Foot margin supporting structure of semiconductor-grade aluminum cavity and adjusting method of foot margin supporting structure

Abstract

The invention discloses a ground foot supporting structure of a semiconductor grade aluminum cavity, which comprises a supporting frame, the supporting frame comprises a supporting part, the supporting part is connected with a moving roller and a lifting supporting foot, the lifting supporting foot can lift relative to the supporting frame, and the lifting supporting foot comprises a lifting column connected with the supporting frame. According to the ground foot supporting structure of the semiconductor-grade aluminum cavity, after transferring is finished, the supporting effect of the lifting supporting feet and the movable rolling wheels on the supporting frame is switched, so that flexible switching between rapid moving and stable supporting of the supporting frame is achieved, the production efficiency is improved, and the production cost is reduced. And subsequent processing can be directly carried out on the support frame.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and in particular to a ground support structure of a semiconductor-grade aluminum cavity and an adjustment method thereof. Background Art

[0002] With the rapid development of the semiconductor industry, the demand for semiconductor equipment is increasing day by day. However, in order to ensure the normal operation of semiconductor-level cavities, it is often necessary to place the cavities separately in an area to ensure that the inside and outside of the cavities reach a certain degree of cleanliness and stability. On this basis, the support structure is crucial for the cavity. Since the cavity may move, vibrate, generate heat, and conduct electricity during operation, the support structure is no longer just a supporting role, but often needs to take into account the important functions of movement, shock absorption, fixation, heat dissipation, conduction, and additional assembly.

[0003] For example, the publication number "CN116750071A" discloses "a shock absorbing mechanism and method for operating semiconductor devices", including a cart, a vibration sensor, a vibration controller, a vibration alarm device, a vibration reduction device, and an anti-vibration intervention device; the vibration sensor is composed of multiple detectors, which are distributed to the rollers of the cart and the bottom of the cart to collect vibration signals; the vibration alarm device is arranged on the vibration controller; the vibration sensor, the vibration alarm device, the vibration reduction device, and the anti-vibration intervention device are all electrically connected to the vibration controller. However, in actual applications, the device can only be used for the transfer of devices, and cannot maintain a fixed effect for subsequent processing. Therefore, there will be actions that require multiple moves of the device, thereby reducing production efficiency and not being easy to maintain the stability and production accuracy of high-precision devices. Summary of the invention

[0004] In view of the problem in the prior art mentioned in the background technology that the support frame cannot maintain a fixed effect, the present invention provides a ground support structure for a semiconductor-grade aluminum cavity, which can achieve flexible switching of rapid movement of the support frame and stable support by switching the support effects of the lifting feet and moving rollers on the support frame after the transfer is completed, thereby improving production efficiency and enabling subsequent processing to be carried out directly on the support frame.

[0005] To achieve the above objectives, the present invention adopts the following technical solutions.

[0006] A ground support structure for a semiconductor-grade aluminum cavity includes a support frame, the support frame includes a support portion, the support portion is connected to a movable roller and a lifting foot, the lifting foot can be lifted relative to the support frame, and the lifting foot includes a lifting column connected to the support frame.

[0007] In the prior art, in order to ensure the normal operation of the semiconductor-level cavity, it is often necessary to place the cavity separately in an area to ensure that the inside and outside of the cavity reach a certain degree of cleanliness and stability. On this basis, the support structure is crucial to the cavity. Since the cavity may move, vibrate, generate heat, and conduct electricity during operation, the support structure no longer just plays a supporting role, but often needs to take into account the functions of movement, shock absorption, fixation, heat dissipation, conduction, and additional assembly. However, the traditional mobile device and support device need to have mobile flexibility and support stability respectively, so they cannot be integrated into one. After being transferred to the designated workstation by the mobile device, the cavity needs to be transferred to the support device for processing, which will increase the transfer process. At the same time, the positioning accuracy and stability of the cavity will be affected during the transfer process, which affects the production quality.

[0008] Therefore, in the present application, a supporting part is provided on the supporting frame, and the supporting part is generally provided at the four corners of the supporting frame, wherein movable rollers and lifting legs are provided on the supporting part, and further, the lifting legs can be lifted up and down relative to the supporting frame; therefore, during use, when the lifting legs are raised, the ground and the supporting frame are in contact only through the movable rollers, so that the supporting frame can obtain the ability to move flexibly, and when the supporting frame moves to the specified position, the lifting column is adjusted to abut against the ground, so that the flexible rotation effect between the movable roller and the ground disappears, and the supporting stability of the supporting frame relative to the ground is maintained by the lifting legs, so that the supporting frame can be directly used as a processing platform after moving to the specified position, and the functional switching of the supporting frame is completed after the stability effect is maintained by the lifting legs. In this process, the movement of the product on the supporting frame is avoided, thereby maintaining the positioning accuracy between the supporting frame and the product, avoiding repeated positioning, and reducing the number of times the product is moved, thereby improving production efficiency. And because the lifting legs can be raised and lowered individually, even if the ground at a designated location is uneven to varying degrees, it can be adapted to by adjusting the lifting heights of different lifting legs.

[0009] Preferably, the lifting column is connected to a universal foot, and the universal foot can be universally rotated relative to the lifting column. The lifting support leg also includes a lifting column, and the lifting column and the universal foot are universally rotatably connected, so that the universal foot can rotate at multiple angles relative to the lifting column, and can adapt to uneven ground, thereby ensuring a stable supporting effect.

[0010] Preferably, the support frame includes a plurality of single base tubes, and a connecting seat is connected between adjacent single base tubes, the connecting seat is arranged at the corner of the support frame, and the lifting foot is arranged on the connecting seat. The lifting foot is arranged on the connecting seat for easy assembly and subsequent replacement and maintenance.

[0011] Preferably, the lifting column is connected with an adjusting bolt, through which the tightness of the lifting column can be adjusted, and the relative position of the lifting column with respect to the support frame can be controlled, so as to ensure that the lifting column can maintain a relatively fixed position with the support frame after adjustment, thereby ensuring the tightness of the lifting column.

[0012] Preferably, the movable roller includes a mounting seat, a roller seat is rotatably connected to the mounting seat, and a roller unit is rotatably connected to the roller seat. The movable roller includes a mounting seat, which is connected to the support frame through the mounting seat, and the roller seat is rotatably connected to the mounting seat, thereby avoiding directly connecting the roller seat to the support frame, thereby improving the flexibility of installation and facilitating subsequent maintenance of the movable roller.

[0013] Preferably, the mounting seat comprises a fixing frame, an adjusting column is movably connected to the fixing frame, and a fastening nut is arranged on the adjusting column. The movable roller can be adjusted up and down by the adjusting column and the fastening nut, thereby ensuring the flexibility of the movable roller.

[0014] Preferably, the support frame includes a support column, and the movable roller includes a mounting seat, the mounting seat is rotatably connected to the support column, and the mounting seat can drive the movable roller to rotate around the support column. The mounting seat is rotatably connected to the support column, wherein the mounting seat extends laterally, so that the contact position of the movable roller with the ground is offset from the axis of the support column by a distance, and because the mounting seat can rotate relative to the support column to form a fan-shaped interval, it can drive the movable roller to adjust within an arc interval, so that the contact position between the movable roller and the ground can be adjusted on the basis of the support frame maintaining the specified position unchanged. Therefore, the contact between the movable roller and the uneven ground can be avoided by adjusting the position of the movable roller at the specified position of the support frame, thereby ensuring that the four movable rollers can all contact the flat ground, thereby ensuring that the support frame is kept in a horizontal placement state, thereby ensuring the stability of the product placement.

[0015] This embodiment also discloses a regulation method, which includes the following steps: S1. Retract the lifting legs upwards and lift them off the ground; S2. Keep only the moving roller in contact with the ground and move the support frame to the specified position. S3. Keep the support frame fixed, move the lifting bracket, and make the lifting feet touch the ground.

[0016] By flexibly switching the lifting legs during movement and processing, it can adapt to different usage scenarios, allowing the support frame to be used for multiple purposes, avoiding the need for additional product transfer steps after the product is moved, thereby improving production efficiency and avoiding repeated product positioning, ensuring the placement stability of the product during transfer and subsequent processing.

[0017] Preferably, in step S3, the universal foot is rotated relative to the lifting column and is in contact with the ground. In step S3, since the universal foot can be universally rotated relative to the lifting column, the orientation position of the universal foot can be flexibly set, so that the universal foot can adapt to different ground undulations, ensuring the maximum contact area with the ground, thereby ensuring the stability of the support.

[0018] Preferably, in step S2, after moving to the designated position, the mounting seat is rotated relative to the support column, and the moving roller is controlled to contact with the flat ground, and the support frame is kept horizontally placed before proceeding to step S3. In step S2, when the support frame moves to the designated position, if the contact points between the four moving rollers and the ground are not on the same horizontal plane at this time, the entire support frame will be tilted, which will affect the adjustment accuracy of the subsequent upgrade legs and the stability of the product placement at this time. Therefore, the contact points between the moving rollers and the ground can be adjusted by the mounting seat rotatably connected to the support column, so that the four moving rollers are kept on the same horizontal plane as much as possible, which is convenient for adjusting the lifting legs and the ground.

[0019] The beneficial effects of the present invention are as follows: (1) After the transfer is completed, the supporting effect of the support frame can be switched between the lifting legs and the moving rollers, thereby realizing the flexible switching between the rapid movement of the support frame and the stable support, thereby improving the production efficiency and enabling subsequent processing to be performed directly on the support frame; (2) It can ensure that when the support frame is placed on an undulating ground, the stability of the support frame body can be maintained, thereby facilitating subsequent adjustment of the lifting legs. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is an axonometric view of the present invention.

[0021] Figure 2 yes Figure 1 A partial enlarged view of point A in the middle.

[0022] Figure 3 It is a front view of the present invention.

[0023] Figure 4 This is an axonometric view of Example 3.

[0024] In the figure: 1 support frame, 11 support part, 12 single base tube, 13 connecting seat, 14 support column; 2 moving roller, 21 mounting seat, 211 fixing frame, 212 adjusting column, 213 fastening nut, 22 roller seat, 23 roller unit; 3 lifting support foot, 31 lifting column, 311 adjusting bolt, 32 universal foot. DETAILED DESCRIPTION

[0025] The present invention is further described below in conjunction with the accompanying drawings and specific embodiments.

[0026] Embodiment 1: In the prior art, in order to ensure the normal operation of the semiconductor-level cavity, it is often necessary to place the cavity separately in an area to ensure that the inside and outside of the cavity reach a certain degree of cleanliness and stability. On this basis, the support structure is crucial to the cavity. Since the cavity may move, vibrate, generate heat, and conduct electricity during operation, the support structure no longer just plays a supporting role, but often needs to take into account the functions of movement, shock absorption, fixation, heat dissipation, conduction, and additional assembly. However, the traditional mobile device and support device need to have mobile flexibility and support stability respectively, so they cannot be integrated into one. After being transferred to the designated workstation by the mobile device, it is necessary to transfer the cavity to the support device before processing, which will increase the transfer process. At the same time, the positioning accuracy and stability of the cavity will be affected during the transfer process, which will affect the production quality. In this embodiment, the problems in the prior art are solved through the following structure.

[0027] like Figure 1 , 2 As shown in Figure 3, a ground support structure of a semiconductor-grade aluminum cavity includes a support frame 1, the support frame 1 includes a support portion 11, the support portion 11 is connected to a movable roller 2 and a lifting foot 3, the lifting foot 3 can be lifted and lowered relative to the support frame 1, and the lifting foot 3 includes a lifting column 31 connected to the support frame 1.

[0028] Therefore, in the present application, a support portion 11 is provided on the support frame 1, and the support portion 11 is generally provided at the four corners of the support frame 1, wherein a movable roller 2 and a lifting foot 3 are provided on the support portion 11, and further, the lifting foot 3 can be lifted up and down relative to the support frame 1; therefore, during use, when the lifting foot 3 is raised, the ground and the support frame 1 are in contact only through the movable roller 2, so that the support frame 1 can obtain the ability to move flexibly, and when the support frame 1 moves to the specified position, the lifting column 31 is adjusted so that the lifting column 31 is abutted against the ground, so that the flexible rotation effect between the movable roller 2 and the ground disappears, and the support stability of the support frame 1 relative to the ground is maintained by the lifting foot 3, so that the support frame 1 can be directly used as a processing platform after it moves to the specified position, and after the stability effect is maintained by the lifting foot 3, the function switching of the support frame 1 is completed, and in this process, the movement of the product on the support frame 1 is avoided, thereby maintaining the positioning accuracy between the support frame 1 and the product, avoiding repeated positioning, and reducing the number of product movements, thereby improving production efficiency. Furthermore, since the lifting legs 3 can be raised and lowered individually, even if the ground at a designated location is uneven to varying degrees, the lifting heights of the different lifting legs 3 can be adjusted to accommodate the unevenness.

[0029] like Figure 1 , 2 As shown in Figure 3, the lifting column 31 is connected to a universal foot 32, and the universal foot 32 can be universally rotated relative to the lifting column 31. The lifting support leg 3 also includes a lifting column 31, and the lifting column 31 is universally rotatably connected to the universal foot 32, so that the universal foot 32 can be rotated at multiple angles relative to the lifting column 31, and can adapt to uneven ground, thereby ensuring a stable supporting effect.

[0030] like Figure 2 As shown, the support frame 1 includes a plurality of single base tubes 12, and a connecting seat 13 is connected between adjacent single base tubes. The connecting seat 13 is arranged at the corner of the support frame 1, and the lifting foot 3 is arranged on the connecting seat 13. The lifting foot 3 is arranged on the connecting seat 13, which is convenient for assembly and subsequent replacement and maintenance.

[0031] like Figure 2 As shown, an adjusting bolt 311 is connected to the lifting column 31. Through the adjusting bolt 311 on the lifting column 31, the tightness of the lifting column 31 can be adjusted, and the relative position of the lifting column 31 with respect to the support frame 1 can be controlled to ensure that the lifting column 31 can maintain a relatively fixed position with the support frame 1 after adjustment, thereby ensuring the tightness of the lifting column 31.

[0032] like Figure 2 , 3As shown, the mobile roller 2 includes a mounting seat 21, a roller seat 22 is rotatably connected to the mounting seat 21, and a roller unit 23 is rotatably connected to the roller seat 22. The mobile roller 2 includes a mounting seat 21, which is connected to the support frame 1 through the mounting seat 21, and the roller seat 22 is rotatably connected through the mounting seat 21, thereby avoiding directly connecting the roller seat 22 to the support frame 1, thereby improving the flexibility of installation and facilitating subsequent maintenance of the mobile roller 2.

[0033] like Figure 2 , 3 As shown, the mobile roller 2 includes a fixing frame 211, and an adjusting column 212 is movably connected to the fixing frame 211, and a fastening nut 213 is provided on the adjusting column 212. Through the adjusting column 212 and the fastening nut 213, the mobile roller 2 can be adjusted up and down, thereby ensuring the flexibility of the mobile roller 2.

[0034] Embodiment 2: This embodiment discloses a regulation method, which includes the following steps: S1, retract the lifting foot 3 upwards, and the lifting foot 3 is off the ground; S2, keep only the moving roller 2 in contact with the ground and move the support frame 1 to the specified position S3, keeping the support frame 1 fixed, moving the lifting bracket, and making the lifting foot 3 contact the ground.

[0035] By flexibly switching the lifting legs 3 during movement and processing, it can adapt to different usage scenarios, allowing the support frame 1 to be used for multiple purposes, avoiding the need for additional product transfer steps after the product is moved, thereby improving production efficiency and avoiding repeated product positioning, ensuring the placement stability of the product during transfer and subsequent processing.

[0036] In step S3, the universal foot 32 is rotated relative to the lifting column 31 and is in contact with the ground. In step S3, since the universal foot 32 can be universally rotated relative to the lifting column 31, the orientation position of the universal foot 32 can be flexibly set, so that the universal foot 32 can adapt to different ground undulations, ensuring the maximum contact area with the ground, thereby ensuring the stability of the support.

[0037] This embodiment uses a ground support structure for a semiconductor-grade aluminum cavity, including a support frame 1, the support frame 1 includes a support portion 11, the support portion 11 is connected to a moving roller 2 and a lifting foot 3, the lifting foot 3 can be lifted relative to the support frame 1, and the lifting foot 3 includes a lifting column 31 connected to the support frame 1. The lifting column 31 is connected to a universal foot 32, and the universal foot 32 can rotate universally relative to the lifting column 31. The support frame 1 includes a plurality of single base tubes 12, and a connecting seat 13 is connected between adjacent single base tubes. The connecting seat 13 is arranged at the corner of the support frame 1, and the lifting foot 3 is arranged on the connecting seat 13. An adjusting bolt 311 is connected to the lifting column 31. The moving roller 2 includes a mounting seat 21, a roller seat 22 is rotatably connected to the mounting seat 21, and a roller unit 23 is rotatably connected to the roller seat 22. The movable roller 2 includes a fixing frame 211 , an adjusting column 212 is movably connected to the fixing frame 211 , and a fastening nut 213 is provided on the adjusting column 212 .

[0038] In the prior art, in order to ensure the normal operation of the semiconductor-level cavity, it is often necessary to place the cavity separately in an area to ensure that the inside and outside of the cavity reach a certain degree of cleanliness and stability. On this basis, the support structure is crucial to the cavity. Since the cavity may move, vibrate, generate heat, and conduct electricity during operation, the support structure no longer just plays a supporting role, but often needs to take into account the functions of movement, shock absorption, fixation, heat dissipation, conduction, and additional assembly. However, the traditional mobile device and support device need to have mobile flexibility and support stability respectively, so they cannot be integrated into one. After being transferred to the designated workstation by the mobile device, the cavity needs to be transferred to the support device for processing, which will increase the transfer process. At the same time, the positioning accuracy and stability of the cavity will be affected during the transfer process, which affects the production quality.

[0039] Therefore, in this embodiment, a support portion 11 is provided on the support frame 1, and the support portion 11 is generally provided at the four corners of the support frame 1, wherein a movable roller 2 and a lifting foot 3 are provided on the support portion 11, and further, the lifting foot 3 can be lifted up and down relative to the support frame 1; therefore, during use, when the lifting foot 3 is raised, the ground and the support frame 1 are in contact only through the movable roller 2, so that the support frame 1 can obtain the ability to move flexibly, and when the support frame 1 moves to the specified position, the lifting column 31 is adjusted so that the lifting column 31 is abutted against the ground, so that the flexible rotation effect between the movable roller 2 and the ground disappears, and the support stability of the support frame 1 relative to the ground is maintained by the lifting foot 3, so that the support frame 1 can be directly used as a processing platform after it moves to the specified position, and after the stability effect is maintained by the lifting foot 3, the function switching of the support frame 1 is completed, and in this process, the movement of the product on the support frame 1 is avoided, thereby maintaining the positioning accuracy between the support frame 1 and the product, avoiding repeated positioning, and reducing the number of product movements, thereby improving production efficiency. Furthermore, since the lifting legs 3 can be raised and lowered individually, even if the ground at a designated location is uneven to varying degrees, the lifting heights of the different lifting legs 3 can be adjusted to accommodate the unevenness.

[0040] The lifting support leg 3 also includes a lifting column 31, and the lifting column 31 is universally connected to the universal foot 32, so that the universal foot 32 can rotate at multiple angles relative to the lifting column 31, and can adapt to uneven ground, thereby ensuring a stable support effect. The lifting support leg 3 is set on the connecting seat 13, which is convenient for assembly and subsequent replacement and maintenance. The adjustment bolt 311 on the lifting column 31 can adjust the tightness of the lifting column 31, and control the relative position of the lifting column 31 relative to the support frame 1, so as to ensure that the lifting column 31 can maintain a relatively fixed position with the support frame 1 after adjustment, and ensure the tightness of the lifting column 31. The moving roller 2 includes a mounting seat 21, which is connected to the support frame 1 through the mounting seat 21, and the roller seat 22 is rotatably connected through the mounting seat 21, so as to avoid directly connecting the roller seat 22 to the support frame 1, thereby improving the flexibility of installation and facilitating the subsequent maintenance of the moving roller 2. The movable roller 2 can be adjusted up and down by adjusting the column 212 and the fastening nut 213 , thereby ensuring the flexibility of the movable roller 2 .

[0041] Embodiment 3: like Figure 4As shown, different from the embodiment 1, the support frame 1 in this embodiment includes a support column 14, and the movable roller 2 includes a mounting seat 21, and the mounting seat 21 is rotatably connected to the support column 14, and the mounting seat 21 can drive the movable roller 2 to rotate around the support column 14. In this embodiment, the support column is set to a circular structure, and the mounting seat 21 is sleeved on the support column, wherein the connection between the mounting seat and the support column is connected through a roller bearing, so as to improve the flexibility of rotation, and at the same time, a step structure is set on the support column, and a plane thrust bearing is set between the step structure and the mounting seat, so as to further ensure the flexibility of rotation.

[0042] The mounting seat 21 is rotatably connected to the support column 14, wherein the mounting seat 21 extends horizontally, so that the contact position of the moving roller 2 with the ground is offset from the axis of the support column 14 by a distance, and since the mounting seat 21 can rotate relative to the support column 14 to form a fan-shaped interval, it can drive the moving roller 2 to adjust within an arc interval, so that the contact position between the moving roller 2 and the ground can be adjusted on the basis of the support frame 1 maintaining the specified position unchanged. Therefore, the contact between the moving roller 2 and the uneven ground can be avoided by adjusting the position of the moving roller 2 at the specified position of the support frame 1, thereby ensuring that the four moving rollers 2 can all contact the flat ground, thereby ensuring that the support frame 1 is kept in a horizontal placement state, thereby ensuring the stability of the product placement.

[0043] Different from the adjustment method in Example 2, in step S2 of this embodiment, after moving to the specified position, the mounting seat 21 is rotated relative to the support column 14 to control the moving roller 2 to contact the flat ground, and the support frame 1 is kept horizontally placed before proceeding to step S3. In step S2, after the support frame 1 moves to the specified position, if the contact points between the four moving rollers 2 and the ground are not on the same horizontal plane at this time, the entire support frame 1 will be tilted, which will affect the adjustment accuracy of the subsequent upgrade legs and the stability of the product placement at this time. Therefore, the contact point between the moving roller 2 and the ground can be adjusted by the mounting seat 21 rotatably connected to the support column 14, so that the four moving rollers 2 are kept on the same horizontal plane as much as possible, which is convenient for adjusting the lifting legs 3 and the ground.

[0044] This embodiment uses a ground support structure of a semiconductor-grade aluminum cavity, including a support frame 1, the support frame 1 includes a support portion 11, the support portion 11 is connected to a moving roller 2 and a lifting foot 3, the lifting foot 3 can be lifted relative to the support frame 1, and the lifting foot 3 includes a lifting column 31 connected to the support frame 1. The lifting column 31 is connected to a universal foot 32, and the universal foot 32 can rotate universally relative to the lifting column 31. The support frame 1 includes a plurality of single base tubes 12, and a connecting seat 13 is connected between adjacent single base tubes. The connecting seat 13 is arranged at the corner of the support frame 1, and the lifting foot 3 is arranged on the connecting seat 13. The lifting column 31 is connected to an adjusting bolt 311. The moving roller 2 includes a mounting seat 21, a roller seat 22 is rotatably connected to the mounting seat 21, and a roller unit 23 is rotatably connected to the roller seat 22. The moving roller 2 includes a fixing frame 211, and an adjusting column 212 is movably connected to the fixing frame 211, and a fastening nut 213 is arranged on the adjusting column 212.

[0045] In the prior art, in order to ensure the normal operation of the semiconductor-level cavity, it is often necessary to place the cavity separately in an area to ensure that the inside and outside of the cavity reach a certain degree of cleanliness and stability. On this basis, the support structure is crucial to the cavity. Since the cavity may move, vibrate, generate heat, and conduct electricity during operation, the support structure no longer just plays a supporting role, but often needs to take into account the functions of movement, shock absorption, fixation, heat dissipation, conduction, and additional assembly. However, the traditional mobile device and support device need to have mobile flexibility and support stability respectively, so they cannot be integrated into one. After being transferred to the designated workstation by the mobile device, the cavity needs to be transferred to the support device for processing, which will increase the transfer process. At the same time, the positioning accuracy and stability of the cavity will be affected during the transfer process, which affects the production quality.

[0046] Therefore, in this embodiment, a support portion 11 is provided on the support frame 1, and the support portion 11 is generally provided at the four corners of the support frame 1, wherein a movable roller 2 and a lifting foot 3 are provided on the support portion 11, and further, the lifting foot 3 can be lifted up and down relative to the support frame 1; therefore, during use, when the lifting foot 3 is raised, the ground and the support frame 1 are in contact only through the movable roller 2, so that the support frame 1 can obtain the ability to move flexibly, and when the support frame 1 moves to the specified position, the lifting column 31 is adjusted so that the lifting column 31 is abutted against the ground, so that the flexible rotation effect between the movable roller 2 and the ground disappears, and the support stability of the support frame 1 relative to the ground is maintained by the lifting foot 3, so that the support frame 1 can be directly used as a processing platform after it moves to the specified position, and after the stability effect is maintained by the lifting foot 3, the function switching of the support frame 1 is completed, and in this process, the movement of the product on the support frame 1 is avoided, thereby maintaining the positioning accuracy between the support frame 1 and the product, avoiding repeated positioning, and reducing the number of product movements, thereby improving production efficiency. Furthermore, since the lifting legs 3 can be raised and lowered individually, even if the ground at a designated location is uneven to varying degrees, the lifting heights of the different lifting legs 3 can be adjusted to accommodate the unevenness.

[0047] The lifting support leg 3 also includes a lifting column 31, and the lifting column 31 is universally connected to the universal foot 32, so that the universal foot 32 can rotate at multiple angles relative to the lifting column 31, and can adapt to uneven ground, thereby ensuring a stable support effect. The lifting support leg 3 is set on the connecting seat 13, which is convenient for assembly and subsequent replacement and maintenance. The adjustment bolt 311 on the lifting column 31 can adjust the tightness of the lifting column 31, and control the relative position of the lifting column 31 relative to the support frame 1, so as to ensure that the lifting column 31 can maintain a relatively fixed position with the support frame 1 after adjustment, and ensure the tightness of the lifting column 31. The movable roller 2 includes a mounting seat 21, which is connected to the support frame 1 through the mounting seat 21, and the roller seat 22 is rotatably connected through the mounting seat 21, so as to avoid directly connecting the roller seat 22 to the support frame 1, thereby improving the flexibility of installation and facilitating the subsequent maintenance of the movable roller 2. The movable roller 2 can be adjusted up and down by adjusting the column 212 and the fastening nut 213 , thereby ensuring the flexibility of the movable roller 2 .

Claims

1. A ground support structure for a semiconductor-grade aluminum cavity, characterized in that: The invention comprises a support frame (1), wherein the support frame (1) comprises a support portion (11), wherein the support portion (11) is connected to a movable roller (2) and a lifting support foot (3), wherein the lifting support foot (3) can be lifted relative to the support frame (1), and wherein the lifting support foot (3) comprises a lifting column (31) connected to the support frame (1).

2. The anchor support structure of a semiconductor-grade aluminum cavity according to claim 1, characterized in that: The lifting column (31) is connected to a universal foot (32), and the universal foot (32) can rotate in universal directions relative to the lifting column (31).

3. The anchor support structure of a semiconductor-grade aluminum cavity according to claim 1, characterized in that: The support frame (1) comprises a plurality of single base tubes (12), and connecting seats (13) are connected between adjacent single base tubes (12). The connecting seats (13) are arranged at the corners of the support frame (1), and the lifting legs (3) are arranged on the connecting seats (13).

4. The anchor support structure of a semiconductor-grade aluminum cavity according to claim 1, characterized in that: The lifting column (31) is connected with an adjusting bolt (311).

5. The anchor support structure of a semiconductor-grade aluminum cavity according to claim 1, characterized in that: The movable roller (2) comprises a mounting seat (21), a roller seat (22) is rotatably connected to the mounting seat (21), and a roller unit (23) is rotatably connected to the roller seat (22).

6. The anchor support structure of a semiconductor-grade aluminum cavity according to claim 5, characterized in that: The mounting seat (21) comprises a fixing frame (211), an adjusting column (212) is movably connected to the fixing frame (211), and a fastening nut (213) is provided on the adjusting column (212).

7. A semiconductor-grade aluminum cavity foundation support structure according to any one of claims 1 to 6, characterized in that: The support frame (1) includes a support column (14), and the movable roller (2) includes a mounting seat (21). The mounting seat (21) is rotatably connected to the support column (14), and the mounting seat (21) can drive the movable roller (2) to rotate around the support column (14).

8. An adjustment method, using a semiconductor-grade aluminum cavity anchor support structure as claimed in any one of claims 1 to 7, characterized in that: The following steps are included: S1, retract the lifting foot (3) upwards, and the lifting foot (3) is lifted off the ground; S2. Keep only the moving roller (2) in contact with the ground and move the support frame (1) to the specified position. S3, keeping the support frame (1) fixed, moving the lifting bracket, and making the lifting foot (3) contact the ground.

9. A method for adjusting according to claim 8, characterized in that: In step S3, the universal foot (32) is rotated relative to the lifting column (31) and is in contact with the ground.

10. A method for adjusting according to claim 8, characterized in that: In step S2, after moving to the designated position, the mounting seat (21) is rotated relative to the support column (14), the moving roller (2) is controlled to contact the flat ground, and the support frame (1) is kept horizontally placed before proceeding to step S3.

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