Multicolor flash frequency image acquisition detection system and method

Abstract

The invention provides a multi-color flash-frequency image capturing detection system and method. The multi-color flash-frequency image capturing detection system comprises a light-emitting device, an image capturing device and a detection device. The light-emitting device emits various light rays with different colors to a to-be-detected workpiece in a pulsation mode, and the instantaneous light-emitting working power of the light-emitting device is higher than the rated power; the image capturing device is coupled to the light emitting device, and obtains a plurality of images to be detected of the workpiece to be detected according to the color of the light when the light emitting device emits the light; the detection device is coupled to the image capturing device and is used for detecting and analyzing the to-be-detected image so as to obtain defect information of the to-be-detected workpiece. Therefore, various detection items can be carried out on the to-be-detected workpiece, and the effect of improving the detection precision is achieved.

Description

Technical Field

[0001] The present invention relates to a detection system and method, and in particular to a multi-color stroboscopic imaging detection system and method. Background Art

[0002] In the existing precision industry, the products manufactured are usually very small in size or very complex in structure. In order to accurately detect defects on the products, automatic optical inspection technology (Automated Optical Inspection, AOI) is generally used to inspect the products.

[0003] However, in the process of taking images of products, the brightness, intensity and color of the light source of the existing automatic optical inspection technology are fixed, and the light source is in a constant bright state, so that the existing automatic optical inspection technology can only inspect a single inspection item, resulting in the problem of low inspection accuracy of the existing automatic optical inspection technology. Summary of the invention

[0004] To solve the above problems, the present invention discloses a multi-color flash imaging detection system, whose light-emitting device can emit light of multiple colors according to the corresponding detection items, so that the present invention can use light of multiple colors to comprehensively capture the workpiece to be inspected, thereby achieving the purpose of improving the detection accuracy.

[0005] In order to achieve the above-mentioned purpose, an embodiment of the present invention provides a multi-color stroboscopic imaging detection system, which includes: a light-emitting device, an imaging device and a detection device. The light-emitting device emits a plurality of light beams with different colors to the workpiece to be detected in a pulsating manner, wherein the instantaneous light-emitting working power of the light-emitting device is higher than the rated power; the imaging device is coupled to the light-emitting device, and when the light-emitting device emits the light beam, it obtains a plurality of images to be detected of the workpiece to be detected according to the color of the light beam; the detection device is coupled to the imaging device, and can detect and analyze the images to be detected to obtain the defect information of the workpiece to be detected.

[0006] In another embodiment of the present invention, a control device is also included, which is coupled to the light-emitting device and the imaging device and can control the light-emitting sequence and light-emitting time of the light-emitting device. When the light-emitting device emits the light, the control device simultaneously controls the imaging device to obtain the image to be detected.

[0007] In another embodiment of the present invention, the light is visible light with a wavelength of 380nm to 750nm.

[0008] In another embodiment of the present invention, the image to be inspected has multiple color information of different colors, and the inspection device includes an extraction unit and an analysis unit. The extraction unit extracts the corresponding image to be inspected according to the color information and recomposes the recombined inspection image. The analysis unit receives and analyzes the recombined inspection image to obtain the defect information of the workpiece to be inspected.

[0009] In another embodiment of the present invention, the imaging device is a line scan camera.

[0010] In addition, the present invention also discloses a multi-color stroboscopic imaging detection method using a multi-color stroboscopic imaging detection system, comprising the following steps: an irradiation step, an imaging step and a detection step. The irradiation step comprises that the light emitting device emits a plurality of light rays with different colors to the workpiece to be detected in a pulsating manner, wherein the instantaneous luminous working power of the light emitting device is higher than the rated power; the imaging step comprises that when the workpiece to be detected is irradiated by the light rays, the imaging device obtains a plurality of images to be detected of the workpiece to be detected according to the color of the light rays; the detection step comprises that the detection device detects and analyzes the images to be detected to obtain defect information of the workpiece to be detected.

[0011] In another embodiment of the present invention, the irradiation step also includes that the control device controls the light-emitting sequence and light-emitting time of the light-emitting device; the imaging step also includes that the control device controls the imaging device to obtain the image to be detected while controlling the light-emitting device to emit the light.

[0012] In another embodiment of the present invention, the image to be inspected has multiple color information of different colors; the inspection step also includes that the extraction unit of the inspection device extracts the corresponding image to be inspected according to the color information and recomposes the recombined inspection image, and the analysis unit of the inspection device receives and analyzes the recombined inspection image to obtain defect information of the workpiece to be inspected.

[0013] Therefore, the light emitting device of the present invention can emit light of multiple colors according to the corresponding detection items, so that the present invention can comprehensively image the workpiece to be detected through light of multiple colors, thereby achieving the effect of improving the detection accuracy.

[0014] In addition, the present invention can adopt a pulsating light-emitting mode and control the light-emitting device to be in an overload state (that is, the instantaneous light-emitting working power of the light-emitting device is higher than the rated power), so that the imaging time of the imaging device can be effectively reduced, thereby achieving the effect of reducing the overall detection working time. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1Schematic diagram of a multi-color stroboscopic imaging detection system in an embodiment of the present invention.

[0016] Figure 2 It is a block flow diagram of a multi-color stroboscopic imaging detection method in an embodiment of the present invention.

[0017] Figure 3 It is a timing diagram of the light emitting device and the imaging device in the embodiment of the present invention.

[0018] Figure numerals: 100, multi-color flash frequency imaging detection system; 200, multi-color flash frequency imaging detection method; 10, light-emitting device; 20, imaging device; 30, detection device; 31, extraction unit; 32, analysis unit; 40, control device; S1, irradiation step; S2, imaging step; S3, detection step. DETAILED DESCRIPTION

[0019] In order to facilitate the description of the central idea of ​​the present invention in the above invention content, a specific embodiment is used here to express it. It should be noted in advance that various objects in the embodiments are drawn according to the proportions suitable for enumeration and description, rather than according to the proportions of actual elements.

[0020] like Figures 1 to 3 As shown, a multi-color stroboscopic imaging detection system 100 according to an embodiment of the present invention is disclosed, which is used to detect a workpiece to be detected. The present invention comprises a light emitting device 10, an imaging device 20 and a detection device 30. The workpiece to be detected is a wafer, a circuit board, a TFT glass, a CF glass, a CIS chip, and the like.

[0021] The light emitting device 10 emits a plurality of light beams with different colors to the workpiece to be inspected in a pulsating manner. When the light emitting device 10 emits the light beams, its instantaneous light emitting working power is higher than the rated power. In the embodiment of the present invention, only one light emitting device 10 is required to emit a plurality of light beams with different colors, thereby reducing the construction cost of the overall system.

[0022] In an embodiment of the present invention, the instantaneous luminous working power of the light-emitting device 10 is 100% to 300% higher than the rated power (in other embodiments, it can be as high as 1000% or even higher). Since the instantaneous luminous working power of the light-emitting device 10 is inversely proportional to the imaging time of the imaging device 20, the imaging time of the imaging device 20 can be reduced by increasing the instantaneous luminous working power of the light-emitting device 10, and the effect of reducing the overall detection working time can be achieved. For example, if the instantaneous luminous working power of the light-emitting device 10 is 300% higher than the rated power, the imaging time of the imaging device 20 will be one third of the original imaging time. The light is visible light with a wavelength of 380nm to 750nm, wherein the wavelength of the light can be selected according to the needs of the user. For example, when detecting MURA defects of a panel, the user can use a variety of different wavelengths (i.e., different colors) of light to comprehensively image the panel to achieve the purpose of accurate detection.

[0023] The imaging device 20 is coupled to the light emitting device 10. When the light emitting device 10 emits the light, the imaging device 20 obtains a plurality of images to be detected of the workpiece to be detected according to the color of the light. The imaging device 20 is a line scan camera; the images to be detected have a plurality of color information of different colors. For example, if the light emitting device 10 emits red light (i.e., the wavelength of the light is 620nm to 750nm), the color information of the image to be detected obtained is red. In addition, in an embodiment of the present invention, each time the light emitting device 10 emits light, the imaging device 20 performs an imaging action. Therefore, the images to be detected obtained by the imaging device 20 each time will not be compressed in any way, which makes the images to be detected complete and clear images, so as to improve the accuracy of subsequent detection.

[0024] like Figure 3 The exposure time of the imaging device 20 is longer than the light irradiation time of the lighting device 10, so as to avoid the mixing of different colors of light in different imaging cycles, resulting in a decrease in detection accuracy.

[0025] The detection device 30 is coupled to the imaging device 20 to detect and analyze the image to be detected to obtain defect information of the workpiece to be detected. Figure 1 As shown, in the embodiment of the present invention, the detection device 30 includes an extraction unit 31 and an analysis unit 32. The extraction unit 31 extracts the corresponding image to be detected according to the color information and recomposes the recombined detection image; the analysis unit 32 receives and analyzes the recombined detection image to obtain the defect information of the workpiece to be detected.

[0026] like Figure 1 As shown, in an embodiment of the present invention, a control device 40 is further included, and the control device is coupled to the light emitting device 10 and the image capturing device 20. The control device 40 controls the light emitting sequence and light emitting time of the light emitting device 10, and when the light emitting device 10 emits the light, the control device 40 controls the image capturing device 20 to simultaneously obtain the image to be detected.

[0027] Among them, the control device 40 can control the color (i.e., wavelength) of the light irradiating the workpiece to be inspected, the color sequence of the light, the light-emitting time and instantaneous light-emitting working power of the light-emitting device 10, and the imaging time of the imaging device 20 according to the type of the workpiece to be inspected and the inspection items to be performed on the workpiece to be inspected.

[0028] like Figure 2 As shown, the present invention further provides a multi-color stroboscopic imaging detection method 200 using the multi-color stroboscopic imaging detection system 100, the method comprising the following steps: an irradiation step S1, an imaging step S2 and a detection step S3.

[0029] The irradiation step S1 includes: the light emitting device 10 emits the light with different colors to the workpiece to be inspected in a pulsating manner, wherein the instantaneous light emitting working power of the light emitting device 10 is higher than the rated power.

[0030] The irradiation step S1 also includes: controlling the luminous sequence and luminous time of the luminous device 10 by the control device 40. Furthermore, the control device 40 can control the color of the light irradiated on the workpiece to be inspected, the color sequence of the light, the luminous time and the instantaneous luminous working power of the luminous device 10 according to the type of the workpiece to be inspected and the inspection items to be performed on the workpiece to be inspected.

[0031] The image capturing step S2 includes: when the workpiece to be detected is irradiated by the light, the image capturing device 20 obtains the image to be detected of the workpiece to be detected according to the color of the light. In the image capturing step S2, when the light emitting device 10 emits the light, the control device 40 controls the image capturing device 20 to simultaneously obtain the image to be detected.

[0032] The detection step S3 includes: detecting and analyzing the image to be detected by the detection device 30, and obtaining the defect information of the workpiece to be detected. In the detection step S3, the extraction unit 31 of the detection device 30 extracts the corresponding image to be detected according to the color information, and recomposes the recombined detection image, and the analysis unit 32 of the detection device 30 receives and analyzes the recombined detection image to obtain the defect information of the workpiece to be detected.

[0033] In summary, the light emitting device 10 of the present invention can emit light of various colors according to corresponding detection items, so that the present invention can comprehensively image the workpiece to be detected through light of various colors, thereby achieving the effect of improving detection accuracy.

[0034] Furthermore, the present invention can adopt a pulsating light-emitting mode and control the light-emitting device 10 to be in an overload state (that is, the instantaneous light-emitting working power of the light-emitting device 10 is higher than the rated power), so that the imaging time of the imaging device 20 can be effectively reduced, thereby achieving the effect of reducing the overall detection working time.

[0035] Although the present invention is described with a preferred embodiment, those skilled in the art can make various changes without departing from the spirit and scope of the present invention. The above embodiments are only used to illustrate the present invention and are not used to limit the scope of the present invention. All modifications or changes made without exceeding the spirit of the present invention belong to the protection scope of the claims attached to the present invention.

Claims

1. A multi-color stroboscopic imaging detection system, characterized in that: The multi-color stroboscopic imaging detection system comprises: A light emitting device, wherein the light emitting device emits a plurality of light rays of different colors to the workpiece to be inspected in a pulsating manner, wherein the instantaneous light emitting working power of the light emitting device is higher than the rated power; An imaging device coupled to the light emitting device, and when the light emitting device emits a plurality of the light beams, the imaging device acquires a plurality of images of the workpiece to be inspected according to the colors of the plurality of the light beams; and The detection device is coupled to the imaging device and performs detection and analysis on the image to be detected to obtain defect information of the workpiece to be detected.

2. The multi-color stroboscopic imaging detection system according to claim 1, characterized in that: It also includes a control device, which is coupled to the light-emitting device and the imaging device. The control device controls the light-emitting sequence and light-emitting time of the light-emitting device. When the control device controls the light-emitting device to emit multiple types of light, it simultaneously controls the imaging device to obtain the image to be detected.

3. The multi-color stroboscopic imaging detection system according to claim 1, characterized in that: The light is visible light with a wavelength of 380nm to 750nm.

4. The multi-color stroboscopic imaging detection system according to claim 1, characterized in that: The image to be detected has multiple color information of different colors. The detection device includes an extraction unit and an analysis unit. The extraction unit extracts the corresponding image to be detected according to the color information and recomposes the recombined detection image. The analysis unit receives and analyzes the recombined detection image to obtain the defect information of the workpiece to be detected.

5. The multi-color stroboscopic imaging detection system according to claim 1, characterized in that: The imaging device is a line scanning camera.

6. A multi-color stroboscopic imaging detection method, characterized in that: The multi-color stroboscopic imaging detection method comprises the following steps: Irradiation step: the light emitting device emits a plurality of light beams of different colors to the workpiece to be inspected in a pulsating manner, wherein the instantaneous light emitting working power of the light emitting device is higher than the rated power; An imaging step: when the workpiece to be inspected is irradiated by the multiple light beams, an imaging device obtains multiple images of the workpiece to be inspected according to the colors of the multiple light beams; and Detection step: using a detection device to detect and analyze the image to be detected, and obtain defect information of the workpiece to be detected.

7. The multi-color stroboscopic imaging detection method according to claim 6, characterized in that: In the irradiation step, the light-emitting sequence and light-emitting time of the light-emitting device are controlled by a control device; in the imaging step, when the light-emitting device emits a plurality of the light rays, the control device controls the imaging device to simultaneously acquire the images to be detected.

8. The multi-color stroboscopic imaging detection method according to claim 6, characterized in that: The light is visible light with a wavelength of 380nm to 750nm.

9. The multi-color stroboscopic imaging detection method according to claim 6, characterized in that: The image to be inspected has multiple color information of different colors; in the inspection step, the extraction unit of the inspection device extracts the corresponding image to be inspected according to the color information, and recomposes the recombined inspection image, and the analysis unit of the inspection device receives and analyzes the recombined inspection image to obtain the defect information of the workpiece to be inspected.

10. The multi-color stroboscopic imaging detection method according to claim 6, characterized in that: The imaging device is a line scanning camera.

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