Purification device and purification method for polysilicon powder particles

Abstract

The present invention relates to the technical field of silicon purification, and particularly relates to a purification device and a purification method for polysilicon powder particles, including a support frame, a housing, a reaction chamber, a seed feed pipe, a tail gas discharge pipe, a premixing chamber, a mixer, a conical disk and a discharge pipe. The housing is fixed on the support frame, the reaction chamber is arranged inside the housing, the seed feed pipe and the tail gas discharge pipe are arranged at the top of the housing. The conical disk has a plurality of air holes and is arranged below the reaction chamber. The premixing chamber is communicated with the conical disk, the mixer is rotatably arranged inside the premixing chamber, and the discharge pipe is communicated with the reaction chamber and is located at the center of the conical disk. It can effectively promote the mixing between materials, make the chemical reaction more sufficient, and improve the utilization rate of raw materials.

Description

Technical Field

[0001] The present invention relates to the technical field of silicon purification, and particularly relates to a purification device and a purification method for polysilicon powder particles. Background Art

[0002] Polysilicon is a key material in the production of solar panels and semiconductor devices. To meet the high-purity requirements in these applications, polysilicon usually needs to be purified. The purification process involves removing impurities to ensure that the final product has the required electronic properties.

[0003] The existing purification device for polysilicon powder particles uses a fluidized bed to purify silicon powder particles. However, when using this device, in the buffer zone, the reaction materials are not sufficiently premixed in advance, so that after entering the reaction zone, some raw materials are discharged with the gas flow without contacting and reacting, thereby reducing the utilization rate of the raw materials. Summary of the Invention

[0004] The purpose of the present invention is to provide a purification device and a purification method for polysilicon powder particles, aiming to effectively promote the mixing between materials, make the chemical reaction more sufficient, and improve the utilization rate of raw materials.

[0005] To achieve the above purpose, in the first aspect, the present invention provides a purification device for polysilicon powder particles, including a support frame, a housing, a reaction cavity, a seed feeding pipe and a tail gas discharge pipe. The housing is fixed on the support frame, the reaction cavity is arranged inside the housing, the seed feeding pipe and the tail gas discharge pipe are arranged at the top of the housing, and further includes a premixing cavity, a mixer, a conical disc and a discharge pipe. The conical disc has a plurality of air holes, the conical disc is arranged below the reaction cavity, the premixing cavity is communicated with the conical disc, the mixer is rotatably arranged in the premixing cavity, and the discharge pipe is communicated with the reaction cavity and is located at the center of the conical disc.

[0006] Wherein, the mixer includes a rotating ring, stirring blades, a stirring motor, a gear and a toothed ring. The rotating ring is rotatably arranged in the premixing cavity, the stirring blades are fixed on the rotating ring, the toothed ring is fixed on the rotating ring, the gear meshes with the toothed ring, and the output end of the stirring motor is fixed to the gear.

[0007] Wherein, the discharge pipe includes a pipe body and a side pipe. The side pipe is communicated with the pipe body and is located on one side of the pipe body.

[0008] Wherein, the discharge pipe further includes a regulating valve and a booster pump. The regulating valve is communicated with the side pipe and is located on one side of the side pipe, and the booster pump is communicated with the regulating valve and is located on one side of the regulating valve.

[0009] Among them, the purification device for polysilicon powder particles further includes a heater, and the heater includes a heating layer, a microwave reflection layer, and a heat insulation layer. The heat insulation layer is arranged inside the outer shell, the microwave reflection layer is arranged inside the heat insulation layer, and the heating layer is arranged inside the microwave reflection layer.

[0010] Among them, the purification device for polysilicon powder particles further includes a collection structure, and the collection structure is communicated with the tube body and is located at the bottom of the tube body.

[0011] Among them, the collection structure includes a cooling pipe, a cooling cavity, a valve, and a collection box. The cooling cavity is communicated with the tube body and is located on one side of the tube body. The cooling pipe is arranged outside the cooling cavity. The valve is arranged at the bottom of the cooling cavity, and the collection box is communicated with the valve.

[0012] Among them, the collection structure further includes a feed controller, and the feed controller is used to control the input of seed material through the seed feed pipe according to the weight of the material in the collection box.

[0013] In a second aspect, the present invention further provides a method for purifying polysilicon powder particles, including: introducing reaction raw materials into a premixing cavity;

[0014] Mixing the reaction raw materials through a mixer;

[0015] The gas enters the reaction cavity through the air holes on the conical disk, causing the polysilicon seeds to suspend;

[0016] Maintaining the temperature of the polysilicon seeds at 1000 - 1100 °C, and the polysilicon generated by the reaction of the reaction raw materials aggregates on the polysilicon seeds and falls out from the discharge pipe after exceeding the preset weight.

[0017] The purification device and method for polysilicon powder particles of the present invention. The support frame not only provides the necessary stability but also bears the weight of the entire device. Above it, a protective outer shell is arranged. This outer shell is not only part of the physical framework of the equipment but also plays a role in isolating external environmental interference, ensuring the purity of internal operations. The reaction cavity is the key area for chemical reactions and material conversion. To facilitate the introduction of materials and the discharge of waste gas, a seed feed pipe and a tail gas discharge pipe are specially configured at the top of the outer shell. Seeds enter the reaction cavity through the seed feed pipe, and the waste gas generated during the reaction is discharged through the tail gas discharge pipe, ensuring the sealing and safety of the system. The premixing cavity is connected to a conical disk with multiple air holes arranged below the reaction cavity. The design of the conical disk is to evenly distribute the gas so that it can better contact the polysilicon powder, thereby promoting the uniform progress of the reaction. A rotatable mixer is installed in the premixing cavity, which can effectively promote the mixing between materials and make the chemical reaction more complete. The purified polysilicon powder particles are discharged through a discharge pipe connected to the center position of the conical disk. This design not only simplifies the discharging process but also ensures the quality of the purified product. The design of the entire system takes into account various aspects such as material flow, reaction efficiency, and operation safety, aiming to provide an efficient and reliable polysilicon powder particle purification solution. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0019] Figure 1 is a structural diagram of a purification device for polysilicon powder particles of the present invention.

[0020] Figure 2 is a first cross-sectional structural diagram of a purification device for polysilicon powder particles of the present invention.

[0021] Figure 3 is Figure 2 a partial enlarged view of detail A.

[0022] Figure 4 is a structural diagram of the heater of the present invention.

[0023] Figure 5 is a second cross-sectional structural diagram of a purification device for polysilicon powder particles of the present invention.

[0024] Figure 6 is a flowchart of a purification method for polysilicon powder particles of the present invention.

[0025] Support frame 101, outer shell 102, reaction cavity 103, seed feed pipe 104, tail gas discharge pipe 105, premixing cavity 106, mixer 107, conical disk 108, discharge pipe 109, rotating ring 110, stirring blade 111, stirring motor 112, gear 113, gear ring 114, pipe body 115, side pipe 116, regulating valve 117, booster pump 118, heater 119, heating layer 120, microwave reflection layer 121, heat insulation layer 122, collection structure 123, cooling pipe 124, cooling cavity 125, valve 126, collection box 127, feed controller 129, pressure sensor 130, calculation unit 131, control unit 132, support plate 133, spring 134, magnetic limit block 135, electromagnetic switch 136. Detailed implementation manners

[0026] The embodiments of the present invention will be described in detail below. The examples of the embodiments are shown in the drawings, where the same or similar reference numerals denote the same or similar elements or elements with the same or similar functions throughout. The embodiments described below with reference to the drawings are exemplary and are intended to explain the present invention, and should not be construed as a limitation of the present invention.

[0027] In the description of the present invention, it should be understood that the orientation or positional relationship indicated by the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation of the present invention. In addition, in the description of the present invention, the meaning of "a plurality of" is two or more unless otherwise specifically defined.

[0028] First embodiment

[0029] Please refer to Figures 1 to 5, the present invention provides a purification device for polysilicon powder particles, including a support frame 101, a housing 102, a reaction chamber 103, a seed feed pipe 104 and a tail gas discharge pipe 105. The housing 102 is fixed on the support frame 101. The reaction chamber 103 is arranged inside the housing 102. The seed feed pipe 104 and the tail gas discharge pipe 105 are arranged at the top of the housing 102. It further includes a premixing chamber 106, a mixer 107, a conical disk 108 and a discharge pipe 109. The conical disk 108 has a plurality of air holes. The conical disk 108 is arranged below the reaction chamber 103. The premixing chamber 106 is communicated with the conical disk 108. The mixer 107 is rotatably arranged inside the premixing chamber 106. The discharge pipe 109 is communicated with the reaction chamber 103 and is located at the center of the conical disk 108.

[0030] In this embodiment, the present invention proposes a device system specifically for improving the purity of polysilicon powder particles. This system is designed with multiple key components to ensure an efficient purification process. First of all, the entire device is based on a stable support structure - the support frame 101. This support frame 101 not only provides the necessary stability but also bears the weight of the entire device. Above it, a protective housing 102 is arranged. This housing 102 is not only part of the physical framework of the device but also plays a role in isolating external environmental interference, ensuring the purity of internal operations.

[0031] Inside this housing 102, there is a reaction chamber 103, which is the key area for chemical reactions and material conversion. To facilitate the introduction of materials and the discharge of waste gas, the top of the housing 102 is specifically equipped with a seed feed pipe 104 and a tail gas discharge pipe 105. Seeds enter the reaction chamber 103 through the seed feed pipe 104, and the waste gas generated during the reaction is discharged through the tail gas discharge pipe 105, ensuring the sealing and safety of the system.

[0032] In addition, to further improve the purification efficiency, the device is also equipped with a premixing chamber 106, which is connected to a conical disk 108 with a plurality of air holes arranged below the reaction chamber 103. The design of the conical disk 108 is to evenly distribute gas so that it can better contact the polysilicon powder, thereby promoting the uniform progress of the reaction. A rotatable mixer 107 is installed inside the premixing chamber 106. This mixer 107 can effectively promote the mixing between materials, making the chemical reaction more complete.

[0033] Finally, the purified polysilicon powder particles are discharged through a discharge pipe 109 connected to the central position of the conical disk 108. This design not only simplifies the discharging process but also ensures the quality of the purified product. The design of the entire system takes into account various aspects such as material flow, reaction efficiency, and operation safety, aiming to provide an efficient and reliable polysilicon powder particle purification solution.

[0034] The mixer 107 includes a rotating ring 110, stirring blades 111, a stirring motor 112, a gear 113, and a gear ring 114. The rotating ring 110 is rotatably arranged in the premixing cavity 106. The stirring blades 111 are fixed on the rotating ring 110. The gear ring 114 is fixed on the rotating ring 110. The gear 113 meshes with the gear ring 114. The output end of the stirring motor 112 is fixed to the gear 113.

[0035] The mixer 107 in the present invention is one of the important components for achieving uniform mixing of materials. It consists of several parts such as a rotating ring 110, stirring blades 111, a stirring motor 112, a gear 113, and a gear ring 114. Specifically, the rotating ring 110 is a rotatable component installed in the premixing cavity 106. The stirring blades 111 are fixed on the rotating ring 110. As the rotating ring 110 rotates, these blades can effectively stir the materials to ensure uniform mixing of the materials. The gear ring 114 is fixed on the rotating ring 110 and meshes with the gear 113, while the gear 113 is driven by the output end of the stirring motor 112. In this way, when the stirring motor 112 is started, the power is transmitted to the rotating ring 110 through the gear 113, and then drives the stirring blades 111 to rotate, realizing the stirring effect on the materials.

[0036] The discharge pipe 109 includes a pipe body 115 and a side pipe 116. The side pipe 116 is communicated with the pipe body 115 and is located on one side of the pipe body 115.

[0037] To avoid the unfully grown crystal seeds being discharged due to the lack of upward air flow at the discharge pipe 109, the side pipe 116 is provided around the side of the pipe body 115, so that the gas in the premixing cavity 106 can pass through the side pipe 116 and then be discharged upward.

[0038] The discharge pipe 109 further includes a regulating valve 117 and a booster pump 118. The regulating valve 117 is communicated with the side pipe 116 and is located on one side of the side pipe 116. The booster pump 118 is communicated with the regulating valve 117 and is located on one side of the regulating valve 117.

[0039] In order to better adjust the flow rate of the upward air flow in the pipe body 115, the regulating valve 117 is provided on the side pipe 116. The opening degree of the air flow can be adjusted through the regulating valve 117. In addition, the booster pump 118 is provided to further increase the pressure.

[0040] The purification device for polysilicon powder particles further includes a heater 119. The heater 119 includes a heating layer 120, a microwave reflection layer 121, and a heat insulation layer 122. The heat insulation layer 122 is arranged inside the outer shell 102, the microwave reflection layer 121 is arranged inside the heat insulation layer 122, and the heating layer 120 is arranged inside the microwave reflection layer 121.

[0041] To ensure the temperature conditions during the reaction process, the present invention also specially designs the heater 119 to maintain the temperature required for the reaction. The heater 119 is composed of three parts: a heating layer 120, a microwave reflection layer 121, and a heat insulation layer 122. Among them, the heat insulation layer 122 is arranged inside the outer shell 102 to prevent heat loss; the microwave reflection layer 121 is arranged inside the heat insulation layer 122, and its function is to evenly reflect the microwave energy to the heating layer 120 to make the heating more uniform; the heating layer 120 is arranged inside the microwave reflection layer 121 to directly provide the necessary heat energy for the reaction. Such a design not only ensures the heating effect but also effectively avoids heat dissipation and improves the energy utilization efficiency. Overall, this design helps to improve the energy utilization rate and product quality during the purification process of polysilicon powder particles.

[0042] The purification device for polysilicon powder particles further includes a collection structure 123. The collection structure 123 is communicated with the pipe body 115 and is located at the bottom of the pipe body 115.

[0043] As a key link for collecting the final product, the design of the collection structure 123 is crucial. The collection structure 123 is closely connected to the pipe body 115 of the discharge pipe 109 and is located at the bottom of the pipe body 115 to facilitate the collection of the purified polysilicon powder particles.

[0044] The collection structure 123 includes a cooling pipe 124, a cooling cavity 125, a valve 126, and a collection box 127. The cooling cavity 125 is communicated with the pipe body 115 and is located on one side of the pipe body 115. The cooling pipe 124 is arranged outside the cooling cavity 125. The valve 126 is arranged at the bottom of the cooling cavity 125. The collection box 127 is communicated with the valve 126.

[0045] Specifically, the collection structure 123 mainly includes four parts: a cooling pipe 124, a cooling cavity 125, a valve 126, and a collection box 127. The cooling cavity 125 is connected to the pipe body 115 of the discharge pipe 109 and is located on one side of the pipe body 115. It is a container for receiving polysilicon powder particles flowing out of the pipe body 115. To ensure that the particles can be quickly cooled before collection and avoid subsequent processing problems that may be caused by high temperatures, a cooling pipe 124 is provided on the outer side of the cooling cavity 125, and the temperature of the polysilicon powder particles is reduced by the cooling medium (such as water or other coolants) in the cooling pipe 124.

[0046] A valve 126 is installed at the bottom of the cooling cavity 125 to control the outflow of the material in the cooling cavity 125. When it is necessary to discharge the cooled polysilicon powder particles, it can be achieved by opening the valve 126. The design of the valve 126 not only ensures the safety of the operation but also facilitates the collection of the material.

[0047] The collection box 127 is connected to the valve 126. When the valve 126 is opened, the cooled polysilicon powder particles will flow into the collection box 127. The design of the collection box 127 should consider capacity and portability to ensure that it can accommodate a certain amount of product and facilitate subsequent processing or transportation.

[0048] Through such a design, not only can the rapid cooling of polysilicon powder particles after purification be ensured, but also they can be effectively collected, preparing for subsequent processing or storage. This complete set of processes reflects the scientific nature and practicality of the equipment design, aiming to improve production efficiency and product quality.

[0049] The collection structure 123 further includes a feed controller 129, which is used to control the input of seed material into the seed feed pipe 104 according to the material weight in the collection box 127. To achieve the automation and precise control of the purification process of polysilicon powder particles, the collection structure 123 not only is responsible for collecting the final product but also integrates an advanced feed control system. This system can automatically adjust the input amount of the seed feed pipe 104 according to the material weight in the collection box 127, thereby ensuring the precise controllability of the entire process.

[0050] The feed controller 129 includes a pressure sensor 130, a calculation unit 131, and a control unit 132. The pressure sensor 130 is used to obtain the weight of the collection box 127. The calculation unit 131 is used to calculate the weight of the discharged seeds based on the weight of the collection box 127. The control unit 132 is used to control the seed feed pipe 104 to supplement a corresponding amount of seeds into the reaction cavity 103 based on the weight of the discharged seeds.

[0051] The pressure sensor 130 is installed below the collection tank 127 and is used to monitor the change in the weight of the materials in the collection tank 127 in real time. When polysilicon powder particles are collected, the pressure sensor 130 will detect the change in the weight of the collection tank 127 and transmit this data to the calculation unit 131.

[0052] The calculation unit 131 is responsible for receiving data from the pressure sensor 130 and calculating the weight of the seed crystals that have been discharged based on the current weight of the collection tank 127. Through continuous monitoring and calculation, the system can accurately know the weight of the product obtained after each reaction, thereby providing a basis for supplementing the seed crystals in the next step.

[0053] The control unit 132 is the brain of the entire control system. Based on the seed crystal weight information obtained by the calculation unit 131, it automatically adjusts the seed crystal feed pipe 104 to supplement the corresponding amount of seed crystal material to the reaction chamber 103. This means that whenever a batch of polysilicon powder particles is successfully collected, the system will, according to the actual weight of the consumed seed crystals, supplement an equal amount of fresh seed crystals by controlling the seed crystal feed pipe 104 to ensure that the seed crystal concentration in the reaction chamber 103 always remains within an ideal range.

[0054] Such a design not only improves production efficiency, reduces the need for manual intervention, but also enhances the stability and reliability of the production process, ensuring that each reaction can be carried out under the best conditions, thereby improving the purification quality and consistency of polysilicon powder particles.

[0055] The valve 126 includes a support plate 133, a spring 134, a magnetic force limit block 135, and an electromagnetic switch 136. The support plate 133 is slidably arranged below the cooling cavity 125. The spring 134 is used to support the support plate 133. The magnetic force limit block 135 is slidably arranged on one side of the support plate 133. The electromagnetic switch 136 is used to control the electromagnetic switch 136.

[0056] The support plate 133 is an important component in the structure of the valve 126. It is slidably arranged below the cooling cavity 125. The design of the support plate 133 enables it to move along a predetermined track to control the opening and closing states. To ensure that the support plate 133 can remain stable in the appropriate position, a spring 134 is designed to support the support plate 133. The elasticity of the spring 134 can provide sufficient force to counteract the gravity of the material, and at the same time, it can also help the support plate 133 to closely adhere to the sealing surface in the closed state to prevent leakage. During operation, the seeds contact the support plate 133 under the action of gravity. As the seeds accumulate, they can squeeze the support plate 133, causing a gap to appear between the support plate 133 and the pipe body 115. At this time, the magnetic limit block 135 slides downward under the action of gravity to limit the support plate 133, so that part of the seeds are discharged into the collection box 127. Then, the electromagnetic switch 136 is activated to lift the magnetic limit block 135, enabling the support plate 133 to reset, so that the seeds in the pipe body 115 can start to be cooled again.

[0057] Second Embodiment

[0058] Please refer to Figure 6 , on the basis of the first embodiment, the present invention further provides a method for purifying polysilicon powder particles, including:

[0059] S201 Introduce the reaction raw materials into the premixing cavity 106;

[0060] First, the required reaction raw materials are introduced into the premixing cavity 106 through the feeding system. The purpose of this step is to pre-mix various raw materials before they enter the reaction cavity 103 to ensure that they can contact evenly during the subsequent reaction process and improve the reaction efficiency. The design of the premixing cavity 106 allows the raw materials to come into initial contact at this stage, preparing for the subsequent chemical reaction.

[0061] S202 Mix the reaction raw materials through the mixer 107;

[0062] Next, inside the premixing cavity 106, the mixer 107 starts to work to fully mix the reaction raw materials. The mixer 107 continuously stirs the raw materials through the stirring blades 111 on the rotating ring 110 to make them evenly dispersed. The operation of the mixer 107 not only helps to increase the contact area between the raw materials but also promotes the occurrence of chemical reactions, ensuring that each portion of the raw materials can participate in the subsequent reaction.

[0063] S203 The gas enters the reaction cavity 103 through the air holes on the conical disk 108, causing the polysilicon seeds to suspend;

[0064] Subsequently, the gas uniformly enters the reaction chamber 103 through a plurality of air outlet holes on the conical disk 108 below the premixing chamber 106. The entry of these gases causes the polysilicon seeds to be suspended in the reaction chamber 103. In this way, the seeds can better contact the reaction gases, increasing the effective area of the reaction and facilitating the formation of polysilicon particles.

[0065] S204 maintains the temperature of the polysilicon seeds at 1000 - 1100 °C. The polysilicon produced by the reaction of the reaction raw materials accumulates on the polysilicon seeds and falls out from the discharge pipe 109 after exceeding the preset weight.

[0066] In this step, the temperature in the reaction chamber 103 is controlled between 1000 and 1100 degrees Celsius by the heater 119. Within this temperature range, the reaction raw materials undergo a chemical reaction, and the generated polysilicon begins to accumulate on the seeds. As the reaction progresses, the polysilicon particles gradually grow until their weight exceeds the preset value. At this time, due to the action of gravity, the polysilicon particles will fall off the seeds and be discharged from the reaction chamber 103 through the discharge pipe 109 and enter the cooling and collection process.

[0067] The above-disclosed is only a preferred embodiment of the present invention. Of course, the scope of the rights of the present invention cannot be limited thereby. Those of ordinary skill in the art can understand all or part of the processes of implementing the above embodiments, and the equivalent changes made according to the claims of the present invention still fall within the scope covered by the invention.

Claims

1. A purification device for polysilicon powder particles, comprising a support frame, a housing, a reaction chamber, a seed feed pipe, and a tail gas discharge pipe. The housing is fixed on the support frame, the reaction chamber is arranged inside the housing, and the seed feed pipe and the tail gas discharge pipe are arranged at the top of the housing. It is characterized in that, it further comprises a premixing chamber, a mixer, a conical disk, and a discharge pipe. The conical disk has a plurality of air holes. The conical disk is arranged below the reaction chamber. The premixing chamber is communicated with the conical disk. The mixer is rotatably arranged in the premixing chamber. The discharge pipe is communicated with the reaction chamber and is located at the center of the conical disk. The purification method includes introducing reaction raw materials into the premixing chamber; mixing the reaction raw materials through the mixer; the gas enters the reaction chamber through the air holes on the conical disk, so that the polysilicon seeds are suspended; keeping the temperature of the polysilicon seeds at 1000 - 1100 °C, and the polysilicon generated by the reaction of the reaction raw materials aggregates on the polysilicon seeds and falls out from the discharge pipe after exceeding the preset weight.

2. The purification device for polysilicon powder particles according to claim 1, characterized in that, the mixer includes a rotating ring, stirring blades, a stirring motor, a gear, and a toothed ring. The rotating ring is rotatably arranged in the premixing chamber. The stirring blades are fixed on the rotating ring. The toothed ring is fixed on the rotating ring. The gear meshes with the toothed ring. The output end of the stirring motor is fixed to the gear.

3. The purification device for polysilicon powder particles according to claim 2, characterized in that, the discharge pipe includes a pipe body and a side pipe. The side pipe is communicated with the pipe body and is located on one side of the pipe body.

4. The purification device for polysilicon powder particles according to claim 3, characterized in that, the discharge pipe further includes a regulating valve and a booster pump. The regulating valve is communicated with the side pipe and is located on one side of the side pipe. The booster pump is communicated with the regulating valve and is located on one side of the regulating valve.

5. The purification device for polysilicon powder particles according to claim 4, characterized in that, the purification device for polysilicon powder particles further includes a heater. The heater includes a heating layer, a microwave reflection layer, and a heat insulation layer. The heat insulation layer is arranged inside the housing. The microwave reflection layer is arranged inside the heat insulation layer. The heating layer is arranged inside the microwave reflection layer.

6. The purification device for polysilicon powder particles according to claim 5, characterized in that, the purification device for polysilicon powder particles further includes a collection structure. The collection structure is communicated with the pipe body and is located at the bottom of the pipe body.

7. The purification device for polysilicon powder particles according to claim 6, characterized in that, the collection structure includes a cooling pipe, a cooling chamber, a valve, and a collection box. The cooling chamber is communicated with the pipe body and is located on one side of the pipe body. The cooling pipe is arranged outside the cooling chamber. The valve is arranged at the bottom of the cooling chamber. The collection box is communicated with the valve.

8. The purification device for polysilicon powder particles according to claim 7, characterized in that, The collection structure further includes a feed controller, which is configured to control the input of seed materials through the seed feed pipe according to the weight of the materials in the collection tank.

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