Shape measuring device and shape measuring method

Abstract

The present invention provides a shape measurement device and a shape measurement method. A first point measurement control unit 101 rotates a cylindrical portion 11a of a cylindrical rotation unit 11 to a reference cylindrical angle α1, and rotates a cylindrical portion 13a of a mirror rotation unit 13 to a reference mirror angle β1, and irradiates laser light, so as to measure the position of a specified first point A in the internal space from a reflection point R of the laser light in a mirror 14. A first rotation control unit 102 rotates the cylindrical portion 11a 180 degrees from the reference cylindrical angle α1. A second rotation control unit 103 rotates the cylindrical portion 13a 180 degrees from the reference mirror angle β1. After rotating the cylindrical portion 11a 180 degrees and rotating the cylindrical portion 13a 180 degrees, a second point measurement control unit 104 irradiates laser light, so as to measure the position of a second point B in the internal space from a reflection point R of laser light L in the mirror 14. A correction control unit 105 corrects the rotation actions of the cylindrical portion 11a and the cylindrical portion 13a.

Description

Technical Field

[0001] The present invention relates to a shape measurement device and a shape measurement method. Background Art

[0002] There are many known techniques for measuring the cross-sectional shape of the internal space of tunnels, underground caverns, buildings, and large cylindrical pipes. Among them, a laser rangefinder is used to measure the cross-sectional shape of the internal space. A laser rangefinder is a measuring instrument that uses a laser to measure distance. It measures the distance from the starting point (emission source) of the laser to the irradiation point (measurement point) of the object by converting the time from the starting point of the laser to the object until the laser is reflected from the irradiation point of the object and returns to the starting point into distance.

[0003] For example, Japanese Patent Application Laid-Open No. 2001-255144 (Patent Document 1) discloses a measurement device provided in a tunnel for measuring its internal shape. The device includes an optical distance measurement mechanism, a light projection direction variable mechanism, a rotational displacement detection mechanism, a rotation mechanism, a rotational displacement detection mechanism, a distance measurement control mechanism, an operation control mechanism, and an arithmetic mechanism. In addition, Japanese Patent Application Laid-Open No. 2002-81935 (Patent Document 2) discloses a size measurement device for an elevator. The device includes a rangefinder, a reflector, a hollow rotation mechanism, and an arithmetic control device. Japanese Patent Application Laid-Open No. 2018-21327 (Patent Document 3) discloses a roundness measurement device for measuring the roundness of the inner peripheral surface of a cylindrical section assembled by a shield machine. The device includes a distance detection unit, a scanning unit, a rotation angle detection unit, and a roundness calculation unit.

[0004] On the other hand, the applicant of the present invention has applied for and obtained a patent for an internal space cross-sectional shape measurement device for measuring the cross-sectional shape of an internal space as shown in Japanese Patent Application Laid-Open No. 2015-42974 (Patent Document 4). The internal space cross-sectional shape measurement device includes a laser distance measurement unit, a cylindrical rotation unit, a reflection unit, a cross-sectional shape calculation unit, a first tilt adjustment unit, and a second tilt adjustment unit.

[0005] Prior Art Documents

[0006] Patent Documents

[0007] Patent Document 1: Japanese Patent Application Laid-Open No. 2001-255144

[0008] Patent Document 2: Japanese Patent Application Laid-Open No. 2002-81935

[0009] Patent Document 3: Japanese Patent Application Laid-Open No. 2018-21327

[0010] Patent Document 4: Japanese Patent Application Laid-Open No. 2015-42974 Summary of the Invention

[0011] Technical Problem to be Solved by the Invention

[0012] Therefore, in the case of an internal space cross-sectional shape measuring device that rotates the laser of a laser rangefinder using a cylindrical portion provided in a cylindrical rotating portion with a mirror, it is necessary to perform a calibration operation to confirm whether the laser rotates correctly by 180 degrees. In this calibration operation, first, the measurer sets the device at a position near the center of the internal space at the site and sets two reference points (first reference point, second reference point) that exist on a straight line on both sides of the device with the device as the center. Next, the measurer rotates the cylindrical portion to irradiate the laser of the laser rangefinder to the first reference point and confirms the rotation operation of the cylindrical portion. Further, the measurer rotates the cylindrical portion by 180 degrees, and this time irradiates the laser of the laser rangefinder to the second reference point to confirm whether the laser is correctly irradiated to the second reference point.

[0013] Therefore, when the laser is not irradiated to the second reference point, the measurement accuracy of the device deteriorates. The reasons why the laser is not correctly irradiated to the second reference point can be considered as the following three points. The first reason is the case where the cylindrical portion does not rotate correctly by 180 degrees. In this case, since the optical axis of the laser does not coincide with the rotation axis of the cylindrical portion, it is necessary to adjust the rotation operation of the cylindrical portion and the position of the cylindrical portion. The second reason is the case where the setting of the second reference point is incorrect. The third reason is the case where the device is not set correctly. Since such three reasons can be considered, if the laser is not correctly irradiated to the second reference point, at the site, the measurer must confirm each of the three reasons one by one to perform the calibration operation.

[0014] However, there are technical problems that the calibration operation takes a huge amount of time and effort. In addition, it is difficult to correct all the causes themselves. There is a technical problem that it is difficult to figure out the cause of the deviation when the irradiation point of the laser is slightly deviated from the second reference point. Further, for example, the adjustment position of the cylindrical portion and the installation position of the device are offset in opposite directions from each other. Thus, visually, the irradiation point of the laser coincides with the second reference point, but the situation where both are offset does not change. As a result, there is a technical problem that an error occurs at the measurement point at other rotation angles. Then, if the calibration operation is not properly performed, it is impossible to proceed to the subsequent measurement of the internal space cross-sectional shape. Therefore, when the measurer spends more than half a day on the calibration operation, it becomes a bottleneck process in the measurement of the internal space cross-sectional shape. In addition, when this calibration operation is not properly performed, there is a technical problem that the measurement accuracy of the internal space cross-sectional shape deteriorates. In the above, taking the two directions on both sides centered on the device as the calibration spaces, however, further calibration spaces in two directions orthogonal thereto are necessary, resulting in a total of four calibration spaces being required, and there is a technical problem of the need for space. The techniques described in Patent Documents 1 to 4 cannot solve such technical problems.

[0015] Therefore, the present invention is made to solve the foregoing problems, and an object thereof is to provide a shape measurement device and a shape measurement method capable of easily performing a calibration operation and measuring a shape with high precision.

[0016] Technical solutions for solving technical problems

[0017] The shape measurement device according to the present invention includes: a laser distance measurement unit, a cylindrical rotation unit, a holding unit, a mirror rotation unit, a mirror, a first measurement control unit, a first rotation control unit, a second rotation control unit, a second point measurement control unit, and a correction control unit. The laser distance measurement unit is fixed to a flat table and can measure the distance from the starting point of the laser to the irradiation point irradiated by the laser. The cylindrical rotation unit is provided at an end of the flat table, and the rotation axis of the rotatable cylindrical portion of the cylindrical rotation unit is aligned with the laser from the laser distance measurement unit. The first surface of the holding unit has a through hole through which the laser passes and is fixed to an end of the cylindrical portion of the cylindrical rotation unit from which the laser exits. The second surface of the holding unit has a cylindrical hole and is bent in a direction perpendicular to the first surface. The mirror rotation unit is fixed to the second surface and, in a state where the rotation axis of the rotatable cylindrical portion intersects the laser from the laser distance measurement unit, rotatably mounts an end of the cylindrical portion in the cylindrical hole. The mirror is fixed to an end of the cylindrical portion, and a reflecting surface is disposed on an extension line of the rotation axis of the cylindrical portion to reflect the laser from the laser distance measurement unit. The first measurement control unit rotates the cylindrical portion to a specified reference cylindrical angle and rotates the cylindrical portion to a specified reference mirror angle, irradiates the laser, and thereby measures the position of a specified first point in the internal space from the reflection point of the laser in the mirror. The first rotation control unit rotates the cylindrical portion 180 degrees from the reference cylindrical angle. The second rotation control unit rotates the cylindrical portion from the reference mirror angle to a reverse angle that is line-symmetric with respect to the laser emitted from the end of the cylindrical portion as a symmetry line. The second measurement control unit irradiates the laser after rotating the cylindrical portion 180 degrees and rotating the cylindrical portion by the reverse angle, and thereby measures the position of a specified second point in the internal space from the reflection point of the laser in the mirror. The correction control unit corrects the rotation operation of the cylindrical portion from the reference cylindrical angle to 180 degrees and the rotation operation of the cylindrical portion from the reference mirror angle to the reverse angle so that the position of the second point coincides with the position of the first point.

[0018] The shape measurement method according to the present invention is a shape measurement method of a shape measurement device including a laser distance measurement unit, a cylindrical rotation unit, a holding unit, a mirror rotation unit, and a mirror, and includes the following steps: a first measurement control step, a first rotation control step, a second rotation control step, a second point measurement control step, and a correction control step. Each control step of the shape measurement method corresponds to each control unit of the shape measurement device.

[0019] Advantages of the Invention

[0020] According to the shape measurement device and the shape measurement method of the present invention, calibration work can be easily performed and the shape can be measured with high precision. Description of the Drawings

[0021] Figure 1 It is a schematic diagram and a functional block diagram of the shape measurement device according to the present invention.

[0022] Figure 2 They are a top view, a front-side perspective view, a right-side view, and a back-side perspective view of the shape measurement device according to the present invention.

[0023] Figure 3 They are a front view and a right-side view when the cylindrical part and the columnar part of the shape measurement device according to the present invention rotate.

[0024] Figure 4 It is a flowchart for showing the execution sequence of the shape measurement method according to the present invention.

[0025] Figure 5 (A) of is a front cross-sectional view, a front view, and a top view when measuring the position of the first point of the shape measurement device according to the present invention, Figure 5 (B) of is a front cross-sectional view, a front view, and a top view when the cylindrical part rotates 180 degrees.

[0026] Figure 6 (A) of is a front cross-sectional view, a front view, and a top view when the columnar part rotates 180 degrees, Figure 6 (B) of is an xy plane, a front view, and a top view of the difference between the position of the first point and the position of the second point.

[0027] Figure 7 (A) of is a back-side perspective view showing an example of measuring the shape when the measurement angle β0 of the shape measurement device according to the present invention is 0 degree, Figure 7 (B) of is a back-side perspective view showing an example of measuring the shape when the measurement angle β0 is 30 degrees.

[0028] Figure 8 (A) of is a top view showing an example of the rotation of the columnar part and the rotation of the cylindrical part when the reference mirror angle β1 is 20 degrees and the reverse angle β2 is 140 degrees, Figure 8 (B) of is a top view showing an example of the rotation of the columnar part and the rotation of the cylindrical part when the reference mirror angle β1 is 340 degrees and the reverse angle β2 is 220 degrees.

[0029] Figure 9 It is a perspective view showing an example of the rotation of the first rotation angle and the rotation of the second rotation angle and the internal structure of the shape measurement device provided with a cover part and a transmission part.

[0030] Figure 10 It is a perspective view of the device side and the tunnel side showing an example when the shape measurement device is applied to a tunnel excavation face.

[0031] Figure 11 (A) is a perspective view showing an example of the rotation of the cylindrical part of the embodiment. Figure 11 (B) is a perspective view showing an example of the rotation of the cylindrical part.

[0032] Figure 12 It is a schematic diagram showing an example of a confirmation experiment of the deviation of the measured value.

[0033] Figure 13 It is a table showing the results of the confirmation experiment of the deviation of the measured value.

[0034] Figure 14 It is a schematic diagram showing an example of a confirmation experiment of the accuracy of the measured value.

[0035] Figure 15 It is a table showing the results of the confirmation experiment of the accuracy of the measured value. Detailed implementation mode

[0036] Hereinafter, an embodiment of the shape measurement device according to the present invention will be described with reference to the drawings to facilitate understanding of the present invention. In addition, the following embodiment is an example of embodying the present invention and is not a feature limiting the technical scope of the present invention.

[0037] As Figure 1 and Figure 2 shown, the shape measurement device 1 according to the present invention includes: a laser distance measurement unit 10, a cylindrical rotation unit 11, a holding unit 12, a mirror rotation unit 13, a mirror 14 (reflection unit), and a control device 15.

[0038] Among them, the laser distance measurement unit 10 is fixed to the flat table 10a and can measure the distance from the starting point S of the laser L to the irradiation point P irradiated by the laser L. The cylindrical rotation unit 11 is provided at the end of the flat table 10a and aligns the rotation axis 11b of the rotatable cylindrical part 11a with the laser L (optical axis) from the laser distance measurement unit 10.

[0039] In addition, the first surface 12a of the holding unit 12 has a through hole for the laser L to pass through and is fixed to the end of the cylindrical part 11a of the cylindrical rotation unit 11 where the laser L exits, and the second surface 12b has a cylindrical hole and bends in a right angle direction with respect to the first surface 12a. Among them, the first surface 12a and the second surface 12b of the holding unit 12 form an L shape, and the second surface 12b is provided along the laser passing through the first surface 12a.

[0040] In addition, the mirror rotating part 13 is fixed to the second surface 12b of the holding part 12, and in a state where the rotation axis 13b of the cylindrical part 13a enabling rotation intersects the laser L (optical axis) from the laser distance measuring part 10, the end part of the cylindrical part 13a is rotatably mounted in the cylindrical hole of the second surface 12b.

[0041] In addition, the mirror 14 is fixed to the end part of the cylindrical part 13a of the mirror rotating part 13, and the reflecting surface 14a is arranged on the extension line of the rotation axis 13b of the cylindrical part 13a to reflect the laser L from the laser distance measuring part 10.

[0042] In addition, the control device 15 is respectively connected to the laser distance measuring part 10, the cylindrical rotating part 11, and the mirror rotating part 13, and controls each part. The control device 15 irradiates the laser L from the laser distance measuring part 10 and measures the distance from the starting point S of the laser L to the irradiation point P of the laser L. In addition, the control device 15 rotates the cylindrical part 11a of the cylindrical rotating part 11 to rotate the holding part 12 fixed to the end part of the cylindrical part 11a. Further, the control device 15 rotates the cylindrical part 13a of the mirror rotating part 13 to rotate the mirror 14 fixed to the end part of the cylindrical part 13a.

[0043] Here, as Figure 2 shown, since the fixed distance d1 from the starting point S of the laser L of the laser distance measuring part 10 to the reflection point R of the mirror 14 is fixed after the assembly of the device, the radial distance d3 from the reflection point R of the laser L to the irradiation point P of the laser L can be calculated by subtracting the fixed distance d1 from the measured distance d2 from the starting point S of the laser L to the irradiation point P of the laser L.

[0044] Then, in the shape measuring device 1 according to the present invention, the laser L can be rotated through two axes by the rotation action of the cylindrical part 11a of the cylindrical rotating part 11 and the rotation action of the cylindrical part 13a of the mirror rotating part 13.

[0045] Here, the relationship between the radial distance d3 and the position of the irradiation point P from the reflection point R is described. As Figures 1 to 3 shown, the traveling direction of the laser L from the starting point S of the laser distance measuring part 10 is set as the x-axis direction, the direction perpendicular to the traveling direction of the laser L and on the upper side is set as the y-axis direction, and the direction perpendicular to the traveling direction of the laser L and on the right side is set as the z-axis direction.

[0046] Then, with the y-axis direction as a reference, when the rotation angle when the laser L rotates from the y-axis direction to the z-axis direction on the right side (in the counterclockwise direction) is set as the first rotation angle α (degrees), the y coordinate value and z coordinate value of the irradiation point P of the laser L with respect to the reflection point R of the laser L are as shown in the following mathematical formulas (1) and (2).

[0047] y = d3×cosα…(1)

[0048] z = d3×sinα…(2)

[0049] In addition, when the first rotation angle α is 0 degrees, the laser L (optical axis) is aligned with the y-axis direction, and when the first rotation angle α is 90 degrees, the laser L (optical axis) is aligned with the z-axis direction.

[0050] Furthermore, when the rotation angle of the laser L rotating from the y-axis direction to the x-axis direction on the right side (in the counterclockwise direction) is set as the second rotation angle β (degrees), the y coordinate value and x coordinate value of the irradiation point P of the laser L with respect to the reflection point R of the laser L are as shown in the following mathematical formulas (3) and (4).

[0051] y = d3×cosβ…(3)

[0052] x = d3×sinβ…(4)

[0053] In addition, when the second rotation angle β is 0 degrees, the laser L (optical axis) is aligned with the y-axis direction, and when the second rotation angle β is 90 degrees, the laser L (optical axis) is aligned with the x-axis direction.

[0054] Here, the control device 15 measures the measurement distance d2 from the starting point S of the laser L to the irradiation point P of the laser L, calculates the radius distance d3 by subtracting the fixed distance d1 from the measurement distance d2, and can calculate the position (x coordinate value, y coordinate value, z coordinate value) of the irradiation point P of the laser L with respect to the reflection point R of the laser L by using the first rotation angle α of the cylindrical portion 11a, the second rotation angle β of the cylindrical portion 13a, and these mathematical formulas (1) to (4).

[0055] On the other hand, the control device 15 incorporates a CPU, ROM, RAM, HDD, SSD, etc. not shown. For example, the CPU uses the RAM as a work area and executes programs stored in the ROM, HDD, SSD, etc. In addition, for each of the control units described later, each control unit is also implemented by the CPU executing a program.

[0056] Next, refer to Figures 1 to 8 and describe the configuration and execution sequence according to the embodiment of the present invention. First, the measurer carries the shape measurement device 1 and goes to the internal space of the site where the shape of the cross-section or surface of the internal space to be measured is located. Next, as Figure 5 shown in (A) of, the measurer sets the shape measurement device 1 at a position near the center of the internal space 5 of the site and turns on the power of the control device 15 of the shape measurement device 1. In this way, the control device 15 starts and enters the shape measurement preparation.

[0057] Here, in order to perform the calibration operation of the shape measurement device 1, the measurer inputs a calibration key to the control device 1 ( Figure 4 : S101). Then, the first point measurement control unit 101 of the control device 15 rotates the cylinder part 11a of the cylinder rotation part 11 to a specified reference cylinder angle α1, and rotates the column part 13a of the mirror rotation part 13 to a specified reference mirror angle β1, and irradiates the laser L, so as to measure the position of a specified first point A in the internal space from the reflection point R of the laser in the mirror 14 ( Figure 4 : S102).

[0058] Here, the measurement method of the first point measurement control unit 101 is not particularly limited. For example, as shown in (A) of Figure 5 , the first point measurement control unit 101 rotates the cylinder part 11a of the cylinder rotation part 11 to a specified reference cylinder angle α1 (here 90 degrees, the laser is perpendicular from the y-axis direction to the z-axis direction), thereby making the laser L coincide with the y-axis direction. Then, the first point measurement control unit 101 rotates the column part 13a of the mirror rotation part 13 to a specified reference mirror angle β1 (here 0 degrees), thereby making the laser L coincide with the z-axis direction. Then, the first point measurement control unit 101 irradiates the laser L from the laser distance measurement unit 10 and measures the measured distance d2, calculates the radius distance d3, and uses the reference cylinder angle α1, the reference mirror angle β1, and these mathematical formulas (1) to (4) to calculate the position (xa, ya, za) of the first point A.

[0059] When the measurement by the first point measurement control unit 101 is completed, then, the first rotation control unit 102 of the control device 15 rotates the cylinder part 11a of the cylinder rotation part 11 180 degrees from the reference cylinder angle α1 ( Figure 4 : S103).

[0060] Here, the rotation method of the first rotation control unit 102 is not particularly limited. For example, as shown in (B) of Figure 5 , the first rotation control unit 102 rotates the cylinder part 11a from the reference cylinder angle α1 to a calibration cylinder angle α2 increased by 180 degrees. In other words, the first rotation control unit 102 rotates the cylinder part 11a 180 degrees. Here, the rotation direction of the cylinder part 11a is not particularly limited. As shown in (B) of Figure 5 , it can be the counterclockwise rotation direction with respect to the z-axis direction, or the clockwise direction.

[0061] When the rotation of the first rotation control unit 102 is completed, then, the second rotation control unit 103 of the control device 15 rotates the cylindrical portion 13a of the mirror rotation unit 13 from the reference mirror angle β1 to the reverse angle β2 that is line-symmetrical with the laser beam L emitted from the end of the cylindrical portion 11a as the symmetry line ( Figure 4 : S104).

[0062] Here, the rotation method of the second rotation control unit 103 is not particularly limited. For example, as shown in (A) of Figure 6 , when the reference mirror angle β1 is 0 degrees, the reverse angle β2 that is line-symmetrical with the laser beam L emitted from the end of the cylindrical portion 11a as the symmetry line is 180 degrees. Then, the second rotation control unit 103 rotates the cylindrical portion 13a until the correction mirror angle β2, which is obtained by increasing the reference mirror angle β1 by 180 degrees as the reverse angle. In other words, the second rotation control unit 103 rotates the cylindrical portion 13a by 180 degrees. Here, the reverse angle β2 is not particularly limited as long as it is an angle that is line-symmetrical with the reference mirror angle β1 with the laser beam L emitted from the end of the cylindrical portion 11a as the symmetry line. In addition, the rotation direction of the cylindrical portion 13a is not particularly limited. As shown in (A) of Figure 6 , it can be in the clockwise direction or the counterclockwise direction with respect to the x-axis direction.

[0063] In this way, the first rotation control unit 102 rotates the cylindrical portion 11a by 180 degrees, and the second rotation control unit 103 rotates the cylindrical portion 13a by the reverse angle β2 (here, 180 degrees), so that the laser beam L returns to the same position as the position of the first point A. In addition, among the above, although after the first rotation control unit 102 rotates the cylindrical portion 11a ( Figure 4 : S103), the second rotation control unit 103 rotates the cylindrical portion 13a ( Figure 4 : S104), since it is only necessary for the laser beam L to return to the same position as the position of the first point A, it can also be the opposite of the above. After the second rotation control unit 103 rotates the cylindrical portion 13a, the first rotation control unit 102 rotates the cylindrical portion 11a.

[0064] When the rotation of the second rotation control unit 103 is completed, then, after the second point measurement control unit 104 of the control device 15 rotates the cylindrical portion 11a by 180 degrees and rotates the cylindrical portion 13a by the reverse angle β2 (here, 180 degrees), the laser beam L is irradiated to measure the position of a specified second point B in the internal space 5 from the reflection point R of the laser beam L on the mirror 14 ( Figure 4 : S105).

[0065] Here, the measurement method of the second point measurement control unit 104 is not particularly limited. For example, as shown in Figure 6As shown in (A) of FIG. , the second point measurement control unit 104 irradiates a laser beam L from the laser distance measurement unit 10 to measure the measurement distance d2, calculates the radius distance d3, and uses the calibration cylinder angle α2, the calibration mirror angle β2 (inversion angle), and these mathematical formulas (1) to (4) to calculate the position (xb, yb, zb) of the second point B.

[0066] When the measurement by the second point measurement control unit 104 is completed, next, the correction control unit 105 of the control device 15 corrects the rotation operation of the cylinder unit 11a from the reference cylinder angle α1 to the calibration cylinder angle α2 (here, 180 degrees) and the rotation operation of the column unit 13a from the reference mirror angle β1 to the inversion angle β2 (calibration mirror angle) (here, 180 degrees) so that the position of the second point B coincides with the position of the first point A.

[0067] Here, the correction method of the correction control unit 105 is not particularly limited. For example, the correction control unit 105 determines whether the position (xb, yb, zb) of the second point B coincides with the position (xa, ya, za) of the first point A ( Figure 4 : S106).

[0068] Here, the determination method of the correction control unit 105 is not particularly limited. For example, the position (xb, yb, zb) of the second point B and the position (xa, ya, za) of the first point A are arranged on the xy plane formed by the x-axis direction and the y-axis direction, as shown in (B) of FIG. Figure 6 In other words, the difference between the position (xb, yb, zb) of the second point B and the position (xa, ya, za) of the first point A is composed of the difference in the rotation direction of the cylinder unit 11a (here, the y-axis direction) and the difference in the rotation direction of the column unit 13a (here, the x-axis direction). Therefore, the correction control unit 105 calculates the difference dx in the x-axis direction (dx = xb - xa) and the difference dy in the y-axis direction (dy = yb - ya) between the position (xb, yb, zb) of the second point B and the position (xa, ya, za) of the first point A. Then, the correction control unit 105 determines whether the difference dy in the y-axis direction is within the specified y-axis threshold value dy0 and whether the difference dx in the x-axis direction is within the specified x-axis threshold value dx0.

[0069] As a result of the determination, when the difference dy in the y-axis direction is within the y-axis threshold value dy0 and the difference dx in the x-axis direction is within the x-axis threshold value dx0, the correction control unit 105 determines that the position (xb, yb, zb) of the second point B coincides with the position (xa, ya, za) of the first point A ( Figure 4 : S106 is), and no correction process is particularly executed.

[0070] On the other hand, when the determination result shows that the difference dy in the y-axis direction exceeds the threshold value dy0 in the y-axis direction, or the difference dx in the x-axis direction exceeds the threshold value dx0 in the x-axis direction, the correction control unit 105 determines that the position (xb, yb, zb) of the second point B is inconsistent with the position (xa, ya, za) of the first point A ( Figure 4 : S106, No), and corrects the rotation operation of the cylindrical portion 11a or the rotation operation of the columnar portion 13a so that the position (xb, yb, zb) of the second point B coincides with the position (xa, ya, za) of the first point A ( Figure 4 : S107).

[0071] Here, the correction method of the correction control unit 105 is not particularly limited. For example, when the difference dy in the y-axis direction exceeds the threshold value dy0 in the y-axis direction, even if the cylindrical portion 11a rotates 180 degrees, it will not rotate correctly by 180 degrees, so a difference dy in the y-axis direction is generated. Therefore, the correction control unit 105 uses the radius distance d3 from the reflection point R of the laser L in the mirror 14 to the irradiation point P of the laser L and the difference dy in the y-axis direction in the measurement of the position of the first point A (or the second point B) to calculate the angular difference dα in the y-axis direction by the following mathematical formula (5).

[0072] dα = tan -1 (dy / d3)…(5)

[0073] Then, the correction control unit 105 uses the angular difference dα to calculate the correction value ay of the rotation operation Y of the cylindrical portion 11a by the following mathematical formula (6).

[0074] ay = (180 - dα) / 180…(6)

[0075] The correction value ay is the division calculation value obtained by dividing the subtraction calculation value obtained by subtracting the angular difference dα from 180 degrees by 180 degrees. The correction control unit 105 can correct the rotation operation Y of the cylindrical portion 11a by performing a multiplication calculation of the correction value ay on the rotation operation Y of the cylindrical portion 11a. Thus, when the cylindrical portion 11a rotates 180 degrees, the correction value ay can be used to make the cylindrical portion 11a rotate correctly by 180 degrees. In addition, the above is based on an angle (angle method), and it can also be based on a radian (radian method). The same applies hereinafter.

[0076] In addition, when the difference dx in the x-axis direction exceeds the threshold dx0 in the x-axis direction, even if the cylindrical portion 13a rotates by a reverse rotation angle β2 (here, 180 degrees), a 180-degree rotation will not be correctly performed, and thus a difference dx in the x-axis direction is generated. Therefore, the correction control unit 105 calculates the angular difference dβ in the x-axis direction using the radius distance d3 from the reflection point R of the laser L among the mirrors 14 to the irradiation point P of the laser L and the difference dx in the x-axis direction in the measurement of the position of the first point A (or the second point B) according to the following mathematical formula (7).

[0077] dβ = tan -1 (dx / d3)…(7)

[0078] Then, the correction control unit 105 calculates the correction value ax of the rotation operation X of the cylindrical portion 11a using the reference mirror angle β1, the reverse rotation angle β2, and the angular difference dβ according to the following mathematical formula (8).

[0079] ax = (β2 - β1 - dβ) / (β2 - β1)…(8)

[0080] The correction value ax is the division value obtained by dividing the second subtraction value obtained by subtracting the angular difference dβ from the first subtraction value obtained by subtracting the reference mirror angle β1 from the reverse rotation angle β2 by the first subtraction value.

[0081] Here, when the reference mirror angle β1 is 0 degrees and the reverse rotation angle β2 is 180 degrees, the correction value ax of the rotation operation X of the cylindrical portion 11a is calculated according to the following mathematical formula (9).

[0082] ax = (180 - dβ) / 180…(9)

[0083] In this case, the correction value ax is the division value obtained by dividing the subtraction value obtained by subtracting the angular difference dβ from 180 degrees by 180 degrees. The correction control unit 105 can correct the rotation operation X of the cylindrical portion 13a by performing a multiplication calculation of the correction value ax on the rotation operation X of the cylindrical portion 13a. Thus, when the cylindrical portion 13a rotates by 180 degrees, the cylindrical portion 13a can be correctly rotated by 180 degrees using the correction value ax.

[0084] When the correction process is not executed ( Figure 4 : S106, yes) or when the correction control unit 105 completes the correction ( Figure 4 : S107), the correction control unit 105 of the control device 15 asks the measurer whether the calibration is completed ( Figure 4 : S108).

[0085] Here, the inquiry method of the correction control unit 105 is not particularly limited. For example, the correction control unit 105 displays the position (xa, ya, za) of the first point A and the position (xb, yb, zb) of the second point B and displays the completion of correction, and displays the correction completion key and the re-correction key as selectable, so as to prompt the measurer to select either the correction completion key or the re-correction key.

[0086] Here, when the measurer deems it necessary to perform re-calibration, the re-calibration key is selected. The correction control unit 105 accepts the selection of the re-calibration key and returns to S102. The first point measurement control unit 101 measures the position of the first point A again ( Figure 4 : S102).

[0087] Here, for example, when the measurer wants to change the position of the first point A, the reference cylinder angle α1 of the cylinder part 11a is input. The first point measurement control unit 101 then accepts the reference cylinder angle α1 of the cylinder part 11a and rotates the cylinder part 11a of the cylinder rotation unit 11 by the reference cylinder angle α1 to measure the position of the first point A in the internal space 5. Thus, when repeatedly performing calibration, the positions of the first point A and the second point B can be measured at other positions and correction processing can be performed. In addition, when the measurer inputs the reference mirror angle β1 of the cylinder part 13a, similarly, the first point measurement control unit 101 accepts the reference mirror angle β1 of the cylinder part 13a and rotates the cylinder part 13a of the mirror rotation unit 11 by the reference mirror angle β1 to measure the position of the first point A in the internal space. Additionally, in S102, when the measurement of the position of the first point A is completed, the processing up to S108 is repeated.

[0088] On the other hand, in S108, when the measurer deems it unnecessary to perform re-calibration, the correction completion key is selected. The correction control unit 105 then accepts the selection of the correction completion key. The shape measurement control unit 106 of the control device 15 irradiates the laser L while rotating the rotation angle α of the cylinder part 11a by a prescribed measurement angle α0 in a state where the rotation angle β of the cylinder part 13a is rotated up to a prescribed measurement angle β0, so as to measure the shape with the reflection point R of the laser L in the mirror 14 as the center and with a radius distance d3 from the reflection point R of the laser L in the rotation angle α of the cylinder part 11a to the irradiation point P of the laser L as the radius ( Figure 4 : S109).

[0089] Here, the measurement method of the shape measurement control unit 106 is not particularly limited. For example, as Figure 7As shown in (A), while rotating the rotation angle α of the cylindrical part 11a by a predetermined measurement angle α0 (for example, 45 degrees) in a state where the rotation angle β of the cylindrical part 13a is rotated to a predetermined measurement angle β0 (for example, 0 degrees), the shape measurement control unit 106 irradiates the laser L, thereby calculating the radial distance for each measurement angle α0. Here, the measurement angle α0 is not particularly limited, and examples include 5 degrees, 10 degrees, 20 degrees, 30 degrees, 45 degrees, 60 degrees, 90 degrees, etc.

[0090] Here, the shape measurement control unit 106 rotates the rotation angle α of the cylindrical part 11a one full turn from 0 degrees to 360 degrees, thereby rotating the laser L one full turn from 0 degrees to 360 degrees. Then, the shape measurement control unit 106 calculates the positions of the irradiation points P for each measurement angle α0 centered on the reflection point R of the laser L, and by connecting the positions of the irradiation points P for each measurement angle α0, the cross-sectional shape of the internal space 5 at the site can be measured.

[0091] In addition, as Figure 7 As shown in (B), while rotating the rotation angle α of the cylindrical part 11a by a predetermined measurement angle α0 (for example, 45 degrees) in a state where the rotation angle β of the cylindrical part 13a is rotated to a predetermined measurement angle β0 (for example, 30 degrees), the shape measurement control unit 106 irradiates the laser L, thereby calculating the radial distance for each measurement angle α0. Then, the shape measurement control unit 106 calculates the positions of the irradiation points P for each measurement angle α0 centered on the reflection point R of the laser L, and connects the positions of the irradiation points P for each measurement angle α0. Here, by rotating the cylindrical part 13a by a predetermined measurement angle β0, the cross-sectional shape of the internal space 5 in a direction inclined from the vertical direction can be measured. In addition, among the above, in a state where the measurement angle β of the cylindrical part 13a is fixed, the rotation angle α of the cylindrical part 11a is rotated to measure each irradiation point P, but it is not limited thereto. By appropriately combining the measurement angle β of the cylindrical part 13a and the rotation angle α of the cylindrical part 11a, various surface shapes can be measured in addition to the cross-sectional shape.

[0092] In this way, the present invention can easily perform the calibration operation and measure the shape with high precision. In particular, by setting the rotation axis of the laser L to two axes, not only the cross-sectional shape of the internal space 5 in the vertical direction but also the cross-sectional shape of the internal space 5 in a direction inclined from the vertical direction can be measured, and the shape measurement range can be expanded.

[0093] In particular, in the present invention, correction is performed by the forward and reverse actions of two axes based on the rotation of the cylindrical portion 11a and the rotation of the cylindrical portion 13a. Instead of correcting the absolute position on one axis, it is by correcting the relative position on two axes. Therefore, among the three reasons in the existing calibration operation, it is possible to eliminate the defect in setting the second reference point of the second reason or the defect in the installation position of the device of the third reason, and the reason can be focused on the defect in the rotational movement of the cylindrical portion 11a and the cylindrical portion 13a of the first reason. As a result, the efficiency of the calibration operation and the improvement of the calibration accuracy can be achieved.

[0094] Furthermore, in the existing internal space cross-sectional shape measuring device on one axis, it is necessary to have calibration spaces in four directions every 90 degrees in the orthogonal direction of the rotation axis. However, in the two-axis shape measuring device of the present invention, due to the forward and reverse actions, there is no need to have calibration spaces in the opposing directions, and two directions are sufficient, which can reduce the calibration space. In other words, the calibration space of the two-axis shape measuring device of the present invention only needs to be one-fourth of the calibration space of the internal space cross-sectional shape measuring device on one axis.

[0095] However, among the above, although the case where the reference mirror angle β1 is 0 degrees and the reverse angle β2 is 180 degrees is described, as long as the reverse angle β2 is an angle that is line-symmetric with the reference mirror angle β1 with the laser L emitted from the end of the cylindrical portion 11a as the symmetry line, there is no particular limitation.

[0096] For example, as Figure 8 shown in (A), when the reference mirror angle β1 is 20 degrees, the reverse angle β2 is 180 - 20 - 20 = 140 degrees. Thus, the cylindrical portion 11a is rotated 180 degrees, and the second point B returns to the first point A.

[0097] In addition, as Figure 8 shown in (B), when the reference mirror angle β1 is 340 degrees, the reverse angle β2 is 180 - (340 - 360) - (340 - 360) = 220 degrees. Thus, the cylindrical portion 11a is rotated 180 degrees, and the second point B returns to the first point A. In this way, the reverse angle β2 can be appropriately determined.

[0098] In addition, in the present invention, the holding portion 12, the mirror rotating portion 13, and the mirror 14 are configured to be exposed to the outside. However, as Figure 9As shown, it can also be configured to further include a cover portion 16 for protecting the holding portion 12, the mirror rotating portion 13, and the mirror 14, and a transmissive portion 17 provided on the cover portion 16 through which the laser L passes, so as to protect the holding portion 12, the mirror rotating portion 13, and the mirror 14. The transmissive portion 17, together with the scanning area of the laser L, is formed in a rectangular shape along the laser L emitted from the end of the cylindrical portion 11a.

[0099] In addition, among the above, the correction control unit 105 is configured to correct the rotational movement X of the cylindrical portion 11a and the rotational movement Y of the cylindrical portion 13a. However, an adjustment mechanism for physically adjusting the first rotation angle and the second rotation angle can also be separately provided on the main body of the shape measurement device 1. For example, a first adjustment mechanism for adjusting the first rotation angle of the cylindrical portion 11a and a second adjustment mechanism for adjusting the second rotation angle of the cylindrical portion 13a are respectively provided, whereby physical adjustment can be performed.

[0100] Since the present invention can achieve high precision, it can not only measure the cross-sectional shape of the internal space of tunnels, underground large caverns, buildings, large cylindrical pipes, etc., but also of course measure the cross-sectional shape of the internal space of underground small caverns, small cylindrical pipes, etc. Furthermore, it is very suitable for the confirmation, inspection, etc. of these over time.

[0101] For example, the present invention can be used to measure the clearance (shield tail clearance) between the inner peripheral surface of the tail of a shield machine used for the excavation of a subway or sewer tunnel and the outer peripheral surface of the section located inside the tail. For example, the shape measurement device 1 according to the present invention is set near the center of the tunnel for calibration work. First, the inner peripheral surface of the tail of the shield machine is measured as the first shape, and then, the outer peripheral surface of the section located inside the tail is measured as the second shape. By subtracting the second shape from the first shape, the shield tail clearance can be measured.

[0102] In addition, in mountain tunnel engineering, it is extremely important to ensure the stability of the tunnel excavation face. Therefore, regular monitoring of the amount of protrusion of the tunnel excavation face is necessary. The present invention can be used to measure the amount of protrusion of the tunnel excavation face. For example, the shape measurement device 1 according to the present invention is set in front of the tunnel excavation face for calibration work. First, the surface of the initial tunnel excavation face is measured as the first shape, and then, after a specified period, the surface of the same tunnel excavation face is measured as the second shape. By subtracting the second shape from the first shape, the amount of protrusion of the tunnel excavation face can be measured. Specifically, as Figure 10 shown, the shape measurement device 1 provided with the cover portion 16 and the transmissive portion 17 is erected vertically, and the surface of the tunnel excavation face is scanned with the laser L at a specified first rotation angle α and a second rotation angle β, whereby the surface of the tunnel excavation face can be measured.

[0103] In addition, the present invention can be used for the measurement of the excavation face push-out variation and the management of the completed part of a mountain tunnel. It can also measure the displacement of slopes and walls, and can measure the three-dimensional surface shape.

[0104] <Examples, Comparative Examples, etc.>

[0105] The present invention will be specifically described below through examples and comparative examples, etc., but the present invention is not limited thereto.

[0106] <Example>

[0107] As Figures 1 to 7 shown, the shape measurement device 1 according to the present invention was assembled and fabricated, and as shown in (A) of Figure 11 and (B) of Figure 11 , the fabricated shape measurement device 1 was taken as an example. Here, as shown in (A) of Figure 11 , the rotation angle of the fixed cylindrical portion 13a was confirmed, and the cylindrical portion 11a rotated 360 degrees. In addition, as shown in (B) of Figure 11 , the rotation angle of the fixed cylindrical portion 11a was confirmed, and the cylindrical portion 13a rotated 360 degrees.

[0108] <Experiment for Confirming the Deviation of Measurement Values>

[0109] As Figure 12 shown, in a room, the shape measurement device 1 of the example was vertically arranged at a position at a specified distance (about 2000 mm) from the wall surface. In a state where the laser L was aligned with the y-axis direction, the rotation angle of the cylindrical portion 13a that reflected in a direction perpendicular to the emission direction of the laser L was set as the instrument angle of 0 degrees, and the first rotation angle α of the cylindrical portion 11a and the second rotation angle β of the cylindrical portion 13a were corrected, and measurement points corresponding to each first rotation angle α and each second rotation angle β were set (from No. 1 to No. 63). Then, steps S101 to S108 were implemented to perform calibration processing. After that, the radius distance d3 from the reflection point R of the laser L to the irradiation point P of the laser L was measured ten times. Among the ten measurement values, the subtraction calculated value obtained by subtracting the minimum value from the maximum value was calculated as the difference, and the deviation of the measurement values was confirmed. In addition, the average value of the ten times was also calculated.

[0110] <Results of the Experiment for Confirming the Deviation of Measurement Values>

[0111] As Figure 13 shown, the differences of the measurement points from No. 1 to No. 63 were all 1.5 mm or less, and it was found that the deviation of the measurement values was extremely small.

[0112] <Comparative Example>

[0113] A commercially available measuring machine was taken as a comparative example.

[0114] <Confirmation experiment of measurement value accuracy>

[0115] As Figure 14 shown, in a room, the shape measurement device 1 of the embodiment is horizontally arranged at a position at a specified distance (about 2000 mm) from the ceiling. With the laser L aligned with the z-axis direction, the rotation angle of the cylindrical portion 13a that reflects in a direction perpendicular to the emission direction of the laser L is set to 0 degrees for the instrument angle, and the first rotation angle α of the cylindrical portion 11a and the second rotation angle β of the cylindrical portion 13a are corrected. Measurement points (No. 1 to No. 9, No. 14, No. 22, No. 26 to No. 33, No. 38, No. 46, No. 53, No. 57 to No. 63) corresponding to each first rotation angle α and each second rotation angle β are set, and the positions of the measurement points of the serial numbers are the same as Figure 9 the same). Next, the steps of S101 to S108 are carried out for calibration processing. After that, using the radius distance d3 from the reflection point R of the laser L to the irradiation point P of the laser L, the positions of each measurement point are measured. On the other hand, the shape measurement device 1 of the embodiment is changed to the measuring machine of the comparative example, and the positions of each measurement point are measured using the measuring machine. Then, the subtraction calculated value obtained by subtracting the position of the measurement point of the embodiment from the position of the measurement point of the comparative example in the x-axis direction, y-axis direction, and z-axis direction is calculated as the difference, and the magnitude of the difference in the measurement value is confirmed.

[0116] <Results of the confirmation experiment of measurement value accuracy>

[0117] As Figure 15 shown, the differences of the measurement points up to No. 1 to No. 9, No. 14, No. 22, No. 26 to No. 33, No. 38, No. 46, No. 53, No. 57 to No. 63 are all 5.0 mm or less. The measurement values of the shape measurement device 1 of the embodiment show values extremely close to the measurement values of the measuring machine currently in use, and it is known that the accuracy of the measurement values of the embodiment is high.

[0118] Industrial applicability

[0119] As described above, according to the shape measurement device and the shape measurement method of the present invention, they are useful in the field of measuring the shape of tunnels, buildings, etc., such as in the civil engineering field, surveying technology field, metrology technology field, etc. Regardless of their simple structure, they effectively serve as a shape measurement device and a shape measurement method capable of measuring shapes with high precision.

[0120] Explanation of reference numerals

[0121] 1: Shape measurement device, 10: Laser distance measurement unit, 10a: Plane stage, 11: Cylindrical rotation unit, 11a: Cylindrical part, 11b: Rotation axis, 12: Holding unit, 12a: First surface, 12b: Second surface, 13: Mirror rotation unit, 13a: Cylindrical part, 13b: Rotation axis, 14: Mirror, 14a: Reflecting surface, 15: Control device, 16: Cover part, 17: Transmission part, 101: First point measurement control unit, 102: First rotation control unit, 103: Second rotation control unit, 104: Second point measurement control unit, 105: Correction control unit, 106: Shape measurement control unit, 5: Internal space, A: First point, B: Second point, d1: Fixed distance, d2: Measured distance, d3: Radius distance, L: Laser, P: Irradiation point, R: Reflection point, S: Starting point, α: First rotation angle, α0: Measurement angle, α1: Reference cylinder angle, α2: Calibration cylinder angle, β: Second rotation angle, β0: Measurement angle, β1: Reference mirror angle, β2: Inversion angle.

Claims

1. A shape measurement device, comprising: A laser distance measurement unit, fixed to a flat table, capable of measuring the distance from the starting point of the laser to the irradiation point irradiated by the laser; A cylindrical rotation unit, provided at an end of the flat table, and the cylindrical rotation unit aligns the rotation axis of a rotatable cylindrical portion with the laser from the laser distance measurement unit; A holding unit, the first surface of the holding unit has a through hole for the laser to pass through, and is fixed to the end of the cylindrical portion of the cylindrical rotation unit where the laser exits, the second surface of the holding unit has a cylindrical hole and is bent in a direction perpendicular to the first surface; A mirror rotation unit, fixed to the second surface and in a state where the rotation axis of a rotatable cylindrical portion intersects the laser from the laser distance measurement unit, rotatably mounts the end of the cylindrical portion in the cylindrical hole; A mirror, fixed to the end of the cylindrical portion, and arranges the reflecting surface on the extension line of the rotation axis of the cylindrical portion to reflect the laser from the laser distance measurement unit; A first point measurement control unit, rotates the cylindrical portion to a specified reference cylindrical angle, and rotates the cylindrical portion to a specified reference mirror angle, irradiates the laser, and thereby measures the position of a specified first point in the internal space from the reflection point of the laser in the mirror; A first rotation control unit, rotates the cylindrical portion 180 degrees from the reference cylindrical angle; A second rotation control unit, rotates the cylindrical portion from the reference mirror angle to an inversion angle that is line-symmetrical with respect to the laser emitted from the end of the cylindrical portion as the symmetry line; A second point measurement control unit, after rotating the cylindrical portion 180 degrees and rotating the cylindrical portion by the inversion angle, irradiates the laser, and thereby measures the position of a specified second point in the internal space from the reflection point of the laser in the mirror; And A correction control unit, corrects the rotation operation of the cylindrical portion from the reference cylindrical angle to 180 degrees and the rotation operation of the cylindrical portion from the reference mirror angle to the inversion angle so that the position of the second point coincides with the position of the first point.

2. The shape measurement device according to claim 1, Wherein, The shape measurement device further comprises a shape measurement control unit, the shape measurement control unit, while rotating the rotation angle of the cylindrical portion by a specified measurement angle, irradiates the laser while rotating the rotation angle of the cylindrical portion by a specified measurement angle, and thereby measures a shape with the reflection point of the laser in the mirror as the center and a radius distance from the reflection point of the laser in the rotation angle of the cylindrical portion to the irradiation point of the laser as the radius.

3. The shape measurement device according to claim 1, Wherein, The direction from the starting point of the laser distance measurement unit to the traveling direction of the laser is set as the x-axis direction, the direction perpendicular to the traveling direction of the laser and on the upper side is set as the y-axis direction, and the direction perpendicular to the traveling direction of the laser and on the right side is set as the z-axis direction. The first point measurement control unit aligns the laser with the y-axis direction by rotating the cylindrical portion to a specified reference cylindrical angle, and aligns the laser with the z-axis direction by rotating the cylindrical portion to a specified reference mirror angle. It irradiates the laser from the laser distance measurement unit, measures the measurement distance from the starting point of the laser to the irradiation point of the laser, subtracts the fixed distance from the starting point of the laser to the reflection point of the mirror from the measurement distance, thereby calculating the radius distance d3. Using the reference cylindrical angle α1, the reference mirror angle β1, and the following mathematical formulas (1)-(4), it calculates the position (xa, ya, za) of the first point. y = d3 × cosα…(1) z = d3 × sinα…(2) y = d3 × cosβ…(3) x = d3 × sinβ…(4) The second point measurement control unit irradiates the laser from the laser distance measurement unit to measure the measurement distance, calculates the radius distance d3, and uses the corrected cylindrical angle α2, the corrected mirror angle β2, and the mathematical formulas (1)-(4) to calculate the position (xb, yb, zb) of the second point. The correction control unit corrects in such a way that the position (xb, yb, zb) of the second point coincides with the position (xa, ya, za) of the first point.

4. The shape measurement device according to claim 1, wherein, the correction control unit calculates the difference in the rotation direction of the cylindrical portion between the position of the second point and the position of the first point and the difference in the rotation direction of the cylindrical portion between the position of the second point and the position of the first point, and determines whether the difference in the rotation direction of the cylindrical portion falls within a specified first threshold value and whether the difference in the rotation direction of the cylindrical portion falls within a specified second threshold value. When the difference in the rotation direction of the cylindrical portion falls within the specified first threshold value and the difference in the rotation direction of the cylindrical portion falls within the specified second threshold value, the correction control unit does not perform correction processing. When the difference in the rotation direction of the cylindrical portion exceeds the specified first threshold value, the correction control unit corrects the rotation operation of the cylindrical portion. When the difference in the rotation direction of the cylindrical portion exceeds the specified second threshold value, the correction control unit corrects the rotation operation of the cylindrical portion.

5. The shape measurement device according to claim 1, wherein, the correction control unit calculates the difference in the rotation direction of the cylindrical portion between the position of the second point and the position of the first point and the difference in the rotation direction of the cylindrical portion between the position of the second point and the position of the first point, calculates the correction value of the rotation operation of the cylindrical portion using the radius distance from the reflection point of the laser in the mirror to the irradiation point of the laser and the difference in the rotation direction of the cylindrical portion in the measurement of the position of the first point or the second point, and calculates the correction value of the rotation operation of the cylindrical portion using the radius distance and the difference in the rotation direction of the cylindrical portion, thereby correcting the rotation operation of the cylindrical portion and the rotation operation of the cylindrical portion.

6. The shape measurement device according to claim 1, wherein, the direction from the starting point of the laser distance measurement unit to the traveling direction of the laser is set as the x-axis direction, the direction perpendicular to the traveling direction of the laser and on the upper side is set as the y-axis direction, and the direction perpendicular to the traveling direction of the laser and on the right side is set as the z-axis direction, the correction control unit calculates the difference in the x-axis direction (dx = xb - xa) and the difference in the y-axis direction (dy = yb - ya) between the position (xb, yb, zb) of the second point and the position (xa, ya, za) of the first point, the correction control unit uses the radius distance d3 from the laser reflection point in the mirror to the laser irradiation point in the measurement of the position of the first point and the difference dy in the y-axis direction, and calculates the angular difference dα in the y-axis direction through the following mathematical formula (5), dα = tan -1 (dy / d3)…(5) the correction control unit uses the angular difference dα and calculates the correction value ay of the rotation operation of the cylindrical portion through the following mathematical formula (6), ay = (180 - dα) / 180…(6) the correction control unit corrects the rotation operation of the cylindrical portion by multiplying the rotation operation of the cylindrical portion by the correction value ay.

7. The shape measurement device according to claim 1, wherein, the direction from the starting point of the laser distance measurement unit to the traveling direction of the laser is set as the x-axis direction, the direction perpendicular to the traveling direction of the laser and on the upper side is set as the y-axis direction, and the direction perpendicular to the traveling direction of the laser and on the right side is set as the z-axis direction, the correction control unit calculates the difference in the x-axis direction (dx = xb - xa) and the difference in the y-axis direction (dy = yb - ya) between the position (xb, yb, zb) of the second point and the position (xa, ya, za) of the first point, the correction control unit uses the radius distance d3 from the laser reflection point in the mirror to the laser irradiation point in the measurement of the position of the first point and the difference dx in the x-axis direction, and calculates the angular difference dβ in the x-axis direction through the following mathematical formula (7), dβ = tan -1 (dx / d3)…(7) the correction control unit uses the reference mirror angle β1, the reverse angle β2, and the angular difference dβ, and calculates the correction value ax of the rotation operation of the cylindrical portion through the following mathematical formula (8), ax = (β2 - β1 - dβ) / (β2 - β1)…(8) the correction control unit corrects the rotation operation of the cylindrical portion by multiplying the rotation operation of the cylindrical portion by the correction value ax.

8. The shape measurement device according to claim 6, wherein, the correction control unit calculates the difference in the x-axis direction (dx = xb - xa) and the difference in the y-axis direction (dy = yb - ya) between the position (xb, yb, zb) of the second point and the position (xa, ya, za) of the first point, The correction control unit calculates the angular difference dβ in the x-axis direction through the following mathematical formula (7) using the radius distance d3 from the laser reflection point in the mirror to the laser irradiation point and the difference dx in the x-axis direction in the measurement of the position of the first point: dβ = tan -1 (dx / d3)…(7) The correction control unit calculates the correction value ax for the rotational movement of the cylindrical portion through the following mathematical formula (8) using the reference mirror angle β1, the inversion angle β2, and the angular difference dβ: ax = (β2 - β1 - dβ) / (β2 - β1)…(8) The correction control unit corrects the rotational movement of the cylindrical portion by multiplying the correction value ax to the rotational movement of the cylindrical portion.

9. The shape measurement device according to claim 7, wherein, when the reference mirror angle β1 is 0 degrees and the inversion angle β2 is 180 degrees, the correction value ax for the rotational movement of the cylindrical portion is calculated through the following mathematical formula (9): ax = (180 - dβ) / 180…(9).

10. A shape measurement method, which is a shape measurement method of a shape measurement device, the shape measurement device comprising: a laser distance measurement unit fixed to a flat table and capable of measuring the distance from the starting point of the laser to the irradiation point irradiated by the laser; a cylindrical rotation unit provided at an end of the flat table, and the cylindrical rotation unit aligns the rotation axis of the rotatable cylindrical portion with the laser from the laser distance measurement unit; a holding unit, the first surface of the holding unit has a through hole for the laser to pass through, and is fixed to an end of the cylindrical portion of the cylindrical rotation unit where the laser is emitted, the second surface of the holding unit has a cylindrical hole and is bent in a direction perpendicular to the first surface; a mirror rotation unit fixed to the second surface, and in a state where the rotation axis of the rotatable cylindrical portion intersects the laser from the laser distance measurement unit, the end of the cylindrical portion is rotatably mounted in the cylindrical hole ； and a mirror fixed to the end of the cylindrical portion and having a reflecting surface arranged on the extension line of the rotation axis of the cylindrical portion to reflect the laser from the laser distance measurement unit, the shape measurement method comprising the following steps: a first point measurement control step of rotating the cylindrical portion to a specified reference cylindrical angle, and rotating the cylindrical portion to a specified reference mirror angle, irradiating the laser, and thus measuring the position of a specified first point in the internal space from the laser reflection point in the mirror; a first rotation control step of rotating the cylindrical portion 180 degrees from the reference cylindrical angle; a second rotation control step of rotating the cylindrical portion 180 degrees from the reference mirror angle; a second point measurement control step of irradiating the laser after rotating the cylindrical portion 180 degrees and rotating the cylindrical portion 180 degrees, and thus measuring the position of a specified second point in the internal space from the laser reflection point in the mirror; and The correction control process corrects the rotation of the cylindrical part from the reference cylinder angle to 180 degrees and the rotation of the cylindrical part from the reference mirror angle to 180 degrees in such a way that the position of the second point coincides with the position of the first point.

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