Measuring device

Abstract

The invention discloses a measuring device which comprises a base, a first support and a second support, the first support is used for being connected with a system to be measured, and the second support and the first support are arranged in a spaced mode and used for being connected with the displacement output end of the system to be measured. One of the first bracket and the second bracket is provided with a displacement measuring piece, and the other one is provided with a displacement measuring matching piece; the first bracket has a first state and a second state; the second bracket has a third state and a fourth state; when the first support is in the first state, the second support is in the third state, the first support is in the second state, the second support is in the fourth state, and the maximum value of the first range is smaller than the minimum value of the second range. The measuring device can measure output displacements in different ranges, and the measuring cost is reduced.

Description

Technical Field

[0001] The invention relates to the technical field of precision measurement, and in particular to a measuring device. Background Art

[0002] Precision displacement measurement is a key issue in the field of semiconductors, precision measurement and metrology. In modern manufacturing systems and measuring instruments, the level of precision measurement determines the accuracy of the manufacturing instruments, so precision displacement measurement systems are of great significance to modern equipment manufacturing.

[0003] In order to measure the output displacement of the system to be measured, the prior art usually needs to build a specially adapted system for direct measurement, which results in high measurement costs. Summary of the invention

[0004] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention provides a measuring device that can measure output displacements in different ranges and reduce the measurement cost.

[0005] The embodiment of the present application provides a measuring device, comprising: a base; a first bracket, the first bracket being used to connect to a system to be measured; a second bracket, the second bracket being spaced apart from the first bracket and being used to connect to a displacement output end of the system to be measured; one of the first bracket and the second bracket is provided with a displacement measuring piece, and the other is provided with a displacement measuring fitting piece; the first bracket has a first state and a second state, in the first state, the first bracket is fixedly connected to the base, in the second state, the first bracket is movably connected to the base in a first range along a first direction, and the first direction is the direction in which the system to be measured outputs displacement; the second bracket has a third state and a fourth state, in the third state, the second bracket is movably connected to the base in a second range along a first direction, and in the fourth state, the second bracket is fixedly connected to the base; wherein, when the first bracket is in the first state, the second bracket is in the third state, and when the first bracket is in the second state, the second bracket is in the fourth state, the minimum value of the first range is greater than the maximum value of the second range.

[0006] According to the measuring device of the embodiment of the present application, a first bracket and a second bracket are respectively connected to the displacement measuring part and the displacement measuring matching part, and the first bracket and the second bracket have different displacement ranges. In this way, the displacement of the system to be measured with different output displacement ranges can be measured by moving the first bracket or the second bracket, thereby expanding the application scope, reducing the cost, and having a simple structure, which is convenient for production and processing.

[0007] In a possible implementation of the present application, the first bracket is detachably fixedly connected to the base, and the second bracket is slidably connected to the base along a first direction; It also includes a force sensor disposed on the base, and the force sensor is connected to the second bracket to measure the force applied to the second bracket.

[0008] In a possible implementation of the present application, a force measurement assembly is further included, wherein the force measurement assembly includes the force sensor, a first elastic member, and a second elastic member spaced apart along the first direction, and the first elastic member and the second elastic member are retracted and contracted along the first direction; One end of the first elastic member is connected to the force sensor, and the other end is connected to the second bracket; one end of the second elastic member is connected to the second bracket, and the other end is connected to the base.

[0009] In a possible implementation of the present application, there are two first elastic members, and the two first elastic members are arranged at two sides of the second bracket at intervals along a second direction, and the second direction is perpendicular to the first direction; The force measurement assembly further includes a connecting rod, two ends of which are respectively connected to the two first elastic members, and the force sensor is connected to the connecting rod.

[0010] In a possible implementation of the present application, the force measurement assembly also includes an anti-bending member, which includes two large diameter sections located at both ends and a small diameter section connected between the two large diameter sections, and the two large diameter sections are respectively connected to the force sensor and the connecting rod.

[0011] In a possible implementation of the present application, the first elastic member is connected to the connecting rod through a first preload adjustment rod, and the second elastic member is connected to the base through a second preload adjustment rod.

[0012] In a possible implementation of the present application, the second bracket is slidably connected to the base via a sliding assembly; The sliding assembly comprises a guide rail arranged on the base along a first direction, and a sliding block slidably matched with the guide rail, and the second bracket is connected to the sliding block.

[0013] In a possible implementation of the present application, the base is provided with a guide groove extending along the first direction; The sliding assembly further comprises a guide rod, one end of which is connected to the second bracket, and the other end of which is passed through the guide groove.

[0014] In a possible implementation of the present application, the second bracket is detachably fixedly connected to the base, and the first bracket is movably connected to the base along a first direction via a deformable member.

[0015] In a possible implementation of the present application, there are multiple deformable members, and the multiple deformable members are arranged at intervals along the first direction. One end of the deformable member is connected to the base, and the other end is connected to the first bracket.

[0016] Additional aspects and advantages of the present invention will be given in part in the following description and in part will be obvious from the following description, or will be learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which: Figure 1 is a schematic structural diagram of an angle measuring device according to an embodiment of the present invention; Figure 2 is a schematic structural diagram of another angle of a measuring device according to an embodiment of the present invention; Figure 3 is a force analysis diagram of a state of a slider of a measuring device according to an embodiment of the present invention; Figure 4 is a force analysis diagram of another state of a slider of a measuring device according to an embodiment of the present invention; Figure 5 is a structural schematic diagram of an angle at which a first bracket and a second bracket of a measuring device according to an embodiment of the present invention cooperate; Figure 6 is a schematic structural diagram of another angle of cooperation between the first bracket and the second bracket of the measuring device according to an embodiment of the present invention; Figure 7 is a top view of a base of a measuring device according to an embodiment of the present invention; Figure 8 is a schematic structural diagram of a base of a measuring device according to an embodiment of the present invention; Fig. 9 is a bottom view of a measuring device according to an embodiment of the present invention.

[0018] Reference numerals: Measuring device 100, Base 10, guide groove 11, deformable member 12, first support 13, second support 14, connecting block 15, The first bracket 20, the displacement measurement matching piece 21, The second bracket 30, the displacement measuring member 31, Force measurement assembly 40, force sensor 41, first elastic member 42, second elastic member 43, connecting rod 44, anti-bending member 45, first preload adjustment rod 46, second preload adjustment rod 47, Sliding assembly 50, guide rail 51, slider 52, guide rod 521, adapter 522, A system 200 to be measured. DETAILED DESCRIPTION

[0019] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0020] In the description of the present invention, it should be understood that the terms "upper", "lower", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating positions or positional relationships, are based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, unless otherwise specified, "plurality" means two or more. In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0021] The measuring device 100 according to an embodiment of the present application will be described below with reference to the accompanying drawings.

[0022] Reference Figure 1 and Figure 2A measuring device 100 provided in an embodiment of the present application includes a base 10, a first bracket 20 and a second bracket 30, wherein the first bracket 20 is used to connect to a system 200 to be measured, and the second bracket 30 is spaced apart from the first bracket 20 and is used to connect to a displacement output end of the system 200 to be measured; one of the first bracket 20 and the second bracket 30 is provided with a displacement measuring member 31, and the other is provided with a displacement measuring matching member 21; the first bracket 20 has a first state and a second state, in the first state, the first bracket 20 is fixedly connected to the base 10, in the second state, the first bracket 20 is movably connected to the base 10 in a first direction within a first range, and the first direction is the direction in which the system 200 to be measured outputs displacement; the second bracket 30 has a third state and a fourth state, in the third state, the second bracket 30 is movably connected to the base 10 in a second direction within a second range, and in the fourth state, the second bracket 30 is fixedly connected to the base 10; wherein, when the first bracket 20 is in the first state, the second bracket 30 is in the third state, and when the first bracket 20 is in the second state, the second bracket 30 is in the fourth state, and the maximum value of the first range is less than the minimum value of the second range.

[0023] Specifically, refer to Figure 1 and Figure 2 The measuring device in the embodiment of the present invention includes a base 10, and the base 10 is used to support a first bracket 20 and a second bracket 30, etc.

[0024] Reference Figure 1 and Figure 2 The first bracket 20 is used to connect the system to be measured 200. The system to be measured 200 can be fixedly connected to the first bracket 20, such as welding; or it can be detachably connected to the first bracket 20, for example, threaded connection, snap connection or connection through a detachable connector.

[0025] The system to be measured 200 may output displacement, force, etc. The system to be measured 200 may be an electromechanical system, for example, a linear motor, a piezoelectric ceramic, etc.

[0026] The second bracket 30 is spaced apart from the first bracket 20 and is used to be connected to the displacement output end of the measured system 200 . Thus, when the measured system 200 outputs displacement, it can act on the second bracket 30 to generate displacement between the first bracket 20 and the second bracket 30 .

[0027] One of the first bracket 20 and the second bracket 30 is provided with a displacement measuring member 31, and the other is provided with a displacement measuring matching member 21. The displacement between the first bracket 20 and the second bracket 30 is measured by the matching of the displacement measuring member 31 and the displacement measuring matching member 21. The displacement measuring member 31 may be a laser interferometer, and the displacement measuring matching member 21 may be a reflector, a refractor, etc.

[0028] The displacement measuring member 31 can be arranged on the first bracket 20 or on the second bracket 30. When the displacement measuring member 31 is arranged on the first bracket 20, the displacement measuring matching member 21 is arranged on the second bracket 30 and is arranged opposite to the displacement measuring member 31; when the displacement measuring member 31 is arranged on the second bracket 30, the displacement measuring matching member 21 is arranged on the first bracket 20 and is arranged opposite to the displacement measuring member 31.

[0029] The first bracket 20 has a first state and a second state. In the first state, the first bracket 20 is fixedly connected to the base 10. In the second state, the first bracket 20 is movably connected to the base 10 in a first range along a first direction, and the first direction is the direction in which the system 200 to be measured outputs displacement. Since the first bracket 20 has a second state, the first bracket 20 is detachably fixedly connected to the base 10 in the first state. The first bracket 20 and the base 10 can be connected by a first detachable part, and the first detachable part can be a threaded connector, a snap connector, etc. The first bracket 20 and the base 10 are movably connected in a first range along the first direction, which is convenient for obtaining the displacement of the first bracket 20 along the first direction, that is, the output displacement of the system 200 to be measured.

[0030] The second bracket 30 has a third state and a fourth state. In the third state, the second bracket 30 is movably connected to the base 10 in the second range along the first direction. In the fourth state, the second bracket 30 is fixedly connected to the base 10. Since the second bracket 30 has the third state, the second bracket 30 is detachably fixedly connected to the base 10 in the fourth state. The second bracket 30 and the base 10 can be connected by a second detachable member, and the second detachable member can be a threaded connector, a snap connector, etc. The second bracket 30 is movably connected to the base 10 in the second range along the first direction, which is convenient for obtaining the displacement of the second bracket 30 along the first direction, that is, the output displacement of the system 200 to be measured.

[0031] When the first bracket 20 is in the first state, the second bracket 30 is in the third state, when the first bracket 20 is in the second state, the second bracket 30 is in the fourth state, and the maximum value of the first range is less than the minimum value of the second range. In this way, one of the first bracket 20 and the second bracket 30 remains fixed and the other moves, so as to measure different displacement ranges.

[0032] It should be noted that the first range may be a displacement range of micrometer or nanometer level, and the second range may be a displacement range of centimeter level, etc.

[0033] Therefore, refer to Figure 1 and Figure 2According to the measuring device 100 of the embodiment of the present application, a first bracket 20 and a second bracket 30 are respectively connected to the displacement measuring part and the displacement measuring fitting 21, and the first bracket 20 and the second bracket 30 have different displacement ranges. In this way, the displacement of the system to be measured 200 with different output displacement ranges can be measured by moving the first bracket 20 or the second bracket 30, thereby increasing the application scope, reducing the cost, and having a simple structure and facilitating production and processing.

[0034] In some embodiments of the present application, reference Figure 1 and Figure 2 The first bracket 20 is detachably fixedly connected to the base 10, and the second bracket 30 is slidably connected to the base 10 along a first direction; the measuring device 100 also includes a force sensor 41 arranged on the base 10, and the force sensor 41 is connected to the second bracket 30 to measure the force applied to the second bracket 30.

[0035] By detachably and fixedly connecting the first bracket 20 to the base 10, and slidingly connecting the second bracket 30 to the base 10 along the first direction, when the system 200 to be measured outputs a displacement, the second bracket 30 moves relative to the first bracket 20, and the movement displacement is the same as the displacement output by the system 200 to be measured. By setting a force sensor 41 connected to the second bracket 30, when the system 200 to be measured outputs a displacement, the second bracket 30 is forced to move, and the force sensor 41 can measure the force of the second bracket 30, and calculate the output force of the system 200 to be measured based on the force of the second bracket 30, and then according to Hooke's law: F=KΔx, where F is the magnitude of the system output force, K is the system stiffness, and Δx is the change in the system output displacement, the stiffness of the system 200 to be measured can be obtained.

[0036] Specifically, the first bracket 20 is detachably fixedly connected to the base 10, that is, the first bracket 20 is in the first state, and the first bracket 20 and the base 10 can be threadedly connected, snap-fitted, or detachably connected. In the present application, the first bracket 20 and the base 10 are connected by a threaded connector that penetrates a threaded hole opened on the side of the base 10 and a threaded hole on the side of the first bracket 20.

[0037] The force sensor 41 is connected to the base 10 via the first support 13. The first support 13 may be disposed on a side of the second support 30 away from the first support 20 along the first direction.

[0038] In some embodiments of the present application, reference Figure 1 and Figure 2The measuring device 100 also includes a force measuring component 40, which includes a force sensor 41, a first elastic member 42 and a second elastic member 43 arranged at intervals along a first direction, and the first elastic member 42 and the second elastic member 43 are retracted and extended along the first direction; one end of the first elastic member 42 is connected to the force sensor 41, and the other end is connected to the second bracket 30, and one end of the second elastic member 43 is connected to the second bracket 30, and the other end is connected to the base 10.

[0039] By arranging the first elastic member 42 and the second elastic member 43 at intervals along the first direction, and the first elastic member 42 and the second elastic member 43 are extended and retracted along the first direction, the second bracket 30 can maintain balance in the first direction under the action of the first elastic member and the second elastic member 43 in the initial state, and after being subjected to force, the force sensor 41 can measure the change in the force of the two parts within the unit range, so that a larger force range can be measured.

[0040] When in use, the first elastic member 42 and the second elastic member 43 can both be in an extended state in the initial state, and the second bracket 30 is in a balanced static state under the action of the first elastic member 42 and the second elastic member 43. When the system to be measured 200 outputs a force, the second bracket 30 is subjected to a force to generate a displacement Δx, and the displacement value can be obtained through the displacement measuring member 31. At this time, the force on the second elastic member 43 increases by kΔx, while the force on the first elastic member 42 decreases by kΔx. At this time, the value measured by the force sensor 41 is kΔx, and the force on the second bracket 30 from the system to be measured 200 is 2kΔx, that is, the output force of the system to be measured 200 is 2kΔx. The stiffness of the system to be measured 200 can be calculated based on the data obtained from the force sensor 41 and the displacement measuring member 31.

[0041] In some embodiments, the other end of the second elastic member 43 is connected to the base 10 through the second support 14. The first elastic member 42 and the second elastic member 43 can be springs, and further, the first elastic member 42 and the second elastic member 43 can be tension springs, which are convenient for connecting with the second bracket 30, the force sensor 41 and the base 10.

[0042] In some embodiments of the present application, there are two first elastic members 42, and the two first elastic members 42 are spaced apart on both sides of the second bracket 30 along the second direction, and the second direction is perpendicular to the first direction; the force measurement component 40 also includes a connecting rod 44, and the two ends of the connecting rod 44 are respectively connected to the two first elastic members 42, and the force sensor 41 is connected to the connecting rod 44.

[0043] By providing two first elastic members 42 and connecting the two first elastic members 42 via a connecting rod 44 , it is convenient to connect the force sensor 41 to the first elastic member 42 .

[0044] Specifically, the distances between the connection point between the force sensor 41 and the connecting rod 44 and the connection point between the first elastic member 42 and the connecting rod 44 are the same, so that the stability and accuracy of the measurement of the force sensor 41 can be improved.

[0045] In some embodiments, there are two second elastic members 43, and each first elastic member 42 corresponds to one second elastic member 43. In this way, the force stability and movement stability of the second bracket 30 can be improved.

[0046] Adjust the preload force of the two first elastic members 42 and the two second elastic members 43 so that F k1 = F k2 , F k3 = F k4 , the force of the first bracket 20 is referenced to Figure 3 , due to F 促 =(F k1 + F k2 )-(F k3 + F k4 ), when F k1 + F k2 =F k3 + F k4 When F 促 =0; that is, the second bracket 30 is in a balanced static state.

[0047] When the system to be measured 200 outputs ΔF 促 When the force of the first bracket 20 is Figure 4 , according to the balance of forces, (F 促 + ΔF 促 )+(F k3 - kΔx)+(F k4 - kΔx) = (F k1 + kΔx)+(F k2 + kΔx), then, ΔF 促 =4 kΔx.

[0048] The force ΔF of the force sensor 41 传 =(F k3 + F k4 )-(F k3 + kΔx), that is, ΔF 传 =2 kΔx, that is, ΔF 促 =2ΔF 传 .

[0049] In some embodiments, the second bracket 30 is provided with a transition piece 522 for connecting with the first elastic piece 42 and the second elastic piece 43 . The transition piece 522 extends along the second direction and is provided with an annular groove so as to connect with the first elastic piece 42 and the second elastic piece 43 .

[0050] In some embodiments of the present application, reference Figure 1 The force measurement assembly 40 also includes an anti-bending member 45, which includes two large-diameter sections located at both ends and a small-diameter section connected between the two large-diameter sections. The two large-diameter sections are respectively connected to the force sensor 41 and the connecting rod 44.

[0051] Since the force sensor 41 can withstand pressure and tension but cannot withstand bending moment, the bending moment is overcome by providing the anti-bending member 45 so that the force sensor 41 only needs to withstand tension or pressure.

[0052] By providing a large diameter section, it is convenient to connect with the first support 13 and the connecting rod 44, and by providing a small diameter section as a flexible structure, the bending moment can be overcome by deformation.

[0053] In some embodiments, the diameter gradually decreases from the large diameter section to the small diameter section, and the small diameter section is symmetrical on both sides. The anti-bending member 45, the force sensor 41 and the connecting rod 44 are all detachably connected, for example, the anti-bending member 45, the force sensor 41 and the connecting rod 44 are all threadedly connected via studs.

[0054] In some embodiments of the present application, reference Figure 1 and Figure 2 The first elastic member 42 is connected to the connecting rod 44 through a first preload adjustment rod 46 , and the second elastic member 43 is connected to the base 10 through a second preload adjustment rod 47 .

[0055] The first preload adjustment rod 46 and the second preload adjustment rod 47 facilitate the adjustment of the preload force of the first elastic member 42 and the second elastic member 43 on the second bracket 30 .

[0056] Specifically, one end of the first preload adjustment rod 46 is connected to the first elastic member 42, and the other end is passed through the connecting rod 44. The other end of the first preload adjustment rod 46 is threadedly connected to a nut, and the elongation of the first elastic member 42 can be adjusted by adjusting the nut. One end of the second preload adjustment rod 47 is connected to the second elastic member 43, and the other end is passed through the support. The other end of the second preload adjustment rod 47 is threadedly connected to a nut, and the elongation of the second elastic member 43 can be adjusted by adjusting the nut.

[0057] In some embodiments of the present application, reference Figure 5 and Figure 6The second bracket 30 is slidably connected to the base 10 through a sliding assembly 50; the sliding assembly 50 includes a guide rail 51 arranged on the base 10 along a first direction, and a slider 52 slidably matched with the guide rail 51, and the second bracket 30 is connected to the slider 52.

[0058] By providing the guide rail 51 along the first direction and the slider 52 matched with the guide rail 51, the movement of the second bracket 30 connected to the slider 52 can be guided, thereby improving the stability of the movement of the second bracket 30. Since the second bracket 30 can move relatively with the guide rail 51 over a large distance, displacements of a large range of travel can be measured.

[0059] Specifically, the guide rail 51 can be a sliding protrusion connected to the base 10, and the slider 52 is provided with a sliding groove matching the sliding protrusion. The sliding protrusion and the base 10 can be fixedly connected, for example, they can be welded or connected by a connecting piece, such as a threaded piece, a snap-fit ​​piece, etc. The second bracket 30 and the slider 52 can be fixedly connected, for example, they can be welded or connected by a connecting piece, such as a threaded piece, a snap-fit ​​piece, etc.

[0060] In some embodiments, the sliding assembly 50 may include a groove guide rail 51 disposed on the base 10 along the first direction, and a slider 52 having a protrusion slidably matched with the groove guide rail 51 , and the second bracket 30 is connected to the slider 52 .

[0061] In some embodiments of the present application, reference Figure 5 and Figure 6 The base 10 is provided with a guide groove 11 extending along the first direction; the sliding assembly 50 also includes a guide rod, one end of which is connected to the second bracket 30, and the other end of which is passed through the guide groove 11.

[0062] By providing the guide groove 11 and the guide rod matched with the guide groove 11 , the stability of the sliding block 52 sliding along the first direction is further improved.

[0063] In some embodiments, there are two guide grooves 11 , which are spaced apart along the second direction at opposite sides of the slider 52 , and there are also two guide rods 521 .

[0064] In some embodiments, the guide groove 11 is a through groove, and the other end of the guide rod is fixed by a limiter, so that the second bracket 30 is in the fourth state. The limiter can be a nut, and the other end of the guide rod is provided with a thread, and the nut cooperates with the thread to limit and fix the guide rod.

[0065] In some embodiments of the present application, reference Figure 7-Figure 9 The second bracket 30 is detachably fixedly connected to the base 10 , and the first bracket 20 is movably connected to the base 10 along a first direction via the deformable member 12 .

[0066] The second bracket 30 is detachably fixedly connected to the base 10, and the first bracket 20 is movably connected to the base 10 along the first direction, that is, the second bracket 30 is in the fourth state, and the first bracket 20 is in the first state. Specifically, the second bracket 30 can be detachably fixedly connected to the base 10 through the slider 52 to achieve the detachable fixed connection between the second bracket 30 and the base 10. The slider 52 and the base 10 can be connected by a connecting member, for example, a threaded member, a snap member, etc.

[0067] The first bracket 20 is movably connected to the base 10 along the first direction through the deformable member 12. Specifically, the deformable member 12 is fixedly connected to the base 10, and the first bracket 20 is fixedly connected to the deformable member 12. The deformable member 12 can be deformed along the first direction so that the first bracket 20 connected thereto can move along the first direction. Since the deformable member is an integrally formed member, it produces displacement through flexible deformation, and there are no problems such as friction, lubrication, clearance, static friction and dynamic friction conversion. Therefore, high-precision measurement can be achieved within a smaller range. The deformable member 12 can be connected to the base 10 at one end and to the first bracket 20 at the other end; or both ends of the deformable member 12 can be connected to the base 10, and the first bracket 20 can be connected to any position between the two ends of the deformable member 12.

[0068] In some embodiments, the deformable member 12 may be a sheet-shaped flexible deformable member for easy deformation. The deformable member 12 may be made of metal or the like.

[0069] In some embodiments of the present application, reference Figure 7-Figure 9 There are multiple deformable members 12, and the multiple deformable members 12 are arranged at intervals along the first direction. One end of the deformable member 12 is connected to the base 10, and the other end is connected to the first bracket 20.

[0070] By providing a plurality of deformable members 12, the stability of supporting the first bracket 20 is improved. One end of the deformable member 12 is connected to the base 10, and the other end is connected to the first bracket 20, which increases the deformation range of the deformable member 12 and the displacement range of the first bracket 20.

[0071] In some embodiments, the other ends of the plurality of deformable members 12 are connected via a connecting block 15, and the first bracket 20 is connected to the connecting block 15 for easy connection.

[0072] In some embodiments, the base 10 is provided with a through opening along the thickness direction of the base 10 , and the shape of the opening is not limited, and can be directional, L-shaped, etc. The deformable member and the connecting block 15 are provided with openings, so that the surface of the base 10 remains flat.

[0073] When the first bracket 20 is in the first state, the connecting piece can be inserted from the side of the base 10 to fix the connecting block 15 to the base 10. The connecting piece can be a threaded connecting piece or the like.

[0074] In the description of this specification, the description with reference to the terms "embodiment", "example", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0075] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. A measuring device, characterized in that: include: Base; A first bracket, wherein the first bracket is used to connect to a system to be measured; A second bracket, the second bracket is spaced apart from the first bracket and is used to be connected to the displacement output end of the system to be measured; One of the first bracket and the second bracket is provided with a displacement measuring component, and the other is provided with a displacement measuring matching component; The first bracket has a first state and a second state, in the first state, the first bracket is fixedly connected to the base, and in the second state, the first bracket is movably connected to the base in a first range along a first direction, and the first direction is the direction in which the system to be measured outputs displacement; The second bracket has a third state and a fourth state. In the third state, the second bracket is movably connected to the base in a second range along the first direction. In the fourth state, the second bracket is fixedly connected to the base. When the first bracket is in the first state, the second bracket is in the third state; when the first bracket is in the second state, the second bracket is in the fourth state; the maximum value of the first range is less than the minimum value of the second range.

2. The measuring device according to claim 1, characterized in that The first bracket is detachably fixedly connected to the base, and the second bracket is slidably connected to the base along a first direction; It also includes a force sensor disposed on the base, and the force sensor is connected to the second bracket to measure the force applied to the second bracket.

3. The measuring device according to claim 2, characterized in that It also includes a force measurement assembly, the force measurement assembly includes the force sensor, a first elastic member and a second elastic member spaced apart along the first direction, the first elastic member and the second elastic member extending and retracting along the first direction; One end of the first elastic member is connected to the force sensor, and the other end is connected to the second bracket; one end of the second elastic member is connected to the second bracket, and the other end is connected to the base.

4. The measuring device according to claim 3, characterized in that There are two first elastic members, and the two first elastic members are spaced apart and arranged on both sides of the second bracket along a second direction, and the second direction is perpendicular to the first direction; The force measurement assembly further includes a connecting rod, two ends of which are respectively connected to the two first elastic members, and the force sensor is connected to the connecting rod.

5. The measuring device according to claim 4, characterized in that The force measurement assembly also includes an anti-bending member, which includes two large-diameter sections located at both ends and a small-diameter section connected between the two large-diameter sections, and the two large-diameter sections are respectively connected to the force sensor and the connecting rod.

6. The measuring device according to claim 4, characterized in that The first elastic member is connected to the connecting rod through a first preload adjustment rod, and the second elastic member is connected to the base through a second preload adjustment rod.

7. The measuring device according to claim 2, characterized in that The second bracket is slidably connected to the base via a sliding assembly; The sliding assembly comprises a guide rail arranged on the base along a first direction, and a sliding block slidably matched with the guide rail, and the second bracket is connected to the sliding block.

8. The measuring device according to claim 7, characterized in that The base is provided with a guide groove extending along a first direction; The sliding assembly further comprises a guide rod, one end of which is connected to the second bracket, and the other end of which is passed through the guide groove.

9. The measuring device according to claim 1, characterized in that The second bracket is detachably and fixedly connected to the base, and the first bracket is movably connected to the base along a first direction via a deformable member.

10. The measuring device according to claim 9, characterized in that There are multiple deformable members, which are spaced apart along the first direction. One end of the deformable member is connected to the base, and the other end is connected to the first bracket.

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