card 1 placed on the holder 11 with the probes 2 facing downward.

[0098] The first clamp 21 may include: a first head body H1, provided to correspond to the probe card 1; a first finger-shaped member F1, provided to move forward or backward on a part of the first head body H1 so as to contact the first part P1 of the probe card 1; and a second finger-shaped member F2, provided to move forward or backward on another part of the first head body H1 so as to contact the second part P2 of the probe card 1.

[0099] The first finger F1 may include: a first horizontal portion F1a, which is provided in a shape corresponding to a portion of the top surface of the first head body H1 to slide along the first head body H1; a first vertical portion F1b, which is connected to the first horizontal portion F1a to move toward or away from the first portion P1 of the probe card 1, and a first recessed portion F1c, which is provided in a surface of the first vertical portion F1b facing the probe card 1 and is provided in a concave or arc shape to correspond to the first portion P1 of the probe card 1.

[0100] The second finger-like member F2 may include: a second horizontal portion F2a, which is provided in a shape corresponding to another portion of the top surface of the first head body H1 so as to slide along the first head body H1; a second vertical portion F2b, which is connected to the second horizontal portion F2a to move toward or away from the second portion P2 of the probe card 1; and a second recessed portion F2c, which is provided in the surface of the second vertical portion F2b facing the probe card 1 and is provided in a concave or arc shape to correspond to the second portion P2 of the probe card 1.

[0101] The second clamp 31 may be a device for clamping the other two sides of the probe card 1 located at the initial position with the probes 2 facing upward.

[0102] The second chuck 31 may be structurally identical or similar to the first chuck 21, and include: a second head body H2, provided to correspond to the probe card 1; a third finger-shaped member F3, provided to move forward or backward on a portion of the second head body H2 so as to contact the third portion P3 of the probe card 1; and a fourth finger-shaped member F4, provided to move forward or backward on another portion of the second head body H2 so as to contact the fourth portion P4 of the probe card 1.

[0103] The third finger-shaped member F3 may include: a third horizontal portion F3a, which is provided in a shape corresponding to a portion of the top surface of the second head body H2 so as to slide along the second head body H2; a third vertical portion F3b, which is connected to the third horizontal portion F3a to move toward or away from the third portion P3 of the probe card 1; and a third recessed portion F3c, which is provided in the surface of the third vertical portion F3b facing the probe card 1 and is provided in a concave or arc shape to correspond to the third portion P3 of the probe card 1.

[0104] The fourth finger F4 may include: a fourth horizontal portion F4a, provided in a shape corresponding to another portion of the top surface of the second head body H2 so as to slide along the second head body H2; a fourth vertical portion F4b, connected to the fourth horizontal portion F4a to move toward or away from the fourth portion P4 of the probe card 1; and a fourth recessed portion F4c, provided in a surface of the fourth vertical portion F4b facing the probe card 1 and provided in a concave or arc shape to correspond to the fourth portion P4 of the probe card 1.

[0105] Fig.11 It is shown Figure 1 1 is a conceptual diagram of a clamped state of the probe card 1 at an initial position of the probe card testing system 100 .

[0106] like Figures 1 to 11 As shown in Figure 1 At the initial position of the probe card testing system 100, the first virtual line L1 connecting the first part P1 of the probe card 1 clamped by the first finger F1 and the second part P2 of the probe card 1 clamped by the second finger F2 can pass through the center point CP of the probe card 1, and the second virtual line L2 connecting the third part P3 of the probe card 1 clamped by the third finger F3 and the fourth part P4 of the probe card 1 clamped by the fourth finger F4 can pass through the center point CP of the probe card 1 perpendicular to the first virtual line L1.

[0107] Here, the first virtual line L1 may extend in the X-axis direction which is the same as the first direction I, and the second virtual line L2 may extend in the Y-axis direction which is the same as the second direction II.

[0108] However, the direction is not limited to the illustration and may include various directions.

[0109] like Fig. 9 , Fig.10 As shown in FIG. 2 , the first chuck 21 may further include a pin pusher 210 for pushing the pins PN toward the pin holes PH provided in the probe card 1 to align or firmly fix the probe card 1 .

[0110] Fig.12 It is shown Figure 1A cross-sectional view of a clamped state of a small-diameter probe card 1-1 in a probe card test system 100, Fig.13 It is shown Figure 1 A cross-sectional view of a clamped state of a medium-diameter probe card 1-2 in a probe card test system 100, and Fig.14 It is shown Figure 1 1 is a cross-sectional view of a clamped state of large-diameter probe cards 1 - 3 in the probe card testing system 100 .

[0111] like Fig.12 As shown in the figure, the pin pusher 210 may include: a pin PN, which is provided in a shape corresponding to the pin hole PH provided in the probe card 1 so as to be insertable into the pin hole PH and is provided to move forward or backward through the through hole TH provided in the first head body H1; an elastic member 211, which is used to apply a restoring force in the direction in which the pin PN moves backward; and a cam protrusion 212, which is installed on the surface of the first horizontal part F1a facing the pin PN so as to press the pin PN forward according to the position to which the first finger-like member F1 slides.

[0112] Therefore, when the cam protrusion 212 slides together with the first horizontal portion F1 a to press the rear end of the pin PN, the front end of the pin PN may be inserted into the pin hole PH provided in the probe card 1 to align or securely fix the probe card 1 .

[0113] In order to fix probe cards of various diameters, e.g. Fig.12 Small diameter probe card 1-1, Fig.13 Medium diameter probe cards 1-2, and Fig.14 For a large-diameter probe card 1-3, according to the sliding position of the first finger-shaped member F1, the pin pusher 210 may include a first pin pusher 210-1 installed at a first sliding position, a second pin pusher 210-2 installed at a second sliding position different from the first sliding position, and a third pin pusher 210-3 installed at a third sliding position different from the first sliding position and the second sliding position.

[0114] Therefore, if Fig.12 As shown in , when the small diameter probe card 1-1 needs to be clamped, the pin PN of the first pin pusher 210-1 installed at the first sliding position can be inserted into the pin hole PH to firmly clamp the small diameter probe card 1-1. Fig.13 As shown in , when the middle diameter probe card 1-2 needs to be clamped, the pin PN of the second pin pusher 210-2 installed at the second sliding position can be inserted into the pin hole PH to firmly clamp the middle diameter probe card 1-2. Fig.14As shown in , when the large-diameter probe card 1 - 3 needs to be clamped, the pin PN of the third pin pusher 210 - 3 installed at the third sliding position can be inserted into the pin hole PH to firmly clamp the large-diameter probe card 1 - 3.

[0115] Therefore, using the probe card testing system 100 according to some embodiments of the present invention, probe cards 1 of various diameters (for example, a small diameter probe card 1-1, a medium diameter probe card 1-2, and a large diameter probe card 1-3) can be aligned or firmly fixed according to the sliding positions of the fingers F1, F2, F3 and F4, thereby reducing testing time, testing labor and testing costs, and significantly improving testing accuracy and productivity.

[0116] Fig.15 is a flow chart of a probe card testing method according to some embodiments of the present invention.

[0117] like Figures 1 to 15 As shown in , the probe card testing method according to some embodiments of the present invention may include: (a) loading and placing a probe card 1 for testing electrical characteristics of a substrate on a holder 11, (b) transferring the probe card 1 placed on the holder 11 to an initial position by flipping the probe card 1, (c) transferring the probe card 1 transferred to the initial position to a test station 41, (d) precisely moving the test station 41 in a first direction I to test probes 2 of the probe card 1, (e) testing the probes 2 of the probe card 1 by utilizing an optical system 50, and (f) precisely moving the optical system 50 or the test station 41 in a second direction II perpendicular to the first direction I to test all probes 2 of the probe card 1.

[0118] In step (a), the probe card 1 may be placed on the holder 11 with the probes 2 facing downward, and in step (b), the probe card 1 may be turned over so that the probes 2 face upward.

[0119] In step (c), the probe card 1 can be picked up and transferred to the test table 41 with the probe 2 facing upward, in step (d), the probe card 1 can be precisely moved in the X-direction, and in steps (e) and (f), the optical system 50 that moves precisely in the Y-axis direction can test the probe 2 of the probe card 1.

[0120] Thereafter, the probe card 1 having completed the test may be reversely conveyed and turned over to return to the holder 11 , and then unloaded to the outside to wait in the waiting area.

[0121] According to the aforementioned embodiments of the present invention, a series of test processes can be automated to quickly and accurately test not only probe cards of small diameters but also probe cards of large diameters, a large number of probe cards can be tested using a short waiting time of the probe cards stored in the waiting area so that defects of the probes can be prevented in advance before wafer testing, and probe cards of various diameters can be tested, thereby reducing test time, test labor and test costs and significantly improving test accuracy and survival rate. However, the scope of the present invention is not limited to the above effects.

[0122] While the invention has been particularly shown and described with reference to embodiments thereof, it will be understood by those skilled in the art that various changes in form and details may be made without departing from the scope of the invention as defined by the following claims.

Claims

1. A probe card testing system, comprising: a loader for loading and placing a probe card for testing electrical characteristics of a substrate on a holder; a flipper for transferring the probe card placed on the holder to an initial position by flipping the probe card; A conveyor, used for conveying the probe card conveyed to the initial position to a test station; a test stage mover for accurately moving the test stage in a first direction to test the probes of the probe card; an optical system for optically testing the probes of the probe card; as well as An optical system mover is used to accurately move the optical system or the test stage in a second direction perpendicular to the first direction to test all the probes of the probe card.

2. The probe card testing system according to claim 1, wherein: The flipper comprises: a first clamp for clamping both sides of the probe card placed on the holder with the probes facing downward; and A rotating arm is connected to the first chuck at one end and to a rotating shaft at the other end, and the rotating arm rotates around the rotating shaft to flip the first chuck so that the probes of the probe card face upward.

3. The probe card testing system according to claim 2, wherein: The first chuck comprises: a first head body provided to correspond to the probe card; a first finger provided to move forward or backward on a portion of the first head body so as to contact a first portion of the probe card; and A second finger is provided to move forward or backward on another portion of the first head body to contact with a second portion of the probe card.

4. The probe card testing system according to claim 3, wherein: The first finger-shaped member comprises: a first horizontal portion provided in a shape corresponding to a portion of a top surface of the first head body so as to slide along the first head body; a first vertical portion connected to the first horizontal portion to move toward or away from the first portion of the probe card; and a first recessed portion provided in a surface of the first vertical portion facing the probe card and provided in a concave shape or an arc shape to correspond to the first portion of the probe card, and Wherein, the second finger-shaped member comprises: a second horizontal portion provided in a shape corresponding to another portion of the top surface of the first head body so as to slide along the first head body; a second vertical portion connected to the second horizontal portion to move toward or away from the second portion of the probe card; and A second recessed portion is provided in a surface of the second vertical portion facing the probe card and is provided in a concave shape or an arc shape to correspond to the second portion of the probe card.

5. The probe card testing system according to claim 4, wherein: The first chuck further includes: a pin pusher for pushing a pin toward a pin hole provided in the probe card to fix the probe card, and Wherein, the pin pusher comprises: the pin provided in a shape corresponding to the pin hole provided in the probe card so as to be insertable into the pin hole and provided to move forward or backward through a through hole provided in the first head body; an elastic member for applying a restoring force in a direction in which the pin moves backward; and A cam protrusion is installed on a surface of the first horizontal portion facing the pin so as to press the pin forward according to a position where the first finger slides.

6. The probe card testing system according to claim 5, wherein: In order to fix probe cards of various diameters according to the sliding position of the first finger, the pin pusher includes: a first pin pusher mounted at a first sliding position; and A second pin pusher is installed at a second sliding position different from the first sliding position.

7. The probe card testing system according to claim 4, wherein: The transmitter comprises: a second clamping head for clamping the other two sides of the probe card transferred to the initial position so as not to interfere with the first clamping head of the flipper; a first movable plate connected to the second chuck and capable of reciprocating to transfer the second chuck from the initial position to the test station; and A first guide rail is installed above the second clamping head to guide the first movable plate in the first direction.

8. The probe card testing system according to claim 7, wherein: The second chuck comprises: a second head body provided to correspond to the probe card; a third finger provided to move forward or backward on a portion of the second head body so as to contact a third portion of the probe card; and A fourth finger is provided to move forward or backward on another portion of the second head body to contact a fourth portion of the probe card.

9. The probe card testing system according to claim 8, wherein: The third finger-shaped member comprises: a third horizontal portion provided in a shape corresponding to a portion of the top surface of the second head body so as to slide along the second head body; a third vertical portion connected to the third horizontal portion to move toward or away from the third portion of the probe card; and a third recessed portion provided in a surface of the third vertical portion facing the probe card and provided in a concave shape or an arc shape to correspond to the third portion of the probe card, and Wherein, the fourth finger-shaped member comprises: a fourth horizontal portion provided in a shape corresponding to another portion of the top surface of the second head body so as to slide along the second head body; a fourth vertical portion connected to the fourth horizontal portion to move toward or away from the fourth portion of the probe card; and A fourth recessed portion is provided in a surface of the fourth vertical portion facing the probe card and is provided in a concave shape or an arc shape to correspond to the fourth portion of the probe card.

10. The probe card testing system according to claim 9, wherein: A first virtual line connecting the first portion and the second portion of the probe card passes through a center point of the probe card, and Wherein, a second virtual line connecting the third portion and the fourth portion of the probe card passes through the center point of the probe card perpendicular to the first virtual line.

11. The probe card testing system according to claim 10, wherein: The first virtual line extends in the same direction as the first direction, and Wherein, the second virtual line extends in the same direction as the second direction.

12. The probe card testing system according to claim 7, wherein: The conveyor further includes an elevator provided between the second clamping head and the first movable plate to raise or lower the second clamping head.

13. The probe card testing system according to claim 1, wherein: The test bench mover comprises: a second movable plate connected to the test station and capable of reciprocating from a first test position to a second test position; a second guide rail installed below the second movable plate to guide the second movable plate in the first direction; and A base for supporting the second guide rail.

14. The probe card testing system according to claim 1, wherein: The optical system comprises: a scanning test camera for scanning the probes of the probe card at a low magnification; and The precision test camera is arranged beside the scanning test camera and is used for accurately testing the probes that need to be accurately tested at a high magnification.

15. The probe card testing system according to claim 14, wherein: The precision test camera is at least partially raised or lowered to move the focus.

16. The probe card testing system according to claim 1, wherein: The optical system mover comprises: a third movable plate connected to the optical system and capable of reciprocating from a first imaging position to a second imaging position; a third guide rail for guiding the third movable plate in the second direction; and A base body is used to support the third guide rail.

17. The probe card testing system according to claim 1, wherein: The holder has a ring shape or a short tube shape having a hollow space to protect the probes provided on the bottom surface of the probe card.

18. The probe card testing system according to claim 1, wherein: The loader is a loader / unloader for unloading the probe card that has been completely tested and returned to the holder through the conveyor and the flipper.

19. A probe card testing method, comprising: (a) loading and placing a probe card for testing electrical characteristics of a substrate on a holder; (b) transferring the probe card placed on the holder to an initial position by turning over the probe card; (c) transferring the probe card transferred to the initial position to a test station; (d) precisely moving the test stage in a first direction to test probes of the probe card; (e) testing the probe of the probe card by using an optical system; as well as (f) accurately moving the optical system or the test stage in a second direction perpendicular to the first direction to test all the probes of the probe card.

20. A probe card testing system, comprising: a loader for loading and placing a probe card for testing electrical characteristics of a substrate on a holder; a flipper for transferring the probe card placed on the holder to an initial position by flipping the probe card; A conveyor, used for conveying the probe card conveyed to the initial position to a test station; a test stage mover for accurately moving the test stage in a first direction to test the probes of the probe card; an optical system for optically testing the probes of the probe card; as well as an optical system mover for accurately moving the optical system or the test table in a second direction perpendicular to the first direction to test all the probes of the probe card, Wherein, the flipper comprises: a first clamp for clamping both sides of the probe card placed on the holder with the probes facing downward; and a rotating arm connected to the first chuck at one end and connected to a rotating shaft at the other end, and the rotating arm rotates around the rotating shaft to flip the first chuck so that the probes of the probe card face upward, Wherein, the first chuck comprises: a first head body provided to correspond to the probe card; a first finger provided to move forward or backward on a portion of the first head body so as to contact a first portion of the probe card; and a second finger provided to move forward or backward on another portion of the first head body so as to contact a second portion of the probe card, Wherein, the first finger-shaped member comprises: a first horizontal portion provided in a shape corresponding to a portion of a top surface of the first head body so as to slide along the first head body; a first vertical portion connected to the first horizontal portion to move toward or away from the first portion of the probe card; and a first recessed portion provided in a surface of the first vertical portion facing the probe card and provided in a concave shape or an arc shape to correspond to the first portion of the probe card, Wherein, the second finger-shaped member comprises: a second horizontal portion provided in a shape corresponding to another portion of the top surface of the first head body so as to slide along the first head body; a second vertical portion connected to the second horizontal portion to move toward or away from the second portion of the probe card; and a second recessed portion provided in a surface of the second vertical portion facing the probe card and provided in a concave shape or an arc shape to correspond to the second portion of the probe card, wherein the first clamp further comprises a pin pusher for pushing the pin toward the pin hole provided in the probe card to fix the probe card, Wherein, the transmitter comprises: a second clamping head for clamping the other two sides of the probe card transferred to the initial position so as not to interfere with the first clamping head of the flipper; a first movable plate connected to the second chuck and capable of reciprocating to transfer the second chuck from the initial position to the test station; and a first guide rail mounted above the second clamping head to guide the first movable plate in the first direction, wherein the conveyor further comprises an elevator provided between the second clamping head and the first movable plate to raise or lower the second clamping head, Wherein, the test bench mover comprises: a second movable plate connected to the test station and capable of reciprocating from a first test position to a second test position; a second guide rail installed below the second movable plate to guide the second movable plate in the first direction; and a base for supporting the second guide rail, Wherein, the optical system comprises: a scanning test camera for scanning the probes of the probe card at a low magnification; and A precision test camera, arranged next to the scanning test camera, is used to accurately test the probes that need to be accurately tested at a high magnification. Wherein, the optical system mover comprises: a third movable plate connected to the optical system and capable of reciprocating from a first imaging position to a second imaging position; a third guide rail for guiding the third movable plate in the second direction; and a base for supporting the third guide rail, and The holder may have a ring shape or a short tube shape having a hollow space to protect the probes provided on the bottom surface of the probe card.

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