Support bracket

Abstract

The present application relates to a support bracket configured to support a substrate within a substrate container, the support bracket comprising: at least one support collar configured to couple the support bracket to at least one support post such that the support bracket is suspended from the at least one support post.

Description

[0001] Divisional Application Information

[0002] This application is a divisional application of the invention patent application with application date of February 9, 2017, application number 201780015202.5, and invention name “Microenvironment for Flexible Substrates”.

[0003] CROSS REFERENCE TO RELATED APPLICATIONS

[0004] This application claims the benefit of U.S. Provisional Application No. 62 / 293,240, filed on February 9, 2016, and U.S. Provisional Application No. 62 / 294,194, filed on February 11, 2016. The entire contents of those applications are incorporated herein by reference. Technical Field

[0005] The present invention relates to support systems for containing substrates for storage and transport, and more particularly, to thin substrates in substrate containers. Background Art

[0006] Many conventional substrate containers, such as front opening unification pods (FOUPs), are configured to support substrates from their edges. However, as electronic devices become more compact and miniaturized, emphasis is placed on reducing the thickness of electronic substrates or providing flexible substrates, such as flexible electronic devices and displays housed therein. As a result, substrates are becoming increasingly thinner, making them unable to be self-supporting when suspended from their edges in a horizontal orientation.

[0007] In view of the above, there is a need for a container system that can support a flexible substrate. Summary of the invention

[0008] The present invention generally relates to support systems for maintaining flexible substrates in a substantially flat state. As used herein, a "substrate" is a structure having a substantially uniform thickness and being substantially flat or desirably substantially flat when properly supported. Substrate forms include thin plates, flat plates, and plies. The substrate may have any shape, including circular, rectangular, and polygonal. The substrate may have a homogeneous or multilayer material, such as glass, silicon, glass epoxy, or a thin film. The substrate may also include a composition of materials, such as a doped material (e.g., glass epoxy doped with copper or carbon), a laminate or coating composite, or a core material with a coating deposited thereon. Non-limiting examples of substrates include master masks used in lithographic applications and silicon wafers that have been processed or partially processed by lithographic techniques. As used herein, a "flexible substrate" is a substrate that cannot maintain a substantially flat state without applying tension when supported by its periphery or individual points.

[0009] Various embodiments are directed to using FOUPs (eg, 300 mm or 450 mm FOUPs) to transport, store, and handle flexible substrates of varying thicknesses. Some embodiments are also directed to transferring flexible substrates into and out of FOUPs between varying processes or process equipment.

[0010] In one illustrative embodiment, a substrate container includes a shell defining an opening and a door configured to selectively seal the opening. A cantilever support bracket is configured to support a substrate within the shell. Preferably, the support bracket is suspended from at least one support column. In a specific embodiment, the cantilever support bracket may include a support collar configured to couple the support bracket to a support column. The support collar may surround the support column.

[0011] In one embodiment, the cantilever support bracket includes a registration ledge configured to contact a rearward edge of a substrate supported by the support bracket. The support bracket further includes a tab feature extending forwardly from the registration ledge, the tab feature configured to limit lateral movement of a substrate supported by the support bracket.

[0012] The cantilevered support bracket may include a pin extending upwardly from the support bracket, the pin being configured to mate with a registration hole of a substrate supported by the cantilevered support bracket.In a preferred embodiment, the pin has a tapered profile near a distal end of the pin.

[0013] A holding mechanism may be coupled to the door. In one embodiment, the holding mechanism may be configured to prevent movement of the substrate by clamping the substrate to the cantilevered support bracket in a first direction. Preferably, the holding mechanism is further configured to prevent movement of the substrate supported by the support frame in at least one of a second direction or a different direction.

[0014] In another embodiment, a substrate container includes a shell defining an opening, a door configured to selectively seal the opening, and a support frame. The support frame includes a frame configured to support a substrate and a latch assembly coupled to the frame. The frame defines an inner perimeter and an outer perimeter. The latch assembly is configured to selectively engage a substrate (and in a specific embodiment, a flexible substrate) supported by the frame at a position between the inner perimeter and the outer perimeter.

[0015] In a particular embodiment, the frame may further include a spring member in contact with the latch assembly. The spring member is configured to bias the latch assembly into a latched configuration and a fully open configuration. In one aspect, the latch assembly includes a cam protrusion in contact with the spring member. Preferably, the spring member is suspended from the frame and integrally formed with the frame.

[0016] The latch assembly may include a hinge pin and a latch arm configured to pivot about the hinge pin.Preferably, the latch arm includes a rib configured to selectively engage a substrate supported by the frame.

[0017] In one embodiment, the frame includes inset corners configured to provide corner access from outside the frame to a substrate supported by the frame.

[0018] The above summary is provided to facilitate understanding of some innovative features characteristic of the present invention and is not intended to be a complete description. A full understanding of the present invention can be obtained by taking into account the specification, claims, drawings and abstract as a whole. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The invention may be more fully understood in view of the following description of various illustrative embodiments taken in conjunction with the accompanying drawings, in which:

[0020] Figure 1 is a perspective view of a substrate container having a support bracket with a door removed in accordance with an embodiment of the present invention.

[0021] Figure 2 yes Figure 1 A partial cross-sectional view of a substrate container.

[0022] Figure 3 yes Figure 1 A partial cross-sectional view of a substrate container.

[0023] Figure 4 yes Figure 1 A side cross-sectional view of a substrate container.

[0024] Figure 5 yes Figure 1 A side cross-sectional view of a substrate container.

[0025] Figure 6 yes Figure 1 A perspective view of a substrate container with the shell of the substrate container removed to show the internal structure.

[0026] Figure 7 yes Figure 1 A perspective view of a substrate container with the shell of the substrate container removed to show the internal structure.

[0027] Figure 8 is a perspective view of a cantilever support bracket according to an embodiment of the present invention.

[0028] Fig. 9 is a perspective view of a cantilever support bracket according to an embodiment of the present invention.

[0029] Fig.10is a side cross-sectional view of a substrate container according to an embodiment of the present invention.

[0030] Fig.11 is a perspective view of a support bracket including a pin according to an embodiment of the present invention.

[0031] Fig.12 yes Fig.11 An enlarged view of a portion of .

[0032] Fig.13 yes Fig.11 Side view of the pins of the support bracket.

[0033] Fig.14 is supported by Fig.11 A perspective view of a substrate on a support bracket.

[0034] Fig.15 yes Fig.14 An enlarged view of a portion of .

[0035] Fig.16A and 16B A cantilever support bracket according to an embodiment of the present invention is shown.

[0036] Fig.17 is a partial side view of a door-based retainer according to an embodiment of the present invention.

[0037] Fig.18A and 18B An open substrate container is shown according to an embodiment of the present invention.

[0038] Fig.19 A thin substrate supported by a frame is shown according to an embodiment of the present invention.

[0039] Fig. 20A and 20B Display of some components Fig.19 framework.

[0040] Fig.21 is a schematic diagram of a latch assembly interacting with a cantilever spring according to an embodiment of the present invention.

[0041] Fig. 22 yes Fig.21 Schematic diagram of the latch assembly and cantilever spring.

[0042] Fig.23 yes Fig.21 Schematic diagram of the latch assembly and cantilever spring.

[0043] Fig.24A and 24B Display of some components Fig.19 Thin substrate and frame.

[0044] Fig.25A 1 to C show a thin substrate supported by a frame with recessed corners according to an embodiment of the present invention.

[0045] Fig.26A and 26B Display of some components Fig.25A To the thin substrate and frame of C.

[0046] Fig. 27 A thin substrate supported by a frame with elongated latches is shown in accordance with an embodiment of the invention.

[0047] Although the present invention is susceptible to various modifications and alternative forms, its specific contents have been shown in the drawings by way of example and will be described in detail. However, it should be understood that it is not intended to limit the aspects of the present invention to the specific illustrative embodiments described. On the contrary, it is intended to cover all modifications, equivalents and substitutes that fall within the spirit and scope of the present invention. DETAILED DESCRIPTION

[0048] As used in this specification and the appended claims, the singular forms "a", "an", and "the" include plural referents unless the context clearly dictates otherwise. As used in this specification and the appended claims, the term "or" is generally used to mean including "and / or" unless the context clearly dictates otherwise.

[0049] The terms "preferred" and "preferably" refer to embodiments of the invention that may provide particular advantages under particular circumstances. However, other embodiments may also be preferred under the same or other circumstances. In addition, the description of one or more preferred embodiments does not imply that other embodiments are not useful, and is not intended to exclude other embodiments from the scope of the invention.

[0050] The following detailed description should be read with reference to the drawings, wherein similar elements in different drawings are marked with the same reference numerals. The detailed description and drawings (which are not necessarily drawn to scale) depict illustrative embodiments and are not intended to limit the scope of the invention. The illustrative embodiments depicted are intended to be exemplary only. If there is no other explicit provision to the contrary, the selected features of any illustrative embodiment may be incorporated into additional embodiments.

[0051] refer to Figures 1 to 31 to depict a front opening unified package (FOUP) 1100 according to an embodiment of the present invention. FOUP 1100 includes a shell portion 1105 defining a door frame 1110. A plurality of thin substrates 1115 are received within shell portion 1105, each of the plurality of thin substrates 1115 being disposed on a respective support bracket 1120. Thin substrates 1115 are characterized by having a forward edge 1200, a rearward edge 1205, and opposed lateral edges 1210, 1211 extending between forward edge 1200 and rearward edge 1205, as shown in FIG. Figure 2 As shown in .

[0052] The support bracket 1120 includes a support collar 1300 defined at a rear end thereof, such as Figure 3 The support bracket 1120 is suspended from a support column 1215 passing through a support collar 1300, as shown in FIG. Figure 2 . The support posts 1215 are disposed proximate the rear wall 1220 of the shell portion 1105. The width of the support bracket 1120 is smaller than the resident thin substrate 1115. In various embodiments, the support bracket 1120 is made of a low density, high modulus material. The support bracket 1120 may include a cushioning material, such as a soft foam, mounted to the registration surface. Figure 6 and 7 FOUP 1100 is shown without shell portion 1105.

[0053] Functionally, the support bracket 1120 is adapted to support the thin substrate 1115 to allow accurate automated loading and unloading of the flexible substrate. The small width of the support bracket 1120 relative to the residing thin substrate 1115 enables automated edge grip access. The low density and / or high modulus material prevents the support bracket 1120 from sagging.

[0054] refer to Figure 4 and 5 1400. Each support bracket 1120 may include a registration ledge 1400 near the rear end. Figure 3 , defining a minimum dimension D1 in the z-direction between the front of the registration ledge 1400 and the front edge 1305 of the support bracket 1120. In one embodiment, the minimum dimension D1 is sized to be substantially equal to the length of the thin substrate 1115 in the z-dimension. Return to Figure 5 , the door buffer 1500 is shown mounted to the door 1505. The door buffer 1500 is adapted to press the forward edge 1200 of the thin substrate 1115 to its corresponding support bracket 1120 after being engaged within the door frame 1110. The door 1505, the buffer 1500, or both may also be configured to interlock with the front edge 1305 of the support bracket 1120.

[0055] Functionally, matching the z dimension of the thin substrate 1115 to the dimension D1 of the support bracket 1120 enables the thin substrate 1115 to be positioned flush with the front of the support bracket 1120 by registering the rearward edge 1205 of the thin substrate 1115 to the registration ledge 1400 of the support bracket 1120. The forward edge 1200 of the thin substrate 1115 is pressed against the front of the support bracket 1120 to lock the thin substrate 1115 to the support bracket 1120 during shipping and handling. The interlocking of the support bracket 1120 with the cushion 1500 or door 1505 increases the stability of the array of support brackets 1120 during handling and transportation of the FOUP 1100.

[0056] refer to Figure 8 and 9 To present an isolated support bracket according to an embodiment of the present invention. Figure 8 In the embodiment of the present invention, the support bracket 1120 includes a substantially flat, continuous surface 1800. Fig. 9 , the support bracket 1900 defines an open grid or mesh structure 1905. In some embodiments, the support bracket 1120, 1900 includes a tab feature 1805 extending forward from the end of the registration ledge 1400 to limit lateral movement of the residing thin substrate. The tab feature 1805 provides a locating feature for the substrate and may also reinforce the bracket 1120, 1900 to limit the unsupported length of the cantilever arrangement.

[0057] refer to Fig.10 1 and 1 , a cross-sectional view of a FOUP 1100 showing example gaps between a shell portion 1105 and the lowermost supporting bracket 1120 and the uppermost supporting bracket 1120 is provided. One skilled in the art will recognize that the specific gap dimensions are a design choice dependent upon a variety of factors including, but not limited to, the specific substrate, bracket dimensions, and end-use process and application.

[0058] refer to Figures 11 to 13 21 to depict a modified support bracket 2100 in accordance with an embodiment of the present invention. The modified support bracket 2100 includes a plurality of pins 2105 near a leading edge 2110 of the bracket 2100, the pins 2105 extending upwardly from the bracket 2100. The pins 2105 are generally cylindrical in shape with a tapered or frusto-conical profile 2115 near a distal end 2120. In some embodiments, additional pins (not depicted) are disposed near a registration ledge 2125 of the modified support bracket 2100. The pins 2105 may be integrally formed with the modified support bracket 2100, or alternatively, formed separately from the modified support bracket 2100 and press-fitted into the modified support bracket 2100.

[0059] refer to Fig.14 and 1524 shows a modified support bracket 2100 supporting a modified thin substrate 2400. The thin substrate 2400 includes registration holes 2405 located in a predetermined area near an edge 2410 of the thin substrate 2400. The registration holes 2405 are spaced relative to each other and relative to the distance from the registration ledge 2125 according to the spacing of the pins 2105 of the modified support bracket 2100.

[0060] In operation, the rearward edge of the thin substrate 2400 is registered with the registration ledge 2125, and the forward edge is lowered so that the registration hole 2405 of the thin substrate 2400 passes through the pin 2105. The frustoconical profile 2115 helps to align the thin substrate 2400 so that the registration hole 2405 is centered when the thin substrate 2400 is lowered into contact with the upper surface of the modified support bracket 2100.

[0061] refer to Fig.16A and 16B 200 is schematically depicted in accordance with an embodiment of the present invention. The support bracket 2800 includes a plurality of pins 2805, wherein two pins 2805 are located near the front of the support bracket 2800 and two pins 2805 are located near the rear of the support bracket 2800. The pins 2805 function in the same manner as the pins 2105. In addition, a FOUP 2810 is illustrated as having a holding mechanism 2815 actuated by a door (not depicted) of the FOUP 2810. When the holding mechanism 2815 is actuated, the holding mechanism 2815 contacts a substrate (not depicted) supported on the support bracket 2800 to hold the substrate on the support bracket 2800. Fig. 16B An optional front support 2820 is shown that may be used to provide additional stability to the support bracket 2800.

[0062] Fig.17 3500. Specifically, FOUP 3500 includes door 3505 and shell 3510. Retention mechanism 3515 is coupled to door 3505. Retention mechanism 3515 includes spring 3520, roller 3525, and downwardly extending protrusion 3530. Substrate 3535 is shown supported on cantilever support bracket 3540. Spring 3520 and roller 3525 retain substrate 3535 in the z-direction, while protrusion 3530 retains substrate 3535 in the x-direction.

[0063] refer to Fig.18A and 18B1 to depict an open substrate container 30 housing a plurality of framed thin substrates 32 in accordance with an embodiment of the present invention. The framed thin substrates 32 may be supported at their edges by racks (not depicted) such as found in a conventional front opening unification pod (FOUP). To show the interior of the substrate container 30, the substrate container 30 is presented without a door. In the depicted embodiment, the substrate container 30 is capable of accommodating 15 framed thin substrates 32.

[0064] Alternative methods for supporting flexible substrates include a frame and latch assembly that can be attached to or supported by conventional guides or slots in the cantilever support of the present invention or a substrate container. Figure 19 to 2 4, the framed flexible substrate 32 includes a flexible substrate 34 and a frame assembly 36. The frame assembly 36 includes a frame 42 and a plurality of latch assemblies 44. In the depicted embodiment, the latch assemblies 44 are disposed on opposite sides and proximate to the corners of the frame 42.

[0065] In certain embodiments, each latch assembly 44 may include a hinge pin 46 supported on opposite ends by a post 48, such as Fig.24A The post 48 may include a threaded hole 52 for engaging a fastener 54, such as Fig.19 and 20B The latch arm 56 pivots about the hinge pin 46. The latch arm 56 includes a proximal portion 58 that pivots about the hinge pin 46 and a distal portion 62 that defines a hold-down feature 64, as shown in FIG. Figures 21 to 23 In the depicted embodiment, the hold-down feature 64 is a rib 66 that extends parallel to the hinge pin 46. The proximal end portion 58 of the latch arm 56 includes a cam protrusion 68. The cam protrusion 68 and the hold-down feature 64 extend from the same side of the latch arm 56.

[0066] The latch assembly 44 may be attached or mounted to the frame 42. The frame 42 defines a through hole 72 through which the fastener 54 passes to fasten the post 48 to the frame 42, such as Fig. 20A 20 to 23. Preferably, the cantilever spring 74 is integrally formed with the frame 42, defined by a through slot 76 framing the cantilever spring 74. The cantilever spring 74 includes a fixed end 82 and a free end 84, the free end 84 being disposed proximate the hinge pin 46. Alternatively, a non-integral mechanical spring (not depicted) may be used.

[0067] like Fig.24A As best seen in the embodiment of , the frame 42 defines an outer perimeter 92 and an inner perimeter 94 and is sized such that an edge portion 96 of the thin substrate 34 overlaps the inner perimeter 94 to contact a pre-designated overlap region 98 of the frame 42 near the outer perimeter 92 .

[0068] In various embodiments, the frame 42 is made of a high modulus material (i.e., a material having an elastic modulus greater than 65 gigapascals (GPa)). In some embodiments, the frame 42 is made of a carbon fiber composite (e.g., carbon fiber filled epoxy). The latch assembly 44 can be made of a metal (e.g., aluminum or stainless steel).

[0069] In assembly, the hinge pin 46 is inserted through a transverse hole 102 extending transversely through the proximal portion 58 of the latch arm 56 (eg, Fig.21 4). The hinge pin 46 and the transverse hole 102 define a clearance fit that enables the latch arm 56 to rotate about the hinge pin 46. Alternatively, the hinge pin 46 may be press-fit or otherwise formed to extend laterally from the side of the latch arm 56 and be configured to rotate within the post 48. The latch arm 56 is mounted to the frame 42 so that the hold-down feature 64 faces or contacts the frame 42. Fig. 20A and 20B , the threaded hole 52 of the post 48 is aligned over the through hole 72 on the top side 106 of the frame 42. The fastener 54 is fed through the through hole 72 from the bottom side 108 of the frame 42 and is threaded into the threaded hole 52 of the post 48 to secure the latch assembly 44 to the frame 42. This process is repeated for each of the plurality of latch assemblies 44.

[0070] Functionally, the latch arm 56 can be selectively placed into the latch configuration 112 (eg, Fig.21 ) or a fully open configuration 114 (as shown in Fig.23 ). In the latch configuration 112, the latch arm 56 is rotated toward the frame 42 so that the hold-down feature 64 contacts the frame 42 or the residing thin substrate 34. The area or zone within which the hold-down feature 64 contacts the frame 42 or over which the thin substrate 34 contacts the hold-down feature 64 is referred to herein as the contact zone 116 of the frame 42 (e.g., Fig.23 24). The contact strip 116 falls into the overlap region 98 of the frame 42. In the fully open configuration 114, the latch arm 56 is rotated away from the frame 42. Additionally, in the fully open configuration 114, the latch arm 56 can completely clear the overlap region 98 of the frame 42 to enable the thin substrate 34 to be lowered onto the frame 42 without excessive bending or accidental collision with the latch assembly 44.

[0071] like Figures 21 to 23 As shown in FIG. 8 , the cam protrusion 68 engages the cantilever spring 74 near the free end 84 to apply a biasing force Fb to the latch arm 56. Fig.21In the latch configuration 112, the free end 84 applies a biasing force Fb to the first flat or pause portion 122 of the cam protrusion 68, which maintains the latch assembly 44 in the latch configuration 112 and causes the hold-down feature 64 to engage the frame 42 or the resident thin substrate 34 with a downward holding force Fr. Fig. 22 , after the latch assembly 44 is opened, the latch assembly 44 enters the intermediate configuration 118, wherein the rounded or raised portion 124 of the cam protrusion 68 engages the cantilever spring 74. When the raised portion 124 is engaged, the raised portion 124 further deflects the free end 84 of the cantilever spring 74 and increases the biasing force Fb applied to the cam protrusion 68. When the raised portion 124 of the cam protrusion 68 passes the cantilever spring 74, the latch assembly 44 enters the fully open configuration 114, as shown in FIG. Fig.23 In the fully open configuration 114, the second flat or pause portion 126 of the cam lobe 68 engages the cantilever spring 74. The free end 84 of the cantilever spring 74 applies a biasing force Fb to the second pause portion 126 of the cam lobe 68, which maintains the latch assembly 44 in the fully open configuration 114.

[0072] When the raised portion 124 is engaged, the biasing force Fb applied by the cantilever spring 74 to the cam protrusion 68 is greater than the biasing force Fb applied by the cantilever spring 74 to the cam protrusion 68 when the first pause portion 122 or the second pause portion 126 is engaged. This force forces the latch assembly 44 off-center when in the intermediate configuration 118. Accordingly, the latch assembly 44 is pre-positioned to remain in the latched configuration 112 or the fully open configuration 114. In addition, the higher force required to enter the intermediate configuration 118 from the latched configuration 112 or the fully open configuration 114 prevents the latch assembly 44 from entering the intermediate configuration 118 unauthorizedly. The latch assembly 44 enters the intermediate configuration 118 only by imposing an external influence on the latch arm 56, such as the action of a robot or an operator.

[0073] In operation, the thin substrate 34 is registered on the frame 42 so that the edge portion 96 of the thin substrate 34 is aligned over the overlap region 98 of the frame 42. In some embodiments, during the registration of the thin substrate 34, the latch assembly 44 is in a fully open configuration 114. Next, the latch arm 56 of the latch assembly 44 is rotated to bring the latch assembly 44 into the latch configuration 112, wherein the hold-down feature 64 engages the edge portion 96 of the thin substrate 34 and presses the thin substrate 34 between the hold-down feature 64 and the contact band 116 of the frame 42. In this way, the thin substrate 34 is fixed to the frame assembly 36. To release the thin substrate 34 from the frame assembly 36, the latch assembly 44 is opened and the thin substrate 34 is removed. In some embodiments, during the removal of the thin substrate 34, the latch assembly 44 is in a fully open configuration 114.

[0074] Fig.25A 26A and 26B depict a modified frame assembly 150. The modified frame assembly 150 includes some of the same components and attributes as the frame assembly 36 of FIGS. 18 to 24, where these components are identified by the same component numbers. The modified frame assembly 150 differs in that a modified frame 152 includes recessed corners 154. The recessed corners 154 allow access to corners 156 of the resident thin substrate 34 from outside the modified frame assembly 150 for gripping and handling.

[0075] refer to Fig. 27 1 to depict a frame assembly 170 having a laterally elongated latch assembly 172 according to an embodiment of the present invention. The frame assembly 170 includes some of the same components and attributes as the frame assembly 36 of FIGS. 18 to 24 , where these components are identified by the same reference numerals. Each laterally elongated latch assembly 172 includes a laterally elongated latch arm 176 that bridges between two hinge pins 46 on a common side of the frame 42. The laterally elongated latch assembly 172 provides a longer contact line 174 along the edge portion 96 of the thin substrate 34. The contact line 174 can be provided by a single rib 66 or a plurality of ribs 66 or other hold-down features 64 spaced apart along the laterally elongated latch arm 176.

[0076] Fig. 27 Also depicted in the embodiment of the present invention is an access hole 178 extending through the frame 42 near the distal end portion 62 of the transversely elongated latch arm 176 but outside the overlap region 98 where the thin substrate 34 resides. The access hole 178 enables the transversely elongated latch assembly 172 to be opened by passing a pin (not depicted) through the access hole 178 to actuate the transversely elongated latch arm 176. Although the embodiment of the present invention is combined with Fig. 27 The access hole 178 is depicted with reference to the laterally elongated latch assembly 172 of FIG. 1 , but it should be understood that such an access hole may be utilized with any of the latch assemblies and frame assemblies depicted or described herein.

[0077] The entire contents of the following patents and published patent applications, commonly assigned to the owner of the present invention, are incorporated herein by reference, except for the claims and express definitions contained therein: U.S. Patent Nos. 7,100,772, 7,316,325, 7,347,329, 7,886,910, and 8,276,759; U.S. Patent Publication Nos. 2009 / 0194456, 2013 / 0270152, 2013 / 0319907, 2014 / 0319020, and 2015 / 0083640; International Published Application No. WO 2013 / 025629 A3.

[0078] Although the foregoing discussion and drawings are primarily directed to thin substrates, the present invention is not limited to the support or storage of thin substrates. Storage and transportation of other substrates, such as (but not limited to) flat panel displays and flexible electronic devices, may also be encompassed. It should be further noted that the various figures include dimensions. The dimensions represent specific embodiments and are not to be considered limiting.

[0079] Although several illustrative embodiments of the present invention have been described, it will be readily apparent to those skilled in the art that other embodiments may be implemented and used within the scope of the appended claims. Many advantages of the disclosure encompassed by the present invention have been set forth in the foregoing description. However, it will be appreciated that the present invention is in many respects merely illustrative. Changes may be made to the details, in particular, the shape, size, and configuration of the components, without exceeding the scope of the present invention. Of course, the scope of the present invention is defined by the language in which the appended claims are expressed.

Claims

1. A support bracket configured to support a substrate in a substrate container, the support bracket comprising: At least one support collar is configured to couple the support bracket to at least one support column such that the support bracket is suspended from the at least one support column.

2. The support bracket of claim 1, wherein the at least one support collar is configured to surround the at least one support column.

3. The support bracket of claim 1, wherein the support bracket includes a registration ledge configured to contact a rearward edge of a substrate supported by the support bracket.

4. The support bracket of claim 3, wherein the support bracket further comprises a tab feature extending forwardly from the registration ledge, the tab feature being configured to limit lateral movement of a substrate supported by the support bracket.

5. The support bracket of claim 1, wherein the support bracket includes a pin extending upwardly from the support bracket, the pin being configured to mate with a registration hole of a substrate supported by the support bracket.

6. The support bracket of claim 5, wherein the pin has a tapered profile near a distal end of the pin.

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