Chip burning method and system, storage medium and electronic equipment

Abstract

The invention provides a chip burning method and system, a storage medium and electronic equipment, and the chip burning method comprises the following steps: S1, providing a pre-burnt chip, and reading efuse information before burning; s2, judging whether the chip is burnt or not according to the efuse information; if not, executing the step S3; the step S4 is executed after burning; s3, acquiring archive information corresponding to the chip, and burning the archive information into an electronic fuse of the chip; s4, after the efuse information is burnt, the efuse information is read, and the obtained efuse information and the archived information are verified; s5, judging whether the efuse information is the same as the archiving information or not; if the same, the chip burning is successful; if not, the chip is not burnt successfully. According to the chip burning method and system, the storage medium and the electronic equipment provided by the invention, the problem that the chip is scrapped due to abnormal chip burning caused by repeated chip burning easily caused by an existing chip burning technology can be solved.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor detection, and in particular to a chip burning method, system, storage medium and electronic equipment. Background Art

[0002] In order to improve the traceability of chips, more and more products need to burn information into the chip to complete the traceability of the chip with the uniqueness of the burned information; these burned information usually include but are not limited to Lot ID (clip number), Wafer ID (wafer number), X / Y coordinates (coordinates on the wafer), Pass Flag (test pass mark), and the unique information of each chip is encoded according to specific rules and burned into the chip, thus completing the efuse (electronic fuse) burning.

[0003] There are fuses inside the chip that needs to be burned with efuse. During burning, the fuses at specific positions will be blown according to the binary code of the chip information to complete the information burning. Since the blowing of the fuse is irreversible, if the encoding process is wrong or the burning is performed multiple times and the burning information is not completely consistent, the actual burned content and the original information will have abnormal deviations. Once the burning is completed, it cannot be recovered.

[0004] This requires that the EFUSE test must strictly verify each step and does not allow multiple tests. The traditional EFUSE test collects the information to be written, writes it directly into the chip after encoding, and then reads it to confirm the correctness of the burned information.

[0005] If the EFUSE test of mass-produced products only verifies whether the result after burning is correct, if the information written this time is inconsistent with the information that has been burned before, since the fuse blowing process is irreversible, the information finally burned into the chip will be completely different. Although the abnormality can still be determined by reading the EFUSE information after burning, it cannot be saved. Summary of the invention

[0006] In view of the above-mentioned shortcomings of the prior art, the purpose of the present invention is to provide a chip burning method, system, storage medium and electronic device, which are used to solve the problem that the existing chip burning technology is prone to repeated chip burning, resulting in chip burning abnormalities and further causing chip scrapping.

[0007] To achieve the above-mentioned object and other related objects, the present invention provides a chip burning method, the burning method comprising:

[0008] S1) providing a pre-programmed chip, and reading the efuse information of the chip before programming;

[0009] S2) judging whether the chip has been burned according to the read efuse information; if the chip has not been burned, executing step S3); if the chip has been burned, executing step S4);

[0010] S3) acquiring archive information corresponding to the chip, and burning the archive information into an electronic fuse of the chip;

[0011] S4) reading the efuse information of the chip after burning it to obtain the efuse information, and verifying the efuse information with the archived information;

[0012] S5) determining whether the efuse information is the same as the archive information; if they are the same, the chip is burned successfully; if they are not the same, the chip is not burned successfully.

[0013] Optionally, in S2), the method for determining whether the chip has been burned includes:

[0014] The efuse information is compared with the all-zero matrix. If the efuse information of the chip is the same as the all-zero matrix, it is considered that the chip has not been burned; if the efuse information of the chip is different from the all-zero matrix, it is considered that the chip has been burned.

[0015] Optionally, when the efuse information is different from the archive information, the burning method further includes: the burning method further includes a step of judging the contents of the efuse information and the archive information.

[0016] Optionally, in S5), if the content of the efuse information is judged to be incorrect, the chip is marked as defective; if the content of the archived information is judged to be incorrect, the archived information is corrected and the chip is marked as qualified.

[0017] Optionally, the archived information includes the production number, process steps, coordinate position and test results of the chip.

[0018] The present invention also provides a chip burning system, the chip burning system comprising:

[0019] A reading unit, used to obtain the archive information of the chip and the efuse information of the chip;

[0020] A judging unit, used for judging whether the chip has been programmed;

[0021] A burning unit, used for burning the chip according to the archived information;

[0022] The verification unit is used to determine whether the efuse information of the chip matches the archived information of the chip.

[0023] Optionally, the chip burning system further includes: a marking unit, used to mark whether the chip is burned successfully.

[0024] Optionally, the marking unit is further used to correct the archived information.

[0025] The present invention also provides a computer-readable storage medium, wherein the storage medium stores a computer program, and when the computer program is executed by a processor, the chip burning method is implemented.

[0026] The present invention also provides an electronic device, comprising a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the processor implements the chip burning method when executing the program.

[0027] As described above, the chip burning method, system, storage medium and electronic device of the present invention, when burning the chip, first determine whether the chip has been burned, if not burned, read the archived information, and then burn the chip into the archived information, and after burning, a post-burning check is performed to determine whether the efuse information in the chip matches the archived information; this can ensure that repeated burning and burning errors will not occur when the chip is burned, thereby reducing chip burning defects. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 Shown is a flow chart of the chip programming method of the present invention.

[0029] Figure 2 Shown is a schematic diagram of the chip programming system of the present invention.

[0030] Component number description

[0031] 201 Reading Unit

[0032] 202 Judgment Unit

[0033] 203 Burning Unit

[0034] 204 Verification Unit

[0035] 205 Marking Unit DETAILED DESCRIPTION

[0036] The following describes the embodiments of the present invention through specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present invention. For example, when describing the embodiments of the present invention in detail, for the sake of convenience, the cross-sectional view showing the device structure will not be partially enlarged according to the general proportion, and the schematic diagram is only an example, which should not limit the scope of protection of the present invention. In addition, in actual production, the three-dimensional dimensions of length, width and depth should be included.

[0037] For ease of description, spatially relative terms such as "under", "below", "below", "below", "above", "on", etc. may be used herein to describe the relationship of one element or feature shown in the drawings to other elements or features. It will be understood that these spatially relative terms are intended to encompass other orientations of the device in use or operation in addition to the orientation depicted in the drawings. In addition, when a layer is referred to as being "between" two layers, it can be the only layer between the two layers, or one or more intervening layers may also be present.

[0038] In the context of the present application, a structure in which a first feature is described as being "above" a second feature may include embodiments in which the first and second features are formed in direct contact, and may also include embodiments in which additional features are formed between the first and second features, such that the first and second features may not be in direct contact.

[0039] It should be noted that the diagrams provided in this embodiment are only used to illustrate the basic concept of the present invention in a schematic manner, and the diagrams only show the components related to the present invention rather than the number, shape and size of the components in actual implementation. In actual implementation, the type, quantity and proportion of each component can be changed arbitrarily, and the layout of the components may also be more complicated. In order to make the diagrams as concise as possible, not all structures are marked in the drawings.

[0040] This embodiment provides a chip burning method for burning efuse in a chip, such as Figure 1 As shown, the chip burning method includes: step S1) to step S5).

[0041] Step S1), providing a chip to be burned, and reading the efuse information of the chip before burning.

[0042] In this embodiment, before a chip enters the burning process, the information system of the production factory has recorded various information of the chip, such as the production batch (LOT ID) of the chip, the wafer ID to which the chip belongs, the X / Y axis coordinates of the chip in the wafer, the numbers of each equipment machine that the chip has gone through since production (as well as the start time and end time of the operation), various test results of the chip, etc.; among them, whether the chip has been burned and the burning time will also be recorded in the information system.

[0043] However, due to the fact that multiple wafers are operated simultaneously during production, when there are various equipment failures (operation information transmission is stuck, lost), poor process (rework operation), the operator needs to manually scrap or modify the information of a certain wafer or a certain chip, and these manually operated information can easily cause the process information of the chip to not match, process information errors, etc. In the burning process of the chip, when there is an error in the burning process information of a chip, it is easy to perform another burning of the chip that has been correctly burned. Since the burning result of the chip is irreversible, once the information burned again does not match, it will cause irreversible burning errors, affecting the yield of the chip. Therefore, it is necessary to add error prevention measures before burning to reduce the yield loss caused by repeated burning, burning information errors, etc. In the present embodiment, before the formal burning operation, the efuse information recorded in the electronic fuse of the chip to be burned is first read, and then the chip is judged based on the read efuse information whether it has been burned, which can effectively reduce repeated burning.

[0044] Step S2), judging whether the chip has been burned according to the read efuse information; if the chip has not been burned, executing step S3); if the chip has been burned, directly executing step S4).

[0045] In this step, the read efuse information is compared with the all-zero matrix. If it is an all-zero matrix (all the fuses of the electronic fuse are in a connected state, 0 indicates that the fuse is connected, and 1 indicates that the fuse is blown), it can be considered that the chip has not been burned, and it is necessary to perform a subsequent burning process (subsequent step S3); if it is not an all-zero matrix (not all the fuses of the electronic fuse are in a connected state), it can be considered that the chip has been burned, and it is necessary to perform a subsequent information verification (subsequent step S4).

[0046] Step S3), obtaining archive information corresponding to the chip, and burning the archive information into the electronic fuse of the chip.

[0047] In this step, when the chip has not been burned, the archived information of the chip is retrieved from the information system of the production factory, and the electronic fuse of the chip is blown after decoding to complete the chip burning process.

[0048] Step S4), reading the electronic fuse of the chip to obtain efuse information, and verifying the efuse information with the archived information.

[0049] In this step, after the chip has completed the burning process, if there is already burning information, it is necessary to undergo information verification to check whether the efuse information is burned correctly, so as to prevent the chip carrying wrong information from flowing out to the subsequent process or even to the customer. Therefore, it is necessary to first read the efuse information carried by the electronic fuse of the chip, and then read the archived information in the information system of the production plant, and compare the information of the two to confirm whether the burning is correct.

[0050] Step S5), determining whether the efuse information is the same as the archived information; if they are the same, the chip is burned successfully; if they are not the same, the chip is not burned successfully.

[0051] In this step, if the efuse information of the chip is the same as the archived information, the chip continues to flow according to the normal procedure; if the efuse information of the chip is different from the archived information, it can be divided into the following two situations:

[0052] The efuse information of the chip is incorrect, and it is considered that the chip is burned incorrectly, resulting in the efuse information of the chip not matching the archived information, and the chip is directly marked as defective.

[0053] The archived information of the chip is incorrect. At this time, the operator needs to manually correct the archived information and re-execute step S5 after correction).

[0054] Please refer to Figure 2 , Figure 2 A chip burning system provided by the present invention comprises:

[0055] The reading unit 201 can retrieve the archived information of the chip from the information system of the production plant; can read the efuse information from the electronic fuse of the chip; and convert the efuse information and the archived information into the same data format.

[0056] The judging unit 202 compares the efuse information read by the reading unit 201 with the all-zero matrix. When the two are the same, it is considered that the chip has not been burned. When the two are different, it is considered that the chip has been burned.

[0057] The programming unit 203 retrieves the archived information of the chip from the information system according to the reading unit 201, and programs the efuse of the chip. The archived information needs to be decoded before programming.

[0058] The verification unit 204 compares the archived information of the chip retrieved from the information system by the reading unit 201 and the efuse information read from the electronic fuse of the chip by the reading unit 201. When the two are the same, it is considered that the efuse information of the chip matches the archived information of the chip. When the two are different, it is considered that the efuse information of the chip does not match the archived information of the chip.

[0059] Specifically, a chip burning system provided by the present invention also includes:

[0060] The marking unit 205 marks the archived information in the information system according to the verification result of the verification unit. For example, when the archived information matches the efuse information, it is marked as successful burning; when the archived information does not match the efuse information, it is marked as failed burning. At the same time, when the operator determines that the archived information does not match the efuse information due to an error in the archived information, the operator can also correct the archived information through the marking unit.

[0061] The present invention also provides a computer-readable storage medium, wherein the storage medium stores a computer program, and the computer program can be used to execute the above Figure 1 A chip burning method is provided.

[0062] Specifically, the storage medium may include, but is not limited to, a floppy disk, an optical disk, a CD-ROM (compact disk-read only memory), a magneto-optical disk, a ROM (read only memory), a RAM (random access memory), an EPROM (erasable programmable read only memory), an EEPROM (electrically erasable programmable read only memory), a magnetic card or an optical card, a flash memory, or other types of media / machine-readable media suitable for storing machine-executable instructions. In addition, the storage medium may be a product that is not connected to a computer device, or a component that is connected to a computer device for use.

[0063] The present invention also provides an electronic device, comprising a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the processor executes the program to realize the above Figure 1 A chip burning method is provided.

[0064] Those skilled in the art can understand that all or part of the processes in the above-mentioned embodiment methods can be completed by instructing the relevant hardware through a computer program, and the computer program can be stored in a non-volatile computer-readable storage medium. When the computer program is executed, it can include the processes of the embodiments of the above-mentioned methods. Among them, any reference to the memory, database or other medium used in the embodiments provided in the present application can include at least one of non-volatile and volatile memory. Non-volatile memory can include read-only memory (ROM), magnetic tape, floppy disk, flash memory, optical memory, high-density embedded non-volatile memory, resistive random access memory (ReRAM), magnetoresistive random access memory (MRAM), ferroelectric random access memory (FRAM), phase change memory (PCM), graphene memory, etc. Volatile memory can include random access memory (RAM) or external cache memory, etc. As an illustration and not limitation, RAM can be in various forms, such as static random access memory (SRAM) or dynamic random access memory (DRAM). The information system involved in each embodiment provided in this application may include at least one of a relational database and a non-relational database. Non-relational databases may include distributed databases based on blockchains, etc., but are not limited to this. The processors involved in each embodiment provided in this application may be general-purpose processors, central processing units, graphics processors, digital signal processors, programmable logic devices, data processing logic devices based on quantum computing, etc., but are not limited to this.

[0065] To sum up, the chip burning method, system, storage medium and electronic device of the present invention, when burning the chip, first determine whether the chip has been burned. If it has not been burned, read the archived information, and then burn the chip into the archived information. In addition, after burning, a post-burning check is performed to determine whether the efuse information in the chip matches the archived information. This can ensure that repeated burning and burning errors will not occur during chip burning, thereby reducing chip burning defects.

[0066] The above embodiments are merely illustrative of the principles and effects of the present invention, and are not intended to limit the present invention. Anyone familiar with the art may modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by a person of ordinary skill in the art without departing from the spirit and technical concept disclosed by the present invention shall still be covered by the claims of the present invention.

Claims

1. A chip burning method, characterized in that: The burning method comprises: S1) providing a pre-programmed chip, and reading the efuse information of the chip before programming; S2) judging whether the chip has been burned according to the read efuse information; if the chip has not been burned, executing step S3); if the chip has been burned, executing step S4); S3) acquiring archive information corresponding to the chip, and burning the archive information to the electronic fuse of the chip; S4) reading the efuse information of the chip after burning, obtaining the efuse information, and verifying the efuse information with the archive information; S5) determining whether the efuse information is the same as the archived information; if they are the same, the chip is burned successfully; If they are not the same, the chip is not burned successfully.

2. The chip programming method according to claim 1, characterized in that: In S2), the method for determining whether the chip has been programmed includes: The efuse information is compared with the all-zero matrix. If the efuse information of the chip is the same as the all-zero matrix, it is considered that the chip has not been burned; if the efuse information of the chip is different from the all-zero matrix, it is considered that the chip has been burned.

3. The chip programming method according to claim 1, characterized in that: When the efuse information is different from the archive information, the burning method further includes a step of judging the efuse information and the archive information.

4. The chip programming method according to claim 3, characterized in that: In the S5), if the judgment result of the efuse information is wrong, the chip is marked as defective; if the judgment result of the archive information is wrong, the archive information is corrected and the chip is marked as qualified.

5. The chip programming method according to claim 1, characterized in that: The archived information includes the production number, process steps, coordinate position and test results of the chip.

6. A chip burning system, characterized in that: The chip burning system comprises: A reading unit, used to obtain the archive information of the chip and the efuse information of the chip; A judging unit, used for judging whether the chip has been programmed; A burning unit, used for burning the chip according to the archived information; The verification unit is used to determine whether the efuse information of the chip is the same as the archived information of the chip.

7. The chip burning system according to claim 6, characterized in that: The chip burning system also includes: The marking unit is used to mark whether the chip is successfully burned.

8. The chip burning system according to claim 7, characterized in that: The marking unit is further used to correct the archived information.

9. A computer-readable storage medium, characterized in that: The storage medium stores a computer program, and when the computer program is executed by a processor, the chip burning method according to any one of claims 1 to 5 is implemented.

10. An electronic device comprising a memory, a processor, and a computer program stored in the memory and executable on the processor, characterized in that: When the processor executes the program, the chip burning method described in any one of claims 1 to 5 is implemented.

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