Drive device of wafer mounting mechanism

Abstract

The present invention provides a driving device for a wafer mounting mechanism, comprising: a rotating base, which is rotatably connected to a base; a rotating base, which is rotatably connected to a fixed base; two supports are provided at the lower end of the base, and the rotating base is located between the two supports; the two supports are respectively connected with semicircular upper and lower rotating rings that can move up and down, and the two semicircular upper and lower rotating rings respectively surround the left and right sides of the rotating base, and each of the semicircular upper and lower rotating rings has a semicircular slide; the two swing arms are driven to rotate by the rotating base, and the two swing arms can move up and down relative to the rotating base, so that one swing arm can grab the wafer, and the other swing arm simultaneously installs the wafer on it onto the graphite disk, thereby improving the efficiency of picking up the wafer by the swing arm.

Description

[0001] This application is a divisional application with application number 2019103751946, application date May 7, 2019, and invention name “Wafer mounting mechanism”. Technical Field

[0002] The invention relates to a driving device of a wafer mounting mechanism. Background Art

[0003] Wafers are generally stored on a wafer expansion ring. There are two methods to pick up the wafers on the wafer expansion ring and place them on a graphite plate. The first method is to manually use a suction cup, but this method is not efficient and is not suitable for high-speed production. The second method is to automatically grab the wafers through a swing arm. The swing arm rotates to pick up the wafers on the wafer expansion ring and place them on the graphite plate. However, this picking method can only grab first and then place them. Only one wafer can be installed in one process, and the efficiency cannot be substantially improved. Summary of the Invention

[0004] The object of the present invention is to provide a wafer mounting mechanism to solve the problem of low efficiency when picking up wafers by a swing arm.

[0005] The above-mentioned purpose of the present invention can be achieved by adopting the following technical solutions:

[0006] The present invention provides a wafer mounting mechanism, comprising:

[0007] A rotating seat, the rotating seat being rotatably connected to a fixed base;

[0008] Two swing arms, the two swing arms are symmetrically arranged on the left and right sides of the rotating base, and the two swing arms are located on the same horizontal straight line, and the rotating base can drive the two swing arms to rotate;

[0009] The two swing arms are connected to the rotating base so as to be able to slide up and down respectively, and the free ends of the two swing arms are provided with clamping openings for grabbing wafers.

[0010] Furthermore, the two swing arms are respectively connected to two connecting seats, and the two side surfaces of the rotating seat are connected to a pair of first guide rails arranged along the vertical direction. Each of the first guide rails is slidably connected to a first slider, and the first slider is connected to the corresponding connecting seat.

[0011] Furthermore, two supports are provided at the lower end of the base, and the rotating seat is located between the two supports;

[0012] The two supports are respectively connected with semicircular upper and lower rotating rings that can move up and down, and the two semicircular upper and lower rotating rings respectively surround the left and right sides of the rotating seat, and each semicircular upper and lower rotating ring has a semicircular slideway;

[0013] The two connecting seats are both connected with support blocks, the two support blocks are both rotatably connected with rollers, and the two rollers roll in the corresponding semicircular slideways respectively.

[0014] Furthermore, a linear motor is provided on each of the two supports, wherein the fixed end of the linear motor is connected to the support, and the moving end of the linear motor is connected to the semicircular upper and lower rotating rings via a slide.

[0015] Furthermore, the support is connected to two second guide rails arranged in a vertical direction, and the linear motor is located between the two second guide rails;

[0016] Each of the second guide rails is slidably connected to a second slider, and each of the second sliders is connected to the corresponding slide seat.

[0017] Furthermore, two semicircular wear-resistant plates are provided in the semicircular slideway, the two semicircular wear-resistant plates are arranged up and down to form the semicircular slideway, and the roller is arranged to roll between the two semicircular wear-resistant plates.

[0018] Furthermore, the two semicircular upper and lower rotating rings are arranged at intervals along the vertical direction.

[0019] Furthermore, lens barrels are connected to both sides of the base, and a ring light is connected to the lower end of the lens barrel.

[0020] Furthermore, a driving motor is installed on the base, the rotating shaft of the driving motor is arranged vertically downward, and the rotating seat is fixedly arranged on the rotating shaft of the driving motor.

[0021] The characteristics and advantages of the wafer mounting mechanism of the present invention are: the two swing arms are driven to rotate by the rotating base, and the two swing arms can move up and down relative to the rotating base, so that one swing arm can grab the wafer and the other swing arm can simultaneously mount the wafer on it onto the graphite disk, thereby improving the efficiency of picking up wafers by the swing arms. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0023] Figure 1 is a schematic diagram of a wafer mounting mechanism of the present invention;

[0024] Figure 2is a schematic diagram of a wafer mounting mechanism of the present invention;

[0025] Figure 3 A schematic diagram of a connecting seat and semicircular upper and lower rotating rings in the wafer mounting mechanism of the present invention;

[0026] Figure 4 A schematic diagram of the semicircular upper and lower rotating rings in the wafer mounting mechanism of the present invention;

[0027] Figure 5 is a schematic diagram of a support block in the wafer mounting mechanism of the present invention;

[0028] Description of Figure Numbers:

[0029] 1. Rotating seat; 11. First guide rail; 2. Base; 21. Support; 211. Linear motor; 212. Second guide rail; 213. Inductive limiter; 214. Reading head; 3. Swing arm; 31. Clamp; 4. Connecting seat; 41. First slider; 42. Support block; 421. Roller; 5. Semicircular upper and lower swivels; 51. Semicircular slide; 52. Slide; 521. Second slider; 522. Limiting photoelectric piece; 53. Semicircular wear-resistant plate; 6. Lens barrel; 61. Ring light; 7. Drive motor. DETAILED DESCRIPTION

[0030] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0031] Embodiment 1;

[0032] like Figures 1 to 5 As shown, the present invention provides a wafer mounting mechanism, including: a rotating base 1, which is rotatably connected to a fixed base 2; two swing arms 3, which are symmetrically arranged on the left and right sides of the rotating base 1, and the two swing arms 3 are located on the same horizontal straight line, and the rotating base 1 can drive the two swing arms 3 to rotate; and the two swing arms 3 can be connected to the rotating base 1 so as to slide up and down respectively, and the free ends of the two swing arms 3 have clamps 31 for grabbing wafers.

[0033] In the present invention, the two swing arms 3 are respectively connected to the two connecting seats 4. The two side surfaces of the rotating seat 1 are connected to a pair of first guide rails 11 arranged in the vertical direction. Each first guide rail 11 is slidably connected to a first slider 41, and the first slider 41 is connected to the corresponding connecting seat 4. Furthermore, the lower end of the base 2 is provided with two supports 21, and the rotating seat 1 is located between the two supports 21; the two supports 21 are respectively connected to semicircular upper and lower rotating rings 5 that can move up and down, and the two semicircular upper and lower rotating rings 5 respectively surround the left and right sides of the rotating seat 1. The two semicircular upper and lower rotating rings 5 are spaced apart in the vertical direction, and each semicircular upper and lower rotating ring 5 has a semicircular slide 51; the two connecting seats 4 are connected to support blocks 42, and the two support blocks 42 are rotatably connected to rollers 421, and the two rollers 421 roll in the corresponding semicircular slides 51.

[0034] In the present invention, a linear motor 211 is provided on each of the two supports 21. The fixed end of the linear motor 211 is connected to the support 21, and the moving end of the linear motor 211 is connected to the semicircular upper and lower rotating rings 5 via a slide 52. Two second guide rails 212 arranged in the vertical direction are connected to the support 21, and the linear motor 211 is located between the two second guide rails 212. A second slider 521 is slidably connected to each second guide rail 212, and each second slider 521 is connected to the corresponding slide 52. Furthermore, two semicircular wear-resistant plates 53 are provided in the semicircular slide 51. The two semicircular wear-resistant plates 53 are arranged vertically to form the semicircular slide 51, and the roller 421 is rollingly arranged between the two semicircular wear-resistant plates 53.

[0035] In the present invention, lens barrels 6 are connected to both sides of the base 2, and a ring light 61 is connected to the lower end of the lens barrel 6. Furthermore, a drive motor is mounted on the base 2, and the shaft of the drive motor is vertically downward, and the rotating base 1 is fixedly mounted on the shaft of the drive motor.

[0036] Embodiment 2;

[0037] like Figures 1 to 5 As shown, the present invention provides a wafer mounting mechanism, including: a rotating base 1, which is rotatably connected to a base 2; two swing arms 3, which are symmetrically arranged on the left and right sides of the rotating base 1, and the two swing arms 3 are located on the same horizontal straight line, and the rotating base 1 can drive the two swing arms 3 to rotate left and right; and the two swing arms 3 can be connected to the rotating base 1 and can move up and down respectively, and the free ends of the two swing arms 3 have clamps 31 for grabbing wafers.

[0038] The wafer mounting mechanism of the present invention drives the two swing arms 3 to rotate through the rotating base 1, and the two swing arms 3 can move up and down relative to the rotating base 1, so that one swing arm 3 can grab the wafer, and the other swing arm 3 can simultaneously mount the wafer on it onto the graphite disk, thereby improving the efficiency of picking up the wafer by the swing arm 3.

[0039] Specifically, in the present invention, the two swing arms 3 are respectively connected to the two connecting seats 4, and the two side surfaces of the rotating seat 1 are connected to a pair of first guide rails 11 arranged along the vertical direction. The two connecting seats 4 are connected to a pair of first sliders 41 arranged along the vertical direction, and the two first guide rails 11 are located between the two first sliders 41. The two first sliders 41 can be slidably connected to the two corresponding first guide rails 11 respectively.

[0040] In this embodiment, the lower end of the base 2 is connected to two supports 21, and the rotating seat 1 is located between the two supports 21; the two supports 21 are respectively connected to semicircular upper and lower rotating rings 5 that can move up and down, and the two semicircular upper and lower rotating rings 5 respectively surround the left and right sides of the rotating seat 1, and each of the semicircular upper and lower rotating rings 5 has a semicircular slide 51; the two connecting seats 4 are respectively connected to support blocks 42, and the two support blocks 42 are rotatably connected to rollers 421, and the two rollers 421 are respectively rotatably connected in the semicircular slide 51.

[0041] In this embodiment, a linear motor 211 is connected to each of the two supports 21, and the two semicircular upper and lower rotating rings 5 are respectively connected to two slides 52. The two slides 52 can be connected to the two supports 21 by sliding up and down through the two linear motors 211.

[0042] In this embodiment, the support 21 is connected to two second guide rails 212 arranged in the vertical direction, and the linear motor 211 is located between the two second guide rails 212; the slide 52 is connected to two second sliders 521, and the two second sliders 521 are connected to the two second guide rails 212 so as to slide up and down. In this embodiment, two semicircular wear-resistant plates 53 are connected within the semicircular slide 51, and the roller 421 is rotatably connected between the two semicircular wear-resistant plates 53. The two semicircular upper and lower swivels 5 are spaced apart in the vertical direction. When the roller 421 rotates within the semicircular slide 51, the rotating base 1 drives the swing arm 3 to rotate via the connecting base 4, providing a fulcrum to increase the strength of the swing arm 3.

[0043] In the present invention, the slide 52 is connected to a limit photoelectric sheet 522, and the support 21 is connected to a sensor stopper 213. The limit photoelectric sheet 522 can limit the upward and downward movement of the slide 52 through the sensor stopper 213. In the present invention, the support 21 is connected to a reading head 214, and the slide 52 can record the number of movements through the reading head. In the present invention, the base 2 is connected to a lens barrel 6 on both sides, and the lower end of the lens barrel 6 is connected to a ring light 61.

[0044] When picking up wafers via the swing arms 3, the linear motor 211 drives the two swing arms 3 up and down. One swing arm 3 grasps the wafer on the wafer expansion ring through the clamp 31, while the other swing arm 3 simultaneously mounts the wafer on the graphite plate, thereby improving the efficiency of wafer picking by the swing arms 3. After a process is completed, the rotating base 1 drives the swing arms 3 to rotate via the drive motor 7 mounted on the base 2. At this time, the rotating base 1 drives the swing arms 3 to rotate via the connecting base 4, providing a fulcrum to increase the strength of the swing arms 3 and ensure the movement accuracy of the swing arms 3 during rotation.

[0045] The above descriptions are only several embodiments of the present invention. Those skilled in the art may make various changes or modifications to the embodiments of the present invention based on the contents disclosed in the application documents without departing from the spirit and scope of the present invention.

Claims

1. A driving device for a wafer mounting mechanism, characterized in that: include; A rotating seat, the rotating seat being rotatably connected to a fixed base; Two supports are provided at the lower end of the base, and the rotating seat is located between the two supports; The two supports are respectively connected with semicircular upper and lower rotating rings that can move up and down, and the two semicircular upper and lower rotating rings respectively surround the left and right sides of the rotating seat, and each semicircular upper and lower rotating ring has a semicircular slideway; The two connecting seats are both connected with support blocks, the two support blocks are both rotatably connected with rollers, and the two rollers roll in the corresponding semicircular slideways respectively.

2. The driving device of the wafer mounting mechanism according to claim 1, wherein: A linear motor is respectively provided on the two supports, the fixed end of the linear motor is connected to the support, and the moving end of the linear motor is connected to the semicircular upper and lower rotating rings through a slide.

3. The driving device of the wafer mounting mechanism according to claim 2, wherein: The support is connected to two second guide rails arranged in a vertical direction, and the linear motor is located between the two second guide rails; Each of the second guide rails is slidably connected to a second slider, and each of the second sliders is connected to the corresponding slide seat.

Images