Chip carrier tape detector

Abstract

The invention discloses a chip carrier tape detection machine, which relates to the technical field of chip carrier tape detection and comprises a detection table board, a first clamping piece and a second clamping piece which are arranged on the two sides of the detection table board and used for clamping a tape reel for winding a chip carrier tape. The detection table is provided with a detector for detecting the alignment of the mirror surface and the chip in the groove of the chip carrier tape, and one side of the detector is provided with a calibration mechanism; the calibration mechanism comprises a positioning shaft tube and a calibration ring body capable of rotating around the axis of the positioning shaft tube, a plurality of positioning blocks are arranged on the outer surface of the calibration ring body in an annular array mode, the distance between every two adjacent positioning blocks is matched with the distance between every two adjacent grooves, and when the expansion pieces are filled into the grooves of the chip carrier tape after being expanded, the calibration ring body can rotate around the axis of the positioning shaft tube. The chip carrier tape positioning device is used for limiting and calibrating a chip carrier tape groove and positioning a chip carrier tape, so that a detector can perform accurate detection, and when the chip carrier tape moves each time, the positioning block positions the chip carrier tape, so that real-time calibration is realized while detection is performed.

Description

Technical Field

[0001] The present invention relates to the technical field of chip carrier detection, and in particular to a chip carrier detection machine. Background Art

[0002] During chip carrier tape testing, two reels unwind and reel the chip carrier tape at the same time. The chip carrier tape passes through the detection station of the detector and is wound up at both ends by reels respectively. During each winding, the chip at the groove of the chip carrier tape needs to pass through the detection station and ensure that the chip at the groove is aligned with the detection station so that the detector can perform detection.

[0003] Before testing the chip carrier, the instrument needs to be calibrated to ensure the detection accuracy. Due to long-term or frequent use of the test instrument, the accuracy may decrease, the winding at both ends may be out of sync, and during the winding process of the chip carrier, the chip in the groove cannot be well aligned with the detection station, thus affecting the test results. Summary of the invention

[0004] The object of the present invention is to provide a chip carrier inspection machine, which has the function of filling the expansion piece into the chip carrier groove after expansion, so as to perform limit calibration on the chip carrier groove and position the chip carrier so that the detector can accurately detect. Each time the chip carrier moves, the positioning block positions the chip carrier, thereby achieving the advantage of real-time calibration while detecting.

[0005] To achieve the above-mentioned object, the present invention provides the following technical solutions: a chip carrier inspection machine, comprising an inspection table, a first clamping member and a second clamping member for clamping a tape reel on which a chip carrier tape is wound are arranged on both sides of the inspection table, a detector for detecting alignment between a detection mirror and a chip in a groove of the chip carrier tape is arranged on the inspection table, and a calibration mechanism is arranged on one side of the detector;

[0006] The calibration mechanism comprises a positioning shaft tube, a calibration ring body that can rotate around the axis of the positioning shaft tube, a plurality of positioning blocks arranged in an annular array on the outer surface of the calibration ring body, the distance between two adjacent positioning blocks matches the distance between two adjacent grooves, and the plurality of positioning blocks are sequentially plugged into the corresponding grooves on the chip carrier during the rotation process;

[0007] The outer wall of the positioning block is covered with an expansion piece, and the expansion piece can expand adaptively according to the size of the groove after being inserted into the groove.

[0008] Furthermore, a suction pipe is sleeved inside the positioning shaft tube, an annular cavity is formed between the positioning shaft tube and the suction pipe, and both ends of the annular cavity are sealed, and one end of the suction pipe and the annular cavity are connected to an air pump.

[0009] Furthermore, an interconnected suction pipe is extended below the suction pipe, and the calibration ring is covered on the surface of the positioning shaft tube and is sealed and fitted with the outer wall of the positioning shaft tube.

[0010] Furthermore, an adsorption hole is vertically penetrated in the middle of each positioning block, and a plurality of slots corresponding to the adsorption holes are formed on the calibration ring body. When the calibration ring body rotates one circle, a plurality of slots coincide with the air inlet of the air intake pipe in turn. When the slot is misaligned with the air inlet of the air intake pipe, the inner wall of the calibration ring body is used to seal the air inlet of the air intake pipe.

[0011] Furthermore, each of the positioning blocks is provided with three holes that communicate with the interior of the expansion piece, and the three holes all penetrate the calibration ring body, namely the first hole, the second hole and the third hole. The positioning shaft tube is provided with two gas injection ports that communicate with the annular cavity. During the rotation of the calibration ring body, the first hole and the third hole coincide with the two gas injection ports in turn.

[0012] Furthermore, during the rotation of the calibration ring, the second hole grooves overlap with the air intake port of the air intake pipe in sequence.

[0013] Furthermore, a mounting cover is arranged at a side end of the detector, the calibration mechanism is arranged in the mounting cover, and a driver for driving the calibration ring to rotate is arranged in the mounting cover.

[0014] Furthermore, the adsorption hole is trumpet-shaped, and the lower opening is larger than the upper opening.

[0015] Furthermore, a display screen for displaying the detection screen of the detector is arranged on the detection table.

[0016] Furthermore, a control panel for detection control is provided on one side of the detection table.

[0017] Technical effects and advantages of the present invention:

[0018] 1. After the expansion piece of the present invention is inserted into the groove, it can expand adaptively according to the size of the groove. The driver drives the calibration ring to rotate. When the calibration ring rotates, the positioning blocks on its surface are inserted into the corresponding chip carrier grooves in sequence. When the expansion piece is expanded, it is filled into the chip carrier groove to perform limit calibration on the chip carrier groove and position the chip carrier so that the detector can accurately detect. Every time the chip carrier moves, the positioning block positions the chip carrier to achieve real-time calibration while detecting. By rotating the holes and slots for alignment, the driving energy is reduced, and accurate calibration is achieved while increasing practicality and convenience.

[0019] 2. The suction of the suction pipe and the injection of the annular cavity of the present invention can be achieved by connecting to an air pump, or by connecting to an air pump separately. By rotating the holes and slots to align them, the driving energy can be reduced, and precise calibration can be achieved while increasing practicality and convenience.

[0020] 3. The present invention provides an adsorption hole on the positioning block. When the positioning block is inserted into the groove for limit calibration, the adsorption hole coincides with the air inlet of the air suction pipe, and suction is performed in the groove to effectively clean up dust and impurities, thereby ensuring the accuracy of subsequent detection. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0022] Figure 2 It is a schematic diagram of the structure of the detection table of the present invention;

[0023] Figure 3 It is a schematic diagram of the calibration mechanism and chip carrier structure of the present invention;

[0024] Figure 4 For the present invention Figure 3 A magnified image of point A;

[0025] Figure 5 A half-section diagram of the calibration mechanism structure of the present invention;

[0026] Figure 6 For the present invention Figure 5 A magnified view of point B;

[0027] Figure 7 For the present invention Figure 5 Enlarged view of point C;

[0028] Figure 8 It is a cross-sectional view of the adsorption pore structure of the present invention.

[0029] In the figure:

[0030] 1. Detection table; 11. First clamping member; 12. Second clamping member; 13. Display screen; 14. Control panel; 2. Detector; 21. Mounting cover; 3. Calibration mechanism; 31. Positioning shaft tube; 311. Suction pipe; 3111. Suction pipe; 312. Gas injection port; 32. Calibration ring; 33. Positioning block; 331. Adsorption hole; 332. First hole slot; 333. Second hole slot; 334. Third hole slot; 34. Expansion member. DETAILED DESCRIPTION

[0031] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0032] Example 1: Reference Figure 1 - Figure 4 , which is the first embodiment of the present invention, provides a chip carrier inspection machine, including an inspection table 1, on both sides of the inspection table 1 are arranged a first clamping member 11 and a second clamping member 12 for clamping the tape reel on which the chip carrier is wound, the first clamping member 11 and the second clamping member 12 respectively clamp a tape reel, and the two tape reels are used to inspect and wind a roll of chip carrier. It should be noted that the first clamping member 11 and the second clamping member 12 are connected to the support plate of the inspection table 1. Tension adjusting members are provided on the support plate, and the chip carrier passes through the tension adjusting members for inspection and winding. During the winding process, the two tension adjusting members always adjust the tightness of the two ends of the chip carrier to adjust its tension to ensure that the chip carrier will not be in an overly loose state during the unwinding and winding process, thereby improving the winding efficiency.

[0033] The detection table 1 is provided with a detector 2 for detecting the alignment between the detection mirror and the chip in the chip carrier groove. It should be noted that the detector 2 is detected by a microscope, and the defect detection methods of the microscope mainly include the following:

[0034] Atomic force microscopy (AFM): AFM is a high-resolution microscopy method suitable for defect detection in semiconductor manufacturing. It uses a coordinate map of defect detection to image a small area of ​​the wafer surface to resolve defects. AFM uses a non-contact measurement mode and will not damage the wafer.

[0035] Transmission electron microscopy (TEM): TEM has high resolution and can observe structural defects below the micrometer level in crystal size, such as dislocations and stacking faults.

[0036] Scanning electron microscope (SEM): SEM can also directly observe various types of crystal defects with high resolution. It is only applicable to fine samples. The observation process will damage the complete macroscopic crystals, and it can only observe the surface or very thin areas.

[0037] Ultrasonic scanning microscope: This method uses a water-immersion ultrasonic scanning microscope to detect tiny defects inside the chip. The high-frequency ultrasonic scanning microscope can achieve clear imaging and strong resolution, and can intuitively detect tiny defects inside the chip. It usually works better for ultrasonic scanning microscopes with frequencies of 75MHz and above.

[0038] Optical graphic defect detection: This method uses the scattering characteristics of light for defect detection, which is divided into bright field scattering and dark field scattering. Bright field detection depends on the configuration conditions of the lighting and imaging system, while dark field detection directly detects scattered light.

[0039] A labeling device is provided on one side of the display detector 2. The display detector 2 detects the chips in the chip carrier. When the chip is unqualified, the labeling device labels the unqualified material, thereby realizing automatic defective chip marking. Through automatic defect marking, the steps of manual inspection and marking are reduced, the labor cost is reduced, and the labor intensity is also reduced.

[0040] A display screen 13 for displaying the detection image of the detector 2 is provided on the detection table 1. The height of the detector 2 can be adjusted up and down according to the detection needs, and the detected image is transmitted to the display screen 13 for viewing. A control panel 14 for detection control is provided on one side of the detection table 1, and a calibration mechanism 3 is provided on one side of the detector 2;

[0041] The calibration mechanism 3 includes a positioning shaft tube 31, a calibration ring body 32 that can rotate around the axis of the positioning shaft tube 31, a mounting cover 21 is provided at the side end of the detector 2, the calibration mechanism 3 is arranged in the mounting cover 21, a driver for driving the calibration ring body 32 to rotate is arranged in the mounting cover 21, a plurality of positioning blocks 33 are arranged in an annular array on the outer surface of the calibration ring body 32, the distance between two adjacent positioning blocks 33 matches the distance between two adjacent grooves, and the plurality of positioning blocks 33 are sequentially plugged into the grooves on the chip carrier in the rotation process;

[0042] The outer wall of the positioning block 33 is covered with an expansion piece 34. The expansion piece 34 is a structure that can adaptively expand or contract. It can be an airbag structure or a leather ring structure, etc. The expansion piece 34 is connected to the air pump structure for automatic air injection and exhaust. After being inserted into the groove, the expansion piece 34 can adaptively expand according to the size of the groove. The driver drives the calibration ring body 32 to rotate. When the calibration ring body 32 rotates, the positioning block 33 on its surface is inserted into the corresponding chip carrier groove in sequence. When the expansion piece 34 expands, it is filled into the chip carrier groove for limit calibration of the chip carrier groove and positioning of the chip carrier, so that the detector 2 can accurately detect. Every time the chip carrier moves, the positioning block 33 positions the chip carrier to achieve real-time calibration while detecting.

[0043] Example 2: Reference Figure 5 - Figure 7, which is the second embodiment of the present invention. This embodiment is different from the first embodiment in that a suction pipe 311 is sleeved inside the positioning shaft tube 31, an annular cavity is formed between the positioning shaft tube 31 and the suction pipe 311, and both ends of the annular cavity are in a sealed state. One end of the suction pipe 311 and the annular cavity are both connected to an air pump, and an interconnected suction pipe 3111 is extended below the suction pipe 311. The calibration ring body 32 is sleeved on the surface of the positioning shaft tube 31 and is sealed and fitted with the outer wall of the positioning shaft tube 31. Each The positioning block 33 is provided with three holes and grooves which are interconnected with the inside of the expansion member 34, and the three holes and grooves all penetrate the calibration ring body 32, namely the first hole groove 332, the second hole groove 333 and the third hole groove 334. The positioning shaft tube 31 is provided with two gas injection ports 312 which are interconnected with the annular cavity. During the rotation of the calibration ring body 32, the first hole groove 332 and the third hole groove 334 overlap with the two gas injection ports 312 in sequence, respectively, and during the rotation of the calibration ring body 32, the second hole groove 333 overlaps with the suction port 312 in sequence. The air inlet of the air pipe 3111 coincides with the air inlet. When the positioning block 33 and the expansion member 34 are rotated to be inserted into the groove, the first hole groove 332 and the third hole groove 334 coincide with the air injection port 312. Gas is introduced through the annular cavity to inject gas into the expansion member 34 to achieve expansion. When the first hole groove 332 and the third hole groove 334 are rotated to be staggered with the air injection port 312, and the positioning block 33 and the expansion member 34 are slightly rotated from the groove, the second hole groove 333 coincides with the air inlet of the air pipe 3111. The suction pipe 311 sucks air into the expansion member 34, causing the expansion member 34 to fully retract. At this time, the positioning block 33 and the expansion member 34 rotate out of the groove, allowing the next group of positioning blocks 33 and expansion members 34 to reciprocate with the adjacent grooves. It should be noted that the suction of the suction pipe 311 and the injection of air into the annular cavity can be achieved by connecting to an air pump, or by connecting to an air pump separately. By rotating the holes and slots to align them, the driving energy can be reduced, precise calibration can be achieved, and practical convenience can be increased.

[0044] Example 3: Reference Figure 8 , which is the third embodiment of the present invention. This embodiment is different from the second embodiment. During the implementation of the first embodiment, it was found that when the groove on the chip carrier is sent to the bottom of the detector 2, there will be some dust and impurities in the groove, resulting in the dust adhering to the chip when the detector 2 detects again. It is easy to affect the detection clarity, resulting in insufficient detection accuracy.

[0045] In order to solve the above problem, this embodiment provides an adsorption hole 331 on the positioning block 33. When the positioning block 33 is inserted into the groove for limit calibration, it should be noted that a small hole for ventilation is provided in the groove. The adsorption hole 331 coincides with the air inlet of the air intake pipe 3111, and suction is performed in the groove to effectively clean up dust and impurities, thereby ensuring the accuracy of subsequent detection.

[0046] An adsorption hole 331 is provided in the middle of the positioning block 33 in the vertical direction, and a plurality of notches corresponding to the adsorption holes 331 are provided on the calibration ring body 32. When the calibration ring body 32 rotates one circle, a plurality of notches coincide with the air inlet of the air intake pipe 3111 in sequence. When the notch is misaligned with the air inlet of the air intake pipe 3111, the inner wall of the calibration ring body 32 is used to block the air inlet of the air intake pipe 3111. The adsorption hole 331 is trumpet-shaped, and the lower end opening is larger than the upper end opening. The trumpet-shaped adsorption hole 331 increases the adsorption surface at the bottom and improves the adsorption effect.

[0047] Specifically, when the calibration ring body 32 rotates, the positioning blocks 33 on its surface are inserted into the corresponding chip carrier grooves in turn. When the expansion piece 34 expands, it is filled into the chip carrier groove. While the positioning block 33 is inserted into the groove for limit calibration, the adsorption hole 331 coincides with the air intake port of the air intake pipe 3111, and suction is performed on the inside of the groove to remove the internal dust.

[0048] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, it is still possible for those skilled in the art to modify the technical solutions described in the aforementioned embodiments or to make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A chip carrier tape inspection machine, comprising an inspection table (1), wherein a first clamping member (11) and a second clamping member (12) for clamping a tape reel on which a chip carrier tape is wound are arranged on both sides of the inspection table (1), characterized in that: The detection table (1) is provided with a detector (2) for detecting the alignment between the detection mirror and the chip in the chip carrier groove, and a calibration mechanism (3) is provided on one side of the detector (2); The calibration mechanism (3) comprises a positioning shaft tube (31), a calibration ring body (32) capable of rotating around the axis of the positioning shaft tube (31), a plurality of positioning blocks (33) arranged in an annular array on the outer surface of the calibration ring body (32), the distance between two adjacent positioning blocks (33) matching the distance between two adjacent grooves, and the plurality of positioning blocks (33) correspondingly engaging with the grooves on the chip carrier in sequence during the rotation process; The outer wall of the positioning block (33) is covered with an expansion piece (34), and after being inserted into the groove, the expansion piece (34) can expand adaptively according to the size of the groove.

2. A chip carrier inspection machine according to claim 1, characterized in that: The positioning shaft tube (31) is sleeved with a suction pipe (311) inside, an annular cavity is formed between the positioning shaft tube (31) and the suction pipe (311), and both ends of the annular cavity are in a sealed state, and one end of the suction pipe (311) and the annular cavity are both connected to an air pump.

3. A chip carrier inspection machine according to claim 2, characterized in that: An intercommunication air suction pipe (3111) is extended below the suction pipe (311), and the calibration ring body (32) is sleeved on the surface of the positioning shaft tube (31) and is sealed and fitted with the outer wall of the positioning shaft tube (31).

4. A chip carrier inspection machine according to claim 3, characterized in that: Each positioning block (33) is provided with an adsorption hole (331) extending vertically through the middle thereof, and the calibration ring body (32) is provided with a plurality of notches corresponding to and communicating with the adsorption holes (331). When the calibration ring body (32) rotates one circle, the plurality of notches coincide with the air inlet of the air intake pipe (3111) in sequence. When the notch and the air inlet of the air intake pipe (3111) are misaligned, the inner wall of the calibration ring body (32) is used to block the air inlet of the air intake pipe (3111).

5. The chip carrier inspection machine according to claim 4, characterized in that: Each of the positioning blocks (33) is provided with three holes and grooves that communicate with the inside of the expansion piece (34), and the three holes and grooves all penetrate the calibration ring body (32), namely the first hole and groove (332), the second hole and groove (333) and the third hole and groove (334). The positioning shaft tube (31) is provided with two gas injection ports (312) that communicate with the annular cavity. During the rotation of the calibration ring body (32), the first hole and groove (332) and the third hole and groove (334) respectively overlap with the two gas injection ports (312) in sequence.

6. The chip carrier inspection machine according to claim 5, characterized in that: During the rotation of the calibration ring body (32), the second hole groove (333) sequentially overlaps with the air intake port of the air intake pipe (3111).

7. The chip carrier inspection machine according to claim 6, characterized in that: A mounting cover (21) is arranged at the side end of the detector (2), the calibration mechanism (3) is arranged inside the mounting cover (21), and a driver for driving the calibration ring (32) to rotate is arranged inside the mounting cover (21).

8. The chip carrier inspection machine according to claim 7, characterized in that: The adsorption hole (331) is trumpet-shaped, and the lower opening is larger than the upper opening.

9. The chip carrier inspection machine according to claim 8, characterized in that: The detection table (1) is provided with a display screen (13) for displaying the detection screen of the detector (2).

10. The chip carrier inspection machine according to claim 9, characterized in that: A control panel (14) for detection control is arranged on one side of the detection table (1).

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