A two-axis linearly enhanced Maxwell electromagnetic actuator

Abstract

The present invention discloses a two-axis linear enhanced Maxwell electromagnetic actuator, comprising: a toothed mover, a permanent magnet assembly, a first stator core, a second stator core and a coil winding; the first stator core and the second stator core are both provided with coil windings, the first stator core and the second stator core are arranged perpendicularly to each other, the toothed mover is located at the center of the notch of the first stator core and the second stator core, and there is an air gap between the toothed mover and the stator core; multiple groups of permanent magnet assemblies are symmetrically arranged on the top of the first stator core and the second stator core, and the first stator core and the second stator core are connected at both ends, respectively, to form a four-way magnetic flux path through the toothed mover, the air gap, the first stator core and the second stator core. The present invention has the characteristics of compact structure, small size, high stability, etc., avoids the generation of parasitic permanent magnetic attraction in the non-working direction, avoids the parasitic displacement in the non-working direction, and realizes the active decoupling of the two degrees of freedom in the working direction.

Description

Technical Field

[0001] The invention relates to the field of precision drive technology, and in particular to a two-axis linearly enhanced Maxwell electromagnetic actuator. Background Art

[0002] As one of the basic core components of micro-actuation, micro-measurement and micro-manufacturing, precision actuators are widely used in precision machining, space communications, optical engineering, aerospace and other fields. However, traditional voice coil motor actuators have the disadvantage of low power density and do not meet the design requirements of minimization of size, weight and power consumption; piezoelectric ceramic actuators have a small actuation stroke and cannot be used in millimeter-level large-stroke precision actuation occasions. Electromagnetic actuation technology based on Maxwell's electromagnetic force principle is considered to be an effective solution with both high power density and large actuation stroke, and is gradually being applied to systems such as fast mirror systems, imaging optical scanning systems and fast tool servos.

[0003] Existing electromagnetic actuators driven by Maxwell electromagnetic force, also known as positive stress motors, linearize the nonlinear relationship between the driving electromagnetic force and the driving current and the displacement of the mover by introducing a bias magnetic flux. However, this linear relationship is limited to when the working air gap is small, assuming that there is no or negligible nonlinear physical phenomena such as magnetic flux leakage and edge effect in the air gap. However, the size of the working air gap determines the size of the actuation stroke. When the positive stress motor achieves a large stroke of millimeters, the working air gap needs to be larger, resulting in stronger nonlinearity. The significant nonlinearity of the electromagnetic drive characteristics will reduce the motion control accuracy, increase the cost of nonlinear control, and reduce robustness.

[0004] Most of the known normal stress motors currently use a C-type magnetic circuit structure, and the permanent magnets are arranged in the non-working direction of the actuator mover, so there is a parasitic permanent magnetic attraction in the non-working direction. Existing technical solutions, for example, Chinese patent application CN 117335633A discloses a normal force electromagnetic actuator with an embedded compliance mechanism. The electromagnetic actuator adopts a planar configuration, and two C-type magnetic circuit structures are symmetrically distributed to balance the permanent magnetic attraction, but can only achieve one-dimensional planar motion. Chinese patent application CN 116455173A discloses a normal stress electromagnetic piezoelectric hybrid driven three-dimensional nanopositioning platform, which uses two sets of normal force electromagnetic actuators connected in series and superimposed to achieve in-plane XY two-axis motion, but greatly increases the moving mass and overall volume, resulting in a decrease in the final performance. Chinese patent application CN 113175871A discloses a positioning platform device, which arranges two C-shaped magnetic circuit positive stress motors orthogonally and shares a permanent magnet to achieve XY axis parallel drive. The structure is compact and reliable, but the parasitic permanent magnetic attraction of the permanent magnet in the non-working direction still exists.

[0005] In summary, the Maxwell electromagnetic actuator in the related technology cannot achieve parallel drive of the XY axes while eliminating or avoiding parasitic permanent magnetic attraction, and cannot meet the design of minimizing volume and weight, nor can it avoid the generation of parasitic displacement. Secondly, in the existing related technology, as the motion stroke increases, the length of the working air gap needs to be expanded accordingly, resulting in enhanced nonlinearity, resulting in the large stroke actuation that the positive stress motor can achieve can only achieve a scale of hundreds of microns. Summary of the invention

[0006] The technical problem to be solved by the present invention is to provide a two-axis linear enhanced Maxwell electromagnetic actuator with compact structure, high stability and small size in view of the above-mentioned problems in the prior art.

[0007] In order to solve the above technical problems, the technical solution adopted by the present invention is:

[0008] A two-axis linear enhanced Maxwell electromagnetic actuator, comprising: a toothed mover, a permanent magnet assembly, a first stator core, a second stator core and a coil winding; the ends of the first stator core and the second stator core are both arranged as toothed structures meshing with the toothed mover, the first stator core and the second stator core are both provided with coil windings, and the first stator core and the second stator core are arranged perpendicular to each other, the toothed mover is located at the center of the notch of the first stator core and the second stator core, and the toothed mover is arranged at the center of the notch of the first stator core and the second stator core. The cross-section of the toothed mover is in a "cross" shaped structure, there are a first air gap and a third air gap between the toothed mover and the first stator core, and there are a second air gap and a fourth air gap between the toothed mover and the second stator core; multiple groups of permanent magnet assemblies are symmetrically arranged on the top of the first stator core and the second stator core, and the two ends of the permanent magnet assemblies are respectively connected to the top of the first stator core and the top of the second stator core, so as to form four magnetic flux paths passing through the toothed mover, the air gap, the first stator core and the second stator core.

[0009] As a further improvement of the present invention, the permanent magnet assembly includes a first permanent magnet, a second permanent magnet and a connecting piece, the connecting piece is used to connect the first permanent magnet and the second permanent magnet, the first permanent magnet and the second permanent magnet have the same structure, the first permanent magnet and the second permanent magnet have opposite magnetic poles at the point where they are connected to the connecting piece, the first permanent magnet is connected to the top of the second stator core, and the second permanent magnet is connected to the top of the first stator core.

[0010] As a further improvement of the present invention, the first stator core and the second stator core are both C-type core structures, and the first stator core is arranged on the inner side of the second stator core; the coil winding includes a first coil winding, a second coil winding and a third coil winding, the third coil winding is wound at the bottom of the first stator core, and the first coil winding and the second coil winding are symmetrically wound on both sides of the second stator core.

[0011] As a further improvement of the present invention, the magnetic flux path includes a first magnetic flux path, a second magnetic flux path, a third magnetic flux path and a fourth magnetic flux path; the first permanent magnet, the second stator core, the fourth air gap, the toothed mover, the first air gap, the first stator core, the second permanent magnet and the connecting member form a first magnetic flux path;

[0012] The first permanent magnet, the second stator core, the second air gap, the toothed mover, the first air gap, the first stator core, the second permanent magnet and the connecting member form a second magnetic flux path;

[0013] The first permanent magnet, the second stator core, the second air gap, the toothed mover, the third air gap, the first stator core, the second permanent magnet and the connecting member form a third magnetic flux path;

[0014] The first permanent magnet, the second stator core, the fourth air gap, the toothed mover, the third air gap, the first stator core, the second permanent magnet and the connecting member form a fourth magnetic flux path.

[0015] As a further improvement of the present invention, the first stator core and the second stator core are both made of silicon steel sheets, iron-nickel alloy or iron-based amorphous alloy.

[0016] As a further improvement of the present invention, the first stator core and the second stator core are both connected to the coil windings by insulation.

[0017] As a further improvement of the present invention, the angle α of the toothed mover is 0° to 90°.

[0018] As a further improvement of the present invention, the first permanent magnet and the second permanent magnet are both made of neodymium iron boron or ferrite material.

[0019] As a further improvement of the present invention, the end surface tooth structures of the toothed mover, the first stator core and the second stator core are obtained by wire cutting.

[0020] Compared with the prior art, the advantages of the present invention are:

[0021] The two-axis linear enhanced Maxwell electromagnetic actuator of the present invention, through the toothed mover, permanent magnet assembly, first stator core, second stator core and coil winding, together constitutes the main structure of the actuator; and the ends of the first stator core and the second stator core are both set to be toothed, and coil windings are also set on the first stator core and the second stator core, the first stator core and the second stator core are set perpendicular to each other, the toothed mover is set at the center position of the gap of the first stator core and the second stator core, and there is an air gap between the toothed mover and the first stator core and the second stator core. By using the toothed mover and stator core with a special-shaped interface, under the same volume and weight conditions, the distance between the mover and the stator of the actuator remains unchanged, and the effective length of the working air gap is greatly reduced, thereby achieving smaller magnetic flux leakage and other nonlinearities. Furthermore, under the condition that the length of the working air gap remains unchanged, the distance between the mover and the stator is increased, and the movable stroke is expanded. At the same time, multiple groups of permanent magnet assemblies are symmetrically arranged on the top of the first stator core and the second stator core, and the two ends of the permanent magnet assemblies are respectively connected to the top of the first stator core and the top of the second stator core, so as to form four magnetic flux paths through the toothed mover, the air gap, the first stator core and the second stator core. The technical concept of separating the bias magnetic circuit and the excitation magnetic circuit is adopted to inject the magnetic flux of the permanent magnet into the mover from the working direction, thereby avoiding the generation of parasitic permanent magnetic attraction in the non-working direction. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a schematic diagram of the structural principle of a two-axis linear enhanced Maxwell electromagnetic actuator in a specific embodiment of the present invention;

[0023] Figure 2 It is a schematic diagram of the structural principle of the bias flux in a specific embodiment of the present invention;

[0024] Figure 3 It is a schematic diagram of the structural principle of the excitation magnetic flux in a specific embodiment of the present invention;

[0025] Figure 4 A schematic diagram of the structural principle of the excitation magnetic flux from another perspective in a specific embodiment of the present invention;

[0026] Figure 5 It is a schematic diagram of the principle of the tooth structure in a specific embodiment of the present invention;

[0027] Legend: 101, toothed mover; 102, permanent magnet assembly; 1021, first permanent magnet; 1022, second permanent magnet; 103, connecting piece; 104, first stator core; 105, second stator core; 1061, first coil winding; 1062, second coil winding; 107, third coil winding; 2011, first magnetic flux path; 2012, second magnetic flux path; 2013, third magnetic flux path; 2014, fourth magnetic flux path; 2021, first air gap; 2022, second air gap; 2023, third air gap; 2024, fourth air gap; 301, first excitation flux; 302, second excitation flux. DETAILED DESCRIPTION

[0028] The present invention is further described below in conjunction with the accompanying drawings and specific preferred embodiments, but the protection scope of the present invention is not limited thereby.

[0029] In the description of the present invention, it should be understood that the terms "side", "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0030] In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, "multiple" means two or more, unless otherwise clearly and specifically defined.

[0031] Example

[0032] like Figures 1 to 5As shown, the two-axis linear enhanced Maxwell electromagnetic actuator of the present invention comprises: a toothed mover 101, a permanent magnet assembly 102, a first stator core 104, a second stator core 105 and a coil winding. The ends of the first stator core 104 and the second stator core 105 are both arranged as toothed structures meshing with the toothed mover 101, the first stator core 104 and the second stator core 105 are both provided with coil windings, and the first stator core 104 and the second stator core 105 are arranged perpendicular to each other, the toothed mover 101 is located at the center of the notch of the first stator core 104 and the second stator core 105, and there is an air gap between the toothed mover 101 and the first stator core 104 and the second stator core 105. Multiple groups of permanent magnet assemblies 102 are symmetrically arranged on the top of the first stator core 104 and the second stator core 105, and the two ends of the permanent magnet assemblies 102 are respectively connected to the top of the first stator core 104 and the top of the second stator core 105, so as to form four magnetic flux paths through the toothed mover 101, the air gap, the first stator core 104 and the second stator core 105.

[0033] In this embodiment, the main structure of the actuator is formed by the toothed mover 101, the permanent magnet assembly 102, the first stator core 104, the second stator core 105 and the coil winding; and the ends of the first stator core 104 and the second stator core 105 are both set to be tooth-shaped, and coil windings are also set on the first stator core 104 and the second stator core 105, and the first stator core 104 and the second stator core 105 are set perpendicular to each other, and the toothed mover 101 is set at the center of the notch of the first stator core 104 and the second stator core 105, and there is an air gap between the toothed mover 101 and the first stator core 104 and the second stator core 105. By adopting the toothed mover 101 and the stator core with special-shaped interfaces, under the conditions of the same volume and weight, the distance between the mover and the stator of the actuator remains unchanged, and the effective length of the working air gap is greatly reduced, thereby achieving smaller magnetic flux leakage and other nonlinearities. Furthermore, when the working air gap length remains unchanged, the distance between the mover and the stator is increased, and the movable stroke is expanded. At the same time, multiple groups of permanent magnet assemblies 102 are symmetrically arranged on the top of the first stator core 104 and the second stator core 105, and the two ends of the permanent magnet assembly 102 are respectively connected to the top of the first stator core 104 and the top of the second stator core 105, so as to form a four-way magnetic flux path through the toothed mover, the air gap, the first stator core 104 and the second stator core 105. The technical concept of separating the bias magnetic circuit and the excitation magnetic circuit from each other is adopted to inject the magnetic flux of the permanent magnet into the mover from the working direction, thereby avoiding the generation of parasitic permanent magnetic attraction in the non-working direction.

[0034] like Figure 1 and Figure 2As shown, the permanent magnet assembly 102 includes a first permanent magnet 1021, a second permanent magnet 1022 and a connector 103. The connector 103 is used to connect the first permanent magnet 1021 and the second permanent magnet 1022. The first permanent magnet 1021 and the second permanent magnet 1022 have the same structure, but the first permanent magnet 1021 and the second permanent magnet 1022 have opposite magnetic poles at the connection with the connector 103. The first permanent magnet 1021 is connected to the top of the second stator core 105, and the second permanent magnet 1022 is connected to the top of the first stator core 104.

[0035] like Figure 1 As shown, the first stator core 104 and the second stator core 105 are both C-shaped core structures, and the first stator core 104 is arranged inside the second stator core 105. The coil winding includes a first coil winding 1061, a second coil winding 1062 and a third coil winding 107, the third coil winding 107 is wound at the bottom of the first stator core 104, and the first coil winding 1061 and the second coil winding 1062 are symmetrically wound on both sides of the second stator core 105.

[0036] In this embodiment, the actuator is a whole with two axes driven in parallel to achieve two-degree-of-freedom movement; the actuator includes two split first stator cores 104 and second stator cores 105, and four permanent magnet assemblies are respectively distributed at the top of the stator, and two of them act together between the air gaps, so that the magnetic flux directions in the two air gaps in the same working direction are opposite, separating the permanent magnet from the mover core, and avoiding parasitic movement in the non-working direction.

[0037] In this embodiment, the first stator core 104 and the second stator core 105 are connected to the coil windings by insulation, and an insulation layer such as paint, glue, plastic, ceramic or bushing can be provided. The direction of the output force is changed by controlling the direction of the current in each coil winding, and the magnitude of the output force is changed by controlling the magnitude of the current in each coil winding.

[0038] like Figure 1 and Figure 2 As shown, the cross section of the toothed mover 101 is a "cross" structure, there are a first air gap 2021 and a third air gap 2023 between the toothed mover 101 and the first stator core 104, and there are a second air gap 2022 and a fourth air gap 2024 between the toothed mover 101 and the second stator core 105.

[0039] In this embodiment, the end faces of the toothed mover 101 opposite to the first stator core 104 and the second stator core 105 on the front, back, left and right sides are designed as toothed structures, and the two teeth can mesh with each other. When the magnetic flux flows in the core to the toothed interface, according to the law of refraction of magnetic flux, the magnetic flux in the air will flow vertically into the next toothed interface from the toothed interface, and the path of the magnetic flux in the air, i.e., the effective length of the working air gap, is the vertical distance between the two toothed interfaces.

[0040] like Figure 2 As shown, the magnetic flux path includes a first magnetic flux path 2011, a second magnetic flux path 2012, a third magnetic flux path 2013 and a fourth magnetic flux path 2014. The first permanent magnet 1021, the second stator core 105, the fourth air gap 2024, the toothed mover 101, the first air gap 2021, the first stator core 104, the second permanent magnet 1022 and the connector 103 form the first magnetic flux path 2011.

[0041] The first permanent magnet 1021 , the second stator core 105 , the second air gap 2022 , the toothed mover 101 , the first air gap 2021 , the first stator core 104 , the second permanent magnet 1022 and the connector 103 form a second magnetic flux path 2012 .

[0042] The first permanent magnet 1021 , the second stator core 105 , the second air gap 2022 , the toothed mover 101 , the third air gap 2023 , the first stator core 104 , the second permanent magnet 1022 and the connector 103 form a third magnetic flux path 2013 .

[0043] The first permanent magnet 1021 , the second stator core 105 , the fourth air gap 2024 , the toothed mover 101 , the third air gap 2023 , the first stator core 104 , the second permanent magnet 1022 and the connector 103 form a fourth magnetic flux path 2014 .

[0044] like Figure 2As shown, the volume, magnetic properties and magnetization direction of the four permanent magnet assemblies 102 are the same, the permanent magnet poles installed on both sides of the same position of the first stator core 104 and the second stator core 105 are the same, and the permanent magnet poles connected at both ends of the connector 103 are opposite. Every two permanent magnets and the second stator core 105, the first stator core 104, the connector 103, the toothed mover 101 and the upper and left working air gaps of the mover form four closed magnetic flux paths. Among them, the first magnetic flux path 2011 passes from the first permanent magnet 1021 through the second stator core 105, the fourth air gap 2024 in the positive direction of the Y axis, the toothed mover 101, the first air gap 2021 in the positive direction of the X axis, and the second permanent magnet 1022, and then returns to the first permanent magnet 1021 via the connector 103. The second magnetic flux path 2012 passes through the second stator core 105, the second air gap 2022 in the positive direction of the Y axis, the toothed mover 101, the first air gap 2021 in the positive direction of the X axis, and the second permanent magnet 1022 from the first permanent magnet 1021, and then returns to the first permanent magnet 1021 via the connector 103. The third magnetic flux path 2013 passes through the second stator core 105, the fourth air gap 2024 in the negative direction of the Y axis, the toothed mover 101, the third air gap 2023 in the negative direction of the X axis, and the second permanent magnet 1022 from the first permanent magnet 1021, and then returns to the first permanent magnet 1021 via the connector 103. The fourth magnetic flux path 2014 passes through the second stator core 105, the fourth air gap 2024 in the positive direction of the Y axis, the toothed mover 101, the third air gap 2023 in the negative direction of the X axis, and the second permanent magnet 1022 from the first permanent magnet 1021, and then returns to the first permanent magnet 1021 via the connector 103. The magnetization direction of the first permanent magnet 1021 and the second permanent magnet 1022 is along the direction of the straight line arrow 2011-2014 where the magnetic circuit is located, and can also be magnetized in the opposite direction to form a magnetic circuit in the opposite direction, as long as the magnetization directions of the first permanent magnet 1021 and the second permanent magnet 1022 are kept the same.

[0045] In this embodiment, the stator core material has a high saturation magnetic flux density, and has low loss and low hysteresis loss under high frequency and high magnetic flux density conditions. The first stator core 104 and the second stator core 105 are made of silicon steel sheets or iron-nickel alloys or iron-based amorphous alloys. The stator core can be formed by laminating and bonding metal sheets, or by sintering. The stator core can be a whole, or it can be cut into several sections, and finally bonded or assembled by other positioning and fixing methods to facilitate the assembly of various auxiliary parts such as coil windings or permanent magnets.

[0046] like Figure 5As shown, the angle α of the toothed mover 101 is 0° to 90°. Furthermore, the tooth angle α of the toothed mover 101 is preferably 45°. In other embodiments, the tooth angle can be any angle between 0° and 90°, and the design goal should ensure that the various output performances of the actuator are optimal. When the angle of the tooth structure is designed to be α, the effective length of the working air gap is only sin(α) times the absolute distance between the toothed mover 101 and the stator core in the working direction. When the movement stroke of the toothed mover 101 is large, a smaller tooth angle α is used to obtain a smaller effective length of the working air gap, thereby improving the influence of nonlinear factors such as leakage magnetic flux and edge effect.

[0047] In this embodiment, the first permanent magnet 1021 and the second permanent magnet 1022 are both made of neodymium iron boron or ferrite materials. The magnetization directions of the first permanent magnet 1021 and the second permanent magnet 1022 are opposite to each other, that is, pointing to or facing away from the rotation center of the rotor, and parallel to the symmetry plane of the permanent magnet passing through the rotation center. The permanent magnet and the iron core can be bonded, welded or positioned and fixed with other auxiliary parts.

[0048] In this embodiment, the end face tooth structure of the toothed mover 101, the first stator core 104 and the second stator core 105 is obtained by wire cutting. In order to ensure the accuracy of the magnetic flux surface, a slow wire cutting process can be adopted, and other processing methods such as machining or injection molding can also be adopted. The tooth angle of the stator core and the toothed mover can be any angle. When the tooth angle design value is small, the number of teeth on the same end face can be multiple to ensure the compactness of the structure of the stator core and the toothed mover 101.

[0049] Working principle:

[0050] like Figure 2 As shown, taking the movement of the toothed mover 101 in the X-axis direction as an example, when the toothed mover 101 is at the center of the second stator core 105, the fourth air gap 2024 and the second air gap 2022 are equal in length, the permanent magnetic bias flux in the fourth air gap 2024 and the second air gap 2022 are opposite in direction and equal in magnitude. At this time, the Maxwell forces on the left and right end surfaces of the toothed mover 101 are equal in magnitude and opposite in direction, and the mover is in a balanced state. As shown in FIG3, when the first coil winding 1061 and the second coil winding 1062 apply a driving current, an excitation flux is generated in the second stator core 105, and the excitation flux returns to the second stator core 105 via the fourth air gap 2024, the toothed mover 101 and the second air gap 2022, forming an excitation closed magnetic circuit. When the driving current is reversed, the direction of the excitation flux is reversed.

[0051] In the fourth air gap 2024, the bias flux is in the same direction as the excitation flux, and the magnetic field superposition increases the magnetic flux density and the Maxwell force; while in the second air gap 2022, the bias flux is in the opposite direction to the excitation flux, and the magnetic field superposition reduces the magnetic flux density and reduces the Maxwell force. The difference between the left and right Maxwell forces on the toothed mover 101 is the driving force of the actuator in the X-axis direction. Similarly, in the Y-axis direction, by changing the magnitude and direction of the driving current in the third coil winding 107, the magnetic flux differential change of the third air gap 2023 and the first air gap 2021 can be achieved, so that the magnitude and direction of the driving force in the Y-axis direction can be regulated.

[0052] like Figure 3 and Figure 4 As shown, in the working air gap formed by the meshing toothed end faces of the stator core and the toothed mover, the magnetic flux is divided into two, forming a first excitation magnetic flux 301 and a second excitation magnetic flux 302. The first excitation magnetic flux 301 and the second excitation magnetic flux 302 flow out from the upper and lower half tooth interfaces respectively, and finally, the Maxwell force on the toothed mover 101 is the vector synthesis of the normal force components of the upper and lower half tooth interfaces.

[0053] In this embodiment, by adopting a technical solution of separating the bias magnetic circuit and the excitation magnetic circuit, the magnetic flux of the permanent magnet is injected into the mover from the working direction, thereby avoiding the generation of parasitic permanent magnetic attraction in the non-working direction and also avoiding parasitic displacement in the non-working direction.

[0054] The above is only a preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above embodiments. All technical solutions under the concept of the present invention belong to the protection scope of the present invention. It should be pointed out that for ordinary technicians in this technical field, some improvements and modifications without departing from the principle of the present invention should also be regarded as the protection scope of the present invention.

Claims

1. A two-axis linear enhanced Maxwell electromagnetic actuator, characterized in that: include: A toothed mover (101), a permanent magnet assembly (102), a first stator core (104), a second stator core (105), and a coil winding; the ends of the first stator core (104) and the second stator core (105) are both arranged as toothed structures meshing with the toothed mover (101); the first stator core (104) and the second stator core (105) are both provided with coil windings; the first stator core (104) and the second stator core (105) are arranged perpendicular to each other; the toothed mover (101) is located at the center of the notches of the first stator core (104) and the second stator core (105); the cross section of the toothed mover (101) is in a "cross"-shaped structure; A first air gap (2021) and a third air gap (2023) exist between the toothed mover (101) and the first stator core (104), and a second air gap (2022) and a fourth air gap (2024) exist between the toothed mover (101) and the second stator core (105); a plurality of groups of permanent magnet assemblies (102) are symmetrically arranged on the top of the first stator core (104) and the second stator core (105), and two ends of the permanent magnet assemblies (102) are respectively connected to the top of the first stator core (104) and the top of the second stator core (105), so as to form four magnetic flux paths passing through the toothed mover (101), the air gap, the first stator core (104) and the second stator core (105).

2. The two-axis linear enhanced Maxwell electromagnetic actuator according to claim 1, characterized in that: The permanent magnet assembly (102) comprises a first permanent magnet (1021), a second permanent magnet (1022) and a connecting member (103); the connecting member (103) is used to connect the first permanent magnet (1021) and the second permanent magnet (1022); the first permanent magnet (1021) and the second permanent magnet (1022) have the same structure; the first permanent magnet (1021) and the second permanent magnet (1022) have opposite magnetic poles at the point where they are connected to the connecting member (103); the first permanent magnet (1021) is connected to the top of the second stator core (105); and the second permanent magnet (1022) is connected to the top of the first stator core (104).

3. The two-axis linear enhanced Maxwell electromagnetic actuator according to claim 2, characterized in that: The first stator core (104) and the second stator core (105) are both C-shaped core structures, and the first stator core (104) is arranged inside the second stator core (105); the coil winding comprises a first coil winding (1061), a second coil winding (1062) and a third coil winding (107), the third coil winding (107) is wound on the bottom of the first stator core (104), and the first coil winding (1061) and the second coil winding (1062) are symmetrically wound on both sides of the second stator core (105).

4. The two-axis linear enhanced Maxwell electromagnetic actuator according to claim 3 is characterized in that: The magnetic flux path comprises a first magnetic flux path (2011), a second magnetic flux path (2012), a third magnetic flux path (2013) and a fourth magnetic flux path (2014); the first permanent magnet (1021), the second stator core (105), the fourth air gap (2024), the toothed mover (101), the first air gap (2021), the first stator core (104), the second permanent magnet (1022) and the connecting member (103) form the first magnetic flux path (2011); The first permanent magnet (1021), the second stator core (105), the second air gap (2022), the toothed mover (101), the first air gap (2021), the first stator core (104), the second permanent magnet (1022) and the connecting member (103) form a second magnetic flux path (2012); The first permanent magnet (1021), the second stator core (105), the second air gap (2022), the toothed mover (101), the third air gap (2023), the first stator core (104), the second permanent magnet (1022) and the connecting member (103) form a third magnetic flux path (2013); The first permanent magnet (1021), the second stator core (105), the fourth air gap (2024), the toothed mover (101), the third air gap (2023), the first stator core (104), the second permanent magnet (1022) and the connecting member (103) form a fourth magnetic flux path (2014).

5. The two-axis linear enhanced Maxwell electromagnetic actuator according to any one of claims 1 to 4, characterized in that: The first stator core (104) and the second stator core (105) are both made of silicon steel sheets, iron-nickel alloy or iron-based amorphous alloy.

6. The two-axis linear enhanced Maxwell electromagnetic actuator according to any one of claims 1 to 4, characterized in that: The first stator iron core (104) and the second stator iron core (105) are both connected to the coil winding in an insulated manner.

7. The two-axis linear enhanced Maxwell electromagnetic actuator according to any one of claims 1 to 4, characterized in that: The included angle α of the toothed mover (101) is 0° to 90°.

8. The two-axis linear enhanced Maxwell electromagnetic actuator according to any one of claims 2 to 4, characterized in that: The first permanent magnet (1021) and the second permanent magnet (1022) are both made of neodymium iron boron or ferrite material.

9. The two-axis linear enhanced Maxwell electromagnetic actuator according to any one of claims 1 to 4, characterized in that: The end surface tooth profile structures of the toothed mover (101), the first stator iron core (104) and the second stator iron core (105) are obtained by wire cutting.

Images