Axial vacuum sealing system

Abstract

The invention discloses an axial vacuum sealing system which comprises a cooling part and a shaft sealing part which are embedded in the periphery of an electron optical column sealing shaft, the two ends of the shaft sealing part are fixedly connected with the cooling part, and the cooling part is used for cooling the electron optical column sealing shaft at the two ends of the shaft sealing part and the two sides of the shaft sealing part; the shaft sealing part is a pumping and filling type sealing part so as to achieve sealing of the two sides of the electron optical column sealing shaft. The shaft sealing device has the advantages of being compact in structure, easy to operate, high in sealing performance and the like, the shaft sealing effect is remarkably improved, the shaft sealing requirement of vacuum equipment is well met, the process stability is guaranteed, and the running reliability of the equipment is improved.

Description

Technical Field

[0001] The invention belongs to the technical field of sealing components, and in particular relates to an axial vacuum sealing system. Background Art

[0002] With the rapid development of the semiconductor industry, the demand for semiconductor equipment is increasing. In order to achieve high-quality processes in the semiconductor and integrated circuit industries, extremely high requirements are placed on the vacuum degree of equipment, such as electron beam exposure, molecular beam epitaxy, PVD and other equipment. Sealing components are used to achieve vacuum, especially ultra-high vacuum (vacuum degree higher than 1×10 -5 The vacuum equipment is an indispensable part of the vacuum chamber. In order to isolate the atmosphere, it needs reliable vacuum seals at the joints of different components, the input and output terminals of power and signals, rotating shafts, windows, doors and other locations. The sealing performance of vacuum equipment is an important indicator of vacuum equipment, and it is required to limit the leakage rate within the allowable range through various sealing methods.

[0003] Commonly used sealing forms include rubber seals and metal seals. However, for working environments such as axial ultra-high vacuum and step temperature (up to 600°C or above), a specific sealing structure is required, and the effects of temperature, air permeability, air release, quality loss, pressure resistance and other performances are comprehensively considered. Conventional single sealing rings are difficult to meet the sealing requirements. Summary of the invention

[0004] The technical problem to be solved by the present invention is to provide an axial vacuum sealing system with compact structure, simple operation and high sealing performance in view of the deficiencies in the prior art.

[0005] To achieve the above object, the present invention can adopt the following technical solutions:

[0006] An axial vacuum sealing system includes a cooling component and a shaft sealing component nested in the outer periphery of an electron optical column sealing shaft, wherein both ends of the shaft sealing component are fixedly connected to the cooling component, and the cooling component is used to cool the electron optical column sealing shaft at both ends and both sides of the shaft sealing component; the shaft sealing component is a pump-filled sealing component to achieve sealing on both sides of the electron optical column sealing shaft.

[0007] As a further improvement of the present invention, the shaft sealing component includes a sealing ring, a pumping and sealing assembly, a control valve assembly and a shell; the shell is nested in the outer periphery of the electronic optical column sealing shaft, and mounting grooves are provided at both ends of the shell, the sealing ring is arranged in the mounting groove, and the two ends of the shell are in contact with the outer periphery of the electronic optical column sealing shaft through the sealing ring; the pumping and sealing assembly is arranged inside the shell, one end of the pumping and sealing assembly is connected to the mounting groove, and the other end of the pumping and sealing assembly is connected to one end of the control valve assembly, and the other end of the control valve assembly passes through the side of the shell, and the operation of the pumping and sealing assembly is controlled by the control valve assembly to realize that the mounting grooves at both ends of the shell are mutually connected or sealed and isolated.

[0008] As a further improvement of the present invention, the pumping and filling sealing assembly includes a telescopic spring, a slider, an air extraction pipe and a connecting channel; one end of the connecting channel is connected to the mounting groove, the other end of the connecting channel is connected to the control valve assembly, and a telescopic spring is provided on the upper inner side of the connecting channel; the interior of the slider is a through hollow structure, the slider is slidably arranged on the inner side of the connecting channel through the telescopic spring, and the bottom of the slider is connected to the control valve assembly through the air extraction pipe; the control valve assembly is used to control the connection channel to pump air or inflate air, so that the telescopic spring drives the slider to seal and contact the inner wall of the connecting channel or stay away from the inner wall of the connecting channel, so as to realize the sealing isolation or mutual conduction of the mounting grooves at both ends of the shell.

[0009] As a further improvement of the present invention, a through hole is further provided on the upper inner side of the connecting channel, and a fixed baffle is provided on the top of the connecting channel; when vacuuming or inflating, the top of the slider slides through the through hole to contact or move away from the fixed baffle.

[0010] As a further improvement of the present invention, the slider includes a hollow cone cylinder, and an air pipe is provided at the top of the cone cylinder. When vacuuming or inflating, the air pipe slides through the through hole to contact or move away from the fixed baffle; a connecting port is provided at the bottom of the cone cylinder, and the connecting port is used to connect the vacuum pipe.

[0011] As a further improvement of the present invention, the control valve assembly includes a ventilation valve and a connecting pipe, one end of the ventilation valve is sealed in the connecting pipe, the other end of the ventilation valve passes through the side of the shell, the connecting channel is sealed connected to the connecting pipe, and the exhaust pipe is sealed connected to the ventilation valve.

[0012] As a further improvement of the present invention, the sealing ring includes a clamping ring, a sealing ring and an adjusting spring; the inner side of the clamping ring is an arc surface matching the outer diameter of the sealing ring, and the outer sides of the clamping ring are symmetrically cut off to form a plane; the two ends of the clamping ring are connected by an adjusting spring.

[0013] As a further improvement of the present invention, the cooling component includes a cooling water channel and a refrigerant channel nested from the inside to the outside; the cooling water channel surrounds the outer circumference of the electronic optical column sealing shaft.

[0014] As a further improvement of the present invention, the cooling water channel adopts a spiral distributed structure.

[0015] As a further improvement of the present invention, the cooling component end is provided with a plurality of threaded holes, and the shell end is provided with a plurality of mounting holes; fasteners are screwed into the threaded holes and the mounting holes to achieve connection and fixation between the cooling component and the shaft sealing component.

[0016] Compared with the prior art, the advantages of the present invention are:

[0017] The axial vacuum sealing system of the present invention consists of a cooling component and a shaft sealing component nested in the outer periphery of the electron optical column sealing shaft to form the main structure of the axial vacuum sealing system. Specifically, cooling components are arranged at both ends of the shaft sealing component, and the cooling components are used to cool the electron optical column sealing shaft at both ends of the shaft sealing component and on both sides of the shaft sealing component to ensure that the shaft sealing component can perform sealing work within an tolerable temperature range, thereby improving the reliability of the seal and also helping to extend the service life of the shaft sealing component. Furthermore, the shaft sealing component adopts a pumping and charging sealing component, which has the characteristics of compact structure and simple operation, can stably and reliably achieve ultra-high vacuum, significantly improves the effect of shaft sealing, well meets the shaft sealing requirements of vacuum equipment, ensures process stability, and improves the operating reliability of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the structural principle of the axial vacuum sealing system in a specific embodiment of the present invention;

[0019] Figure 2 It is a schematic diagram of the structural principle of a cooling component in a specific embodiment of the present invention;

[0020] Figure 3 It is a schematic diagram of the structural principle of the cooling water channel in a specific embodiment of the present invention;

[0021] Figure 4 It is a schematic diagram of the structural principle of the shaft sealing component in a specific embodiment of the present invention;

[0022] Figure 5 It is a schematic diagram of the structural principle of a specific embodiment of the present invention in which the connecting channel is in a conducting state;

[0023] Figure 6 It is a schematic diagram of the structural principle of a specific embodiment of the present invention in which the connecting channel is in a sealed state;

[0024] Figure 7It is a schematic diagram of the structural principle of a sealing ring in a specific embodiment of the present invention;

[0025] Figure 8 It is a schematic diagram of the structural principle of a slider in a specific embodiment of the present invention;

[0026] Legend: 1. Cooling component; 11. Refrigerant channel; 12. Cooling water channel; 13. Threaded hole; 2. Shaft sealing component; 21. Sealing ring; 22. Pumping and sealing assembly; 23. Ventilation valve; 24. Connecting pipe; 25. Shell; 211. Clamping ring; 212. Sealing ring; 213. Adjusting spring; 221. Fixed baffle; 222. Telescopic spring; 223. Slider; 224. Pumping pipe; 225. Connecting channel; 226. Through hole; 251. Mounting groove; 252. Mounting hole; 2231. Cone; 2232. Air pipe; 2233. Connecting port; 3. Sealing shaft of electronic optical column. DETAILED DESCRIPTION

[0027] The present invention is further described below in conjunction with the accompanying drawings and specific preferred embodiments, but the protection scope of the present invention is not limited thereby.

[0028] In the description of the present invention, it should be understood that the terms "side", "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0029] In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, "multiple" means two or more, unless otherwise clearly and specifically defined.

[0030] Example

[0031] like Figures 1 to 8As shown, the axial vacuum sealing system of the present invention comprises a cooling component 1 and a shaft sealing component 2 which are nested in the outer periphery of the electron optical column sealing shaft 3. Both ends of the shaft sealing component 2 are connected and fixed to the cooling component 1, and the cooling component 1 is used to realize the cooling of the electron optical column sealing shaft 3 at both ends of the shaft sealing component 2 and on both sides of the shaft sealing component 2. The shaft sealing component 2 is a pumping sealing component to realize the sealing of both sides of the electron optical column sealing shaft 3.

[0032] In this embodiment, the main structure of the axial vacuum sealing system is formed by a cooling component 1 and a shaft sealing component 2 nested in the outer periphery of the electron optical column sealing shaft 3. Specifically, cooling components 1 are provided at both ends of the shaft sealing component 2, and the cooling component 1 is used to cool the electron optical column sealing shaft 3 at both ends of the shaft sealing component 2 and on both sides of the shaft sealing component 2 to ensure that the shaft sealing component 2 can perform sealing work within an tolerable temperature range, thereby improving the reliability of the seal and helping to extend the service life of the shaft sealing component 2. Furthermore, the shaft sealing component 2 adopts a pumping and charging sealing component, which has the characteristics of compact structure and simple operation, can stably and reliably achieve ultra-high vacuum, significantly improves the shaft sealing effect, well meets the shaft sealing requirements of vacuum equipment, ensures process stability, and improves the operating reliability of the equipment.

[0033] like Figure 4 As shown, the shaft sealing component 2 includes a sealing ring 21, a pumping and sealing assembly 22, a control valve assembly and a shell 25. The shell 25 is nested in the outer periphery of the electron optical column sealing shaft 3, and mounting grooves 251 are provided at both ends of the shell 25. The sealing ring 21 is arranged in the mounting groove 251. The two ends of the shell 25 are in contact with the outer periphery of the electron optical column sealing shaft 3 through the sealing ring 21 to achieve sealing on both sides of the electron optical column sealing shaft 3. The pumping and sealing assembly 22 is arranged inside the shell 25, one end of the pumping and sealing assembly 22 is connected to the mounting groove 251, and the other end of the pumping and sealing assembly 22 is connected to one end of the control valve assembly. The other end of the control valve assembly runs through the side of the shell 25, and the pumping and sealing assembly 22 is controlled by the control valve assembly to operate, so as to achieve mutual conduction or sealing isolation of the mounting grooves 251 at both ends of the shell 25. That is, two-stage sealing can be formed on both sides of the electron optical column sealing shaft 3, effectively ensuring that the equipment sealing can meet the requirements of ultra-high vacuum.

[0034] like Figure 5 and Figure 6As shown, the pumping and filling sealing assembly 22 includes a telescopic spring 222, a slider 223, an air extraction pipe 224 and a connecting channel 225. One end of the connecting channel 225 is connected to the mounting groove 251, and the other end of the connecting channel 225 is connected to the control valve assembly. A telescopic spring 222 is provided on the upper inner side of the connecting channel 225. The interior of the slider 223 is a through hollow structure. The slider 223 is slidably arranged on the inner side of the connecting channel 225 through the telescopic spring 222, and the bottom of the slider 223 is connected to the control valve assembly through the air extraction pipe 224. The connecting channel 225 is controlled to be evacuated or inflated by the control valve assembly, so that the telescopic spring 222 drives the slider 223 to seal and contact the inner wall of the connecting channel 225 or to be away from the inner wall of the connecting channel 225, so as to achieve the sealing isolation or mutual conduction of the mounting grooves 251 at both ends of the housing 25.

[0035] Furthermore, a through hole 226 is provided on the upper inner side of the connecting channel 225, and a fixed baffle 221 is provided on the top of the connecting channel 225. When air is pumped or inflated, the top of the slider 223 slides through the through hole 226 to contact or move away from the fixed baffle 221, thereby achieving the slider 223 sealingly contacting the inner wall of the connecting channel 225 or moving away from the inner wall of the connecting channel 225.

[0036] like Figure 8 As shown, the slider 223 includes a cone 2231 with a hollow interior, and an air pipe 2232 is provided on the top of the cone 2231. When air is pumped or inflated, the air pipe 2232 slides through the through hole 226 to contact or move away from the fixed baffle 221. A connecting port 2233 is provided at the bottom of the cone 2231, and the connecting port 2233 is used to connect the air pumping pipeline 224. Through the cooperation of the air pipe 2232, the through hole 226 and the fixed baffle 221, the controllability of the movement of the slider 223 inside the connecting channel 225 is improved, and the sealing performance is ensured.

[0037] like Figure 5 As shown, when the telescopic spring 222 is in natural extension, the outer surface of the slider 223 does not contact the inner wall of the connecting channel 225. The air extraction pipe 224 in the slider 223 is used to extract air from the mounting groove 251 area, so that the slider 223 moves toward the conical direction of the connecting channel 225, and finally the air pipe 2232 at the front end of the slider 223 is in close contact with the fixed baffle 221, and the cone 2231 is in close contact with the connecting channel 225, blocking the air extraction port. Figure 6 As shown. At this time, it is impossible to continue to evacuate air, so that the installation grooves 251 at both ends of the housing 25 are sealed and isolated. As a result, a pressure difference is formed at both ends of the slider 223, which can further ensure the sealing effect of the sealing ring 21 area. In addition, air can be inflated through the exhaust pipe 224. When the pressure reaches a certain level, the slider 223 can be pushed to move in the opposite direction, so that the installation grooves 251 at both ends of the housing 25 are connected again.

[0038] like Figure 2 As shown, the control valve assembly includes a ventilation valve 23 and a connecting pipe 24, one end of the ventilation valve 23 is sealed and arranged in the connecting pipe 24, the other end of the ventilation valve 23 passes through the side of the shell 25, the connecting channel 225 is sealed and connected to the connecting pipe 24, and the exhaust pipe 224 is sealed and connected to the ventilation valve 23. By connecting the ventilation valve 23 to the air pump, the slider 23 can be controlled to automatically evacuate or inflate. A pressure detection device can also be set between the ventilation valve 23 and the air pump. When the seal leaks, the pressure difference detection device detects that the pressure becomes larger, and the ventilation valve 23 and the air pump will automatically open, and the exhaust sealing assembly 22 will be evacuated to ensure the vacuum at the sealing shaft 3 of the electronic optical column, which improves the service life of the equipment and reduces frequent disassembly.

[0039] In this embodiment, a certain pressure difference can also be formed between the connecting channel 225 of the shaft sealing component 2 and the atmospheric environment through the ventilation valve 23, but the pressing of the slider 223 and the fixed baffle 221 must be ensured at the same time. In addition, it can be used in conjunction with the connecting pipe 24 to ensure that the pressure of the connecting channels 225 on both sides of the shaft sealing component 2 is consistent, and the sliders 223 on both sides are sealed at the same time.

[0040] like Figure 7 As shown, the sealing ring 21 includes a clamping ring 211, a sealing ring 212 and an adjusting spring 213. The inner side of the clamping ring 211 is an arc surface that matches the outer diameter of the sealing ring 212. The outer sides of the clamping ring 211 are symmetrically cut off to form a plane, which does not affect the pressure on the upper and lower ends of the sealing ring 212. The two ends of the clamping ring 211 are connected by an adjusting spring 213, and the pressure on the sealing ring 212 can be changed by adjusting the spring 213. In addition, the sealing ring 212 with a certain size deviation can also be adaptively adjusted to achieve the best sealing effect.

[0041] like Figure 3 As shown, the installation groove 251 area at both ends of the sealing housing 25 for placing the sealing ring 21 is designed as a right-angled trapezoid, and the two parallel surfaces of the trapezoid are the pressure-bearing surfaces of the sealing ring 212 in the vertical direction, avoiding the influence of the clamping ring 211 on the vertical force. The acute angle direction of the trapezoid is a narrow and long slit, which is more convenient for cooperation with the clamping ring 211 on the one hand, and can provide a gas flow channel for the pumping and sealing assembly 22 on the other hand.

[0042] like Figure 2 As shown, the cooling component 1 includes a cooling water channel 12 and a refrigerant channel 11 which are nested from the inside to the outside, and the cooling water channel 12 surrounds the outer circumference of the electron optical column sealing shaft 3.

[0043] In this embodiment, the cooling component 1 has a double-layer cooling channel, the inner channel is a cooling water channel 12, the cooling water circulates in the channel, and can cool a high temperature of 200° alone; the outer channel is located at one end of the cooling component 1 close to the sealing ring 212 and is set as a refrigerant channel 11. On the one hand, it can cool the cooling water in the cooling water channel 12 to improve the cooling effect of the inner cooling water. On the other hand, it can prevent the high temperature above 200° from being transmitted to the sealing ring 212, thereby ensuring the service life of the sealing ring 212.

[0044] like Figure 3 As shown, the cooling water channel 12 adopts a spiral distributed structure, which effectively increases the cooling length. Refrigerant is added to the refrigerant channel 11, which vaporizes at low temperature to absorb heat and produce a freezing effect, condenses at high temperature, releases heat, and takes away the heat through circulation to keep the sealing ring 212 at its appropriate temperature condition. By properly mixing cooling water and refrigerant, a constant temperature effect can be achieved.

[0045] like Figure 2 and Figure 4 As shown, the end of the cooling component 1 is provided with a plurality of threaded holes 13, and the end of the housing 25 is provided with a plurality of mounting holes 252. By screwing fasteners into the threaded holes 13 and the mounting holes 252, the cooling component 1 and the shaft sealing component 2 are connected and fixed, which has the advantages of convenient installation and reliable connection.

[0046] Although the present invention is disclosed as above with preferred embodiments, it is not intended to limit the present invention. Any technician familiar with the art can use the above disclosed methods and technical contents to make many possible changes and modifications to the technical solutions of the present invention without departing from the spirit and technical solutions of the present invention, or modify them into equivalent embodiments of equivalent changes. Therefore, any simple modification, equivalent replacement, equivalent change and modification made to the above embodiments according to the technical essence of the present invention without departing from the content of the technical solutions of the present invention still fall within the scope of protection of the technical solutions of the present invention.

Claims

1. An axial vacuum sealing system, characterized in that: The invention comprises a cooling component (1) and a shaft sealing component (2) which are nested in the outer periphery of an electron optical column sealing shaft (3); both ends of the shaft sealing component (2) are connected and fixed to the cooling component (1); the cooling component (1) is used to cool the electron optical column sealing shaft (3) at both ends of the shaft sealing component (2) and at both sides of the shaft sealing component (2); the shaft sealing component (2) is a pumpable sealing component to achieve sealing on both sides of the electron optical column sealing shaft (3).

2. The axial vacuum sealing system according to claim 1, characterized in that: The shaft sealing component (2) comprises a sealing ring (21), a pumping and sealing assembly (22), a control valve assembly and a shell (25); the shell (25) is nested in the outer periphery of the electronic optical column sealing shaft (3), and both ends of the shell (25) are provided with mounting grooves (251), the sealing ring (21) is arranged in the mounting groove (251), and both ends of the shell (25) are in contact with the outer periphery of the electronic optical column sealing shaft (3) through the sealing ring (21); the pumping and sealing assembly (22) is arranged inside the shell (25), one end of the pumping and sealing assembly (22) is connected to the mounting groove (251), and the other end of the pumping and sealing assembly (22) is connected to one end of the control valve assembly, and the other end of the control valve assembly passes through the side of the shell (25), and the operation of the pumping and sealing assembly (22) is controlled by the control valve assembly to realize that the mounting grooves (251) at both ends of the shell (25) are mutually connected or sealed and isolated.

3. The axial vacuum sealing system according to claim 2, characterized in that: The pumping and filling sealing component (22) comprises a telescopic spring (222), a slider (223), an air extraction pipeline (224) and a connecting channel (225); one end of the connecting channel (225) is connected to the mounting groove (251), and the other end of the connecting channel (225) is connected to the control valve component, and a telescopic spring (222) is provided on the upper inner side of the connecting channel (225); the interior of the slider (223) is a through hollow structure, and the slider (223) is slidably arranged on the inner side of the connecting channel (225) through the telescopic spring (222), and the bottom of the slider (223) is connected to the control valve component through the air extraction pipeline (224); the connecting channel (225) is controlled to be pumped or filled with air through the control valve component, so that the telescopic spring (222) drives the slider (223) to seal and contact the inner wall of the connecting channel (225) or to be away from the inner wall of the connecting channel (225), so as to achieve the sealing isolation or mutual conduction of the mounting grooves (251) at both ends of the shell (25).

4. The axial vacuum sealing system according to claim 3, characterized in that: A through hole (226) is also provided on the upper inner side of the connecting channel (225), and a fixed baffle (221) is provided on the top of the connecting channel (225); when air is pumped or inflated, the top of the slider (223) slides through the through hole (226) to contact or move away from the fixed baffle (221).

5. The axial vacuum sealing system according to claim 3, characterized in that: The slider (223) comprises a conical cylinder (2231) with a hollow interior, an air pipe (2232) being provided at the top of the conical cylinder (2231), and when air is exhausted or inflated, the air pipe (2232) slides through the through hole (226) to contact or move away from the fixed baffle (221); a connecting port (2233) is provided at the bottom of the conical cylinder (2231), and the connecting port (2233) is used to connect to the air extraction pipeline (224).

6. The axial vacuum sealing system according to claim 3, characterized in that: The control valve assembly comprises a ventilation valve (23) and a connecting pipe (24), one end of the ventilation valve (23) is sealed and arranged in the connecting pipe (24), the other end of the ventilation valve (23) penetrates the side of the shell (25), the connecting channel (225) is sealed and connected to the connecting pipe (24), and the exhaust pipe (224) is sealed and connected to the ventilation valve (23).

7. The axial vacuum sealing system according to any one of claims 2 to 6, characterized in that: The sealing ring (21) comprises a clamping ring (211), a sealing ring (212) and an adjusting spring (213); the inner side of the clamping ring (211) is an arc surface matching the outer diameter of the sealing ring (212), and the outer sides of the clamping ring (211) are symmetrically cut off to form a plane; the two ends of the clamping ring (211) are connected by an adjusting spring (213).

8. The axial vacuum sealing system according to any one of claims 1 to 6, characterized in that: The cooling component (1) comprises a cooling water channel (12) and a refrigerant channel (11) which are nested from the inside to the outside; the cooling water channel (12) surrounds the outer circumference of the electronic optical column sealing shaft (3).

9. The axial vacuum sealing system according to claim 8, characterized in that: The cooling water channel (12) adopts a spiral distributed structure.

10. The axial vacuum sealing system according to any one of claims 2 to 6, characterized in that: The cooling component (1) is provided with a plurality of threaded holes (13) at the end thereof, and the housing (25) is provided with a plurality of mounting holes (252) at the end thereof; fasteners are screwed into the threaded holes (13) and the mounting holes (252) to achieve connection and fixation between the cooling component (1) and the shaft sealing component (2).

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