Multi-modal physiological signal sensor, preparation method and application

Abstract

The invention discloses a multi-modal physiological signal sensor, a preparation method and application thereof, relates to the technical field of flexible sensors, and aims to solve the problem of developing a novel multi-modal physiological signal sensor. The multi-modal physiological signal sensor comprises an upper packaging layer, a mechanical sensing layer, a lower packaging layer and an electrophysiological sensing layer; comprising the following steps: dropwise adding a liquid packaging layer on a target substrate, and spin-coating to obtain an uncured packaging layer film; flatly placing a mechanical sensing layer on the uncured packaging layer thin film; carrying out vacuum curing on the prepared device at a certain temperature; dropwise adding a liquid packaging layer on the surface of the cured mechanical sensing layer again, and spin-coating to form an uncured packaging layer film; flatly placing the electrophysiological sensing layer on the uncured packaging layer thin film which is formed by spin coating; carrying out vacuum curing on the prepared device at a certain temperature; and uncovering the cured device from the target substrate to obtain the multi-mode physiological signal sensor.

Description

Technical Field

[0001] The present invention relates to the technical field of flexible sensors, and in particular to a multimodal physiological signal sensor, a preparation method and applications thereof. Background Art

[0002] With the development of artificial intelligence, the fields of smart medical care and human-computer interaction are booming, and the basis of these applications is the acquisition of human physiological signals. Human physiological signals include electrophysiological signals generated by biopotentials, physical signals generated by limb movements, and chemical signals of various secretions of the human body. Due to the single signal characteristics, a single human physiological signal often requires a large number of sensor units to collect human physiological signals to reflect human information and status, and it is also difficult to deal with complex diseases and complex human-computer interaction applications. Multimodal sensors, that is, multimodal sensor networks that can simultaneously monitor different types of physiological signals, such as physical signals and electrophysiological signals, can more accurately and reliably reflect human information and status, and apply them to the evaluation of complex diseases, such as gait recognition in Alzheimer's disease, gesture recognition in intelligent mechanical control and other fields. However, there is currently little research on multimodal physiological signal sensors, so it is urgent to develop new multimodal physiological signal sensors to meet the growing needs of the field of artificial intelligence. Summary of the invention

[0003] The present invention proposes a multimodal physiological signal sensor, which comprises, from top to bottom, an upper packaging layer, a mechanical sensing layer, a lower packaging layer and an electrophysiological sensing layer.

[0004] The present invention also provides a method for preparing a multimodal physiological signal sensor, comprising the following steps: S1: dropping a liquid encapsulation layer onto a target substrate, and then spin coating to obtain an uncured encapsulation layer film; S2: placing the mechanical sensing layer flatly on the uncured encapsulation layer film; S3: vacuum curing the device prepared in step S2 at a certain temperature; S4: dripping the liquid encapsulation layer again on the surface of the solidified mechanical sensing layer, and spin coating it to form an unsolidified encapsulation layer film; S5: placing the electrophysiological sensing layer flatly on the uncured encapsulation layer film spin-coated in step S4; S6: vacuum curing the device prepared in step S5 at a certain temperature; S7: Peeling off the device cured in step S6 from the target substrate to obtain a multimodal physiological signal sensor.

[0005] The present invention is further configured as follows: the material selected for the encapsulation layer is one or a combination of two or more of silicone rubber, Ecoflex, and polydimethylsiloxane (PDMS).

[0006] The present invention is further configured as follows: the materials selected for the mechanical sensing layer and the electrophysiological sensing layer are one or a combination of two or more of patterned metal, conductive polymer, graphene, carbon nanotube, MXene and other thin films; wherein the patterning method is laser cutting.

[0007] The present invention is further configured as follows: the mechanical sensing layer is configured in a serpentine, straight line, or broken line shape, or a combination of two or more thereof, wherein the resistance changes with the stress and strain applied, and a corresponding relationship is established between the resistance and the physical signal of the human body.

[0008] The present invention is further configured as follows: the electrophysiological sensing layer is a pair of skin electrodes for recording electrophysiological signals of the human body, such as electromyography (EMG), electrooculography (EOG), and electroencephalography (EEG).

[0009] The present invention is further configured as follows: the mechanical sensing layer and the electrophysiological sensing layer can work independently at the same time, so as to measure physical signals and electrophysiological signals at the same time.

[0010] The present invention is further configured as follows: in step S1, the target substrate is selected from one or more combinations of PET, glass, silicon wafer or other flexible polymer films.

[0011] The present invention is further configured as follows: the curing temperature in step S3 and step S6 is 40-100° C., and the curing time is 30-120 min.

[0012] The present invention also proposes an application of the multimodal physiological signal sensor as described above, which is applied to human-machine interaction such as gesture recognition and gait monitoring, and smart medical treatment.

[0013] The beneficial effects of the present invention are:

[0014] 1. The present invention is made of flexible materials, can adapt to complex skin surfaces, and meet the needs of collecting physiological information of the human body.

[0015] 2. The present invention can simultaneously collect human physical and electrophysiological signals in a multimodal manner, including physical signals such as deformation and stress and surface electrophysiological signals. The resistive switching principle measures physical signals, and the skin electrode pairs measure electrophysiological signals. Compared with a single sensor, it can provide more specific multimodal signals, thereby more accurately and reliably reflecting human information and status, thereby promoting its application in the fields of smart medical care and human-computer interaction. At the same time, the preparation method of the present invention is simple and fast, and is easier to mass produce and promote. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 A schematic structural diagram of a multimodal physiological signal sensor is shown.

[0017] Figure 2 A flow chart of a method for preparing a multimodal physiological signal sensor is shown.

[0018] Figure 3 An optical photograph of the multimodal physiological signal sensor is shown.

[0019] Figure 4 A scanning electron microscope image of a cross section of a multimodal physiological signal sensor is shown.

[0020] Figure 5 An optical photograph showing a multimodal physiological signal sensor attached to the surface of a human body.

[0021] Figure 6 It shows that the multimodal physiological signal sensor simultaneously collects multimodal signals of electromyography and electromechanics.

[0022] Figure 7 The application of multimodal physiological signal sensors in gesture recognition is shown. DETAILED DESCRIPTION

[0023] Those skilled in the art can refer to the content of this article and appropriately improve the process parameters. It is particularly important to point out that all similar replacements and modifications are obvious to those skilled in the art, and they are all considered to be included in the present invention. The methods and applications of the present invention have been described through preferred embodiments, and relevant personnel can modify or appropriately change and combine the methods and applications described herein without departing from the content, spirit and scope of the present invention to implement and apply the technology of the present invention.

[0024] Example 1

[0025] The present invention proposes a multimodal physiological signal sensor, which comprises, from top to bottom, an upper packaging layer, a mechanical sensing layer, a lower packaging layer and an electrophysiological sensing layer.

[0026] Example 2

[0027] This embodiment provides a method for preparing the multimodal physiological signal sensor as described in Embodiment 1, comprising the following steps: S1: dropping a liquid encapsulation layer onto a target substrate, and then spin coating to obtain an uncured encapsulation layer film; S2: placing the mechanical sensing layer flatly on the uncured encapsulation layer film; S3: vacuum curing the device prepared in step S2 at a certain temperature; S4: dripping the liquid encapsulation layer again on the surface of the solidified mechanical sensing layer, and spin coating it to form an unsolidified encapsulation layer film; S5: placing the electrophysiological sensing layer flatly on the uncured encapsulation layer film spin-coated in step S4; S6: vacuum curing the device prepared in step S5 at a certain temperature; S7: Peeling off the device cured in step S6 from the target substrate to obtain a multimodal physiological signal sensor.

[0028] The material used for the encapsulation layer is one or a combination of two or more of silicone rubber, Ecoflex, and polydimethylsiloxane (PDMS).

[0029] The material selected for the mechanical sensing layer and the electrophysiological sensing layer is one or a combination of two or more of patterned metal, conductive polymer, graphene, carbon nanotube, MXene and other thin films. The patterning process is laser cutting.

[0030] The mechanical sensing layer is arranged in a serpentine shape, a straight line shape, a broken line shape, or a combination of two or more thereof, wherein the resistance changes with the stress and strain applied, and a corresponding relationship is established between the resistance and the physical signal of the human body.

[0031] The electrophysiological sensing layer is a pair of skin electrodes for recording electrophysiological signals of the human body, such as electromyography (EMG), electrooculography (EOG), and electroencephalography (EEG).

[0032] The mechanical sensing layer and the electrophysiological sensing layer can work independently at the same time, so as to measure physical signals and electrophysiological signals at the same time.

[0033] The target substrate used in step S1 is selected from one or more combinations of PET, glass, silicon wafer or other flexible polymer films.

[0034] The curing temperature in step S3 and step S6 is 40-100° C., and the curing time is 30-120 min.

[0035] Example 3

[0036] This embodiment adopts the preparation method disclosed in Example 2 to prepare a multimodal physiological sensor, which specifically includes the following steps: S1: PDMS and curing agent were uniformly mixed in a mass ratio of 10:1 to obtain a liquid encapsulation layer, the liquid encapsulation layer was dropped onto a PET substrate, and then spin-coated at 1500 rpm for 30 seconds to obtain an uncured PDMS film; S2: Placing the patterned MXene mechanical sensing film on the uncured PDMS film; S3: curing the device prepared in step S2 under vacuum at 100° C. for 60 min; S4: Take out the cured device, drop the liquid encapsulation layer on the surface of the MXene mechanical sensing film again, and spin coat at 1500 rpm for 30 seconds to obtain an uncured PDMS film; S5: placing the patterned MXene electrophysiological sensing film flatly on the uncured PDMS film spin-coated in step S4; S6: curing the device prepared in step S5 at 100° C. in vacuum for 60 min; S7: Peel off the cured device from the PET substrate to obtain a multimodal physiological signal sensor.

[0037] Example 4

[0038] This embodiment adopts the preparation method disclosed in Example 2 to prepare a multimodal physiological sensor, which specifically includes the following steps: S1: Component A and component B of Ecoflex were uniformly mixed in a mass ratio of 1:1 to obtain a liquid encapsulation layer, the liquid encapsulation layer was dropped onto a silicon wafer substrate, and then spin-coated at 1500 rpm for 30 seconds to obtain an uncured Ecoflex film; S2: placing the patterned graphene mechanical sensing film on the uncured Ecoflex film; S3: curing the device prepared in step S2 under vacuum at 80° C. for 120 min; S4: Take out the cured device, drop the liquid encapsulation layer on the surface of the graphene mechanical sensing film again, and spin coat at 1500 rpm for 30 seconds to obtain an uncured Ecoflex film; S5: placing the patterned graphene electrophysiological sensing film flatly on the uncured Ecoflex film spin-coated in step S4; S6: curing the device prepared in step S5 under vacuum at 80° C. for 120 min; S7: The cured device is peeled off from the silicon wafer substrate to obtain a multimodal physiological signal sensor.

[0039] Example 5

[0040] This embodiment discloses an application of the multimodal physiological signal sensor as described in Embodiment 1, which is applied to human-machine interaction such as gesture recognition and gait monitoring and smart medical treatment. Figure 7 ,It can be seen that when the hand makes different gestures, the multimodal physiological signal sensor will show a specific model combination, so that different gestures can be recognized, indicating its application in the fields of smart medical care and human-computer interaction.

[0041] In summary, the present invention is made of flexible materials, can adapt to complex skin surfaces, and meet the needs of human physiological information collection. The present invention can simultaneously collect human physical and electrophysiological signals in a multimodal manner, including physical signals such as deformation and stress and surface electrophysiological signals, wherein the resistive switching principle measures physical signals, and skin electrodes measure electrophysiological signals. Compared with a single sensor, it can provide more specific multimodal signals, thereby being able to more accurately and reliably reflect human information and status, thereby promoting its application in the fields of smart medical care and human-computer interaction. At the same time, the preparation method of the present invention is simple and fast, and is easier to mass produce and promote.

[0042] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principle of the present invention. These improvements and modifications should also be within the scope of protection of the present invention.

Claims

1. A multimodal physiological signal sensor, characterized in that: From top to bottom, it includes an upper packaging layer, a mechanical sensing layer, a lower packaging layer and an electrophysiological sensing layer.

2. A method for preparing a multimodal physiological signal sensor as claimed in claim 1, characterized in that , including the following steps: S1: dropping a liquid encapsulation layer onto a target substrate, and then spin coating to obtain an uncured encapsulation layer film; S2: placing the mechanical sensing layer flatly on the uncured encapsulation layer film; S3: vacuum curing the device prepared in step S2 at a certain temperature; S4: dripping the liquid encapsulation layer again on the surface of the solidified mechanical sensing layer, and spin coating it to form an unsolidified encapsulation layer film; S5: placing the electrophysiological sensing layer flatly on the uncured encapsulation layer film spin-coated in step S4; S6: vacuum curing the device prepared in step S5 at a certain temperature; S7: Peeling off the device cured in step S6 from the target substrate to obtain a multimodal physiological signal sensor.

3. The method for preparing the multimodal physiological signal sensor according to claim 2, characterized in that: The material selected for the encapsulation layer is one or a combination of two or more of silicone rubber, Ecoflex, and polydimethylsiloxane (PDMS).

4. The method for preparing the multimodal physiological signal sensor according to claim 2, characterized in that: The materials used for the mechanical sensing layer and the electrophysiological sensing layer are one or a combination of two or more of patterned metal, conductive polymer, graphene, carbon nanotube, MXene and other thin films; wherein the patterning method is laser cutting.

5. The method for preparing the multimodal physiological signal sensor according to claim 2, characterized in that: The mechanical sensing layer is configured to be in a serpentine shape, a straight line shape, a broken line shape, or a combination of two or more thereof, wherein the resistance changes with the stress and strain applied, and a corresponding relationship is established between the resistance and the physical signal of the human body.

6. The method for preparing the multimodal physiological signal sensor according to claim 2, characterized in that: The electrophysiological sensing layer is a pair of skin electrodes for recording electrophysiological signals of the human body, such as electromyography (EMG), electrooculography (EOG), and electroencephalography (EEG).

7. The method for preparing the multimodal physiological signal sensor according to claim 2, characterized in that: The mechanical sensing layer and the electrophysiological sensing layer can work independently at the same time, so as to measure physical signals and electrophysiological signals at the same time.

8. The method for preparing the multimodal physiological signal sensor according to claim 2, characterized in that: The target substrate in step S1 is selected from one or more combinations of PET, glass, silicon wafer or other flexible polymer films.

9. The method for preparing the multimodal physiological signal sensor according to claim 2, characterized in that: The curing temperature in step S3 and step S6 is 40-100° C., and the curing time is 30-120 min.

10. An application of the multimodal physiological signal sensor according to claim 1, characterized in that: Applied to human-computer interaction and smart medical care such as gesture recognition and gait monitoring.

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