Three-dimensional vibration energy acquisition electromagnetic energy device and electronic equipment

Abstract

The invention discloses a three-dimensional vibration energy acquisition electromagnetic energy device and electronic equipment, the three-dimensional vibration energy acquisition electromagnetic energy device comprises a magnetic component, a mass block, a plurality of support components, a coil and a wire, the plurality of support components are connected between the mass block and the magnetic component, and the coil is arranged between the mass block and the magnetic component. A gap is formed between the mass block and the magnetic component, and the supporting component has elasticity so that the mass block can perform three-dimensional swing relative to the magnetic component; the coil is connected with the mass block, the coil synchronously moves along with the mass block to cut a magnetic induction line of the magnetic component, and the coil is provided with a first end and a second end; the first end and the second end of the coil are both connected with wires, and the wires are used for conveying energy obtained through electromagnetic induction conversion of the magnetic component and the coil. When the mass block vibrates in a three-dimensional mode, electric energy is obtained through the electromagnetic induction phenomenon between the coil and the magnetic component, collection of three-dimensional vibration energy is achieved, and the energy conversion efficiency is improved.

Description

Technical Field

[0001] The present invention belongs to the technical field of vibration energy harvesting, and in particular relates to a three-dimensional vibration energy harvesting electromagnetic energy device and electronic equipment. Background Art

[0002] With the rapid development of low-power electronic devices such as wireless sensors, wearable devices, and medical implants, the demand for long-term, stable, and environmentally adaptable energy supply is growing. Traditional battery power supply has gradually failed to meet the needs of these devices due to problems such as life limit, difficulty in replacement, and environmental impact. Summary of the invention

[0003] The present invention is based on the inventor's discovery and understanding of the following facts and problems:

[0004] The inventors realized that the electromagnetic energy devices in the related art can only collect a single vibration action signal and have limited energy conversion efficiency.

[0005] The present invention aims to solve one of the technical problems in the related art at least to a certain extent.

[0006] To this end, an embodiment of the present invention proposes a three-dimensional vibration energy harvesting electromagnetic energy device that can improve energy conversion efficiency.

[0007] The three-dimensional vibration energy harvesting electromagnetic energy device according to the embodiment of the present invention comprises:

[0008] Magnetic components;

[0009] A mass block and a supporting component, wherein the supporting components are multiple in number, the multiple supporting components are connected between the mass block and the magnetic component, a gap is provided between the mass block and the magnetic component, and the supporting component is elastic so that the mass block can swing three-dimensionally relative to the magnetic component;

[0010] A coil, the coil is connected to the mass block, the coil moves synchronously with the mass block to cut the magnetic flux lines of the magnetic component, and the coil has a first end and a second end;

[0011] A wire is connected to the first end and the second end of the coil, and the wire is used to transmit energy obtained by electromagnetic induction conversion between the magnetic component and the coil.

[0012] In the embodiment of the present invention, a three-dimensional vibration energy harvesting electromagnetic energy device is placed in an environment. When the mass block vibrates three-dimensionally, electrical energy can be obtained through the electromagnetic induction phenomenon between the coil and the magnetic component, thereby realizing the collection of three-dimensional vibration energy and improving the efficiency of energy conversion.

[0013] In some embodiments, the coil is a planar coil, and the magnetization direction of the magnetic component is orthogonal to the planar coil;

[0014] And / or, the magnetic component is a permanent magnet.

[0015] In some embodiments, the coil is in the shape of a meander, a straight conductor, a mesh, or a concentric circle;

[0016] and / or, the coil is prepared by electroplating, evaporation deposition or sputtering process;

[0017] and / or, the coil is made of aluminum, copper, aluminum-copper alloy or gold;

[0018] And / or, the magnetic component is a neodymium iron boron permanent magnet, an aluminum nickel cobalt permanent magnet alloy, an iron chromium cobalt permanent magnet alloy, a barium ferrite, a strontium ferrite or a rare earth cobalt permanent magnet.

[0019] In some embodiments, the supporting component includes a beam body, the beam body is elastic, one end of the beam body is connected to the mass block, and the other end of the beam body is connected to the magnetic component.

[0020] In some embodiments, the number of the support components is at least 3, and the support components are arranged along the circumference of the mass block;

[0021] And / or, the beam body is a straight beam, an arched beam or a folded beam, and the folded beam has at least one bent section;

[0022] And / or, the beam body is integrally formed.

[0023] In some embodiments, a shell is further included, wherein the shell is fixedly connected to the magnetic component and the shell is disposed between the supporting component and the magnetic component.

[0024] In some embodiments, the housing has a first cavity in the middle, and the support component and the mass block are located on a side of the housing away from the magnetic component;

[0025] And / or, the shell is a silicon-based shell, a silicon nitride shell or a III-V semiconductor shell.

[0026] In some embodiments, an insulating layer is further included, the insulating layer being disposed on the housing, the supporting component and the mass block, and the wire is located on a side of the insulating layer away from the housing, the supporting component and the mass block;

[0027] The first end of the coil has a first connection portion, the second end of the coil has a second connection portion, the shell is provided with a third connection portion and a fourth connection portion, the insulating layer has a fifth connection portion, a sixth connection portion, a seventh connection portion and an eighth connection portion on a side away from the shell, the support component and the mass block, and the fifth connection portion, the sixth connection portion, the seventh connection portion and the eighth connection portion correspond to and are connected to the first connection portion, the second connection portion, the third connection portion and the fourth connection portion respectively;

[0028] The conductive wire includes a first metal layer and a second metal layer, wherein one end of the first metal layer is connected to the fifth connection portion and the other end is connected to the seventh connection portion, and one end of the second metal layer is connected to the sixth connection portion and the other end is connected to the eighth connection portion.

[0029] In some embodiments, the third connection portion, the fourth connection portion, the seventh connection portion, and the eighth connection portion are all plural in number;

[0030] And / or, the first metal layer and the second metal layer are both prepared by electroplating, evaporation deposition or sputtering process;

[0031] And / or, the first metal layer and the second metal layer are made of aluminum, copper, aluminum-copper alloy or gold;

[0032] And / or, the three-dimensional vibration energy harvesting electromagnetic energy device is manufactured using micro-nano processing technology;

[0033] And / or, it also includes an energy harvesting circuit, and the energy harvesting circuit is connected to the seventh connecting portion and the eighth connecting portion.

[0034] The electronic device disclosed in the present invention comprises a device body and a three-dimensional vibration energy harvesting electromagnetic energy device as described in any one of the above embodiments, wherein the device body and the three-dimensional vibration energy harvesting electromagnetic energy device are connected so that the electric energy collected by the three-dimensional vibration energy harvesting electromagnetic energy device is transmitted to the device body. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] Figure 1 It is a schematic structural diagram of a three-dimensional vibration energy harvesting electromagnetic energy device according to an embodiment of the present invention.

[0036] Figure 2 Schematic diagram of the structure of the upper surface of the shell, the supporting component and the mass block in the embodiment of the present invention.

[0037] Figure 3 Schematic diagram of the upper surface structure of the insulating layer in an embodiment of the present invention.

[0038] Figure 4 is a schematic diagram of the power management circuit.

[0039] Figure 5 It is a simulation schematic diagram of displacement of the mass block caused by a force perpendicular to the surface of the permanent magnet in an embodiment of the present invention.

[0040] Figure 6 It is a simulation schematic diagram of displacement of the mass block in an embodiment of the present invention when it is subjected to a force parallel to the surface direction of the permanent magnet.

[0041] Reference numerals:

[0042] 100. Three-dimensional vibration energy harvesting electromagnetic energy device;

[0043] 1. Magnetic components;

[0044] 2. Mass block;

[0045] 3. Support components;

[0046] 4. Coil; 41. First connecting portion; 42. Second connecting portion;

[0047] 5. housing; 51. third connection portion; 52. fourth connection portion;

[0048] 6. Wire; 61. First metal layer; 62. Second metal layer;

[0049] 7. Insulation layer;

[0050] 81. fifth connection portion; 82. sixth connection portion; 83. seventh connection portion; 84. eighth connection portion;

[0051] 9. Energy harvesting circuit. DETAILED DESCRIPTION

[0052] Embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings. The embodiments described below with reference to the accompanying drawings are exemplary and intended to be used to explain the present invention, but should not be understood as limiting the present invention.

[0053] The following combination Figures 1 to 6 The three-dimensional vibration energy harvesting electromagnetic energy device 100 and the electronic device according to the embodiment of the present invention are described in detail.

[0054] like Figure 1-Figure 3 As shown, the three-dimensional vibration energy harvesting electromagnetic energy device 100 according to an embodiment of the present invention includes a magnetic component 1, a mass block 2, a supporting component 3, a coil 4 and a wire 6.

[0055] The magnetic component 1 can generate a magnetic field. There are multiple supporting components 3, which are connected between the mass block 2 and the magnetic component 1. There is a gap between the mass block 2 and the magnetic component 1. The supporting components 3 are elastic so that the mass block 2 can swing three-dimensionally relative to the magnetic component 1.

[0056] The support component 3 provides support for the mass block 2, so that the mass block 2 is in a suspended state, and the support component 3 is elastic and has resilience. When the three-dimensional vibration energy harvesting electromagnetic energy device 100 is placed in an environment and vibrates, the mass block 2 will vibrate three-dimensionally. The embodiment of the present invention harvests the three-dimensional vibration energy of the mass block 2 through the coil 4 and the magnetic component 1.

[0057] The coil 4 is connected to the mass block 2. The coil 4 can be attached to the surface of the mass block 2, and the coil 4 is located in the magnetic field of the magnetic component 1. The coil 4 moves synchronously with the mass block 2 to cut the magnetic flux lines of the magnetic component 1, and current will be generated in the coil 4. The coil 4 has a first end and a second end. The first end and the second end of the coil 4 are both connected to a wire 6, and the wire 6 is used to transmit energy obtained by the magnetic component 1 and the coil 4 through electromagnetic induction conversion.

[0058] The first end and the second end of the coil 4 are both connected to the wire 6 for connecting to the energy collection circuit 9 to transmit electrical energy to the electronic device for normal operation of the electronic device, and the excess electrical energy can be stored.

[0059] In the embodiment of the present invention, by placing the three-dimensional vibration energy harvesting electromagnetic energy device 100 in the environment, when the mass block 2 vibrates three-dimensionally, electrical energy can be obtained through the electromagnetic induction phenomenon between the coil 4 and the magnetic component 1, thereby realizing the collection of three-dimensional vibration energy and improving the efficiency of energy conversion.

[0060] The embodiment of the present invention has a long service life, does not need to be replaced, is less affected by environmental factors, and can actively collect energy from the environment and convert it. The embodiment of the present invention can change its volume size according to needs. For example, in small low-power electronic devices such as wireless sensors, wearable devices, and medical implants, the three-dimensional vibration energy harvesting electromagnetic energy device 100 of the embodiment of the present invention can be made into a micro energy device to improve its practicality and application scenarios.

[0061] In some embodiments, the coil 4 is a planar coil 4, and the magnetization direction of the magnetic component 1 is orthogonal to the planar coil 4. When the planar coil 4 is orthogonal to the magnetization wind direction, according to the three-dimensional swing characteristics of the mass block 2, the planar coil 4 can more effectively cut the magnetic flux lines, improve the conversion efficiency of the three-dimensional vibration energy, and increase the energy collection amount.

[0062] Furthermore, the shape of the coil 4 is a circular shape, a straight conductor shape, a mesh shape or a concentric circle shape. In application, the coil 4 of different shapes can be selected to increase the current generated after the coil 4 cuts the magnetic flux lines and ensure the energy conversion efficiency.

[0063] Furthermore, the coil 4 is prepared by electroplating, evaporation deposition or sputtering process, so that the planar coil 4 is fixedly formed on the surface of the mass block 2, which simplifies the manufacturing process, improves the structural stability, and can realize the production of micro-energy devices. The material of the coil 4 is aluminum, copper, aluminum-copper alloy or gold and other metals to ensure its conductive properties and structural stability.

[0064] In some embodiments, the magnetic component 1 is a permanent magnet. The permanent magnet has a stable magnetic field, and by controlling the magnetization direction, an ideal magnetic flux distribution state can be obtained, and no other additional components are required, which makes it easier to achieve miniaturization and manufacture micro energy devices.

[0065] Furthermore, the magnetic component 1 is a neodymium iron boron permanent magnet, an aluminum nickel cobalt permanent magnet alloy, an iron chromium cobalt permanent magnet alloy, a barium ferrite, a strontium ferrite or a rare earth cobalt permanent magnet.

[0066] like Figure 1-Figure 3 , Figure 5 and Figure 6 As shown, in some embodiments, the supporting component 3 includes a beam body, the beam body is elastic, one end of the beam body is connected to the mass block 2, and the other end of the beam body is connected to the magnetic component 1.

[0067] That is to say, the beam body is made of an elastic material, which can ensure the three-dimensional vibration of the mass block 2 and also provide a rebound force for the resetting of the mass block 2 .

[0068] For example, the beam body is made of an elastic metal sheet or alloy sheet, which can be elastically deformed and has resilience when vibrating.

[0069] Further, the number of the supporting components 3 is at least 3, and the supporting components 3 are arranged along the circumferential direction of the mass block 2 .

[0070] For example, the number of supporting components 3 is 3, 4, or 6. The number of supporting components 3 can be determined based on the weight of the mass block 2, the size of the beam, the elastic deformation capacity, the ability to constrain the three-dimensional swing of the mass block 2, etc., to ensure that the mass block 2 can achieve three-dimensional vibration.

[0071] Optionally, the beam body is a straight beam, an arched beam or a folded beam.

[0072] When the beam body is a folding beam, the folding beam has at least one bending section, the number of the bending sections in the folding beam may be 1, 2 or 4, and the bending of the bending section may be a right angle or an obtuse angle.

[0073] For example, the folded beam is in a Z shape.

[0074] For another example, the folding beam includes a first section, a second section and two third sections, one end of the first section is connected to the mass block 2, the other end of the first section is connected to the middle of the second section, both ends of the second section are respectively connected to a third section, one end of the third section is connected to the second section, and the other end of the third section is directly or indirectly connected to the magnetic component 1.

[0075] Furthermore, the first section is orthogonal to the second section, and the second section is orthogonal to the third section. At this time, the folding beam has three connecting ends, one of which is connected to the mass block 2, and the other two connecting ends are directly or indirectly connected to the magnetic component 1.

[0076] When a folded beam is used, on the one hand, the elastic deformation capacity of the beam body is increased. When the mass block 2 vibrates in three dimensions, the beam body is more likely to deform, reducing the constraint on the mass block 2. At the same time, multiple folded beams can ensure that there is sufficient resilience to make the mass block 2 vibrate reciprocatingly, thereby improving the conversion efficiency of vibration energy.

[0077] Optionally, straight beams, arched beams and folded beams can be used alone or in combination. For example, a portion of the beam body is a straight beam and another portion of the beam body is a folded beam. For another example, a portion of the beam body is an arched beam and another portion of the beam body is a folded beam.

[0078] Furthermore, the beam body is integrally formed, which has better stability, easier control of structural performance, and ensures product quality.

[0079] Figure 5 The schematic diagram of simulation is shown in which the mass block 2 is displaced by a force perpendicular to the surface of the permanent magnet in the embodiment of the present invention.

[0080] Figure 6 The schematic diagram of the simulation is shown in which the mass block 2 is displaced by a force parallel to the surface of the permanent magnet according to the embodiment of the present invention.

[0081] Figure 5 and Figure 6 The displacement unit is mm.

[0082] In some embodiments, the three-dimensional vibration energy harvesting electromagnetic energy device 100 further includes a shell 5 , which is fixedly connected to the magnetic component 1 , and the shell 5 is disposed between the supporting component 3 and the magnetic component 1 .

[0083] That is to say, the support component 3 is not directly connected to the magnetic component 1, but is fixed to the magnetic component 1 through the shell 5, and the mass block 2 is connected to the shell 5 through the support component 3. In application, the structure of the shell 5 can be used to arrange other components more reasonably, and the structure is more stable.

[0084] Furthermore, the housing 5 has a first cavity in the middle, and the support component 3 and the mass block 2 are located on the side of the housing 5 away from the magnetic component 1. At this time, the mass block 2 can be suspended, which is more convenient for the three-dimensional swing of the mass block 2. Due to the support and constraint of the support component 3, at least part of the swing area of ​​the mass block 2 can be located in the first cavity, which can make more reasonable use of space and ensure the structural stability of the support component 3 and the mass block 2.

[0085] Furthermore, the shell 5 is a silicon-based shell 5, a silicon nitride shell 5 or a III-V semiconductor shell 5. According to application requirements, the corresponding material of the shell 5 is selected to fully utilize the characteristics of the shell 5 of the corresponding material to ensure the structural stability of the energy device.

[0086] In some embodiments, the three-dimensional vibration energy harvesting electromagnetic energy device 100 also includes an insulating layer 7, which is disposed on the shell 5, the support component 3 and the mass block 2, and the wire 6 is located on the side of the insulating layer 7 away from the shell 5, the support component 3 and the mass block 2.

[0087] The first end of the coil 4 has a first connecting portion 41, the second end of the coil 4 has a second connecting portion 42, a third connecting portion 51 and a fourth connecting portion 52 are provided on the shell 5, and the side of the insulating layer 7 away from the shell 5, the supporting part 3 and the mass block 2 has a fifth connecting portion 81, a sixth connecting portion 82, a seventh connecting portion 83 and an eighth connecting portion 84, the fifth connecting portion 81, the sixth connecting portion 82, the seventh connecting portion 83 and the eighth connecting portion 84 correspond to and are connected to the first connecting portion 41, the second connecting portion 42, the third connecting portion 51 and the fourth connecting portion 52 respectively.

[0088] That is to say, in the thickness direction of the insulating layer 7, the fifth connection part 81 is correspondingly connected to the first connection part 41, the sixth connection part 82 is correspondingly connected to the second connection part 42, the seventh connection part 83 is correspondingly connected to the third connection part 51, and the eighth connection part 84 is correspondingly connected to the fourth connection part 52.

[0089] The wire 6 includes a first metal layer 61 and a second metal layer 62 . One end of the first metal layer 61 is connected to the fifth connection part 81 , and the other end is connected to the seventh connection part 83 . One end of the second metal layer 62 is connected to the sixth connection part 82 , and the other end is connected to the eighth connection part 84 .

[0090] One end of the first metal layer 61 is connected to the first end (first connection part 41) of the coil 4 through the fifth connection part 81, and the other end is connected to the seventh connection part 83. One end of the second metal layer 62 is connected to the second end (second connection part 42) of the coil 4 through the sixth connection part 82, and the other end is connected to the eighth connection part 84, so that the seventh connection part 83 and the eighth connection part 84 serve as output electrodes to output the current generated by the coil 4.

[0091] Each connection portion in the embodiment of the present invention may be a pad.

[0092] Furthermore, the first metal layer 61 and the second metal layer 62 are both prepared by electroplating, evaporation deposition or sputtering process, so that the first metal layer 61 and the second metal layer 62 are fixedly formed on the surface of the insulating layer 7, which simplifies the manufacturing process, improves the structural stability, and can realize the manufacturing of micro-energy devices. The first metal layer 61 and the second metal layer 62 are made of aluminum, copper, aluminum-copper alloy or gold to ensure their conductive properties and structural stability.

[0093] In some embodiments, the third connection portion 51 , the fourth connection portion 52 , the seventh connection portion 83 , and the eighth connection portion 84 are all plural in number.

[0094] That is to say, the third connection part 51, the fourth connection part 52, the seventh connection part 83 and the eighth connection part 84 can be provided in plurality according to the structure of the supporting component 3, so as to transmit the current generated by the coil 4 cutting the magnetic flux lines through multiple paths.

[0095] For example, the number of support components 3 shown in the figure is four, each support component 3 has two connection ends connected to the shell 5, and the number of the third connection part 51, the fourth connection part 52, the seventh connection part 83 and the eighth connection part 84 can all be set to four, which facilitates the transmission of current in the coil 4 through multiple paths and improves stability.

[0096] In some embodiments, the three-dimensional vibration energy harvesting electromagnetic energy device 100 is manufactured using micro-nano processing technology. The three-dimensional vibration energy harvesting electromagnetic energy device 100 in the above embodiment can be manufactured using micro-nano processing technology according to the needs of the application scenario, so as to be applied to low-power electronic devices such as wireless sensors, wearable electronic devices, and medical implants, solving the problems of traditional battery life limitations, replacement difficulties, and environmental impacts in related technologies.

[0097] The present invention realizes the conversion between vibration and electrical energy by causing the mass block 2 to displace during the three-dimensional vibration process and the coil 4 to cut the magnetic flux lines of the permanent magnet. Compared with the vibration energy harvesting device in the related art, the embodiment of the present invention has a simple structure, a smaller size, and is easy to package. It has the advantages of three-dimensional vibration energy harvesting and can be widely used in the field of three-dimensional vibration energy harvesting.

[0098] In some embodiments, an energy harvesting circuit 9 is further included, and the energy harvesting circuit 9 is connected to the seventh connection portion 83 and the eighth connection portion 84. The energy harvesting circuit 9 collects the current generated in the coil 4 through the seventh connection portion 83 and the eighth connection portion 84. After the current in the coil 4 flows to the seventh connection portion 83 and the eighth connection portion 84, it is output to the energy harvesting circuit 9 through the bonding wire to store electrical energy.

[0099] The embodiment of the present invention can collect energy during the three-dimensional vibration process, convert the vibration signal into an electrical signal, and then store and manage the energy through an external circuit. The energy device is made using micro-nano processing technology and has the advantages of high precision, small size, low cost, portability and easy integration, which can meet the increasing demand for sensor self-energy and micro energy in various industries.

[0100] The electronic device disclosed in the present invention includes a device body and a three-dimensional vibration energy harvesting electromagnetic energy device 100 as in any of the above embodiments. The device body and the three-dimensional vibration energy harvesting electromagnetic energy device 100 are connected so that the electric energy collected by the three-dimensional vibration energy harvesting electromagnetic energy device 100 is transmitted to the device body.

[0101] The device body can be a low-power electronic device such as a wireless sensor, a wearable electronic device, or a medical implant.

[0102] In the field of micro-electromechanical systems (MEMS) technology, a three-dimensional vibration energy harvesting MEMS electromagnetic micro-energy device (i.e., a three-dimensional vibration energy harvesting electromagnetic energy device 100 of an embodiment of the present invention) can convert mechanical three-dimensional vibration energy in the environment into electrical energy. The MEMS electromagnetic micro-energy device uses the principle of electromagnetic induction to cause relative movement between the permanent magnet inside the device and the coil 4 through three-dimensional vibration, thereby changing the magnetic flux, thereby generating an induced electromotive force in the coil 4, and has the advantages of simple structure, high conversion efficiency, and large output current. In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, which are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation to the present invention.

[0103] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present invention, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0104] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral one; it can be a mechanical connection, an electrical connection, or communication with each other; it can be a direct connection, or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0105] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0106] In the present invention, the terms "one embodiment", "some embodiments", "examples", "specific examples", or "some examples" etc. mean that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the described specific features, structures, materials or characteristics may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.

[0107] Although the embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and are not to be construed as limitations of the present invention. A person skilled in the art may change, modify, replace and vary the above embodiments within the scope of the present invention.

Claims

1. A three-dimensional vibration energy harvesting electromagnetic energy device, characterized in that: include: Magnetic components; A mass block and a supporting component, wherein the supporting components are multiple in number, the multiple supporting components are connected between the mass block and the magnetic component, a gap is provided between the mass block and the magnetic component, and the supporting component is elastic so that the mass block can swing three-dimensionally relative to the magnetic component; A coil, the coil is connected to the mass block, the coil moves synchronously with the mass block to cut the magnetic flux lines of the magnetic component, and the coil has a first end and a second end; A wire is connected to the first end and the second end of the coil, and the wire is used to transmit energy obtained by electromagnetic induction conversion between the magnetic component and the coil.

2. The three-dimensional vibration energy harvesting electromagnetic energy device according to claim 1 is characterized in that: The coil is a planar coil, and the magnetization direction of the magnetic component is orthogonal to the planar coil; And / or, the magnetic component is a permanent magnet.

3. The three-dimensional vibration energy harvesting electromagnetic energy device according to claim 2 is characterized in that: The shape of the coil is a circular shape, a straight conductor shape, a mesh shape or a concentric circle shape; and / or, the coil is prepared by electroplating, evaporation deposition or sputtering; and / or, the coil is made of aluminum, copper, aluminum-copper alloy or gold; And / or, the magnetic component is a neodymium iron boron permanent magnet, an aluminum nickel cobalt permanent magnet alloy, an iron chromium cobalt permanent magnet alloy, a barium ferrite, a strontium ferrite or a rare earth cobalt permanent magnet.

4. The three-dimensional vibration energy harvesting electromagnetic energy device according to claim 1 is characterized in that: The supporting component comprises a beam body, the beam body is elastic, one end of the beam body is connected to the mass block, and the other end of the beam body is connected to the magnetic component.

5. The three-dimensional vibration energy harvesting electromagnetic energy device according to claim 4 is characterized in that: The number of the supporting components is at least 3, and the supporting components are arranged along the circumference of the mass block; And / or, the beam body is a straight beam, an arched beam or a folded beam, and the folded beam has at least one bent section; And / or, the beam body is integrally formed.

6. The three-dimensional vibration energy harvesting electromagnetic energy device according to claim 1 is characterized in that: It also includes a shell, which is fixedly connected to the magnetic component and is arranged between the supporting component and the magnetic component.

7. The three-dimensional vibration energy harvesting electromagnetic energy device according to claim 6 is characterized in that: The shell has a first cavity in the middle, and the support component and the mass block are located on a side of the shell away from the magnetic component; And / or, the shell is a silicon-based shell, a silicon nitride shell or a III-V semiconductor shell.

8. The three-dimensional vibration energy harvesting electromagnetic energy device according to claim 6 is characterized in that: It also includes an insulating layer, which is arranged on the housing, the supporting component and the mass block, and the wire is located on a side of the insulating layer away from the housing, the supporting component and the mass block; The first end of the coil has a first connection portion, the second end of the coil has a second connection portion, the shell is provided with a third connection portion and a fourth connection portion, the insulating layer has a fifth connection portion, a sixth connection portion, a seventh connection portion and an eighth connection portion on a side away from the shell, the support component and the mass block, and the fifth connection portion, the sixth connection portion, the seventh connection portion and the eighth connection portion correspond to and are connected to the first connection portion, the second connection portion, the third connection portion and the fourth connection portion respectively; The conductive wire includes a first metal layer and a second metal layer, wherein one end of the first metal layer is connected to the fifth connection portion and the other end is connected to the seventh connection portion, and one end of the second metal layer is connected to the sixth connection portion and the other end is connected to the eighth connection portion.

9. The three-dimensional vibration energy harvesting electromagnetic energy device according to claim 8, characterized in that: The third connection portion, the fourth connection portion, the seventh connection portion and the eighth connection portion are all in plural numbers; And / or, the first metal layer and the second metal layer are both prepared by electroplating, evaporation deposition or sputtering process; And / or, the first metal layer and the second metal layer are made of aluminum, copper, aluminum-copper alloy or gold; And / or, the three-dimensional vibration energy harvesting electromagnetic energy device is manufactured using micro-nano processing technology; And / or, it also includes an energy harvesting circuit, and the energy harvesting circuit is connected to the seventh connecting portion and the eighth connecting portion.

10. An electronic device, characterized in that: It comprises a device body and a three-dimensional vibration energy harvesting electromagnetic energy device as described in any one of claims 1 to 9, wherein the device body and the three-dimensional vibration energy harvesting electromagnetic energy device are connected so that the electric energy collected by the three-dimensional vibration energy harvesting electromagnetic energy device is transmitted to the device body.

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