Performance characterization system

Abstract

A performance characterization system disclosed by the present invention comprises an accommodating assembly, a bearing assembly, a test assembly and a temperature control assembly, the accommodating assembly comprises a vacuum part and an accommodating part, the vacuum part is provided with a vacuum cavity, the accommodating part is provided with an accommodating cavity, and the accommodating part is arranged in the vacuum cavity; the bearing assembly comprises a bearing piece and a diaphragm, the bearing piece is arranged in the accommodating cavity, the diaphragm is arranged on the bearing piece, and the bearing piece is suitable for bearing a to-be-tested piece; the test assembly comprises a refrigeration part and a black body, the refrigeration part is arranged on the vacuum part, the refrigeration part is provided with a first refrigeration part and a second refrigeration part, the first refrigeration part is suitable for penetrating through the vacuum part to extend into the vacuum cavity, the second refrigeration part is suitable for penetrating through the containing part to extend into the containing cavity, and the black body is arranged in the containing cavity and opposite to the diaphragm; the temperature control assembly comprises a first temperature control piece and a second temperature control piece, the first temperature control piece is arranged on the bearing piece, and the second temperature control piece is arranged on the black body. The performance characterization system with the structure can effectively improve the measurement precision of the test piece to be tested.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor device performance testing, and in particular to a performance characterization system. Background Art

[0002] The performance characterization system of low-temperature infrared semiconductor devices is a comprehensive system used to evaluate the performance of infrared detectors in low-temperature environments. It includes low-temperature environment control, infrared light source and optical system, detector and signal reading equipment, signal processing and analysis tools, test software, test environment and DUT platform, power supply and control system, etc. The system ensures the performance of the device in practical applications by measuring key parameters such as noise, response rate, detection rate, quantum efficiency, etc.

[0003] Existing performance characterization systems for low-temperature infrared semiconductor devices often have the following limitations: First, they are bulky, complex systems, and complex and expensive refrigeration systems. Refrigeration systems that maintain extremely low temperature environments (such as liquid nitrogen or liquid helium) are usually complex and costly. Second, due to noise, background radiation, and system instability, measurements of low signal strengths are easily disturbed, affecting the accuracy and repeatability of the measurements. Third, low-temperature testing involves multiple complex steps, including maintaining a vacuum environment, precise positioning of the test piece, and adjustment of the optical system, which requires highly specialized operations, is time-consuming, and prone to errors. These problems result in low measurement accuracy in existing performance characterization systems for low-temperature infrared semiconductor devices, and restrict the development and widespread application of low-temperature infrared semiconductor device characterization systems. Summary of the invention

[0004] Therefore, the technical problem to be solved by the present invention is to overcome the defect of low measurement accuracy of the existing performance characterization system of low-temperature infrared semiconductor devices.

[0005] To this end, the present invention provides a performance characterization system, comprising:

[0006] A containing component, comprising a vacuum component and a containing component, wherein the vacuum component has a vacuum cavity, the containing component has a containing cavity, and the containing component is arranged in the vacuum cavity;

[0007] A bearing assembly, comprising a bearing member and an aperture, wherein the bearing member is arranged in the accommodating cavity, the aperture is arranged on the bearing member, and the bearing member is suitable for carrying a test object;

[0008] A test assembly, comprising a refrigeration element and a black body, wherein the refrigeration element is arranged on the vacuum element, the refrigeration element has a first refrigeration part and a second refrigeration part, the first refrigeration part is suitable for penetrating the vacuum element and extending into the vacuum cavity, the second refrigeration part is suitable for penetrating the containing element and extending into the containing cavity, the black body is arranged in the containing cavity and is arranged opposite to the aperture;

[0009] A temperature control component, comprising a first temperature control component and a second temperature control component, wherein the first temperature control component is arranged on the carrier, and the second temperature control component is arranged on the black body;

[0010] Among them, the first refrigeration part is suitable for refrigerating the accommodating cavity, the second refrigeration part is suitable for refrigerating the vacuum cavity, the black body is suitable for generating radiation, the aperture is suitable for directing the radiation to the test piece on the carrier, the first temperature control unit is suitable for detecting and regulating the temperature of the test piece, and the second temperature control unit is suitable for detecting and regulating the temperature of the black body.

[0011] Optionally, in the above-mentioned performance characterization system, when the second refrigeration part penetrates the accommodating member and extends into the accommodating cavity, the second refrigeration part is arranged opposite to the to-be-tested member on the supporting member.

[0012] Optionally, in the above-mentioned performance characterization system, the first temperature control unit has a first detection unit and a first heating unit, the first detection unit is suitable for detecting the temperature of the test piece, and the first heating unit is suitable for heating the test piece to maintain the temperature of the test piece.

[0013] Optionally, in the above-mentioned performance characterization system, the second temperature control unit has a second detection unit and a second heating unit, the second detection unit is suitable for detecting the temperature of the black body, and the second heating unit is suitable for heating the black body to adjust the radiation generated by the black body.

[0014] Optionally, the above-mentioned performance characterization system also includes a host computer, which is arranged on one side of the vacuum component, and is electrically connected to the first temperature control unit and the second temperature control unit to display the temperature of the test piece and the black body, and to regulate the temperature of the test piece and the black body through the first temperature control unit and the second temperature control unit.

[0015] Optionally, in the above performance characterization system, the host computer is also electrically connected to the device to be tested to display test data of the device to be tested.

[0016] Optionally, the above-mentioned performance characterization system also includes a connecting component, which includes a first connecting member, a second connecting member and a third connecting member, wherein two ends of the first connecting member are electrically connected to the first temperature control unit and the host computer respectively, two ends of the second connecting member are electrically connected to the second temperature control unit and the host computer respectively, and two ends of the third connecting member are electrically connected to the test piece and the host computer respectively.

[0017] Optionally, in the above-mentioned performance characterization system, the vacuum part is provided with a first plug-in part, a second plug-in part and a third plug-in part, the first connecting member is suitable for passing through the first plug-in part, the second connecting member is suitable for passing through the second plug-in part, and the third connecting member is suitable for passing through the third plug-in part.

[0018] Optionally, in the above-mentioned performance characterization system, a first mounting portion is provided on the vacuum component, and a second mounting portion is provided on the containing component. When the refrigeration component is installed on the vacuum component, the first refrigeration component is suitable for extending into the vacuum chamber through the first mounting portion, and the second refrigeration component is suitable for extending into the containing chamber through the second mounting portion.

[0019] Optionally, in the above-mentioned performance characterization system, the temperature detection and regulation range of the first temperature control unit is 2-400K, and the temperature detection and regulation range of the second temperature control unit is 4-1000K.

[0020] The technical solution provided by the present invention has the following advantages:

[0021] 1. The performance characterization system provided by the present invention arranges the test piece in a containing chamber so that the test piece is in a vacuum state; and cools the test piece by the second refrigeration part of the refrigeration part, and maintains the temperature in the containing chamber by the first refrigeration part of the refrigeration part, so that the temperature of the test piece can meet the test requirements; and finely controls the temperature of the test piece by the first temperature control part, and adjusts the radiation generated by the black body by the second temperature control part, so that the radiation received by the test piece can meet the test standard; thereby, the measurement accuracy of the test piece can be effectively improved, and it is conducive to accelerating the development and application of the performance characterization system. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0023] Figure 1 A schematic plan view of a performance characterization system provided in an embodiment of the present invention;

[0024] Description of reference numerals:

[0025] 1- containing component; 11- vacuum component; 12- containing component;

[0026] 2-carrying assembly; 21-carrying member; 22-aperture;

[0027] 31-refrigeration element; 311-first refrigeration unit; 312-second refrigeration unit; 32-black body;

[0028] 4-temperature control component; 41-first temperature control component; 42-second temperature control component;

[0029] 5-connection assembly; 51-first connection member; 52-second connection member; 53-third connection member;

[0030] 6- Host computer; 7- Item to be tested. DETAILED DESCRIPTION

[0031] The technical solution of the present invention will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0032] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0033] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0034] In addition, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0035] Example

[0036] This embodiment provides a performance characterization system, such as Figure 1As shown, it includes a containing component 1, a bearing component 2, a test component and a temperature control component 4. The containing component 1 includes a vacuum component 11 and a containing component 12. The vacuum component 11 has a vacuum cavity, and the containing component 12 has a containing cavity. The containing component 12 is arranged in the vacuum cavity; the bearing component 2 includes a bearing component 21 and an aperture 22. The bearing component 21 is arranged in the containing cavity, and the aperture 22 is arranged on the bearing component 21. The bearing component 21 is suitable for carrying the test piece 7; the test component includes a refrigeration component 31 and a black body 32. The refrigeration component 31 is arranged on the vacuum component 11. The refrigeration component 31 has a first refrigeration part 311 and a second refrigeration part 312. The first refrigeration part 311 is suitable for penetrating the vacuum component 11 and extending into the vacuum cavity The second refrigeration part 312 is suitable for penetrating the accommodating member 12 and extending into the accommodating cavity. The black body 32 is arranged in the accommodating cavity and is arranged relative to the aperture 22. The temperature control component 4 includes a first temperature control part 41 and a second temperature control part 42. The first temperature control part 41 is arranged on the carrier 21, and the second temperature control part 42 is arranged on the black body 32. The first refrigeration part 311 is suitable for refrigerating the accommodating cavity, the second refrigeration part 312 is suitable for refrigerating the vacuum cavity, the black body 32 is suitable for generating radiation, the aperture 22 is suitable for directing the radiation to the test piece 7 on the carrier 21, the first temperature control part 41 is suitable for detecting and regulating the temperature of the test piece 7, and the second temperature control part 42 is suitable for detecting and regulating the temperature of the black body 32.

[0037] The performance characterization system of the above structure is provided with a bearing component 2, a test component and a temperature control component 4 in a containing component 1, wherein the containing component 1 specifically includes a vacuum component 11 and a containing component 12. In the present embodiment, the vacuum component 11 and the containing component 12 are respectively a vacuum dewar and a low-temperature cold shield. The vacuum component 11 has a vacuum cavity, and the containing component 12 is arranged in the vacuum cavity, so that the containing component 12 can be in a vacuum state, and the containing component 12 has a containing cavity. The bearing component 2 specifically includes a bearing component 21 and an aperture 22. The bearing component 21 is a sample table in the present embodiment. The bearing component 21 is specifically arranged in the containing cavity, and the bearing component 21 can carry a test piece 7. The test piece 7 in the present embodiment is a low-temperature infrared semiconductor device, so that the test piece 7 is arranged in the containing cavity and the test piece 7 can be in a vacuum state. The aperture 22 is arranged on the bearing component 21.

[0038] The test assembly specifically includes a refrigeration component 31 and a black body 32. The refrigeration component 31 in this embodiment is a two-stage GM refrigerator, a two-stage GM pulse tube refrigerator, a two-stage Stirling refrigerator or a two-stage Stirling pulse tube refrigerator, etc. The refrigeration component 31 is specifically arranged on the vacuum component 11, and the refrigeration component 31 has a first refrigeration part 311 and a second refrigeration part 312. The first refrigeration part 311 and the second refrigeration part 312 are a first-stage cold head and a second-stage cold head respectively in this embodiment, wherein the first refrigeration part 311 can penetrate the vacuum component 11 and extend into the vacuum chamber, thereby The vacuum chamber is cooled, and the second cooling portion 312 can penetrate the accommodating member 12 and extend into the accommodating chamber, thereby cooling the accommodating chamber, and then cooling the test piece 7 arranged in the accommodating chamber, so that the temperature of the test piece 7 is at the required temperature of the test. The black body 32 is arranged in the accommodating chamber and is arranged relative to the aperture 22. The black body 32 can generate radiation, and the aperture 22 can guide the radiation generated by the black body 32 to the test piece 7, thereby providing a stable wide-spectrum signal to the test piece 7, thereby meeting the background radiation required by the test piece 7.

[0039] The temperature control assembly 4 specifically includes a first temperature control unit 41 and a second temperature control unit 42. The first temperature control unit 41 is arranged on the carrier 21, so that the first temperature control unit 41 can detect the temperature of the test piece 7 placed on the carrier 21, and the first temperature control unit 41 can also adjust the temperature of the test piece 7, so that the temperature of the test piece 7 can meet the required temperature of the test. The second temperature control unit 42 is arranged on the black body 32, so that the second temperature control unit 42 can detect the temperature of the black body 32, and the second temperature control unit 42 can also adjust the temperature of the black body 32 to adjust the radiation generated by the black body 32, so that the radiation generated by the black body 32 can meet the radiation requirements of the test piece 7. By recording the response voltage of the test piece 7 at each temperature, the performance test of the wide-band response of the test piece 7 can be achieved.

[0040] In addition, by integrating the bearing component 2, the test component and the temperature control component 4 into the vacuum component 11 of the housing component 1, it is helpful to reduce the volume of the overall structure of the performance characterization system, and can make full use of the space in the system, and make full use of the cooling capacity generated by the refrigeration component 31. At the same time, the vacuum tightness is high, the optical system is simple, and the temperature control accuracy is high, which can effectively suppress background radiation and noise, reduce the complexity of operation, and the temperature can be continuously and stably adjusted within the temperature control range, and the temperature data and signal data can be collected synchronously, so that the performance response test results of the low-temperature infrared semiconductor device can be obtained conveniently, and the low-temperature infrared semiconductor device can realize wide-spectrum response detection under a wide operating temperature, thereby meeting a wider range of application needs, and has great application prospects.

[0041] In summary, the test piece 7 is arranged in the accommodating chamber so that the test piece 7 is in a vacuum state; the test piece 7 is cooled by the second refrigeration part 312 of the refrigeration part 31, and the temperature in the accommodating chamber is maintained by the first refrigeration part 311 of the refrigeration part 31, so that the temperature of the test piece 7 can meet the test requirements; the temperature of the test piece 7 is finely regulated by the first temperature control part 41, and the radiation generated by the black body 32 is adjusted by the second temperature control part 42, so that it can provide a stable wide-spectrum signal, and the radiation received by the test piece 7 can meet the test standard; thereby, the measurement accuracy of the test piece 7 can be effectively improved, and it is beneficial to accelerate the development and application of the performance characterization system.

[0042] The performance characterization system provided in this embodiment is as follows: Figure 1 As shown, when the second refrigeration portion 312 penetrates the accommodating member 12 and extends into the accommodating cavity, the second refrigeration portion 312 is arranged opposite to the to-be-tested member 7 on the supporting member 21 .

[0043] The performance characterization system of the above structure is configured such that when the second refrigeration part 312 penetrates the accommodating part 12 and extends into the accommodating cavity, the second refrigeration part 312 is arranged relative to the test piece 7 on the supporting part 21, so that the second refrigeration part 312 can directly cool the test piece 7, which is beneficial to increase the temperature change rate of the test piece 7 and enable the test piece 7 to quickly reach the temperature required for the test.

[0044] The performance characterization system provided in this embodiment is as follows: Figure 1 As shown, the first temperature control unit 41 has a first detection unit and a first heating unit, the first detection unit is suitable for detecting the temperature of the test piece 7, and the first heating unit is suitable for heating the test piece 7 to maintain the temperature of the test piece 7. The temperature detection and control range of the first temperature control unit 41 is 2-400K.

[0045] The performance characterization system of the above structure is provided with a first temperature control unit 41 having a first detection unit and a first heating unit. In the present embodiment, the first detection unit and the first heating unit are respectively a first sensor and a first heater, wherein the first detection unit is capable of detecting the temperature of the test piece 7 on the carrier 21 in real time to determine whether the temperature of the test piece 7 is at the test required temperature, and the first heating unit is capable of heating the test piece 7, so that when the temperature of the test piece 7 is lower than the test required temperature, the first heating unit is capable of heating the test piece 7 to return its temperature to the test required temperature.

[0046] Specifically, the temperature detection and regulation range of the first temperature control unit 41 is 2-400K, and the temperature control range of the first temperature control unit 41 is from 2-102K, with temperature control performed every 10K, and from 102-402K, with temperature control performed every 50K. This is beneficial for precise control of the temperature of the test piece 7.

[0047] The performance characterization system provided in this embodiment is as follows: Figure 1 As shown, the second temperature control unit 42 has a second detection unit and a second heating unit, the second detection unit is suitable for detecting the temperature of the black body 32, and the second heating unit is suitable for heating the black body 32 to adjust the radiation generated by the black body 32. The temperature detection and control range of the second temperature control unit 42 is 4-1000K.

[0048] The performance characterization system of the above structure has a second detection part and a second heating part by setting the second temperature control part 42. The second detection part and the second heating part are respectively a second sensor and a second heater in this embodiment, wherein the second detection part can detect the temperature of the black body 32 in real time to determine whether the radiation generated by the black body 32 at the current temperature meets the test requirement radiation of the test piece 7, and the second heating part can heat the black body 32 to regulate the temperature of the black body 32, thereby adjusting the radiation generated by the black body 32 by regulating the temperature of the black body 32, and then making the radiation generated by the black body 32 meet the test requirement radiation of the test piece 7.

[0049] Specifically, the temperature detection and regulation range of the second temperature control unit 42 is 4-1000K, and the temperature control range of the second temperature control unit 42 is 4-104K with temperature control performed every 10K, and 104-1004K with temperature control performed every 50K, so that the black body 32 can provide a stable wide-spectrum signal.

[0050] The performance characterization system provided in this embodiment is as follows: Figure 1 As shown, it also includes a host computer 6, which is arranged on one side of the vacuum component 11. The host computer 6 is electrically connected to the first temperature control unit 41 and the second temperature control unit 42 to display the temperature of the test piece 7 and the black body 32, and the temperature of the test piece 7 and the black body 32 is regulated by the first temperature control unit 41 and the second temperature control unit 42.

[0051] The performance characterization system of the above structure is provided with a host computer 6 on one side of the vacuum component 11. The host computer 6 is a control terminal in this embodiment. The host computer 6 is specifically electrically connected to the first temperature control unit 41 and the second temperature control unit 42, so that the host computer 6 can display the temperatures of the test piece 7 and the black body 32 detected by the first temperature control unit 41 and the human temperature control unit, and the host computer 6 can also control the first temperature control unit 41 and the second temperature control unit 42 to heat the test piece 7 and the black body 32 respectively, so as to regulate the temperatures of the test piece 7 and the black body 32, so that the temperature of the test piece 7 can meet the test requirement temperature, and the radiation generated by the black body 32 meets the test radiation requirement.

[0052] The performance characterization system provided in this embodiment is as follows: Figure 1As shown, the host computer 6 is also electrically connected to the test piece 7 to display the test data of the test piece 7 .

[0053] The performance characterization system of the above structure is configured to electrically connect the host computer 6 with the test piece 7 so that the host computer 6 can display the test data of the test piece 7 during the test process to facilitate observation by the staff.

[0054] The performance characterization system provided in this embodiment is as follows: Figure 1 As shown, it also includes a connecting component 5, which includes a first connecting member 51, a second connecting member 52 and a third connecting member 53. The two ends of the first connecting member 51 are electrically connected to the first temperature control unit 41 and the host computer 6 respectively, the two ends of the second connecting member 52 are electrically connected to the second temperature control unit 42 and the host computer 6 respectively, and the two ends of the third connecting member 53 are electrically connected to the test piece 7 and the host computer 6 respectively.

[0055] The performance characterization system of the above structure is provided with a connecting component 5 between the host computer 6 and the temperature control component 4. The connecting component 5 specifically includes a first connecting member 51, a second connecting member 52 and a third connecting member 53. The first connecting member 51, the second connecting member 52 and the third connecting member 53 are respectively the first cable, the second cable and the third cable in this embodiment, wherein the two ends of the first connecting member 51 are respectively electrically connected to the first temperature control component 41 and the host computer 6, so that the host computer 6 can display the temperature detected by the first temperature control component 41, and can also heat the test piece 7 through the instruction sent by the host computer 6, the two ends of the second connecting member 52 are respectively electrically connected to the second temperature control component 42 and the host computer 6, so that the host computer 6 can display the temperature detected by the second temperature control component 42, and can also heat the black body 32 through the instruction sent by the host computer 6, and the two ends of the third connecting member 53 are respectively electrically connected to the test piece 7 and the host computer 6, so that the host computer 6 can display the test data of the test piece 7 during the test process, so as to facilitate observation by the staff.

[0056] The performance characterization system provided in this embodiment is as follows: Figure 1 As shown, the vacuum member 11 is provided with a first plug-in portion, a second plug-in portion and a third plug-in portion, the first connecting member 51 is suitable for passing through the first plug-in portion, the second connecting member 52 is suitable for passing through the second plug-in portion, and the third connecting member 53 is suitable for passing through the third plug-in portion.

[0057] The performance characterization system of the above structure is provided with a first plug-in portion, a second plug-in portion and a third plug-in portion on the vacuum component 11. The first plug-in portion, the second plug-in portion and the third plug-in portion are respectively the first vacuum plug-in portion, the second vacuum plug-in portion and the third vacuum plug-in portion in this embodiment, wherein the first connecting member 51 can pass through the first plug-in portion, so that its two ends can be electrically connected to the first temperature control unit 41 and the host computer 6 respectively, the second connecting member 52 can pass through the second plug-in portion, so that its two ends can be electrically connected to the second temperature control unit 42 and the host computer 6 respectively, the third connecting member 53 can pass through the third plug-in portion, so that its two ends can be electrically connected to the test piece 7 and the host computer 6 respectively, and while the connecting members are electrically connected, due to the existence of the plug-in portions, the vacuum chamber of the vacuum component 11 can still be in a vacuum state.

[0058] The performance characterization system provided in this embodiment is as follows: Figure 1 As shown, a first mounting portion is provided on the vacuum component 11, and a second mounting portion is provided on the accommodating component 12. When the refrigerating component 31 is installed on the vacuum component 11, the first refrigerating portion 311 is suitable for extending into the vacuum cavity through the first mounting portion, and the second refrigerating portion 312 is suitable for extending into the accommodating cavity through the second mounting portion.

[0059] The performance characterization system of the above structure is provided with a first mounting portion on the vacuum component 11 and a second mounting portion on the accommodating component 12. In the present embodiment, the first mounting portion and the second mounting portion are respectively a first mounting hole and a second mounting hole. When the refrigeration component 31 is installed on the vacuum component 11, the first refrigeration portion 311 can extend into the vacuum chamber through the first mounting portion to cool the vacuum chamber, and the second refrigeration portion 312 can extend into the accommodating chamber through the second mounting portion to cool the accommodating chamber and cool the test piece 7 arranged in the accommodating chamber.

[0060] The performance characterization system provided by the present invention arranges the test piece 7 in the accommodating chamber so that the test piece 7 is in a vacuum state; and cools the test piece 7 by the second refrigeration part 312 of the refrigeration part 31, and maintains the temperature in the accommodating chamber by the first refrigeration part 311 of the refrigeration part 31, so that the temperature of the test piece 7 can meet the test requirements; and the temperature of the test piece 7 is finely regulated by the first temperature control part 41, and the radiation generated by the black body 32 is adjusted by the second temperature control part 42, so that the radiation received by the test piece 7 can meet the test standard; thereby, the measurement accuracy of the test piece 7 can be effectively improved, and it is conducive to accelerating the development and application of the performance characterization system.

[0061] Obviously, the above embodiments are merely examples for the purpose of clear explanation, and are not intended to limit the implementation methods. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation methods here. The obvious changes or modifications derived therefrom are still within the scope of protection of the invention.

Claims

1. A performance characterization system, characterized in that: include: A containing assembly (1) comprising a vacuum component (11) and a containing component (12), wherein the vacuum component (11) has a vacuum cavity, the containing component (12) has a containing cavity, and the containing component (12) is arranged in the vacuum cavity; A bearing assembly (2), comprising a bearing member (21) and an aperture (22), wherein the bearing member (21) is arranged in the accommodating cavity, the aperture (22) is arranged on the bearing member (21), and the bearing member (21) is suitable for bearing a to-be-tested object (7); A test assembly, comprising a refrigeration component (31) and a black body (32), wherein the refrigeration component (31) is arranged on the vacuum component (11), the refrigeration component (31) has a first refrigeration part (311) and a second refrigeration part (312), the first refrigeration part (311) is suitable for penetrating the vacuum component (11) and extending into the vacuum cavity, and the second refrigeration part (312) is suitable for penetrating the containing component (12) and extending into the containing cavity, and the black body (32) is arranged in the containing cavity and is arranged opposite to the aperture (22); A temperature control component (4), comprising a first temperature control component (41) and a second temperature control component (42), wherein the first temperature control component (41) is arranged on the carrier (21), and the second temperature control component (42) is arranged on the black body (32); The first refrigeration part (311) is suitable for refrigerating the containing cavity, the second refrigeration part (312) is suitable for refrigerating the vacuum cavity, the black body (32) is suitable for generating radiation, the aperture (22) is suitable for directing the radiation to the test piece (7) on the carrier (21), the first temperature control unit (41) is suitable for detecting and regulating the temperature of the test piece (7), and the second temperature control unit (42) is suitable for detecting and regulating the temperature of the black body (32).

2. The performance characterization system according to claim 1, characterized in that: When the second refrigeration part (312) penetrates the accommodating member (12) and extends into the accommodating cavity, the second refrigeration part (312) is arranged relative to the to-be-tested member (7) on the supporting member (21).

3. The performance characterization system according to claim 2, characterized in that: The first temperature control unit (41) comprises a first detection unit and a first heating unit, wherein the first detection unit is suitable for detecting the temperature of the test object (7), and the first heating unit is suitable for heating the test object (7) to maintain the temperature of the test object (7).

4. The performance characterization system according to claim 3, characterized in that: The second temperature control unit (42) has a second detection part and a second heating part, wherein the second detection part is suitable for detecting the temperature of the black body (32), and the second heating part is suitable for heating the black body (32) to adjust the radiation generated by the black body (32).

5. The performance characterization system according to any one of claims 1 to 4, characterized in that: The invention also comprises a host computer (6), wherein the host computer (6) is arranged on one side of the vacuum component (11), and the host computer (6) is electrically connected to the first temperature control unit (41) and the second temperature control unit (42) so as to display the temperature of the test piece (7) and the black body (32), and to adjust the temperature of the test piece (7) and the black body (32) through the first temperature control unit (41) and the second temperature control unit (42).

6. The performance characterization system according to claim 5, characterized in that: The host computer (6) is also electrically connected to the test piece (7) to display the test data of the test piece (7).

7. The performance characterization system according to claim 6, characterized in that: The device also comprises a connection component (5), wherein the connection component (5) comprises a first connection member (51), a second connection member (52) and a third connection member (53), wherein two ends of the first connection member (51) are electrically connected to the first temperature control member (41) and the host computer (6) respectively, two ends of the second connection member (52) are electrically connected to the second temperature control member (42) and the host computer (6) respectively, and two ends of the third connection member (53) are electrically connected to the device to be tested (7) and the host computer (6) respectively.

8. The performance characterization system according to claim 7, characterized in that: The vacuum member (11) is provided with a first plug-in portion, a second plug-in portion and a third plug-in portion, the first connecting member (51) is suitable for passing through the first plug-in portion, the second connecting member (52) is suitable for passing through the second plug-in portion, and the third connecting member (53) is suitable for passing through the third plug-in portion.

9. The performance characterization system according to claim 8, characterized in that: The vacuum component (11) is provided with a first mounting portion, and the accommodating component (12) is provided with a second mounting portion. When the refrigerating component (31) is installed on the vacuum component (11), the first refrigerating component (311) is suitable for extending into the vacuum chamber through the first mounting portion, and the second refrigerating component (312) is suitable for extending into the accommodating chamber through the second mounting portion.

10. The performance characterization system according to claim 1, characterized in that: The temperature detection and regulation range of the first temperature control unit (41) is 2-400K, and the temperature detection and regulation range of the second temperature control unit (42) is 4-1000K.

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