Joint adapter device, filter connection assembly, and substrate processing apparatus

Abstract

The invention belongs to the technical field of filtering devices, and particularly relates to a connector adaptation device, a filter connecting assembly and substrate processing equipment, the connector adaptation device comprises a connector plate, a plurality of adapter connectors and a connector driving assembly, the connector plate comprises a limiting sliding groove, and at least two movable adapter connectors are arranged in the limiting sliding groove in a penetrating mode; the adapter connectors can slide in the limiting sliding grooves so as to form various position matching relations on the connector plate, the connector driving assembly comprises a plurality of movement connecting pieces, at least two movement connecting pieces can move relatively, each movement connecting piece is connected with one adapter connector, and the connector driving assembly drives the adapter connectors to move relative to the movement connecting pieces. The moving connecting piece can drive the adapter connector connected with the moving connecting piece to slide in the limiting sliding groove while moving. A plurality of adapter connectors form a plurality of position matching relations, the adapter connector can be compatible with filters with various filter connector layouts, the connector adapting device is used for the filter connecting assembly, the replacement frequency of the filter connecting assembly is reduced, and the risk that fluid is polluted is reduced.

Description

Technical Field

[0001] The present application belongs to the technical field of filter devices, and specifically relates to a joint adapter device, a filter connection assembly, and a substrate processing device. Background Art

[0002] The filter can be used to filter impurities in fluids, such as impurities in deionized water, organic solvents, photoresist chemicals, photochemical solvents, etc. in semiconductor systems. The filter connection assembly can be used to connect the filter so that the filter and the pipeline can be easily connected or disassembled, which is convenient for use, installation, maintenance and replacement of the filter.

[0003] The filter includes a filter body and a plurality of filter connectors, one filter connector for the inflow of the fluid to be filtered, one filter connector for the outflow of the filtered fluid, and a filter connector for exhaust. The filter connectors of different manufacturers and types of filters have different connector arrangements. For example, the filter connectors of some filters are arranged in an L shape, and the filter connectors of some filters are arranged in a straight line.

[0004] The existing filter connection assembly is set up in conjunction with the filter. When replacing filters of different manufacturers and types, the filter connection assembly needs to be replaced simultaneously. Replacing the filter connection assembly requires suspending machine production, which not only affects the production efficiency of the production line, but also increases the risk of fluid contamination. Summary of the invention

[0005] The purpose of the present application is to provide a joint adapter device, a filter connection assembly and a substrate processing device to be compatible with two or more filters, reduce the replacement frequency of the filter connection assembly, and reduce the risk of fluid contamination.

[0006] In order to achieve the above object, the present application provides a joint adapter device, comprising:

[0007] A joint plate, including a limiting slide groove;

[0008] A plurality of adapter joints, at least two movable adapter joints are inserted into the limiting slide groove, and the adapter joints can slide in the limiting slide groove, so that the plurality of adapter joints form a plurality of position matching relationships on the joint plate;

[0009] The joint drive assembly includes a plurality of moving connectors, at least two of which can undergo relative movement, each of which is connected to an adapter connector, and the moving connector can drive the adapter connector connected thereto to slide in the limiting slide groove while moving itself.

[0010] Optionally, the limiting slide groove includes a first slide groove and a second slide groove, the first end of the first slide groove is arranged closer to the first end of the second slide groove, the multiple adapter joints include a first adapter joint and a second adapter joint, and the multiple position matching relationships include a first state and a second state. In the first state, the first adapter joint is located at the second end of the first slide groove, and the second adapter joint is located at the first end of the second slide groove. In the second state, the first adapter joint is located at the first end of the first slide groove, and the second adapter joint is located at the second end of the second slide groove.

[0011] Optionally, the plurality of motion connectors include a first motion connector and a second motion connector, wherein the first motion connector rotates to drive the first adapter joint connected thereto to slide along the first slide groove, and the second motion connector rotates to drive the second adapter joint connected thereto to slide along the second slide groove.

[0012] Optionally, the first motion connector includes a first joint hole and a first shaft hole, the first joint hole and the first shaft hole are spaced apart, the second motion connector includes a second joint hole and a second shaft hole, the second joint hole and the second shaft hole are spaced apart, the first adapter joint is inserted into the first joint hole, the second adapter joint is inserted into the second joint hole, and the joint drive assembly further includes a first rotating shaft, the first rotating shaft is arranged on the joint plate, and the first rotating shaft is inserted into the first shaft hole and the second shaft hole;

[0013] The first motion connector and the second motion connector are configured as follows: the first motion connector rotates to drive the first adapter joint to slide along the first slide groove, and the first motion connector rotates to drive the second motion connector to rotate, so that the second motion connector drives the second adapter joint to slide along the second slide groove.

[0014] Optionally, a reset groove is provided between the second joint hole and the second shaft hole, the reset groove is partially provided around the first rotating shaft, a reset pin is provided between the first joint hole and the first shaft hole, the reset pin is inserted into the reset groove, and when the first motion connector drives the first adapter connector to slide from the first end of the first slide groove to the second end of the first slide groove, the reset pin drives the second motion connector to rotate through the first end of the reset groove.

[0015] Optionally, when the first motion connector drives the first adapter joint to slide from the second end of the first slide slot to the first end of the first slide slot, the reset pin drives the second motion connector to rotate through the second end of the reset slot; and / or

[0016] A driving surface is provided on at least the first motion connection member, and a blocking surface is provided on at least the second motion connection member. When the first motion connection member drives the first adapter joint to slide from the second end of the first slide groove to the first end of the first slide groove, the driving surface pushes the blocking surface to drive the second motion connection member to rotate.

[0017] Optionally, when the first motion connector drives the first adapter joint to slide from the second end of the first slide slot to the first end of the first slide slot, the reset pin drives the second motion connector to rotate through the second end of the reset slot, and when the first motion connector drives the first adapter joint to slide from the second end of the first slide slot to the first end of the first slide slot, the driving surface pushes the blocking surface to drive the second motion connector to rotate;

[0018] The stroke of the second adapter joint is smaller than that of the first adapter joint. In the first state, the angle between the driving surface and the blocking surface is greater than 0°. In the second state, the reset pin and the second end of the reset groove form a gap.

[0019] Optionally, the adapter joint includes a first connection end, a second connection end and a stepped shaft, the first connection end and the second connection end are arranged at two ends of the stepped shaft, the first connection end and the second connection end are communicated, and the first connection end is passed through the joint plate;

[0020] The first motion connector and the second motion connector are arranged on one side of the joint plate, the second connecting end of the first adapter joint is passed through the first joint hole, the step shaft of the first adapter joint is located between the first motion connector and the joint plate, the second connecting end of the second adapter joint is passed through the second joint hole, and the step shaft of the second adapter joint is located between the second motion connector and the joint plate.

[0021] Optionally, the joint drive assembly further includes an operating rod, and a third sliding groove is further provided on the joint plate, and the operating rod passes through the third sliding groove and is connected to an end of the first motion connector away from the first rotating shaft.

[0022] Optionally, the first slide groove is connected to the second slide groove, and the connecting area of ​​the first slide groove and the second slide groove protrudes inward to form a limiting protrusion, and the limiting protrusion is used to limit the first adapter joint and the second adapter joint.

[0023] Optionally, the adapter connector further includes a third adapter connector, the connector plate is provided with a connector jack, and the third adapter connector is inserted into the connector jack;

[0024] In the first state, the first adapter connector, the second adapter connector and the third adapter connector are arranged along a first direction, and in the second state, the first adapter connector and the second adapter connector are arranged along a second direction, and the second adapter connector and the third adapter connector are arranged along a third direction, and an angle between the second direction and the third direction is 90±1°.

[0025] The present application also provides a filter connection assembly, comprising:

[0026] The joint adapter device;

[0027] The filter connecting device is arranged on one side of the connector plate.

[0028] Optionally, the filter connecting device includes a support plate, a movable plate, a scissors strut and a lifting assembly, the support plate and the movable plate are connected by the scissors strut, the joint adapter device is arranged on the side of the support plate away from the movable plate, the multiple motion connectors include a first motion connector and a second motion connector, the first motion connector and the second motion connector are respectively connected to a transition connector, the first motion connector and the second motion connector are arranged between the support plate and the connector plate, the filter includes a first filter and a second filter, the first filter and the second filter both include a filter body and a filter connector, the filter connector is arranged at one end of the filter body, the movable plate is used to install the filter body, and the lifting assembly drives the movable plate to approach or move away from the support plate, so that the filter connector and the transition connector are connected or separated.

[0029] Optionally, a hollow structure is provided on the support plate corresponding to the adapter joint, and the adapter joint passes through the hollow structure to be connected to the filter joint.

[0030] Optionally, the support plate includes a first main body portion and a first side plate portion arranged on two opposite sides of the first main body portion, the movable plate includes a second main body portion and a second side plate portion arranged on two opposite sides of the second main body portion, the scissors strut is connected to the first side plate portion and the second side plate portion, an insertion groove is arranged on one side of the second main body portion, the second main body portion is located in an area between the insertion groove and the second side plate portion to form a guide rail, and the filter body of the second filter has a first guide groove adapted to the guide rail.

[0031] Optionally, the filter connecting device also includes an expansion plate, which includes a third main body portion and a third side plate portion arranged on two opposite sides of the third main body portion, and an installation area of ​​the filter body of the first filter is formed between the two third side plate portions, and the third side plate portion has a second guide groove that cooperates with the guide rail.

[0032] Optionally, the filter connecting device also includes a conversion block, which is arranged on a side of the support plate away from the connector plate, and the conversion block includes a plurality of adapter holes, a first orifice of the adapter hole is connected to the adapter connector, and a second orifice of the adapter hole is connected to the filter connector of the first filter.

[0033] Optionally, the lifting assembly includes a rotating plate, a connecting plate, a second rotating shaft and a limit pin, the two rotating plates are arranged on opposite sides of the support plate, the rotating plate and the support plate are rotatably connected via the second rotating shaft, a fourth sliding groove partially surrounding the second rotating shaft is provided on the rotating plate, the limit pin passes through the fourth sliding groove and is connected to the movable plate, and the connecting plate connects the two rotating plates.

[0034] The present application also provides a substrate processing device, comprising:

[0035] The filter connection assembly;

[0036] The filter is assembled and connected with the filter connecting device.

[0037] The joint adapter device, filter connection assembly and substrate processing equipment disclosed in the present application have the following beneficial effects:

[0038] In the present application, the joint adapter device includes a joint plate, a joint drive assembly and a plurality of adapter joints, at least two movable adapter joints are inserted into the limiting slide groove, and the adapter joints can slide in the limiting slide groove, so that the plurality of adapter joints form a plurality of position matching relationships on the joint plate, and the joint drive assembly includes a plurality of motion connectors, at least two motion connectors can move relative to each other, each motion connector is connected to an adapter joint, and the motion connector can drive the adapter joint connected thereto to slide in the limiting slide groove while moving itself. The plurality of adapter joints form a plurality of position matching relationships on the joint plate, and are compatible with filters with a plurality of filter joint layouts, and the joint adapter device is used for the filter connection assembly, which reduces the replacement frequency of the filter connection assembly and reduces the risk of fluid contamination.

[0039] Other features and advantages of the present application will become apparent from the following detailed description, or may be learned in part by the practice of the present application.

[0040] It is to be understood that the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the present disclosure. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] The drawings herein are incorporated into the specification and constitute a part of the specification, illustrate embodiments consistent with the present application, and together with the specification are used to explain the principles of the present application. Obviously, the drawings described below are only some embodiments of the present application, and for ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0042] Figure 1 It is a schematic diagram of the exploded structure of the filter connection assembly in the embodiment of the present application.

[0043] Figure 2 It is a three-dimensional schematic diagram of the filter connection assembly in the embodiment of the present application.

[0044] Figure 3 It is a three-dimensional schematic diagram of the connector plate in the embodiment of the present application.

[0045] Figure 4 It is a schematic diagram of the structure of the first filter in the embodiment of the present application.

[0046] Figure 5 It is a schematic diagram of the structure of the second filter in the embodiment of the present application.

[0047] Figure 6 This is a schematic diagram of the position of the adapter connector in the first state in an embodiment of the present application.

[0048] Figure 7 It is a schematic diagram of the position of the adapter connector in the second state in an embodiment of the present application.

[0049] Figure 8 It is a three-dimensional schematic diagram of the joint drive assembly in an embodiment of the present application.

[0050] Fig. 9 It is a schematic diagram of the side of the connector drive assembly away from the connector plate in the embodiment of the present application.

[0051] Fig.10 It is a schematic diagram of the intermediate process of switching from the first state to the second state in an embodiment of the present application.

[0052] Fig.11 It is a schematic diagram of the intermediate process of switching from the second state to the first state in an embodiment of the present application.

[0053] Fig.12 This is a schematic diagram of the installation method of the first filter in the embodiment of the present application.

[0054] Fig.13 It is a three-dimensional schematic diagram of the filter connecting device in the embodiment of the present application.

[0055] Fig.14 It is a schematic diagram of the installation method of the second filter in the embodiment of the present application.

[0056] Fig.15 It is a schematic diagram of the structure of the conversion block in the embodiment of the present application.

[0057] Description of reference numerals:

[0058] 100, joint adapter; 110, joint plate; 111, first slide groove; 112, second slide groove; 113, joint jack; 114, limit protrusion; 115, third slide groove; 120, joint drive assembly; 121, first motion connector; 1211, first connector hole; 1212, reset pin; 1213, drive surface; 1213a, first drive surface; 1213b, second drive surface; 122, second motion connector; 1221, second connector hole; 1222, reset pin Groove; 1223, blocking surface; 1223a, first blocking surface; 1223b, second blocking surface; 123, first rotating shaft; 124, operating rod; 130, adapter; 130a, first adapter; 130b, second adapter; 130c, third adapter; 131, first connecting end; 1311, first sliding fitting portion; 1312, first connecting portion; 132, second connecting end; 1321, second sliding fitting portion; 1322, second connecting portion; 133, stepped shaft;

[0059] 200, filter connecting device; 210, support plate; 211, first main body; 212, first side plate; 220, movable plate; 221, second main body; 2211, guide rail; 222, second side plate; 230, scissors support; 231, first support rod; 232, second support rod; 233, third rotating shaft; 240, lifting assembly; 241, rotating plate; 2411, fourth sliding groove; 242, connecting plate; 243, second rotating shaft; 244, limiting pin; 250, expansion plate; 251, third main body; 252, third side plate; 2521, second guide groove; 260, conversion block; 261, transfer hole; 270, fourth rotating shaft; 280, fifth rotating shaft; 290, locking slider; 291, limiting structure;

[0060] 300, filter; 300a, first filter; 300b, second filter; 310, filter connector; 320, filter body; 321, mounting block; 3211, first guide groove;

[0061] 410. Support sleeve; 420. Retaining ring. DETAILED DESCRIPTION

[0062] Example embodiments will now be described more fully with reference to the accompanying drawings. However, example embodiments can be implemented in a variety of forms and should not be construed as limited to the examples set forth herein; rather, these embodiments are provided so that this application will be more comprehensive and complete and fully convey the concept of the example embodiments to those skilled in the art.

[0063] In addition, described feature, structure or characteristic can be combined in one or more embodiments in any suitable manner. In the following description, many specific details are provided to provide a full understanding of the embodiments of the present application. However, those skilled in the art will appreciate that the technical scheme of the present application can be put into practice without one or more of the specific details, or other methods, components, devices, steps, etc. can be adopted. In other cases, known methods, devices, realizations or operations are not shown or described in detail to avoid blurring the various aspects of the application.

[0064] The present application is further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be noted that the technical features involved in the various embodiments of the present application described below can be combined with each other as long as they do not conflict with each other. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present application, and should not be understood as limiting the present application.

[0065] See also Figures 1 to 3 As shown, in this embodiment, the joint adapter device 100 is used for the filter connection assembly, so that the filter connection assembly can be compatible with different filters 300. The joint adapter device 100 includes a joint plate 110, a joint drive assembly 120 and a plurality of adapter joints 130. The joint plate 110 includes a limiting slide groove. The plurality of adapter joints 130 may include movable adapter joints 130, and the plurality of adapter joints 130 may also include stationary adapter joints 130. At least two movable adapter joints 130 are inserted into the limiting slide groove, and the adapter joint 130 can slide in the limiting slide groove so that the plurality of adapter joints 130 can form a variety of position matching relationships on the joint plate 110. The adapter joint 130 is used to connect the filter 300.

[0066] The joint drive assembly 120 includes a plurality of moving connectors, at least two of which can undergo relative movement, each of which is connected to an adapter connector 130, and the moving connector can drive the adapter connector 130 connected thereto to slide in a limiting slide groove while moving itself.

[0067] The filter 300 has a variety of different models, and the layout of the filter connector 310 of the filter 300 of different models is different. For example, see Figure 4 and Figure 5As shown, the filter 300 includes a first filter 300a and a second filter 300b. The first filter 300a and the second filter 300b both include a filter connector 310 and a filter body 320. The filter connector 310 is arranged at one end of the filter body 320, and the adapter connector 130 is specifically connected to the filter connector 310. The first filter 300a and the second filter 300b are both provided with a plurality of filter connectors 310, one filter connector 310 is used for the inflow of the fluid to be filtered, one filter connector 310 is used for the outflow of the filtered fluid, and another filter connector 310 can be provided for exhaust. The first filter 300a and the second filter 300b have different layouts of their filter connectors 310.

[0068] The existing filter connection assembly, which is matched with the filter 300, is not compatible with the filter 300 with different layouts of the filter connector 310. Therefore, when replacing a different filter 300, the filter connection assembly needs to be replaced simultaneously. Replacing the filter connection assembly requires suspending the production of the machine, which not only affects the production efficiency of the production line, but also increases the risk of fluid contamination.

[0069] In this embodiment, the joint adapter device 100 includes a joint plate 110, a joint drive assembly 120 and a plurality of adapter joints 130, at least two movable adapter joints 130 are inserted into the limiting slide groove, and the adapter joint 130 can slide in the limiting slide groove, so that the plurality of adapter joints 130 form a variety of position matching relationships on the joint plate 110, and the joint drive assembly 120 includes a plurality of motion connectors, at least two of which can move relative to each other, each motion connector is connected to an adapter joint 130, and the motion connector can drive the adapter joint 130 connected thereto to slide in the limiting slide groove while moving itself. The plurality of adapter joints 130 form a variety of position matching relationships on the joint plate 110, and are compatible with filters 300 with a variety of filter joint 310 layouts. The joint adapter device 100 is used for filter connection assemblies, which reduces the replacement frequency of the filter connection assemblies and reduces the risk of fluid contamination.

[0070] See also Figure 3 , Figure 6 and Figure 7As shown, the limiting slide groove includes a first slide groove 111 and a second slide groove 112, and the first end of the first slide groove 111 is arranged closer to the first end of the second slide groove 112, that is, the first end of the first slide groove 111 and the first end of the second slide groove 112 are close to each other, and the second end of the first slide groove 111 and the second end of the second slide groove 112 are far away from each other. The plurality of adapter joints 130 include a first adapter joint 130a and a second adapter joint 130b, and the first adapter joint 130a and the second adapter joint 130b are movable adapter joints 130. In addition, the plurality of adapter joints 130 may also include a third adapter joint 130c that is stationary relative to the joint plate 110. The multiple position matching relationships include a first state and a second state. In the first state, the first adapter joint 130a is located at the second end of the first slide groove 111, and the second adapter joint 130b is located at the first end of the second slide groove 112. The positions of the three adapter joints 130 correspond to the positions of the three filter joints 310 of the first filter 300a. In the second state, the first adapter joint 130a is located at the first end of the first slide 111, and the second adapter joint 130b is located at the second end of the second slide 112. The positions of the three adapter joints 130 correspond to the positions of the three filter joints 310 of the second filter 300b. In addition to the above-mentioned first and second forms, the first adapter joint 130a and the second adapter joint 130b can also be located at the middle position of the first slide 111 and the second slide 112 (the fixing function is realized by a fixing device) respectively, forming other forms (for example: isosceles triangle) to adapt to other types of filters. The adapter joint 130 switches between the first state and the second state, and the first adapter joint 130a and the second adapter joint 130b have independent strokes and no crossover, so the joint drive assembly 120 can be designed to be simpler.

[0071] See also Figures 3 to 7 As shown, the three filter connectors 310 of the first filter 300a are arranged in a straight line, and the three filter connectors 310 of the second filter 300b are arranged in an L shape. The connector plate 110 is provided with a connector jack 113, and the third adapter connector 130c is inserted into the connector jack 113. In the first state, the first adapter connector 130a, the second adapter connector 130b and the third adapter connector 130c are arranged in a straight line. In the second state, the first adapter connector 130a and the second adapter connector 130b are arranged in a second direction, and the first adapter connector 130a and the third adapter connector 130c are arranged in a third direction, and the angle between the second direction and the third direction is 90±1°, that is, the second direction and the third direction are perpendicular or approximately perpendicular, and the three adapter connectors 130 are arranged in an L shape.

[0072] In the first state, the positions of the three adapter joints 130 are adapted to the positions of the three filter joints 310 of the first filter 300a. In the second state, the positions of the three adapter joints 130 are adapted to the positions of the three filter joints 310 of the second filter 300b. The adapter joints 130 and the filter joints 310 can be easily sealed and connected.

[0073] It should be understood that the number of adapter joints 130 is set according to the number of filter joints 310 of the filter 300, and two, three or more adapter joints 130 can be set, depending on the specific situation. The adapter joint 130 and the filter joint 310 can be sealed and connected through their own structural design, or additional structures such as sealing gaskets can be designed to achieve a sealed connection.

[0074] See also Figure 1 and Figure 3 As shown, each adapter joint 130 includes a first connection end 131, a second connection end 132 and a stepped shaft 133. The first connection end 131 and the second connection end 132 are arranged at both ends of the stepped shaft 133, and the first connection end 131 and the second connection end 132 are connected to each other through a pipeline. The first connection end 131, the second connection end 132 and the stepped shaft 133 can all be cylindrical, and the maximum outer diameters of the first connection end 131 and the second connection end 132 are both smaller than the outer diameter of the stepped shaft 133.

[0075] The first connection end 131 may include a first sliding fit portion 1311 and a first connection portion 1312, wherein the first sliding fit portion 1311 is connected to the step shaft 133 and the first connection portion 1312. The first sliding fit portion 1311 may be slidably disposed in the first slide groove 111, and the first connection portion 1312 is used to connect an input pipe, an output pipe or an exhaust pipe. The portion of the first connection portion 1312 close to the step shaft 133 may be provided with an external thread for easy connection. The second connection end 132 may include a second sliding fit portion 1321 and a second connection portion 1322, wherein the second connection portion 1322 is used to connect the filter joint 310. The first slide groove 111 is an arc or an approximately arc groove, and the second slide groove 112 is a linear groove or an approximately linear groove. The second slide groove 112 is located on one side close to the center of the first slide groove 111, and the second slide groove 112 is approximately parallel to the arc radius passing through the first end of the first slide groove 111.

[0076] The first slide groove 111 is an arc or a groove approximately in an arc shape, and the second slide groove 112 is a straight groove or a groove approximately in a straight groove, which is beneficial for the smooth movement of the adapter joint 130 in the slide groove.

[0077] The first chute 111 is connected to the second chute 112. Figure 3The middle dotted line indicates the interface between the first slide groove 111 and the second slide groove 112. The connecting area of ​​the first slide groove 111 and the second slide groove 112 protrudes inward to form a limiting protrusion 114, which is used to limit the first adapter joint 130a and the second adapter joint 130b.

[0078] The movement trajectories of the first adapter joint 130a and the second adapter joint 130b may partially overlap, the first slide groove 111 and the second slide groove 112 are connected, and the connecting area of ​​the first slide groove 111 and the second slide groove 112 protrudes inward to form a limiting protrusion 114, which can prevent the first adapter joint 130a and the second adapter joint 130b from being separated from their respective slide grooves.

[0079] It should be noted that whether the movement trajectories of the first adapter joint 130a and the second adapter joint 130b overlap depends on the outer diameters of the first adapter joint 130a and the second adapter joint 130b. When the outer diameters of the first adapter joint 130a and the second adapter joint 130b are small, the movement trajectories of the first adapter joint 130a and the second adapter joint 130b do not overlap, the first slide groove 111 and the second slide groove 112 are correspondingly disconnected, and the limiting protrusion 114 can be cancelled accordingly.

[0080] The plurality of motion connectors include a first motion connector 121 and a second motion connector 122 . The first motion connector 121 rotates to drive the first adapter joint 130a connected thereto to slide along the first slide groove 111 , and the second motion connector 122 rotates to drive the second adapter joint 130b connected thereto to slide along the second slide groove 112 .

[0081] The two moving connecting members can be easily connected to each other and move in association. The moving connecting member rotates to drive the adapter connector 130 connected thereto, making the operation of replacing different filters 300 easier.

[0082] See also Figure 1 , Figure 8 and Fig. 9As shown, the first motion connector 121 includes a first joint hole 1211 and a first shaft hole, and the first joint hole 1211 and the first shaft hole are arranged at intervals. The second motion connector 122 includes a second joint hole 1221 and a second shaft hole, and the second joint hole 1221 and the second shaft hole are arranged at intervals. The first adapter joint 130a is inserted into the first joint hole 1211, and the first sliding fitting portion 1311 of the first adapter joint 130a cooperates with the first joint hole 1211 and the first slide groove 111. The second adapter joint 130b is inserted into the second joint hole 1221, and the first sliding fitting portion 1311 of the second adapter joint 130b cooperates with the second joint hole 1221 and the second slide groove 112. The first joint hole 1211 and the second joint hole 1221 are both waist holes, and their width is equal to or slightly larger than the outer diameter of the first sliding fitting portion 1311 and smaller than the outer diameter of the step shaft 133, and their length is larger than the outer diameter of the first sliding fitting portion 1311.

[0083] The joint drive assembly 120 further includes a first rotating shaft 123, which is disposed on the joint plate 110, and the first rotating shaft 123 is inserted into the first shaft hole and the second shaft hole to rotatably connect the first motion connector 121 and the second motion connector 122. The first motion connector 121 and the second motion connector 122 are configured as follows: the first motion connector 121 rotates to drive the first adapter joint 130a to slide along the first slide groove 111, and the first motion connector 121 rotates to drive the second motion connector 122 to rotate, so that the second motion connector 122 drives the second adapter joint 130b to slide along the second slide groove 112.

[0084] The first motion connector 121 acts as an active member to drive the first adapter joint 130a and the second motion connector 122. Compared with driving the adapter joint 130 through the first motion connector 121 and the second motion connector 122 respectively, the operation of replacing different filters 300 is simpler.

[0085] It should be noted that the first or second sliding fit portion of the first adapter joint 130a cooperates with the first joint hole 1211, and the first or second sliding fit portion of the second adapter joint 130b cooperates with the second joint hole 1221, but it is not limited to this. The step shaft 133 can also be used to cooperate with the first joint hole 1211 and the second joint hole 1221. It is only necessary to realize the connection between the first and second adapter joints and the first and second motion connectors. The specific configuration method may depend on the situation.

[0086] However, since the diameter of the stepped shaft 133 is relatively large, the diameters of the first sliding fit part and the second sliding fit part are relatively small, and the area of ​​the joint plate is limited, when the first joint hole 1211 and the second joint hole 1221 are matched with the first sliding fit part and / or the second sliding fit part, the design difficulty of the first and second motion connectors can be reduced.

[0087] At the same time, when the first sliding fit portion of the first adapter 130a cooperates with the first joint hole and the first sliding fit portion of the second adapter 130b cooperates with the second joint hole, the stability of the adapter after connection is improved compared to the situation when the first sliding fit portion of the first adapter 130a cooperates with the first joint hole and the second sliding fit portion of the second adapter 130b cooperates with the second joint hole.

[0088] When the adapter is matched with the corresponding connector hole and limiting slide groove, the width of the connector hole and limiting slide groove is preferably slightly larger than the diameter of the corresponding matching part of the adapter to facilitate sliding.

[0089] For example, a reset groove 1222 is provided between the second joint hole 1221 and the second shaft hole, and the reset groove 1222 is partially provided around the first rotating shaft 123, that is, the reset groove 1222 is a section of an arc groove. A reset pin 1212 is provided between the first joint hole 1211 and the first shaft hole, and the reset pin 1212 is inserted into the reset groove 1222. When the first motion connector 121 drives the first adapter connector 130a to slide from the first end of the first slide groove 111 to the second end of the first slide groove 111, the reset pin 1212 drives the second motion connector 122 to rotate through the first end of the reset groove 1222.

[0090] When switching from the second state to the first state, the first moving connector 121 drives the second moving connector 122 to rotate through the reset pin 1212 and the reset groove 1222, thereby realizing the linkage between the first moving connector 121 and the second moving connector 122. Compared with driving the adapter joint 130 through the first moving connector 121 and the second moving connector 122 respectively, the operation of replacing different filters 300 is simpler.

[0091] It should be noted that the reset pin 1212 is arranged on the first motion connection member 121, and the reset groove 1222 is arranged on the second motion connection member 122, but it is not limited thereto. The positions of the reset pin 1212 and the reset groove 1222 can also be exchanged, depending on the specific situation.

[0092] See also Figure 1 , Figure 8 and Fig. 9As shown, a driving surface 1213 is provided on the first motion connection member 121, and a blocking surface 1223 is provided on the second motion connection member 122. When the first motion connection member 121 drives the first adapter joint 130a to slide from the second end of the first slide slot 111 to the first end of the first slide slot 111, the driving surface 1213 pushes the blocking surface 1223 to drive the second motion connection member 122 to rotate. The first motion connection member 121 and the second motion connection member 122 are connected through the first rotating shaft 123. The first driving surface 1213a is provided on the rotating connection portion of the first motion connection member 121 where the first rotating shaft 123 is installed, and the blocking surface 1223a is provided on the side of the rotating connection portion of the second motion connection member 122 close to the first motion connection member 121. In addition, a second blocking surface 1223b can also be provided on the rotating connection portion of the second motion connection member 122 where the first rotating shaft 123 is installed, and a second driving surface 1213b is provided on the side of the rotating connection portion of the first motion connection member 121 close to the second motion connection member 122. The driving surface 1213 and the blocking surface 1223 may be flat surfaces or curved surfaces.

[0093] It should be noted that when the first moving connector 121 drives the first adapter joint 130a to slide from the second end of the first slide groove 111 to the first end of the first slide groove 111, that is, when switching from the first state to the second state, the first moving connector 121 drives the second moving connector 122 to rotate through the driving surface 1213 and the blocking surface 1223, but is not limited to this. The reset pin 1212 can also be used to drive the second moving connector 122 to rotate through the second end of the reset groove 1222, depending on the specific situation.

[0094] When switching from the first state to the second state, the first motion connector 121 drives the second motion connector 122 to rotate through the driving surface 1213 and the blocking surface 1223, so as to realize the linkage between the first motion connector 121 and the second motion connector 122. Compared with driving the adapter joint 130 through the first motion connector 121 and the second motion connector 122 respectively, the operation of replacing different filters 300 is simpler. At the same time, the driving surface 1213 and the blocking surface 1223 can be set at a position farther from the first rotating shaft 123. Compared with pushing the second motion connector 122 by the reset pin 1212 and the reset groove 1222, the linkage between the first motion connector 121 and the second motion connector 122 is more reliable.

[0095] It should be understood that when switching from the first state to the second state, the driving surface 1213 and the reset pin 1212 can also be used simultaneously to push the second motion connector 122, so that the linkage between the first motion connector 121 and the second motion connector 122 is more reliable.

[0096] In some embodiments, the stroke of the second adapter joint 130b is less than the stroke of the first adapter joint 130a. In the first state, the angle between the driving surface 1213 and the blocking surface 1223 is greater than 0°. When the driving surface 1213 is a curved surface, the angle between the driving surface 1213 and the blocking surface 1223 is: the angle between the tangent plane passing through the contact point between the driving surface 1213 and the blocking surface 1223 and the blocking surface 1223. When the blocking surface 1223 is a curved surface, the angle between the driving surface 1213 and the blocking surface 1223 is: the angle between the tangent plane passing through the contact point between the blocking surface 1223 and the driving surface 1213 and the driving surface 1213.

[0097] See also Figure 6 , Figure 7 and Fig.10 As shown, the first state is switched to the second state (the position of the adapter 130 is Figure 6 , Fig.10 and Figure 7 The first moving connecting member 121 rotates clockwise, and before the driving surface 1213 and the blocking surface 1223 come into contact, the first moving connecting member 121 first idles. When the first moving connecting member 121 rotates to the point where the angle between the driving surface 1213 and the blocking surface 1223 is 0 (the driving surface 1213 and the blocking surface 1223 come into contact), the first moving connecting member 121 pushes the second moving connecting member 122 to rotate synchronously through the driving surface 1213 and the blocking surface 1223, and pushes the first adapter joint 130a and the second adapter joint 130b into place.

[0098] In the second state, the reset pin 1212 and the second end of the reset groove 1222 form a gap. Figure 6 , Figure 7 and Fig.11 As shown, the second state is switched to the first state (the position of the adapter 130 is Figure 7 , Fig.11 and Figure 6 The first motion connector 121 rotates counterclockwise, and before the reset pin 1212 contacts the second end of the reset groove 1222, the first motion connector 121 idles. When the first motion connector 121 rotates until the reset pin 1212 contacts the second end of the reset groove 1222, the first motion connector 121 pushes the second motion connector 122 to rotate synchronously through the reset pin 1212 and the reset groove 1222, and pushes the first adapter joint 130a and the second adapter joint 130b into place.

[0099] It should be noted that in the second state, the contact between the reset pin 1212 and the reset groove 1222, the switching from the second state to the first state, and the switching from the first state to the second state can be achieved through the cooperation between the reset pin 1212 and the reset groove 1222. In the second state, the non-contact between the reset pin 1212 and the reset groove 1222, the switching from the first state to the second state is achieved through the cooperation between the driving surface 1213 and the blocking surface 1223, and the switching from the second state to the first state is achieved through the cooperation between the reset pin 1212 and the reset groove 1222.

[0100] In order to make the layout of the adapter joint 130 and the layout of the filter joint 310 closer in the first state and the second state, the adapter joint 130 and the filter joint 310 can simply achieve a sealed connection, and the stroke of the second adapter joint 130b is set to be smaller than the stroke of the first adapter joint 130a.

[0101] See also Figure 1 , Figure 2 and Fig.12 As shown, the first motion connector 121 and the second motion connector 122 are arranged on one side of the connector plate 110, the second connection end 132 of the first adapter joint 130a is passed through the first connector hole 1211, and the step shaft 133 of the first adapter joint 130a is located between the first motion connector 121 and the connector plate 110, the second connection end 132 of the second adapter joint 130b is passed through the second connector hole 1221, and the step shaft 133 of the second adapter joint 130b is located between the second motion connector 122 and the connector plate 110.

[0102] The step shaft 133 of the first adapter joint 130a is located between the first motion connector 121 and the connector plate 110, and the step shaft 133 of the second adapter joint 130b is located between the second motion connector 122 and the connector plate 110. The adapter joint 130 can be limited by the step shaft 133 to prevent the axial movement of the adapter joint 130 from affecting the sealing connection of the remaining filter joints 310. It should be noted that as long as the adapter joint 130 is inserted into the first motion connector 121, the second motion connector 122 and the limiting slide groove, the first motion connector 121 and the second motion connector 122 can be set on any side of the connector plate 110, and which part of the adapter joint 130 is located in the first motion connector 121, the second motion connector 122 and the limiting slide groove can be set according to the actual situation.

[0103] See also Figure 1 , Figure 2 , Figure 8As shown, the joint drive assembly 120 further includes an operating rod 124, and a third slide slot 115 is further provided on the joint plate 110. The operating rod 124 passes through the third slide slot 115 and is connected to the end of the first motion connector 121 away from the first rotating shaft 123. The third slide slot 115 is configured as a movable yielding slot for the operating rod 124, and the conversion joint 130 can also be indirectly limited by the third slide slot 115, so that the third slide slot 115 and the limiting slide slot jointly limit the conversion joint 130.

[0104] The operating rod 124 may include a screw, and the screw portion of the operating rod 124 passes through the connector plate 110 and is threadedly connected to the first motion connector 121, and then is locked by a nut at the connection. The nut portion of the operating rod 124 and the first motion connector 121 are respectively located on both sides of the connector plate 110.

[0105] The nut portion of the operating rod 124 and the first motion connector 121 are respectively located on both sides of the connector plate 110. The first motion connector 121 and the second motion connector 122 are hidden under the connector plate 110. By pushing the first motion connector 121 through the operating rod 124, the first motion connector 121 and the second motion connector 122 can be prevented from moving and pinching the operator.

[0106] The present application also provides a filter connection assembly, which includes a joint adapter 100 and a filter connection device 200, and the filter connection device 200 is arranged on one side of the joint plate 110. The first motion connection member 121 and the second motion connection member 122 can be arranged between the joint plate 110 and the filter connection device 200. The filter connection device 200 is used to install the filter body 320.

[0107] The filter connection assembly includes a joint adapter 100 and a filter connection assembly 200. The filter connection assembly 200 is used to install the filter body 320, and the joint adapter 100 is used to connect the filter joint 310. The joint adapter 100 is compatible with more than two layouts of the filter joint 310. The joint adapter 100 is used in the filter connection assembly. The filter connection assembly is compatible with more than two filters 300, which reduces the replacement frequency of the filter connection assembly and reduces the risk of fluid contamination.

[0108] See also Figure 1 , Figure 2 and Fig.13As shown, the filter connection device 200 includes a support plate 210, a movable plate 220, a scissor brace 230 and a lifting assembly 240. The support plate 210 and the movable plate 220 are connected by the scissor brace 230. The joint adapter 100 is arranged on the side of the support plate 210 away from the movable plate 220. The filter 300 includes a first filter 300a and a second filter 300b, and the first filter 300a and the second filter 300b both include a filter joint 310 and a filter body 320, and the filter joint 310 is arranged at one end of the filter body 320. The movable plate 220 is used to install the filter body 320, and the lifting assembly 240 drives the movable plate 220 to approach or move away from the support plate 210, so that the filter joint 310 and the adapter joint 130 are connected or separated.

[0109] The filter body 320 is installed on the movable plate 220, and then the movable plate 220 is lifted to seal the filter joint 310 and the adapter joint 130, which makes it more convenient to install and remove the filter 300. At the same time, the support plate 210 and the movable plate 220 are locked by the lifting assembly 240, and the filter joint 310 and the adapter joint 130 are not easy to fall off, thereby improving the reliability of the sealing connection between the filter joint 310 and the adapter joint 130.

[0110] When the joint adapter 100 is connected to the filter connection device 200, the joint plate 110 and the support plate 210 are spaced apart. A support sleeve 410 may be provided between the joint plate 110 and the support plate 210, and the support sleeve 410 is assembled and connected to the support plate 210, and the support sleeve 410 is connected to the joint plate 110 by screws.

[0111] The first motion connector 121 and the second motion connector 122 are disposed between the support plate 210 and the connector plate 110. The step shaft 133 of the third adapter joint 130c is disposed between the support plate 210 and the connector plate 110. A cushioning structure may be provided on the side of the step shaft 133 of the third adapter joint 130c away from the first connection end 131, so that the three adapter joints 130 are of the same height, but the invention is not limited thereto. The height of the step shaft 133 of the third adapter joint 130c may also be greater than the height of the step shaft 133 of the first adapter joint 130a and the second adapter joint 130b, so that the three adapter joints 130 are of the same height.

[0112] The stepped shaft 133 of the third adapter joint 130c is raised by the raising structure, so as to limit the position of the third adapter joint 130c and reduce or eliminate the axial movement of the third adapter joint 130c.

[0113] It should be noted that the step shaft 133 of the third adapter joint 130c can also be movably arranged between the support plate 210 and the connector plate 110, and then other structures or filters 300 are used to make the three adapter joints 130 have the same height. When the step shaft 133 is arranged between the connector plate 110 and the support plate 210, and the first motion connector 121 and the second motion connector 122 are arranged between the step shaft 133 and the connector plate 110, a cushioning structure can also be arranged between the step shaft 133 of the third adapter joint 130c and the connector plate 110 for position limiting. When the step shaft 133 is arranged between the connector plate 110 and the support plate 210, and the first motion connector 121 and the second motion connector 122 drive the adapter joint 130 on the side of the connector plate 110 away from the support plate 210, the cushioning structure can also be cancelled.

[0114] The first motion connector 121 and the second motion connector 122 are installed between the joint plate 110 and the support plate 210 through the first rotating shaft 123. The first rotating shaft 123 may include a rotating shaft portion and an end cap portion, the end cap portion of the first rotating shaft 123 is located on one side of the joint plate 110, and the first motion connector 121 and the second motion connector 122 are located on the other side of the joint plate 110. The rotating shaft portion of the first rotating shaft 123 may also be provided with two retaining rings 420, and the first moving connector 121, the second moving connector 122 and the support plate 210 are located between the two retaining rings 420.

[0115] See also Figure 1 and Figure 2 As shown, a hollow structure is provided on the support plate 210 corresponding to the adapter joint 130, and the adapter joint 130 passes through the hollow structure to connect with the filter joint 310. The shape and position of the hollow structure correspond to the shape and position of the first slide groove 111, the second slide groove 112 and the joint insertion hole 113. The second sliding fitting portion 1321 of the adapter joint 130 is inserted into the hollow structure, and the second connecting portion 1322 of the adapter joint 130 is connected with the filter joint 310.

[0116] A hollow structure corresponding to the first slide groove 111, the second slide groove 112 and the joint insertion hole 113 is provided on the support plate 210, which facilitates the connection of the second connection part 1322 with the filter joint 310, and can limit the first adapter joint 130a and the second adapter joint 130b, so as to avoid the adapter joint 130 from deflecting and causing poor movement when the first motion connector 121 and the second motion connector 122 drive the adapter joint 130 to move in translation. A hollow structure corresponding to the joint insertion hole 113 is provided on the support plate 210, so as to limit the third adapter joint 130c.

[0117] See also Figure 2 , Fig.13 and Fig.14As shown, the support plate 210 includes a first main body 211 and first side plates 212 disposed on opposite sides of the first main body 211, the movable plate 220 includes a second main body 221 and second side plates 222 disposed on opposite sides of the second main body 221, and the scissor support 230 is connected to the first side plates 212 and the second side plates 222. An insertion groove is disposed on one side of the second main body 221, and the second main body 221 is located between the insertion groove and the second side plates 222 to form a guide rail 2211, and the filter body 320 of the second filter 300b has a mounting block 321, and the mounting block 321 is provided with a first guide groove 3211 adapted to the guide rail 2211.

[0118] When installing the second filter 300b, the filter body 320 of the second filter 300b is inserted into the guide rail 2211, and the lifting assembly 240 lifts the movable plate 220, and the second filter 300b follows the movable plate 220 to approach the support plate 210, so that the filter joint 310 and the adapter joint 130 are sealed and connected.

[0119] The filter body 320 of the second filter 300b and the movable plate 220 are assembled and connected through the guide rail 2211 and the first guide groove 3211, so the second filter 300b is easy to install and disassemble.

[0120] See also Fig.12 and Fig.13 As shown, the filter connecting device 200 also includes an expansion plate 250, which includes a third main body portion 251 and a third side plate portion 252 arranged on two opposite sides of the third main body portion 251, and an installation area of ​​the filter body 320 of the first filter 300a is formed between the two third side plate portions 252. The third side plate portion 252 has a second guide groove 2521 that cooperates with the guide rail 2211 at one end away from the third main body portion 251.

[0121] When installing the first filter 300a, the filter body 320 of the first filter 300a is arranged between the two third side plates 252, the third side plate 252 and the movable plate 220 are assembled and connected through the guide rail 2211 and the second guide groove 2521, and the lifting assembly 240 then lifts the movable plate 220, and the first filter 300a follows the movable plate 220 to approach the support plate 210, so that the filter joint 310 and the adapter joint 130 are sealed and connected.

[0122] The expansion plate 250 is provided to assemble and connect the first filter 300a with the movable plate 220, and the filter body 320 of the second filter 300b and the movable plate 220 are assembled and connected through the guide rail 2211 and the first guide groove 3211, so that the first filter 300a is easy to install and disassemble.

[0123] See also Fig.12 and Fig.15As shown, the filter connection device 200 further includes a conversion block 260, which is disposed on a side of the support plate 210 away from the adapter plate 110. The conversion block 260 includes a plurality of adapter holes 261, a first orifice of the adapter hole 261 is connected to the adapter connector 130, and a second orifice of the adapter hole 261 is connected to the filter connector 310 of the first filter 300a. The adapter hole 261 may be a tapered hole. The layout of the adapter hole 261 matches the layout of the filter connector 310 of the first filter 300a.

[0124] It is understandable that the corresponding adapter block can be configured according to the layout, pore size, etc. of the filter connector 310 of the filter to be connected.

[0125] The inner and outer diameters of the filter joints 310 of the first filter 300a and the second filter 300b are different. When the adapter joint 130 is adapted to the filter joint 310 of the second filter 300b, the adapter joint 130 cannot be adapted to the filter joint 310 of the first filter 300a.

[0126] The filter connecting device 200 also includes a conversion block 260, which seals the filter connector 310 of the first filter 300a and the adapter connector 130, solving the problem that the adapter connector 130 is difficult to adapt due to the different inner and outer diameters of the filter connectors 310 of the first filter 300a and the second filter 300b.

[0127] See also Fig.13 As shown, the lifting assembly 240 includes a rotating plate 241, a connecting plate 242, a second rotating shaft 243 and a stop pin 244. The two rotating plates 241 are arranged on opposite sides of the support plate 210. The rotating plate 241 and the support plate 210 are rotatably connected through the second rotating shaft 243. The rotating plate 241 is provided with a fourth slide groove 2411 that partially surrounds the second rotating shaft 243. The stop pin 244 passes through the fourth slide groove 2411 and is connected to the movable plate 220. The second rotating shaft 243 is arranged on the first side plate portion 212 of the support plate 210, and the stop pin 244 is arranged on the second side plate portion 222 of the movable plate 220. One side of the stop pin 244 has an end cap, and the end of the stop pin 244 away from the end cap is provided with a retaining ring 420. The second side plate portion 222 and the rotating plate 241 are located between the end cap of the stop pin 244 and the retaining ring 420. The connecting plate 242 connects the two rotating plates 241. The opening of the insertion slot of the movable plate 220 may be disposed on a side close to the rotating plate 241 .

[0128] Since the distances between the two ends of the fourth slide groove 2411 and the second rotating shaft 243 are different, when the two rotating plates 241 are rotated by the connecting plate 242, the limit pin 244 moves away from or close to the second rotating shaft 243 along the fourth slide groove 2411, thereby driving the movable plate 220 away from or close to the supporting plate 210, thereby realizing the lifting and lowering of the movable plate 220.

[0129] See also Fig.13 As shown, the scissors support 230 includes a first support rod 231, a second support rod 232 and a third rotating shaft 233, and the first support rod 231 and the second support rod 232 are cross-connected through the third rotating shaft 233. Waist holes are provided on the first side plate portion 212 and the second side plate portion 222, and the fourth rotating shaft 270 and the fifth rotating shaft 280 are respectively provided in the waist holes of the first side plate portion 212 and the second side plate portion 222. The first end of the first support rod 231 is connected to the first side plate portion 212 through the fourth rotating shaft 270, the second end of the first support rod 231 is connected to the second side plate portion 222 through the limit pin 244, the first end of the second support rod 232 is connected to the second side plate portion 222 through the fifth rotating shaft 280, and the second end of the second support rod 232 is connected to the first side plate portion 212 through the second rotating shaft 243.

[0130] The support plate 210 and the movable plate 220 are connected by the scissor struts 230 , which can prevent the movable plate 220 from flipping relative to the support plate 210 when the lifting assembly 240 lifts the movable plate 220 away from the side of the support plate 210.

[0131] See also Figure 12 to Figure 14 As shown, the filter connection device 200 further includes a locking slider 290, which is slidably disposed on one side of the connection plate 242. The locking slider 290 can slide on the connection plate 242 in a direction away from or close to the support plate 210. The locking slider 290 has a limiting structure 291 on one side close to the support plate 210, and the limiting structure 291 is used to engage with the mounting block 321 or the conversion block 260.

[0132] When the first filter 300a is connected to the filter connection assembly, the limiting structure 291 is engaged with the conversion block 260. The limiting structure 291 limits the conversion block 260 on the one hand and limits the connection plate 242 on the other hand to prevent the connection plate 242 from rotating, thereby preventing the adapter joint 130 and the filter joint 310 from being disengaged during use. When the second filter 300b is connected to the filter connection assembly, the limiting structure 291 is engaged with the mounting block 321. The limiting structure 291 limits the mounting block 321 on the one hand and limits the connection plate 242 on the other hand to prevent the connection plate 242 from rotating, thereby preventing the adapter joint 130 and the filter joint 310 from being disengaged during use.

[0133] The present application also provides a substrate processing device, which includes a filter connection assembly and a filter 300 , wherein a filter body 320 of the filter 300 is assembled and connected with a filter connection device 200 , and a filter connector 310 of the filter 300 is sealed and connected with an adapter connector 130 .

[0134] The substrate processing device may further include a nozzle, which is indirectly connected to the adapter 130 through a pipeline. The fluid filtered by the filter 300 is ejected from the nozzle to process the substrate. The substrates processed by the substrate processing device include: semiconductor wafers, glass substrates for photomasks, display substrates, and solar cell substrates.

[0135] In the substrate processing equipment, the filter connection assembly includes a joint adapter 100 and a filter connection device 200, the filter connection device 200 is used to install the filter body 320, and the joint adapter 100 is used to connect the filter joint 310. The joint adapter 100 is compatible with more than two layouts of the filter joint 310, and the joint adapter 100 is used in the filter connection assembly. The filter connection assembly is compatible with more than two filters 300, which reduces the replacement frequency of the filter connection assembly and reduces the risk of fluid contamination.

[0136] The terms "first", "second", etc. are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first", "second", etc. may explicitly or implicitly include one or more of the feature. In the description of this application, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0137] In this application, unless otherwise clearly specified and limited, the terms "assembly", "connection" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0138] In the description of this specification, the description with reference to the terms "some embodiments", "exemplarily", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.

[0139] Although the embodiments of the present application have been shown and described above, it can be understood that the above embodiments are exemplary and cannot be understood as limitations on the present application. Ordinary technicians in this field can change, modify, replace and modify the above embodiments within the scope of the present application. Therefore, any changes or modifications made in accordance with the claims and description of the present application should fall within the scope of the patent of this application.

Claims

1. A joint adapter device, characterized in that: include: A joint plate, including a limiting slide groove; A plurality of adapter joints, at least two movable adapter joints are inserted into the limiting slide groove, and the adapter joints can slide in the limiting slide groove, so that the plurality of adapter joints form a plurality of position matching relationships on the joint plate; The joint drive assembly includes a plurality of moving connectors, at least two of which can undergo relative movement, each of which is connected to an adapter connector, and the moving connector can drive the adapter connector connected thereto to slide in the limiting slide groove while moving itself.

2. The joint adapter device according to claim 1, characterized in that: The limiting slide groove includes a first slide groove and a second slide groove, the first end of the first slide groove is arranged closer to the first end of the second slide groove, the multiple adapter joints include a first adapter joint and a second adapter joint, and the multiple position matching relationships include a first state and a second state. In the first state, the first adapter joint is located at the second end of the first slide groove, and the second adapter joint is located at the first end of the second slide groove. In the second state, the first adapter joint is located at the first end of the first slide groove, and the second adapter joint is located at the second end of the second slide groove.

3. The joint adapter device according to claim 2, characterized in that: The multiple motion connectors include a first motion connector and a second motion connector. The first motion connector rotates to drive the first adapter joint connected thereto to slide along the first slide groove, and the second motion connector rotates to drive the second adapter joint connected thereto to slide along the second slide groove.

4. The joint adapter device according to claim 3, characterized in that: The first motion connector includes a first joint hole and a first shaft hole, the first joint hole and the first shaft hole are arranged at intervals, the second motion connector includes a second joint hole and a second shaft hole, the second joint hole and the second shaft hole are arranged at intervals, the first adapter joint is inserted into the first joint hole, the second adapter joint is inserted into the second joint hole, the joint drive assembly also includes a first rotating shaft, the first rotating shaft is arranged on the joint plate, and the first rotating shaft is inserted into the first shaft hole and the second shaft hole; The first motion connector and the second motion connector are configured as follows: the first motion connector rotates to drive the first adapter joint to slide along the first slide groove, and the first motion connector rotates to drive the second motion connector to rotate, so that the second motion connector drives the second adapter joint to slide along the second slide groove.

5. The joint adapter device according to claim 4, characterized in that: A reset groove is arranged between the second joint hole and the second shaft hole, and the reset groove is partially arranged around the first rotating shaft. A reset pin is arranged between the first joint hole and the first shaft hole, and the reset pin is inserted into the reset groove. When the first motion connector drives the first adapter connector to slide from the first end of the first slide groove to the second end of the first slide groove, the reset pin drives the second motion connector to rotate through the first end of the reset groove.

6. The joint adapter device according to claim 5, characterized in that: When the first motion connector drives the first adapter to slide from the second end of the first slide slot to the first end of the first slide slot, the reset pin drives the second motion connector to rotate through the second end of the reset slot; and / or A driving surface is provided on at least the first motion connection member, and a blocking surface is provided on at least the second motion connection member. When the first motion connection member drives the first adapter joint to slide from the second end of the first slide groove to the first end of the first slide groove, the driving surface pushes the blocking surface to drive the second motion connection member to rotate.

7. The joint adapter device according to claim 6, characterized in that: When the first motion connector drives the first adapter joint to slide from the second end of the first slide slot to the first end of the first slide slot, the reset pin drives the second motion connector to rotate through the second end of the reset slot, and when the first motion connector drives the first adapter joint to slide from the second end of the first slide slot to the first end of the first slide slot, the driving surface pushes the blocking surface to drive the second motion connector to rotate; The stroke of the second adapter joint is smaller than that of the first adapter joint. In the first state, the angle between the driving surface and the blocking surface is greater than 0°. In the second state, the reset pin and the second end of the reset groove form a gap.

8. The joint adapter device according to claim 4, characterized in that: The adapter joint comprises a first connection end, a second connection end and a stepped shaft, wherein the first connection end and the second connection end are arranged at two ends of the stepped shaft, the first connection end and the second connection end are communicated, and the first connection end is passed through the joint plate; The first motion connector and the second motion connector are arranged on one side of the joint plate, the second connecting end of the first adapter joint is passed through the first joint hole, the step shaft of the first adapter joint is located between the first motion connector and the joint plate, the second connecting end of the second adapter joint is passed through the second joint hole, and the step shaft of the second adapter joint is located between the second motion connector and the joint plate.

9. The joint adapter device according to claim 8, characterized in that: The joint drive assembly also includes an operating rod. The joint plate is also provided with a third sliding slot. The operating rod passes through the third sliding slot and is connected to an end of the first motion connector away from the first rotating shaft.

10. The joint adapter device according to claim 2, characterized in that: The first slide groove is connected to the second slide groove, and the connecting area of ​​the first slide groove and the second slide groove protrudes inward to form a limiting protrusion, and the limiting protrusion is used to limit the first adapter joint and the second adapter joint.

11. The joint adapter device according to claim 2, characterized in that: The adapter connector further includes a third adapter connector, the connector plate is provided with a connector jack, and the third adapter connector is inserted into the connector jack; In the first state, the first adapter connector, the second adapter connector and the third adapter connector are arranged along a first direction, and in the second state, the first adapter connector and the second adapter connector are arranged along a second direction, and the second adapter connector and the third adapter connector are arranged along a third direction, and an angle between the second direction and the third direction is 90±1°.

12. A filter connection assembly, characterized in that: include: The connector adapter device according to any one of claims 1 to 11; The filter connecting device is arranged on one side of the connector plate.

13. The filter connection assembly according to claim 12, characterized in that: The filter connecting device includes a support plate, a movable plate, a scissors strut and a lifting assembly, the support plate and the movable plate are connected by the scissors strut, the joint adapter device is arranged on the side of the support plate away from the movable plate, the multiple motion connectors include a first motion connector and a second motion connector, the first motion connector and the second motion connector are respectively connected to a transition connector, the first motion connector and the second motion connector are arranged between the support plate and the connector plate, the filter includes a first filter and a second filter, the first filter and the second filter both include a filter body and a filter connector, the filter connector is arranged at one end of the filter body, the movable plate is used to install the filter body, and the lifting assembly drives the movable plate to approach or move away from the support plate, so that the filter connector and the transition connector are connected or separated.

14. The filter connection assembly according to claim 13, characterized in that: A hollow structure is provided on the support plate corresponding to the adapter joint, and the adapter joint passes through the hollow structure to be connected with the filter joint.

15. The filter connection assembly according to claim 13, characterized in that: The support plate includes a first main body portion and a first side plate portion arranged on two opposite sides of the first main body portion, the movable plate includes a second main body portion and a second side plate portion arranged on two opposite sides of the second main body portion, the scissors strut is connected to the first side plate portion and the second side plate portion, an insertion groove is arranged on one side of the second main body portion, the second main body portion is located between the insertion groove and the second side plate portion to form a guide rail, and the filter body of the second filter has a first guide groove adapted to the guide rail.

16. The filter connection assembly according to claim 15, characterized in that The filter connecting device also includes an expansion plate, which includes a third main body and third side plate portions arranged on opposite sides of the third main body, and an installation area of ​​the filter body of the first filter is formed between the two third side plate portions, and the third side plate portion has a second guide groove that cooperates with the guide rail.

17. The filter connection assembly according to claim 13, characterized in that: The filter connecting device also includes a conversion block, which is arranged on a side of the support plate away from the connector plate. The conversion block includes a plurality of adapter holes, a first orifice of the adapter hole is connected to the adapter connector, and a second orifice of the adapter hole is connected to the filter connector of the first filter.

18. The filter connection assembly according to claim 13, characterized in that: The lifting assembly includes a rotating plate, a connecting plate, a second rotating shaft and a limit pin. The two rotating plates are arranged on opposite sides of the supporting plate. The rotating plate and the supporting plate are rotatably connected through the second rotating shaft. A fourth sliding groove partially surrounding the second rotating shaft is arranged on the rotating plate. The limit pin passes through the fourth sliding groove and is connected to the movable plate. The connecting plate connects the two rotating plates.

19. A substrate processing device, characterized in that: include: The filter connection assembly according to any one of claims 12 to 18; The filter is assembled and connected with the filter connecting device.

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