Continuous cleaning equipment for chip manufacturing

Abstract

The invention belongs to the technical field of chip cleaning, and particularly relates to a continuous cleaning device for chip manufacturing, comprising: a cleaning tank, the upper end of which is open; the cleaning frame comprises a rotating disc, a plurality of rotating shafts and fixing frames, the rotating disc is rotationally connected to the inner wall of the cleaning tank, the rotating shafts are arranged on the side wall of the rotating disc in an annular array mode, the rotating shafts are rotationally connected to the rotating disc, and the fixing frames are fixedly connected to the rotating shafts respectively. According to the chip cleaning device, the fixing frames can be driven to rotate around the gear disc, the multiple fixing frames are sequentially immersed in cleaning liquid in the cleaning tank, continuous cleaning of chips is achieved, after cleaning is completed, the chips are driven to rotate to the position above an opening of the cleaning tank, the cleaned chips can be replaced, continuous cleaning of the chips is achieved, the cleaning efficiency is effectively improved, and the cleaning efficiency is improved. The fixing frame can rotate around the axis of the rotating shaft to drive the chip to turn over in the cleaning tank, and it is guaranteed that all positions of the chip are fully cleaned.

Description

Technical Field

[0001] The invention belongs to the technical field of chip cleaning, and in particular relates to a continuous cleaning device for chip manufacturing. Background Art

[0002] In electronics, chips are a way to miniaturize circuits and are often manufactured on the surface of semiconductor wafers. Cleaning is one of the important links in the chip manufacturing process. The cleaning effect affects the chip quality. Uneven, unclean or missed cleaning will lead to hidden dangers of dirt and reduce the chip yield.

[0003] After searching, the national patent publication number CN109860079B discloses a cleaning device for an encryption chip, which relates to the field of semiconductor chip technology, and includes a device body, wherein a feed port and a discharge port are respectively provided on two sides of the device body, and the device body is formed by clamping an upper cover plate and a lower trough body, and a conveying mechanism and a cleaning mechanism are arranged in the device body.

[0004] After searching, the national patent publication number CN107393852B discloses a chip cleaning container, including a accommodating cavity, the accommodating cavity is provided with a hole for allowing a chip holder to extend into, and the side wall of the accommodating cavity is provided with a plurality of holes extending from the hole to the bottom for allowing the chip holder to pass through.

[0005] The above solution still has some shortcomings in the chip cleaning process, as follows: 1. This solution cleans the chips by immersing them in a cleaning tank with a basket. However, the capacity of the basket is limited. Only a fixed amount of chips can be cleaned in the sequential cleaning process, which is not suitable for the continuous production process of chips. 2. The structure of the flower basket is fixed. During the cleaning process, there is often a dead angle at the contact between the chip and the flower basket, resulting in insufficient cleaning of the chip; 3. During operation, the position of the chip is fixed. During the rinsing and soaking process, the probability of the chip contacting the cleaning solution is not high, and the degree of cleaning is not enough. Summary of the invention

[0006] The purpose of the present invention is to provide a continuous cleaning device for chip manufacturing in order to solve the problems of poor cleaning effect and low efficiency mentioned in the above background technology.

[0007] To achieve the above object, the present invention adopts the following technical scheme: A continuous cleaning device for chip manufacturing, comprising: A cleaning tank, wherein the upper end of the cleaning tank is open; A cleaning rack, the cleaning rack comprising a rotating disk, a plurality of rotating shafts and a fixed frame, the rotating disk is rotatably connected to the inner wall of the cleaning tank, a plurality of the rotating shafts are arranged in a circular array on the side wall of the rotating disk, and the rotating shafts are rotatably connected to the rotating disk, and a plurality of the fixed frames are respectively fixedly connected to the plurality of rotating shafts; A clamping assembly, the clamping assembly is located in the fixed frame and is used to clamp and fix the chip. The clamping assembly includes two slide bars, a spring, a plurality of magnetic sleeves and a permanent magnet block. The two slide bars are slidably connected to the fixed frame, and the slide bar extends along the length direction of the fixed frame. The two ends of the spring are respectively connected to the two slide bars. The plurality of magnetic sleeves are opposite to each other in pairs and are respectively slidably sleeved on the two slide bars. The adjacent magnetic sleeves on the same slide bar are opposite to each other with the same poles. The plurality of permanent magnet blocks are evenly arranged on the side walls on both sides of the fixed frame, and the permanent magnet blocks and the magnetic sleeves are opposite to each other with the same poles. A driving assembly, the driving assembly is used to drive the cleaning rack to rotate, and the driving assembly includes a motor, a driving gear, a gear plate, a gear ring and a plurality of rotating gears; The spoiler assembly is located below the cleaning rack and is used to promote the fluctuation of liquid flow in the cleaning tank. The spoiler assembly includes a driven gear, a worm, a worm wheel, a rotating rod and a spoiler impeller.

[0008] Furthermore, the motor is fixedly mounted on the outer side wall of the cleaning tank, and the output shaft of the motor is connected to the driving gear through a coupling.

[0009] Furthermore, the gear plate is fixedly connected to the inner wall of the cleaning tank, and the gear plate is coaxial with the rotating plate, the gear ring is coaxially sleeved outside the gear plate and rotatably connected to the inner wall of the cleaning tank, the inner ring and the outer ring of the gear ring are both provided with tooth grooves, and the driving gear is meshed with the outer ring of the gear ring.

[0010] Furthermore, the plurality of rotating gears are respectively fixedly connected to the plurality of fixed frames, and the plurality of rotating gears are arranged in a ring array in the gap between the gear ring and the gear plate, and the rotating gears are meshed with both the gear plate and the gear ring.

[0011] Furthermore, the worm is rotatably connected to the inner wall of the cleaning tank, the driven gear is fixedly connected to the worm, and the driven gear is meshed with the outer ring of the gear ring.

[0012] Furthermore, there are three rotating rods, all of which are rotatably connected to the inner bottom surface of the cleaning tank, and the worm gear and the spoiler impeller are fixedly connected to the rotating rod, and the worm gear and the worm are meshed with each other.

[0013] Furthermore, bearings are installed at both ends of the worm, and the worm is rotatably connected to the cleaning tank through the bearings.

[0014] Furthermore, a sewage pipe is connected to the side wall of the cleaning tank, and a valve is installed on the sewage pipe.

[0015] The present invention has the following advantages: 1. The present invention is provided with a driving component. When working, the fixed frame can be driven to rotate around the gear disk. Several fixed frames are immersed in the cleaning liquid in the cleaning tank in turn to realize continuous cleaning of the chip. After cleaning, the chip is driven to rotate above the opening of the cleaning tank. The cleaned chip can be replaced to realize continuous cleaning of the chip, which effectively improves the cleaning efficiency. In addition, the fixed frame can rotate around the gear disk and the axis of the rotating shaft at the same time, driving the chip to flip in the cleaning tank, ensuring that all parts of the chip are fully cleaned and improving the cleaning effect.

[0016] 2. The present invention can quickly clamp and fix the chip from both sides by arranging the slide bar and the spring, thereby improving the cleaning efficiency, and the shielding area of ​​the chip surface is small, thereby avoiding affecting the cleaning of the chip.

[0017] 3. The present invention arranges a plurality of chips equidistantly in a fixed frame by providing a magnetic sleeve and a permanent magnet block. The magnetic sleeves with the same poles facing each other avoid contact and shielding between the chips, which results in a cleaning dead angle. When the fixed frame is flipped, the slide bar can slide under the action of gravity, which increases the contact probability with the cleaning liquid and improves the cleaning effect. In addition, by providing a permanent magnet block, when the magnetic sleeve moves toward the permanent magnet block, the repulsive force between the magnetic sleeve and the permanent magnet block can play a buffering role, which avoids the slide bar colliding with the inner wall of the fixed frame, resulting in the problem of chip displacement and falling.

[0018] 4. The present invention sets a spoiler component. When working, the gear ring is used as the driving force to drive the spoiler impeller to rotate continuously, thereby promoting the flow of cleaning liquid in the cleaning tank. The impact of the liquid flow can promote the separation of stains on the chip, further improving the cleaning effect, and there is no need to set up an additional power drive device, thereby improving the utilization rate of kinetic energy. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic diagram of the internal structure of a continuous cleaning device for chip manufacturing provided by the present invention; Figure 2 It is a schematic diagram of the internal structure of a fixed frame in a continuous cleaning device for chip manufacturing provided by the present invention; Figure 3 It is a schematic diagram of the side structure of a driving component in a continuous cleaning device for chip manufacturing provided by the present invention; Figure 4 yes Figure 1 Enlarged view of point A in the middle.

[0020] In the figure, 1 cleaning tank; 2 cleaning rack, 21 rotating disk, 22 rotating shaft, 23 fixed frame; 3 clamping assembly, 31 sliding rod, 32 spring, 33 magnetic sliding sleeve, 34 permanent magnet block; 4 driving assembly, 41 motor, 42 driving gear, 43 gear plate, 44 gear ring, 45 rotating gear; 5 spoiler assembly, 51 driven gear, 52 worm, 53 worm wheel, 54 rotating rod, 55 spoiler impeller; 6 bearings; 7. Sewage pipe. DETAILED DESCRIPTION

[0021] like Figure 1-4 As shown, a continuous cleaning device for chip manufacturing includes: A cleaning tank 1, wherein the upper end of the cleaning tank 1 is open; The cleaning rack 2 includes a rotating disk 21, a plurality of rotating shafts 22 and a fixed frame 23. The rotating disk 21 is rotatably connected to the inner wall of the cleaning tank 1. The plurality of rotating shafts 22 are arranged in a circular array on the side wall of the rotating disk 21, and the rotating shafts 22 are rotatably connected to the rotating disk 21. The plurality of fixed frames 23 are respectively fixedly connected to the plurality of rotating shafts 22. In this embodiment, there are six fixed frames 23. The clamping assembly 3 is located in the fixed frame 23 and is used to clamp and fix the chip. The clamping assembly 3 includes two slide bars 31, a spring 32, a plurality of magnetic sleeves 33 and a permanent magnet block 34. The two slide bars 31 are slidably connected in the fixed frame 23, and the slide bars 31 extend along the length direction of the fixed frame 23. The two ends of the spring 32 are respectively connected to the two slide bars 31. The plurality of magnetic sleeves 33 are opposite to each other and are respectively slidably sleeved on the two slide bars 31. The adjacent magnetic sleeves 33 on the same slide bar 31 are opposite to each other with the same poles. The plurality of permanent magnet blocks 34 are evenly arranged on the fixed frame 23. On the side walls on both sides, in this embodiment, the number of magnetic sleeves 33 is twice the number of permanent magnet blocks 34, and the same poles of the permanent magnet blocks 34 and the magnetic sleeves 33 are opposite to each other. When fixing the chip, the two slide bars 31 are pulled away from each other, and the spring 32 is stretched. The chip to be cleaned is placed between the two opposite magnetic sleeves 33 in sequence, and the slide bar 31 is released. The chip can be clamped between the two magnetic sleeves 33 by the elastic force of the spring 32. The chip is clamped and fixed by the two sides, and the shielding area of ​​the chip surface is small, so as to avoid affecting the cleaning of the chip. The magnetic sleeves 33 with opposite poles make multiple chips arranged equidistantly in the fixed frame 23, avoiding contact and shielding between chips, resulting in cleaning dead corners. When the fixed frame 23 is flipped, the slide bar 31 can slide in the fixed frame 23 under the action of gravity, increasing the contact probability with the cleaning liquid and improving the cleaning effect. Moreover, when the magnetic sleeve 33 moves toward the permanent magnet block 34, the repulsive force between the magnetic sleeve 33 and the permanent magnet block 34 can play a buffering role, avoiding the slide bar 31 from colliding with the inner wall of the fixed frame 23, resulting in the problem of chip displacement and falling. A driving assembly 4, which is used to drive the cleaning rack 2 to rotate. The driving assembly 4 includes a motor 41, a driving gear 42, a gear plate 43, a gear ring 44 and a plurality of rotating gears 45; The spoiler assembly 5 is located below the cleaning rack 2 and is used to promote the fluctuation of liquid flow in the cleaning tank 1. The spoiler assembly 5 includes a driven gear 51, a worm 52, a worm wheel 53, a rotating rod 54 and a spoiler impeller 55.

[0022] The motor 41 is fixedly mounted on the outer wall of the cleaning tank 1, and the output shaft of the motor 41 is connected to the driving gear 42 through a coupling; The gear plate 43 is fixedly connected to the inner wall of the cleaning tank 1, and the gear plate 43 is coaxial with the rotating plate 21. The gear ring 44 is coaxially sleeved outside the gear plate 43 and is rotatably connected to the inner wall of the cleaning tank 1. The inner ring and the outer ring of the gear ring 44 are both provided with tooth grooves, and the driving gear 42 is meshed with the outer ring of the gear ring 44. A plurality of rotating gears 45 are respectively fixedly connected to a plurality of fixed frames 23, and the plurality of rotating gears 45 are arranged in a ring array in the gap between the gear ring 44 and the gear plate 43, and the rotating gears 45 are meshed with both the gear plate 43 and the gear ring 44; During operation, the motor 41 can drive the fixed frame 23 to rotate around the gear disk, and several fixed frames 23 are immersed in the cleaning liquid in the cleaning tank 1 in turn to achieve continuous cleaning of the chip. After cleaning, the chip is driven to rotate above the opening of the cleaning tank 1, and the cleaned chip can be replaced to achieve continuous cleaning of the chip, which effectively improves the cleaning efficiency. In addition, the fixed frame 23 rotates around the gear disk 43 and can also rotate around the axis of the rotating shaft at the same time, driving the chip to flip over in the cleaning tank 1, ensuring that all parts of the chip are fully cleaned and improving the cleaning effect.

[0023] The worm 52 is rotatably connected to the inner wall of the cleaning tank 1, and the driven gear 51 is fixedly connected to the worm 52, and the driven gear 51 is meshed with the outer ring of the gear ring 44; There are three rotating rods 54, all of which are rotatably connected to the inner bottom surface of the cleaning tank 1, and the worm gear 53 and the spoiler impeller 55 are fixedly connected to the rotating rod 54, and the worm gear 53 and the worm 52 are meshed with each other; Bearings 6 are installed at both ends of the worm 52. The worm 52 is rotatably connected to the cleaning tank 1 through the bearings 6. The ring gear 44 is used as the driving force to drive the turbulent impeller 55 to rotate continuously, thereby promoting the flow of cleaning liquid in the cleaning tank 1. The impact of the liquid flow can promote the removal of stains on the chip, further improving the cleaning effect, and there is no need to set up an additional power drive device, thereby improving the utilization rate of kinetic energy.

[0024] The side wall of the cleaning tank 1 is connected with a sewage pipe 7, and a valve is installed on the sewage pipe 7.

[0025] The working principle of this embodiment is as follows: When fixing the chip, the two slide bars 31 are pulled away from each other, the spring 32 is stretched, and the chip to be cleaned is placed between the two opposite magnetic sleeves 33 in sequence. The slide bar 31 is released, and the chip can be clamped between the two magnetic sleeves 33 by the elastic force of the spring 32. The chip is clamped and fixed by the two sides, and the shielding area of ​​the chip surface is small, so as to avoid affecting the cleaning of the chip. The magnetic sleeves 33 with opposite poles make multiple chips arranged equidistantly in the fixed frame 23, avoiding contact and shielding between chips, resulting in cleaning dead corners. When the fixed frame 23 is flipped, the slide bar 31 can slide in the fixed frame 23 under the action of gravity, increasing the contact probability with the cleaning liquid and improving the cleaning effect. Moreover, when the magnetic sleeve 33 moves toward the permanent magnet block 34, the repulsive force between the magnetic sleeve 33 and the permanent magnet block 34 can play a buffering role, avoiding the slide bar 31 from colliding with the inner wall of the fixed frame 23, resulting in the problem of chip displacement and falling. The driving gear 42 is driven to rotate by the motor 41, thereby driving the gear ring 44 meshing therewith to rotate. Since the rotating gear 45 is meshed with the gear plate 43 and the gear ring 44, the rotating gear 45 can be driven to rotate around the gear plate 43 while rotating itself, so that the fixed frame 23 rotates around the gear plate 43, and a plurality of fixed frames 23 are sequentially immersed in the cleaning liquid in the cleaning tank 1 to achieve continuous cleaning of the chip. After the cleaning is completed, the chip is driven to rotate above the opening of the cleaning tank 1, and the cleaned chip can be replaced to achieve continuous cleaning of the chip, effectively improving the cleaning efficiency. In addition, the fixed frame 23 can rotate around the gear plate 43 and the axis of the rotating shaft at the same time, driving the chip to flip in the cleaning tank 1, ensuring that all parts of the chip are fully cleaned and improving the cleaning effect. During the rotation process, the ring gear 44 can drive the driven gear 51 to rotate. Since the worm wheel 53 is meshed with the worm 52, the turbulent impeller 55 can be driven to rotate continuously through the rotating rod 54, thereby promoting the flow of cleaning liquid in the cleaning tank 1. The impact of the liquid flow can promote the removal of stains on the chip, further improving the cleaning effect, and there is no need to set up an additional power drive device, thereby improving the utilization rate of kinetic energy.

Claims

1. A continuous cleaning device for chip manufacturing, characterized in that: include: A cleaning tank (1), wherein the cleaning tank (1) is provided with an opening at the upper end; A cleaning rack (2), the cleaning rack (2) comprising a rotating disk (21), a plurality of rotating shafts (22) and a fixed frame (23), the rotating disk (21) being rotatably connected to the inner wall of the cleaning tank (1), a plurality of rotating shafts (22) being arranged in a circular array on the side wall of the rotating disk (21), and the rotating shafts (22) being rotatably connected to the rotating disk (21), and a plurality of fixed frames (23) being respectively fixedly connected to the plurality of rotating shafts (22); A clamping assembly (3), the clamping assembly (3) being located in a fixed frame (23) and being used for clamping and fixing the chip, the clamping assembly (3) comprising two slide bars (31), a spring (32), a plurality of magnetic sleeves (33) and a permanent magnet block (34), the two slide bars (31) being slidably connected in the fixed frame (23), and the slide bars (31) extending along the length direction of the fixed frame (23), the two ends of the spring (32) being respectively connected to the two slide bars (31), the plurality of magnetic sleeves (33) being opposite to each other in pairs and being respectively slidably sleeved on the two slide bars (31), the adjacent magnetic sleeves (33) on the same slide bar (31) being opposite to each other with the same poles, the plurality of permanent magnet blocks (34) being evenly arranged on the side walls on both sides of the fixed frame (23), and the permanent magnet blocks (34) and the magnetic sleeves (33) being opposite to each other with the same poles; A driving assembly (4), the driving assembly (4) being used to drive the cleaning rack (2) to rotate, the driving assembly (4) comprising a motor (41), a driving gear (42), a gear plate (43), a gear ring (44) and a plurality of rotating gears (45); A spoiler assembly (5), the spoiler assembly (5) being located below the cleaning rack (2) and used to promote the fluctuation of liquid flow in the cleaning tank (1), the spoiler assembly (5) comprising a driven gear (51), a worm (52), a worm wheel (53), a rotating rod (54) and a spoiler impeller (55).

2. The continuous cleaning equipment for chip manufacturing according to claim 1, characterized in that: The motor (41) is fixedly mounted on the outer wall of the cleaning tank (1), and the output shaft of the motor (41) is connected to the driving gear (42) via a coupling.

3. The continuous cleaning equipment for chip manufacturing according to claim 1, characterized in that: The gear plate (43) is fixedly connected to the inner wall of the cleaning tank (1), and the gear plate (43) is coaxial with the rotating plate (21). The gear ring (44) is coaxially sleeved outside the gear plate (43) and is rotatably connected to the inner wall of the cleaning tank (1). The inner ring and the outer ring of the gear ring (44) are both provided with tooth grooves, and the driving gear (42) is meshed with the outer ring of the gear ring (44).

4. The continuous cleaning equipment for chip manufacturing according to claim 1, characterized in that: The plurality of rotating gears (45) are respectively fixedly connected to the plurality of fixed frames (23), and the plurality of rotating gears (45) are arranged in a ring array in the gap between the gear ring (44) and the gear plate (43), and the rotating gears (45) are meshed with both the gear plate (43) and the gear ring (44).

5. The continuous cleaning equipment for chip manufacturing according to claim 1, characterized in that: The worm (52) is rotatably connected to the inner wall of the cleaning tank (1), the driven gear (51) is fixedly connected to the worm (52), and the driven gear (51) is meshed with the outer ring of the gear ring (44).

6. The continuous cleaning equipment for chip manufacturing according to claim 1, characterized in that: There are three rotating rods (54), all of which are rotatably connected to the inner bottom surface of the cleaning tank (1); the worm gear (53) and the spoiler impeller (55) are both fixedly connected to the rotating rod (54); and the worm gear (53) and the worm (52) are meshed with each other.

7. The continuous cleaning equipment for chip manufacturing according to claim 1, characterized in that: Bearings (6) are installed at both ends of the worm (52), and the worm (52) is rotatably connected to the cleaning tank (1) via the bearings (6).

8. The continuous cleaning equipment for chip manufacturing according to claim 1, characterized in that: The side wall of the cleaning tank (1) is connected to a sewage pipe (7), and a valve is installed on the sewage pipe (7).

Images