Lid movement system and method for chambers and containers

Abstract

A lid movement system and method facilitate reliable and safe movement of a lid for a room. Such a system may include: (a) a base member; (b) sidewalls extending from the base member, each sidewall including a cam surface defined therein; (c) a cover mounting arm extending away from the base member; (d) a first pivoting connection system that engages the cam surface and pivotally engages the cover mounting arm; (e) a travel member including a recess or an opening on a surface facing the base member; (f) a second pivot connection system that pivotally engages the travel member with the cover mounting arm; (g) a motor for moving the travel member (causing the cover mounting arm to move relative to the side wall); and / or (h) a stop mechanism extending from a direction facing the surface of the base member into the recess or opening of the travel member when the cover is opened.

Description

Technical Field

[0001] The present invention generally relates to systems and methods for opening and closing access to an interior chamber of an enclosure (e.g., a module, other chamber or container used in a substrate processing system, etc.). Some more specific aspects of the present technology relate to a lid movement system, an enclosure (e.g., a substrate handling chamber module, a substrate processing chamber module, a reactor chamber, a storage container, other container, etc.) including such a lid movement system, and / or a method of moving a lid (e.g., opening and closing an access opening of such an enclosure). Background Art

[0002] During the manufacture of semiconductor devices, such as integrated circuits and electronic devices, material layers are typically deposited onto a substrate. Material layer deposition is typically accomplished by supporting the substrate within a substrate processing chamber apparatus, heating the substrate to a desired deposition temperature, and flowing one or more material layer precursors through the chamber apparatus and across the substrate. As the precursors flow through the substrate, a material layer is gradually formed on the substrate surface, typically based on the temperature of the substrate and environmental conditions within the chamber apparatus.

[0003] The conventional substrate processing system 100 includes Figure 1 A "cluster-type" system of the type generally shown. Such a substrate processing system 100 includes a substrate handling chamber 102 operatively connected to two to four substrate processing chambers 104 via gate valves 106. Each substrate processing chamber 104 is equipped to receive a substrate on a substrate support 108 that holds the substrate during processing (e.g., during deposition of a material layer as described above).

[0004] The substrate handling chamber 102 includes a robot 110 for moving substrates into and out of various substrate processing chambers 104 through gate valves 106. In use, the gate valves 106 are opened, and the end effector 110A of the robot 110 extends through the open gate valves 106 to insert a substrate into or remove a substrate from the interior chamber of the substrate processing chamber 104 (e.g., place a substrate on or remove a substrate from a substrate support 108). Once the robot 110 is retracted from the substrate processing chamber 104, the gate valves 106 are closed, thereby sealing the substrate processing chamber 104 from the substrate handling chamber 102. Other desired actions may then be performed in the substrate processing chamber 104 and / or the substrate handling chamber 102.

[0005] Figure 1The substrate processing system 100 is further shown to include a load lock module 112. The load lock module 112 is connected to the substrate handling chamber 102 through a gate valve 116. The load lock module 112 includes a substrate holding member 114 for holding the substrate on its way into the substrate handling chamber 102 for further processing and on its way out of the substrate handling chamber 102 (after processing is completed). The end effector 110A of the robot 110 moves through the gate valve 116 (when open) to move the substrate from the load lock module 112 into the substrate handling chamber 102 (for layer deposition and other processing), and from the substrate handling chamber 102 into the load lock module 112 (after processing is completed). The load lock module 112 and the gate valve 116 keep the substrate isolated from the environment of the substrate handling chamber 102 until the conditions (e.g., temperature, pressure, atmospheric content, etc.) within the substrate handling chamber 102 are ready for the insertion of the substrate.

[0006] The load lock module 112 is also coupled to the equipment front end module 120 through another gate valve 118. The equipment front end module 120 includes a robot 122. The end effector 122A of the robot 122 moves through the gate valve 118 (when open) to move substrates from the equipment front end module 120 into the load lock module 112 (for layer deposition and / or other processing), and from the load lock module 112 into the equipment front end module 120 (after processing is completed). The robot 122 of the equipment front end module 120 also picks up a new substrate from one of the load ports 124A-124C for processing, and returns a processed substrate to one of the load ports 124A-124C, for example, to another location for further processing.

[0007] This type of substrate handling chamber 102 generally includes a chamber body 102A (eg, housing a robot 110 therein) having an entry opening 102O covered and sealed by a cover 102L. The cover 102L is removable to allow cleaning and other maintenance of the substrate handling chamber 102, robot 110, and the like.

[0008] Due to the size, weight and / or shape of the lid 102L, removing the lid 102L of the substrate handling chamber 102 typically requires a lifting mechanism. The lifting mechanism typically includes a stage 130 and an elevator 132, the stage 130 being constructed to span the lid 102L of the substrate handling chamber 102. The elevator 132 is connected to the lid 102L (e.g., at a connector 102C) and applies sufficient upward force to break the seal between the lid 102L and the interior chamber of the substrate handling chamber 102. Even after the substrate handling chamber 102 is vented, the force required to break the seal may be significant. The stage 130 enables the lifted lid 102L to be removed from the chamber body 102A (by moving the elevator 132 and the attached lid 102L along the stage 130 to a position away from the rest of the substrate processing system 100) to provide access to the interior of the substrate handling chamber 102 and the robot 110.

[0009] Conventional semiconductor production systems and methods of this type are generally acceptable for their intended purpose, but there is room for improvement. Stage-elevator devices of the above type require space and may require regular certification and inspection, thereby increasing the cost of ownership and / or complicating the maintenance of the substrate processing system. Summary of the invention

[0010] Various aspects of the present technology relate to systems and methods for opening and closing access to an interior chamber of an enclosure (e.g., a module for a substrate processing system, other chamber or container, etc.). Some more specific aspects and examples of the present technology relate to a lid movement system, an enclosure (e.g., a substrate handling chamber module, a substrate processing chamber module, a reactor chamber, a storage container, other container, etc.) including such a lid movement system, and / or methods of moving a lid, such as opening and closing an access opening of such an enclosure.

[0011] A cover moving system and method according to an example of the present technology facilitates reliable and safe movement of a cover for a chamber. Such a system may include one or more of the following: (a) a base member; (b) side walls extending from the base member, each side wall including a cam surface defined therein; (c) a cover mounting arm extending away from the base member; (d) a first pivot connection system that engages the cam surface and pivotally engages the cover mounting arm; (e) a travel member including a recess or opening on a surface facing the base member; (f) a second pivot connection system that pivotally engages the travel member with the cover mounting arm; (g) a motor for moving the travel member (causing the cover mounting arm to move relative to the side wall); and / or (h) a stop mechanism that extends from the direction of the surface facing the base member into the recess or opening of the travel member when the cover is opened.

[0012] A cover moving system according to at least some examples of the present technology may include one or more of the following: (a) a base member having a first side and a second side; (b) a first side wall extending from the first side of the base member, the first side wall including a first cam surface defined therein; (c) a second side wall extending from the second side of the base member, the second side wall including a second cam surface defined therein; (d) a cover mounting arm extending in a direction away from the base member; (e) a first pivot connection system that engages the first cam surface and the second cam surface and pivotally engages the cover mounting arm; (f) a travel member including a recess or opening on a surface facing the base member; (h) a second pivot connection system that pivotally engages the travel member with the cover mounting arm; (i) a motor for moving the travel member, wherein movement of the travel member causes movement of the cover mounting arm relative to the first side wall and the second side wall; and / or (j) a stop mechanism that is configured to removably extend from a direction facing the surface of the base member into the recess or opening of the travel member when the travel member is in the cover open position.

[0013] In addition to one or more of the above features, or as an alternative, the base member in the cover moving system according to the present technology may include a through hole, wherein when the moving member is in the cover open position, the stop mechanism is removably engaged with the recess or opening of the moving member through the through hole of the base member.

[0014] In addition to or as an alternative to one or more of the features described above, a cover movement system in accordance with the present technology may include a heating element configured to heat at least a portion of the cover mounting arm.

[0015] In addition to or instead of one or more of the features described above, in some examples of the present technology, each of the first and second cam surfaces can have a vertical cam segment at a first end and an inclined cam segment extending upward and away from the vertical cam segment and away from the base member.

[0016] In addition to or instead of one or more of the features described above, in some examples of the present technology, each of the first side wall and the second side wall may include a tracking groove to define a direction of movement of the traveling member, wherein the traveling member includes one or more tracking elements extending into the tracking groove.

[0017] In addition to or instead of one or more of the features described above, in some examples of the present technology, a cover mounting arm may include a first end and a cover engagement portion, wherein a first pivot connection system is located at the first end and a second pivot connection system is spaced apart from the first end toward the cover engagement portion.

[0018] Other aspects of the present technology relate to housings. Such housings may include one or more of the following: (a) a main body member including a top, a bottom, and one or more side walls connecting the top and the bottom, wherein the top includes an opening that provides access to an internal chamber partially defined by the main body member; (b) a cover that can be sealably attached to the top of the main body member to close the internal chamber; and / or (c) a cover movement system engaged with the main body member, wherein the cover movement system includes one or more of the following: (i) a base member having a first side and a second side, wherein the base member includes a surface facing away from the main body member, (ii) a first side wall extending from the first side of the base member, the first side wall including a first cam surface defined therein, (iii) a second side wall extending from the second side of the base member, the second side wall including a second cam surface defined therein, (iv) a cover mounting arm extending in a direction away from the base member, wherein the cover mounting arm engages with the cover at a first outer edge position of the cover, (v) a first pivot connection system that engages the first cam surface and the second cam surface and pivotally engages the cover mounting arm; (vi) a travel member including a recess or opening on a surface facing the base member; (vii) a second pivot connection system that pivotally engages the travel member with the cover mounting arm; (viii) a motor for moving the travel member, wherein movement of the travel member causes movement of the cover mounting arm and the cover relative to the main body member; and / or (ix) a stop mechanism that is configured to extend from a direction facing the surface of the base member into the recess or opening of the travel member when the travel member is in the cover open position.

[0019] In addition to or instead of one or more of the features described above, in some example housings according to the present technology, the base member may include a through hole, and wherein the stop mechanism is removably engaged with a recess or opening of the traveling member through the through hole of the base member when the traveling member is in the cover open position.

[0020] In addition to or in lieu of one or more of the features described above, some example housings according to the present technology may include a control system for controlling the motor, wherein the control system generates a signal to stop operation of the motor when the lid is in the lid open position.

[0021] In addition to or in lieu of one or more of the features described above, some example housings according to the present technology may include a heating element configured to heat at least one of (i) the cover at least at a first outer edge location or (ii) at least a portion of a cover mounting arm.

[0022] In addition to or instead of one or more of the features described above, in some example housings according to the present technology, each of the first cam surface and the second cam surface may include a vertical cam segment located at the first end and an inclined cam segment extending upward and away from the vertical cam segment and away from the base member.

[0023] In addition to or instead of one or more of the features described above, in some example housings according to the present technology, each of the first cam surface and the second cam surface can be configured such that during a cover opening event: (i) the cover movement system initially lifts the cover upward at a first outer edge position until the seal between the cover and the main body member is unsealed, and then (ii) the cover pivots upward away from the main body member about the first pivot connection system and the second pivot connection system.

[0024] In addition to or instead of one or more of the features described above, in some example housings according to the present technology, each of the first side wall and the second side wall may include a tracking groove to limit the direction of movement of the traveling member, wherein the traveling member includes one or more tracking elements extending into the tracking groove.

[0025] In addition to or instead of one or more of the features described above, in some example housings according to the present technology, a cover mounting arm may include a first end and a cover engagement portion, wherein a first pivot connection system is located at the first end and a second pivot connection system is spaced apart from the first end toward the cover engagement portion.

[0026] In addition to or as an alternative to one or more of the features described above, in some example housings according to the present technology, the body member may include a substrate handling chamber for moving a substrate from the internal chamber to one or more substrate processing chambers.

[0027] Other aspects of the present technology relate to a method for moving a cover relative to a main body member of a housing, the method comprising one or more of the following: (a) engaging a cover moving system with a cover, wherein the cover moving system comprises: (i) a base member having a surface facing in a direction away from the main body member, (ii) a cover mounting arm extending in a direction away from the base member, wherein the engagement comprises engaging the cover mounting arm with the cover at a first outer edge position of the cover, (iii) a travel member comprising a recess or opening on a surface facing the base member, (iv) a pivot connection system pivotally engaging the travel member with the cover mounting arm, and (v) a motor for moving the travel member, wherein movement of the travel member causes movement of the cover mounting arm and the cover; (b) operating the motor to initially apply a lifting force to the cover at the first outer edge position; (c) after applying the lifting force, operating the motor to apply a rotational force to rotate the cover upward on the cover mounting arm in a direction away from the main body member to a cover open position; and (d) inserting a stop mechanism into the recess or opening of the travel member from the direction of the surface facing the base member to prevent the cover from moving from the cover open position.

[0028] In addition to or instead of one or more of the features described above, in some example methods according to the present technology, inserting may include inserting the stop mechanism through a through-hole opening provided in the base member and into a recess or opening of the traveling member.

[0029] In addition to or in lieu of one or more of the features described above, in some example methods according to the present technology, a lifting force will break the sealing engagement between the cover and the body member at the first outer edge location.

[0030] In addition to or as an alternative to one or more of the features described above, in some example methods according to the present technology, applying the lifting force to break the sealing engagement may include deforming the shape of the cover at the first outer edge location.

[0031] In addition to or instead of one or more of the features described above, some example methods according to the present technology may include heating at least one of (i) the cover at least at a first outer edge position or (ii) at least a portion of the cover mounting arm before operating the motor to apply the lifting force.

[0032] In addition to or as an alternative to one or more of the features described above, in some example methods according to the present technology, the body member may include a substrate handling chamber for moving a substrate from the body member to one or more substrate processing chambers.

[0033] In addition to or in lieu of one or more of the features described above, some example methods according to the present technology may include a lid closing step.

[0034] In addition to or in lieu of one or more of the features described above, some exemplary methods according to the present technology may include, with the cover in the cover open position, one or more of: (i) removing the stop mechanism from the recess or opening of the travel member; and / or (ii) operating a motor to initially rotate the cover downward on the cover mounting arm in a direction toward the main body member and then moving the cover downward to the main body member.

[0035] The present invention is provided to introduce some concepts related to the present technology in a simplified form. These concepts are further described in detail in the detailed description of the examples of the following disclosure. The present invention is not intended to identify the key features or essential features of the claimed subject matter, nor is it intended to be used to limit the scope of the claimed subject matter. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] These and other features, aspects and advantages of the present invention disclosed herein are described below with reference to the accompanying drawings of certain embodiments, which are intended to illustrate rather than to limit the present invention.

[0037] Figure 1is a schematic diagram of a basic prior art cluster-type substrate processing system;

[0038] Figure 2 A schematic top view of an example substrate processing system according to some examples of the present technology is provided;

[0039] Figures 3A to 3G Various views are provided showing features of a cover movement system in conjunction with an enclosure (e.g., a substrate handling chamber) according to some examples of the present technology; and

[0040] FIG. 4A to FIG. 4F (2) Various views are provided illustrating various features of cover movement operations according to some examples of the present technology.

[0041] It should be understood that the elements in the drawings are shown for simplicity and clarity and are not necessarily drawn to scale. For example, the relative sizes of some elements in the drawings may be exaggerated relative to other elements to help improve the understanding of the illustrated embodiments of the present disclosure. DETAILED DESCRIPTION

[0042] Reference will now be made to the drawings, wherein like reference numerals represent similar structural features or aspects of the subject disclosure.

[0043] Figure 2 An example substrate processing system 200 is shown that includes a cover movement system 300 and / or uses a cover movement method according to some examples of the present technology. More specifically, Figure 2 A top view of a substrate processing system 200 (e.g., a "cluster-type" semiconductor processing system) having one or more "housings" that may include a lid movement system 300 and / or use lid movement methods in accordance with aspects of the present technology is schematically shown. This particular example substrate processing system 200 includes a lid movement system 300 coupled to a substrate handling chamber 210 (which includes a body 210A, e.g., a body member or chamber including a top, a bottom, one or more side walls connecting the top and bottom, and a top inlet opening 210O) in accordance with examples of the present technology. Figure 2 Further shown is a cover moving system 300 according to the present technology, which is connected to a cover 210L that covers an inlet opening 210O of an inner chamber of a substrate handling chamber 210 in the “cluster type” substrate processing system 200 .

[0044] Figure 2The illustrated substrate processing system 200 includes: (a) a substrate handling chamber 210 including a first robot 212 having an end effector 212A and a cover movement system 300; (b) a load lock module 220 connected to an edge or face of the substrate handling chamber 210; and (c) an equipment front end module 230 including a second robot 232 having an end effector 232A connected to a side of the load lock module 220 opposite the substrate handling chamber 210. The equipment front end module 230 may include or be connected to a nitrogen source for providing a nitrogen atmosphere within the equipment front end module 230. The equipment front end module 230 receives new substrates (e.g., wafers) for processing into the substrate processing system 200 and discharges processed substrates from the substrate processing system 200 through one or more load ports 240A-240D (using the second robot 232 to move substrates between the load ports 240A-240D and the load lock module 220). Although in Figure 2 Four load ports 240A-240D are shown in the example of FIG. 1 , but more or fewer load ports may be provided in other examples of the present technology.

[0045] The substrate handling chamber 210 is connected to a plurality of substrate processing chambers 280. The substrate is transferred into the substrate processing chamber 280, where one or more layers of material are deposited onto the surface of the substrate and / or other desired substrate processing is performed. Figure 2 Each substrate processing chamber 280 is shown to include four substrate supports 282, onto which substrates may be placed during processing. More or fewer substrate supports 282 may be provided in each substrate processing chamber 280 (e.g., the substrate processing chamber 280 may be a dual chamber module (DCM) or a quad chamber module (QCM)). A substrate processing chamber 280 according to some examples of the present technology may include an additional four substrate supports 282 located Figure 2 282. Each substrate processing chamber 280 may have the same structure, or one or more substrate processing chambers 280 may have a different structure than other substrate processing chambers 280 that exist.

[0046] The substrate handling chamber 210 is connected to its respective substrate processing chamber 280 via one or more gate valves 250. Although two gate valves 250 are shown to connect the substrate handling chamber 210 to each of their respective substrate processing chambers 280, in other examples of the present technology, each substrate processing chamber 280 may be provided with more or fewer gate valves 250. The substrate processing chamber 280 according to some examples of the present technology may be connected to the substrate handling chamber 210 via two additional gate valves 250, such as located at Figure 2250 . When closed, the gate valves 250 sealably separate the substrate handling chamber 210 from the substrate processing chamber 280 to which it is connected (so that independent atmospheric conditions can be maintained in each chamber). When opened, the gate valves 250 provide an opening (e.g., a substrate transfer slot) through which the end effector 212A of the first robot arm 212 can extend to move a substrate into and out of the substrate processing chamber 280. The opening through the gate valves 250 is aligned with the substrate transfer slots provided in the substrate processing chamber 280 and the substrate handling chamber 210 so that the substrate can be moved between the substrate processing chamber 280 and the substrate handling chamber 210 through the gate valves 250. Each gate valve 250 can have the same structure, or one or more gate valves 250 can have a different structure than other gate valves 250 that exist.

[0047] One side of the load lock module 220 is connected to the load lock module 220 by one or more gate valves 260A ( Figure 2 The load lock module 220 is connected to the equipment front end module 230, and the opposite side of the load lock module 220 is connected to the substrate handling chamber 210 through one or more gate valves 260B. The load lock module 220 also includes one or more substrate supports 222 ( Figure 2 20 ), is used to hold the substrate while the substrate is waiting to be moved into the equipment front end module 230 or the substrate handling chamber 210. When closed, the gate valves 260A, 260B sealably separate the load lock module 220 from the equipment front end module 230 and the substrate handling chamber 210 (so that independent atmospheric conditions can be maintained in each chamber). When opened, the gate valve 260A provides an opening (e.g., a substrate transfer slot) through which the end effector 232A of the second robot 232 can extend to move the substrate into and out of the equipment front end module 230. The opening through the gate valve 260A is aligned with the substrate transfer slot provided in the equipment front end module 230 and the load lock module 220 so that the substrate can be moved between the equipment front end module 230 and the load lock module 220 through the gate valve 260A. When opened, the gate valve 260B provides an opening (e.g., a substrate transfer slot) through which the end effector 212A of the first robot 212 can extend to move the substrate into and out of the substrate handling chamber 210. The opening through the gate valve 260B is aligned with the substrate transfer slot provided in the substrate handling chamber 210 and the load lock module 220 to enable the substrate to be moved between the substrate handling chamber 210 and the load lock module 220 through the gate valve 260B. Each gate valve 260A, 260B may have the same structure, or one or more gate valves 260A, 260B may have a different structure than other gate valves 260A, 260B that exist.

[0048] As described above, according to various aspects of the present technology, the substrate handling chamber 210 of this example is equipped with a cover moving system 300. Figures 3A to 3G The example cover movement system 300 is discussed in greater detail. Figure 3A A perspective view of the load lock module 220 and substrate handling chamber 210 (including the lid movement system 300) of the substrate processing system 200 is provided, with the substrate processing chamber 280 and the tool front end module 230 removed. Figure 3B A perspective view of a cover movement system 300 with an attached cover 210L is provided according to some examples of the present technology. Figure 3C and 3D A side view and a cross-sectional view, respectively, of a portion of a lid movement system 300 in a “lid open” position, according to an example of the present technology. Figure 3E Additional details regarding cam surfaces according to some examples of the present technology are provided. Figure 3F A front view of a portion of the "tower" of the cover movement system 300 is provided. Figure 3G An exploded view of a cover movement system 300 according to some examples of the present technology is provided to illustrate its various parts. Figures 3A to 3G Use with Figure 2 (or other figures) are referred to with the same reference numerals, the same or similar parts are referenced, and many overlapping descriptions may be omitted.

[0049] like Figure 3A As shown, the cover 210L covers and seals the opening of the internal chamber 210C containing the first robot arm 212 (the first robot arm 212 is Figure 3A 210L). The lid 210L and / or the edge of the opening (lid seat) may include sealing components (e.g., gaskets, elastic O-rings, etc.) to help maintain a sealed environment within the internal chamber 210C (e.g., so that the internal chamber 210C can be maintained under vacuum and / or atmospheric conditions different from those of the substrate processing chamber 280 and / or the load lock module 220). The lid 210L of this example also includes additional fixtures 214 fixed to the body 210A (e.g., by bolting) to provide further fixation of the lid 210L to the body 210A. In this illustrated example, the additional fixtures 214 are spaced around the perimeter 210P of the lid 210L. Although not required in all examples of the present technology, the lid 210L of this illustrated example also includes some sealed observation windows 210W that provide visual access to the internal chamber 210C through the top.

[0050] Now combine Figures 3A to 3G Additional features of the cover movement system 300 and its engagement with the cover 210L are described in greater detail. The example cover movement system 300 includes a base member 302 (e.g., a rear panel) having a first side 302A (e.g., right side of center when looking at a major surface 302S of the base member 302—see Figure 3F) and a second side 302B (eg, left side of center when looking at the major surface 302S of the base member 302—see Figure 3F ). The first side wall 304A extends from the first side 302A of the base member 302 (e.g., in a direction toward the cover 210L and / or toward the cover mounting arm 310 and / or in a direction away from the main surface 302S). The first side wall 304A includes a first cam surface 306A defined therein. Similarly, the cover movement system 300 also includes a second side wall 304B extending from the second side 302B of the base member 302 (e.g., in a direction toward the cover 210L and / or toward the cover mounting arm 310 and / or in a direction away from the main surface 302S), and the second side wall 304B also includes a second cam surface 306B defined therein. The base member 302, the first side wall 304A, and the second side wall 304B of this example are fixedly mounted relative to (e.g., by bolting) the main body 210A of the substrate handling chamber 210 (e.g., at a position opposite to the position of the load lock module 220). The base member 302, the first side wall 304A and the second side wall 304B (optionally together with the top member 304T and / or the bottom member 304X) can form a "tower"-like structure of the cover movement system 300. The components forming the "tower" structure can define an interior chamber 304V, for example, with an open front face, such as Figure 3B In this illustrated example, the substrate handling chamber 210 has a generally regular pentagonal shape (or at least its gate valve mounting locations are arranged in a pentagonal shape), the load lock module 220 is coupled to one face of the pentagonal shape, and the lid movement system 300 (e.g., at least its base member 302, first side wall 304A, and second side wall 304B (or "tower")) is located at a corner of the pentagonal shape, directly across the substrate handling chamber 210 from the load lock module 220. However, if desired, the lid movement system 300 can be located at other locations around the substrate handling chamber 210 (e.g., other corners of a pentagon and / or other shapes of housing).

[0051] The cover mounting arm 310 extends in a direction away from the base member 302 (and toward the cover 210L). The cover mounting arm 310 of the illustrated example includes a first arm member 310A located on one side and a second arm member 310B located on the other side. Figure 3B As shown, a base member 318P (e.g., a base plate) extends between the arm members 310A, 310B, and the base member 318P, the first arm member 310A, and / or the second arm member 310B engage the top surface of the cover 210L near the perimeter 210P of the cover 210L, such as by bolts. Thus, the cover mounting arm 310 is fixed to the cover 210L (e.g., in a cantilever arrangement), but the mounting arm 310 is movable relative to the base member 302, the first side wall 304A, and the second side wall 304B (and relative to the entire "tower").

[0052] like Figure 3C , 3D 3G, a first pivot connection system 320 engages a first cam surface 306A of the first side wall 304A and a second cam surface 306B of the second side wall 304B. The first pivot connection system 320 of this example includes one or more shafts 320A, 320B (e.g., pins), which are mounted to or integrally formed with the cover mounting arm 310, for example, at couplings 322A, 322B, respectively (e.g., portions forming mounting holes for the shafts). The shafts 320A, 320B can be fixed relative to the cover mounting arm 310 (e.g., fixed relative to the first arm member 310A and the second arm member 310B, respectively). The shafts 320A, 320B extend into and engage with the cam surfaces 306A and / or 306B, such that the shafts 320A, 320B can slide and rotate within their respective cam surfaces 306A, 306B. Any type of connection may be used in accordance with the present technology. For example, the first arm member 310A may include a coupling 322A that is a separate portion from the coupling 322B provided on the second arm member 310B, or a single coupling portion may be provided (e.g., extending between the arm members 310A, 310B). As another example, the shaft 320A may be a separate portion from the shaft 320B, or the shafts 320A and 320B may constitute opposite ends of a single shaft member. As another example, the shafts 320A, 320B may constitute one or more rods that are fixed to or integrally formed at the first ends 316 of the first and second arm members 310A, 310B, and are sized and shaped to allow rotation within the cam surfaces 306A, 306B. Alternatively, in some examples, the shafts 320A, 320B may rotate relative to the couplings 322A, 322B, respectively. Figure 3G In the particular example shown, the shafts 320A, 320B extend through the couplings 322A, 322B, respectively, and into opposing ends of a mounting member 316M disposed at the first ends 316 of the first and second arm members 310A, 310B. In this example, the mounting member 316M includes one or more holes that receive the ends of the shafts 320A and 320B.

[0053] As described above, shafts 320A and 320B engage cam surfaces 306A and 306B, respectively. Cam surfaces 306A and 306B guide movement of cover mounting arm 310 and engage cover 210L as cover 210L moves, as will be described in more detail below. Figure 3E as well as Figure 3C and Figure 3DAs shown, in this illustrated example, each of the first cam surface 306A and the second cam surface 306B has a vertical cam segment 306V at its first end, and an inclined cam segment 306X extending upward and away from the vertical cam segment 306V (and away from the base member 302) to the second end of the cam surfaces 306A, 306B. When the example cover movement system 300 is installed on the substrate handling chamber 210 for typical use, for example, Figure 2 and 3A In the manner shown, there is a "vertical" and "upward" orientation. Thus, when the cover movement system 300 is mounted on the substrate handling chamber 210, the inclined cam segments 306X (and the movement of the shafts 320A, 320B caused by them) include both vertical and horizontal components. The vertical cam segments 306V and the inclined cam segments 306X define an angle A, such as Figure 3E Angle A may be an obtuse angle, for example in the range of 95 to 150 degrees, and in some examples, in the range of 100 to 140 degrees or in the range of 105 to 130 degrees. In the illustrated example, angle A is about 120 degrees.

[0054] Figure 3C , 3D 3G further shows that the example cover moving system 300 includes a travel member 330 for moving the cover mounting arm 310 (and the cover 210L attached thereto). The travel member 330 of this example includes a base element 330A. A recess 330R (or opening) is defined in (or through) the base element 330A (or other portion of the travel member 330), for example, on a surface 332 of the travel member 330 that directly faces the base member 302. See FIG. Figure 3D . The opening of the recess 330R can be set at a position on the surface 332 that is offset from the central vertical axis or position of the travel member 330 (and / or offset from the central vertical axis or position of the base member 302 or "tower"). In addition, the base member 302 of this example includes an opening 302O (e.g., a through hole) that overlaps (e.g., is at least partially aligned in the axial or length direction) with the recess 330R defined in (or through) the base element 330A of the travel member 330 when the travel member 330 is in the cover open position. Figure 3F As shown, the opening 302O (and the recess 330R of the travel member 330) can be offset to one side of the base member 302 (e.g., within the first side 302A in this illustrated example). The offset (off-center) position of the opening 302O and the recess 330R provides additional space for incorporating these features into the structure of the cover movement system 300 (e.g., offset from the central track or other component on which the travel member 330 moves), and allows easy access to the opening 302O for inserting the stop mechanism 360 (described in more detail below).

[0055] The travel member 330 of this example also includes one or more tracking elements 334, for example, extending outwardly from each side of the base element 330A. Figure 3C , 3D 3G, two tracking elements 334 are shown on each side of the travel member 330. The tracking elements 334 fit into and engage corresponding tracking slots 304C and 304D defined in the first side wall 304A and the second side wall 304B, respectively. The tracking slots 304C and 304D and the tracking elements 334 extending therein (and engaging therewith) define the direction of movement of the travel member 330 when the motor 350 moves the travel member 330 (which in turn moves the cover mounting arm 310 and the connection cover 210L). In this illustrated example, the travel member 330 moves in a vertical direction (although other orientations are possible). The travel member 330 can be mounted on a rotating lead screw (e.g., driven by a motor 350 and a gear box, driven by a hand crank, etc.) to move the travel member 330 up and down (the direction of movement of the travel member 330 is controlled by the tracking element 334, the tracking grooves 304C and 304D, the side walls 304A and 304B and / or the screw drive).

[0056] The second pivot connection system 340 pivotally couples the travel member 330 to the cover mounting arm 310. The second pivot connection system 340 of this example includes one or more shafts 340A (or pins) that are pivotally (rotatably) mounted to a coupling 340B disposed or coupled to the travel member 330 (e.g., the shaft 340A extends through a portion of the travel member 330 that defines a shaft mounting hole 330H, such as Figure 3G 340A). The shaft 340A is fixed relative to the cover mounting arm 310 and optionally formed integrally as a part of the cover mounting arm 310 (e.g., one shaft 340A is fixed to the first arm member 310A and the other shaft 340A is fixed to the second arm member 310B). Alternatively, the shaft 340A can be fixed with the travel member 330 at the coupling 340B, but can rotate within the shaft mounting opening or coupling provided with the cover mounting arm 310.

[0057] According to the present technology, any type of connection at the second pivot connection system 340 may be used. For example, the first arm member 310A may include an axle support that is separate from the axle support provided on the second arm member 310B, or a single axle support may be provided (e.g., extending between the arm members 310A, 310B). As another example, a single axle 340A may be provided that is engaged with (or integrally formed with) both the first arm member 310A and the second arm member 310B, or split axle 340A portions may be provided (one axle 340A is provided with the first arm member 310A, and a split axle 340A is provided with the second arm member 310B). The size and shape of the openings of the axle 340A and the coupling 340B may allow the arm members 310A, 310B to rotate about the axle 340A within the opening of the coupling 340B relative to the travel member 330. If necessary or desired, a bearing or other rotational support structure may be provided at the rotational engagement location between the axle 340A and the coupling 340B.

[0058] Will refer to Figure 3G The second pivot connection system 340 of the illustrated example is described in additional detail. As shown, the shaft mounting hole 330H of the travel member 330 is disposed in a rotation or pivot mounting area 330P of the travel member 330. In this illustrated example, the rotation or pivot mounting area 330P is located on the opposite side of the surface 332 and slightly below the surface 332, and / or it extends outwardly and below the base element 330A of the travel member 330. In this illustrated example, as shown in FIG. Figure 3G As shown, the rotation or pivot mounting area 330P extends into a recess or opening 310R defined in the top surface of the cover mounting arm 310 so that the shaft mounting hole 330H of the travel member 330 is axially aligned with the shaft hole 310H provided in the cover mounting arm 310 (e.g., in this illustrated example, one shaft hole 310H is provided in the first arm member 310A and the other shaft hole 310H is provided in the second arm member 310B). The shaft hole 310H leads to the recess 310R. The shaft 340A extends through the shaft hole 310H of the cover mounting arm 310 and the shaft mounting hole 330H of the travel member 330 to rotatably mount the cover mounting arm 310 relative to the travel member 330. Therefore, the shaft 340A extends through the shaft hole 310H and the recess 310R (the shaft 340A is located inside the shaft mounting hole 330H of the travel member 330 in the recess 310R).

[0059] like Figure 3D and 3GAs shown in the example, the cover mounting arm 310 (e.g., each of the first arm member 310A and the second arm member 310B) includes or extends to a first end 316 that includes a first pivot connection system 320. In addition, the cover mounting arm 310 (e.g., each of the first arm member 310A and the second arm member 310B) includes a cover joint 318, wherein the cover mounting arm 310 is connected to the cover 210L (e.g., by a bolt connection). In this illustrated example, the second pivot connection system 340 is spaced apart from the first end 316 toward the cover joint 318. In this way, the cover joint 318 is closer to the second pivot connection system 340 than the first pivot connection system 320. In some examples of the present technology, the second pivot connection system 340 can be located at or within the cover joint 318. As shown in the example of the present technology, the second pivot connection system 340 can be located at or within the cover joint 318. Figure 3B As shown, the cover engagement portion 318 of this example includes a base member 318P (e.g., a base plate) extending between the arm members 310A, 310B, and one or more of the base member 318P, the first arm member 310A, and / or the second arm member 310B engage the top surface of the cover 210L, such as by bolts.

[0060] The example cover movement system 300 also includes a motor 350 for moving the travel member 330. The motor 350 can move a shaft 352 or other support member that engages the travel member 330. Movement of the travel member 330 causes the cover mounting arm 310 to move relative to the first side wall 304A and the second side wall 304B (or the "tower" structure), which will be discussed in more detail below.

[0061] The lid movement system 300 of this example also includes a stop mechanism 360 to maintain the lid 210L in the open position. The stop mechanism 360 of this illustrated example includes a rod 362 that is configured to: (i) extend through an opening 302O (e.g., a through hole) defined through the base member 302, and (ii) removably extend into (or through) a recess 330R (or opening) of the travel member 330. When the travel member 330 is in the lid open position, the stop mechanism 360 extends from a surface 332 of the travel member 330 that faces the base member 302 into the opening 330R, as shown in FIG. Figure 3C and 3D As shown in (and discussed in more detail below). Figure 3D As shown, the stop mechanism 360 extends to contact the base member 302 and the travel member 330 and prevents the travel member 330 from moving up and down relative to the base member 302 .

[0062] like Figure 3BAs shown schematically, a lid movement system 300 according to at least some examples of the present technology may include one or more heating elements 370. The heating element 370 (when present) may be used to heat the joint between the lid 210L and the lid mount disposed on the body 210A of the substrate handling chamber 210. The heating element 370 may heat the lid 210L and the body 210A to help break the seal between these components when the lid 210L is lifted (as described in more detail below). The heating element 370 may be provided: (i) as part of the lid movement system 300 (e.g., on one or more of the lid mounting arm 310, the first arm member 310A, the second arm member 310B, the base member 318P, the first side wall 304A, the second side wall 304B, the base member 302, or the base "tower"); (ii) as part of the lid 210L (e.g., on or at the periphery of the lid 210L); and / or (iii) on the body 210A of the substrate handling chamber 210. The location of an example heating element 370 is schematically shown at Figure 3A and 3B middle.

[0063] Now we will refer to Figures 4A to 4F (2) The operation of the cover moving system 300 to move the cover 210L is described in more detail. Figures 4A to 4C (2) Features of an initial cover lifting phase of the cover moving operation are shown, wherein the cover moving system 300 initially lifts the cover 210L upward (at least at one outer edge position) until any residual seal between the cover 210L and the body 210A is released. Figures 4D to 4F (2) Features of the lid rotation phase of the lid movement operation are shown, wherein the lid movement system 300 pivots the lid 210L about the first pivot connection system 320 and the second pivot connection system 340 upward and away from the main body 210A. Fig. 4B(1) , 4C(1) , 4E(1) and 4F(1) show only illustrations of the cam surfaces 306A, 306B; the shafts 320A, 320B engaging the cam surfaces 306A, 306B; the tracking grooves 304C, 304D; and the tracking element 334 engaging the tracking grooves 304C, 304D. Fig. 4B(2) , 4C(2) 4E(2) and 4F(2) respectively show the cover moving system 300, its movement and the cover 210L in Fig. 4B(1) , 4C(1) , 4E(1) and 4F(1) for a more complete view of the movement at the pivot position shown.

[0064] First, if Figure 2 , 3A, 4A and 4D, the cover movement system 300 is engaged with the cover 210L, for example, by bolting (or otherwise connecting) the cover 210L to the cover mounting arm 310 of the cover movement system 300 (for example, at the base member 318P and / or the arm members 310A, 310B). This engagement step can be completed during the initial manufacturing of the substrate handling chamber 210, or in some examples, the cover movement system 300 can be engaged with the substrate handling chamber 210 and / or the cover 210L as an "after-sales" product or option. The cover movement system 300 can have the structure described above, for example, including:

[0065] a) a base member 302 having a major surface 302S facing away from the main body 210A of the substrate handling chamber 210 (e.g., the lid movement system 300 may have a "tower" structure of the type described above (including at least the base member 302, the first side wall 304A and the second side wall 304B));

[0066] b) a cover mounting arm 310 (e.g., including a first arm member 310A and a second arm member 310B) extending in a direction away from the base member 302 - the cover mounting arm 310 (and its arm members 310A, 310B) can be engaged with the cover 210L at a first outer edge location 310P of the cover 210L, such as via a base member 318P;

[0067] c) a traveling member 330 including a recess 330R or an opening on a surface 332 facing the base member 302;

[0068] d) a pivot connection system 340 that pivotally engages the travel member 330 with the lid mounting arm 310; and

[0069] e) A motor 350 operably coupled for moving the travel member 330 .

[0070] The cover mounting arm 310 may also be connected to the side walls 304A and 304B extending from the base member 302 and away from the major surface 302S thereof via a first pivot connection system 320. As will be described in more detail below, movement of the travel member 330 relative to the base member 302 results in movement of the cover mounting arm 310 and the cover 210L.

[0071] At the beginning of the cover moving operation, the cover 210L may be sealed to the main body 210A of the substrate handling chamber 210, such as Figure 4A The substrate handling chamber 210 may be in a vacuum or low pressure condition and / or other atmospheric conditions different from the external atmospheric conditions. Figure 4AIn the sealing position shown: (i) the shafts 320A, 320B at the first end 316 of the mounting arm 310 are located at the bottom of the vertical cam segments 306V of the cam surfaces 306A, 306B, respectively; and (ii) the tracking element 334 of the travel member 330 is positioned toward the bottom of the tracking grooves 304C, 304D. Fig. 4B(1) and 4B(2) .

[0072] As an initial step, if present (and desired), any fastening elements (e.g., attachment fixtures 214) securing the cover 210L to the body 210A of the substrate handling chamber 210 will be disengaged (such that the cover 210L is no longer fastened to the body 210A). This step may result in an initial "exhaust" of the interior chamber 210C (e.g., causing the pressure within the interior chamber 210C to be equal to (or substantially equal to) the external ambient pressure conditions). Additionally or alternatively, if desired, a separate "exhaust" step may be performed (e.g., prior to removing the attachment fixtures 214) to cause the pressure within the interior chamber 210C to be equal to (or substantially equal to) the external ambient pressure conditions.

[0073] In some cases, the above-described "exhaust" step alone may not be sufficient to completely unseal the joint between the cover 210L (e.g., its periphery) and the cover engagement structure (e.g., a cover sealing seat) disposed on the body 210A of the substrate handling chamber 210. To this end, the cover movement system 300 and cover movement method according to at least some aspects of the present technology include an initial cover lifting phase in the cover movement operation. In the initial cover lifting phase, the cover movement system 300 initially applies a force to lift the cover 210L upward at least at a first outer edge position 310P (which is a position adjacent to where the cover 210L engages with the cover mounting arm 310). See Figure 4A 210L upwardly in the vertical cam segments 306V of the cam surfaces 306A, 306B. Fig. 4B(1) and 4B(2) and Fig. 4C(1) and 4C(2)(Figure 4C(2) shows a small gap G between the bottom of the cover 210L and the top surface of the body 210A of the substrate handling chamber 210, while Figure 4B(2) shows the abutment relationship between these parts). When the seal is broken and the pressure inside and outside the substrate handling chamber 210 is equal and / or when the stuck parts become unsticky (for example, when the cover 210L is lifted from the seal or from the cover seat provided around the opening 210O), the unsealing action may be accompanied by an audible "pop", "hiss" or other sound. In some cases, residual seal and / or adhesion forces and the force applied to the cover 210L by the motor 350 that lifts the cover mounting arm 310 may be sufficient to cause the cover 210L to deform slightly (e.g., temporarily bend), for example near the first outer edge position 310P and / or near the position where the first arm member 310A, the second arm member 310B and / or the base member 318P are attached to the cover 210L. When such deformation occurs, it may help break the seal and / or adhesive at or near the first outer edge location 310P and help complete the venting and unsealing process.

[0074] Additionally or alternatively, in at least some examples of the present technology, heat (e.g., via heating element 370) may be applied to one or more of: (a) lid 210L (e.g., at least at or near first outer edge position 310P); (b) at least a portion of lid mounting arm 310 (e.g., one or more of first arm member 310A, second arm member 310B, and / or base member 318P); and / or (c) body 210A of substrate handling chamber 210 (e.g., at least at or near first outer edge position 310P) during or prior to an initial "exhaust" action and / or initial lid lift phase. Such heating may be performed prior to and / or concurrently with operating motor 350 to apply a lift force during the initial lid lift phase described above.

[0075] After the initial cover lifting phase is completed, the motor 350 can continue to move the travel member 330 upward to apply a rotational force to pivot the cover 210L upward. Figure 4D This force causes the cover 210L on the cover mounting arm 310 to rotate upward and away from the main body 210A of the substrate handling chamber 210 to a "cover open position" (e.g., as shown in FIG. Figure 3C and 3D ). Fig. 4C(1) and 4C(2) Starting with shafts 320A, 320B and tracking element 334 in the position shown, motor 350 continues to move travel member 330 upward (e.g., by rotating a screw) during this cover rotation phase. This action: (a) moves tracking element 334 upward in tracking grooves 304C, 304D, and (b) moves shafts 320A and 320B upward and in an inclined direction within inclined cam segments 306X of cam surfaces 306A, 306B. Fig. 4C(1) and 4C(2) and Fig. 4E(1) and 4E(2) Due to the pivot connection system 320 and / or 340, this action also begins to rotate the cover mounting arm 310 and the cover 210L connected thereto upward and away from the top surface of the main body 210A of the substrate handling chamber 210.

[0076] Continued operation of motor 350 continues the upward movement of tracking element 334 in tracking slots 304C, 304D and the upward and inclined movement of shafts 320A and 320B within inclined cam segments 306X of cam surfaces 306A, 306B until lid 210L reaches the lid open position. Fig. 4E(1) and 4E(2) and Fig. 4F(1) and 4F(2) for comparison. One or more sensors (e.g., limit switches) may be provided to generate signals (e.g., upper and lower limit switches) when the lid 210L has reached the lid open position and / or the lid closed position. Signals from these sensors may allow an automatic control system to automatically stop operation of the motor 350 when the upper limit of rotation has been reached (opening the lid 210L) and / or the lower limit of rotation has been reached (closing the lid). The sensors may sense one or more of: the position of the travel member 330; the position of the tracking element 334; the position of the lid 210L; the position of the lid mounting arm 310; the position of the first arm member 310A and / or the second arm member 310B; the position of the shafts 320A, 320B; contact between a portion of the lid 210L and a portion of the body 210A, etc. Such sensors and their use for automatic motor control (e.g., closing) are known and commercially available.

[0077] Figure 3C and 3F A control panel 390 is schematically shown secured to the base member 302, the control panel 390 being operably coupled to the motor 350 and the automated control system and being used to operate the motor 350. In the illustrated arrangement, the control panel 390 is accessible from the rear of the substrate handling chamber 210, optionally from the ground floor (e.g., an operator need not be on the top of the substrate handling chamber 210 and / or on a ladder). The control panel 390 may allow an operator to initiate a "lid open" process (e.g., via a button 390A, see Figure 3F), a "lid closing" process (e.g., via button 390B), an "emergency stop" process (e.g., via button 390C), and / or other desired functions. The automatic control system may include / run software for the operation of the lid movement system 300, such as initiating a lid opening process; initiating a lid closing process; requiring the motor 350 to reverse when either of the upper and lower limit switches is tripped; identifying an overcurrent condition when the motor 350 is actuated when the stop mechanism 360 is in place, etc. The control panel 390 may include physical buttons or switches, soft buttons or switches, a touch screen, and / or any desired type of controller or input device (e.g., a keyboard, a mouse or other pointer device, etc.).

[0078] Once in the cover open position, e.g. Figure 3C , 3D , 4F(1), and 4F(2), a stop mechanism 360 (e.g., a hardened steel rod 362) can be inserted into the recess 330R of the traveling member 330. In at least some examples of the present technology, the stop mechanism 360 can be inserted into the recess 330R from a direction of a surface 332 of the traveling member 330 that faces the base member 302. The stop mechanism 360 can be inserted through an opening 302O (e.g., a through hole) formed in the base member 302 and then into the recess 330R. The illustrated structure and arrangement enables an operator to insert the rod 362 into the opening 302O and / or the recess 330R from a position behind the substrate handling chamber 210 (e.g., the operator does not need to be on the top of the substrate handling chamber 210 and / or on a ladder to insert the stop mechanism 360). The stop mechanism 360 forms a releasable and fixed connection between the travel member 330 and the base member 302 to prevent the travel member 330 from moving vertically, thereby preventing the cover 210L from moving downward from the cover open position. This feature helps ensure that the cover 210L remains in the open position, such as when a technician or other person interacts with equipment within the interior chamber 210C of the substrate handling chamber 210 through its top entrance 210O.

[0079] To close the lid 210L, the above process is reversed. If necessary, the stop mechanism 360 (e.g., rod 362) is removed from the recess 330R of the travel member 330 (and optionally pulled out of the opening 302O of the base member 302). If necessary, the motor 350 can be operated to slightly lift the travel member 330 (to relieve any squeezing or binding forces on the stop mechanism 360 so that it can be more easily removed). The motor 350 is then operated to move the travel member 330 downward. During this stage, operation of the motor 350 causes the tracking element 334 to move downward in the tracking grooves 304C, 304D and causes the shafts 320A and 320B to move downward and in an inclined direction within the inclined cam segments 306X of the cam surfaces 306A, 306B. Fig. 4F(1) and 4F(2)and Fig. 4E(1) and 4E(2) These actions begin to rotate the cover 210L downward on the cover mounting arm 310 in a direction toward the main body 210A.

[0080] Continued operation of the motor 350 to close the cover 210L further moves the tracking element 334 downward in the tracking grooves 304C, 304D and moves the shafts 320A and 320B downward and in an inclined direction within the inclined cam segments 306X of the cam surfaces 306A, 306B until the shafts 320A and 320B reach the ends of the inclined cam segments 306X. Fig. 4E(1) and 4E(2) and Fig. 4C(1) and 4C(2) These actions are accompanied by continued downward rotation of the cover 210L. Then, continued operation of the motor 350 to close the cover 210L further moves the tracking element 334 downward in the tracking grooves 304C, 304D and moves the shafts 320A and 320B downward in the vertical cam segments 306V of the cam surfaces 306A, 306B, for example, until the shafts 320A, 320B reach the bottom of the vertical cam segments 306V. Fig. 4C(1) and 4C(2) and Fig. 4B(1) and 4B(2) This action can trigger the sensor of the lower limit switch to automatically stop the operation of the motor 350. At this point, the cover 210L is properly positioned above the inlet opening 210O of the main body 210A of the substrate handling chamber 210. If necessary, other cover fixing actions can be taken (such as fixing the additional fixing device 214), and the substrate handling chamber 210 can be sealed and prepared for vacuum or other atmospheric environments.

[0081] Although the lid movement system 300 for the substrate handling chamber 210 of the cluster-type substrate processing system 200 is described above, the lid movement system 300 of the type described here can be used with a removable lid provided with other types of housings, such as a substrate processing chamber 280; a chemical reaction vessel; a storage tank; other containers, etc.

[0082] In addition, while the above-described examples utilize a computer-controlled motor 350 to move the travel member 330 up and down relative to the side walls 304A, 304B, in some examples of the present technology, the motor 350 does not require computer control (e.g., it can be manually controlled) or can be replaced by a manually operated crank mechanism (e.g., for rotating a screw drive to move the travel member 330 up and down).

[0083] Some advantageous features or results that can be achieved in at least some examples of the present technology include: (a) providing access to the interior surfaces of the substrate processing module 280 and / or the load lock module 220 from above or from within the substrate handling chamber 210; (b) providing a lid movement system 300 with a small footprint, such as for use in smaller sized chambers or containers; (c) providing an automated system and method to better "vent" or unseal the lid 210L before the lid 210L begins to rotate; (d) limiting the movement of the travel member 330, such as within a predetermined area defined by the side walls 304A and 304B (e.g., within the interior chamber 304V of the "tower" structure); (e) preventing undesired or unplanned movement of the lid 210L from the lid open position; and (f) preventing undesired or unplanned movement of the lid 210L from the lid open position. (f) enabling remote operation of the lid movement system 300, such as from a ground position behind the substrate handling chamber 210; (g) avoiding the need to build a stage and / or other structure above the substrate handling chamber 210 when the lid needs to be removed; (h) maintaining the lid 210L securely attached to the lid movement system 300 in a loaded (lid open) position without completely removing the lid 210L from the area of ​​the substrate handling chamber 210; and / or (i) using an initial lid lifting phase (e.g., for exhaust and / or unsealing) and a subsequent lid pivoting phase, and / or using localized heating before or during the initial lid lifting phase, to reduce the amount of equipment and / or force required to move the lid 210L.

[0084] Although the present disclosure has been provided in the context of certain embodiments and examples, those skilled in the art will understand that the present disclosure extends to other alternative embodiments and / or uses of embodiments beyond the specifically described embodiments and obvious modifications and equivalents thereof. In addition, although various variations of the embodiments of the present disclosure have been shown and described in detail, other modifications within the scope of the present disclosure will be apparent to those skilled in the art based on the present disclosure. It is also contemplated that various combinations or sub-combinations of the specific features and aspects of the embodiments may be made and still fall within the scope of the present disclosure. It should be understood that the various features and aspects of the disclosed embodiments may be combined or replaced with one another in order to form different modes of embodiments of the present disclosure. Therefore, the scope of the present disclosure should not be limited by the specific embodiments described above.

[0085] The headings provided herein, if any, are for convenience only and do not necessarily affect the scope or meaning of the apparatus and methods disclosed herein.

Claims

1. A cover moving system, comprising: a base member having a first side and a second side; a first sidewall extending from a first side of the base member, the first sidewall including a first cam surface defined therein; a second side wall extending from a second side of the base member, the second side wall including a second cam surface defined therein; a cover mounting arm extending in a direction away from the base member; a first pivot connection system engaging the first cam surface and the second cam surface and pivotally engaging the cover mounting arm; a traveling member including a recess or an opening on a surface facing the base member; a second pivot connection system pivotally engaging the travel member with the cover mounting arm; a motor for moving the travel member, wherein movement of the travel member causes movement of the cover mounting arm relative to the first side wall and the second side wall; as well as A stop mechanism is configured to removably extend from a direction facing the surface of the base member into a recess or opening of the traveling member when the traveling member is in the cover open position.

2. The cover moving system according to claim 1, wherein: The base member includes a through hole, and wherein the stop mechanism removably engages with the recess or opening of the travel member through the through hole of the base member when the travel member is in the lid open position. 3 . The cover movement system of claim 1 , further comprising a heating element configured to heat at least a portion of the cover mounting arm.

4. The cover moving system according to claim 1, wherein: Each of the first cam surface and the second cam surface has a vertical cam segment at a first end and an inclined cam segment extending upward and away from the vertical cam segment and away from the base member.

5. The cover moving system according to claim 1, wherein: Each of the first sidewall and the second sidewall includes a tracking slot to define a direction of movement of the traveling member, and wherein the traveling member includes one or more tracking elements extending into the tracking slot.

6. The cover moving system according to claim 1, wherein: The cover mounting arm includes a first end and a cover engaging portion, wherein the first pivot connection system is located at the first end and the second pivot connection system is spaced from the first end toward the cover engaging portion.

7. A housing, comprising: a body member comprising a top, a bottom, and one or more side walls connecting the top and the bottom, wherein the top comprises an opening providing access to an interior chamber defined in part by the body member; a cover sealably attached to the top of the body member to close the interior chamber; and A cover movement system engaged with the body member, wherein the cover movement system comprises: a base member having a first side and a second side, wherein the base member includes a surface facing away from the body member, a first side wall extending from a first side of the base member, the first side wall including a first cam surface defined therein, a second side wall extending from a second side of the base member, the second side wall including a second cam surface defined therein, a cover mounting arm extending in a direction away from the base member, wherein the cover mounting arm engages the cover at a first outer edge location of the cover, a first pivot connection system engaging the first cam surface and the second cam surface and pivotally engaging the cover mounting arm; a traveling member including a recess or an opening on a surface facing the base member; a second pivot connection system pivotally engaging the travel member with the cover mounting arm; a motor for moving the travel member, wherein movement of the travel member causes movement of the cover mounting arm and the cover relative to the body member; and A stop mechanism is configured to extend from a direction facing the surface of the base member into the recess or opening of the traveling member when the traveling member is in the cover open position.

8. The housing according to claim 7, wherein: The base member includes a through hole, and wherein the stop mechanism removably engages with the recess or opening of the travel member through the through hole of the base member when the travel member is in the lid open position.

9. The housing of claim 7, further comprising a control system for controlling the motor, wherein: When the lid is in the lid open position, the control system generates a signal to stop operation of the motor.

10. The housing of claim 7, further comprising a heating element configured to heat at least one of (i) the cover at least at the first outer edge location or (ii) at least a portion of the cover mounting arm.

11. The housing according to claim 7, wherein: Each of the first cam surface and the second cam surface has a vertical cam segment at a first end and an inclined cam segment extending upward and away from the vertical cam segment and away from the base member.

12. The housing according to claim 7, wherein: Each of the first cam surface and the second cam surface is configured such that during a cover opening event: (i) the cover movement system initially lifts the cover upward at the first outer edge position until the seal between the cover and the main body member is released, and then (ii) the cover pivots upward away from the main body member about the first pivot connection system and the second pivot connection system.

13. The housing according to claim 7, wherein: Each of the first sidewall and the second sidewall includes a tracking slot to define a direction of movement of the traveling member, and wherein the traveling member includes one or more tracking elements extending into the tracking slot.

14. The housing according to claim 7, wherein: The cover mounting arm includes a first end and a cover engaging portion, wherein the first pivot connection system is located at the first end and the second pivot connection system is spaced from the first end toward the cover engaging portion.

15. The housing according to claim 7, wherein: The main body structure includes a substrate handling chamber for moving a substrate from the internal chamber to one or more substrate processing chambers.

16. A method of moving a cover relative to a body member of a housing, the method comprising: Engaging a cover movement system with the cover, wherein the cover movement system comprises: a base member having a surface facing in a direction away from the body member, a cover mounting arm extending in a direction away from the base member, wherein the engagement includes engaging the cover mounting arm with the cover at a first outer edge location of the cover, a traveling member including a recess or an opening on a surface facing the base member, a pivot connection system pivotally engaging the travel member with the cover mounting arm, and a motor for moving the travel member, wherein movement of the travel member causes movement of the cover mounting arm and the cover; operating the motor to initially apply a lifting force to the cover at a first outer edge location; After applying the lifting force, operating the motor to apply a rotational force to rotate the cover upward on the cover mounting arm in a direction away from the main body member to a cover open position; and The stop mechanism is inserted into the recess or opening of the travel member from a direction facing the surface of the base member to prevent the cover from moving from the cover open position.

17. The method according to claim 16, wherein: The inserting includes inserting the stop mechanism through a through-hole opening provided in the base member and into a recess or opening of the traveling member.

18. The method according to claim 16, wherein: The lifting force breaks the sealing engagement between the cover and body member at the first outer edge location.

19. The method according to claim 18, wherein: Applying the lifting force to break the sealing engagement includes deforming the shape of the cover at the first outer edge location.

20. The method of claim 16, further comprising heating at least one of (i) the cover at least at the first outer edge location or (ii) at least a portion of the cover mounting arm prior to operating the motor to apply the lifting force.

21. The method according to claim 16, wherein: The main body structure includes a substrate handling chamber for moving a substrate from the main body structure to one or more substrate processing chambers.

22. The method according to claim 16, wherein: In case the lid is initially in the lid open position, the method further comprises: removing the stop mechanism from the recess or opening of the travel member; and The motor is operated to initially rotate the cover downwardly on the cover mounting arm in a direction toward the body member and then move the cover downwardly to the body member.

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