HVPE equipment capable of ensuring thermal field uniformity

Abstract

The invention discloses HVPE equipment capable of ensuring thermal field uniformity, and relates to the technical field of HVPE equipment, the HVPE equipment comprises a functional base, an inner shell is fixedly mounted at the top of the functional base, a furnace top cover is fixedly mounted at the top of the inner shell, and a first temperature control box, a second temperature control box and a third temperature control box fixedly sleeve the outer surface of the inner shell in sequence from bottom to top; and wind power circulation assemblies are fixedly mounted on the right sides of the second temperature control box and the third temperature control box. According to the HVPE equipment capable of guaranteeing the uniformity of the thermal field, sectional temperature control is adopted for the inner shell, the temperatures of different areas in the inner shell are kept uniform and stable, automatic temperature control and adjustment are achieved, the first temperature control box, the second temperature control box and the third temperature control box form independent temperature control areas, then the uniformity and stability of the temperature in the inner shell are kept, and the temperature control efficiency is improved. And through flowing gas, thermal fields in the first temperature control box, the second temperature control box and the third temperature control box are more uniform, and then the heating uniformity of the inner shell is improved through heat exchange.

Description

Technical Field

[0001] The invention relates to the technical field of HVPE equipment, and in particular to a HVPE equipment capable of ensuring the uniformity of a thermal field. Background Art

[0002] HVPE equipment is a professional equipment used for hydride vapor phase epitaxy. It grows thin film materials with specific lattice structures on substrates through gas phase chemical reactions. In recent years, with the rapid development of semiconductor growth processes and equipment manufacturing technologies, the requirements for temperature field control during semiconductor material growth have become increasingly high. In the growth of semiconductor materials, especially in the hydride vapor phase epitaxy of gallium nitride, resistance heating furnaces are widely used. During the material heating process, the temperature of the heating furnace must be precisely controlled to keep the temperature field constant.

[0003] At present, when growing large-size GaN thick film materials, due to the increase in equipment volume and substrate size, flow field eddies will be formed in the reaction chamber of the HVPE growth equipment, which will aggravate parasitic reactions and make it more difficult to grow large-size GaN substrates uniformly, stably and with high quality. In addition, the existing heating furnaces have defects such as poor temperature uniformity (large temperature gradient), low heating control accuracy, and unreasonable temperature control methods. In the temperature control process, there are problems such as low temperature control accuracy and slow temperature control feedback. In order to solve the shortcomings of the existing technology, we propose an HVPE device that can ensure thermal field uniformity. Summary of the invention

[0004] The main purpose of the present invention is to provide a HVPE device that can ensure the uniformity of the thermal field, which can effectively solve the problems in the background technology.

[0005] To achieve the above object, the technical solution adopted by the present invention is:

[0006] A HVPE device capable of ensuring uniformity of thermal field, comprising a functional base, an inner shell fixedly mounted on the top of the functional base, a furnace top cover fixedly mounted on the top of the inner shell, a first temperature control box, a second temperature control box and a third temperature control box fixedly sleeved on the outer surface of the inner shell in sequence from bottom to top, a wind circulation component fixedly mounted on the right side of the first temperature control box, the second temperature control box and the third temperature control box, and a temperature control heater fixedly connected inside the first temperature control box, the second temperature control box and the third temperature control box;

[0007] The first temperature control box includes a bottom shell, the inner wall of the bottom shell is fixedly connected with a first insulation layer, the bottom shell is fixedly sleeved on the lower end of the outer surface of the inner shell, the left side of the bottom shell is fixedly connected with a first temperature control adjustment box, the upper end of the first temperature control adjustment box is fixedly installed with a first temperature sensor, and one end of the first temperature sensor is located between the first insulation layer and the inner shell, the first temperature control adjustment box is provided with a first thyristor power regulator and a first transformer, the first thyristor power regulator is electrically connected to the first temperature sensor and the first transformer respectively, and the first transformer is electrically connected to the temperature control heater inside the bottom shell.

[0008] Preferably, the second temperature-controlled box includes a second outer shell, an inner wall of the second outer shell is fixedly connected to a second insulation layer, a second temperature-controlled adjustment box is fixedly installed on the left side of the second outer shell, a second temperature sensor is fixedly installed on the upper end of the interior of the second temperature-controlled adjustment box, and one end of the second temperature sensor is located between the second outer shell and the inner shell, a second thyristor power regulator and a second transformer are arranged inside the second temperature-controlled adjustment box, the second thyristor power regulator is electrically connected to the second temperature sensor and the second transformer, respectively, and the second transformer is electrically connected to the temperature-controlled heater inside the second outer shell.

[0009] Preferably, an adjusting motor is fixedly connected to the lower end of the second temperature control adjustment box, a bevel gear is fixedly installed on one side of the adjusting motor, and the bevel gear is rotatably installed inside the second outer shell, an adjusting component is rotatably installed on one side of the bottom surface of the second outer shell close to the inner wall, and a connecting groove is provided on the bottom surface of the second outer shell, the second outer shell is fixedly sleeved on the middle end of the outer surface of the inner shell, and the bottom of the second outer shell is fixedly connected to the top of the bottom outer shell, and is connected to the inside of the bottom outer shell through the connecting groove.

[0010] Preferably, the adjustment assembly includes a gear ring, a rotating ring is fixedly mounted on the lower end of the inner wall of the gear ring, a plurality of connecting grooves are opened inside the rotating ring, the connecting grooves are rotatably mounted on the lower end of the second shell, the outer surface of the bevel gear is meshed with the top of the gear ring, and the connecting grooves are the same size as the connecting grooves.

[0011] Preferably, the internal structure of the third temperature-controlled box is the same as that of the second temperature-controlled box, the third temperature-controlled box is fixedly sleeved on the upper end of the outer surface of the inner shell, the bottom of the third temperature-controlled box is fixedly connected to the top of the second temperature-controlled box, and is communicated with the second temperature-controlled box.

[0012] Preferably, the temperature control heater comprises a plurality of connecting frames, the inner walls of the connecting frames are fixedly connected with a plurality of resistance heating tubes, the resistance heating tubes are composed of a plurality of "V"-shaped resistance wires, and the plurality of resistance heating tubes are connected in series.

[0013] Preferably, the number of the wind circulation components is three, and they are respectively fixedly installed on the right sides of the first temperature control box, the second temperature control box and the third temperature control box, the wind circulation component includes a fixed frame, a gas circulation pump is fixedly installed on the top of the fixed frame, an air outlet nozzle and an air inlet nozzle are fixedly installed on both ends of the left side of the fixed frame, a guide plate is fixedly installed on the left side of the air outlet nozzle and the air inlet nozzle, one end of the gas circulation pump is fixedly connected to an air inlet pipe, one end of the air inlet pipe is fixedly connected to one end of the air inlet nozzle, the top of the gas circulation pump is fixedly connected to an air outlet pipe, and one end of the air outlet pipe is fixedly connected to the air outlet nozzle.

[0014] Preferably, the guide plate is arc-shaped, and the air outlet nozzle and the air inlet nozzle are respectively located on both sides of the back side of the guide plate.

[0015] Preferably, the functional base includes a base box, a fixed sleeve is fixedly installed on the top of the base box, a top frame is fixedly installed on the top of the fixed sleeve, a heating plate is fixedly installed inside the top frame, a rotating motor is fixedly installed inside the base box, a rotating shaft is fixedly installed on the top of the rotating motor, a graphite tray is fixedly installed on the top of the rotating shaft, a groove is opened on the top of the graphite tray, the rotating shaft is rotatably installed inside the fixed sleeve, and the graphite tray is rotatably installed on the top of the top frame.

[0016] Preferably, there are multiple grooves, which are evenly distributed in a circular shape on the top of the graphite tray.

[0017] Compared with the prior art, the present invention has the following beneficial effects:

[0018] 1. In the present invention, a first temperature control box, a second temperature control box and a third temperature control box are sequentially arranged on the outer surface of the inner shell from bottom to top, and a segmented temperature control is adopted for the inner shell, so that the temperature of different areas inside the inner shell is kept uniform and stable, thereby avoiding a large temperature gradient inside the inner shell and poor temperature uniformity due to the large volume of the inner shell.

[0019] 2. In the present invention, the temperature between the bottom outer shell and the inner shell is monitored by setting a first temperature sensor, so that the first temperature sensor controls the operation of the first thyristor power regulator through an electrical signal, adjusts the first transformer, and then controls the working state of the temperature control heater, thereby realizing automatic temperature control and adjustment. The first temperature control box, the second temperature control box and the third temperature control box form independent temperature control areas, thereby maintaining the uniformity and stability of the temperature inside the inner shell.

[0020] 3. In the present invention, an adjusting motor is set to control the rotation of the bevel gear, so that the gear ring drives the rotating ring to rotate, and then the connection between the connecting groove and the connecting groove is controlled, so that the first temperature control box, the second temperature control box and the third temperature control box can form independent temperature control areas, and can also form an overall temperature control area. When the first temperature control box, the second temperature control box and the third temperature control box are respectively adjusted to the same temperature, the connection between the connecting groove and the connecting groove is controlled to keep the overall temperature connected, avoiding the rise and fall of the temperature in a certain area, which has a greater impact on the amplitude change of the temperature rise and fall in the area, thereby maintaining the uniformity and stability of the overall thermal field.

[0021] 4. In the present invention, a wind circulation component is provided to intake air through an air inlet nozzle, and the air in a fixed volume pump chamber is compressed and stretched through an air inlet pipe to form a vacuum (negative pressure), and the gas is sucked into the pump chamber under the action of the pressure difference, and then discharged from the air outlet pipe through the air outlet nozzle to realize gas circulation, so that circulating gas is formed inside the first temperature-controlled box, the second temperature-controlled box and the third temperature-controlled box, and the flowing gas makes the thermal field inside the first temperature-controlled box, the second temperature-controlled box and the third temperature-controlled box more uniform, thereby improving the uniformity of heating of the inner shell through heat exchange.

[0022] 5. In the present invention, the rotating motor controls the rotating shaft to drive the graphite tray to rotate, and the grooves are evenly distributed on the top of the graphite tray in a circular shape. The rotation of the graphite tray makes the heat exchange between the graphite tray and the heating plate more uniform, thereby avoiding unevenness inside the groove, which affects the uniformity of the film inside the groove and the crystal quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0024] Figure 2 It is a schematic diagram of the cross-sectional structure of the device of the present invention;

[0025] Figure 3 It is a schematic diagram of the structure of the first temperature control box of the present invention;

[0026] Figure 4 It is a schematic diagram of the structure of the temperature control heater of the present invention;

[0027] Figure 5 It is a schematic diagram of the structure of the second temperature control box of the present invention;

[0028] Figure 6 The present invention Figure 5 A in the enlarged view;

[0029] Figure 7 It is a schematic diagram of the structure of the regulating component of the present invention;

[0030] Figure 8It is a schematic diagram of the structure of the wind circulation component of the present invention;

[0031] Fig. 9 It is a schematic diagram of the decomposed structure of the functional base of the present invention.

[0032] In the figure: 1. functional base; 2. first temperature control box; 3. second temperature control box; 4. third temperature control box; 5. furnace top cover; 6. inner shell; 7. wind circulation assembly; 8. temperature control heater; 11. base box; 12. fixed sleeve; 13. top frame; 14. heating plate; 15. rotating motor; 16. rotating shaft; 17. graphite tray; 18. groove; 21. bottom shell; 22. first insulation layer; 23. first temperature control box; 24. first temperature sensor; 25. first thyristor power regulator; 26. first Transformer; 31. second housing; 32. second temperature control box; 33. second temperature sensor; 34. second thyristor power regulator; 35. second transformer; 36. regulating motor; 37. regulating assembly; 38. connecting groove; 39. bevel gear; 371. gear ring; 372. rotating ring; 373. connecting groove; 71. fixing frame; 72. gas circulation pump; 73. air outlet nozzle; 74. air inlet nozzle; 75. guide plate; 76. air inlet pipe; 77. air outlet pipe; 81. connecting frame; 82. resistance heating tube. DETAILED DESCRIPTION

[0033] In order to make the technical means, creative features, objectives and effects achieved by the present invention easy to understand, the present invention is further explained below in conjunction with specific implementation methods.

[0034] Embodiment 1, as Figure 1 - Figure 5 As shown, a HVPE device capable of ensuring uniformity of thermal field comprises a functional base 1, an inner shell 6 is fixedly installed on the top of the functional base 1, a furnace top cover 5 is fixedly installed on the top of the inner shell 6, a first temperature control box 2, a second temperature control box 3 and a third temperature control box 4 are fixedly sleeved on the outer surface of the inner shell 6 in sequence from bottom to top, a wind circulation component 7 is fixedly installed on the right side of the first temperature control box 2, the second temperature control box 3 and the third temperature control box 4, and a temperature control heater 8 is fixedly connected to the inside of the first temperature control box 2, the second temperature control box 3 and the third temperature control box 4;

[0035] like Figure 3As shown, the first temperature control box 2 includes a bottom outer shell 21, the inner wall of the bottom outer shell 21 is fixedly connected with a first insulation layer 22, the bottom outer shell 21 is fixedly sleeved on the lower end of the outer surface of the inner shell 6, and the left side of the bottom outer shell 21 is fixedly connected with a first temperature control adjustment box 23, and a first temperature sensor 24 is fixedly installed at the upper end of the first temperature control adjustment box 23, and one end of the first temperature sensor 24 is located between the first insulation layer 22 and the inner shell 6, and a first thyristor power regulator 25 and a first transformer 26 are arranged inside the first temperature control adjustment box 23, and the first thyristor power regulator 25 is electrically connected to the first temperature sensor 24 and the first transformer 26 respectively, and the first transformer 26 is electrically connected to the temperature control heater 8 inside the bottom outer shell 21.

[0036] like Figure 5 As shown, the second temperature control box 3 includes a second outer shell 31, an inner wall of the second outer shell 31 is fixedly connected with a second insulation layer, a second temperature control adjustment box 32 is fixedly installed on the left side of the second outer shell 31, a second temperature sensor 33 is fixedly installed on the upper end of the interior of the second temperature control adjustment box 32, and one end of the second temperature sensor 33 is located between the second outer shell 31 and the inner shell 6, a second thyristor power regulator 34 and a second transformer 35 are arranged inside the second temperature control adjustment box 32, the second thyristor power regulator 34 is electrically connected to the second temperature sensor 33 and the second transformer 35 respectively, and the second transformer 35 is electrically connected to the temperature control heater 8 inside the second outer shell 31.

[0037] Among them, the internal structure of the third temperature-controlled box 4 is the same as that of the second temperature-controlled box 3. The third temperature-controlled box 4 is fixedly sleeved on the upper end of the outer surface of the inner shell 6. The bottom of the third temperature-controlled box 4 is fixedly connected to the top of the second temperature-controlled box 3 and is communicated with the second temperature-controlled box 3.

[0038] The internal structure of the third temperature-controlled box 4 is set to be the same as that of the second temperature-controlled box 3, so that an independent temperature control area is formed between the third temperature-controlled box 4 and the second temperature-controlled box 3. At the same time, the function of the third temperature-controlled box 4 is the same as that of the second temperature-controlled box 3, and the second temperature-controlled box 3 and the third temperature-controlled box 4 can also be controlled to be connected, thereby maintaining the stability of the overall temperature control.

[0039] By arranging the first temperature control box 2, the second temperature control box 3 and the third temperature control box 4 in sequence from bottom to top on the outer surface of the inner shell 6, the inner shell 6 is subjected to segmented temperature control, so that the temperature of different areas inside the inner shell 6 is kept uniform and stable, thereby avoiding a large temperature gradient inside the inner shell 6 and poor temperature uniformity due to the large volume of the inner shell 6.

[0040] By setting a first temperature sensor 24, the temperature between the bottom outer shell 21 and the inner shell 6 is monitored, so that the first temperature sensor 24 controls the first thyristor power regulator 25 to work through an electrical signal, and adjusts the first transformer 26, thereby controlling the working state of the temperature-controlled heater 8 (for example, when the temperature between the bottom outer shell 21 and the inner shell 6 becomes low, the first temperature sensor 24 detects that the temperature between the bottom outer shell 21 and the inner shell 6 is lower than the set temperature, and controls the first thyristor power regulator 25 to start through an electrical signal, increases the circuit power, and increases the voltage of the first transformer 26, so that the temperature-controlled heater 8 is heated to a higher temperature, otherwise, the temperature is lowered), and the temperature between the bottom outer shell 21 and the inner shell 6 is adjusted. Similarly, by setting a second temperature sensor 33, a second thyristor power regulator 34 and a second transformer 35, the temperature between the second outer shell 31 and the inner shell 6 is monitored, and the first temperature control box 2, the second temperature control box 3 and the third temperature control box 4 form independent temperature control areas, thereby maintaining the uniformity and stability of the temperature inside the inner shell 6.

[0041] Embodiment 2, as Figure 1 - Figure 7 As shown, a HVPE device capable of ensuring uniformity of thermal field, wherein an adjusting motor 36 is fixedly connected to the lower end of the second temperature control adjustment box 32, a bevel gear 39 is fixedly installed on one side of the adjusting motor 36, and the bevel gear 39 is rotatably installed inside the second shell 31, an adjusting assembly 37 is rotatably installed on one side of the bottom surface of the second shell 31 close to the inner wall, and a connecting groove 38 is provided on the bottom surface of the second shell 31, the second shell 31 is fixedly sleeved on the middle end of the outer surface of the inner shell 6, and the bottom of the second shell 31 is fixedly connected to the top of the bottom shell 21, and is communicated with the inside of the bottom shell 21 through the connecting groove 38.

[0042] like Figure 7 As shown, the adjustment assembly 37 includes a gear ring 371, a rotating ring 372 is fixedly installed at the lower end of the inner wall of the gear ring 371, a plurality of connecting grooves 373 are opened inside the rotating ring 372, and the connecting grooves 373 are rotatably installed at the lower end of the second shell 31, the outer surface of the bevel gear 39 is meshed with the top of the gear ring 371, and the connecting grooves 373 are the same size as the connecting grooves 38.

[0043] By setting an adjustment motor 36 to control the rotation of the bevel gear 39, the gear ring 371 drives the rotating ring 372 to rotate, and then controls the connection between the connecting groove 373 and the connecting groove 38, so that the first temperature control box 2, the second temperature control box 3 and the third temperature control box 4 can form an independent temperature control zone, or form an overall temperature control zone. When it is necessary to adjust the temperature of a certain area, or to control the formation of a certain temperature gradient in the internal area of ​​the inner shell 6, the first temperature control box 2, the second temperature control box 3 and the third temperature control box 4 can be controlled to form an independent temperature control zone, and the temperature of a certain area can be quickly adjusted and controlled. When it is necessary to form a uniform and stable temperature inside the inner shell 6, when the first temperature control box 2, the second temperature control box 3 and the third temperature control box 4 are adjusted to a consistent temperature respectively, the connection between the connecting groove 373 and the connecting groove 38 is controlled to keep the overall temperature connected, so as to avoid the rise and fall of the temperature in a certain area, which has a greater impact on the amplitude change of the temperature rise and fall in the area, thereby maintaining the uniformity and stability of the overall thermal field.

[0044] Embodiment three, as Figure 1 - Figure 8 As shown, the temperature control heater 8 includes a plurality of connecting frames 81, and a plurality of resistance heating tubes 82 are fixedly connected to the inner wall of the connecting frame 81. The resistance heating tubes 82 are composed of a plurality of "V"-shaped resistance wires, and the plurality of resistance heating tubes 82 are connected in series.

[0045] like Figure 8 As shown, there are three wind circulation components 7, which are fixedly installed on the right sides of the first temperature control box 2, the second temperature control box 3 and the third temperature control box 4 respectively. The wind circulation component 7 includes a fixing frame 71, and a gas circulation pump 72 is fixedly installed on the top of the fixing frame 71. An air outlet nozzle 73 and an air inlet nozzle 74 are fixedly installed on both ends of the left side of the fixing frame 71. A guide plate 75 is fixedly installed on the left sides of the air outlet nozzle 73 and the air inlet nozzle 74. One end of the gas circulation pump 72 is fixedly connected to an air inlet pipe 76, and one end of the air inlet pipe 76 is fixedly connected to one end of the air inlet nozzle 74. The top of the gas circulation pump 72 is fixedly connected to an air outlet pipe 77, and one end of the air outlet pipe 77 is fixedly connected to the air outlet nozzle 73.

[0046] The guide plate 75 is arc-shaped, and the air outlet nozzle 73 and the air inlet nozzle 74 are respectively located on two sides of the back side of the guide plate 75 .

[0047] By setting up a wind circulation component 7, air is taken in through the air inlet nozzle 74, and the air in the fixed volume pump chamber is compressed and stretched through the air inlet pipe 76 to form a vacuum (negative pressure), and the gas is sucked into the pump chamber under the action of the pressure difference, and then discharged from the air outlet pipe 77 through the air outlet nozzle 73 to realize gas circulation, so that a circulating gas is formed inside the first temperature control box 2, the second temperature control box 3 and the third temperature control box 4, and the flowing gas makes the thermal field inside the first temperature control box 2, the second temperature control box 3 and the third temperature control box 4 more uniform, and then through heat exchange, the uniformity of heating of the inner shell 6 is improved.

[0048] The resistance heating tube 82 is composed of multiple "V"-shaped resistance wires. During the flow of gas, the flowing gas can be quickly heated (for example, the first thyristor power regulator 25 is electrically connected to one of the resistance heating tubes 82 inside the bottom shell 21 through the first transformer 26. Since the multiple resistance heating tubes 82 are connected in series, the multiple resistance heating tubes 82 are controlled to work and heat synchronously), thereby making the heat inside the first temperature control box 2, the second temperature control box 3 and the third temperature control box 4 uniform, thereby improving the accuracy of temperature control of the inner shell 6 area.

[0049] Embodiment 4, as Figure 1 , Figure 2 and Fig. 9 As shown, the functional base 1 includes a base box 11, a fixed sleeve 12 is fixedly installed on the top of the base box 11, a top frame 13 is fixedly installed on the top of the fixed sleeve 12, a heating plate 14 is fixedly installed inside the top frame 13, a rotating motor 15 is fixedly installed inside the base box 11, a rotating shaft 16 is fixedly installed on the top of the rotating motor 15, a graphite tray 17 is fixedly installed on the top of the rotating shaft 16, a groove 18 is provided on the top of the graphite tray 17, the rotating shaft 16 is rotatably installed inside the fixed sleeve 12, and the graphite tray 17 is rotatably installed on the top of the top frame 13.

[0050] There are multiple grooves 18 , which are evenly distributed on the top of the graphite tray 17 in a circular shape.

[0051] The graphite tray 17 is heated by the heating plate 14. At this time, the rotating motor 15 controls the rotating shaft 16 to drive the graphite tray 17 to rotate, and the grooves 18 are evenly distributed on the top of the graphite tray 17 in a circular shape. The rotation of the graphite tray 17 makes the heat exchange between the graphite tray 17 and the heating plate 14 more uniform, thereby avoiding unevenness inside the groove 18 and affecting the uniformity of the film inside the groove 18 and the crystal quality.

[0052] It should be noted that the present invention is a HVPE device that can ensure the uniformity of the thermal field. When in use, the temperature inside the inner shell 6 is first controlled to rise. At this time, the first temperature control box 2, the second temperature control box 3 and the third temperature control box 4 form independent temperature control areas, and the temperature control heater 8 works to heat the inside of the first temperature control box 2, the second temperature control box 3 and the third temperature control box 4. The temperature is raised, and air is introduced through the air inlet nozzle 74. The air in the fixed volume pump chamber is compressed and stretched through the air inlet pipe 76 to form a vacuum (negative pressure), and the gas is sucked into the pump chamber under the action of the pressure difference, and then discharged from the air outlet pipe 77 through the air outlet nozzle 73 to realize gas circulation, so that the inside of the first temperature control box 2, the second temperature control box 3 and the third temperature control box 4 forms a circulating gas, and the flowing gas makes the thermal field inside the first temperature control box 2, the second temperature control box 3 and the third temperature control box 4 more uniform;

[0053] At the same time, the first temperature sensor 24 monitors the temperature between the bottom shell 21 and the inner shell 6, so that the first temperature sensor 24 controls the first thyristor power regulator 25 to work through an electrical signal, so that the first transformer 26 is adjusted, and then the working state of the temperature control heater 8 is controlled to adjust the internal temperature of the first temperature control box 2. Similarly, the temperatures inside the second temperature control box 3 and the third temperature control box 4 are automatically monitored and adjusted respectively;

[0054] When the temperatures of the first temperature control box 2, the second temperature control box 3 and the third temperature control box 4 are consistent, the regulating motor 36 works to rotate the bevel gear 39, and the rotating ring 372 rotates through the meshing action of the gear ring 371 and the bevel gear 39, thereby controlling the connection between the connecting groove 373 and the connecting groove 38, so that the overall temperature of the first temperature control box 2, the second temperature control box 3 and the third temperature control box 4 is kept in a connected state, and the first temperature control box 2, the second temperature control box 3 and the third temperature control box 4 are quickly connected through the flow of gas, so as to avoid the temperature rise and fall of a certain area, which has a greater impact on the amplitude change of the temperature rise and fall of the area, thereby maintaining the uniformity and stability of the overall thermal field;

[0055] In addition, the heating plate 14 heats the graphite tray 17. At this time, the rotating motor 15 controls the rotating shaft 16 to drive the graphite tray 17 to rotate, and the grooves 18 are evenly distributed on the top of the graphite tray 17 in a circular shape. The rotation of the graphite tray 17 makes the heat exchange between the graphite tray 17 and the heating plate 14 more uniform, thereby avoiding unevenness inside the groove 18 and affecting the uniformity and crystal quality of the film inside the groove 18.

[0056] The above shows and describes the basic principles and main features of the present invention and the advantages of the present invention. It should be understood by those skilled in the art that the present invention is not limited to the above embodiments. The above embodiments and descriptions are only for explaining the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, which fall within the scope of the present invention to be protected. The scope of protection of the present invention is defined by the attached claims and their equivalents.

Claims

1. A HVPE device capable of ensuring thermal field uniformity, comprising a functional base (1), characterized in that: An inner shell (6) is fixedly mounted on the top of the functional base (1), a furnace top cover (5) is fixedly mounted on the top of the inner shell (6), a first temperature control box (2), a second temperature control box (3) and a third temperature control box (4) are fixedly sleeved on the outer surface of the inner shell (6) in sequence from bottom to top, a wind circulation component (7) is fixedly mounted on the right side of the first temperature control box (2), the second temperature control box (3) and the third temperature control box (4), and a temperature control heater (8) is fixedly connected inside the first temperature control box (2), the second temperature control box (3) and the third temperature control box (4); The first temperature control box (2) comprises a bottom shell (21), the inner wall of the bottom shell (21) is fixedly connected to a first heat-insulating layer (22), the bottom shell (21) is fixedly sleeved on the lower end of the outer surface of the inner shell (6), the left side of the bottom shell (21) is fixedly connected to a first temperature control and adjustment box (23), the upper end of the first temperature control and adjustment box (23) is fixedly installed with a first temperature sensor (24), and one end of the first temperature sensor (24) is located between the first heat-insulating layer (22) and the inner shell (6), the first temperature control and adjustment box (23) is provided with a first thyristor power regulator (25) and a first transformer (26), the first thyristor power regulator (25) is electrically connected to the first temperature sensor (24) and the first transformer (26) respectively, and the first transformer (26) is electrically connected to a temperature control heater (8) inside the bottom shell (21).

2. The HVPE device capable of ensuring thermal field uniformity according to claim 1, characterized in that: The second temperature control box (3) comprises a second outer shell (31), the inner wall of the second outer shell (31) is fixedly connected to a second heat-insulating layer, a second temperature control and adjustment box (32) is fixedly installed on the left side of the second outer shell (31), a second temperature sensor (33) is fixedly installed at the upper end of the interior of the second temperature control and adjustment box (32), and one end of the second temperature sensor (33) is located between the second outer shell (31) and the inner shell (6), a second thyristor power regulator (34) and a second transformer (35) are arranged inside the second temperature control and adjustment box (32), the second thyristor power regulator (34) is electrically connected to the second temperature sensor (33) and the second transformer (35) respectively, and the second transformer (35) is electrically connected to a temperature control heater (8) inside the second outer shell (31).

3. The HVPE device capable of ensuring thermal field uniformity according to claim 2, characterized in that: An adjusting motor (36) is fixedly connected to the lower end of the second temperature control regulating box (32), a bevel gear (39) is fixedly mounted on one side of the adjusting motor (36), and the bevel gear (39) is rotatably mounted inside the second outer shell (31), an adjusting assembly (37) is rotatably mounted on the side of the bottom surface of the second outer shell (31) close to the inner wall, and a connecting groove (38) is provided on the bottom surface of the second outer shell (31), the second outer shell (31) is fixedly sleeved on the middle end of the outer surface of the inner shell (6), and the bottom of the second outer shell (31) is fixedly connected to the top of the bottom outer shell (21), and is connected to the inside of the bottom outer shell (21) through the connecting groove (38).

4. The HVPE device capable of ensuring thermal field uniformity according to claim 3, characterized in that: The adjustment assembly (37) comprises a gear ring (371), a rotating ring (372) is fixedly mounted on the lower end of the inner wall of the gear ring (371), a plurality of connecting grooves (373) are provided inside the rotating ring (372), and the connecting grooves (373) are rotatably mounted at the lower end inside the second housing (31), the outer surface of the bevel gear (39) is meshed with the top of the gear ring (371), and the connecting grooves (373) are the same size as the connecting grooves (38).

5. The HVPE device capable of ensuring thermal field uniformity according to claim 1, characterized in that: The internal structure of the third temperature-controlled box (4) is the same as that of the second temperature-controlled box (3); the third temperature-controlled box (4) is fixedly sleeved on the upper end of the outer surface of the inner shell (6); the bottom of the third temperature-controlled box (4) is fixedly connected to the top of the second temperature-controlled box (3) and is communicated with the second temperature-controlled box (3).

6. The HVPE device capable of ensuring thermal field uniformity according to claim 1, characterized in that: The temperature control heater (8) comprises a plurality of connection frames (81), the inner wall of the connection frame (81) being fixedly connected with a plurality of resistance heating tubes (82), the resistance heating tubes (82) being composed of a plurality of "V"-shaped resistance wires, and the plurality of resistance heating tubes (82) being connected in series.

7. The HVPE device capable of ensuring thermal field uniformity according to claim 1, characterized in that: The number of the wind circulation components (7) is three, and they are fixedly installed on the right sides of the first temperature control box (2), the second temperature control box (3) and the third temperature control box (4), respectively. The wind circulation components (7) include a fixed frame (71), a gas circulation pump (72) is fixedly installed at the top of the fixed frame (71), an air outlet nozzle (73) and an air inlet nozzle (74) are fixedly installed at both ends of the left side of the fixed frame (71), a guide plate (75) is fixedly installed on the left side of the air outlet nozzle (73) and the air inlet nozzle (74), one end of the gas circulation pump (72) is fixedly connected to an air inlet pipe (76), one end of the air inlet pipe (76) is fixedly connected to one end of the air inlet nozzle (74), and the top of the gas circulation pump (72) is fixedly connected to an air outlet pipe (77), and one end of the air outlet pipe (77) is fixedly connected to the air outlet nozzle (73).

8. The HVPE device capable of ensuring thermal field uniformity according to claim 7, characterized in that: The guide plate (75) is arc-shaped, and the air outlet nozzle (73) and the air inlet nozzle (74) are respectively located on two sides of the back side of the guide plate (75).

9. The HVPE device capable of ensuring thermal field uniformity according to claim 1, characterized in that: The functional base (1) comprises a base box (11), a fixed sleeve (12) is fixedly mounted on the top of the base box (11), a top frame (13) is fixedly mounted on the top of the fixed sleeve (12), a heating plate (14) is fixedly mounted inside the top frame (13), a rotating motor (15) is fixedly mounted inside the base box (11), a rotating shaft (16) is fixedly mounted on the top of the rotating motor (15), a graphite tray (17) is fixedly mounted on the top of the rotating shaft (16), a groove (18) is provided on the top of the graphite tray (17), the rotating shaft (16) is rotatably mounted inside the fixed sleeve (12), and the graphite tray (17) is rotatably mounted on the top of the top frame (13).

10. The HVPE device capable of ensuring thermal field uniformity according to claim 9, characterized in that: The grooves (18) are multiple in number and are evenly distributed in a circular shape on the top of the graphite tray (17).

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