A cylinder structure and angle valve device

Abstract

The present application discloses a cylinder structure and an angle valve device. The cylinder structure includes a cylinder body, a first actuator, a second actuator and a locking member. Both the first actuator and the second actuator can slide relative to the cylinder body. In the first actuator, the first piston divides the accommodating cavity of the cylinder body into a first air cavity and a second air cavity. The first piston can drive the first valve stem to slide to change the volume of the first air cavity and the second air cavity. The first piston has a mounting groove. In the second actuator, the second piston and the groove wall of the mounting groove enclose a third air cavity. The second piston can drive the second valve stem to slide to change the volume of the third air cavity. The first piston is provided with a connecting hole connecting the first air cavity and the third air cavity. The locking member can move relative to the cylinder body to achieve locking and unlocking of the cylinder body with the first actuator or the second actuator. This embodiment simplifies the processing difficulty of the cylinder structure by changing the air intake path of the cylinder structure.

Description

Technical Field

[0001] The present application relates to the technical field of vacuum valves, and in particular to a cylinder structure and an angle valve device. Background Art

[0002] In the semiconductor production process, the vacuum angle valve can control the flow of the medium in the pipeline and prevent the medium in the pipeline from leaking into the atmosphere outside the pipeline (such as: chemical media in the pipeline leaking out to pollute the environment, external atmosphere entering the pipeline to destroy the original medium components in the pipeline, etc.). At the same time, it can also protect the internal components of the actuator (such as valve stems, springs, etc.) to prevent the medium in the pipeline from corroding them, that is, to ensure that the medium in the pipeline is isolated from the external environment and the actuator inside the valve.

[0003] In the related technology, the vacuum angle valve includes a cylinder, and an air intake channel needs to be opened on the cylinder to supply air to the cylinder to realize the opening and closing of different air paths inside the vacuum angle valve. Because the volume of the cylinder itself is not large and the processing position of the air intake channel is relatively narrow, there are high requirements for the drilling angle of the air intake channel on the cylinder. Summary of the invention

[0004] The embodiments of the present application provide a cylinder structure and an angle valve device, which can simplify the processing difficulty of the cylinder structure.

[0005] In a first aspect, an embodiment of the present application provides a cylinder structure for an angle valve device, the cylinder structure comprising:

[0006] A cylinder body having a containing cavity, wherein a first vent and a second vent are arranged on an outer side of the cylinder body;

[0007] A first actuator assembly includes a first piston and a first valve stem, wherein the first piston is located in the accommodating chamber and divides the accommodating chamber into a first air chamber and a second air chamber arranged along a first direction, wherein the first air chamber is communicated with the first air vent, and the second air chamber is communicated with the second air vent, wherein the first piston can slide relative to the cylinder body along the first direction to change the volumes of the first air chamber and the second air chamber, wherein the first piston has a mounting groove, wherein the first valve stem is connected to the first piston, and wherein the first valve stem passes through the first air chamber and the cylinder body to extend out of the accommodating chamber;

[0008] The second actuator assembly includes a second piston and a second valve stem, wherein the second piston is located in the installation groove and encloses a third air cavity with the groove wall of the installation groove, the second piston can slide relative to the first piston along the first direction to change the volume of the third air cavity, the first piston is provided with a connecting hole connecting the first air cavity and the third air cavity, the second valve stem is connected to the second piston, and the second valve stem passes through the first piston, the first air cavity and the cylinder body to extend out of the accommodating cavity;

[0009] A locking member is connected to the cylinder body and can move relative to the cylinder body to achieve locking and unlocking of the cylinder body with the first actuator or the second actuator.

[0010] In some embodiments of the present application, the first valve stem has a hollow cavity, the second valve stem is inserted into the hollow cavity, and the second valve stem can slide along the first direction relative to the first valve stem.

[0011] In some embodiments of the present application, a first through hole is opened on the cylinder body, the first valve stem passes through the cylinder body via the first through hole, a first sealing ring is arranged in the first through hole, and the first sealing ring abuts against the first valve stem and the hole wall of the first through hole.

[0012] In some embodiments of the present application, a guide portion extending along the first direction and away from the accommodating chamber is provided on the outer side of the cylinder body, the guide portion is arranged around the first through hole, and the first valve stem is inserted into the first through hole and the guide portion.

[0013] In some embodiments of the present application, the cylinder structure further includes a protective sleeve, wherein the protective sleeve is located between the guide portion and the first valve stem, and the protective sleeve is threadedly connected to the guide portion.

[0014] In some embodiments of the present application, the cylinder structure further includes a first elastic member extending along the first direction, one end of the first elastic member is connected to the first valve stem, and the other end of the first elastic member is connected to the second valve stem.

[0015] In some embodiments of the present application, a second sealing ring is provided between the first piston and the cylinder body; and a third sealing ring is provided between the second piston and the side wall of the mounting groove.

[0016] In a second aspect, the embodiment of the present application further provides an angle valve device, comprising:

[0017] A cylinder structure as described in any of the above embodiments;

[0018] A valve body connected to the cylinder structure, the valve body having a flow cavity and a first opening communicating with the flow cavity;

[0019] A valve assembly is arranged in the circulation chamber, and the valve assembly includes a first valve and a second valve, the first valve is connected to the first valve stem, the first valve is used to open and close the first opening, the second valve stem is connected to the second valve, and the second valve is used to open and close part of the first opening.

[0020] In some embodiments of the present application, the angle valve device also includes a second elastic member extending along the first direction, the second elastic member is arranged in the circulation cavity, one end of the second elastic member is connected to the valve body, and the other end of the second elastic member is connected to the first valve; the locking member includes a screw, and the screw is threadedly connected to the cylinder body so that the screw can abut and separate from the second actuator to achieve locking and unlocking of the cylinder body and the second actuator.

[0021] In some embodiments of the present application, a sliding groove and an air intake channel are provided on the first valve, the second valve is located in the sliding groove and is slidingly connected to the first valve along the first direction, the air intake channel connects the flow cavity with the external environment, and the second valve is used to open and close the air intake channel.

[0022] Based on the cylinder structure and angle valve device in the embodiment of the present application, this embodiment opens a connecting hole on the first piston to connect the first air chamber with the third air chamber. At the same time, through the cooperation of the locking parts, the air intake method of the third air chamber is changed, and there is no need to open a complex air flow channel for the third air chamber on the side wall of the cylinder body. In other words, this embodiment simplifies the processing difficulty of the cylinder structure by changing the air intake path of the cylinder structure. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0024] Figure 1 It is a structural schematic diagram of a cylinder in the related art;

[0025] Figure 2 This is a schematic structural diagram of a cylinder structure in one embodiment of the present application;

[0026] Figure 3 This is a schematic diagram of the structure of a part of the cylinder structure in one embodiment of the present application;

[0027] Figure 4 This is a structural schematic diagram of an angle valve device installed in a transport pipeline in one embodiment of the present application;

[0028] Figure 5 This is a structural schematic diagram of an angle valve device and a transport pipeline in one embodiment of the present application;

[0029] Figure 6 This is a schematic cross-sectional structure diagram of an angle valve device in an embodiment of the present application, in which the first opening is in a fully closed state;

[0030] Figure 7 It is a schematic cross-sectional structure diagram of a first opening of an angle valve device in an embodiment of the present application in a partially opened state;

[0031] Figure 8 This is a schematic cross-sectional structure diagram of a portion of an angle valve device in an embodiment of the present application;

[0032] Fig. 9 This is another schematic cross-sectional structure diagram of a portion of an angle valve device in one embodiment of the present application.

[0033] Reference numerals:

[0034] 1. Cylinder structure;

[0035] 10. Cylinder body; 11. Accommodating chamber; 111. First air chamber; 112. Second air chamber; 113. Third air chamber; 12. First vent; 13. Second vent; 14. Guide portion;

[0036] 20. First actuator; 21. First piston; 211. Mounting groove; 212. Communication hole; 22. First valve stem;

[0037] 30. Second actuator; 31. Second piston; 32. Second valve stem;

[0038] 40. Locking parts;

[0039] 51. first sealing ring; 52. second sealing ring; 53. third sealing ring; 54. first elastic member; 55. protective sleeve;

[0040] 2. Angle valve device;

[0041] 60. valve body; 61. flow chamber; 62. first opening; 63. second opening;

[0042] 70. valve assembly; 71. first valve; 711. sliding groove; 712. air intake passage; 72. second valve;

[0043] 81. second elastic member; 82. sealing cover;

[0044] 3. Transportation pipeline;

[0045] L1, first direction. DETAILED DESCRIPTION

[0046] In order to more clearly illustrate the technical solutions in the embodiments of the present application or related technologies, the following will be described clearly and completely in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0047] In related technologies, such as Figure 1 As shown, an air flow channel a needs to be opened on the cylinder of the vacuum angle valve to supply air to the cylinder to realize the opening and closing of different air paths inside the cylinder. Since the volume of the cylinder itself is not large and the processing position of the air flow channel a is relatively narrow, there are high requirements for the drilling angle of the air flow channel a on the cylinder, and there is a risk of punching through the side wall of the cylinder when drilling; at the same time, after the air flow channel a on the cylinder is processed, steel balls are needed to seal the opening position of the air flow channel a. This operation is cumbersome, and unstable installation of the steel balls can easily lead to air leakage or cylinder scrapping.

[0048] For the above situation, please see Figure 2-Figure 4 The present application proposes a cylinder structure 1, which is installed in an angle valve device 2 to control the opening and closing of the valve of the angle valve device 2. The cylinder structure 1 includes a cylinder body 10, a first actuator 20, a second actuator 30 and a locking member 40. Different air intake methods in the cylinder body 10 can drive different actuators to move.

[0049] like Figure 2 As shown, the cylinder body 10 has a containing chamber 11, and a first vent 12 and a second vent 13 are arranged on the outer surface of the cylinder body 10; the first actuator 20 includes a first piston 21 and a first valve stem 22, the first piston 21 is located in the containing chamber 11, and divides the containing chamber 11 into a first air chamber 111 and a second air chamber 112 arranged along a first direction L1, the first air chamber 111 is connected to the first vent 12, and the first vent 12 can allow external gas to pass into the first air chamber 111, the second air chamber 112 is connected to the second vent 13, and the second vent 13 can allow external gas to pass into the second air chamber 112. The orientation in the following embodiments takes the first direction L1 as the vertical direction, and the first air chamber 111 is located below the second air chamber 112 as an example.

[0050] The first piston 21 can slide along the first direction L1 relative to the cylinder body 10 to change the volume of the first air chamber 111 and the second air chamber 112. The first valve stem 22 is connected to the first piston 21, and the first valve stem 22 passes through the first air chamber 111 and the cylinder body 10 to extend out of the accommodating chamber 11. The sliding of the first piston 21 can drive the first valve stem 22 to slide synchronously. Exemplarily, when gas is introduced into the first air chamber 111 through the first air vent 12, the air pressure in the first air chamber 111 increases, thereby pushing the first piston 21 to slide upward, at which time the volume of the first air chamber 111 increases and the volume of the second air chamber 112 decreases; or, when gas is introduced into the second air chamber 112 through the second air vent 13, the air pressure in the second air chamber 112 increases, thereby pushing the first piston 21 to slide downward, at which time the volume of the second air chamber 112 increases and the volume of the first air chamber 111 decreases.

[0051] The first piston 21 has a mounting groove 211; the second actuator 30 includes a second piston 31 and a second valve stem 32. The second piston 31 is located in the mounting groove 211 and encloses the groove wall of the mounting groove 211 to form a third air cavity 113. The second piston 31 can slide along the first direction L1 relative to the first piston 21 to change the volume of the third air cavity 113. The first piston 21 is provided with a connecting hole 212 connecting the first air cavity 111 and the third air cavity 113. That is to say, the air pressure in the first air cavity 111 and the third air cavity 113 is the same. When gas is introduced into the first air cavity 111 through the first vent 12, the gas in the first air cavity 111 will also enter the third air cavity 113 through the connecting hole 212 on the first piston 21. The second valve stem 32 is connected to the second piston 31, and the second valve stem 32 passes through the first piston 21, the first air cavity 111 and the cylinder body 10 to extend out of the accommodating cavity 11. The sliding of the second piston 31 can drive the second valve stem 32 to slide synchronously.

[0052] The locking member 40 is connected to the cylinder body 10, and the locking member 40 can move relative to the cylinder body 10 to achieve locking and unlocking of the cylinder body 10 and the first actuator 20 or the second actuator 30. Specifically, the first actuator 20 and the second actuator 30 do not move at the same time, that is, when the first piston 21 drives the first valve stem 22 to slide, the second actuator 30 is in a stopped state, and when the second piston 31 drives the second valve stem 32 to slide, the first actuator 20 is in a stopped state.

[0053] Exemplarily, when the first actuator 20 slides and the second actuator 30 stops, a certain amount of gas can be introduced into the first vent 12, and the gas enters the first air cavity 111 and the third air cavity 113. At this time, the locking member 40 is adjusted so that the cylinder body 10 and the second actuator 30 are locked by the locking member 40. That is, at this time, the second actuator 30 is in a stopped state, and the air pressure in the first air cavity 111 and the third air cavity 113 increases, thereby pushing the first piston 21 to slide upward, thereby causing the first actuator 20 to slide upward.

[0054] Alternatively, when the second actuator 30 slides and the first actuator 20 stops, the same amount of gas can be introduced into the first vent 12 and the second vent 13 at the same time. At this time, the locking member 40 is adjusted so that the cylinder 10 and the first actuator 20 are locked by the locking member 40. That is, at this time, the first actuator 20 is in a stopped state, that is, most of the gas entering the first air chamber 111 will enter the third air chamber 113. Since the volume of the third air chamber 113 is small, the air pressure in the third air chamber 113 increases, thereby pushing the second piston 31 to slide upward (such as Figure 7 As shown), the second actuator 30 slides upward.

[0055] It should be noted that in the related art, Figure 1 As shown, the first valve stem 22 in the cylinder structure 1 is a hollow cylinder, and the first valve stem 22 is provided with an air inlet hole. The cylinder structure 1 needs to adjust the angle from the outer wall of the cylinder body 10 to drill a hole at the first valve stem 22, and open an air flow channel a from the outside of the cylinder body 10 to the air inlet hole, so that the gas can pass from the air flow channel a into the first valve stem 22, and pass into the third air cavity 113 through the hollow cylinder inside the first valve stem 22. The processing of the air flow channel a has high requirements on the drilling angle. In the embodiment of the present application, as Figure 2-Figure 3 As shown, a connecting hole 212 is opened on the first piston 21 to connect the first air chamber 111 with the third air chamber 113. At the same time, through the cooperation of the locking member 40, the air intake mode of the third air chamber 113 is changed, and there is no need to open a complex air flow channel a for the third air chamber 113 on the side wall of the cylinder body 10. That is to say, this embodiment simplifies the processing difficulty of the cylinder structure 1 by changing the air intake path of the cylinder structure 1.

[0056] In some embodiments, the locking member 40 may be two clamping members (an embodiment in which the locking member 40 is two is not shown in the figure), the clamping members can slide relative to the cylinder body 10, the first clamping member is used to clamp and separate with the first piston 21 to lock and unlock the first piston 21 with the cylinder body 10; the second clamping member is used to clamp and separate with the second piston 31 to lock and unlock the second piston 31 with the cylinder body 10. Alternatively, the locking member 40 may be two screws, the screws can rotate relative to the cylinder body 10, the first screw is used to abut and separate with the first piston 21 to lock and unlock the first piston 21 with the cylinder body 10; the second screw is used to abut and separate with the second piston 31 to lock and unlock the second piston 31 with the cylinder body 10.

[0057] In some embodiments of the present application, the first valve stem 22 has a hollow cavity, and the second valve stem 32 is inserted into the hollow cavity to reduce the space occupied by the valve stem in the cylinder 10, and the second valve stem 32 can slide relative to the first valve stem 22 along the first direction L1, and the first valve stem 22 can provide a limit and guide for the second valve stem 32 to prevent the second valve stem 32 from being displaced during the sliding process. It is easy to understand that the first valve stem 22 and the second valve stem 32 are coaxially arranged, and the first valve stem 22 and the second valve stem 32 can pass through the same hole on the cylinder 10, reducing the connection points between the cylinder 10 and the outside, thereby reducing the probability of air leakage in the cylinder 10.

[0058] See also Figure 2 In some embodiments of the present application, the cylinder structure 1 further includes a first elastic member 54 extending along the first direction L1, one end of the first elastic member 54 is connected to the first valve stem 22, and the other end of the first elastic member 54 is connected to the second valve stem 32.

[0059] It is easy to understand that the first elastic member 54 can provide an elastic force for the first valve stem 22 or the second valve stem 32, thereby facilitating the resetting of the first valve stem 22 or the second valve stem 32. For example, when the first valve stem 22 is stationary and the second valve stem 32 slides upward, the first elastic member 54 is compressed. When the second valve stem 32 loses the upward force, the first elastic member 54 can drive the second valve stem 32 to reset; or, when the second valve stem 32 is stationary and the first valve stem 22 slides upward, the first elastic member 54 is compressed. When the first valve stem 22 loses the upward force, the first elastic member 54 can also drive the first valve stem 22 to reset.

[0060] See also Figure 3In some embodiments of the present application, a first through hole (not shown in the figure) is provided on the cylinder body 10, and the first valve stem 22 passes through the cylinder body 10 via the first through hole. A first sealing ring 51 is provided in the first through hole, and the first sealing ring 51 abuts against the first valve stem 22 and the hole wall of the first through hole. Specifically, the first sealing ring 51 is conducive to improving the sealing performance of the first air cavity 111 and reducing the air leakage of the first air cavity 111. The first sealing ring 51 can be a flat sealing ring or an O-ring.

[0061] In some embodiments, Figure 3 As shown, a second sealing ring 52 is provided between the first piston 21 and the cylinder body 10, so that the first air cavity 111 and the second air cavity 112 are in a closed state, and the two air cavities exist independently and the gases cannot communicate with each other. A third sealing ring 53 is provided between the second piston 31 and the side wall of the mounting groove 211, which is conducive to improving the sealing of the third air cavity 113 and reducing air leakage, wherein the second sealing ring 52 and the third sealing ring 53 can be the same or different from the first sealing ring 51.

[0062] For further information, please see Figure 3 In some embodiments of the present application, a guide portion 14 extending along the first direction L1 and away from the accommodating chamber 11 is provided on the outer side of the cylinder body 10, the guide portion 14 is arranged around the first through hole, and the first valve stem 22 is inserted into the first through hole and the guide portion 14.

[0063] It is easy to understand that the second valve stem 32 is coaxially arranged with the first valve stem 22, so the first valve stem 22 and the second valve stem 32 are both inserted into the first through hole and the guide portion 14. The first valve stem 22 slides along the first direction L1, and the guide portion 14 can provide a limit and guide for the sliding of the first valve stem 22 to prevent the first valve stem 22 from being displaced during the sliding process.

[0064] For further information, please see Figure 3 In some embodiments of the present application, the cylinder structure 1 further includes a protective sleeve 55, for example, the protective sleeve 55 may be a copper sleeve, the protective sleeve 55 is located between the guide portion 14 and the first valve stem 22, the first valve stem 22 may contact the protective sleeve 55 during the sliding process, and the protective sleeve 55 may reduce the wear of the first valve stem 22 on the guide portion 14, thereby extending the service life of the cylinder body 10. The protective sleeve 55 is threadedly connected to the guide portion 14, thereby preventing the first valve stem 22 from driving the protective sleeve 55 to slide during the sliding process along the first direction L1, thereby improving the installation stability of the protective sleeve 55.

[0065] Second, see Figure 4-Figure 6The embodiment of the present application also provides an angle valve device 2, which is used in the production process of semiconductors. The angle valve device 2 includes a valve body 60, a valve assembly 70, and a cylinder structure 1 as in any of the above embodiments. The angle valve device 2 can be installed on the transport pipeline 3 of the semiconductor production line to control the fluid flow rate in the transport pipeline 3. The valve body 60 is connected to the cylinder structure 1, and the valve body 60 has a flow cavity 61 and a first opening 62 connected to the flow cavity 61. The first opening 62 is connected to the first end of the transport pipeline 3, and the valve body 60 also has a second opening 63. The second opening 63 is connected to the flow cavity 61 and the second end of the transport pipeline 3. The fluid in the transport pipeline 3 flows to the second opening 63, the flow cavity 61 and the first opening 62 in sequence.

[0066] The valve assembly 70 is disposed in the circulation cavity 61, and includes a first valve 71 and a second valve 72. The first valve 71 is connected to the first valve stem 22, and the first valve 71 is used to open and close the first opening 62. The second valve stem 32 is connected to the second valve 72, and the second valve 72 is used to open and close part of the first opening 62. The first valve 71 and the first valve stem 22, and the second valve 72 and the second valve stem 32 can be connected by means of clamping, screwing or welding.

[0067] Specifically, the first valve 71 and the second valve 72 are opened at different times, that is, when the first valve 71 is in an open state, the second valve 72 is in a closed state, at which time the first opening 62 is fully opened, and the angle valve device 2 is in a large flow circulation state; when the second valve 72 is in an open state, the first valve 71 is in a closed state, at which time the first opening 62 is partially opened, and the angle valve device 2 is in a small flow circulation state, and when the first valve 71 and the second valve 72 are closed at the same time, the first opening 62 is closed, and the angle valve device 2 is in a closed state.

[0068] See also Figure 6 In some embodiments of the present application, the angle valve device 2 further includes a second elastic member 81 extending along the first direction L1, the second elastic member 81 is disposed in the circulation cavity 61, one end of the second elastic member 81 is connected to the valve body 60, and the other end of the second elastic member 81 is connected to the first valve 71. The second elastic member 81 is in a compressed state, and the second elastic member 81 has a downward elastic force on the first valve 71, so the first valve 71 has a downward force on the first valve stem 22 and the first piston 21.

[0069] The locking member 40 includes a screw rod, which is threadedly connected to the cylinder body 10 so that the screw rod can abut against and separate from the second actuator 30 to achieve locking and unlocking of the cylinder body 10 and the second actuator 30. When the screw rod abuts against the second actuator 30, the screw rod can abut against the second valve stem 32, or the screw rod can also abut against the second piston 31.

[0070] In some embodiments, a second through hole is further opened on the cylinder body 10, and a nut cooperating with the screw is arranged at the second through hole. The screw and the nut are threadedly connected, and the screw can be moved along the first direction L1 by turning the screw, thereby realizing the abutment and separation of the screw and the second actuator 30.

[0071] It should be noted that when a certain amount of gas is introduced into the first air vent 12, the screw is turned so that the screw abuts against the second actuator 30, and the cylinder body 10 and the second actuator 30 are locked. At this time, the gas enters the first air cavity 111 and the third air cavity 113, and the air pressure in the first air cavity 111 and the third air cavity 113 increases, which will push the first piston 21 to slide upward (the second piston 31 is in a locked state), thereby causing the first actuator 20 to drive the first valve 71 to slide upward and fully open the first opening 62.

[0072] Or, if Figure 7-Figure 8 As shown, when the same amount of gas is introduced into the first air vent 12 and the second air vent 13 at the same time, the screw is turned to separate the screw from the second actuator 30, and the cylinder body 10 and the second actuator 30 are unlocked. At this time, the air pressure in the first air chamber 111 and the second air chamber 112 is balanced, but under the action of the second elastic member 81, the first piston 21 has a downward movement trend, so the first piston 21 can contact the bottom wall of the cylinder body 10, and most of the gas in the first air chamber 111 enters the third air chamber 113. Since the volume of the third air chamber 113 is small, the air pressure in the third air chamber 113 increases, which will push the second piston 31 to slide upward, thereby causing the second actuator 30 to drive the second valve 72 to slide upward and open part of the first opening 62.

[0073] In some embodiments, Fig. 9 As shown, a sealing cover 82 may also be provided in the circulation cavity 61 , and the sealing cover 82 is sleeved on the outer side of the second elastic member 81 , so that the second elastic member 81 can be separated from the fluid in the circulation cavity 61 , thereby reducing the influence of the fluid on the second elastic member 81 .

[0074] See also Figure 8 In some embodiments of the present application, a sliding groove 711 and an air intake channel 712 are provided on the first valve 71. The second valve 72 is located in the sliding groove 711 and is slidingly connected to the first valve 71 along the first direction L1. The air intake channel 712 connects the flow cavity 61 with the external environment. The second valve 72 is used to open and close the air intake channel 712.

[0075] It is easy to understand that the first valve 71 can close all the first openings 62, the first end of the air inlet channel 712 is connected to the circulation chamber 61, and the second end of the air inlet channel 712 is connected to the sliding groove 711. During the sliding process of the second valve 72 in the sliding groove 711, it can block or avoid the second end of the air inlet channel 712, thereby opening or closing the air inlet channel 712, that is, the first opening 62 can also be partially opened. Exemplarily, when the second valve 72 slides downward to the bottom end of the sliding groove 711, the first valve 71 blocks the second end of the air inlet channel 712, and the air inlet channel 712 is closed at this time; when the second valve 72 slides upward to the top end of the sliding groove 711, the first valve 71 avoids the second end of the air inlet channel 712, that is, the second end of the air inlet channel 712 is exposed, and the air inlet channel 712 is opened, and the circulation chamber 61 can be connected to the external environment through the air inlet channel 712, that is, the second opening 63 is partially opened.

[0076] Among them, a flat sealing ring or an O-ring is arranged between the first valve 71 and the side wall of the first opening 62 to improve the sealing performance of the first valve 71, and a flat sealing ring or an O-ring is also arranged between the second valve 72 and the bottom end of the sliding groove 711 to improve the sealing performance of the second valve 72.

[0077] The same or similar numbers in the drawings of this embodiment correspond to the same or similar parts; in the description of this application, it should be understood that if the terms "upper", "lower", "left", "right", etc. indicate directions or positional relationships based on the directions or positional relationships shown in the drawings, it is only for the convenience of describing this application and simplifying the description, and does not indicate or imply that the components or elements referred to must have a specific direction, be constructed and operated in a specific direction. Therefore, the terms describing the positional relationships in the drawings are only used for illustrative purposes and cannot be understood as limitations on this application. For ordinary technicians in this field, the specific meanings of the above terms can be understood according to specific circumstances.

[0078] The above are only preferred embodiments of the present application and are not intended to limit the present application. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present application should be included in the protection scope of the present application.

Claims

1. A cylinder structure, characterized in that: For an angle valve device, the cylinder structure comprises: A cylinder body having a containing cavity, wherein a first vent and a second vent are arranged on an outer side of the cylinder body; A first actuator assembly includes a first piston and a first valve stem, wherein the first piston is located in the accommodating chamber and divides the accommodating chamber into a first air chamber and a second air chamber arranged along a first direction, wherein the first air chamber is communicated with the first air vent, and the second air chamber is communicated with the second air vent, wherein the first piston can slide relative to the cylinder body along the first direction to change the volumes of the first air chamber and the second air chamber, wherein the first piston has a mounting groove, wherein the first valve stem is connected to the first piston, and wherein the first valve stem passes through the first air chamber and the cylinder body to extend out of the accommodating chamber; The second actuator assembly includes a second piston and a second valve stem, wherein the second piston is located in the installation groove and encloses a third air cavity with the groove wall of the installation groove, the second piston can slide relative to the first piston along the first direction to change the volume of the third air cavity, the first piston is provided with a connecting hole connecting the first air cavity and the third air cavity, the second valve stem is connected to the second piston, and the second valve stem passes through the first piston, the first air cavity and the cylinder body to extend out of the accommodating cavity; A locking member connected to the cylinder body, and the locking member can move relative to the cylinder body to achieve locking and unlocking of the cylinder body with the first actuator or the second actuator; The first actuator and the second actuator do not move simultaneously. When a certain amount of gas is introduced into the first vent, the gas enters the first air cavity and the third air cavity, and the locking member is adjusted so that the cylinder body and the second actuator are locked by the locking member. The second actuator is in a stopped state. At this time, the gas pressure in the first air cavity and the third air cavity increases to push the first piston to slide upward, so that the first actuator slides upward. When the same amount of gas is introduced into the first air vent and the second air vent, the locking member is adjusted so that the cylinder body and the first actuator are locked by the locking member, and the first actuator is in a stopped state. At this time, the air pressure in the third air chamber increases to push the second piston to slide upward, so that the second actuator slides upward.

2. The cylinder structure according to claim 1, characterized in that: The first valve stem has a hollow cavity, the second valve stem is inserted into the hollow cavity, and the second valve stem can slide along the first direction relative to the first valve stem.

3. The cylinder structure according to claim 2, characterized in that: The cylinder body is provided with a first through hole, the first valve stem passes through the cylinder body via the first through hole, a first sealing ring is provided in the first through hole, and the first sealing ring abuts against the first valve stem and the hole wall of the first through hole.

4. The cylinder structure according to claim 3, characterized in that: A guide portion extending along the first direction and away from the accommodating chamber is disposed on the outer side of the cylinder body. The guide portion is disposed around the first through hole. The first valve stem passes through the first through hole and the guide portion.

5. The cylinder structure according to claim 4, characterized in that: The cylinder structure further includes a protective sleeve, which is located between the guide portion and the first valve stem, and is threadedly connected to the guide portion.

6. The cylinder structure according to claim 1, characterized in that: The cylinder structure further includes a first elastic member extending along the first direction, one end of the first elastic member is connected to the first valve stem, and the other end of the first elastic member is connected to the second valve stem.

7. The cylinder structure according to claim 1, characterized in that: A second sealing ring is provided between the first piston and the cylinder body; A third sealing ring is arranged between the second piston and the side wall of the mounting groove.

8. An angle valve device, characterized in that: include: The cylinder structure according to any one of claims 1 to 7; A valve body connected to the cylinder structure, the valve body having a flow cavity and a first opening communicating with the flow cavity; A valve assembly is arranged in the circulation chamber, and the valve assembly includes a first valve and a second valve, the first valve is connected to the first valve stem, the first valve is used to open and close the first opening, the second valve stem is connected to the second valve, and the second valve is used to open and close part of the first opening.

9. The angle valve device according to claim 8, characterized in that: The angle valve device further includes a second elastic member extending along the first direction, the second elastic member is disposed in the flow cavity, one end of the second elastic member is connected to the valve body, and the other end of the second elastic member is connected to the first valve; The locking member includes a screw rod, and the screw rod is threadedly connected to the cylinder body so that the screw rod can abut against and separate from the second actuator assembly to achieve locking and unlocking of the cylinder body and the second actuator assembly.

10. The angle valve device according to claim 8, characterized in that: The first valve is provided with a sliding groove and an air intake channel, the second valve is located in the sliding groove and is slidably connected to the first valve along the first direction, the air intake channel connects the flow cavity with the external environment, and the second valve is used to open and close the air intake channel.

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