Mechanical arm for acid replacement based on visual system and system thereof

Abstract

The invention discloses an acid changing mechanical arm based on a visual system and a system thereof. The acid changing mechanical arm comprises a support, a bottom frame is horizontally arranged at the bottom end of the support, and clamping mechanisms are arranged in the two sides of the bottom frame. According to the mechanical arm, the CCD camera is arranged below the middle of the bottom frame, the position of the acid container can be accurately positioned through the visual processing system, in the acid replacing operation, the CCD camera collects images in the cleaning machine, coordinates and the outline of the acid container are accurately recognized through an advanced image processing algorithm, and the acid container can be accurately replaced in any complex environment. The mechanical arm can be ensured to accurately move to the position above the acid container for operation, the positioning precision is greatly improved, and deviation in the acid container grabbing and carrying process is effectively avoided.

Description

Technical Field

[0001] The present invention relates to the field of robotic arms, and in particular to a robotic arm for acid exchange based on a visual system and a system thereof. Background Art

[0002] In many industrial production processes, acid is widely used in cleaning, etching and other process links. As production progresses, the acid will gradually lose its effectiveness or become contaminated and need to be replaced in a timely manner. For example, in the semiconductor chip manufacturing process, acid is used to clean and etch silicon wafers. The purity and performance of the acid directly affect the quality of the chip.

[0003] Traditional acid replacement methods often rely on manual operation, where operators need to enter the work area, manually remove the old acid container, and then put the new acid container in place. This manual acid replacement method has many problems. It is not only inefficient, but also poses a potential threat to the safety of operators due to the corrosive nature of the acid.

[0004] At present, there are already some equipment or technical means for assisting acid exchange operations. For example, some simple mechanical devices can realize the grasping and carrying of acid containers, but these devices often lack precise positioning capabilities. They may use simple mechanical limiters or rough sensors to determine the position of the acid container, which is prone to deviations in actual operation. Moreover, the clamping mechanism design of these devices is not flexible enough and has poor adaptability to acid containers of different sizes or shapes. In addition, the existing equipment is not flexible enough during operation and cannot be effectively adjusted according to the actual working environment. For example, it is not possible to easily adjust the grasping angle to adapt to the special placement of the acid container. Summary of the invention

[0005] The object of the present invention is to provide an acid-changing robot arm and a system thereof based on a vision system to solve the problems raised in the above-mentioned background technology.

[0006] To achieve the above object, the present invention provides the following technical solutions:

[0007] A robot arm for acid exchange based on a vision system, comprising:

[0008] A bracket, wherein a base frame is horizontally arranged at the bottom end of the bracket, and clamping mechanisms are arranged inside the two sides of the base frame;

[0009] A driving mechanism is provided on the inner side below the bracket, and the driving mechanism cooperates with the clamping mechanism;

[0010] A hanger is provided at the top of the bracket, and a rotating mechanism is provided between the hanger and the bracket;

[0011] A mounting frame is arranged on the right side of the hanger, and a lifting mechanism is arranged between the mounting frame and the hanger;

[0012] A positioning mechanism is arranged below the middle portion of the base frame.

[0013] In the present invention, the clamping mechanism includes a movable groove 2, which is opened inside both sides of the base frame, a fixed seat is arranged at the inner wall of the movable groove 2 at one end away from the base frame, and a movable seat is movably arranged on the other side of the movable groove 2, and a connecting rod 1 and a connecting rod 2 are movably arranged on the same side of the fixed seat and the movable seat, respectively, and the same-directional ends of the connecting rod 1 and the connecting rod 2 are movably connected by a rotating shaft, and a clamping claw is vertically arranged at the bottom end of the movable seat.

[0014] In the present invention, the clamping mechanism further comprises guide grooves, which are penetrated and opened at the lower outer walls on both sides of the base frame, and movable blocks matching the guide grooves are arranged at the outer walls on both sides of the upper end of the clamping claws.

[0015] In the present invention, the clamping mechanism further includes a fixed block, which is fixedly installed on the top of the movable seat, and a spring is arranged on one side of the movable groove 2 close to the movable seat, and the other end of the spring is connected to the fixed block.

[0016] In the present invention, the driving mechanism includes a movable groove 1, which is opened on the inner side of the lower part of the bracket, and a motor 2 is arranged on the inner side of the upper end of the bracket close to the movable groove 1. The output shaft of the motor 2 is fixedly connected to the screw rod, and a pressure plate is movably installed on the outside of the screw rod. The lower end surfaces on both sides of the pressure plate are movably connected to the upper end surfaces on the same side of the connecting rod 1 and the connecting rod 2.

[0017] In the present invention, the driving mechanism further comprises a rod sleeve, which is symmetrically arranged at the outer walls on both sides of the middle part of the bracket, and guide rods movably sleeved with the rod sleeve are arranged on both sides of the top end of the pressure plate.

[0018] In the present invention, the rotating mechanism includes a motor 1, which is fixedly installed at the lower middle part of the hanger, and the output shaft of the motor 1 is fixedly connected to the bracket. A lifting cylinder 1 is symmetrically arranged on both sides of the hanger close to the motor 1, and positioning frames are arranged at the four corners of the top end of the bracket. A positioning pin matching the positioning frame is arranged at the output shaft end of the lifting cylinder 1.

[0019] In the present invention, the lifting mechanism includes a lifting cylinder 2, which is fixedly installed on the left side of the upper end of the mounting frame, and a connecting member is provided at the output shaft end of the lifting cylinder 2, one end of the connecting member is fixedly connected to the hanger, and the other end of the connecting member is slidably connected to the inner wall of the mounting frame.

[0020] In the present invention, the positioning mechanism comprises a mounting groove, which is provided at the lower middle portion of the base frame, and a CCD camera is fixedly installed inside the mounting groove.

[0021] A system for an acid-changing robot arm based on a vision system, comprising a vision processing system and a control system;

[0022] The visual processing system is composed of an image acquisition and processing module and an acid detection and analysis submodule. The image acquisition and processing module is used to acquire image information inside the cleaning machine. The image acquisition and processing module is remotely connected to a CCD camera. The acid detection and analysis submodule is used to detect the acid condition inside the acid container. The acid detection and analysis submodule is remotely connected to the operating system of the cleaning machine.

[0023] The control system consists of a motion control subsystem and a state monitoring and feedback subsystem. The control system is used to receive position information from the visual processing system and control the actions of motor one, motor two, lifting cylinder one and lifting cylinder two. The state monitoring and feedback subsystem is used to monitor the working status of each component of the robotic arm in real time.

[0024] Compared with the prior art, the present invention has the following beneficial effects:

[0025] 1. The robot arm of the present invention is provided with a CCD camera at the lower middle part of the chassis, and the position of the acid container can be accurately located through the visual processing system. During the acid changing operation, the CCD camera collects images inside the cleaning machine, and uses advanced image processing algorithms to accurately identify the coordinates and contours of the acid container. No matter what complex environment the acid container is in, it can ensure that the robot arm is accurately moved to the top of the acid container for operation, which greatly improves the positioning accuracy and effectively avoids deviations in the process of grabbing and carrying the acid container;

[0026] 2. The cooperation of the positioning frame arranged at the four corners of the top of the bracket of the present invention and the positioning pin at the output shaft end of the lifting cylinder provides accurate positioning for the rotation operation of the robot arm. When the angle of the clamping claw needs to be adjusted, the positioning pin is withdrawn from the positioning frame. After the robot arm rotates, the positioning pin can be accurately plugged and fixed with the positioning frame, thereby ensuring the position accuracy of the robot arm in different operating states and improving the accuracy of the entire acid changing operation;

[0027] 3. The coordinated work of the connecting rod 1, the connecting rod 2, the movable seat, the clamping claw and the spring in the clamping mechanism of the present invention can achieve a stable clamping function. When the motor 2 drives the screw to rotate and the pressure plate presses down the connection between the connecting rod 1 and the connecting rod 2, the clamping claw can firmly clamp the two sides of the acid container through the lever principle. The setting of the spring makes the clamping claw have a certain elastic buffer during the clamping process, which can not only ensure the clamping force, but also avoid damage to the acid container due to excessive clamping. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 This is a schematic diagram of the overall front view structure of an acid-changing robot arm based on a visual system of the present invention;

[0029] Figure 2 This is a schematic diagram of the overall cross-sectional structure of an acid-changing robotic arm based on a visual system of the present invention;

[0030] Figure 3 A robot arm for acid exchange based on a visual system of the present invention Figure 2 An enlarged schematic diagram of A in FIG.

[0031] Figure 4 A robot arm for acid exchange based on a visual system of the present invention Figure 2 An enlarged schematic diagram of point B in FIG.

[0032] Figure 5 A robot arm for acid exchange based on a visual system of the present invention Figure 2 An enlarged schematic diagram of C in FIG.

[0033] Figure 6 A robot arm for acid exchange based on a visual system of the present invention Figure 2 An enlarged schematic diagram of point D in FIG.

[0034] In the figure: 1. bracket; 2. base frame; 3. hanger; 4. mounting frame; 5. movable slot 2; 6. fixed seat; 7. movable seat; 8. connecting rod 1; 9. connecting rod 2; 10. clamping claw; 11. guide slot; 12. movable block; 13. fixed block; 14. spring; 15. movable slot 1; 16. motor 2; 17. screw rod; 18. pressure plate; 19. rod sleeve; 20. guide rod; 21. motor 1; 22. lifting cylinder 1; 23. positioning pin; 24. lifting cylinder 2; 25. connecting piece; 26. mounting slot; 27. CCD camera; 28. positioning frame. DETAILED DESCRIPTION

[0035] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0036] like Figure 1-6 As shown, the present invention provides a technical solution:

[0037] A robot arm for acid exchange based on a visual system comprises a bracket 1, a bottom frame 2 is horizontally arranged at the bottom end of the bracket 1, a clamping mechanism is arranged inside the two sides of the bottom frame 2, the clamping mechanism comprises a movable groove 2 5, the movable groove 2 5 is provided inside both sides of the bottom frame 2, a fixed seat 6 is arranged at the inner wall of one end of the movable groove 2 5 away from the bottom frame 2, a movable seat 7 is movably arranged on the other side of the movable groove 2 5, a connecting rod 1 8 and a connecting rod 2 9 are movably arranged on the same side of the fixed seat 6 and the movable seat 7, and the connecting rod 1 8 and the connecting rod 2 9 are respectively arranged. The same-direction end of the movable seat 7 is movably connected by a rotating shaft, a clamping claw 10 is vertically arranged at the bottom end of the movable seat 7, and the clamping mechanism also includes a guide groove 11, and the guide grooves 11 are penetrated and opened at the lower outer walls of both sides of the base frame 2, and movable blocks 12 matching the guide grooves 11 are arranged at the outer walls of both sides of the upper end of the clamping claw 10. The clamping mechanism further includes a fixed block 13, and the fixed block 13 is fixedly installed at the top of the movable seat 7, and a spring 14 is arranged on one side of the movable groove 25 close to the movable seat 7, and the other end of the spring 14 is connected to the fixed block 13;

[0038] A driving mechanism is arranged on the inner side of the lower part of the bracket 1, and the driving mechanism cooperates with the clamping mechanism. The driving mechanism includes a movable groove 15, and the movable groove 15 is opened on the inner side of the lower part of the bracket 1. A motor 2 16 is arranged on the inner side of the upper end of the bracket 1 near the movable groove 15. The output shaft of the motor 2 16 is fixedly connected to the screw rod 17, and a pressing plate 18 is movably installed outside the screw rod 17. The lower end surfaces on both sides of the pressing plate 18 are movably connected to the upper end surfaces on the same side of the connecting rod 1 8 and the connecting rod 2 9. The driving mechanism also includes a rod sleeve 19, and the rod sleeves 19 are symmetrically arranged on the outer walls on both sides of the middle part of the bracket 1, and guide rods 20 movably sleeved with the rod sleeves 19 are arranged on both sides of the top of the pressing plate 18.

[0039] A hanger 3 is arranged at the top of the bracket 1, and a rotating mechanism is arranged between the hanger 3 and the bracket 1, the rotating mechanism includes a motor 21, the motor 21 is fixedly installed at the lower middle part of the hanger 3, the output shaft of the motor 21 is fixedly connected to the bracket 1, and a lifting cylinder 22 is symmetrically arranged on both sides of the hanger 3 close to the motor 21, and a positioning frame 28 is arranged at the four corners of the top of the bracket 1, and a positioning pin 23 matching the positioning frame 28 is arranged at the output shaft end of the lifting cylinder 22;

[0040] A mounting frame 4 is arranged outside the right side of the hanger 3, and a lifting mechanism is arranged between the mounting frame 4 and the hanger 3. The lifting mechanism includes a second lifting cylinder 24. The second lifting cylinder 24 is fixedly installed on the left side of the upper end of the mounting frame 4. A connecting member 25 is arranged at the output shaft end of the second lifting cylinder 24. One end of the connecting member 25 is fixedly connected to the hanger 3, and the other end of the connecting member 25 is slidably connected to the inner wall of the mounting frame 4.

[0041] A positioning mechanism is provided at the lower middle portion of the base frame 2 , and the positioning mechanism includes a mounting groove 26 . The mounting groove 26 is provided at the lower middle portion of the base frame 2 , and a CCD camera 27 is fixedly installed inside the mounting groove 26 .

[0042] In this embodiment, the robot arm is provided with a CCD camera 27 at the lower middle part of the base frame 2, which can accurately locate the position of the acid container. When replacing the acid container, the CCD camera 27 can accurately identify the position of the acid container in the single-chip cleaning machine, ensuring that the robot arm can accurately move above the acid container to operate. For example, in the complex internal environment of the cleaning machine, the acid container may be partially blocked by other components or placed in a specific narrow space. The CCD camera 27 can accurately determine the coordinates of the acid container through image recognition technology to avoid deviation of the robot arm during the grasping process.

[0043] The cooperation between the positioning frame 28 arranged at the four corners of the top end of the bracket 1 and the positioning pin 23 at the output shaft end of the lifting cylinder 22 provides precise positioning for the rotation operation of the robot arm. When the angle of the clamping jaw 10 needs to be adjusted, the positioning pin 23 withdraws from the positioning frame 28. After the robot arm rotates, the positioning pin 23 can be accurately plugged and fixed with the positioning frame 28, thereby ensuring the position accuracy of the robot arm in different operating states and improving the accuracy of the entire acid changing operation.

[0044] The coordinated work of the connecting rod 1 8, the connecting rod 2 9, the movable seat 7, the clamping jaw 10 and the spring 14 in the clamping mechanism can achieve a stable clamping function. When the motor 2 16 drives the screw 17 to rotate and the pressure plate 18 presses down the connection between the connecting rod 1 8 and the connecting rod 2 9, the clamping jaw 10 can firmly clamp the two sides of the acid container through the lever principle. The setting of the spring 14 makes the clamping jaw 10 have a certain elastic buffer during the clamping process, which can not only ensure the clamping force, but also avoid damage to the acid container due to excessive clamping.

[0045] Working principle: When replacing the acid container, the horizontal moving component configured inside the single-chip cleaning machine controls the mounting frame 4 to move toward the position of the acid container, and the position of the acid container is located by the CCD camera 27. When the CCD camera 27 is located directly above the acid container, it detects whether the acid liquid inside the acid container needs to be replaced. If it needs to be replaced, the lifting cylinder 24 is started. After the lifting cylinder 24 is started, the connecting piece 25 is driven to descend, and the connecting piece 25 drives the hanger 3 on one side to descend synchronously. The hanger 3 drives the bracket 1 to descend, and the bracket 1 drives the two clamps 10 to descend to the outside of the two sides of the acid container. At this time, the motor 2 16 is started, and the motor 2 16 drives the screw 17 to rotate. After the screw 17 rotates, it drives the pressure plate 18 to descend linearly. After the pressure plate 18 descends By pressing the connection between connecting rod 1 8 and connecting rod 2 9, connecting rod 1 8 drives the other end of connecting rod 2 9 to push movable seat 7 through lever action. At this time, movable seat 7 drives clamping claws 10 to clamp on both sides of the acid container, and then controls the lifting of the acid container through lifting cylinder 2 24 again, and is controlled by the horizontal moving component configured inside the single-chip cleaning machine to move to the replacement point and put it back after replacement. When in use, this mechanical arm can also adjust the angle of the clamping claw 10. During adjustment, start lifting cylinder 1 22, which drives the positioning pin 23 to withdraw from the positioning frame 28, and then starts motor 1 21. Motor 1 21 drives the bracket 1 to rotate an angle and then stops, and then drives lifting cylinder 1 22 to control the positioning pin 23 to be positioned, plugged and fixed with the positioning frame 28.

[0046] A system for an acid-changing robot arm based on a vision system, comprising a vision processing system and a control system;

[0047] The visual processing system is composed of an image acquisition and processing module and an acid detection and analysis submodule. The image acquisition and processing module is used to acquire image information inside the cleaning machine. The image acquisition and processing module is remotely connected to a CCD camera. The acid detection and analysis submodule is used to detect the acid condition inside the acid container. The acid detection and analysis submodule is remotely connected to the operating system of the cleaning machine.

[0048] Specifically, the CCD camera transmits the collected image data to the module, which uses image processing algorithms to pre-process the image, such as noise reduction and contrast enhancement. Then, it uses a deep learning-based target detection algorithm to identify the position and outline of the acid container in the image, thereby being able to quickly and accurately locate the position of the acid container in the complex internal image of the cleaning machine.

[0049] Furthermore, the acid detection and analysis submodule determines whether the acid needs to be replaced by analyzing the color, transparency and other characteristics of the acid. For some acids with color changes, when the color reaches a certain threshold, it is determined that the acid needs to be replaced. The submodule also communicates with the control system of the cleaning machine to obtain information such as the acid usage time and number of cleanings, and comprehensively judges the need to replace the acid.

[0050] The control system is composed of a motion control subsystem and a state monitoring and feedback subsystem. The control system is used to receive position information from the visual processing system and control the actions of motor 1, motor 2, lifting cylinder 1 and lifting cylinder 2. The state monitoring and feedback subsystem is used to monitor the working status of each component of the robotic arm in real time.

[0051] Specifically, the motion control subsystem calculates the motion trajectory of each joint of the robotic arm based on the position of the acid container determined by the CCD camera, controls the rotation angles of motor one and motor two, and the telescopic lengths of lifting cylinder one and lifting cylinder two, thereby enabling the robotic arm to accurately move to the top of the acid container, clamp the acid container, lift the acid container, and adjust the angle of the gripper.

[0052] Furthermore, by installing sensors on motors, cylinders and other components (such as motor current sensors, cylinder stroke sensors, etc.), the operating data of the components can be obtained, including monitoring the current of motor 2. When the current increases abnormally, it means that the screw is obstructed, and the system will sound an alarm and stop operating. At the same time, the subsystem will feedback the status information of the robot arm to the host computer or operator so as to timely troubleshoot or adjust the operating strategy.

[0053] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0054] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A robot arm for acid exchange based on a visual system, characterized in that: include A bracket (1), wherein a base frame (2) is horizontally arranged at the bottom end of the bracket (1), and clamping mechanisms are arranged inside both sides of the base frame (2); A driving mechanism is provided on the inner side of the lower side of the bracket (1), and the driving mechanism cooperates with the clamping mechanism; A hanger (3) is provided at the top end of the support (1), and a rotating mechanism is provided between the hanger (3) and the support (1); A mounting frame (4) is arranged on the right side of the hanger (3), and a lifting mechanism is arranged between the mounting frame (4) and the hanger (3); A positioning mechanism is arranged below the middle of the base frame (2).

2. The acid-changing robot arm based on a visual system according to claim 1, characterized in that: The clamping mechanism comprises a movable groove (5), wherein the movable groove (5) is provided inside both sides of the base frame (2), a fixed seat (6) is provided at the inner wall of one end of the movable groove (5) away from the base frame (2), a movable seat (7) is movably provided on the other side of the movable groove (5), a connecting rod (8) and a connecting rod (9) are movably provided on the same side of the fixed seat (6) and the movable seat (7), respectively, the same end of the connecting rod (8) and the connecting rod (9) are movably connected via a rotating shaft, and a clamping claw (10) is vertically provided at the bottom end of the movable seat (7).

3. The acid-changing robot arm based on a visual system according to claim 2, characterized in that: The clamping mechanism also includes a guide groove (11), the guide groove (11) is penetrated and opened at the lower outer walls on both sides of the base frame (2), and movable blocks (12) matching the guide groove (11) are arranged at the outer walls on both sides of the upper end of the clamping claw (10).

4. The acid-changing robot arm based on a visual system according to claim 3, characterized in that: The clamping mechanism further comprises a fixed block (13), the fixed block (13) is fixedly mounted on the top of the movable seat (7), a spring (14) is arranged on one side of the movable groove (5) close to the movable seat (7), and the other end of the spring (14) is connected to the fixed block (13).

5. The acid-changing robot arm based on a visual system according to claim 1, characterized in that: The driving mechanism comprises a movable groove (15), the movable groove (15) is provided on the inner side of the lower side of the bracket (1), a motor (16) is provided on the inner side of the upper end of the bracket (1) close to the movable groove (15), the output shaft of the motor (16) is fixedly connected to the screw rod (17), a pressure plate (18) is movably installed outside the screw rod (17), and the lower end surfaces on both sides of the pressure plate (18) are movably connected to the upper end surfaces of the connecting rod (8) and the connecting rod (9) on the same side.

6. The acid-changing robot arm based on a visual system according to claim 5, characterized in that: The driving mechanism also includes a rod sleeve (19) which is symmetrically arranged on the outer walls on both sides of the middle part of the bracket (1), and guide rods (20) movably sleeved with the rod sleeve (19) are arranged on both sides of the top end of the pressure plate (18).

7. The acid-changing robot arm based on a visual system according to claim 1, characterized in that: The rotating mechanism comprises a motor (21), the motor (21) is fixedly mounted at the lower middle part of the hanger (3), the output shaft of the motor (21) is fixedly connected to the bracket (1), a lifting cylinder (22) is symmetrically arranged on both sides of the hanger (3) close to the motor (21), a positioning frame (28) is arranged at the four corners of the top end of the bracket (1), and a positioning pin (23) matching the positioning frame (28) is arranged at the output shaft end of the lifting cylinder (22).

8. The acid-changing robot arm based on a visual system according to claim 1, characterized in that: The lifting mechanism comprises a second lifting cylinder (24), which is fixedly mounted on the left side of the upper end of the mounting frame (4), and a connecting member (25) is arranged at the output shaft end of the second lifting cylinder (24), one end of the connecting member (25) is fixedly connected to the hanger (3), and the other end of the connecting member (25) is slidably connected to the inner wall of the mounting frame (4).

9. The acid-changing robot arm based on a visual system according to claim 1, characterized in that: The positioning mechanism comprises a mounting groove (26), the mounting groove (26) is provided at the lower middle portion of the base frame (2), and a CCD camera (27) is fixedly mounted inside the mounting groove (26).

10. The system of the acid changing robot arm based on the vision system according to claim 1, characterized in that: Including visual processing system and control system; The visual processing system is composed of an image acquisition and processing module and an acid detection and analysis submodule. The image acquisition and processing module is used to acquire image information inside the cleaning machine. The image acquisition and processing module is remotely connected to a CCD camera. The acid detection and analysis submodule is used to detect the acid condition inside the acid container. The acid detection and analysis submodule is remotely connected to the operating system of the cleaning machine. The control system consists of a motion control subsystem and a state monitoring and feedback subsystem. The control system is used to receive position information from the visual processing system and control the actions of motor one, motor two, lifting cylinder one and lifting cylinder two. The state monitoring and feedback subsystem is used to monitor the working status of each component of the robotic arm in real time.

Images