Sensor element and contact force sensor device

Abstract

The invention relates to a sensor element and a contact force sensor device comprising the same. The sensor element includes a plurality of mechanically coupled sensor units, each sensor unit having a sealed interior volume within an at least partially flexible unit housing. The flexible cell housing includes a flexible housing and a flexible cell boundary between adjacent sensor cells. Furthermore, the sensor element comprises at least one pressure sensor element. Each sealed interior volume is fluidly coupled to at least one of the at least one pressure sensor element.

Description

Technical Field

[0001] Embodiments relate to sensor elements and contact force sensor devices. Background Art

[0002] The robotics market is booming, benefiting from growing demand and more advanced technologies. With the rise of artificial intelligence (AI), robots are becoming increasingly intelligent and can perform complex interactions with humans and their environment. These interactions are achieved through increasingly sophisticated processing of stimuli from the robot's environment. These stimuli are sensed by sensors. However, if there is one sense that is not easily accessible to robots, it is touch. Successfully producing soft surfaces that can sense pressure and its direction, temperature, and even pain are challenges that robotic skin, or e-skin, attempts to address.

[0003] Tactile perception in robotic systems (especially robotic or prosthetic hands or fingers) is a very complex topic because it requires:

[0004] a) Huge dynamic range for force / pressure sensing to be able to handle appropriate sensing of: lowest tactile forces / pressures for subtle object interactions and situations (e.g., interaction with an egg or sensing airflow), to high forces / high applied external pressures (for lifting / carrying heavy objects with robotic arms / fingers);

[0005] b) high spatial sensing resolution to provide object and situation identification;

[0006] c) Soft, rubbery properties to provide adequate grip and simulate human skin feel.

[0007] Existing solutions are based on direct force sensors, deformation sensors or piezoelectric sensors, each of which has shortcomings with respect to the above three related requirements for tactile solutions for robotic skin / hand.

[0008] The sensor elements and contact force sensor devices described herein address all three requirements for tactile robotic sensing and can be extended, for example, by AI-based sensor fusion / local and / or centralized processing. Furthermore, the high dynamic range and low power consumption of the sensor elements and contact force sensor devices described herein fully meet the needs of the target applications.

[0009] As described above, it is desirable to provide a concept that provides a better compromise between increasing the dynamic range of force and / or pressure sensing, increasing the spatial resolution of force and / or pressure sensing, stimulating human skin perception as realistically as possible, and reducing power consumption. In addition to robotics use cases, other applications in consumer, industrial, and medical fields (such as pressure-sensitive mats, flooring, shoe inlets, etc.) also benefit from the proposed embodiments with soft and highly dynamic spatially resolved touch / pressure sensing.

[0010] This is achieved by the subject matter of the independent claims of the present application.

[0011] Further embodiments are defined by the subject matter of the dependent claims of the application. Summary of the invention

[0012] According to one aspect of the present disclosure, the inventors have realized that one problem encountered when attempting to detect force and / or pressure stems from the fact that most sensors are direct force sensors and are insensitive to shear forces. According to this aspect of the present disclosure, this difficulty is overcome by providing a sensor element having mechanically coupled sensor units. For example, the sensor element has an at least partially flexible housing that is divided into subunits by flexible walls. The flexible wall / boundary is shared between adjacent sensor units of the sensor element. Two adjacent sensor units can be mechanically coupled via the flexible wall that separates the two adjacent sensor units. This is based on the following discovery: the mechanical coupling of the sensor units will produce high-performance multi-directional sensing capabilities. At the same time, by evaluating the forces and / or pressures acting on each mechanically coupled sensor unit of the sensor element, a robust and accurate estimate of the magnitude and direction of the force acting on the sensor element can be achieved.

[0013] Therefore, according to one aspect of the present disclosure, the sensor element includes a plurality of (e.g., two or more) mechanically coupled sensor units (e.g., subunits), each sensor unit having a sealed internal volume (e.g., a cavity) within an at least partially flexible unit housing. The flexible unit housing includes a flexible outer cover and flexible unit boundaries (e.g., walls) between adjacent sensor units. In addition, the sensor element includes at least one pressure sensor element, such as one or more pressure sensor elements. Each sealed internal volume is fluidically coupled to at least one of the at least one pressure sensor element. For example, the sensor element includes a pressure sensor element, and each sealed internal volume is fluidically coupled to the pressure sensor element. According to an embodiment, the sensor element may include a plurality of pressure sensor elements, and each sealed internal volume is fluidically coupled to one of the plurality of pressure sensor elements.

[0014] Therefore, according to another aspect of the present disclosure, a contact force sensor device includes a sensor element described herein and a controller, wherein the controller is configured to read out instantaneous pressure information of one or more pressure sensor elements of the sensor element, and determine a direction and / or intensity (e.g., a vector) of a contact force applied to the sensor element based on the instantaneous pressure information. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] The drawings are not necessarily drawn to scale, emphasis instead generally being placed upon illustrating the principles of the embodiments. In the following description, various embodiments are described with reference to the following drawings, in which:

[0016] Figure 1 An embodiment of a dual-cell sensor element having two absolute pressure sensors is shown;

[0017] Figure 2 An embodiment of a dual-cell sensor element having a differential pressure sensor and an absolute pressure sensor is shown;

[0018] Figure 3 An embodiment of a contact force sensor device is shown;

[0019] Figure 4 An embodiment of a one-dimensional array of sensor elements is shown;

[0020] Figure 5 An embodiment of a two-dimensional array of sensor elements is shown;

[0021] Figure 6 An embodiment of a hemispherical sensor element is shown;

[0022] Figure 7a An embodiment of a hemispherical sensor element having an absolute pressure sensor is shown;

[0023] Figure 7b An embodiment of a hemispherical sensor element having an absolute pressure sensor and a differential pressure sensor is shown;

[0024] Figure 7c An embodiment of a hemispherical sensor element having redundant pressure sensors is shown;

[0025] Figure 8 An embodiment of a sensor element having stacked sensor cells is shown;

[0026] Fig. 9 An embodiment of a base sensor unit having a foldable structure is shown;

[0027] Fig.10 An embodiment of a hemispherical sensor element having a temperature sensor and / or an air pressure sensor is shown;

[0028] Fig.11 An embodiment of a contact force sensor device having a plurality of sensor elements is shown;

[0029] Fig.12a An embodiment of a sensor array configured for 3D force sensing is shown;

[0030] Figure 12b An embodiment of a sensor array configured for 3D force sensing with n×n force detection components is shown;

[0031] Fig.12c An embodiment of a sensor array configured for 3D force sensing with force detection components in the form of a triangle is shown;

[0032] Fig.13a An embodiment of a sensor array configured for 2D force sensing is shown; and

[0033] Fig.13b An embodiment of a dense sensor array configured for 2D force sensing is shown. DETAILED DESCRIPTION

[0034] The same or equivalent elements or elements having the same or equivalent functionality are denoted by the same or equivalent reference numerals in the following description, even if they appear in different drawings.

[0035] In the following description, a number of details are set forth to provide a more comprehensive explanation of the embodiments. However, it will be apparent to those skilled in the art that the embodiments may be implemented without these specific details. In other cases, well-known structures and devices are shown in block diagram form rather than in detail to avoid confusing the embodiments. In addition, unless otherwise explicitly stated, the features of the different embodiments described below may be combined with each other.

[0036] In the description of the embodiments, terms and text paragraphs placed in parentheses (next to the described elements or functions) should be understood as further explanation, exemplary configuration, exemplary addition and / or exemplary substitution of the elements or functions.

[0037] For the convenience of describing different embodiments, some figures include a Cartesian coordinate system x, y, z, wherein the xy plane corresponds to the first main surface area of ​​the substrate (=reference plane=xy plane), i.e. parallel to the first main surface area of ​​the substrate, wherein the direction vertically upward relative to the reference plane (xy plane) corresponds to the "+z" direction, and wherein the direction vertically downward relative to the reference plane (xy plane) corresponds to the "-z" direction. In the following description, the term "lateral" refers to a direction parallel to the x and / or y direction, i.e. parallel to or in the xy plane, wherein the term "vertical" refers to a direction parallel to the z direction.

[0038] The term "flexible" may be understood in the present disclosure as reversibly or elastically deformable. For example, a flexible (elastic) object (such as a wall, boundary, cover or cover) is deformable and returns to its original position / initial position (initial state) after deformation.

[0039] Figures 1 to 7c and Fig.10 The sensor element 100 having at least two mechanically coupled sensor units 110 and at least two pressure sensor elements 120 is described as an example. For each of the at least two mechanically coupled sensor units 110, the corresponding sealed internal volume 118 is fluidically coupled to at least one of the at least two pressure sensor elements 120. This embodiment is described to facilitate understanding of the basic concept. In addition, as will be described with respect to Figure 8 and Figure 12b to Figure 13b As described in more detail, the sensor element 100 may also include only one differential pressure sensor element as the pressure sensor element 120. For example, the sensor element 100 may include two mechanically coupled sensor units, each of which is fluidically coupled to the differential pressure sensor element.

[0040] Figure 1 and Figure 2 By way of example, a sensor element 100 , such as a unit, is shown having two sensor units 1101 and 1102 , such as subunits. A top view of the corresponding sensor element 100 is shown on the left, and a side view of the corresponding sensor element 100 is shown on the right.

[0041] The sensor element 100 may have an at least partially flexible housing including a flexible cover 114 (see flexible cell cover 1141 of the first sensor cell 1101 and flexible cell cover 1142 of the second sensor cell 1102) and a ground or base 116 (see cell boundaries 1161 and 1162 at the bottom). The base 116 of the at least partially flexible housing may be flexible or rigid. The flexible cover 114 may also be understood as a flexible outer cover.

[0042] The inner volume of at least part of the flexible housing is divided into two sealed inner volumes by a flexible cell boundary 112. In other words, the flexible cell boundary 112 divides the sensor element 100 into two sensor cells 1101 and 1102. The flexible cell boundary 112 is arranged between two adjacent sensor cells 1101 and 1102, i.e., separates them. The flexible cell boundary 112 is shared by the two sensor cells 1101 and 1102. The two sensor cells 1101 and 1102 are arranged adjacent to each other and separated by the common flexible cell boundary 112. The first sensor cell 1101 has a cell housing, which includes a flexible outer cover (see flexible cell cover 1141) and a flexible cell boundary 112. The second sensor cell 1102 has a cell housing, which includes a flexible outer cover (see flexible cell cover 1142) and a flexible cell boundary 112.

[0043] For example, the sensor element 100 has the shape of a spherical segment or a hemisphere, such as a hemisphere or half a sphere or a spherical dome, and the sensor cells 110 represent a subdivision of the spherical segment (hemisphere), such as a spherical segment (hemisphere) can be subdivided into equally sized compartments representing the sensor cells 110. The sensor cells 110 can be formed as symmetrical and / or equally sized segments (sectors or parts), such as a spherical dome. For example, the spherical dome comprises a spherical cover, i.e. a flexible cover 114, located in the circular base area (see base 116), or on the circular footprint of the sensor element 100. It is worth mentioning that in the case of a spherical or rotationally symmetrical sensor unit arrangement, the estimation of the force direction (e.g. by Figure 3 The controller 210 of the contact force sensor device 200 shown in FIG. 1 is easier to perform) and has unidirectional sensitivity to each force component.

[0044] For example, the sensor unit 110 of the sensor element 100 described herein has an exemplary spherical segment shape or a hemispherical segment shape, but other shapes are also possible, such as a cubic shape, a rectangular parallelepiped shape, a ring (ring), a cylindrical shape or a conical shape. The description is also applicable to the sensor element 100 having a cubic, rectangular parallelepiped, ring, cylindrical or conical shape.

[0045] Sensor elements 100 having a spherical segment shape or a cone have the following advantages: they provide a smaller contact area compared to planar sensor elements, such as sensor elements 100 in the shape of a cube, a cuboid, a ring (annular) or a cylinder. The contact area, such as the top area, such as the area opposite the base 116, distributes the contact force to the unit below. The dome shape of the sensor element 100 distributes the force vector on the contacted top area into a shape change, thereby generating different pressure values ​​in each subunit (i.e., sensor unit). It has been found that it is advantageous when the top contact area of ​​the sensor element 100 is smaller than the bottom area of ​​the sensor element 100. The smaller contact area improves the accuracy of determining the direction of the contact force because the dependence between the deformation of the flexible cover 114 and the shape of the object applying the contact force to the sensor element 100 is significantly reduced. For example, in the case of a planar sensor element 100, when an inclined surface is pressed against a planar cover of the sensor element, the direction reading (i.e. the determined contact force direction) may be erroneous, since this may also result in different pressure values ​​in the sensor cells of the sensor element 100, even if the force is only applied vertically from above and there is no force component parallel to the bottom area (see 116).

[0046] In contrast, planar sensor elements 100 (e.g., 1D or 2D arrays with identical single cubic cells) or cylindrical sensor elements 100 have disadvantages in shear force measurements (e.g., in addition to contact force measurements). Such sensor elements 100 only measure the contact force per cell, which may be sufficient for simpler applications. For such sensor elements 100, one either chooses only absolute pressure sensors or a mix of absolute pressure sensors and differential pressure sensors in such a way that the pressure per cell can be sensed with sufficient accuracy.

[0047] If combined Figure 3 Described in more detail, the sensor units 1101 and 1102 of the sensor element 100 are mechanically coupled. For example, mechanical coupling means that a deformation of one of the two mechanically coupled sensor units (e.g., 1101 or 1102) may have an effect on the other sensor unit, just like a deformation of the other sensor unit. For example, an external force applied to one of the two adjacent sensor units may deform the flexible covers 1141 and 1142 of the two sensor units 1101 and 1102 and / or the flexible unit boundary 112 between the two sensor units 1101 and 1102.

[0048] The unit housing may be impermeable to fluids. For example, the sensor units 1101 and 1102 may be filled with fluids, such as gases, liquids, or gels. Each sensor unit may have a sealed internal volume, see 1181 and 1182, similar to a cavity, located within an at least partially flexible unit housing. The fluid may be sealed within each sensor unit 1101 and 1102, for example, within a corresponding sealed internal volume, see 1181 and 1182. No fluid passes through the flexible unit boundary 112 between adjacent sensor units 1101 and 1102, i.e., no fluid is exchanged between adjacent sensor units 1101 and 1102.

[0049] Furthermore, the sensor element 100 includes a plurality of pressure sensor elements 120, for example, a pressure sensor component, namely two pressure sensor elements 1201 and 1202. The pressure sensor elements 1201 and 1202 (see Figure 1 and Figure 2 The right side) can be arranged at the bottom 116 (see 1161 and 1162) of the housing of the corresponding sensor element 100. Figure 1 In FIG. 1 , the sensor element 100 includes two absolute pressure sensor elements 1201 and 1202, and in Figure 2 In the embodiment, the sensor element 100 includes an absolute pressure sensor element 1201 and a differential pressure sensor element 1202 .

[0050] Figure 1 and Figure 2 The sensor element 100 shown in is configured for unidirectional shear force sensing. Due to the two sensor units, the sensor element 100 is capable of sensing shear forces along one axis 130 (e.g., only in one direction). The axis 130 can be perpendicular to the cell boundary 112 between two adjacent sensor units 1101 and 1102, i.e., perpendicular to the surface of the cell boundary 1124 in the undeformed state. Figure 1 and Figure 2 The sensor element 100 shown in can be configured to sense lateral forces, such as shear forces at the sensor interface, i.e., shear forces at the top of the flexible cover 114. In addition, the sensor element 100 is sensitive to vertical forces, i.e., forces perpendicular to the cover 114. For example, the sensor element 100 can be fixed to a mechanical gripping element to efficiently and accurately detect whether an object is properly gripped or whether the object is slipping, i.e., as a stick-slip sensor on the mechanical gripping element. The dual-unit sensor element 100 may have advantages in situations where only unidirectional shear forces are involved (i.e., gripping and lifting objects), because the shear forces will only appear in the lateral direction. Then a dual-unit sensor is sufficient, which is simpler and cheaper to manufacture, implement and operate than a sensor element with three or more sensor units, such as Figures 4 to 10 shown.

[0051] Figure 1 An embodiment is shown in which the plurality of pressure sensor elements 120 represent absolute pressure sensors. For example, the sensor element 100 includes only absolute pressure sensors, and each sensor unit 110 includes one of the absolute pressure sensors, i.e., each sealed internal volume 118 is fluidically coupled to one of the plurality of pressure sensor elements. Figure 1 As shown, the first sealed interior volume 1181 of the first sensor unit 1101 is fluidly coupled to the first absolute pressure sensor element 1201 , while the second sealed interior volume 1182 of the second sensor unit 1102 is fluidly coupled to the second absolute pressure sensor element 1202 .

[0052] In general, the plurality of pressure sensor elements 120 may include a plurality of absolute pressure sensor elements, and each sensor cell 110 of the sensor element 100 may include one of the absolute pressure sensor elements 120 fluidly coupled to the sealed interior volume 118 of the respective sensor cell 110 .

[0053] The sensor element 100 can be configured to detect an external force applied to the sensor element 100, for example, a force applied to the flexible cover 114, i.e., a force applied to the flexible cell cover 1141 of the first sensor cell 1101 and / or a force applied to the flexible cell cover 1142 of the second sensor cell 1102, by detecting the absolute pressure in the fluid in the sealed internal volume 1181 / 1182 of the corresponding sensor cell 1101 / 1102 for each sensor cell 1101 and 1102 by the corresponding pressure sensor element 1201 / 1202. In other words, in two adjacent sensor cells 1101 and 1102, the corresponding absolute pressure sensor element 1201 / 1202 can be coupled to the corresponding sealed internal volume 1181 / 1182 so as to evaluate the pressure of the two cells separately. The sensor element 100 is configured to obtain instantaneous pressure information, which includes a first absolute pressure value obtained from the first absolute pressure sensor element 1201 and a second absolute pressure value obtained from the second absolute pressure sensor element 1202. The pressure difference between two adjacent sensor units (see first sensor unit 1101 and second sensor unit 1102) can be determined, for example, by Figure 3 The controller 210 in the sensor element 100 determines based on the absolute pressure values ​​obtained from the absolute pressure sensors of the two adjacent sensor units. The absolute pressure value and the pressure difference may be an indication of the magnitude and direction of the external force applied to the sensor element 100.

[0054] According to an embodiment, the sensor element 100 may include a combination of at least one absolute pressure sensor and at least one differential pressure sensor. For example, the plurality of pressure sensor elements 120 may include one or more absolute pressure sensors and one or more differential pressure sensors. Figure 2 An embodiment is shown having one absolute pressure sensor element 1201 and one differential pressure sensor element 1202. The first sealed internal volume 1181 of the first sensor unit 1101 is fluidically coupled to the absolute pressure sensor element 1201 and the differential pressure sensor element 1202, while the second sealed internal volume 1182 of the second sensor unit 1102 is fluidically coupled to the differential pressure sensor 1202. The differential pressure sensor element 1202 is fluidically coupled to the sealed internal volume 1181 of the first sensor unit 1101 and the sealed internal volume 1182 of the second sensor unit 1102. For example, each sealed internal volume (see 1181 and 1182) is fluidically coupled to the differential pressure sensor element 1202.

[0055] In general, a differential pressure sensor element 1202 can be fluidically coupled to sealed internal volumes 1181 and 1182 of two adjacent sensor cells 110 of the sensor element 100 for evaluating a pressure difference. The differential pressure sensor element 1202 passes through a flexible cell boundary 112 between adjacent sensor cells 1101 and 1102. Adjacent sensor cells 1101 and 1102 are sensor cells that share a cell boundary 112 or are separated by a cell boundary 112. The differential pressure sensor element 1202 can be fluidically coupled to two sealed internal volumes 1181 and 1182 separated by a cell boundary 112.

[0056] Generally speaking, the sensor element 100 described herein may include two adjacent sensor units, e.g. Figure 2 , Figure 7b or Figure 7c 1101 and 1102 in, wherein at least one of the two adjacent sensor units 1101 and 1102 includes an absolute pressure sensor in at least one absolute pressure sensor (see Figure 2 1201 and Figure 7b and Figure 7c 1202 in ). For example, refer to Figure 2, the sealed internal volume (see 1181) of the first sensor unit (see 1101) of the two adjacent sensor units is fluidically coupled to the absolute pressure sensor. In addition, the sealed internal volumes (see 1181 and 1182) of the two adjacent sensor units 1101 and 1102 are fluidically coupled to the same differential pressure sensor 1202 in at least one differential pressure sensor, that is, fluidically coupled to a common differential pressure sensor. The differential pressure sensor is fluidically coupled to the sealed internal volume 1181 of the first sensor unit 110 of the two adjacent sensor units 110 and the sealed internal volume 1182 of the second sensor unit 110 of the two adjacent sensor units 110. The number of sensor units 110 can be two, for example, the sensor element 100 includes two adjacent sensor units 1101 and 1102, as Figure 2 Alternatively, in addition to the two adjacent sensor units 1101 and 1102, the sensor element 100 may also include other mechanically coupled sensor units 100, which are fluidically coupled to at least one of the plurality of pressure sensor elements 120, such as Figure 7b and Figure 7c shown.

[0057] Figure 2 The sensor element 100 shown can be configured to detect an external force applied to the sensor element 100, such as a force applied to the flexible cover 114 (i.e., a force applied to the flexible cover 1141 of the first sensor unit 1101 and / or the flexible cover 1142 of the second sensor unit 1102), by detecting an absolute pressure in a fluid sealed in a first sensor unit using an absolute pressure sensor element 1201, and detecting a pressure difference between fluids sealed in two adjacent sensor units (i.e., between the first sensor unit 1101 and the second sensor unit 1102) using a differential pressure sensor element 1202. The absolute pressure in the second sensor unit 1102 can be determined, for example, by Figure 3 The controller 210 in FIG. 12 determines based on the absolute pressure value obtained from the absolute pressure sensor 1201 and based on the pressure difference obtained from the differential pressure sensor 1202. The combination of the absolute pressure value and the pressure difference may be an indication of the magnitude and / or direction of the external force applied to the sensor element 100.

[0058] Optionally, the second sensor unit 1102 may also include an absolute pressure sensor. This results in redundancy, ie the sensor element 100 includes redundant pressure sensor elements. Such an embodiment may be particularly advantageous in sensitive environments, since a high accuracy and / or a high robustness is achieved.

[0059] Figure 1 and Figure 2The embodiment of the sensor element 100 shown in FIG. 1 has the advantage that it is possible to determine the direction and magnitude of a force applied to the respective sensor element 100 . Figure 1 and Figure 2 The sensor element 100 shown in FIG. 1 can detect vertical forces and horizontal forces.

[0060] Contact force sensor device 200 (e.g., Figure 3 or Fig.11 The contact force sensor device 200 may include one or more sensor elements 100 as described herein to determine or evaluate the contact force 202 applied to the one or more sensor elements 100, i.e., to measure the vertical force and / or shear force at the contact point. The readout of at least two pressure sensor elements 120 of the sensor element 100 or the readout of the pressure sensor elements 120 of two or more sensor elements 100 and the determination of the contact force 202, such as the direction and strength of the contraction force 202 (such as a vector), may be performed by a controller 210 included in the contact force sensor device 200.

[0061] Figure 3 The contact force sensor device 200 is schematically shown, which exemplarily includes Figure 1 However, the contact force sensor device 200 may alternatively include any other sensor element 100 or combination of sensor elements 100 described herein.

[0062] The controller 210 is configured to read out the plurality of pressure sensor elements (i.e., the first pressure sensor element 1201 and the second pressure sensor element 1202) of the sensor element 100 to obtain instantaneous pressure information 204. The instantaneous pressure information 204 includes one or more pressure values ​​read from the plurality of pressure sensor elements 120. Figure 3 In the case of the illustrated embodiment, for example, the controller 210 is configured to obtain a first pressure value 1221 associated with the first sensor unit 1101 (e.g., by reading the first pressure sensor element 1201) and / or a second pressure value 1222 associated with the second sensor unit 1102 (e.g., by reading the second pressure sensor element 1202).

[0063] The sensor element 100 is Figure 2 In the case of the illustrated sensor element, the instantaneous pressure information 204 includes (eg, represents) two pressure values, namely, the absolute pressure read from the absolute pressure sensor 1201 and the pressure difference read from the differential pressure sensor 1202 .

[0064] In general, for each of the at least two pressure sensor elements 120 of the sensor element 100 described herein, the instantaneous pressure information 204 may include a pressure value. The instantaneous pressure information 204 may include a vector of two or more pressure values, each pressure value being associated with one of the two or more pressure sensor elements 120. If a pressure sensor element 120 of the plurality (e.g., two or more) of the pressure sensor elements 120 does not detect pressure (e.g., does not detect absolute pressure or pressure difference), the corresponding read pressure value 122 may be zero. The instantaneous pressure information 204 may also include only a pressure value that is not equal to zero and an indication of the pressure sensor element 120, from which the corresponding pressure value is read.

[0065] The sensor element 100 may include electronic circuitry and / or an interface in its base wall 116 (e.g., a wall opposite to the cover 114 of the sensor element 100) for providing one or more pressure values ​​detected by at least one pressure sensor element 120. The at least one pressure sensor element 120 is arranged on (e.g., fixed to) an inner surface of the base wall 116, i.e., a surface facing the sealed inner volume (see 1181 and 1182). Optionally, the controller 210 is embedded or integrated in the base wall 116 and is connected to each pressure sensor element 120 of the sensor element 100 via an electronic circuit.

[0066] According to an embodiment, the sensor element 100 comprises a mounting base. For example, the sensor unit 110 is arranged (eg fixed) in or on the mounting base 140, see for example Figure 6 , Figure 8 , Fig. 9 and Fig.11 For example, the mounting base 140 includes electronic circuitry and / or an interface. Optionally, the controller 210 is embedded or integrated within the mounting base 140 and is connected to each pressure sensor element 120 of the sensor element 100, for example, via electronic circuitry.

[0067] In the case where the base wall or mounting base 140 includes an interface (e.g., a communication link), the interface can be configured to transmit the instantaneous pressure information 204 to the controller 210 over a transmission medium (such as a wireless transmission medium or a wired transmission medium). For example, the transmission medium is a wired or wireless connection based on, for example, I2C, SPI, Bluetooth, BLE, etc.

[0068] According to an embodiment, the controller 210 may be located locally to one or more sensor elements 100, for example, near one or more sensor elements 100. In addition, or alternatively, it is possible that the controller 210 includes: for example, for each sensor element 100 or for a group of locally grouped / clustered sensor elements 100 (for example, in the fingertip area), two or more distributed hierarchical processing units (for example, a combination of one or more local processing units); and an upper processing unit configured to obtain signals from one or more local processing units. The controller 210 may include: two or more upper processing units, each upper processing unit configured to obtain signals from a different group of one or more local processing units; and an overall processing unit configured to obtain signals from two or more upper processing units. The upper processing unit may be configured to obtain one or more signals from the associated local processing units to combine / process the one or more signals and / or distribute the one or more signals to the overall processing unit.

[0069] The controller 210 is configured to determine information 212 about the direction and / or strength (eg, vector) of the contact force 202 applied to the sensor element 100 based on the instantaneous pressure information 204. For example, the vertical component 202 of the contact force 202 z The horizontal component 202 of the contact force 202 may be determined based on the sum of the absolute pressure value (see 1221) read from the absolute pressure sensor element included in the first sensor unit 1101 (see 1201) and the absolute pressure value (see 1222) read from the absolute pressure sensor element included in the second sensor unit 1102 (see 1202). x The information 212 may be determined based on the difference between the absolute pressure value (see 1221) read from the absolute pressure sensor element included in the first sensor unit 1101 (see 1201) and the absolute pressure value (see 1222) read from the absolute pressure sensor element included in the second sensor unit 1102 (see 1202). The determined information 212 may include the vertical component 202 z and horizontal component 202 x , for example as a vector.

[0070] The sensor element 100 is Figure 2 In the case of the sensor element shown in FIG. 1 , the controller 210 may be configured to read the pressure difference p based on the pressure difference p read from the differential pressure sensor (see 1202 ). diff To determine the horizontal component 202 of the contact force 220 x . Vertical component F z 202 z The absolute pressure value p can be read from the absolute pressure sensor (see 1201). absand the pressure difference p read from the differential pressure sensor (see 1202) diff To determine, for example, F z ~(2·p abs +p diff ). Thus, the determined information 212 may include the vertical component 202 z and horizontal component 202 x , for example as a vector.

[0071] In general, the controller 210 can be configured to combine the pressure values ​​included in the instantaneous pressure information 204 to determine the vertical component 202 of the contact force 202. z and / or horizontal component 202 x , that is, combining the instantaneous pressure values ​​read from two or more pressure sensor elements 120 to determine the direction and / or strength of contact force 202.

[0072] like Figure 3 As shown, the outer cover 1141 of the first sensor unit 1101 and the outer cover 1142 of the second sensor unit 1102 of the sensor element 100 are flexible, i.e., they can be deformed by an external force (e.g., the contraction force 202). The deformation of the sensor unit 110 (see 1101 and 1102) may cause a change in the pressure within the corresponding sensor unit 110, for example, compared to a reference pressure associated with the undeformed sensor unit 110 (i.e., the pressure within the sealed internal volume 118 (see 1181 and 1182) of the corresponding sensor unit 110 when undeformed). Since the sensor units 110 of the sensor element 100 are mechanically coupled, the deformation of the sensor unit (see 1102) to which the contact force 202 is applied may also cause the deformation of the sensor unit (see 1101) adjacent to the sensor unit 1102 to which the contact force 202 is applied. In other words, the sensor unit 1102 to which the contact force 202 is applied and the adjacent mechanically coupled sensor unit (see 1101) are deformed by the contact force 202. The mechanical coupling of the sensor units 110 allows a two-dimensional evaluation of the contact force 202 (e.g. comparison) by means of the sensor element 100 whose sensor units 110 are arranged one-dimensionally. Figure 1 and Figure 2 ) and the sensor element 100 with its two-dimensional arrangement of sensor units 110 performs a three-dimensional evaluation of the contact force 202 (e.g., comparison Figures 4 to 10 ).

[0073] Figures 1 to 3 The sensor element 100 is shown by way of example as having two sensor units 1101 and 1102. Alternatively, the sensor element may also be implemented with three or more sensor units, for example Figures 4 to 10The sensor element 100 may include n sensor units 110 , where n is an integer equal to or greater than 2, 3, 5 or 10.

[0074] Figure 3 The contact force sensor device 200 is exemplarily shown to have one sensor element 100. Alternatively, the contact force sensor device 200 may include two or more sensor elements 100, which are arranged in a one-dimensional array (see FIG. Figure 4 ) or arranged in a two-dimensional array (see Figure 5 ).

[0075] Figure 4 An embodiment of a one-dimensional array of sensor elements (see 1001 to 1004 ) is shown, ie, the sensor elements 100 are arranged in the form of a one-dimensional array. Figure 4 A one-dimensional array of different sensor elements 100 is shown as an example. Alternatively, it may also be a one-dimensional array of the same sensor elements (ie sensor elements of the same type) 100. Figure 4 As shown, the sensor elements 100 of the one-dimensional array may differ from one another in terms of the number of sensor cells included in each sensor element and / or the number and / or arrangement of the pressure sensor elements 120 per sensor element 100 .

[0076] Figure 5 An embodiment of a two-dimensional array of sensor elements (see 1001 to 1004 ) is shown, ie the sensor elements 100 are arranged in the form of a two-dimensional array. Figure 5 A two-dimensional array of identical sensor elements 100 (i.e. sensor elements 100 of the same type) is shown exemplarily. Alternatively, the two-dimensional array may include sensor elements that differ from each other, for example, in the number of sensor units and / or the number and / or arrangement of pressure sensor elements 120. Exemplarily, the sensor element 100 includes four sensor units 110, alternatively, it is possible that the sensor element 100 may include another number of sensor units 110. The two-dimensional arrangement may include n×n sensor elements 100 or n×m sensor elements 100, wherein n is an integer equal to or greater than 2, 3, 5 or 10, and wherein m is an integer equal to or greater than 2, 3, 5 or 10. In the case of n×m sensor elements 100, the integer n is not equal to the integer m.

[0077] If the one-dimensional array of sensor elements 100 (see Figure 4 ) or a two-dimensional array of sensor elements 100 (see Figure 5) may be advantageous if the sensor element 100 comprises two or more sensor elements 100 of a first sensor element type and two or more sensor elements of a second sensor element type. The sensor elements 100 of the first type may differ from the sensor elements 100 of the second type in terms of the number of sensor cells and / or the number and / or arrangement of the pressure sensor elements 120. The type of the sensor element 100 may define the number of sensor cells 110 of the sensor element 100 and / or the number and / or arrangement of the pressure sensor elements 120 of the sensor element 100.

[0078] Figure 4 Sensor elements 100 with different numbers and arrangements of pressure sensor elements are shown by way of example. Figure 5 Sensor elements 100 with the same number and arrangement of pressure sensor elements 120 are shown by way of example. For each sensor element 100 of a one-dimensional or two-dimensional arrangement of sensor elements, different configurations are possible, such as only absolute pressure sensors or a combination of absolute pressure sensors and differential pressure sensors.

[0079] For example, Figure 4 and 5 As shown, multiple sensor elements 100 arranged in a one-dimensional or two-dimensional arrangement can achieve monitoring of a larger area. Through this arrangement, the contact force sensor device 200 discussed herein can be used to detect and evaluate multiple forces applied to the array of sensor elements 100. Figure 5 The two-dimensional arrangement of may be designed / formed as a mat of multiple sensor elements 100 . Figure 3 The controller 210 may be configured to determine a two-dimensional force field, such as a vector field, based on the pressure values ​​received from the plurality of pressure sensor elements 120 of the mat of the plurality of sensor elements 100, the two-dimensional force field showing at least one force applied to the mat, i.e., the force applied to the sensor elements 100 arranged on the mat. The two-dimensional force field may indicate the position and magnitude and / or direction of at least one force within a two-dimensional region (i.e., the two-dimensional region spanned by the sensor elements 100).

[0080] The one-dimensional or two-dimensional arrangement of sensor elements 100 may be configured to detect and evaluate a plurality of forces applied to one or more of the one-dimensional or two-dimensionally arranged sensor elements 100. If the one-dimensional arrangement of sensor elements 100 comprises at least 5, 10, 20 or 30 sensor elements 110 arranged in a row (e.g. Figure 4 ), or if the two-dimensional arrangement of the sensor elements 100 includes n×n or n×m sensor elements 100 (as shown in Figure 5), where n is an integer greater than or equal to 5, 10, 20 or 30, and m is an integer greater than or equal to 5, 10, 20 or 30, then this may be advantageous. In this case, for example, Figure 3 The controller 210 may consider pressure values ​​associated with different parts of the arrangement to determine the magnitude and / or direction of the force applied to the different parts. For example, the controller 210 may be configured to identify the sensor element 110 that provides the highest pressure value (e.g., the highest absolute pressure or the highest pressure difference) within a region of the one-dimensional or two-dimensional arrangement of the sensor elements 100, and determine the magnitude and / or direction of the force based on the pressure values ​​associated with the sensor elements 100 surrounding the identified sensor element 100, i.e., the sensor element 100 associated with the highest pressure value may be considered, such as the pressure values ​​associated with the next and next next sensor elements relative to the identified sensor element. The pressure values ​​associated with the sensor elements 100 located in another region of the one-dimensional or two-dimensional arrangement of the sensor elements 100 may be similarly considered to determine another force applied in the other region.

[0081] Figure 3 The controller 210 of the contact force sensor device 200 shown in FIG. 1 can evaluate the pressure value of each sensor element 100 individually (e.g., Figure 3 or by combining the pressure values ​​of two or more sensor elements 100 to analyze the pressure applied to Figure 4 or Figure 5 The contact force 202 of one or more sensor elements 100 is shown in FIG.

[0082] The plurality of sensor elements 100 may be configured to cover a pad or area of ​​a device (such as a finger area of ​​a robot) in a one-dimensional or two-dimensional arrangement. For example, the plurality of sensor elements 100 may be arranged on (e.g., fixed to) a common mounting base. The controller 210 may be configured to read out a pressure value of each of the plurality of sensor elements 100, for example, each sensor element 100 may be configured to provide instantaneous pressure information, the instantaneous pressure information comprising one or more pressure values ​​associated with one or more pressure sensor elements 120 of the corresponding sensor element 100. In addition, the controller 210 may be configured to determine, based on the instantaneous pressure information, the direction and / or strength and / or force contact point position of one or more contact forces applied to the plurality of sensor elements 100 on the one-dimensional or two-dimensional arrangement of the sensor elements.

[0083] Optionally, the contact force sensor device 200 includes a flexible cover layer arranged on the plurality of sensor elements 100 (e.g., arranged on top of the array, i.e., arranged on a one-dimensional arrangement or a two-dimensional arrangement of the sensor elements 100), the flexible cover layer, for example, covering the plurality of sensor elements 100. The flexible cover layer can be configured to mechanically couple the plurality of sensor elements 100. The force applied to the flexible cover layer can be distributed over several sensor elements 100 of the plurality of sensor elements 100. This increases the resolution of the position, but reduces the measurement of the contact area (locality) on the array. This may be useful for specific use cases, such as touch panels. Similarly, the flexible cell cover 114 of the sensor cell 110 of the sensor element 100 can be configured to distribute the applied force over several sensor cells 110 of the corresponding sensor element 100. This improves the accuracy and / or robustness when force determination is performed using the corresponding sensor element 100.

[0084] Figures 1 to 5 It has been shown that the sensor element 100 described herein can be implemented with a different number of sensor cells 110 and a different arrangement of two or more pressure sensors 120. Figures 6 to 7c , implementation options regarding the number of sensor units 110 and possible different arrangements of two or more pressure sensors 120 will be described in more detail. Figures 1 to 5 The features and / or functionalities described in the sensor element 100 also apply to Figures 6 to 7c This applies in particular to the at least two pressure sensor elements 120 within the sensor element 100, the base 116 (i.e. the bottom sensor wall), the mounting base 140 and the Figure 3 The implementation of a corresponding sensor element 100 in a contact force sensor device 200 is suitable for reading out pressure values ​​and determining a contact force 202 .

[0085] Figure 6 A sensor element 100 in the form of a sphere segment or hemisphere is shown by way of example, once on the left as a side view and once on the right as a top view. The sensor element 100 comprises by way of example four mechanically coupled sensor units 110 1-4 , for example, like Figure 5 The sensor element 100 shown in Figure 4 The sensor elements 1003 and 1004 in FIG. 1 are identical. Alternatively, another number of sensor units 110 can be implemented. For example, a spherical segment (hemisphere) can be subdivided into two halves, i.e. a sensor element 100 having two sensor units 110, such as Figure 1 and Figure 3 The sensor element 100 is shown. Figures 7a to 7c as well as Figure 4An embodiment of a sensor element 100 in the form of a spherical segment or hemisphere with three sensor units can be seen in FIG. Figure 4 1002 in FIG. 1002). In general, the sensor element 100 in the form of a spherical segment or a hemisphere may include n sensor units 110, where n is an integer equal to or greater than 2. The upper limit of the number of sensor units 110 may depend on the area of ​​the circle spanned by the spherical segment or the hemisphere, that is, on the size of the base area 116 of the sensor element 100. The upper limit of the sensor units 110 may be 3, 4, or 6.

[0086] Each sensor unit 110 (see 110 1-4 ) has a sealed interior volume 118 (see 118) within an at least partially flexible unit housing. 1-4 ). For example, the sensor unit 110 is filled with gas or liquid, which can be easily accomplished in a manner that shows the same initial pressure under no-load conditions. The flexible unit housing, i.e., the sensor unit housing, includes a flexible outer cover 114 (see 114 1-4 ) and flexible cell boundaries 112 between adjacent sensor cells 110. For example, a sensor cell 110 within a spherical segment or hemisphere has one flexible housing 114 and two flexible cell boundaries 112 between the respective sensor cell 110 and two adjacent sensor cells 110. This is the case, for example, for a sensor element 100 having three or more sensor cells 110. The flexible cell boundaries 112 subdivide the spherical segment (hemisphere) into sensor cells 110. The flexible housings 114 of all sensor cell housings 1-4 Together they form an integral housing in the form of a spherical segment or hemisphere of the sensor element 100. In other words, the sensor unit, i.e. the sensor element 100, is divided into a group of subunits, i.e. the sensor units 110, each of which is encapsulated by a flexible unit housing (i.e. the flexible unit wall), and all the subunits are mechanically coupled into a single sensor structure. Figure 6 Such a multi-unit sensor component, namely a sensor element 100 , is shown. Figure 6 A typical cross section is shown on the left, exemplarily illustrating a four-unit structure, for example, mounted on a given mounting surface (ie, mounting base 140).

[0087] The sensor element 100 may include a mounting base 140 on which the sensor unit 110 is arranged (e.g., mounted or fixed). As described above, the mounting base 140 may include electronic circuits and / or interfaces connected to the plurality of pressure sensor elements 120. The mounting base 140 is, for example, a flexible mounting base (e.g., including a flexible PCB material, a silicon material, or a rubber material) or a rigid mounting base (e.g., including a rigid PCB material).

[0088] like Figure 6As shown, the sensor element 100 includes a plurality of pressure sensor elements 120, which are exemplarily absolute pressure sensors, for example, as described with reference to FIG. Figure 1 , Figure 3 and Figure 5 The sensor element 100 is described in detail in the accompanying drawings. Each sensor unit 110 includes one of the absolute pressure sensors, i.e. each sensor unit is fluidically coupled to one of the absolute pressure sensors. In addition, the plurality of pressure sensor elements 120 may include one or more differential pressure sensors. This results in redundant pressure sensor elements that improve the accuracy and robustness of the sensor element 100. The differential pressure sensor may be coupled between two adjacent sensor units, for example across the unit boundary 112 and fluidically coupled to the inner volume 118 of the respective two adjacent sensor units 110, i.e. coupled to the inner volume 118 of the first sensor unit 110 of the respective two adjacent sensor units 110 and coupled to the inner volume 118 of the second sensor unit 110 of the respective two adjacent sensor units 110. Alternatively, it is also possible that the plurality of pressure sensor elements 120 include at least one absolute pressure sensor and at least one differential pressure sensor, for example see Figure 2 , Figure 4 , Figure 7b and Figure 7c For example, one absolute pressure sensor and three differential pressure sensors (see Figure 4 1003) may be sufficient for a four-cell sensor element 100. For example, one of the sensor cells 110 may include an absolute pressure sensor, and three of the four cell boundaries 112 may be crossed by corresponding differential pressure sensors. For example, each sensor cell 110 may be equipped with a pressure sensor, such as an absolute pressure sensor and / or a differential pressure sensor between two mechanically coupled sensor cells 110.

[0089] The absolute pressure sensors are not shared between the sensor units 110, i.e. only one sensor unit 110 is fluidically coupled to one absolute pressure sensor. The number of absolute pressure sensors 120 may correspond to the number of sensor units 110 of the sensor element 100, such as Figure 1 , Figure 5 and Figure 6As shown. The controller 210 of one of the contact force sensor devices 200 described herein can analyze the contact force 202 applied to such a sensor element 100 by calculating the sum of all obtained pressure values ​​to determine the magnitude of the contact force, and by calculating the pressure difference of the pressure values ​​obtained from adjacent sensor units 110 to determine the direction of the contact force. In other words, the controller 210 can be configured to combine two or more absolute pressure values ​​obtained from multiple differential pressure sensors 120 to determine the direction and / or magnitude of the contact force. For example, the vertical component of the force applied to the sensor element 100 can be determined based on the sum of the absolute pressure values, and / or the direction of the force applied to the sensor element 100 can be determined based on the difference between the absolute pressure values ​​of adjacent sensor units 110. Figure 2 The two-unit arrangement in FIG. 1 only allows the determination of a unidirectional force. In contrast, a sensor element 100 having three or more sensor units 110 allows the determination of a three-dimensional force direction.

[0090] Figure 6 1 shows the vertical tactile force F acting on the upper part of the flexible sensor structure (ie, the upper part of the sensor housing of the sensor element 100). z 202 z The cell boundary 112 and the cover 114 may be made of a flexible material. Thus, the pressure within the sensor cell 110 will increase and may be Figure 3 The controller 210 shown in FIG. 2 calculates / derives the vertical force 202 z ,in

[0091] F z =f z (p1+p2+p3+p4,T,p0)

[0092] Potential nonlinear function f z For calculating the force 202 from the sensor readings, the battery temperature T (e.g. also available from each pressure sensor) and the external atmospheric pressure p0, which can be easily measured by an optional reference sensor external to the sensor structure, e.g. Fig.10 The sensor readings may represent instantaneous pressure information 204, which includes a first pressure value p1 associated with pressure sensor element 1201, a second pressure value p2 associated with pressure sensor element 1202, a third pressure value p3 associated with pressure sensor element 1203, and a fourth pressure value p4 associated with pressure sensor element 1204.

[0093] With a vertical force acting on the structure (see 202 x and 202 y), the present application can also introduce shear forces, resulting in structural deformation and pressure differences in each subunit. Figure 3 The controller 210 shown in FIG. 2 can be configured to calculate / derive shear force, for example, for Figure 6 The four-unit structure shown is as follows:

[0094] F x =f x (p1-p3,T)… shear force in the x direction

[0095] F y =f y (p2-p4,T)…shear force in the y direction

[0096] Function f x and f y It can also be a potentially nonlinear function, for example, describing the applied force F x 、F y The potential non-linear relationship between pressure and temperature readings.

[0097] The sensor element 100 is capable of measuring or evaluating:

[0098] Static and dynamic forces in the vertical and shear directions (the contact point remains unchanged / independent of the contact object);

[0099] Friction regime - sticky range, stick-slip range, sliding range;

[0100] ·Vertical force combined with shear component (object handling / carrying) Grip for any handling purpose.

[0101] Figure 6 The geometry of four sensor units 110 is shown by way of example. Alternative subunit geometries may also be used, for example Figures 7a to 7c The three-unit geometry shown.

[0102] Figures 7a to 7c Different arrangements of a plurality of pressure sensor elements 120 (see 1201 to 1206 ) are shown for a sensor element 100 having three sensor units 110 (see 1101 to 1103 ). Figures 7a to 7c The arrangement of the plurality of pressure sensor elements 120 shown in FIG. 1 may be applicable to any other number n of sensor units, where n is an integer equal to or greater than 2, for example, for a sensor unit having four sensor units 110. Figure 6 A sensor element 100 is shown.

[0103] Figure 7aAn embodiment of a sensor element 100 having absolute pressure sensors 1201 to 1203 as a plurality of pressure sensor elements is shown. For each sensor unit 1101 to 1103, a corresponding sealed internal volume 1181 to 1183 is fluidically coupled to one of the absolute pressure sensors 1201 to 1203. Each sensor unit 1101 to 1103 comprises a different pressure sensor element of the plurality of pressure sensor elements. The plurality of pressure sensor elements comprises: for each sensor unit 110, one absolute pressure sensor 120. Figure 7a The arrangement shown in is also applicable to n sensor units 110 , where n is an integer equal to or greater than 2. Each sensor unit 110 includes one of the n absolute pressure sensors, ie, there is one absolute pressure sensor for each sensor unit 110 .

[0104] Figure 7b An embodiment of a sensor element 100 having one absolute pressure sensor 1202 and two differential pressure sensors 1201 and 1203 as a plurality of pressure sensor elements is shown. One sensor unit, for example the first sensor unit 1101, comprises an absolute pressure sensor, i.e. the sealed inner volume 1181 of the first sensor unit 1101 is fluidically coupled to the absolute pressure sensor 1202. Furthermore, the sealed inner volume 1181 of the first sensor unit 1101 is fluidically coupled to two differential pressure sensors 1201 and 1203, i.e. the first differential pressure sensor 1201 and the second differential pressure sensor 1203. The first differential pressure sensor 1201 is also coupled to the sealed inner volume 1183 of the third sensor unit 1103 (i.e. the first adjacent sensor unit), and the second differential pressure sensor 1203 is also coupled to the second sensor unit 1101. 2( The first sensor unit 1101 is arranged adjacent to the second sensor unit 1102 and the third sensor unit 1103, while the second sensor unit 1102 is arranged adjacent to the third sensor unit 1103. The first sensor unit 1101 and the second sensor unit 1102 represent two adjacent sensor units, the first sensor unit 1101 and the third sensor unit 1103 represent two adjacent sensor units, while the second sensor unit 1102 and the third sensor unit 1103 represent two adjacent sensor units.

[0105] Figure 7bThe arrangement shown in can be applicable to any other number of sensor units 110, for example, to n sensor units, where n is an integer equal to or greater than 2. For such an embodiment, the plurality of pressure sensor elements include one absolute pressure sensor and n-1 differential pressure sensors. One of the n sensor units 110 includes an absolute pressure sensor, and the n-1 differential pressure sensors are arranged at a unit boundary, each differential pressure sensor is coupled to two adjacent sealed internal volumes, and the two internal volumes are separated from each other by the unit boundary where the corresponding pressure sensors are arranged. Only one unit boundary is not passed through by a differential pressure sensor.

[0106] The plurality of pressure sensor elements 120 may be arranged such that there are no redundant pressure sensor elements 120 within the sensor element 100, but such that the vertical force and the horizontal force are determinable. Figure 7a and Figure 7b This is the case with the described embodiment. This can also be achieved with different arrangements. For example, consider Figure 7b In the sensor element 100 shown in , the first differential pressure sensor 1201 can be replaced by an absolute pressure sensor included in the third sensor unit 1103, or the second differential pressure sensor 1203 can be replaced by an absolute pressure sensor included in the second sensor unit 1102, or both the differential pressure sensors 1201 and 1203 can be replaced by an absolute pressure sensor included in the second sensor unit 1102 or the third sensor unit 1103 and a differential pressure sensor coupled to the sealed internal volume 1182 of the second sensor unit 1102 and the sealed internal volume 1183 of the third sensor unit 1103. Alternatively, different embodiments can also be used for the sensor element 100 having a number of sensor units other than three. For example, there is no need to arrange a differential pressure sensor between two adjacent sensor units that both include absolute pressure sensors. The differential pressure sensor may only be coupled between the sealed internal volumes of two predefined adjacent sensor units, where at most only one of the two predefined adjacent sensor units may include an absolute pressure sensor, see Figure 4 1004 in . If the plurality of pressure sensor elements 120 comprises, for example, at least one differential pressure sensor, the plurality of pressure sensor elements 120 must also comprise at least one absolute pressure sensor in order to be able to determine vertical and horizontal forces with the respective sensor element 100. Avoiding redundancy simplifies the production of the respective sensor element 100 and reduces costs.

[0107] Alternatively, it is also possible that the sensor element 100 comprises redundant pressure sensor elements. Figure 7c Indicates that, in addition to Figure 7bIn addition to the pressure sensor element 120 shown, optionally, an additional differential pressure sensor 1205, an additional first absolute pressure sensor 1204 and / or an additional second absolute pressure sensor 1206 may be integrated into the sensor element 100. In other words, each sensor unit wall (see sensor wall 112) separating two adjacent sensor units 110 may be traversed by a differential pressure sensor (see 1201, 1203 and 1205), and in addition, each sensor unit (see 1101 to 1103) includes an absolute pressure sensor (see 1202, 1204 and 1206). The implementation of redundant pressure sensors improves the accuracy, robustness and efficiency of the contact force determination of the contact force sensor device 200 described herein.

[0108] Alternatively, it is also possible that only one sensor cell (see 1101) comprises an absolute pressure sensor (see 1202), and each sensor cell wall 112 separating two adjacent sensor cells 110 may be traversed by a differential pressure sensor (see 1201, 1203 and 1205). In other words, the sensor element 100 may comprise a sensor cell 110 comprising an absolute pressure sensor and being fluidically coupled to one or more differential pressure sensors, and the sensor element 100 may comprise one or more further sensor cells 110 being fluidically coupled to one or more differential pressure sensors. If all sensor cells 110 are fluidically coupled to at least one differential pressure sensor, i.e. if a differential pressure sensor is arranged at each cell boundary 112 or at all cell boundaries 112 except one cell boundary 112 between adjacent sensor cells, then one absolute pressure sensor may be sufficient to determine the magnitude and direction of the force applied to the sensor element 100.

[0109] Alternatively, it is also possible that the sensor element 100 includes more than one absolute pressure sensor to improve the accuracy of determining the magnitude and / or direction of the force applied to the sensor element 100. For example, every second, third or fourth sensor unit 110 may include one of the absolute pressure sensors. Figure 4 In the sensor element 1004, each second sensor unit 110 includes an absolute pressure sensor element, and Fig.10 In the sensor element 100 of FIG. 1 , every third sensor cell 110 includes an absolute pressure sensor element. It is not necessary to arrange a differential pressure sensor at each cell boundary between two adjacent sensor cells. The plurality of pressure sensor elements 120 of the sensor element 100 may include two or more differential pressure sensors coupled between two or more different pairs of adjacent sensor cells 110 of the sensor element 100 having three or more sensor cells 110.

[0110] The sensor element 100 including at least one absolute pressure sensor and at least one differential pressure sensor is not limited to the above arrangement. Other arrangements of one or more absolute pressure sensors and one or more differential pressure sensors are also possible. In any case, each sealed internal volume 118 should be fluidically coupled to at least one pressure sensor, such as an absolute pressure sensor or a differential pressure sensor.

[0111] Triple-unit sensors and quad-unit sensors, ie, sensor elements 100 having three or more sensor units 110, enable 2D shear force sensing, such as full-surface vector sensing, ie, vertical force and 2D shear force. Figures 1 to 7c The sensor units 110 of the sensor elements discussed herein can be arranged in one dimension (see Figures 1 to 4 ) or a two-dimensional arrangement (see Figures 4 to 7c ). However, it is also possible that the sensor units 110 are arranged in a three-dimensional manner, for example Figure 8 In other words, two or more sensor units 110 can be stacked together.

[0112] Figure 8 An exemplary embodiment of a sensor element 100 is shown, which has a basic sensor unit 110 b , basic sensor unit 110 b A plurality of mechanical coupling sensor units 110 are arranged on u In other words, the plurality of mechanically coupled sensor units 110 u The base sensor unit 110 is arranged adjacent to the base sensor unit 110 b On. Basic sensor unit 110 b A plurality of mechanically coupled sensor units 110 on u You can follow the Figures 1 to 7c The plurality of mechanically coupled sensor units 110 are arranged in the manner described above. u The base sensor unit 110 may be b The base sensor unit 110 is formed into a spherical segment or a hemisphere. b may have a cylindrical form, wherein the base sensor unit 110 b The top wall 112 bu The base sensor unit 110 is shown b A plurality of mechanically coupled sensor units 110 u The unit boundary between the base sensor units 110 b The top wall 112 bu A plurality of mechanically coupled sensor units 110 may be represented u The bottom wall or base wall (see Figures 1 to 3 and Figure 6116 in the figure). In other words, it is subdivided into a plurality of mechanically coupled sensor units 110 u The flexible spherical segment (hemisphere) is located on the cylindrical base sensor unit 110 b superior.

[0113] Base sensor unit 110 b The top wall 112 bu , namely the basic sensor unit 110 b A plurality of mechanically coupled sensor units 110 u The unit boundaries between the base sensor units 110 can be flexible or rigid. b Side wall 112 b The outer surface, ie, the wall perpendicular to the top wall, may be flexible, foldable or rigid. b The top wall 112 bu and side wall 112 b Can be flexible. Both (i.e. top wall 112 bu and side wall 112 b ) should be flexible.

[0114] Base sensor unit 110 b Can be fluidically coupled to the absolute pressure sensor 124. Mechanically coupled sensor unit 110 u may be fluidically coupled to the pressure sensor element 120, as described with respect to Figures 1 to 7c Alternatively, it is possible to mechanically couple the sensor unit 110 u The at least one pressure sensor element 120 comprises only one differential pressure sensor, that is, in the base sensor unit 110 b Only two mechanical coupling sensor units 110 are arranged on u , and both are fluidly coupled to a common differential pressure sensor element 120 .

[0115] like Figure 8 As shown, for example, only the basic sensor unit 110 b An absolute pressure sensor 124 may be included. A plurality of mechanically coupled sensor units 110 u Only one or more differential pressure sensors may be included as one or more pressure sensor elements 120. For example, the sensor element 100 may include two mechanically coupled sensor units 110. u , both of which are fluidically coupled to a common differential pressure sensor element 120. According to the invention, there are three or more mechanically coupled sensor units 110 u As an alternative example, three or more mechanically coupled sensor units 110 uEach sealed internal volume 118 can be fluidically coupled to two differential pressure sensors, where two adjacent mechanically coupled sensor units 110 u A differential pressure sensor may be shared. According to an alternative example, for example, Figure 7c The three mechanically coupled sensor units 110 shown in u A basic sensor unit 110 having three differential pressure sensors 1201, 1203 and 1205 may be arranged b Without arranging the absolute pressure sensors 1202, 1204 and 1206. Any other number of sensor units 110 u It is possible that two adjacent sensor units 110 u Each cell boundary 112 between the differential pressure sensor 120 is crossed. The sensor cell 110 is only coupled to the differential pressure sensor element 120 by the fluid. u The base sensor unit 110 having the absolute pressure sensor element 124 is stacked b above, allowing the sensor unit 110 to be mechanically coupled with multiple u The horizontal component of the force applied to the sensor element 100 is determined based on the pressure information associated with the base sensor unit 110. b The associated pressure information determines the vertical component of the force.The inventors have discovered that by such separation of sensor cells for detecting the horizontal force component and one or more sensor cells for detecting the vertical force component in two different layers or levels of the sensor element 100, a high resolution can be achieved.

[0116] Alternatively, it is also possible that in the base sensor unit 110 b The sensor unit 110 at the top u is fluidically coupled to an absolute pressure sensor element and / or a differential pressure sensor element, such as Figures 1 to 7c described.

[0117] exist Figure 8 In the illustrated embodiment, a plurality of mechanically coupled sensor units 110 u Covering base sensor unit 110 b The entire top wall 112 bu However, this is not necessary. It is also possible that a plurality of mechanically coupled sensor units 110 u The area covered is smaller or larger than the base sensor unit 110 b The top wall 112 bu area.

[0118] Figure 8The arrangement of multi-unit shear sensing at the top and absolute pressure / force in the bottom unit given in can also be interchanged, i.e. having a directional multi-unit component at the bottom (with a sub-unit of cylindrical or cylindrical cross-section shape) and a spherical or conical single absolute pressure unit at the top (the smaller contact area on the top unit will ensure the transfer and thus the sensing of shear force with the lower level sensor components). In other words, embodiments can relate to a sensor element 100 in which the base sensor unit 110 b A plurality of mechanically coupled sensor units 110 are arranged adjacent to each other. u The base sensor unit 110 b The plurality of mechanically coupled sensor units 110 are arranged u The sensor unit 110 u The base sensor unit 110 may be formed, for example, as symmetrical and / or equally sized cylindrical segments (sectors or parts). b It may be formed as a spherical segment, a hemisphere, a spherical dome, a cone or a truncated cone (frustum of a cone). Mechanical coupling sensor unit 110 u may be fluidically coupled to the pressure sensor element 120, as described with respect to Figures 1 to 7c As shown in FIG. Alternatively, it is also possible that the base sensor unit 110 b The two mechanically coupled sensor units 110 are arranged u In the embodiment of the present invention, the two sensor units are fluidly coupled to a common differential pressure sensor element 120 .

[0119] The sensor element 100 may be implemented as a stack of two sensor unit layers with different characteristics, each layer comprising a 1D or 2D sensor element arrangement (eg Figure 4 and Figure 5 As shown). It includes a basic sensor unit 110 b The lower layer is configured to detect high forces and includes a plurality of mechanically coupled sensor units 110 u The upper layer of is configured to detect force with high resolution. Such an embodiment allows multi-scale sensing to enhance tactile perception.

[0120] If the base sensor unit 110 b Greater than a plurality of mechanically coupled sensor units 110 u The sensor unit 110 u For example, it may be advantageous to have a smaller cell size (e.g., 5 mm 2 ) of two or more sensor units 110 u Arranged in a larger unit size (e.g., 25mm 2 ) of the base sensor unit 110 bThe exemplary unit size allows for the base sensor unit 110 to be b Up to five sensor units can be placed on the top. Using the larger base sensor unit 110 b If the top pressure sensor element 120 has the same cell configuration (ie, the same cell configuration as the bottom pressure sensor element 124), it is possible to achieve more than a plurality of mechanically coupled sensor units 110. u The sensor unit 110 u Lower spatial resolution, but at the same time larger base sensor unit 110 b More sensitive to external loads.

[0121] Optionally, the sensor element 100 includes a mounting base 140, a base sensor unit 110 b is arranged (eg, mounted or fixed) on the mounting base 140. For example, the base sensor unit 110 b The base boundary or bottom boundary 112 bb may be fixed to the mounting base 140, or the mounting base 140 may represent the base sensor unit 110 b The base boundary or bottom boundary 112 bb . Base sensor unit 110 b The top wall 112 bu is arranged to be aligned with the base boundary or bottom boundary 112 bb For example, a plurality of mechanically coupled sensor units 110 u Arranged on the top wall 112 bu The side of the mounting base 140 is away from the mounting base 140.

[0122] According to an embodiment, the base sensor unit 110 b You can Fig. 9 In the embodiment shown, the cell wall 112 b With nonlinear pressure / force behavior, for example through certain wall geometries, such as cell walls112 b The folding structure 150 may be formed inside the base sensor unit 110, that is, the foldable outer cover, or through a certain material. For example, the folding structure 150 may completely surround the base sensor unit 110. b , for example, located at the base sensor unit 110 b on all sides of the top wall 112, which are perpendicular to the top wall 112 bu For example, in the base sensor unit 110 b In the case of a cylindrical shape, the folded structure 150 may be along a complete circular line of the outer surface of the cylinder. b case, with two walls 112 buEach of the four vertical walls may include a folding structure 150 .

[0123] For example, the cell wall (see 112 b ) is bent twice, for example, once in a first direction and once in an opposite direction, to form a folded structure 150. The bending direction is perpendicular to the top wall 112 bu The axis of the unit wall (see 112 b ) has a bottom end secured to a bottom unit boundary or mounting base 140 and a bottom end secured to a base sensor unit 110 b The top wall 112 bu Starting from the bottom, the cell wall 112 bu The first length is directed toward the top wall 112 bu , cell wall 112 bu The adjacent second length is away from the base sensor unit 110 in the direction of the bottom unit boundary or in the direction of the mounting base 140. b The internal volume of the cell wall 112 bu The adjacent third length is directed toward the top wall 112 again. bu .

[0124] Foldable housing, i.e., cell wall 112 with folding structure 150 b , is configured to be when the base sensor unit 110 b When the pressure in the base sensor unit 110 exceeds the pressure threshold 154, b The folded state 152 causes the base sensor unit 110 to b From the first pressure sensitivity 1561 to the second lower pressure sensitivity 1562. In other words, the folded state 152 may cause the base sensor unit 110 b From the first pressure dependency to the increased second pressure dependency. By this embodiment, the sensor element 100 is able to sense low force values ​​with high sensitivity / high resolution, for example, F ≤ F thr , and from a certain load (such as threshold F thr ), the sensitivity decreases to allow high load measurements. The main characteristics are given in the right figure in a simplified diagram, where the transition between the two conditions can be adjusted to be smooth and well defined in order to achieve high measurement performance in the increased load force / pressure range.

[0125] As mentioned above, an absolute pressure sensor, a differential pressure sensor (e.g. located at the cell boundary wall, i.e. the cell boundary 112) or a combination of an absolute pressure sensor and a differential pressure sensor are possible, for example allowing highly sensitive measurements, or redundancy in sensitive environments (FuSa):

[0126] Arrangement of absolute pressure sensor (see Figure 1 , Figure 3 , Figure 5 , Figure 6 and Figure 7a );

[0127] Arrangement of a differential pressure sensor with at least one absolute pressure sensor (see Figure 2 , Figure 4 , Figure 7b and Figure 7c );

[0128] Redundant sensors in absolute / differential pressure may improve performance / robustness (see Figure 7c );

[0129] A stacked sensor with a differential pressure sensor and a single absolute pressure sensor (see Figure 8 ).

[0130] Fig.10 The sensor element 100 is shown, comprising six mechanically coupled sensor units 110 exemplarily, see 1101 to 1106. Furthermore, the sensor element 100 comprises as its pressure sensor elements 120 exemplarily two absolute pressure sensors 1201 and 1202 and four differential pressure sensors 1203 to 1206. Fig.10 is an example of a sensor element 100 without a redundant pressure sensor element 120. Features and / or functionality regarding the housing and the pressure sensor element 120 may be as follows Figures 1 to 7c Optionally, Fig.10 The six mechanically coupled sensor units 110 shown in FIG. 1 may be arranged on the base sensor unit 110 b, for example, as Figure 8 shown.

[0131] The sensor element 100 may be formed by the contact force sensor device 200 described herein, for example, as Figure 3 The controller 210 of the contact force sensor device 200 may be configured to combine the sensor elements 100 shown in FIG. Fig.10 The pressure sensor element 120 of the sensor element 100 obtains / reads a pressure value to determine the contact force 202 .

[0132] Optionally, the sensor unit 1106 of the mechanically coupled sensor unit 110 comprises a temperature sensor 1601 for sensing an instantaneous temperature value in the sensor unit 1106. It is also possible that two or more sensor units 110 in the mechanically coupled sensor unit 110 comprise a temperature sensor 1601, wherein the respective temperature sensor 1601 is configured to detect / sense an instantaneous temperature value in the respective sensor unit 110. Optionally, each mechanically coupled sensor unit 110 of the sensor element 100 comprises a temperature sensor 1601. For example, each pressure sensor element 120 may have a built-in temperature sensor, e.g., for sensor calibration of temperature-insensitive pressure sensing. The temperature sensor will be readable by the controller 210 in the same manner as the pressure value of the respective pressure sensor element. In case the mechanically coupled sensor unit 110 is arranged on top of the base sensor unit, as Figure 8 As shown, the base sensor unit may additionally or alternatively include a temperature sensor 1601 for sensing an instantaneous temperature value in the base sensor unit, for example, a built-in temperature sensor of the absolute pressure sensor element 124. The temperature sensor 1601 in the sensor unit 1106 improves the accuracy of determining the force applied to the sensor element 100. This is based on the idea that contact with an object with a different temperature or a change in the ambient temperature may change the pressure in each sensor unit 110, for example, which needs to be compensated for in order to accurately measure the contact force. Therefore, the additional information of the instantaneous temperature value in the corresponding sensor unit 110 improves the accuracy of determining the force.

[0133] According to an embodiment, the sensor element 100 comprises a temperature sensor 1602 arranged outside the sensor unit 110 (eg arranged next to the mechanically coupled sensor unit 110). In the case where the mechanically coupled sensor unit 110 is arranged on a mounting base (compare Figure 6 ), or in the case where the base sensor unit in which the mechanical coupling sensor unit 110 can be arranged is arranged on the mounting base (compare Figure 8), a temperature sensor 1602 may also be arranged on the mounting base, for example in the vicinity of the sensor element 100. The temperature sensor 1602 is configured to provide (e.g. detect or sense) an instantaneous temperature value of the ambient atmosphere (e.g. surrounding the mechanically coupled sensor unit 110). The temperature sensor 1602 external to the sensor unit 110 may also improve the accuracy of determining the force applied to the sensor element 100. This is based on the idea that the external temperature at least partially affects the temperature inside the sensor unit 110, for example, a hot environment may increase the temperature and thereby also increase the pressure inside the sensor unit 110, or a cold environment may decrease the temperature and thereby also decrease the pressure inside the sensor unit 110. Therefore, the temperature sensor 1602 external to the sensor unit 110 allows the sensor element 100 to be calibrated so as to be able to correctly distinguish whether a detected pressure change inside the sensor unit is caused by an external force or an environmental change. The temperature sensor 1602 allows the reference pressure inside the sensor unit 110 to be calibrated.

[0134] Optionally, the sensor element 100 includes an air pressure sensor 170 arranged outside the sensor unit 110 (e.g., arranged next to the mechanically coupled sensor unit 110). The air pressure sensor 170 is configured to provide (e.g., detect or sense) an instantaneous atmospheric pressure value of the ambient atmosphere. The air pressure sensor 170 outside the sensor unit 110 can also improve the accuracy of determining the force applied to the sensor element 100. This is based on the idea that changes in external pressure may cause changes in the force applied to the sensor element 100. In order to be able to correctly distinguish whether the pressure change detected in the sensor unit is the result of the ambient pressure change or the result of the external force applied to the sensor element 100 to be detected. The air pressure sensor 170 can compensate for the pressure effect of the external air pressure change on all units.

[0135] Figure 3 The contact force sensor device 200 may include Figures 6 to 10 One of the sensor elements 100 shown in FIG. 1 , wherein the controller 210 is configured to perform the Figure 3 The readout and determination of contact force 202 is exactly the same or similar as described in .

[0136] Fig.11 An embodiment of a contact force sensor device 200 is shown. Exemplarily, the contact force sensor device 200 is shown on a robot hand 300 or on an electronic glove. The contact force sensor device 200 may alternatively be implemented in or connected to any other device requesting information about contact forces.

[0137] For example, Fig.11The contact force sensor device 200 shown includes a plurality of sensor elements 100. The sensor elements 100 may be fixed to the hand 300 individually or as a one-dimensional or two-dimensional array of sensor elements 100. Exemplarily, Fig.11 An array 180 of sensor elements affixed to the tip of a hand 300 is shown.

[0138] For example, regarding Figures 1 to 10 As described, a plurality of sensor elements 100 may be arranged on a flexible mounting base 140. The plurality of sensor elements 100 may form an array 180 of sensor elements 100. The contact force sensor device 200 may include an array 180 of a plurality of spherical or hemispherical sensor elements 100, each sensor element including a sensor unit formed as a segment (sector) of a sphere or hemisphere. Optionally, one or more of the sensor units 110 may include a temperature sensor 1601, as described with respect to Fig.10 described.

[0139] According to an embodiment, the flexible mounting base 140 includes a flexible wire structure configured to connect the sensor element 100 with the controller 210 of the interface or contact force sensor device 200. The flexible mounting base 140 including the plurality of sensor elements 100 may represent a mat. Such a mat may then cover a rigid surface (e.g., a curved surface), such as a robot finger or any type of application surface.

[0140] As about Figure 3 As described, the controller 210 may include two or more distributed hierarchical processing units. The controller 210 may include one or more local processing units that are configured to perform local processing, for example, the local array 180 of sensor elements may be read out by a separate local processing unit and / or each sensor element 100 may be read out by a separate local processing unit. One or more local processing units may be connected to an overall processing unit, such as a high-level processing unit or an overall control system, or one or more local processing units may be connected to a higher-level touch / tactile processing unit that is interfaced with two or more sub-units and connected to a high-level processing unit. The locality of the processing / controller significantly reduces wiring.

[0141] The controller 210 of the contact force sensor device 200 is configured to read out instantaneous pressure information 204 of multiple pressure sensor elements 120 of the multiple sensor elements 120, and determine the direction and / or magnitude of the contact force applied to at least part of the multiple sensor elements 120 based on the instantaneous pressure information 204. The instantaneous pressure information 204 may include instantaneous pressure values ​​of the multiple pressure sensor elements 120 of the multiple sensor elements 120, for example as a tensor. The instantaneous pressure information 204 may include: a set of instantaneous pressure values ​​for each sensor element 100, for example, the array 1801 of each sensor unit 110 and / or the array 1802 of each sensor element 100. The instantaneous pressure information 204 may indicate: for each instantaneous pressure value, the associated pressure sensor element for which the corresponding instantaneous pressure value has been read. The direction and / or magnitude of the contact force may be determined by combining the instantaneous pressure values ​​of the instantaneous pressure information 204, for example, as described with respect to Figure 3 described.

[0142] Optionally, the contact force sensor device 200 includes a temperature sensor 160, for example, located next to one or more of the plurality of sensor elements 100, for providing an instantaneous temperature value of the ambient atmosphere. The temperature sensor 160 may be arranged (e.g. fixed) on a surface of an object or device, such as a robot hand 300, on which the sensor elements 100 (e.g. the array 1801 of sensor units 110 and / or the array 1802 of sensor elements 100) are arranged. It is also possible that the temperature sensor 160 is arranged on the mounting base 140, see section AA'. Alternatively, it is also possible that the temperature sensor 160 is an external device, from which the controller 210 can obtain (e.g. receive) the instantaneous temperature value of the ambient atmosphere (e.g. via a wireless connection). The controller 210 is configured to determine the direction and / or magnitude (e.g. intensity) of the contact force applied to one or more of the sensor elements 100 based on the readout instantaneous pressure information 204 and based on the instantaneous temperature value of the ambient atmosphere. For example, the instantaneous temperature value of the ambient atmosphere is taken into account to compensate for temperature changes or temperature effects in the sensor unit due to warming or cooling provided by the ambient atmosphere.

[0143] Additionally, or alternatively, one or more sensor units 110 in the plurality of sensor elements 100 may include a temperature sensor, for example, as described with respect to Fig.10The controller is configured to determine the direction and / or magnitude of the contact force applied to one or more sensor elements of the sensor element 100 based on the readout instantaneous pressure information 204 and based on one or more instantaneous temperature values ​​in one or more sensor units with temperature sensors. The controller can obtain an instantaneous temperature value from each sensor unit 110 including a temperature sensor and take the instantaneous temperature value into account when determining the direction and / or magnitude of the contact force. Such a temperature sensor within a sensor unit can be used to compensate for temperature changes or temperature effects in the corresponding sensor unit.

[0144] According to an embodiment, the contact force sensor device 200 includes an air pressure sensor 170 located next to one or more sensor elements of the plurality of sensor elements 100 for providing an instantaneous atmospheric pressure value of the ambient atmosphere. The air pressure sensor 170 may be arranged (e.g. fixed) on a surface of an object or device, such as a robot hand 300, on which the sensor element 100 (e.g., an array 180 of sensor elements 100) is arranged. It is also possible that the air pressure sensor 170 is arranged on a mounting base 140, see section AA'. Alternatively, it is also possible that the air pressure sensor 170 is an external device from which the controller 210 can obtain (e.g., receive) an instantaneous atmospheric pressure value of the ambient atmosphere (e.g., via a wireless connection). For example, the controller 210 is configured to determine the direction and / or magnitude (e.g., intensity) of the contact force applied to one or more sensor elements of the sensor element 100 based on the readout instantaneous pressure information 204 and based on the instantaneous atmospheric pressure value of the ambient atmosphere. For example, the instantaneous atmospheric pressure value of the ambient atmosphere is taken into account to compensate for pressure changes in the sensor unit 110 due to pressure changes of the ambient atmosphere.

[0145] In order to determine the direction and / or magnitude of the contact force, in addition to the instantaneous pressure information, the controller 210 may also consider the instantaneous temperature value of the ambient atmosphere, one or more instantaneous temperature values ​​(each instantaneous temperature value is associated with a sensor unit having a temperature sensor) and / or the instantaneous atmospheric pressure value of the ambient atmosphere.

[0146] For example, the controller 210 is configured to determine the contact force distribution on the surface area covered by the array 180 of sensor elements. For example, the controller 210 is configured to obtain the vertical force distribution on the array 180 and / or the shear force distribution (e.g., components and sum) on the array 180 or the 3D contact force distribution on the corresponding sensor array 180. The array 180 of sensor elements 100 enables spatially resolved 3D force sensing. The controller 210 is configured to calculate the above distribution from the sensor unit readout results to obtain a high resolution or spatial distribution of the force.

[0147] For example, the contact force sensor device 200 represents a multi-directional force and touch sensor. The contact force sensor device 200 discussed herein is configured to perform tactile and touch sensing in a robust and efficient manner to match consumer products, industrial and robotic applications, etc. The contact force sensor device 200 is capable of robustly evaluating touch interactions (feelings) and measuring contact forces. The contact force sensor device 200 is the best choice for application requirements (e.g., high-performance sensing with human-like touch perception and / or multi-directional sensing capabilities). Combining multi-unit sensors (see the sensor elements 100 discussed herein) into an array 180 to locally sense the 3D force distribution in the contact area (especially for "soft" or "touch" sensors) is related to the three-dimensional touch interaction or tactile condition evaluation covering spatial resolution. The contact force sensor device 200 resolves the measurement of three-dimensional contact forces on the touch / tactile interface (i.e., the flexible cover 114 of the sensor unit 110), thereby providing three-dimensional information about the contact force arrangement (vertical force and additional shear force components in the x and y directions) on the contacted surface.

[0148] The contact force sensor device 200 is a novel multi-directional force / touch sensor system, which consists of a set of sub-units (i.e., sensor units 110) that are mechanically and / or electrically interconnected. Each sensor unit 110 can be equipped with a pressure sensor 120, such as an absolute pressure sensor and / or a differential pressure sensor. Based on the interconnected sensor principle, by combining the individual pressure measurements, the magnitude and direction of the three-dimensional touch force (i.e., vertical force and shear force) acting on the main mechanical touch interface (i.e., the flexible cover 114 of the sensor unit 110) can be robustly and accurately estimated.

[0149] As about Figure 4 , Figure 5 and Fig.11 As mentioned, the sensor elements 100 described herein may be arranged in an array. Figures 12a to 12c shows an example of a 3D contact force sensor array, Fig.13a and Fig.13b A 2D contact force sensor array is shown, comprising laterally (spatially) separated absolute force sensors and shear force sensors. Figures 12a to 12c The sensor array shown in FIG. 1 may include one or more force sensing components 2000 configured to sense contact forces in three dimensions, and Fig.13a and Fig.13b The sensor array shown in FIG. 2 may include one or more force sensing components 2000 configured to detect contact forces in two dimensions.

[0150] Fig.12aA sensor array is shown, which is configured to perform 3D force sensing through a combination of different sensor elements (e.g., components with different units). For example, the sensor array includes: one or more single-unit vertical force sensor elements 1000, i.e., one unit has one absolute pressure sensor 1100; and one or more sensor elements 100 described herein, which have at least three mechanically coupled sensor units 110, e.g., as described with respect to Figures 4 to 7c At least three mechanically coupled sensor units 110 enable the corresponding sensor element 100 to sense 2D shear force. Preferably, the pressure sensor element 120 included in the sensor element 100 represents a differential pressure sensor element, that is, one of the differential pressure sensor elements is arranged at each boundary separating two adjacent sensor units 110. In this case, the sensor element 100 can represent a multi-unit shear force sensor element, that is, a pure shear force sensor or a pure vertical force sensor, for 2D shear force sensing. Fig.12a The force sensing component 2000 of the illustrated sensor array may include a single-unit vertical force sensor element 1000 and a sensor element 100 configured to detect shear forces in two dimensions. For example, the sensor element 100 may be configured to measure shear forces in a first dimension and a second dimension, wherein the second dimension is perpendicular to the first dimension. The single-unit vertical force sensor element 1000 may be configured to measure vertical forces in a third dimension, wherein the third dimension is perpendicular to the first dimension and the second dimension.

[0151] Figure 12b and Fig.12c An example of an array is shown, which includes: one or more single-unit vertical force sensor elements 1000, i.e., one unit has one absolute pressure sensor 1100; and two or more sensor elements 100 described herein, which have two mechanically coupled sensor units 110, for example, as described with respect to Figure 1 or Figure 2Said. Preferably, the sensor element 100 includes two mechanically coupled sensor units 110, which are fluidically coupled to a common differential pressure sensor element, that is, the dual-unit sensor element 100 includes only one differential pressure sensor element as a pressure sensor element. The two mechanically coupled sensor units 110 enable the corresponding sensor element 100 to sense 1D shear force. The sensor element 100 has two variants, wherein the second variant 1002 is arranged in an array rotated 90° relative to the first variant 1001. These two variants 1001 and 1002 together achieve 2D shear force sensitivity of the array. The first variant 1001 can, for example, be configured to measure shear force in a first dimension, while the second variant 1002 can, for example, be configured to measure shear force in a second dimension, wherein the second dimension is perpendicular to the first dimension. The single-unit vertical force sensor element 1000 can be configured to measure vertical force in a third dimension, wherein the third dimension is perpendicular to the first dimension and the second dimension.

[0152] Figure 12b The force detection component 2000 of the sensor array shown in FIG. 2 may include two single-unit vertical force sensor elements 1000, a first variant 1001 of the sensor element 100, and a second variant 1002 of the sensor element 100. The force detection component 2000 may include a 2×2 arrangement of sensors (i.e., 1000, 1001, and 1002). According to an embodiment, each row and each column of the 2×2 arrangement may include one of the two single-unit vertical force sensor elements 1000 and one of the two variants 1001 and 1002 of the sensor element 100. This 2×2 arrangement of sensors improves the accuracy of detecting contact forces in three dimensions.

[0153] Fig.12c The force sensing component 2000 of the illustrated sensor array may include a single unit vertical force sensor element 1000, a first variation 1001 of the sensor element 100, and a second variation 1002 of the sensor element 100. The three sensors may be arranged in a triangle within the force sensing component 2000.

[0154] and Figure 12b Compared to the sensor array shown, Fig.12c The sensor array shown enables a denser sensor arrangement. Figure 12b Compared to the sensor array shown, Fig.12c The sensor array shown can more accurately determine the position information of the contact point within the sensor array.

[0155] Fig.13a and Fig.13bAn example of an array is shown, which includes: one or more single-unit vertical force sensor elements 1000, i.e., one unit has one absolute pressure sensor 1100; and one or more sensor elements 100 described herein, which have two mechanically coupled sensor units 110, for example, as described with respect to Figure 1 or Figure 2 Preferably, one or more sensor elements 100 include two mechanically coupled sensor units 110, which are fluidically coupled to a common differential pressure sensor element, i.e., the dual-unit sensor element 100 includes only one differential pressure sensor element as a pressure sensor element. The two mechanically coupled sensor units 110 enable the corresponding sensor element 100 to sense 1D shear forces. Fig.13a shows a sensor array having a sensor element 100 configured to measure shear forces in a first dimension, Fig.13b A sensor array is shown having a sensor element 100 configured to measure shear force in a second dimension, wherein the second dimension is perpendicular to the first dimension. A single unit vertical force sensor element 1000 can be configured to measure vertical force in a third dimension, wherein the third dimension is perpendicular to the first and second dimensions. Thus, Fig.13a The sensor array shown in Fig.13b The sensor array shown in is configured to measure contact forces in two dimensions. Fig.13a The sensor array shown in is configured to measure contact forces in the first and third dimensions, and Fig.13b The sensor array shown in is configured to measure contact force in the second and third dimensions. Fig.13a and Fig.13b The force detection component 2000 of the sensor array shown in FIG. 1 may include a single-unit vertical force sensor element 1000 and a sensor element 100 . Fig.13a and Fig.13b The simpler arrangement shown in may have advantages in simple lifting applications, namely ware handling and lifting / repositioning objects by gripping in industrial robotics.

[0156] also, Fig.13a and Fig.13b Variations of the arrangement of sensors within the respective sensor arrays are shown. Fig.13a In , the sensors are arranged in rows and columns with no offset / displacement between them. In contrast, in Fig.13b The rows of sensors are offset / displaced from each other. Fig.13a Compared to the sensor array shown in Fig.13b The sensor array shown in enables a denser sensor arrangement. Fig.13aCompared to the sensor array shown in Fig.13b The sensor array shown in can more accurately determine the position information of the contact point within the sensor array.

[0157] Additional embodiments and aspects are described that may be used alone or in combination with the features and functionality described herein.

[0158] According to an embodiment, the sensor element comprises: a plurality of mechanically coupled sensor cells, each sensor cell having a sealed internal volume within an at least partially flexible cell housing, wherein the flexible cell housing comprises a flexible outer cover and flexible cell boundaries between adjacent sensor cells; and at least one pressure sensor element, wherein each sealed internal volume is fluidically coupled to at least one of the at least one pressure sensor element.

[0159] According to an embodiment, the sensor element comprises a plurality of pressure sensor elements, the pressure sensor elements comprising absolute pressure sensors, and each sealed inner volume is fluidly coupled to at least one of the plurality of pressure sensor elements, and wherein each sensor cell comprises one of the absolute pressure sensors.

[0160] According to an embodiment, at least one pressure sensor element comprises at least one differential pressure sensor, and optionally, each sealed internal volume is fluidically coupled to at least one of the at least one differential pressure sensor, and wherein the sealed internal volumes of two adjacent mechanically coupled sensor units are fluidically coupled to a common differential pressure sensor.

[0161] According to an embodiment, the sensor element comprises a plurality of pressure sensor elements, the pressure sensor elements comprising at least one differential pressure sensor and at least one absolute pressure sensor, and each sealed inner volume is fluidly coupled to at least one of the plurality of pressure sensor elements.

[0162] According to an embodiment, the sensor element comprises two adjacent sensor cells, wherein at least one of the two adjacent sensor cells comprises an absolute pressure sensor, and wherein the sealed inner volumes of the two adjacent sensor cells are fluidically coupled to a common differential pressure sensor.

[0163] According to an embodiment, the sensor element further comprises: a temperature sensor located in at least one of the sensor cells for sensing an instantaneous temperature value in the sensor cell having the temperature sensor; and / or located beside the sensor element for providing an instantaneous temperature value of the ambient atmosphere.

[0164] According to an embodiment, the sensor element further comprises: an air pressure sensor located beside the sensor element for providing an instantaneous air pressure value of the ambient atmosphere.

[0165] According to an embodiment, wherein the sensor units are cube-shaped or cuboid-shaped and are arranged in a two-dimensional array, or wherein the sensor units are formed as segments of a spherical dome.

[0166] According to an embodiment, the sensor element further comprises a base sensor unit, wherein the plurality of mechanically coupled sensor units are arranged adjacently on the base sensor unit.

[0167] According to an embodiment, a base sensor unit comprises: a flexible or rigid top wall, a plurality of mechanically coupled sensor units are arranged on the flexible or rigid top wall; and a foldable outer cover, wherein the outer cover is configured to provide a folded state of the base sensor unit when a pressure applied to the base sensor unit exceeds a pressure threshold, wherein the first state causes the base sensor unit to change from a first pressure dependence to an increased second pressure dependence.

[0168] According to an embodiment, a contact force sensor device includes: a sensor element; and a controller configured to read out instantaneous pressure information of at least one pressure sensor element of the sensor element and determine a direction and / or strength of a contact force applied to the sensor element based on the instantaneous pressure information.

[0169] According to an embodiment, the contact force sensor device also includes: a temperature sensor located in at least one of the sensor units, for sensing an instantaneous temperature value in the sensor unit having the temperature sensor; and / or located next to the sensor element, for providing an instantaneous temperature value of the ambient atmosphere, wherein the controller is configured to: determine the direction and / or intensity of the contact force applied to the sensor element based on the readout instantaneous pressure information and based on the instantaneous temperature value in the sensor unit having the temperature sensor and / or the instantaneous temperature value of the ambient atmosphere.

[0170] According to an embodiment, the contact force sensor device also includes: an air pressure sensor located next to the sensor element, for providing an instantaneous atmospheric pressure value of the ambient atmosphere, wherein the controller is configured to: determine the direction and / or intensity of the contact force applied to the sensor element based on the readout instantaneous pressure information and based on the instantaneous atmospheric pressure value of the ambient atmosphere.

[0171] According to an embodiment, the contact force sensor device further comprises: an array comprising sensor elements, wherein a controller is configured to read out instantaneous pressure values ​​of the pressure sensor elements of the sensor elements to obtain instantaneous pressure information and determine a direction and / or intensity of the contact force applied to the sensor elements based on the readout instantaneous pressure information.

[0172] According to an embodiment, the controller is configured to determine a contact force distribution over a surface area covered by the array of sensor elements.

[0173] According to an embodiment, the contact force sensor device further comprises a cover layer arranged on the array, wherein the cover layer is configured to mechanically couple the sensor elements of the array.

[0174] Although certain aspects have been described as features in the context of an apparatus, it is clear that this description may also be seen as a description of corresponding features of a method. Although certain aspects have been described as features in the context of a method, it is clear that this description may also be seen as a description of corresponding features related to the functionality of the apparatus.

[0175] In the foregoing detailed description, it can be seen that in order to simplify the present disclosure, various features are grouped together in the examples. This method of disclosure should not be interpreted as reflecting the intention that the claimed examples require more features than those explicitly stated in each claim. On the contrary, as reflected in the following claims, the subject matter may exist in fewer features than all the features of a single disclosed example. Therefore, the following claims are hereby incorporated into the detailed description, where each claim can be independently presented as a separate example. Although each claim can be independently presented as a separate example, it should be noted that although a dependent claim can be cited in a claim as a specific combination with one or more other claims, other examples can also include a combination of a dependent claim with the subject matter of each other dependent claim or a combination of each feature with other dependent or independent claims. Unless it is stated that a specific combination is not intended, such a combination will be presented herein. In addition, it is intended to include the features of a claim to any other independent claim, even if the claim is not directly subordinate to the independent claim.

[0176] Although specific embodiments have been illustrated and described herein, it will be appreciated by those skilled in the art that various alternative and / or equivalent implementations may be used to replace the specific embodiments shown and described without departing from the scope of the present embodiments. The present application is intended to cover any changes or variations of the specific embodiments discussed herein. Therefore, the present invention is intended to be limited only by the claims and their equivalents.

[0177] The above embodiments are only used to illustrate the principles of the present embodiments. It should be understood that modifications and variations of the arrangements and details described herein will be clearly understood by those skilled in the art. Therefore, the present invention is limited only by the scope of the patent claims to be filed, and is not limited by the specific details presented herein by describing and explaining the embodiments.

Claims

1. A sensor element (100), comprising: a plurality of mechanically coupled sensor units (110), each sensor unit having a sealed interior volume (118) within an at least partially flexible unit housing, wherein the flexible unit housing includes a flexible outer cover (114) and flexible unit boundaries (112) between adjacent sensor units (110); and At least one pressure sensor element (120), wherein each sealed interior volume (118) is fluidly coupled to at least one of the at least one pressure sensor element (120).

2. The sensor element (100) according to claim 1 comprises a plurality of said pressure sensor elements (120), said pressure sensor elements comprising absolute pressure sensors, and each sealed internal volume (118) is fluidically coupled to at least one pressure sensor element of said plurality of pressure sensor elements (120), and wherein each sensor unit comprises one absolute pressure sensor of said absolute pressure sensors.

3. The sensor element (100) according to claim 1 or 2, wherein the at least one pressure sensor element (120) comprises at least one differential pressure sensor, and wherein the sealed inner volumes (118) of two adjacent mechanically coupled sensor units (110) are fluidically coupled to a common differential pressure sensor.

4. The sensor element (100) according to claim 1 comprises a plurality of pressure sensor elements (120), wherein the pressure sensor elements include at least one differential pressure sensor and at least one absolute pressure sensor, and each sealed internal volume (118) is fluidically coupled to at least one pressure sensor element of the plurality of pressure sensor elements (120).

5. The sensor element (100) according to claim 4 comprises two adjacent sensor units (110), wherein at least one of the two adjacent sensor units (110) comprises an absolute pressure sensor, and wherein the sealed internal volumes (118) of the two adjacent sensor units (110) are fluidically coupled to a common differential pressure sensor.

6. The sensor element (100) according to any one of the preceding claims, further comprising: Temperature sensor (160), at least one sensor unit located in the sensor units (110), used for sensing an instantaneous temperature value in the sensor unit (110) having the temperature sensor; and / or Located beside the sensor element (100), it is used to provide an instantaneous temperature value of the ambient atmosphere.

7. The sensor element (100) according to any one of the preceding claims, further comprising: The air pressure sensor (170), located next to the sensor element (100), is used to provide an instantaneous atmospheric pressure value of the ambient atmosphere.

8. The sensor element (100) according to any of the preceding claims, wherein the sensor unit (110) is formed as a segment of a spherical dome.

9. The sensor element (100) according to any one of the preceding claims, further comprising a base sensor unit (110 b ), wherein a plurality of mechanically coupled sensor units (110) are arranged adjacent to the base sensor unit (110 b )superior.

10. The sensor element (100) according to claim 9, wherein the base sensor unit (110 b )include: Flexible or rigid top wall (112 bu ), a plurality of mechanically coupled sensor units (110 u ) is arranged on the flexible or rigid top wall (112 bu ); and the outer cover (112 b ), the housing has nonlinear pressure / force behavior, wherein the housing (112 b ) is configured to: when applied to the base sensor unit (110 b ) exceeds a pressure threshold value (154), providing the basic sensor unit (110 b ), wherein the first state causes the base sensor unit (110 b ) changes from a first pressure dependence to an increasing second pressure dependence.

11. A contact force sensor device (200), comprising: The sensor element (100) according to any one of the preceding claims; as well as A controller (210) is configured to read out instantaneous pressure information (204) of at least one pressure sensor element (120) of the sensor element (100), and determine a direction and / or strength of a contact force (202) applied to the sensor element (100) based on the instantaneous pressure information (204).

12. The contact force sensor device (200) of claim 11, further comprising: Temperature sensor (160), Located in at least one of the sensor units (110), for sensing an instantaneous temperature value in the sensor unit having the temperature sensor; and / or Located next to the sensor element (100), it is used to provide an instantaneous temperature value of the ambient atmosphere, The controller (210) is configured to determine the direction and / or strength of the contact force (202) applied to the sensor element (100) based on the instantaneous pressure information read out and based on the instantaneous temperature value in the sensor unit (110) having the temperature sensor and / or the instantaneous temperature value of the ambient atmosphere.

13. The contact force sensor device (200) according to claim 11 or 12, further comprising: An air pressure sensor (170), located next to the sensor element (100), is used to provide an instantaneous atmospheric pressure value of the ambient atmosphere, The controller (210) is configured to determine the direction and / or strength of the contact force (202) applied to the sensor element (100) based on the read instantaneous pressure information (204) and the instantaneous atmospheric pressure value based on the ambient atmosphere.

14. The contact force sensor device (200) according to any one of claims 11 to 13, further comprising: An array (180) comprising a sensor element (100) according to any one of the preceding claims, The controller (210) is configured to read out an instantaneous pressure value of the pressure sensor element (120) of the sensor element (100) to obtain the instantaneous pressure information (204), and determine a direction and / or strength of the contact force (202) applied to the sensor element (100) based on the readout instantaneous pressure information (204).

15. The contact force sensor device (200) of claim 14, wherein the controller (210) is configured to determine a contact force distribution over a surface area covered by the array (1602) comprising sensor elements (100).

16. The contact force sensor device (200) according to claim 14 or 15, comprising: A cover layer is disposed on the array (180) including the sensor elements (100), wherein the cover layer is configured to mechanically couple the sensor elements (100) of the array (180).

Images