A microwave remote plasma source parameter optimization design method and related equipment

Abstract

The application provides a microwave remote plasma source parameter optimization design method and related equipment, and relates to the technical field of microwave remote plasma sources. The method comprises the following steps: determining an electron density parameter set according to an electron cut-off density; setting material parameters of working gas; setting a physical field as a frequency domain solution of an electromagnetic wave field; obtaining an electric field distribution of the microwave remote plasma source in an ignition state and in a working state based on parameterized modeling results; obtaining a plurality of parameter combinations according to the electron density parameter set and a preset discharge tube thickness parameter set, and obtaining corresponding pointer data for each pointer for each parameter combination; and determining an optimal discharge tube thickness according to all pointer data. The method of the application realizes the rationality of the electric field distribution by using a parameterized evaluation index, and achieves the effect of quickly determining the optimal design parameters after parameter scanning.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of microwave remote plasma source, in particular to a microwave remote plasma source parameter optimization design method and related equipment. BACKGROUND

[0002] Due to the problems of large amount of electromagnetic field-plasma coupling simulation calculation and difficulty in convergence in three-dimensional conditions, the existing simulation analysis and optimization of the microwave remote plasma source are often focused on the simulation and optimization of the electric field before the generation of the plasma. For the microwave remote plasma source, the sustained discharge after the generation of the plasma is the main working state, so it is extremely important to optimize the structural parameters based on the electric field of the working state. However, the existing technology lacks simulation of the electric field after the generation of the plasma, so that the structural optimization based on the electric field relies on the personal experience of researchers, thereby affecting the researchers to evaluate the rationality of the electric field distribution, and further affecting the researchers to optimize the design parameters of the microwave remote plasma source.

[0003] At present, there is no effective technical solution to the above problems. SUMMARY

[0004] The present application aims to provide a microwave remote plasma source parameter optimization design method and related equipment, which solves the problem of lack of simulation of the electric field after the generation of the plasma in the existing simulation analysis and optimization of the microwave remote plasma source, realizes the rationality of the electric field distribution based on the evaluation index of parameterization, and achieves the effect of quickly determining the optimal design parameters after parameter scanning.

[0005] In a first aspect, the present application provides a microwave remote plasma source parameter optimization design method, comprising the following steps:

[0006] S1. After parameterizing modeling of the microwave remote plasma source, determining an electron density parameter set according to an electron cut-off density, wherein the electron density parameter set includes an electron density of the microwave remote plasma source in a firing state and an electron density of the microwave remote plasma source in a working state; the electron cut-off density is used as a critical condition for distinguishing the firing state and the working state;

[0007] S2. Inputting material parameters of a working gas into a multi-physics field simulation software; the material parameters include relative magnetic permeability, electrical conductivity and relative permittivity;

[0008] S3. Setting a physical field in the multi-physics field simulation software as an electromagnetic wave field solved in frequency domain;

[0009] S4. After the frequency domain solver is configured in the multi-physics simulation software, the electric field distribution of the microwave remote plasma source in the ignition state and in the working state is obtained based on the parameterized modeling result through the multi-physics simulation software;

[0010] S5. After a plurality of pointers for extracting pointer data are defined in the multi-physics simulation software, a plurality of parameter combinations are obtained according to the electron density parameter set and a preset discharge tube thickness parameter set, and pointer data corresponding to each pointer is obtained for each parameter combination;

[0011] S6. The optimal discharge tube thickness is determined according to all the pointer data.

[0012] The microwave remote plasma source parameter optimization design method has the advantages that the electric field after the plasma is generated is simulated by introducing the conductivity and the electron density, so that the structural optimization of the electric field is not dependent on the personal experience of researchers, and the rationality of the electric field distribution can be evaluated by the researchers, and then the design parameters of the microwave remote plasma source can be optimized by the researchers.

[0013] Further, the electron cut-off density is calculated according to the following formula:

[0014] ;

[0015] wherein, the electron cut-off density is, the mass of an electron, the vacuum permittivity, the charge amount of an electron, the frequency of the electromagnetic wave applied to the plasma.

[0016] Further, the conductivity is calculated according to the following formula:

[0017] ;

[0018] wherein, the conductivity is, the electron density of the microwave remote plasma source in the working state, the collision frequency, represented by an imaginary unit, the charge amount of an electron, the frequency of the electromagnetic wave applied to the plasma.

[0019] Further, the specific steps in step S1 include:

[0020] S11. The electron density of the microwave remote plasma source in the ignition state is set to 0;

[0021] S12. Set the electron density of the microwave remote plasma source in the working state to be greater than the electron cut-off density.

[0022] Further, in step S5, after the five pointers are defined in the multi-physical field simulation software, the pointer data of each pointer is obtained according to the following formula:

[0023] ;

[0024] wherein, is the pointer data of the first pointer, is the maximum value of the microwave feed-in medium electric field mode of the microwave remote plasma source, is the average value of the working gas electric field mode of the microwave remote plasma source;

[0025] ;

[0026] wherein, is the pointer data of the second pointer, is the average value of the microwave feed-in medium electric field mode of the microwave remote plasma source;

[0027] ;

[0028] wherein, is the pointer data of the third pointer, is the average value of the discharge tube wall electric field mode of the microwave remote plasma source;

[0029] ;

[0030] wherein, is the pointer data of the fourth pointer;

[0031] ;

[0032] wherein, is the pointer data of the fifth pointer; is the maximum value of the discharge tube wall electric field mode of the microwave remote plasma source.

[0033] Further, the specific steps in step S6 include:

[0034] S61. Determine the optional discharge tube thickness of the microwave remote plasma source in the ignition state according to the pointer data of the first pointer and the pointer data of the second pointer and take it as a first thickness set;

[0035] S62. Determine the discharge tube thicknesses selectable in the working state of the microwave remote plasma source according to the pointer data of the third pointer, the pointer data of the fourth pointer and the pointer data of the fifth pointer, and take the thicknesses as a second thickness set;

[0036] S63. Determine the optimal discharge tube thickness according to the first thickness set and the second thickness set.

[0037] The parameterized evaluation index of the rationality of the electric field distribution is calculated by considering the ignition state and the working state respectively, and the corresponding optimal and suboptimal size parameter ranges can be quickly determined after parameter scanning.

[0038] Further, the specific steps in step S63 include:

[0039] S631. Take the minimum value of the discharge tube thicknesses belonging to both the first thickness set and the second thickness set as the optimal discharge tube thickness.

[0040] In a second aspect, the present application provides a microwave remote plasma source parameter optimization design device, comprising:

[0041] A first determination module is configured to determine an electron density parameter set according to an electron cutoff density after parameterized modeling of the microwave remote plasma source, wherein the electron density parameter set comprises an electron density in an ignition state of the microwave remote plasma source and an electron density in a working state of the microwave remote plasma source; and the electron cutoff density is used as a critical condition for distinguishing the ignition state and the working state.

[0042] An input module is configured to input material parameters of a working gas into a multi-physics field simulation software, wherein the material parameters include relative magnetic permeability, electrical conductivity and relative dielectric constant.

[0043] A setting module is configured to set a physical field in the multi-physics field simulation software as an electromagnetic wave field solved in a frequency domain.

[0044] A first acquisition module is configured to obtain electric field distributions of the microwave remote plasma source in the ignition state and in the working state through the multi-physics field simulation software based on a parameterized modeling result after configuring a frequency domain solver in the multi-physics field simulation software.

[0045] A second acquisition module is configured to obtain a plurality of parameter combinations according to the electron density parameter set and a preset discharge tube thickness parameter set, and obtain pointer data corresponding to each pointer for each parameter combination after defining a plurality of pointers for extracting the pointer data in the multi-physics field simulation software.

[0046] A second determining module is configured to determine an optimal discharge tube thickness according to all the pointer data.

[0047] The microwave remote plasma source parameter optimization design device provided by the application introduces the conductivity and electron density to simulate the ignition state and working state, avoids the structural optimization of the electric field from depending on the personal experience of researchers, and is favorable for the researchers to evaluate the rationality of the electric field distribution.

[0048] In a third aspect, the application provides an electronic device, comprising a processor and a memory, wherein the memory stores computer readable instructions, and when the computer readable instructions are executed by the processor, the steps of the microwave remote plasma source parameter optimization design method provided in the first aspect are executed.

[0049] In a fourth aspect, the application provides a computer readable storage medium, wherein the computer readable storage medium stores a computer program, and when the computer program is executed by a processor, the steps of the microwave remote plasma source parameter optimization design method provided in the first aspect are executed.

[0050] As can be seen, the microwave remote plasma source parameter optimization design method provided by the application is based on the COMSOL numerical simulation technology, introduces the conductivity and electron density to simulate the ignition state and working state, performs the electric field simulation and parameter scanning on the microwave remote plasma source, and outputs the change relationship between the evaluation parameter and the thickness parameter, so that the optimal design scheme can be quickly found.

[0051] Other features and advantages of the application will be set forth in the following description, and in part will become apparent to those skilled in the art from the description, or can be learned by practice of the application as described in the written description and claims. BRIEF DESCRIPTION OF DRAWINGS

[0052] Figure 1 A flow chart of the microwave remote plasma source parameter optimization design method provided by the embodiment of the application.

[0053] Figure 2 A parameterized model of the microwave remote plasma source in the embodiment of the application.

[0054] Figure 3 The electric field distribution of the microwave remote plasma source with a discharge tube thickness of 10mm in the ignition state in the embodiment of the application.

[0055] Figure 4 The electric field distribution of the microwave remote plasma source with a discharge tube thickness of 10mm in the working state in the embodiment of the application.

[0056] Figure 5These are experimental data of the microwave remote plasma source in the ignition state in the embodiments of the present invention.

[0057] Figure 6 These are experimental data of the microwave remote plasma source in operation in this embodiment of the invention.

[0058] Figure 7 This is a schematic diagram of a microwave remote plasma source parameter optimization design device provided in an embodiment of the present invention.

[0059] Figure 8 This is a schematic diagram of the structure of an electronic device provided in an embodiment of the present invention.

[0060] Label Explanation:

[0061] 100, Rectangular waveguide; 200, Microwave feed window; 300, Resonant cavity; 310, Discharge tube; 400, First determination module; 500, Input module; 600, Setting module; 700, First acquisition module; 800, Second acquisition module; 900, Second determination module; 13, Electronic device; 1301, Processor; 1302, Memory; 1303, Communication bus. Detailed Implementation

[0062] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. The components of the embodiments of the present invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0063] It should be noted that similar reference numerals and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures. Furthermore, in the description of this invention, terms such as "first," "second," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0064] Reference Appendix Figure 1 and attached Figure 2 This invention provides a method for optimizing the parameters of a microwave remote plasma source, comprising the following steps:

[0065] S1. After parameterized modeling of the microwave remote plasma source, determine an electron density parameter set according to an electron cutoff density, the electron density parameter set including an electron density of the microwave remote plasma source in a firing state and an electron density of the microwave remote plasma source in a working state; the electron cutoff density is a critical condition for distinguishing the firing state and the working state;

[0066] S2. Input material parameters of the working gas into the multi-physics field simulation software; the material parameters include relative permeability, conductivity and relative permittivity;

[0067] S3. Set a physical field in the multi-physics field simulation software as an electromagnetic wave field solved in a frequency domain;

[0068] S4. After configuring the frequency domain solver in the multi-physics field simulation software, obtain the electric field distribution of the microwave remote plasma source in the firing state and in the working state through the multi-physics field simulation software based on the parameterized modeling result;

[0069] S5. After defining a plurality of pointers for extracting pointer data in the multi-physics field simulation software, obtain a plurality of parameter combinations according to the electron density parameter set and a preset discharge tube thickness parameter set, and obtain pointer data corresponding to each pointer for each parameter combination;

[0070] S6. Determine an optimal discharge tube thickness according to all the pointer data.

[0071] In the embodiment, the microwave remote plasma source mainly includes three components: a rectangular waveguide 100, a microwave feed-in window 200 and a resonant chamber 300, the material of a discharge tube 310 in the resonant chamber 300 can be quartz, generally designed as 198 mm in length and 60 mm in outer diameter, and the thickness of the discharge tube 310 is generally in a range of 2-15 mm considering processing and use requirements. In actual application, microwaves are input from the rectangular waveguide 100, coupled to the ionized working gas in the resonant chamber 300 through the microwave feed-in window 200, and thus the plasma is generated. For example, the input electromagnetic wave is a TE mode with a frequency of 2.45 GHz, the working gas can be argon, the gas pressure of the working gas is 6 torr, the gas pressure of air in the rectangular waveguide 100 is 1 atm, and the microwave remote plasma source can realize different working states by changing the material parameters of the working gas.

[0072] It should be noted that the electric field distribution of the microwave remote plasma source in the firing state and in the working state is respectively obtained in step S4, so that researchers can determine whether the electric field distribution is reasonable and optimize the structure parameters on this basis, so as to realize quantitative evaluation of the reasonableness of the electric field distribution (step S5), and therefore step S4 is the basis for performing step S5.

[0073] ​In the process of parameterized modeling of the microwave remote plasma source, the initial value of the discharge tube thickness can be set to 10 mm first, and then the material parameters are set, wherein the magnetic permeability , the relative dielectric constant , and the conductivity are calculated according to the following formula:

[0074] ;

[0075] wherein, is the conductivity, is the electron density of the microwave remote plasma source in the working state, is the collision frequency, is represented by an imaginary unit, is the charge amount of the electron, is the electromagnetic wave frequency applied to the plasma.

[0076] Specifically, ;

[0077] wherein, is the gas particle density, is the average particle velocity, is the collision cross section (related to the ion radius).

[0078] In some embodiments, the electron cut-off density is calculated according to the following formula:

[0079] ;

[0080] wherein, is the electron cut-off density, is the mass of the electron, is the vacuum dielectric constant, is the charge amount of the electron, is the electromagnetic wave frequency applied to the plasma.

[0081] When the electromagnetic wave frequency applied to the plasma is the same as the cut-off frequency of the plasma, there is:

[0082] ;

[0083] wherein, is the cut-off frequency of the plasma.

[0084] Further, the specific steps in step S1 include:

[0085] S11. Set the electron density of the microwave remote plasma source in the ignition state to 0;

[0086] S12. Set the electron density of the microwave remote plasma source in the working state to be greater than the electron cut-off density.

[0087] When the microwave remote plasma source is in the ignition state, the propagation of electromagnetic waves in the resonant chamber 300 is similar to that in a vacuum. As the plasma is generated, the electron density gradually increases, and when , the electric field generated by the oscillatory motion of the electrons in the plasma will shield the electric field of the electromagnetic wave, at which point the microwave remote plasma source enters the steady state of operation, so the electron cut-off density can be used as a critical condition for distinguishing between the ignition state and the working state. In this embodiment, the electrical conductivity and electron density are introduced to simulate the ignition state and the working state. The electric field simulation and parameter scanning of the microwave remote plasma source are performed, and the change relationship between the evaluation parameters and the thickness parameters is output. This avoids the dependence of the structural optimization of the electric field on the personal experience of researchers, and is conducive to the researchers' evaluation of the rationality of the electric field distribution, which in turn is conducive to the researchers' optimization of the design parameters of the microwave remote plasma source, so as to quickly find the optimal design scheme. Specifically, , any value greater than is taken to simulate the working state of the microwave remote plasma source, for example or .

[0088] In the process of setting the physical field, the solution domain is the entire model domain, the constitutive relationship is set to relative permeability, and the surface in contact with the technical shell is set to an ideal metal conductor (i.e. the electric field is perpendicular to the surface). The boundary condition of the microwave feed inlet at the lowermost end is set to a rectangular port, the input power is 3kW, and the mode is .

[0089] In the process of configuring the frequency domain solver, the frequency is the real frequency of the fed-in microwave, i.e. 2.45GHz, and the electron density is set to 0. The electric field distribution of the microwave remote plasma source with a discharge tube thickness of 10mm in the ignition state can be obtained (see Appendix Figure 3 ), and then the electron density is set to be greater than the electron cut-off density. The electric field distribution of the microwave remote plasma source with a discharge tube thickness of 10mm in the working state can be obtained (see Appendix Figure 4 ).

[0090] In some embodiments, after the five pointers are defined in the multi-physical field simulation software in step S5, the pointer data of each pointer is obtained according to the following formula:

[0091] ;

[0092] wherein is the pointer data of the first pointer, is the maximum value of the microwave feed-in dielectric field mode of the microwave remote plasma source, an average of the electric field mode of the working gas of the microwave remote plasma source;

[0093] ;

[0094] wherein, is the pointer data of the second pointer, an average of the microwave feed-in dielectric field mode of the microwave remote plasma source;

[0095] ;

[0096] wherein, is the pointer data of the third pointer, an average of the discharge tube wall electric field mode of the microwave remote plasma source;

[0097] ;

[0098] wherein, is the pointer data of the fourth pointer;

[0099] ;

[0100] wherein, is the pointer data of the fifth pointer; a maximum of the discharge tube wall electric field mode of the microwave remote plasma source.

[0101] In actual application, a plurality of parameter combinations are obtained according to the electron density parameter set and the preset discharge tube thickness parameter set, for example, the electron density parameter set is , the discharge tube thickness parameter set is , and the parameter combinations include but are not limited to the following: the electron density is 0 and the discharge tube thickness is 2, the electron density is and the discharge tube thickness is 2, the electron density is 0 and the discharge tube thickness is 14, the electron density is and the discharge tube thickness is 14, and finally, the pointer data corresponding to each pointer is calculated according to the above formula for each parameter combination.

[0102] For the microwave remote plasma source, the ideal ignition state requires that the overall electric field intensity inside the discharge tube is high and the area of the high field intensity region is large, which is conducive to the excitation of the plasma, and at the same time, it is necessary to avoid the field intensity in the microwave feed-in dielectric (such as ceramic) being too high to damage the material; and the ideal working state requires that a high-intensity and uniformly distributed electric field is maintained on the discharge tube wall, which is conducive to ensuring the generation of continuous and uniform plasma, and at the same time, to prevent the material from being damaged due to the electric field effect after a long time of operation, therefore, the electric field mode extremum inside the discharge tube wall and the microwave feed-in dielectric needs to be minimized.

[0103] It should be noted that the pointer data essentially reflects the ratio of the electric field mode between the relevant electric field modes.

[0104] Specifically, the specific steps in step S6 include:

[0105] S61. Determine the optional discharge tube thickness of the microwave remote plasma source in the ignition state according to the pointer data of the first pointer and the pointer data of the second pointer, and take it as a first thickness set;

[0106] S62. Determine the optional discharge tube thickness of the microwave remote plasma source in the working state according to the pointer data of the third pointer, the pointer data of the fourth pointer and the pointer data of the fifth pointer, and take it as a second thickness set;

[0107] S63. Determine the optimal discharge tube thickness according to the first thickness set and the second thickness set.

[0108] Taking the setting of the parameters related to the above embodiment as an example (the microwave feed-in medium is ceramic and the working gas is argon), according to the ideal requirements of the ignition state, referring to the attached Figure 5 By comparing the pointer data of the first pointer and the pointer data of the second pointer, it can be seen that the electric field mode values (including the maximum value and the average value, i.e. and ) of the microwave feed-in medium and the electric field mode values (including the average value, i.e. ) of the working gas change overall consistently, at the same time, the electric field mode values of the microwave feed-in medium are overall higher than the electric field mode values of the working gas, and the maximum value appears when the discharge tube thickness is 8mm, and the secondary extreme value appears when the discharge tube thickness is 13mm, so the discharge tube thickness should be avoided at these two values; and three minimum values appear when the discharge tube thickness is 5mm, 10mm and 15mm, respectively, among which the discharge tube thickness of 15mm is the overall minimum value.

[0109] According to the ideal requirements of the working state, referring to the attached Figure 6 By comparing the pointer data of the third pointer, the pointer data of the fourth pointer and the pointer data of the fifth pointer, it can be seen that the maximum value of the electric field mode of the discharge tube wall (i.e. ) and the maximum value of the electric field mode of the microwave feed-in medium (i.e. ) generally show a trend of first decreasing and then increasing with the increase of the discharge tube thickness, compared with the average value of the electric field mode of the discharge tube wall (i.e. ) and the average value of the electric field mode of the microwave feed-in medium (i.e. ), the change amplitude is relatively small, at this time, the pointer data of the third pointer, the pointer data of the fourth pointer and the pointer data of the fifth pointer increase with the increase of the discharge tube thickness, and reach a minimum value when the discharge tube thickness is 4-5mm, and then generally show a growth trend.

[0110] Further, the specific steps in step S63 include:

[0111] S631. Take the minimum value of the discharge tube thickness that belongs to both the first thickness set and the second thickness set as the optimal discharge tube thickness.

[0112] Taking into account the ignition state and the working state, the optimal discharge tube thickness can be determined to be 5mm.

[0113] In the above embodiment, the ignition state with an electron density of 0 and the working state with an electron density exceeding the electron cutoff density are considered respectively, and the calculation of the parameterized evaluation index of the rationality of the electric field distribution can quickly determine the corresponding optimal and suboptimal size parameter range after parameter scanning, thereby facilitating researchers to optimize the design parameters of the microwave remote plasma source.

[0114] Please refer to Figure 7 , Figure 7 is a microwave remote plasma source parameter optimization design device in some embodiments of the present application, which is integrated in the form of a computer program in the back-end control device, comprising:

[0115] The first determination module 400 is configured to determine an electron density parameter set according to the electron cutoff density after parameterized modeling of the microwave remote plasma source, wherein the electron density parameter set includes the electron density of the microwave remote plasma source in the ignition state and the electron density of the microwave remote plasma source in the working state; and the electron cutoff density is used as a critical condition for distinguishing the ignition state and the working state.

[0116] The input module 500 is configured to input the material parameters of the working gas into the multi-physics field simulation software; and the material parameters include the relative magnetic permeability, the electrical conductivity and the relative dielectric constant.

[0117] The setting module 600 is configured to set the physical field in the multi-physics field simulation software as an electromagnetic wave field solved in the frequency domain.

[0118] The first acquisition module 700 is configured to obtain the electric field distribution of the microwave remote plasma source in the ignition state and in the working state through the multi-physics field simulation software based on the parameterized modeling results after configuring the frequency domain solver in the multi-physics field simulation software.

[0119] The second acquisition module 800 is configured to obtain a plurality of parameter combinations according to the electron density parameter set and a preset discharge tube thickness parameter set after defining a plurality of pointers for extracting pointer data in the multi-physics field simulation software, and obtain the pointer data corresponding to each pointer for each parameter combination.

[0120] The second determining module 900 is configured to determine the optimal discharge tube thickness according to all the pointer data.

[0121] In some embodiments, the first determining module 400 is configured to perform the following when determining the electron density parameter set according to the electron cut-off density:

[0122] S11. Set the electron density of the microwave remote plasma source in the ignition state to 0;

[0123] S12. Set the electron density of the microwave remote plasma source in the working state to be greater than the electron cut-off density.

[0124] In some embodiments, the second determining module 900 is configured to perform the following when determining the optimal discharge tube thickness according to all the pointer data:

[0125] S61. Determine the discharge tube thicknesses selectable for the microwave remote plasma source in the ignition state according to the pointer data of the first pointer and the pointer data of the second pointer, and take the first thickness set;

[0126] S62. Determine the discharge tube thicknesses selectable for the microwave remote plasma source in the working state according to the pointer data of the third pointer, the pointer data of the fourth pointer and the pointer data of the fifth pointer, and take the second thickness set;

[0127] S63. Determine the optimal discharge tube thickness according to the first thickness set and the second thickness set.

[0128] In some embodiments, the second determining module 900 is configured to perform the following when determining the optimal discharge tube thickness according to the first thickness set and the second thickness set:

[0129] S631. Take the minimum value of the discharge tube thicknesses belonging to both the first thickness set and the second thickness set as the optimal discharge tube thickness.

[0130] Please refer to Figure 8 , Figure 8A structural schematic diagram of an electronic device provided by the embodiment of the present application, the present application provides an electronic device 13, comprising: a processor 1301 and a memory 1302, the processor 1301 and the memory 1302 are interconnected and communicate with each other through a communication bus 1303 and / or other forms of connection mechanism (not marked), the memory 1302 stores computer readable instructions executable by the processor 1301, when the electronic device runs, the processor 1301 executes the computer readable instructions to execute the microwave remote plasma source parameter optimization design method in any optional implementation manner of the above-mentioned embodiment, to realize the following functions: after parameterizing modeling of the microwave remote plasma source, the electron density parameter set is determined according to the electron cut-off density, the electron density parameter set includes the electron density of the microwave remote plasma source in the ignition state and the electron density of the microwave remote plasma source in the working state;The electron cut-off density is used as a critical condition for distinguishing the ignition state and the working state;The material parameters of the working gas are input into the multi-physics field simulation software;The material parameters include relative permeability, conductivity and relative permittivity;The physical field in the multi-physics field simulation software is set as the electromagnetic wave field of frequency domain solution;After the frequency domain solver is configured in the multi-physics field simulation software, the electric field distribution of the microwave remote plasma source in the ignition state and in the working state is obtained through the multi-physics field simulation software based on the parameterization modeling result;After defining a plurality of pointers for extracting pointer data in the multi-physics field simulation software, a plurality of parameter combinations are obtained according to the electron density parameter set and the preset discharge tube thickness parameter set, and the pointer data corresponding to each pointer is obtained for each parameter combination;Determine the optimal discharge tube thickness according to all pointer data.

[0131] The embodiment of the present application provides a computer readable storage medium, which stores a computer program, and the computer program is executed by a processor to execute the microwave remote plasma source parameter optimization design method in any optional implementation manner of the above embodiment to realize the following functions: after parameterized modeling is performed on the microwave remote plasma source, an electron density parameter set is determined according to an electron cut-off density, the electron density parameter set includes an electron density of the microwave remote plasma source in an ignition state and an electron density of the microwave remote plasma source in a working state; the electron cut-off density is used as a critical condition for distinguishing the ignition state and the working state; material parameters of a working gas are input into multi-physics field simulation software; the material parameters include relative magnetic permeability, conductivity and relative permittivity; a physical field in the multi-physics field simulation software is set as an electromagnetic wave field of frequency domain solving; after a frequency domain solver is configured in the multi-physics field simulation software, based on a parameterized modeling result, the electromagnetic field distribution of the microwave remote plasma source in the ignition state and in the working state is obtained through the multi-physics field simulation software; after a plurality of pointers for extracting pointer data are defined in the multi-physics field simulation software, a plurality of parameter combinations are obtained according to the electron density parameter set and a preset discharge tube thickness parameter set, and pointer data corresponding to each pointer is obtained for each parameter combination; and the optimal discharge tube thickness is determined according to all the pointer data.

[0132] The computer readable storage medium can be implemented by any type of volatile or nonvolatile storage device or combination thereof, such as static random access memory (SRAM), electrically erasable programmable read-only memory (EEPROM), erasable programmable read-only memory (EPROM), programmable read-only memory (PROM), read-only memory (ROM), magnetic memory, flash memory, magnetic disk or optical disk.

[0133] In the embodiments of the present application, it should be understood that the disclosed apparatus and method can be implemented in other manners. The embodiments described above are merely exemplary, for example, the division of the units is only a logical function division, and there can be another division manner in actual implementation; for example, a plurality of units or components can be combined or integrated into another system, or some features can be ignored or not executed. In addition, the displayed or discussed mutual couplings or direct couplings or communication connections can be indirect couplings or communication connections through some interfaces, devices or units, and can be in electrical, mechanical or other forms.

[0134] In addition, the units described as separate components can or can not be physically separate, and the components displayed as units can or can not be physical units, i.e., can be located in one place, or can be distributed on a plurality of network units. Some or all of the units can be selected according to actual needs to achieve the purposes of the embodiments of the present application.

[0135] In addition, the functional modules in each of the embodiments of the present application can be integrated together to form an independent part, or each module can exist independently, or two or more modules can be integrated to form an independent part.

[0136] In this article, the relationship terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations.

[0137] The above description is only some embodiments of the present application, and is not used to limit the protection scope of the present application. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present application shall be included in the protection scope of the present application.

Claims

1. A method for parameter optimization design of a microwave remote plasma source, characterized in that, The method comprises the following steps: S1. After parameterized modeling of the microwave remote plasma source, determining an electron density parameter set according to an electron cutoff density, the electron density parameter set containing an electron density of the microwave remote plasma source in an ignition state and an electron density of the microwave remote plasma source in a working state; the electron cutoff density serving as a critical condition for distinguishing the ignition state and the working state; S2. Inputting material parameters of a working gas into a multi-physics field simulation software; the material parameters including relative magnetic permeability, electrical conductivity and relative dielectric constant; S3. Setting a physical field in the multi-physics field simulation software as an electromagnetic wave field solved in a frequency domain; S4. After configuring a frequency domain solver in the multi-physics field simulation software, obtaining, by the multi-physics field simulation software, electric field distributions of the microwave remote plasma source in the ignition state and in the working state based on a parameterized modeling result; S5. After defining a plurality of pointers for extracting pointer data in the multi-physics field simulation software, obtaining a plurality of parameter combinations according to the electron density parameter set and a preset discharge tube thickness parameter set, and obtaining pointer data corresponding to each of the pointers for each of the parameter combinations; S6. Determining an optimal discharge tube thickness according to all the pointer data; In step S5, after defining five pointers in the multi-physics field simulation software, the pointer data of each of the pointers is obtained according to the following formula: ； wherein a pointer data being a first pointer, a maximum value of a microwave feed-in dielectric field mode of the microwave remote plasma source, an average value of a working gas electric field mode of the microwave remote plasma source; ； wherein a pointer data being a second pointer, is an average value of a microwave feed-in dielectric field mode of the microwave remote plasma source; ； wherein a pointer data being a third pointer, is an average value of the discharge tube wall electric field mode of the microwave remote plasma source; ； wherein pointer data for a fourth pointer; ； wherein a pointer data for a fifth pointer; is the maximum value of the discharge tube wall electric field mode of the microwave remote plasma source.

2. The method of claim 1, wherein, The electron cutoff density is calculated according to the following formula: ； wherein, is the electron cut-off density, is the mass of an electron, is the vacuum permittivity, is the charge of an electron, is the frequency of the electromagnetic wave applied on the plasma.

3. The method of claim 1, wherein, The electrical conductivity is calculated according to the following formula: ； wherein, is the conductivity, is the electron density of the microwave remote plasma source in the working state, is the mass of an electron, is the collision frequency, is expressed as an imaginary unit, is the charge of an electron, is the frequency of the electromagnetic wave applied to the plasma.

4. The method of claim 1, wherein, The specific steps in step S1 include: S11. Setting the electron density of the microwave remote plasma source in the ignition state as 0; S12. Setting the electron density of the microwave remote plasma source in the working state as greater than the electron cutoff density.

5. The method of claim 1, wherein, The specific steps in step S6 include: S61. Determining discharge tube thicknesses selectable for the microwave remote plasma source in the ignition state according to the pointer data of the first pointer and the pointer data of the second pointer and taking the discharge tube thicknesses as a first thickness set; S62. Determining discharge tube thicknesses selectable for the microwave remote plasma source in the working state according to the pointer data of the third pointer, the pointer data of the fourth pointer and the pointer data of the fifth pointer and taking the discharge tube thicknesses as a second thickness set; S63. Determining an optimal discharge tube thickness according to the first thickness set and the second thickness set.

6. The method of claim 5, wherein the microwave remote plasma source is designed to have a frequency of 2.45 GHz. The specific steps in step S63 include: S631. Taking the minimum value of discharge tube thicknesses belonging to both the first thickness set and the second thickness set as the optimal discharge tube thickness.

7. A microwave remote plasma source parameter optimization design device using the microwave remote plasma source parameter optimization design method according to any one of claims 1 to 6, characterized by The method comprises: A first determining module, configured to determine an electron density parameter set according to an electron cutoff density after parameterized modeling of the microwave remote plasma source, the electron density parameter set containing an electron density of the microwave remote plasma source in an ignition state and an electron density of the microwave remote plasma source in a working state; the electron cutoff density serving as a critical condition for distinguishing the ignition state and the working state; An input module is configured to input material parameters of a working gas into a multi-physics simulation software, wherein the material parameters include relative magnetic permeability, electrical conductivity and relative dielectric constant; A setting module is configured to set a physical field in the multi-physics simulation software as an electromagnetic wave field solved in a frequency domain; A first obtaining module is configured to obtain, based on a parameterized modeling result, electric field distributions of the microwave remote plasma source in a firing state and in a working state through the multi-physics simulation software after a frequency domain solver is configured in the multi-physics simulation software; A second obtaining module is configured to obtain a plurality of parameter combinations according to the electron density parameter set and a preset discharge tube thickness parameter set, and obtain pointer data corresponding to each pointer for each parameter combination after a plurality of pointers for extracting the pointer data are defined in the multi-physics simulation software; A second determining module is configured to determine an optimal discharge tube thickness according to all the pointer data.

8. An electronic device, comprising: A computer readable storage medium stores a computer readable instruction, and the computer readable instruction is executed by a processor to perform the steps of the microwave remote plasma source parameter optimization design method in any one of claims 1-6.

9. A computer readable storage medium having stored thereon a computer program, characterized in that, The computer program is executed by the processor to perform the steps of the microwave remote plasma source parameter optimization design method in any one of claims 1-6.

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