Soft X-ray spatial resolution absorption spectrum acquisition system

Abstract

The invention belongs to the technical field of X-ray testing, and particularly relates to a soft X-ray spatial resolution absorption spectrum acquisition system. Electronic channels of a dense array are matched and correspond to corresponding areas of a sample, then electronic information in the electronic channels and position information of a sample target area corresponding to the electronic channels are collected at the same time, and then the electronic information collected by all the electronic channels is combined according to the position information. Therefore, an absorption spectrogram reflecting the surface of the whole sample is obtained, so that the XAS measurement method has the spatial resolution capability of the sample, and accurate positioning and analysis of different areas of the surface of the sample are realized. For example, in the field of microelectronics, defects, doping distribution, fine electronic tracks and the like in different areas of the surface of the device can be observed through a spatial resolution absorption spectrum technology, which is of great significance for optimizing the performance of the device and developing novel micro-nano equipment.

Description

Technical Field

[0001] The invention belongs to the technical field of X-ray testing, and in particular relates to a soft X-ray spatially resolved absorption spectrum acquisition system. Background Art

[0002] X-ray absorption spectroscopy (XAS) is widely used to study the local geometry and electronic structure of materials. The principle of this technology is briefly described as follows: when the energy of the incident soft X-ray is modulated to a certain energy, the core energy level electrons of the atoms in the sample are excited to a certain unoccupied orbital, causing the absorption coefficient to increase in a jump-like manner, thereby forming a soft X-ray absorption spectrum. Soft X-ray absorption spectroscopy can accurately detect the K edge of non-metallic elements such as carbon / nitrogen / oxygen, the L edge of 3d transition metals, and the M edge of some 4d metals. The two outstanding features of soft X-ray absorption spectroscopy technology are surface interface sensitivity and unoccupied state sensitivity. For example, in energy conversion systems, material exchange often occurs at the surface interface of materials, and active carriers are also easily excited to unoccupied state orbitals to participate in energy exchange. Therefore, this technology is very suitable for studying reaction mechanisms in the field of surface interfaces.

[0003] However, although the traditional XAS measurement method can provide rich information about the electronic structure and chemical environment of the material, it lacks spatial resolution and cannot reveal the differences between different areas on the sample surface, resulting in incomplete and systematic material research on the sample.

[0004] Therefore, it is of positive significance to develop a soft X-ray absorption spectrum acquisition system with spatial resolution capability. Summary of the invention

[0005] In view of the drawback that the above-mentioned traditional XAS measurement method does not have the spatial resolution capability of the sample, the present invention provides a soft X-ray spatial resolution absorption spectrum acquisition system, which matches the dense array of electron channels with the corresponding areas of the sample, and then simultaneously collects the electron information in the electron channel and the position information of the sample target area corresponding to the electron channel, and then combines the electron information collected by all the electron channels according to the above position information, thereby obtaining an absorption spectrum reflecting the entire sample surface, that is, the XAS measurement method has the spatial resolution capability of the sample. The specific technical scheme is as follows: The present invention provides a soft X-ray spatial resolution absorption spectrum acquisition system, comprising a light source for emitting a synchrotron radiation beam to a grating monochromator device, an electron channel acquisition device, an electron screening device, an electron energy detection device and a control device; The grating monochromator device adjusts the received synchrotron radiation beam to the target photon energy intensity, and then irradiates the output to the sample in the vacuum device; The dense electron channels in the electron channel collection device correspond one-to-one to the target area of ​​the sample, so as to collect the electronic signal and address information of the sample area corresponding to the designated electron channel; The electronic screening device removes impurities from the electronic signal; The electronic energy detection device measures the electronic signal after impurities are removed to obtain an electronic energy signal; The control device generates a spatially resolved absorption spectrum corresponding to the sample according to the above-mentioned photon energy intensity signal, electronic signal, address information and electronic energy signal.

[0006] According to some embodiments of the present invention, the electronic channel acquisition device includes: an electronic channel and a position signal collector; The electron channels are closely arranged in an array, and each electron channel corresponds to a designated target area of ​​a sample; When the position signal collector collects electronic information in the electronic channel, it collects the sample target position signal corresponding to the electronic channel.

[0007] According to some embodiments of the present invention, an electron focusing device and a slit device are sequentially arranged between the electron channel collection device and the electron screening device; The electron focusing device adjusts the motion state of electrons passing through the electron channel collection device; The slit device is used to control the quantity of electrons emitted by the electron focusing device.

[0008] According to some embodiments of the present invention, the electronic screening device comprises: an inner ring positive electrode device, an outer ring negative electrode device and an inner and outer ring voltage control device; The inner ring positive electrode device is used to generate a positive electric field for screening electrons with excessively high electron energy; The outer ring cathode device is used to generate a negative electric field and screen electrons with too low energy; The inner and outer ring voltage control device is used to send control signals to the inner ring positive electrode device and the outer ring negative electrode device to change their voltages.

[0009] According to some embodiments of the present invention, the electron energy detection device includes: an electron multiplying device, an electron fluorescence target device, a fluorescence detector, and an electron energy signal collector; The electron multiplying device is used to amplify the number of electrons; The electron fluorescence target device is used to convert the electron signal after passing through the electron multiplying device into a fluorescence signal; The fluorescence detector is used to collect the fluorescence signal emitted by the electronic fluorescence target device; The electronic energy signal collector is used to collect the fluorescence signal emitted by the fluorescence detector, thereby obtaining the electronic energy signal.

[0010] According to some embodiments of the present invention, the electron focusing device comprises: an electron receiving device, an electron decelerating device, an electron gathering device and an electron emitting device; The electron receiving device is used to receive electrons at the sample target position determined by the electron channel acquisition device; The electron deceleration device is used to decelerate the electrons received by the electron receiving device; The electron focusing device is used to focus the electrons decelerated by the electron deceleration device; The electron emission device is used to send the electrons focused by the electron gathering device to the slit device.

[0011] According to some embodiments of the present invention, the slit device comprises: a slit selection device and a slit control device; The slit selection device is used to adjust the electrons adjusted by the electron focusing device to adjust the number of collected electrons to a reasonable range; The slit control device is used to send a control signal to the slit selection device to change the state of the slit selection device.

[0012] According to some embodiments of the present invention, the vacuum device comprises: a vacuum pump, a vacuum gauge, a vacuum chamber, and a sample storage device disposed in the vacuum chamber; The sample storage device is used to store samples to be tested; The vacuum pump is used to evacuate the vacuum chamber; The vacuum gauge is used to measure the vacuum degree of the vacuum chamber.

[0013] According to some embodiments of the present invention, further comprising: a control circuit; The control circuit is at least used to provide working voltage for the grating monochromator device, vacuum device, electron channel collection device, electron focusing device, slit device, electron screening device, electron energy detection device and control device.

[0014] The beneficial effects of the present invention are: The present invention matches the electronic channels of the dense array with the corresponding areas of the sample, and then simultaneously collects the electronic information in the electronic channel and the position information of the target area of ​​the sample corresponding to the electronic channel, and then combines the electronic information collected by all the single electronic channels according to the above position information, thereby obtaining an absorption spectrum reflecting the entire sample surface, so that the XAS measurement method has the spatial resolution ability of the sample, and realizes the precise positioning and analysis of different areas of the sample surface. For example, in the field of microelectronics, through the spatial resolution absorption spectrum technology, defects, doping distribution and fine electron orbits in different areas of the device surface can be observed, which is of great significance for optimizing device performance and developing new micro-nano devices. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 A schematic diagram of the structure of a soft X-ray spatially resolved absorption spectrum acquisition system provided by the present invention; Figure 2 An example diagram of a spatially resolved absorption spectrum provided by the present invention; Figure 3 An example diagram of an absorption spectrum of a spatially resolved absorption spectrum at a specific spatial position provided by the present invention; Figure 4 The present invention provides a flowchart of the operation process of a soft X-ray spatially resolved absorption spectrum acquisition system. DETAILED DESCRIPTION

[0016] In order to deepen the understanding of the present invention, the present invention will be further described in detail below in conjunction with examples. The examples are only used to explain the present invention and do not constitute a limitation on the protection scope of the present invention.

[0017] like Figure 1 As shown, the present invention provides a soft X-ray spatial resolution absorption spectrum acquisition system, including a light source for emitting a synchrotron radiation beam to a grating monochromator device, an electron channel acquisition device, an electron screening device, an electron energy detection device and a control device; The grating monochromator device adjusts the received synchrotron radiation beam to the target photon energy intensity, and then irradiates the output to the sample in the vacuum device; The dense electron channels in the electron channel collection device correspond one-to-one to the target area of ​​the sample, so as to collect the electronic signal and address information of the sample area corresponding to the designated electron channel; The electronic screening device removes impurities from the electronic signal; The electronic energy detection device measures the electronic signal after impurities are removed to obtain an electronic energy signal; The control device generates a spatially resolved absorption spectrum corresponding to the sample according to the above-mentioned photon energy intensity signal, electronic signal, address information and electronic energy signal.

[0018] The electronic channel acquisition device comprises: an electronic channel and a position signal collector; The electron channels are closely arranged in an array, and each electron channel corresponds to a designated target area of ​​a sample; When the position signal collector collects electronic information in the electronic channel, it collects the sample target position signal corresponding to the electronic channel.

[0019] An electron focusing device and a slit device are arranged in sequence between the electron channel collection device and the electron screening device; The electron focusing device adjusts the motion state of electrons passing through the electron channel collection device; The slit device is used to control the quantity of electrons emitted by the electron focusing device.

[0020] The electronic screening device comprises: an inner ring positive electrode device, an outer ring negative electrode device and an inner and outer ring voltage control device; The inner ring positive electrode device is used to generate a positive electric field for screening electrons with excessively high electron energy; The outer ring cathode device is used to generate a negative electric field and screen electrons with too low energy; The inner and outer ring voltage control device is used to send control signals to the inner ring positive electrode device and the outer ring negative electrode device to change their voltages.

[0021] The electron energy detection device comprises: an electron multiplier device, an electron fluorescence target device, a fluorescence detector, and an electron energy signal collector; The electron multiplying device is used to amplify the number of electrons; The electron fluorescence target device is used to convert the electron signal after passing through the electron multiplying device into a fluorescence signal; The fluorescence detector is used to collect the fluorescence signal emitted by the electronic fluorescence target device; The electronic energy signal collector is used to collect the fluorescence signal emitted by the fluorescence detector, thereby obtaining the electronic energy signal.

[0022] The electron focusing device comprises: an electron receiving device, an electron decelerating device, an electron gathering device and an electron emitting device; The electron receiving device is used to receive electrons at the sample target position determined by the electron channel acquisition device; The electron deceleration device is used to decelerate the electrons received by the electron receiving device; The electron focusing device is used to focus the electrons decelerated by the electron deceleration device; The electron emission device is used to send the electrons focused by the electron gathering device to the slit device.

[0023] The slit device comprises: a slit selection device and a slit control device; The slit selection device is used to adjust the electrons adjusted by the electron focusing device to adjust the number of collected electrons to a reasonable range; The slit control device is used to send a control signal to the slit selection device to change the state of the slit selection device.

[0024] The vacuum device comprises: a vacuum pump, a vacuum gauge, a vacuum chamber and a sample storage device arranged in the vacuum chamber; The sample storage device is used to store samples to be tested; The vacuum pump is used to evacuate the vacuum chamber; The vacuum gauge is used to measure the vacuum degree of the vacuum chamber.

[0025] The control circuit is at least used to provide working voltage for the grating monochromator device, vacuum device, electron channel collection device, electron focusing device, slit device, electron screening device, electron energy detection device and control device.

[0026] In this embodiment, by matching the electron channels of the dense array with the corresponding areas of the sample, and then simultaneously collecting the electron information in the electron channel and the position information of the target area of ​​the sample corresponding to the electron channel, and then combining the electron information collected by all the single electron channels according to the above position information, an absorption spectrum reflecting the entire sample surface is obtained, so that the XAS measurement method has the spatial resolution ability of the sample, and realizes the precise positioning and analysis of different areas of the sample surface. The spatially resolved absorption spectrum results can accurately collect important information such as defects, doping distribution and fine electron orbits in different areas of the sample surface.

[0027] like Figure 2 As shown, it is a CuL-edge spatially resolved absorption spectrum of a copper oxide device with spatially uneven distribution provided by an embodiment of the present invention.

[0028] like Figure 3 As shown, it is an absorption spectrum of CuL-edge collected at a specific spatial position in a spatially resolved absorption spectrum of a copper oxide device with spatially uneven distribution provided by an embodiment of the present invention.

[0029] It can be seen that by applying the solution provided by the embodiment of the present invention, defects, doping distribution, and fine electron orbits in different areas of the sample surface can be accurately detected and observed, which is of great significance to the fields of energy materials, chemistry, semiconductors, microelectronics, etc.

[0030] See also Figure 4 , the control device first initializes the acquisition software, and then sets the acquisition range and acquisition step of the photon energy of the synchronous light, the acquisition range and acquisition step of the Auger electron kinetic energy. Then the beam line energy is adjusted to the current set energy through the grating monochromator device, and it is determined whether the current synchronous light energy is the end energy. If it is, the spectrum acquisition program is terminated. If it is determined to be otherwise, the following process is performed: the target position signal of the sample is collected through the electronic channel acquisition device, and then the kinetic energy of the Auger electrons collected by the electrons passing through the electronic channel acquisition device is set through the electronic screening device, and it is determined whether the current collected electron kinetic energy is the end energy. If not, the signal corresponding to the current electron kinetic energy is collected, and the step length is increased for the energy set to detect the Auger electrons. If it is, the set current collection electron channel is changed, and it is determined whether all the electron channels are collected. If not, the channel corresponding to the collection electron position is changed, and the Auger electron signal is continued to be collected. If it is, the photon energy is moved by one step until the spectrum acquisition is completed after the program is run.

[0031] It can be known from the above description of the implementation mode that those skilled in the art can clearly understand that the present invention can be implemented by means of software plus a necessary general hardware platform. Based on such an understanding, the technical solution of the present invention can be essentially or partly contributed to the prior art in the form of a software product, which can be stored in a storage medium such as ROM / RAM, a magnetic disk, an optical disk, etc., and includes several instructions for enabling a computer device (which can be a personal computer, a server, or a network device, etc.) to execute the methods described in the various embodiments of the present invention or certain parts of the embodiments.

[0032] The above shows and describes the basic principles, main features and advantages of the present invention. It should be understood by those skilled in the art that the present invention is not limited to the above embodiments. The above embodiments and descriptions are only for explaining the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, which fall within the scope of the present invention. The scope of protection of the present invention is defined by the attached claims and their equivalents.

Claims

1. Soft X-ray spatially resolved absorption spectrum acquisition system, characterized by: It includes a light source for emitting a synchrotron radiation beam to a grating monochromator device, an electron channel collection device, an electron screening device, an electron energy detection device and a control device; The grating monochromator device adjusts the received synchrotron radiation beam to the target photon energy intensity, and then irradiates the output to the sample in the vacuum device; The dense electron channels in the electron channel collection device correspond one-to-one to the target area of ​​the sample, so as to collect the electronic signal and address information of the sample area corresponding to the designated electron channel; The electronic screening device removes impurities from the electronic signal; The electronic energy detection device measures the electronic signal after impurities are removed to obtain an electronic energy signal; The control device generates a spatially resolved absorption spectrum corresponding to the sample according to the above-mentioned photon energy intensity signal, electronic signal, address information and electronic energy signal.

2. The soft X-ray spatially resolved absorption spectrum acquisition system according to claim 1, characterized in that: The electronic channel acquisition device comprises: an electronic channel and a position signal collector; The electron channels are closely arranged in an array, and each electron channel corresponds to a designated target area of ​​a sample; When the position signal collector collects electronic information in the electronic channel, it collects the sample target position signal corresponding to the electronic channel.

3. The soft X-ray spatially resolved absorption spectrum acquisition system according to claim 1, characterized in that: An electron focusing device and a slit device are arranged in sequence between the electron channel collection device and the electron screening device; The electron focusing device adjusts the motion state of electrons passing through the electron channel collection device; The slit device is used to control the quantity of electrons emitted by the electron focusing device.

4. The soft X-ray spatially resolved absorption spectrum acquisition system according to claim 1, characterized in that: The electronic screening device comprises: an inner ring positive electrode device, an outer ring negative electrode device and an inner and outer ring voltage control device; The inner ring positive electrode device is used to generate a positive electric field for screening electrons with excessively high electron energy; The outer ring cathode device is used to generate a negative electric field and screen electrons with too low energy; The inner and outer ring voltage control device is used to send control signals to the inner ring positive electrode device and the outer ring negative electrode device to change their voltages.

5. The soft X-ray spatially resolved absorption spectrum acquisition system according to claim 1, characterized in that: The electron energy detection device comprises: an electron multiplier device, an electron fluorescence target device, a fluorescence detector, and an electron energy signal collector; The electron multiplying device is used to amplify the number of electrons; The electron fluorescence target device is used to convert the electron signal after passing through the electron multiplying device into a fluorescence signal; The fluorescence detector is used to collect the fluorescence signal emitted by the electronic fluorescence target device; The electronic energy signal collector is used to collect the fluorescence signal emitted by the fluorescence detector, thereby obtaining the electronic energy signal.

6. The soft X-ray spatially resolved absorption spectrum acquisition system according to claim 3, characterized in that: The electron focusing device comprises: an electron receiving device, an electron decelerating device, an electron gathering device and an electron emitting device; The electron receiving device is used to receive electrons at the sample target position determined by the electron channel acquisition device; The electron deceleration device is used to decelerate the electrons received by the electron receiving device; The electron focusing device is used to focus the electrons decelerated by the electron deceleration device; The electron emission device is used to send the electrons focused by the electron gathering device to the slit device.

7. The soft X-ray spatially resolved absorption spectrum acquisition system according to claim 3, characterized in that: The slit device comprises: a slit selection device and a slit control device; The slit selection device is used to adjust the electrons adjusted by the electron focusing device to adjust the number of collected electrons to a reasonable range; The slit control device is used to send a control signal to the slit selection device to change the state of the slit selection device.

8. The soft X-ray spatially resolved absorption spectrum acquisition system according to claim 1, characterized in that: The vacuum device comprises: a vacuum pump, a vacuum gauge, a vacuum chamber and a sample storage device arranged in the vacuum chamber; The sample storage device is used to store samples to be tested; The vacuum pump is used to evacuate the vacuum chamber; The vacuum gauge is used to measure the vacuum degree of the vacuum chamber.

9. The soft X-ray spatially resolved absorption spectrum acquisition system according to claim 1, characterized in that: Also includes: Control circuit; The control circuit is at least used to provide working voltage for the grating monochromator device, vacuum device, electron channel collection device, electron focusing device, slit device, electron screening device, electron energy detection device and control device.

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