Prism dispersion type spectrometer and spatial attitude adjusting device and method thereof

Abstract

The present application relates to a kind of prism dispersion spectrometer and its space posture installation and adjustment device, method, belong to optical instrument installation and adjustment technical field, solve the technical problem of low precision of high spectral imaging system space posture adjustment, the space posture installation and adjustment method of its prism dispersion spectrometer includes the steps of curved surface prism positioning, mirror positioning, coaxial mirror group positioning.Its space posture installation and adjustment device includes air floating platform, interferometer, optical level gauge, flexible joint arm, laser tracker, shearing table, five-dimensional adjusting frame, target ball.The optical system of its prism dispersion spectrometer includes coaxial mirror group, curved surface prism, mirror arranged in sequence along optical path.The prism dispersion spectrometer includes the optical system of prism dispersion spectrometer.The present application is used for high spectral imaging system.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of optical instrument adjustment, and particularly relates to a prism dispersion type spectrometer and a spatial attitude adjustment device and method thereof. BACKGROUND

[0002] With the rapid development of modern optical technology, high-precision spatial attitude adjustment in optical systems has become increasingly important. In particular, in a prism dispersion type spectrometer, a curved prism as a key optical element, a slight change in its spatial attitude can have a significant impact on imaging quality. Therefore, researching a method capable of realizing high-precision spatial attitude adjustment of the prism is of great significance to improve the performance of the prism dispersion type spectrometer. Traditional spatial attitude adjustment methods mainly rely on mechanical adjustment devices. Although this method can achieve a certain degree of adjustment, it is often difficult to meet the demand for high-precision adjustment due to the limitations of mechanical precision and stability. In addition, the traditional adjustment method usually needs manual operation, which is not only inefficient, but also difficult to ensure the accuracy and consistency of the adjustment. In recent years, with the continuous progress of high-precision measurement technologies such as optical theodolite measurement technology, laser tracker network measurement and flexible joint arm measurement, and interferometer measurement technology, new solutions have been provided for spatial attitude adjustment. These technologies can realize accurate control of the spatial attitude of the target object through high-precision measurement and positioning. SUMMARY

[0003] In order to overcome the low precision of the spatial attitude adjustment of the hyperspectral imaging system, the application provides a prism dispersion type spectrometer and a spatial attitude adjustment device and method thereof.

[0004] The technical solution adopted by the application to solve its technical problems is:

[0005] A spatial attitude adjustment method of a prism dispersion type spectrometer, comprising the following steps:

[0006] Step S1, curved prism positioning

[0007] First, establish a spatial coordinate system

[0008] Place the prism dispersion type spectrometer to be adjusted on an air floating platform supported by a shear table, use an optical theodolite to adjust the prism dispersion type spectrometer to be adjusted to be horizontal, take the mechanical reference as the X and Y planes, the mounting surface of the support as the Z plane, and use a flexible joint arm to sample and fit to establish a spatial coordinate system.

[0009] Second, install the curved prism lens support

[0010] Adjust the spatial position of the curved prism lens support using a flexible joint arm, so that the spatial position of the curved prism lens support reaches the theoretical position.

[0011] Third step, install interferometer

[0012] Install the interferometer; install and remove the curved prism; use a five-dimensional adjusting frame and a laser tracker to make the curved prism lens holder, the interferometer, and the target ball center in a straight line, with the optical axis in the center.

[0013] Fourth step, install curved prism

[0014] Install the curved prism to reflect the convex surface image point; adjust the curved prism image point, rotate the curved prism to return the image point, and adjust it to coincide with the center of the interferometer image point; adjust the phase position of the curved prism to the theoretical position.

[0015] Step S2, mirror positioning

[0016] First step, install mirror holder

[0017] Take points through a flexible joint arm to establish the spatial coordinate system of the mirror holder and fit the mirror holder installation end face. Install the mirror holder according to the position of the mirror holder installation end face.

[0018] Second step, fine-tune the mirror holder

[0019] Measure the included angle between the mirror installation end face and the X, Y, and Z faces, and adjust the pitch angle and azimuth angle of the mirror holder so that the angles are within the theoretical error range.

[0020] Step S3, coaxial mirror group positioning

[0021] First step, install coaxial mirror group holder

[0022] Use a flexible joint arm to take points and fit the coaxial mirror group installation end face, and install the coaxial mirror group holder according to the position of the coaxial mirror group installation end face.

[0023] Second step, fine-tune the coaxial mirror group holder

[0024] Measure the included angle between the coaxial mirror group installation end face and the X, Y, and Z faces, and adjust the pitch angle and azimuth angle of the coaxial mirror group holder so that the angles are within the theoretical error range.

[0025] The above-mentioned space posture installation and adjustment method, the step S1 third step, install the interferometer, further comprises:

[0026] Install the interferometer so that the prism dispersive spectrometer to be installed and adjusted is located between the interferometer and the target ball.

[0027] Install the curved prism on the lens holder, adjust the distance between the convex surface image point and the standard lens focal point of the interferometer, so that the interferometer receives clear interference fringes, and position the reference position of the prism dispersive spectrometer to be installed and adjusted.

[0028] A laser tracker is used to establish the part coordinate system according to the reference position of the prism dispersive spectrometer to be assembled and adjusted.

[0029] According to the reference position of the prism dispersive spectrometer to be assembled and adjusted, the spatial position of the convex spherical center point is positioned, the target ball is placed on the five-dimensional adjusting frame, and the position of the target ball is adjusted at the spatial theoretical coordinates.

[0030] The curved prism is removed, the laser spot of the interferometer passes through the center position of the lens holder, and the focal point of the standard spherical mirror converges on the surface of the target ball, that is, the optical axis is consistent.

[0031] According to the position of the optical axis, the attitude of the bottom plate is adjusted, so that the curved prism lens holder, the interferometer, and the target ball center are in a three-point one-line relationship, that is, the optical axis is centered.

[0032] In the above-mentioned space attitude assembling and adjusting method, the focal point distance of the interferometer standard lens is calculated according to the curvature radius of the convex surface of the curved prism, the F number of the interferometer standard lens is calculated, and the focal point distance is obtained.

[0033] In the above-mentioned space attitude assembling and adjusting method, in the step S1 of positioning the curved prism, the phase position of the curved prism is adjusted to the theoretical position, that is, the pitch position relationship of the curved prism is adjusted so that the interference fringes are 0 fringes.

[0034] In the above-mentioned space attitude assembling and adjusting method, in the step S2 of positioning the mirror, the pitch angle between the mirror holder and the reference surface is adjusted by grinding the bottom cutting pad of the mirror, and the azimuth angle between the mirror holder and the reference surface is adjusted by micro-rotating the mirror holder.

[0035] In the above-mentioned space attitude assembling and adjusting method, in the step S3 of positioning the coaxial lens group, the pitch angle between the coaxial lens group holder and the reference surface is adjusted by grinding the bottom cutting pad of the mirror, and the azimuth angle between the coaxial lens group holder and the reference surface is adjusted by micro-rotating the mirror holder.

[0036] A space attitude assembling and adjusting device for a prism dispersive spectrometer, comprising an air floating platform, an interferometer, an optical theodolite, a flexible joint arm, a laser tracker, a shearing table, a five-dimensional adjusting frame, and a target ball.

[0037] The prism dispersive spectrometer to be assembled and adjusted is located on the air floating platform. The air floating platform is supported by the shearing table, and the air floating platform, the shearing table, and the optical theodolite are used to adjust the level of the prism dispersive spectrometer to be assembled and adjusted.

[0038] The interferometer is located at the convex position relative to the curved prism holder, and is used for positioning the curved prism lens holder.

[0039] The target ball is located on the five-dimensional adjusting frame, and the five-dimensional adjusting frame is used to adjust the target ball to be located at the spatial theoretical coordinates.

[0040] The laser tracker is used to establish a part coordinate system according to a to-be-adjusted prism dispersion spectrometer benchmark.

[0041] The flexible joint arm is used to establish a space coordinate system.

[0042] A prism dispersion spectrometer optical system comprises coaxial lens groups, a curved surface prism and a mirror arranged in sequence along an optical path.

[0043] The coaxial lens groups, the curved surface prism and the mirror are respectively supported by a coaxial lens group support, a curved surface prism lens support and a mirror support.

[0044] The coaxial lens groups comprise lens one, lens two, lens three, lens four and lens five arranged in sequence along the optical path.

[0045] A prism dispersion spectrometer comprises the prism dispersion spectrometer optical system.

[0046] The present application has the following beneficial effects:

[0047] A space attitude adjustment device for a prism dispersion spectrometer, through benchmark precision measurement, realizes data quantization, has high positioning accuracy and strong operability.

[0048] A space attitude adjustment method for a prism dispersion spectrometer, adopts a laser tracker with an accuracy of 0.01mm, a flexible joint arm with an accuracy of 0.02mm and a self-collimation optical theodolite with an accuracy of 0.5" to perform high-precision space position positioning on each optical component in the off-axis return type optical system, and the comprehensive measurement accuracy is better than 0.03mm.

[0049] A space attitude adjustment method for a prism dispersion spectrometer, through a flexible joint arm, a unified space coordinate system is established by a mechanical benchmark, through point sampling and fitting on each lens group mounting end face, quantitative data are obtained for space position measurement, and the difficulty of assembly integration is reduced.

[0050] A space attitude adjustment method for a prism dispersion spectrometer, which has the following advantages: 1. high-precision lens lens support space attitude measurement and adjustment can be realized, and the high requirements of a hyperspectral imaging system on imaging quality are met; 2. quantitative data adjustment can be realized, and adjustment efficiency and accuracy are improved; 3. the method can adapt to the needs of different optical systems, and has good universality and scalability. BRIEF DESCRIPTION OF DRAWINGS

[0051] Figure 1 is a prism dispersion spectrometer optical system structure schematic diagram of the embodiment of the present application.

[0052] Marked in the figure: 1. curved surface prism, 2. mirror, 3. coaxial lens groups. DETAILED DESCRIPTION

[0053] The application will be further described in detail below in combination with the drawings and specific examples.

[0054] Example 1

[0055] The application proposes a high-precision spatial attitude phase adjustment method based on a prism dispersion spectrometer, which is based on a prism dispersion hyperspectral imaging system and high-precision measurement technology. The method uses high-precision instrument equipment networking measurement, quantifies relevant data, and realizes accurate adjustment of the spatial attitude of a curved prism. Specifically, the application uses an optical system as the core, combines high-precision measurement technologies such as laser tracker measurement technology, theodolite measurement technology, and interferometer measurement technology, and constructs a high-precision measurement network. By collecting and analyzing the spatial position information of the lens under different attitudes, combined with the high-precision spatial positioning information provided by the measurement network, the spatial attitude of each lens in the optical system can be accurately measured and adjusted.

[0056] The optical path specifically built in the application includes a product assembly to be adjusted, an air floating platform, an interferometer, a theodolite, a flexible joint arm, a laser tracker, a shearing table, a five-dimensional adjusting frame, and the like.

[0057] A spatial attitude adjustment method based on a prism dispersion spectrometer, the optical system of the prism dispersion spectrometer is sequentially arranged along the optical path as (lens one, lens two, lens three, lens four, lens five) coaxial mirror group, curved prism, mirror (such as shown in the figure). Figure 1 The specific method includes the following steps:

[0058] 1. Accurately positioning the curved prism;

[0059] 2. Place the product on the air floating platform, supported by the shearing table, and adjust it to the ground level using the optical theodolite;

[0060] 3. Take the mechanical reference as the X and Y surfaces, the support mounting surface as the Z surface, and the flexible joint arm to sample and fit to establish a spatial coordinate system;

[0061] 4. According to the optical system design, pre-plan the initial installation position of the visible curved prism;

[0062] 5. Install the curved prism lens support, adjust the spatial position of the curved prism lens installation support using the flexible joint arm, so that it reaches the theoretical position deviation (based on the side surface of the product bottom plate);

[0063] 6. Place the interferometer at the convex surface position relative to the curved prism frame;

[0064] 7. According to the convex curvature radius of the curved prism, select a suitable standard lens;

[0065] 8. Interferometer installs standard lens, determines product space position according to standard lens focal point position, and places product in the position between interferometer and target ball;

[0066] 9. Installs curved surface prism in lens support, adjusts convex surface image point and standard lens focal point distance, ensures that interferometer can receive clear interference fringes (0 fringes), and positions product front and back distance at the position;

[0067] 10. Establishes part coordinate system according to product datum on laser tracker;

[0068] 11. Positions convex surface ball center point space position according to product position datum, places target ball in five-dimensional adjusting support, and adjusts target ball space posture position at space theoretical coordinate;

[0069] 12. Takes out curved surface prism, and interferometer laser spot passes through center position of lens support;

[0070] 13. Standard spherical mirror focal point converges on target ball surface, so that optical axis is consistent;

[0071] 14. According to optical axis position, adjusts spectrometer bottom posture again, so that curved surface prism lens support, interferometer and target ball center are in three-point one-line, and optical axis is centered;

[0072] 15. Installs curved surface prism, reflects convex surface image point of curved surface prism, rotates curved surface prism to adjust curved surface prism image point, so that image point returns, and adjustment is performed to the state that image point is coincident with interferometer image point center;

[0073] 16. (adjusts interference fringes to the best state by adjusting pitch and azimuth position relationship of curved surface prism, and considers that the state of 0 fringes is the best, and the phase direction is considered to be coincident with ball center image point position at back) considers that the phase position of curved surface prism is adjusted to the theoretical position;

[0074] 17. Accurately positions reflector;

[0075] 18. According to optical system design requirement, establishes space coordinate system by flexible joint arm sampling;

[0076] 19. Installs reflector support according to pre-planned reflector position, and samples reflector installation end face by flexible joint arm, and fits points into a surface;

[0077] 20. Measures the included angle between reflector installation end face and X, Y and Z datum surface, adjusts pitch and azimuth angle of reflector support, and ensures that the angle is within the error range of theoretical angle;

[0078] 21. Adjusts the pitch included angle between reflector support and datum surface by grinding reflector bottom cutting pad, and adjusts azimuth angle by micro-rotating reflector support;

[0079] 22. Precise positioning of coaxial mirror group;

[0080] 23. Installing coaxial mirror group support according to pre-planned coaxial mirror group position, using flexible joint arm to sample coaxial mirror group installation end face, and fitting sampling points into a plane;

[0081] 24. Measuring the included angle between coaxial mirror group installation end face and X, Y, Z reference plane, adjusting the pitch and azimuth angle of coaxial mirror group support to ensure that the included angle is within the theoretical error range;

[0082] The pitch included angle between coaxial mirror group support and reference plane is adjusted by polishing the bottom of the mirror, and the azimuth angle is adjusted by micro-rotating the mirror support.

[0083] A space attitude adjustment method for a prism dispersion spectrometer, which adopts a laser tracker (accuracy 0.01 mm), a flexible joint arm (accuracy 0.02 mm), and a self-collimation optical theodolite (0.5") to perform high-precision space position positioning on each optical component in an off-axis return type optical system, and to perform precise measurement, with a comprehensive measurement accuracy better than 0.03 mm.

Claims

1. A method of spatial alignment of a prism dispersion type spectrometer, characterized by, The method comprises the following steps: Step S1, curved prism positioning: First step, establish a space coordinate system: place the prism dispersive spectrometer to be adjusted on an air floating platform supported by a shear table, use an optical theodolite to adjust the prism dispersive spectrometer to be adjusted to be horizontal; take the mechanical reference as the X and Y planes, the mounting surface of the support as the Z plane, and the flexible joint arm to sample and fit to establish a space coordinate system; Second step, install the curved prism lens support: use the flexible joint arm to adjust the space position of the curved prism lens support, so that the space position of the curved prism lens support reaches the theoretical position; Third step, install the interferometer: install the interferometer; install and remove the curved prism; use a five-dimensional adjusting frame and a laser tracker to make the curved prism lens support, the interferometer and the target ball center to be in a straight line, and the optical axis to be centered; Fourth step, install the curved prism: install the curved prism to make the convex surface of the curved prism reflect; adjust the image point of the curved prism, rotate the curved prism to make the image point return, and adjust to be coincident with the image point center of the interferometer; adjust the phase position of the curved prism to be the theoretical position; Step S2, mirror positioning: First step, install the mirror support: take points by the flexible joint arm to establish a space coordinate system of the mirror support, and fit to be the mounting end surface of the mirror support; install the mirror support according to the position of the mounting end surface of the mirror support; Second step, fine-tune the mirror support: measure the included angle between the mounting end surface of the mirror and the X, Y and Z planes, and adjust the pitch angle and azimuth angle of the mirror support so that the angles are within the error range of the theoretical angles; Step S3, coaxial mirror group positioning: First step, install the coaxial mirror group support: use the flexible joint arm to take points and fit to be the mounting end surface of the coaxial mirror group, and install the coaxial mirror group support according to the position of the mounting end surface of the coaxial mirror group; Second step, fine-tune the coaxial mirror group support: measure the included angle between the mounting end surface of the coaxial mirror group and the X, Y and Z planes, and adjust the pitch angle and azimuth angle of the coaxial mirror group support so that the angles are within the error range of the theoretical angles.

2. The method of claim 1, wherein: The third step of the step S1, installing the interferometer, further comprises: Install the interferometer so that the prism dispersive spectrometer to be adjusted is located between the interferometer and the target ball; Install the curved prism on the lens support, adjust the distance between the convex surface image point and the standard lens focal point of the interferometer, so that the interferometer receives clear interference fringes, and position the reference position of the prism dispersive spectrometer to be adjusted; Use the laser tracker to establish the part coordinate system of the prism dispersive spectrometer to be adjusted according to the reference position of the prism dispersive spectrometer to be adjusted; According to the reference position of the prism dispersive spectrometer to be adjusted, position the space position of the convex sphere center point, place the target ball on the five-dimensional adjusting frame, and adjust the position of the target ball to be at the space theoretical coordinates; Remove the curved prism, and the laser spot of the interferometer passes through the center position of the lens support, the focal point of the standard spherical mirror converges on the surface of the target ball, that is, the optical axes are consistent; According to the position of the optical axis, adjust the attitude of the bottom plate, so that the curved prism lens support, the interferometer and the target ball center are in a straight line, that is, the optical axes are centered.

3. The method of claim 2, wherein: The standard lens focal point distance of the interferometer is calculated according to the curvature radius of the convex surface of the curved prism, the F number of the standard lens of the interferometer is obtained, and the focal point distance is obtained.

4. The method of claim 1, wherein: In the step S1, the phase position of the curved prism is adjusted to the theoretical position, that is, the pitch position relationship of the curved prism is adjusted so that the interference fringes are 0.

5. The method of claim 1, wherein: In the step S2, the pitch angle between the mirror support and the reference surface is adjusted by polishing the bottom of the mirror, and the azimuth angle between the mirror support and the reference surface is adjusted by micro-rotating the mirror support.

6. The method of claim 1, wherein: In the step S3, the pitch angle between the coaxial mirror group support and the reference surface is adjusted by polishing the bottom of the mirror, and the azimuth angle between the coaxial mirror group support and the reference surface is adjusted by micro-rotating the mirror support.

7. An apparatus for implementing the method of any one of claims 1 to 6, characterized by The system comprises an air floating platform, an interferometer, an optical theodolite, a flexible joint arm, a laser tracker, a shearing table, a five-dimensional adjusting frame, and a target ball. The prism to be adjusted is located on the air floating platform, which is supported by the shearing table. The interferometer is located at the convex position of the curved prism support, and is used for positioning the curved prism lens support. The target ball is located on the five-dimensional adjusting frame, which is used for adjusting the target ball to be located at the theoretical coordinate in space. The laser tracker is used for establishing a part coordinate system according to the reference of the prism to be adjusted. The flexible joint arm is used for sampling points to establish a space coordinate system.

8. An optical system of a prism dispersion type spectrometer for carrying out the method according to any one of claims 1 to 6, characterized in that The system comprises a coaxial mirror group (2), a curved prism (1), and a mirror (3) arranged in sequence along an optical path. The coaxial mirror group (2), the curved prism (1), and the mirror (3) are respectively supported by a coaxial mirror group support, a curved prism lens support, and a mirror support. The coaxial mirror group (2) comprises lens one, lens two, lens three, lens four, and lens five arranged in sequence along the optical path.

9. A prism dispersion type spectrometer characterized by comprising: The system comprises the prism dispersion type spectrometer optical system of claim 8. The system comprises the prism dispersion type spectrometer optical system of claim 8.

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