Electrode module of evaporation equipment, evaporation equipment and evaporation method

Abstract

The present application provides an electrode module of an evaporation device, an evaporation device and an evaporation method, wherein the electrode module comprises: a first electrode rod, electrically connected to an electrode base of the evaporation device; a second electrode rod, electrically connected to another electrode base of the evaporation device, and two supporting mechanisms, respectively arranged on the first electrode rod and the second electrode rod, wherein the height of the supporting mechanism on the first electrode rod and / or the second electrode rod is adjustable; the supporting mechanism is used to support a molybdenum boat; the electrode rod of the electrode module has a scale, which can quickly and accurately adjust the required height of the molybdenum boat when replacing it, thereby avoiding the problem that in actual operation, the distance between the molybdenum boat and the target material to be evaporated deviates from the preset parameters, thereby affecting the uniformity of film formation on the target material surface.

Description

Technical Field

[0001] The present application relates to the field of vacuum evaporation technology, and in particular to an electrode module of an evaporation device, an evaporation device and an evaporation method. Background Art

[0002] Vacuum coating technology refers to the technology of evaporating coating materials (or film materials) under vacuum conditions by a certain heating evaporation method, vaporizing them, and directly shooting the evaporated particle flow to the substrate surface, and depositing on the substrate surface to form a solid film. The physical process of vacuum evaporation includes: the deposition material evaporates or sublimates into gaseous particles, the gaseous particles are quickly transported from the evaporation source to the substrate surface, the gaseous particles adhere to the substrate surface and deposit to form a solid film, and the film atoms are reconstructed or chemically bonded.

[0003] In vacuum evaporation coating equipment, a molybdenum boat is often used to heat the film material. The metal in the film material evaporates and diffuses to the surface of the target material to be evaporated, adheres to the surface of the target material to be evaporated, and forms a thin film on the surface of the target material to be evaporated.

[0004] In vacuum evaporation coating equipment, the number of molybdenum boat heating systems is limited. In actual use, vacuum evaporation coating equipment needs to evaporate different film materials. In order to avoid cross contamination between film materials, the molybdenum boat needs to be replaced in time when evaporating different film materials. Due to the need to evaporate different film materials, the molybdenum boat needs to be frequently disassembled and installed manually. When disassembling and installing the molybdenum boat, the distance between the molybdenum boat and the target material to be evaporated and the stability of the connection between the molybdenum boat and the electrode rod will be affected, which will affect the film-forming effect of the evaporation process, resulting in the uniformity of the solid film on the surface of the target material to be evaporated. Summary of the invention

[0005] In view of this, the present application provides an electrode module of an evaporation device, an evaporation device and an evaporation method. The electrode module of the evaporation device can quickly and accurately adjust the required height of the molybdenum boat while maintaining the stability of the connection between the molybdenum boat and the electrode rod, thereby avoiding affecting the uniformity of the thin film on the surface of the target material to be evaporated.

[0006] The technical solutions provided by this application are as follows:

[0007] In a first aspect, the present application provides an electrode module of an evaporation device for realizing thin film evaporation of a perovskite solar cell, the electrode module comprising:

[0008] A first electrode rod is electrically connected to an electrode base of the evaporation device;

[0009] A second electrode rod is electrically connected to another electrode base of the evaporation device; and

[0010] Two bearing mechanisms, respectively arranged on the first electrode rod and the second electrode rod, wherein the height of the bearing mechanisms on the first electrode rod and / or the second electrode rod is adjustable; the bearing mechanisms are used to bear the molybdenum boat;

[0011] Wherein, each of the first electrode rod and the second electrode rod has a first portion arranged close to the electrode base and a second portion arranged away from the electrode base; the first portion has an external thread for achieving electrical connection with the electrode base through a threaded connection; the second portion has a scale for displaying and / or marking the position of the supporting mechanism when the first electrode rod and / or the second electrode rod are fixed.

[0012] Furthermore, the bearing mechanism comprises:

[0013] A first connecting component, sleeved on the first electrode rod and / or the second electrode rod;

[0014] a first clamping member, fixedly connected to one end of the first connecting member and used for clamping the molybdenum boat; and

[0015] A fixing component is connected to the other end of the first connecting component and is used to fix the first connecting component to the first electrode rod and / or the second electrode rod.

[0016] Further, the first connecting member is an L-shaped extension plate;

[0017] The L-shaped extension plate comprises: a first plate surface and a second plate surface which are perpendicular to each other;

[0018] The first plate surface has a first hole; the L-shaped extension plate is raised or lowered relative to the first electrode rod and / or the second electrode rod through the first hole; the first clamping component is arranged at one end of the first plate surface away from the second plate surface;

[0019] The second plate surface has a second hole, and the fixing component is fixedly connected to the first electrode rod and / or the second electrode rod through the second hole.

[0020] Furthermore, the fixing component comprises:

[0021] a fixing screw passing through the second hole and abutting against the first electrode rod and / or the second electrode rod; and,

[0022] A fixing nut is arranged on the fixing screw and is used to fix the first connecting component to the first electrode rod and / or the second electrode rod.

[0023] Furthermore, the fixing nuts include two, one of which is in contact with the first electrode rod and / or the second electrode rod; and the other fixing nut passes through the second hole and is in contact with the outer side surface of the second plate surface;

[0024] The first electrode rod and / or the first part of the second electrode rod is a cylinder;

[0025] The second portion of the first electrode rod and / or the second electrode rod is a cylinder having a section, and the section is parallel to the second plate surface;

[0026] The fixing screw abuts against the cut surface, and another fixing nut is connected to the fixing screw.

[0027] Further, the first clamping component includes: a first pressing sheet, a second pressing sheet, and a spring and a centering pin connecting the first pressing sheet and the second pressing sheet;

[0028] The first pressing sheet is integrally formed with the first plate surface and extends away from the second plate surface;

[0029] The contact portion between the second pressing sheet and the first pressing sheet is a plane with a preset area;

[0030] The first pressing plate has a third hole arranged on the side, the second pressing plate has a fourth hole arranged on the side, and the centering pin passes through the spring, the third hole and the fourth hole.

[0031] Furthermore, the bearing mechanism comprises:

[0032] A second connecting member, sleeved on the first electrode rod and / or the second electrode rod;

[0033] a second clamping member, fixedly connected to one end of the second connecting member and used for clamping the molybdenum boat; and

[0034] The electric control component is arranged below the second connecting component and is used for electrically controlling the lifting and lowering of the second connecting component on the first electrode rod and / or the second electrode rod.

[0035] Furthermore, the electronic control component comprises:

[0036] an electric control ring, sleeved on the first electrode rod and / or the second portion of the second electrode rod;

[0037] a telescopic member, which is controlled by the electric control ring and is telescopic along the radial direction of the first electrode rod and / or the second electrode rod; when the telescopic member is extended, the telescopic member clamps the first electrode rod and / or the second electrode rod; when the telescopic member is contracted, the telescopic member moves up and down relative to the first electrode rod and / or the second electrode rod; and,

[0038] A support member, one end of which is connected to the electric control ring, and the other end of which is connected to the second connecting member.

[0039] In a second aspect, the present application further provides an evaporation device, wherein the evaporation device comprises an electrode module of any of the evaporation devices described above.

[0040] In a third aspect, the present application further provides a method for performing evaporation using the electrode module of the above-mentioned evaporation device, the evaporation method comprising:

[0041] Providing preset parameters, the preset parameters at least including: the distance between the target material to be evaporated and the molybdenum boat;

[0042] According to the preset parameters, calculating the position coordinates of the molybdenum boat on the first electrode rod and / or the second electrode rod;

[0043] The two supporting mechanisms are adjusted so that the molybdenum boat is located at a specified height of the first electrode rod and the second electrode rod, thereby making the distance between the target material to be evaporated and the molybdenum boat meet the preset parameters.

[0044] The solution provided in this application has the following beneficial effects:

[0045] 1. The electrode module of the evaporation equipment provided in the present application comprises two electrode rods with external threads on the bottom, and the electrode rods can be threadedly connected to the electrode base to achieve electrical connection, so that the electrode rods can be more firmly fixed on the electrode base, avoiding the skewing and deviation of the electrode rods caused by the unstable connection between the electrode rods and the electrode base when the molybdenum boat is disassembled and installed.

[0046] 2. The electrode module of the evaporation equipment provided in the present application has a supporting mechanism that can be raised and lowered along the electrode rod body, and the electrode rod body has a scale, so that the required height can be adjusted quickly and accurately when the molybdenum boat is replaced, thereby avoiding the problem in actual operation that the distance between the molybdenum boat and the target material to be evaporated deviates from the preset parameters, thereby affecting the uniformity of film formation on the target surface.

[0047] 3. The electrode module of the evaporation equipment provided in the present application increases the contact area between the electrode rod and the molybdenum boat by adding a molybdenum boat fixing clamp at one end of the two supporting mechanisms away from the electrode rod, which is more conducive to heating the molybdenum boat and improving the efficiency of film material evaporation; at the same time, the addition of a molybdenum boat fixing clamp can also facilitate the replacement and installation of the molybdenum boat, thereby meeting the process requirements of different evaporation film forming processes.

[0048] 4. The electrode module of the evaporation equipment provided in the present application can electrically control the lifting and lowering of the supporting mechanism along the electrode rod by adding an electric control component under the supporting mechanism, thereby eliminating the need for manual operation. While saving labor costs, it can more efficiently, accurately and safely adjust the required height of the molybdenum boat.

[0049] In order to make the above-mentioned objects, features and advantages of the present application more obvious and easy to understand, preferred embodiments are specifically cited below and described in detail with reference to the attached drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0050] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0051] Figure 1 It is a structural schematic diagram of an electrode module of a vapor deposition device in the prior art;

[0052] Figure 2 A schematic diagram of a portion of the structure of an electrode module of an evaporation device provided in one embodiment of the present application;

[0053] Figure 3 A schematic diagram of the structure of a supporting mechanism provided in one embodiment of the present application;

[0054] Figure 4 A schematic diagram of the structure of a fixing component provided in one embodiment of the present application;

[0055] Figure 5 This is a schematic structural diagram of a first clamping component provided in one embodiment of the present application;

[0056] Figure 6 A schematic structural diagram of a supporting mechanism provided in another embodiment of the present application;

[0057] Figure 7 A top view of an electric control component provided in another embodiment of the present application;

[0058] Figure 8This is a flow chart of the evaporation method provided in an embodiment of the present application.

[0059] Description of reference numerals:

[0060] Electrode module 100 of the evaporation equipment:

[0061] A first electrode rod 10, a second electrode rod 20, first parts 10a, 20a, second parts 10b, 20b, an electrode base 30, a supporting mechanism 40, and a molybdenum boat 50;

[0062] A first connecting member 41, a first plate surface 41-1a, a second plate surface 41-1b, a first hole 401a, and a second hole 401b;

[0063] A first clamping member 42, a first pressing sheet 42a, and a second pressing sheet 42b;

[0064] A fixing member 43, a fixing screw 43a, and a fixing nut 43b;

[0065] A second connecting member 44;

[0066] A second clamping member 45;

[0067] Electric control component 46, electric control ring 46a, telescopic member 46b, supporting member 46c. DETAILED DESCRIPTION

[0068] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. The components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations.

[0069] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the present application for which protection is sought, but merely represents selected embodiments of the present application. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present application.

[0070] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0071] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, or the positions or positional relationships in which the product of the invention is usually placed when in use. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific position, be constructed and operated in a specific position, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0072] In addition, the terms "horizontal", "vertical" and the like do not mean that the structure must be absolutely horizontal or suspended, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0073] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0074] Some embodiments of the present application are described in detail below in conjunction with the accompanying drawings. In the absence of conflict, the features of the following embodiments can be combined with each other.

[0075] See also Figure 1 , Figure 1 It is a schematic diagram of the structure of the electrode module of the evaporation equipment in the prior art. It can be seen that in the prior art, two pairs of nuts are used to clamp and fix the molybdenum boat 50 between the two electrode rods. When replacing the molybdenum boat 50, it is necessary to manually rotate the two pairs of nuts, disassemble the molybdenum boat 50 and then move it to a suitable height, and then manually tighten the two pairs of nuts to achieve the replacement of the molybdenum boat 50. It is understandable that the replacement steps of the molybdenum boat in the prior art are cumbersome, the contact area between the molybdenum boat and the electrode rod is extremely small, and there are errors in manual operation. These problems will affect the film forming effect of evaporation on the target surface, and then lead to defects in its surface uniformity.

[0076] Therefore, in view of the defects of the prior art, the technical solution of the present application is proposed, and the technical solution of the present application will be described in detail below.

[0077] See also Figure 2 , Figure 2 The electrode module of the evaporation device provided in one embodiment of the present application is a partial structural schematic diagram. The electrode module of the evaporation device is used to realize thin film evaporation of a perovskite solar cell, and the electrode module 100 includes: a first electrode rod 10, a second electrode rod 20 and two supporting mechanisms 40.

[0078] The first electrode rod 10 is electrically connected to an electrode base 30 of the evaporation device; the second electrode rod 20 is electrically connected to another electrode base 30 of the evaporation device. The first electrode rod 10 and the second electrode rod 20 are cylindrical and are arranged perpendicular to the plane where the electrode base 30 is located, and are electrically connected to the electrode base 30. The first electrode rod 10 and the second electrode rod 20 can support and fix the molybdenum boat 50, and heat the molybdenum boat 50 to achieve heating and evaporation of the film material contained in the molybdenum boat 50.

[0079] Two bearing mechanisms 40 are respectively arranged on the first electrode rod 10 and the second electrode rod 20, and the height of the bearing mechanisms 40 on the first electrode rod 10 and / or the second electrode rod 20 is adjustable; the bearing mechanisms 40 are used to carry the molybdenum boat 50. The two bearing mechanisms 40 are used to carry the molybdenum boat 50, and are respectively sleeved on the columns of the first electrode rod 10 and the second electrode rod 20. When in use, the first electrode rod 10 and the second electrode rod 20 are arranged parallel to each other, and the molybdenum boat 50 is located between the two bearing mechanisms 40. The two bearing mechanisms 40 respectively carry one end of the molybdenum boat 50 to achieve stable carrying of the molybdenum boat 50. Among them, the two bearing mechanisms 40 can be lifted and lowered in the vertical direction along the rods of the first electrode rod 10 and the second electrode rod 20 respectively. It can be understood that in order to stably carry the molybdenum boat 50, the two bearing mechanisms 40 need to be at the same height at the positions of the first electrode rod 10 and the second electrode rod 20.

[0080] The first electrode rod 10 and the second electrode rod 20 each have a first portion 10 a , 20 a disposed close to the electrode base 30 and a second portion 10 b , 20 b disposed away from the electrode base 30 .

[0081] The first part 10a, 20a has an external thread, which is used to realize electrical connection with the electrode base 30 through threaded connection. The external thread can realize the connection and fixation of the first electrode rod 10 and the second electrode rod 20 with the electrode base 30, and can withstand a certain tensile force, and further provide more stable support for the connection between the first electrode rod 10 and the second electrode rod 20 and the electrode base 30. In addition, the first electrode rod 10 and the second electrode rod 20 can also realize electrical connection with the electrode base 30 through the external thread, thereby realizing heating of the molybdenum boat 50.

[0082] The second portion 10b, 20b has scales for displaying and / or marking the position of the carrier mechanism 40 when the first electrode rod 10 and / or the second electrode rod 20 are fixed. By adding scales on the first electrode rod 10 and the second electrode rod 20, it is helpful to ensure the accurate positioning of the carrier mechanism 40 during the evaporation process, thereby ensuring that the distance between the molybdenum boat 50 and the target material to be evaporated meets the process requirements, thereby ensuring the uniformity and quality of the evaporated film.

[0083] In this embodiment, the bottom of the first electrode rod 10 and the second electrode rod 20 have external threads. On the one hand, the first electrode rod 10 and the second electrode rod 20 can be connected to the electrode base 30 through the external threads, and then the molybdenum boat 50 can be heated through the electrical connection between the two; on the other hand, the external threads enable the first electrode rod 10 and the second electrode rod 20 to be more firmly fixed to the electrode base 30, avoiding the skewing and deviation of the electrode rods caused by the unstable connection between the electrode rods and the electrode base when the molybdenum boat 50 is disassembled and installed.

[0084] In this embodiment, the supporting mechanism 40 can be raised and lowered along the rod bodies of the first electrode rod 10 and the second electrode rod 20, and the rod bodies of the first electrode rod 10 and the second electrode rod 20 have scales, so that when the molybdenum boat 50 is replaced, the required height can be adjusted quickly and accurately, thereby avoiding the problem in actual operation that the distance between the molybdenum boat 50 and the target material to be evaporated deviates from the preset parameters, thereby affecting the uniformity of film formation on the target material surface.

[0085] Example 1

[0086] See also Figure 3 , Figure 3 The structural diagram of the bearing mechanism provided in one embodiment of the present application is as follows. In one embodiment, the bearing mechanism 40 comprises: a first connecting member 41 , a first clamping member 42 and a fixing member 43 .

[0087] The first connecting component 41 is sleeved on the first electrode rod 10 and / or the second electrode rod 20. The first connecting component 41 is used to connect the first clamping component 42 and the fixing component 43. When in use, the first connecting component 41 can be lifted and lowered in the vertical direction along the rods of the first electrode rod 10 and the second electrode rod 20, and the scale of the position of the first connecting component 41 parallel to the upper end surface of the electrode base 30 is used as the scale of the position of the bearing mechanism 40 when the first electrode rod 10 and / or the second electrode rod 20 is fixed.

[0088] The first clamping member 42 is fixedly connected to one end of the first connecting member 41 and is used to clamp the molybdenum boat 50. The first clamping member 42 is designed to be compatible with the molybdenum boat 50 of various sizes and specifications. When in use, the two first clamping members 42 respectively located at the two supporting mechanisms 40 clamp the two ends of the molybdenum boat 50 respectively to achieve the bearing of the molybdenum boat 50.

[0089] The fixing component 43 is connected to the other end of the first connecting component 41, and is used to fix the first connecting component 41 to the first electrode rod 10 and / or the second electrode rod 20. When in use, the fixing component 43 tightly fixes the first connecting component 41 to the first electrode rod 10 and / or the second electrode rod 20, preventing unnecessary displacement due to the weight of the first connecting component 41 itself or external force, which helps to maintain the stability and safety of the supporting mechanism 40; at the same time, the fixing component 43 can ensure that the supporting mechanism 40 is located at a preset position, avoiding the position deviation of the molybdenum boat 50 caused by position error, thereby avoiding adverse effects on the uniformity of the thin film on the surface of the target material to be evaporated.

[0090] In this embodiment, by adjusting the position of the first connecting component 41, the position of the molybdenum boat 50 can be adjusted according to the process requirements; the first clamping component 42 can provide necessary support for the molybdenum boat 50 by firmly clamping the molybdenum boat 50, thereby preventing unnecessary displacement due to the weight of the molybdenum boat 50 itself or external force, and at the same time, avoiding the insecurity caused by the accidental falling of the molybdenum boat 50; the first clamping component 42 can also adapt to a variety of different sizes and specifications of the molybdenum boat 50. When the molybdenum boat 50 is replaced, the first clamping component 42 can be used to achieve quick release and clamping, thereby improving production efficiency and operational convenience.

[0091] In one embodiment, the first connecting component 41 is an L-shaped extension plate 41-1; the L-shaped extension plate 41-1 comprises: a first plate surface 41-1a and a second plate surface 41-1b which are perpendicular to each other; wherein the plane where the top surface and / or the bottom surface of the first electrode rod (10) and / or the second electrode rod (20) are located is the first surface. The first plate surface (41-1a) is parallel to the first surface. The second plate surface (41-1b) is perpendicular to the first surface.

[0092] The first plate surface 41-1a has a first hole 401a; the L-shaped extension plate 41-1 is sleeved on the first electrode rod 10 and / or the second electrode rod 20 through the first hole 401a, and the L-shaped extension plate 41-1 is raised or lowered relative to the first electrode rod 10 and / or the second electrode rod 20 through the first hole 401a; when in use, the position of the L-shaped extension plate 41-1 on the rod body of the first electrode rod 10 and / or the second electrode rod 20 is adjusted as needed according to the requirements of the specific process; the first clamping component 42 is set at the end of the first plate surface 41-1a away from the second plate surface 41-1b.

[0093] The second plate surface 41 - 1 b has a second hole 401 b , and the fixing component 43 is disposed through the second hole 401 b , and is fixedly connected to the first electrode rod 10 and / or the second electrode rod 20 through the second hole 401 b .

[0094] In this embodiment, the L-shaped extension plate 41-1 is made of high-strength material, so that the L-shaped extension plate 41-1 can withstand greater force while maintaining a smaller volume and weight. While providing sufficient supporting force, it can ensure the stability of the supporting mechanism 40 and improve the convenience of operating the supporting mechanism 40.

[0095] See also Figure 4 , Figure 4 This is a schematic diagram of the structure of a fixing component provided in an embodiment of the present application. In one embodiment, the fixing component 43 includes: a fixing screw 43a and a fixing nut 43b.

[0096] The fixing screw 43a passes through the second hole 401b and abuts against the first electrode rod 10 and / or the second electrode rod 20; the fixing screw 43a is made of high-strength material and can provide a more stable supporting force to prevent the first connecting component 41 from sliding along the first electrode rod 10 and / or the second electrode rod 20 unnecessarily.

[0097] The fixing nut 43b is provided on the fixing screw 43a, and is used to fix the first connecting member 41 to the first electrode rod 10 and / or the second electrode rod 20. The fixing nut 43b has a certain anti-loosening function to prevent self-detachment due to vibration, impact or temperature change.

[0098] In this embodiment, the first connecting component 41 is tightly fixed to the first electrode rod 10 and / or the second electrode rod 20 by the fixing screw 43a and the fixing nut 43b to prevent unnecessary displacement of the first connecting component 41 when an external force is applied. By using the fixing screw 43a and the fixing nut 43b in combination, on the one hand, the first connecting component 41 can be tightly fixed to the first electrode rod 10 and / or the second electrode rod 20. On the other hand, the fixing screw 43a can be screwed according to process requirements during use, thereby achieving the lifting and lowering of the supporting mechanism 40 relative to the first electrode rod 10 and / or the second electrode rod 20.

[0099] In one embodiment, the fixing nuts 43b include two, one of which is in contact with the first electrode rod 10 and / or the second electrode rod 20; the other of which passes through the second hole 401b and is in contact with the outer side surface of the second plate surface 41-1b; wherein the outer side surface of the second plate surface 41-1b refers to the surface of the second plate surface 41-1b away from the first electrode rod 10 and / or the second electrode rod 20; in one embodiment, the second hole 401b is a threaded hole, wherein the threaded hole is a cylindrical threaded hole, has high connection strength and good sealing performance, and can be used in conjunction with the fixing screw 43a and the fixing nut 43b.

[0100] The first parts 10a, 20a of the first electrode rod 10 and / or the second electrode rod 20 are cylinders. Setting the first parts 10a, 20a as cylinders can reduce the friction between the supporting mechanism 40 and the contact part of the first parts 10a, 20a of the first electrode rod 10 and / or the second electrode rod, thereby improving the convenience of operating the supporting mechanism 40.

[0101] The second portion 10b, 20b of the first electrode rod 10 and / or the second electrode rod 20 is a cylinder with a cut surface, and the cut surface is parallel to the second plate surface 41-1b; the fixing screw 43a abuts against the cut surface, and another fixing nut 43b is connected to the fixing screw 43a.

[0102] In this embodiment, by providing two fixing nuts 43b, the supporting force of the fixing component 43 can be improved, thereby ensuring the stability of the supporting mechanism 40 and preventing the supporting mechanism 40 from changing its position when subjected to vibration or external force; by providing the second hole 401b as a threaded hole, the fixing screw 43a and the fixing nut 43b can be tightly fixed to form a stable connection, and at the same time, the screw 43a can be slightly adjusted during use to ensure accurate matching with the fixing nut 43b; by providing the second parts 10b, 20b of the first electrode rod 10 and / or the second electrode rod 20 as cylinders with cut surfaces, the contact area between the fixing screw 40a and the second parts 10b, 20b can be increased, and the friction between the two can be increased, thereby providing more stable support for the supporting mechanism 40.

[0103] See also Figure 5 , Figure 5 The schematic diagram of the structure of the first clamping member provided in one embodiment of the present application is as follows. In one embodiment, the first clamping member 42 includes: a first pressing plate 42a, a second pressing plate 42b, and a spring and a centering pin (not shown in the figure) connecting the first pressing plate 42a and the second pressing plate 42b.

[0104] The first pressing plate 42a is integrally formed with the first plate surface 41-1a and extends away from the second plate surface 41-1b; the contact portion between the second pressing plate 42b and the first pressing plate 42a is a plane with a preset area; wherein, assuming that the width of the molybdenum boat 50 is W, the preset area is aW, and a is 1 to 4 cm.

[0105] The first pressing piece 42a has a third hole (not shown in the figure) disposed on the side, the second pressing piece 42b has a fourth hole (not shown in the figure) disposed on the side, and the centering pin passes through the spring, the third hole and the fourth hole. The centering pin can ensure that the positional relationship between the first pressing piece 42a and the second pressing piece 42b is accurate, and avoid displacement when the two clamp the molybdenum boat 50; at the same time, the centering pin can also assist the first pressing piece 42a and the second pressing piece 42b to quickly locate and clamp the molybdenum boat 50, which is easy to operate and helps to improve work efficiency.

[0106] In this embodiment, the first pressing plate 42a and the first plate surface 41-1a are integrally formed to improve the structural stability and strength of the supporting mechanism 40, thereby avoiding damage to the supporting mechanism 40 caused by heating the molybdenum boat 50 during use; by providing a plane with a preset area at the contact portion of the first pressing plate 42a and the second pressing plate 42b, it can be suitable for molybdenum boats 50 of various sizes and specifications, without having to replace the supporting mechanism 40 due to the difference in the molybdenum boats 50, thereby saving costs.

[0107] Example 2

[0108] See also Figure 6 , Figure 6 This is a schematic diagram of the structure of a carrying mechanism provided in another embodiment of the present application. In another embodiment, the carrying mechanism 40 includes: a second connecting component 44, a second clamping component 45 and an electric control component 46.

[0109] The second connecting component 44 is sleeved on the first electrode rod 10 and / or the second electrode rod 20, and can be raised and lowered along the rod body of the first electrode rod 10 and / or the second electrode rod 20; the second clamping component 45 is fixedly connected to one end of the second connecting component 44, and is used to clamp the molybdenum boat 50; wherein the setting method of the second clamping component 45 is the same as the setting method of the first clamping component 42 in Example 1.

[0110] The electric control component 46 is disposed below the second connecting component 44 and is used to electrically control the lifting and lowering of the second connecting component 44 on the first electrode rod 10 and / or the second electrode rod 20 .

[0111] In this embodiment, the electric control component 46 is provided to replace the fixing component 43 in Example 1 to control the lifting and lowering of the second connecting component 44 on the first electrode rod 10 and / or the second electrode rod 20. While saving labor costs, the second connecting component 44 can be operated more accurately, conveniently and safely, thereby avoiding the influence on the uniformity of the thin film on the surface of the vapor deposition target material.

[0112] See also Figure 7 , Figure 7 This is a top view of an electric control component provided in another embodiment of the present application. In another embodiment, the electric control component 46 includes: an electric control ring 46a, a telescopic member 46b and a support member 46c.

[0113] The electric control ring 46a is sleeved on the second portion 10b, 20b of the first electrode rod 10 and / or the second electrode rod 20, and is used to electrically control the extension and retraction of the telescopic member 46b in the radial direction of the first electrode rod 10 and / or the second electrode rod 20.

[0114] The telescopic member 46b is controlled by the electric control ring 46a, and is telescopic along the radial direction of the first electrode rod 10 and / or the second electrode rod 20; wherein the telescopic member 46b is configured as a soft telescopic stopper with an accuracy of 0.05mm and a telescopic amount of 5mm to 1cm. When the telescopic member 46b is extended, the clamping radius formed by the telescopic member 46b becomes smaller, and the first electrode rod 10 and / or the second electrode rod 20 is clamped; when the telescopic member 46b is contracted, the clamping radius formed by the telescopic member 46b becomes larger, and the telescopic member 46b moves up and down relative to the first electrode rod 10 and / or the second electrode rod 20, thereby driving the second connecting member 44 to move up and down.

[0115] A support member 46c, one end of which is connected to the electric control ring 46a, and the other end of which is connected to the second connecting member 44. The support member 46c provides stable support for the electric control member 46 and the second connecting member 44, ensuring the stability and reliability of the two during operation.

[0116] In this embodiment, the electric control ring 46a is provided to control the extension and retraction of the telescopic member 46b in the radial direction of the first electrode rod 10 and / or the second electrode rod 20, which saves labor costs and further avoids errors caused by manual operation, thereby avoiding adverse effects on the uniformity of the thin film on the surface of the target material to be evaporated; at the same time, by providing the telescopic member 46b as a soft and retractable stopper, the friction between the contact part between the telescopic member 46b and the first electrode rod 10 and / or the second electrode rod 20 can be reduced, thereby avoiding wear of the scale on the surface of the first electrode rod 10 and / or the second electrode rod 20 when the telescopic member 46b is extended and retracted, thereby increasing the service life of the first electrode rod 10 and / or the second electrode rod 20.

[0117] The present application also provides an evaporation device, which includes: at least one electrode module of the evaporation device as described in any one of the above items.

[0118] In this embodiment, by adopting the electrode module described in any of the above items, the first electrode rod 10 and / or the second electrode rod 20 can be more firmly fixed on the electrode base, thereby avoiding the skewing and deviation of the electrode rod caused by the unstable connection between the electrode rod and the electrode base when the molybdenum boat 50 is disassembled and installed; by adding scales to the second parts 10b, 20b of the first electrode rod 10 and / or the second electrode rod 20, the required height can be adjusted quickly and accurately when the molybdenum boat 50 is replaced, thereby avoiding the problem that in actual operation, the distance between the molybdenum boat and the target material to be evaporated deviates from the preset parameters, thereby affecting the uniformity of film formation on the target surface; by A molybdenum boat fixing chuck is added to the end of the two supporting mechanisms 40 away from the electrode rod, which increases the contact area between the molybdenum boat 50 and the electrode rod, is more conducive to heating the molybdenum boat 50, and improves the efficiency of film material evaporation; at the same time, the addition of the molybdenum boat fixing chuck can also facilitate the replacement and installation of the molybdenum boat, thereby meeting the process requirements of different evaporation film formations; by adding the electric control component 46 below the supporting mechanism 40, the lifting and lowering of the supporting mechanism 40 along the first electrode rod 10 and / or the second electrode rod 20 can be electrically controlled, thereby eliminating the need for manual operation, saving labor costs while being able to more efficiently, accurately and safely adjust the required height of the molybdenum boat 50.

[0119] The present application also provides a method for performing evaporation using the electrode module of the above evaporation device, see Figure 8 , Figure 8 This is a flow chart of the evaporation method provided in the embodiment of the present application. The evaporation method comprises:

[0120] Preset parameters are provided, and the preset parameters at least include: the distance between the target material to be evaporated and the molybdenum boat 50.

[0121] In this step, the preset parameters include the distance between the target material to be evaporated and the molybdenum boat 50, the process temperature and process pressure required for the film material to be evaporated, and other process requirement parameters.

[0122] According to the preset parameters, the position coordinates of the molybdenum boat 50 on the first electrode rod 10 and / or the second electrode rod 20 are calculated.

[0123] The two supporting mechanisms 40 are adjusted so that the molybdenum boat 50 is located at a specified height of the first electrode rod 10 and the second electrode rod 20, so that the distance between the target material to be evaporated and the molybdenum boat 50 meets the preset parameters.

[0124] In this embodiment, by providing the preset parameters, the process conditions required for evaporation are ensured in advance, thereby ensuring the uniformity and quality of the thin film; by calculating the position coordinates of the molybdenum boat 50 on the first electrode rod 10 and / or the second electrode rod 20, the distance between the molybdenum boat 50 and the target material to be evaporated is determined, thereby avoiding the adverse effect of the distance error between the two on the uniformity of the thin film; according to the position coordinates, the supporting mechanism 40 can be adjusted to the corresponding scale of the first electrode rod 10 and / or the second electrode rod 20, which improves the convenience of operation while reducing errors, further avoiding adverse effects on the uniformity of the thin film.

[0125] The above description is only a preferred embodiment of the present application and is not intended to limit the present application. For those skilled in the art, the present application may have various changes and variations. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present application shall be included in the protection scope of the present application. It should be noted that similar numbers and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further defined and explained in the subsequent drawings.

[0126] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art who is familiar with the present technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application. Therefore, the protection scope of the present application should be based on the protection scope of the claims.

Claims

1. An electrode module of an evaporation device, used for realizing thin film evaporation of a perovskite solar cell, characterized in that: The electrode module (100) comprises: A first electrode rod (10) electrically connected to an electrode base (30) of a vapor deposition device; The second electrode rod (20) is electrically connected to another electrode base (30) of the evaporation device, and Two bearing mechanisms (40), respectively arranged on the first electrode rod (10) and the second electrode rod (20), the height of the bearing mechanism (40) on the first electrode rod (10) and / or the second electrode rod (20) being adjustable; the bearing mechanism (40) is used to bear the molybdenum boat (50); Wherein, the first electrode rod (10) and the second electrode rod (20) both have a first portion (10a, 20a) arranged close to the electrode base (30) and a second portion (10b, 20b) arranged away from the electrode base (30); the first portion (10a, 20a) has an external thread for achieving electrical connection with the electrode base (30) through threaded connection; the second portion (10b, 20b) has a scale for displaying and / or marking the position of the bearing mechanism (40) when the first electrode rod (10) and / or the second electrode rod (20) are fixed; The bearing mechanism (40) comprises: A second connecting component (44) sleeved on the first electrode rod (10) and / or the second electrode rod (20); a second clamping component (45) fixedly connected to one end of the second connecting component (44) and used for clamping the molybdenum boat (50); and an electric control component (46), arranged below the second connecting component (44), and used for electrically controlling the lifting and lowering of the second connecting component (44) on the first electrode rod (10) and / or the second electrode rod (20); The electronic control component (46) comprises: An electric control ring (46a), sleeved on the second part (10b, 20b) of the first electrode rod (10) and / or the second electrode rod (20); a telescopic member (46b) controlled by the electric control ring (46a) to achieve telescoping along the radial direction of the first electrode rod (10) and / or the second electrode rod (20); when the telescopic member (46b) is extended, the telescopic member (46b) clamps the first electrode rod (10) and / or the second electrode rod (20); when the telescopic member (46b) is contracted, the telescopic member (46b) moves up and down relative to the first electrode rod (10) and / or the second electrode rod (20); and, a support member (46c), one end of the support member (46c) being connected to the electric control ring (46a), and the other end of the support member (46c) being connected to the second connecting member (44); The second clamping member (45) is arranged in the same manner as the first clamping member (42); The first clamping component (42) comprises: a first pressing plate (42a), a second pressing plate (42b), and a spring and a centering pin connecting the first pressing plate (42a) and the second pressing plate (42b); The contact portion between the second pressing sheet (42b) and the first pressing sheet (42a) is a plane having a preset area; The first pressing plate (42a) has a third hole arranged on the side, the second pressing plate (42b) has a fourth hole arranged on the side, and the centering pin passes through the spring, the third hole and the fourth hole.

2. A vapor deposition device, characterized in that: include: At least one electrode module of the evaporation device as claimed in claim 1.

3. A vapor deposition method, characterized in that: Using the electrode module of the evaporation device according to claim 1, the evaporation method comprises: Providing preset parameters, the preset parameters at least including: the distance between the target material to be evaporated and the molybdenum boat (50); Calculating the position coordinates of the molybdenum boat (50) on the first electrode rod (10) and / or the second electrode rod (20) according to the preset parameters; The two supporting mechanisms (40) are adjusted so that the molybdenum boat (50) is located at a specified height of the first electrode rod (10) and the second electrode rod (20), thereby making the distance between the target material to be evaporated and the molybdenum boat (50) meet the preset parameters.

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