A composite layered waterproof coating preparation device

Abstract

A composite multilayer waterproof coating preparation device relates to the field of multilayer thin film deposition technology. The main body features a double-chamber design, with both an ALD (Alternating Current Deposition) air inlet unit and a Parylene air inlet unit introduced into the two chambers. A low-temperature fluid air inlet unit connects the two chambers. The sample to be coated is placed on a sample holder within the chamber. Rapid cooling of the chamber is achieved using a low-temperature fluid (such as liquid nitrogen), significantly reducing the cooling waiting time after coating deposition and improving the preparation efficiency of the ALD-Parylene composite multilayer waterproof coating. Furthermore, due to the device's rapid cooling capability, it can efficiently prepare composite multilayer waterproof coatings with different deposition temperatures for samples.

Description

Technical Field

[0001] This invention relates to the field of multilayer thin film deposition technology. Background Technology

[0002] Parylene, as a superior electrical insulation, moisture-proof, mildew-proof, and salt spray-proof coating material, is widely used in the preparation of micron-level high-conformity waterproof thin film coatings due to its superior water-blocking ability among organic materials. However, its water-blocking effect is still inferior to inorganic films such as alumina. Nanoscale metal oxide films, such as aluminum oxide, zinc oxide, or other metal oxide films deposited using ALD technology, can also be used to prepare dense, pinhole-free water-blocking coatings, but they suffer from the drawback of being easily interfered with by surface particles. By adding an ALD deposition process to the Parylene vacuum vapor deposition process, a layered waterproof coating of ALD coating plus Parylene can be prepared, leveraging the advantages of layering and compensating for its shortcomings. Compared with a single Parylene thin film coating, the water-blocking ability of the coating is further improved. Summary of the Invention

[0003] To address the problems in existing technologies, this invention provides an apparatus for preparing composite multilayer waterproof coatings, solving the technical problem of requiring a long cooling time when preparing repeatedly multilayered waterproof coatings of ALD coating and Parylene under the same chamber conditions. This avoids the high time consumption and cost associated with changing chambers in traditional preparation processes. Furthermore, this invention enables the efficient preparation of multilayered films with different deposition temperatures under the same chamber conditions through the chamber's rapid cooling capability, allowing for better integration with production processes.

[0004] The technical solution adopted in this invention is:

[0005] A composite multilayer waterproof coating preparation device is disclosed, comprising a double-chamber structure, including an outer chamber and an inner chamber. The inner chamber is equipped with an ALD inlet pipe, a Parylene inlet pipe, an internal heating device, and an evacuation pipe, while the outer chamber is equipped with a low-temperature fluid delivery pipe. The sample is placed on a sample holder after the chamber top cover is opened. The chamber top cover is equipped with a sealing ring for sealing and protection. The preparation of composite multilayers with different deposition temperatures is achieved in the inner chamber.

[0006] Furthermore, the gas path structure of the chamber includes a chamber inlet pipe and an exhaust pipe on the double-layer coated chamber. The chamber inlet pipe is connected to the ALD inlet unit and the Parylene inlet unit, and the exhaust pipe is connected to the cold trap and the vacuum pump.

[0007] Furthermore, this invention employs a dual-chamber design with both ALD and Parylene air intakes. The addition of a low-temperature fluid (such as liquid nitrogen) between the two chambers enables rapid cooling, simplifying the Parylene deposition-heating-ALD deposition-cooling (which takes a considerable amount of time) process to Parylene deposition-heating-ALD deposition-Parylene deposition. This solves the common problem of easy heating but difficult cooling, significantly reducing cooling time and greatly improving the efficiency of repeated ALD coating and Parylene layering.

[0008] A method for preparing a composite multilayer waterproof coating is achieved using the aforementioned apparatus. The inner chamber is connected to both an ALD (Alternating Current) gas inlet unit and a Parylene gas inlet unit. After the sample is placed on a sample holder, the chamber is sealed, and the internal heating device is activated to raise the temperature to the metal oxide deposition temperature, for example, 80°C. The valve in the ALD gas inlet line is then opened to begin the deposition of the ALD metal oxide coating. Subsequently, a low-temperature fluid is used to rapidly cool the coating chamber to room temperature, depositing another thin film coating. This significantly improves the preparation efficiency of the composite multilayer waterproof coating consisting of an ALD coating and Parylene.

[0009] The intended technical effects of this invention are:

[0010] This patent discloses a vacuum vapor deposition (VPD) apparatus that utilizes ALD (Alternating Current Deposition) and VPD technologies to prepare repeatedly layered waterproof coatings on sample surfaces, such as Parylene and alumina layers. Traditional deposition processes require switching between Parylene VPD and ALD equipment to achieve film layering, and suffer from drawbacks such as slow cooling and long waiting times, which reduce deposition efficiency. Traditional processes are inefficient and significantly increase time and economic costs. Therefore, this patent employs a dual-chamber design with both ALD and Parylene inlets. By adding a low-temperature fluid (such as liquid nitrogen) between the two chambers, rapid cooling is achieved, avoiding the significant time spent waiting for cooling after ALD deposition. Thus, this patent enables the rapid preparation of composite layers of ALD coatings and Parylene, greatly reducing time and economic costs compared to traditional processes. Attached Figure Description

[0011] Figure 1 It is a dual-chamber composite stacked thin film deposition equipment.

[0012] In the diagram: 1. Cryogenic fluid storage unit; 2. Cryogenic fluid delivery pipeline; 3. ALD inlet unit; 4. ALD inlet pipeline; 5. Parylene inlet pipeline; 6. Parylene inlet unit; 7. Gas valve; 8. Chamber top cover; 9. Sealing ring; 10. Outer chamber; 11. Inner chamber; 12. Internal heating device; 13. Sample holder; 14. Evacuation pipeline; 15. Cold trap; 16. Vacuum pump. Detailed Implementation

[0013] The technical solution of the present invention will be further described below with reference to the accompanying drawings.

[0014] From the appendix Figure 1 As can be seen, the technical solution adopted in this invention is a double-chamber design, including an outer chamber 10 and an inner chamber 11. The inner chamber 11 is equipped with an ALD inlet pipe 4, a Parylene inlet pipe 5, an internal heating device 12, and an evacuation pipe 14. The outer chamber 10 is equipped with a low-temperature fluid delivery pipe 2. After the sample is placed on the sample holder 13 after opening the chamber top cover 8, the chamber top cover is equipped with a sealing ring 9 for sealing and protection. The preparation of composite layers of samples with different deposition temperatures is achieved in the inner chamber 11.

[0015] The gas path structure of the coating chamber includes an ALD inlet path 4, a Parylene inlet pipe 5 and an air extraction path 14 on the inner chamber 11. The ALD inlet path 4 is connected to the ALD inlet unit 3, the Parylene inlet pipe 5 is connected to the Parylene inlet unit 6, and the air extraction path is connected to the cold trap 15 and the vacuum pump 16.

[0016] Taking the deposition of a composite waterproof coating of Parylene and alumina as an example, the gas inlet of the coating chamber is connected to the Parylene gas inlet unit 6 and the alumina ALD gas inlet unit 3, respectively. The gas inlet is preheated. After the sample is placed on the sample holder 13, the vacuum pump 16 is turned on to evacuate the sealed chamber. The Parylene gas inlet valve 7 is opened, and the alumina ALD gas inlet valve 7 is closed. Parylene enters the chamber and deposits a Parylene polymer film coating on the sample at room temperature. Excess Parylene is condensed and captured by the cold trap 15 to prevent leakage. After Parylene deposition is complete, the Parylene gas inlet valve 7 is closed, and the internal heating device 12 is turned on to raise the temperature of the chamber to the alumina deposition temperature (e.g., 80℃). The alumina ALD gas inlet valve 7 is then opened, realizing the deposition of an alumina film on the sample surface via ALD. After the alumina deposition is completed, the alumina ALD inlet valve 7 is closed, and the cryogenic fluid inlet valve 7 is opened. By adding a cryogenic fluid (such as liquid nitrogen) between the two chambers, the chamber is rapidly cooled to room temperature to continue depositing the Parylene coating. By repeating the above steps, the cooling time can be greatly reduced by rapidly cooling the chamber under the same chamber conditions, thus improving the preparation efficiency of repeated ALD coating and Parylene layering.

[0017] It should be further explained that the above is the basic method of use of the present invention. In practical applications, it is mainly used to prepare composite layers with different deposition temperatures under the same cavity conditions by utilizing the rapid cooling capability of the cavity, which can better meet production applications. For example, the preparation of a Parylene and alumina composite waterproof coating. The above embodiments of the present invention are merely illustrative of the technical concept of the present invention and are used to understand the technical solution of the present invention. They are not intended to limit the scope of protection of the present invention. Any obvious modifications made to the embodiments of the present invention that fall within the technical concept of the present invention should be within the scope of protection of the present invention.

Claims

1. A method for preparing an ALD plus Parylene composite multilayer waterproof coating, characterized in that: The main body is a double-layered chamber, including an outer chamber (10) and an inner chamber (11). The inner chamber (11) is equipped with an ALD inlet pipe (4), a Parylene inlet pipe (5), an internal heating device (12), and an evacuation pipe (14). The outer chamber (10) is fitted outside the inner chamber (11). A low-temperature fluid delivery pipe (2) is provided in the middle of the double-layered chamber. The sample is placed on the sample holder (13) after the top cover (8) of the chamber is opened. The top cover of the chamber is equipped with a sealing ring (9) for sealing and protection. The preparation of composite layers of samples with different deposition temperatures is realized in the inner chamber (11). The gas path structure of the coating chamber includes an ALD inlet pipe (4), a Parylene inlet pipe (5) and an air extraction pipe (14) provided on the inner chamber (11). The ALD inlet pipe (4) is connected to the ALD inlet unit (3), the Parylene inlet pipe (5) is connected to the Parylene inlet unit (6), and the air extraction pipe (14) is connected to the cold trap (15) and the vacuum pump (16). Before deposition begins, the gas inlet of the coating chamber is connected to the Parylene gas inlet unit (6) and the ALD gas inlet unit (3) respectively. The gas inlet is preheated. After the sample is placed on the sample holder (13), the vacuum pump (16) is turned on to evacuate the sealed chamber. When depositing Parylene, the Parylene gas inlet valve is opened and the ALD gas inlet valve is closed. Parylene enters the chamber and deposits a Parylene coating on the sample at room temperature. Excess Parylene is condensed and captured by the cold trap (15) to prevent leakage. After Parylene deposition is completed, the Parylene gas inlet valve is closed and the internal heating device (12) is turned on to heat the chamber to the ALD deposition temperature. The ALD inlet valve is opened to deposit an oxide film on the sample surface via ALD. After ALD deposition is complete, the ALD inlet valve is closed, and the low-temperature fluid inlet valve is opened. By adding low-temperature fluid between the two chambers, the chamber is rapidly cooled to room temperature to continue depositing the Parylene coating. A two-chamber design with both ALD and Parylene inlets is adopted. The addition of low-temperature fluid between the two chambers enables the chamber to cool down rapidly, greatly reducing the cooling waiting time. The Parylene deposition-heating-ALD deposition-cooling waiting-Parylene deposition process is simplified to Parylene deposition-heating-ALD deposition-Parylene deposition.

2. The method for preparing an ALD plus Parylene composite multilayer waterproof coating according to claim 1, characterized in that, The ALD deposition temperature is 80°C.

3. The method for preparing an ALD plus Parylene composite multilayer waterproof coating according to claim 1, characterized in that, The cryogenic fluid is liquid nitrogen.

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