Detection device and method of photoetching illumination system

Abstract

The invention discloses a detection device and method for a photoetching illumination system, and belongs to the technical field of photoetching illumination detection.The detection device comprises a mounting frame, an objective lens, a bearing table used for containing a silicon wafer and a placement frame used for containing a mask plate, an air pump is arranged in the mounting frame, and the output end of the air pump communicates with an inner cavity of the placement frame through an air pipe; a second motor is fixedly mounted at the top end of the mounting frame, an output shaft of the second motor is fixedly connected with a rotating shaft, a rotating block is fixedly mounted at the bottom end of the rotating shaft, a connecting rod is slidably mounted on the rotating block, and a plurality of adsorption blocks are slidably mounted on the connecting rod; the adsorption assembly is arranged in the adsorption block and used for adsorbing the mask plate on the placement frame, and through cooperative use of the structures, the time for replacing the mask plate can be effectively shortened, so that the detection efficiency is improved.

Description

Technical Field

[0001] The present invention belongs to the technical field of photolithography illumination detection, and in particular to a detection device and method for a photolithography illumination system. Background Art

[0002] The lithography illumination system is a key component in the lithography machine. It is responsible for providing an illumination light field with a specific light angular spectrum and intensity distribution for the projection objective imaging. The polarization detection technologies involved in the lithography machine include optical element polarization detection technology, illumination pupil polarization detection technology and projection objective polarization aberration detection technology.

[0003] The illumination pupil polarization detection technology mainly uses specific optical elements (such as polarizers, wave plates, etc.) and detection methods to accurately measure and analyze the polarized light in the illumination pupil. These optical elements can convert the polarization characteristics of the light to be measured into observable optical signals, and then use devices such as photodetectors to collect and process the signals.

[0004] For example, the patent disclosed: US20170010539A1 proposed a device for detecting polarization parameters of projection optics in 2017, which solves the influence of the environment during multiple measurements in the patent disclosed: US7286245B2 by placing multiple measurement masks and polarization changing elements on the object plane. The patent disclosed: CN113552773B solves the problem that the rotating wave plate component of the above polarization detection device is large in size and cannot be directly placed in the lithography system for measurement.

[0005] However, in the measurement process of the disclosed patent: CN113552773B, it is necessary to replace the mask with the same period but different phase. However, this replacement process is cumbersome and the repetitive work is highly repetitive, which may cause physical fatigue and muscle tension. In order to ensure the measurement accuracy, the adjustment time of the mask will be increased, thereby greatly reducing the efficiency of the entire measurement process. Summary of the invention

[0006] In order to solve the above technical problems, the present invention provides a detection device and method for a lithography illumination system, which can reduce the time for replacing a mask and improve the detection efficiency.

[0007] To achieve the above purpose, the technical solution adopted by the present invention is as follows:

[0008] A detection device for a photolithography illumination system comprises a mounting frame, an objective lens, a carrier for placing a silicon wafer, and a placement frame for placing a mask;

[0009] The mounting frame is a rectangular hollow frame with an upper opening, and an air pump is provided on one of the two short sides of the upper opening. The output end of the air pump is connected to the inner cavity of the mounting frame through an air pipe, and a suction port is provided on the top of the mounting frame;

[0010] A second motor is fixedly mounted on the other side of the two short sides of the opening on the mounting frame, the output shaft of the second motor is fixedly connected to a rotating shaft, a rotating block is fixedly mounted on the bottom end of the rotating shaft, a connecting rod is slidably mounted on the rotating block, an adsorption block is slidably mounted on the connecting rod, and a plurality of adsorption blocks are provided;

[0011] An adsorption assembly is arranged inside the adsorption block for adsorbing the mask on the placement frame.

[0012] The adsorption assembly includes a sliding plate, an air cylinder, a piston rod and a suction cup. The sliding plate is slidably installed inside the adsorption block. The air cylinder is hollow and fixedly installed on the sliding plate. One end of the piston rod extends out of the outer wall of the air cylinder and is fixedly connected to the interior of the adsorption block, and the other end is slidably connected to the interior of the air cylinder. The suction cup is fixedly installed at one end of the air cylinder, and the suction cup is communicated with the inner cavity of the air cylinder.

[0013] A first motor is fixedly installed on the top of the adsorption block, a threaded rod is fixedly installed on the output shaft of the first motor, one end of the threaded rod penetrates the sliding plate and is connected to the sliding plate through threads.

[0014] A transmission gear is fixedly installed on one end of the connecting rod close to the rotating block, and a gear ring is fixedly installed inside the mounting frame, and the transmission gear is meshed with the gear ring.

[0015] A slider is fixedly installed on one end of the adsorption block close to the connecting rod, one end of the connecting rod passes through the slider, a spiral groove is opened on the connecting rod, and a guide block is fixedly installed on the inner wall of the slider, one end of the guide block extends to the inside of the spiral groove.

[0016] A limiting ring groove is arranged inside the mounting frame, a limiting rod is slidably installed inside the sliding block, one end of the limiting rod extends to the inside of the adsorption block, and the other end extends to the inside of the limiting ring groove.

[0017] A sliding block is slidably mounted on the outer wall of the rotating block, a connecting shaft is fixedly mounted on one end of the connecting rod close to the sliding block, one end of the connecting shaft extends to the inside of the sliding block, and the connecting shaft and the sliding block are connected via a torsion spring.

[0018] A guide ring is fixedly installed inside the mounting frame, and a notch is provided on the guide ring for the sliding block to enter.

[0019] The outer wall of the rotating block is provided with a moving groove, and the moving block is fixedly installed on one end of the sliding block close to the rotating block, and the moving block is slidably installed inside the moving groove.

[0020] A method for detecting a lithography illumination system comprises the following steps:

[0021] S1: placing the mask on a mounting frame, starting an air pump, and adsorbing the mask through a set adsorption port, and then performing pupil illumination detection;

[0022] S2: The second motor drives the rotating shaft to rotate, and the connecting rod and the adsorption block are rotated to the top of the placement frame. Then, the first motor drives the sliding plate to rotate, and the air cylinder and the piston rod cooperate to make the suction cup adsorb the mask plate on the placement frame. The second motor rotates again to complete the storage of the mask plate.

[0023] S3: The second motor drives the rotating shaft to rotate another connecting rod to the top of the mounting frame, and then the first motor rotates to make the sliding plate slide up. At this time, the suction cup will release the adsorption of the mask plate, and the mask plate will fall onto the mounting frame, completing the replacement of the mask plate, and continuing the pupil illumination detection.

[0024] The beneficial effects of the present invention are as follows:

[0025] 1. The present invention rotates one of the connecting rods and the adsorption block to the top of the mounting frame through the second motor, and then drives the sliding plate to slide downward through the first motor, which will cause the piston rod to stretch inside the air cylinder. At this time, the mask plate can be adsorbed by the suction cup, and then rotated into the inside of the mounting frame through the rotating shaft. When the mask plate needs to be reused, the adsorption block adsorbing the mask plate is rotated to the top of the mounting frame through the rotating shaft. At this time, the sliding plate is controlled to slide up by controlling the first motor, and the mask plate falls onto the mounting frame. By repeating this step, effective assistance can be provided in multiple replacement cycles of mask plates with different phases and multiple and repeated measurement steps, thereby reducing the time for replacing the mask plate as much as possible to improve the detection efficiency.

[0026] 2. The present invention drives the sliding block and the connecting rod to rotate to the top of the notch through the rotating shaft. At this time, through the set notch, the sliding block and the connecting rod will slide downward to the inside of the notch under the action of gravity, so that the suction cup and the mask plate can be fitted. At this time, the first motor is started again to drive the sliding plate to slide downward. Through the separation of the air cylinder and the piston rod, negative pressure is generated inside the suction cup. When the sliding plate slides down, it will also drive the suction cup to slide down, further assisting the suction cup to adsorb the mask plate and ensuring the stability of the adsorption. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 is a three-dimensional diagram of a detection device of a lithography illumination system of the present invention;

[0028] Figure 2 It is a structural schematic diagram of the placement frame in the present invention;

[0029] Figure 3 The present invention Figure 2 The enlarged view of point A in the middle;

[0030] Figure 4 It is a schematic structural diagram of the objective lens in the present invention;

[0031] Figure 5 The present invention Figure 4 The enlarged view of point B in the middle;

[0032] Figure 6 It is a structural schematic diagram of the connecting rod in the present invention;

[0033] Figure 7 The present invention Figure 6 Enlarged view of point C in the middle;

[0034] Figure 8 The present invention Figure 6 The enlarged view of point D in the middle;

[0035] Fig. 9 The present invention Figure 6 Enlarged view of point E in the middle;

[0036] Fig.10 It is a flow chart of a detection method of a lithography illumination system of the present invention.

[0037] Reference numerals:

[0038] 1. Mounting frame; 2. Objective lens; 3. Carrying platform; 4. Placement frame; 5. Adsorption port; 6. Moving block; 7. Rotating shaft; 8. Connecting rod; 9. Sliding block; 10. Adsorption block; 11. Moving groove; 12. Transmission gear; 13. Limiting ring groove; 14. Rotating block; 15. Guide ring; 16. Notch; 17. Gear ring; 18. First motor; 19. Threaded rod; 20. Sliding plate; 21. Piston rod; 22. Air cylinder; 23. Suction cup; 24. Limiting rod; 25. Spiral groove; 26. Guide block; 27. Connecting shaft; 28. Sliding block; 29. ​​Air pump; 30. Second motor. DETAILED DESCRIPTION

[0039] In order to make the technical means, creative features, objectives and effects achieved by the present invention easy to understand, the present invention is further explained below in conjunction with specific implementation methods.

[0040] like Figure 1 As shown, a detection device of a photolithography illumination system of the present invention comprises a mounting frame 1, an objective lens 2, a carrier 3 for placing a silicon wafer, and a placement frame 4 for placing a mask;

[0041] like Figure 2 As shown, the mounting frame 1 is a rectangular hollow frame with an upper opening, and an air pump 29 is arranged inside one of the two short sides of the upper opening. The output end of the air pump 29 is connected to the inner cavity of the mounting frame 4 through an air pipe, and the inner surface of the mounting frame 4 is provided with a suction port 5;

[0042] When the mask is placed on the mounting rack 4, the air pump 29 is started to make the suction port 5 present a negative pressure. Under the action of the negative pressure, the mask on the mounting rack 4 can be adsorbed and fixed, thereby improving the installation efficiency and facilitating the detection work. There are multiple suction ports 5.

[0043] like Figure 5-Figure 6 As shown, a second motor 30 is fixedly installed on the other side of the two short sides of the upper opening of the mounting frame 1, and the output shaft of the second motor 30 is fixedly connected to the rotating shaft 7, and a rotating block 14 is fixedly installed on the bottom end of the rotating shaft 7, and a connecting rod 8 is slidably installed on the rotating block 14, and an adsorption block 10 is slidably installed on the connecting rod 8, and a plurality of adsorption blocks 10 are provided;

[0044] By starting the second motor 30, the rotating shaft 7 can be driven to rotate, thereby controlling the connecting rod 8 to drive the adsorption block 10 to move. There can be multiple connecting rods 8 and adsorption blocks 10. One connecting rod 8 and one adsorption block 10 form a group, and every two groups are symmetrically arranged. The number of groups needs to be an even number. Multiple groups are arranged in a ring on the outer wall of the rotating block 14. Multiple adsorption blocks 10 can adsorb multiple mask templates. According to the measurement process, the mask templates with the same cycle but different phases can be replaced, which can not only reduce the repeatability of the work, but also improve the efficiency of replacing the mask template, thereby improving the measurement efficiency.

[0045] An adsorption assembly is disposed inside the adsorption block 10 for adsorbing the mask on the placement frame 4 .

[0046] The second motor 30 can be used to drive the rotating shaft 7 to rotate, rotate one of the connecting rods 8 and the adsorption block 10 to the top of the mounting frame 4, and adsorb the mask on the mounting frame 4 through the adsorption assembly. Then, the second motor 30 is used to drive the other adsorption block 10 to rotate to the top of the mounting frame 4, and then the mask is placed on the mounting frame 4 to complete the replacement.

[0047] like Figure 7 As shown, as a preferred embodiment of the present invention, the adsorption assembly includes a sliding plate 20, an air cylinder 22, a piston rod 21 and a suction cup 23. The sliding plate 20 is slidably installed inside the adsorption block 10. The air cylinder 22 is hollow and fixedly installed on the sliding plate 20. One end of the piston rod 21 extends out of the outer wall of the air cylinder 22 and is fixedly connected to the interior of the adsorption block 10, and the other end is slidably connected to the interior of the air cylinder 22. The suction cup 23 is fixedly installed at one end of the air cylinder 22, and the suction cup 23 is connected to the inner cavity of the air cylinder 22.

[0048] When the sliding plate 20 slides inside the adsorption block 10, it will drive the gas cylinder 22 to slide synchronously. Therefore, when the sliding plate 20 slides downward on the upper part of the adsorption block 10, the sliding plate 20 drives the gas cylinder 22 to slide downward synchronously. At this time, the piston rod 21 can be stretched inside the gas cylinder 22, and the position below the suction cup 23 will also present negative pressure. When the adsorption block 10 drives the suction cup 23 to be located above the mask plate, until the suction cup 23 fits with the surface of the mask plate, the sliding plate 20 can drive the gas cylinder 22 to slide downward, and the mask plate can be adsorbed by the suction cup 23. When the sliding plate 20 drives the gas cylinder 22 to slide upward, the adsorption of the suction cup 23 to the mask plate can be released.

[0049] As a preferred embodiment of the present invention, a first motor 18 is fixedly installed on the top of the adsorption block 10, and a threaded rod 19 is fixedly installed on the output shaft of the first motor 18. One end of the threaded rod 19 passes through the sliding plate 20 and is connected to the sliding plate 20 by threads.

[0050] The sliding plate 20 can be driven to slide by starting the first motor 18 , and the sliding of the sliding plate 20 is controlled by the rotation direction of the first motor 18 .

[0051] like Figure 3 , Figure 4 , Figure 5 As shown, as a preferred embodiment of the present invention, a transmission gear 12 is fixedly mounted on one end of the connecting rod 8 close to the rotating block 14 , and a gear ring 17 is fixedly mounted inside the mounting frame 1 , and the transmission gear 12 is meshed with the gear ring 17 .

[0052] When the second motor 30 drives the rotating shaft 7 to rotate, the transmission gear 12 on the connecting rod 8 will rotate along with the rotating shaft 7 in the inner circumference of the mounting frame 1. At this time, the transmission gear 12 will contact the gear ring 17 inside the mounting frame 1, so that the transmission gear 12 drives the connecting rod 8 to rotate.

[0053] As a preferred embodiment of the present invention, a slider 9 is fixedly installed on one end of the adsorption block 10 close to the connecting rod 8, one end of the connecting rod 8 passes through the slider 9, a spiral groove 25 is opened on the connecting rod 8, and a guide block 26 is fixedly installed on the inner wall of the slider 9, and one end of the guide block 26 extends to the interior of the spiral groove 25.

[0054] When the second motor 30 drives the rotating shaft 7 to rotate, the transmission gear 12 will contact the gear ring 17 inside the mounting frame 1, so that the transmission gear 12 drives the connecting rod 8 to rotate. At this time, the rotation of the connecting rod 8 will also cause the spiral groove 25 to rotate. Through the setting of the guide block 26, the slider 9 and the adsorption block 10 will be driven to slide on the outer wall of the connecting rod 8. When the slider 9 drives the adsorption block 10 to slide in the direction of the rotating shaft 7, the adsorption block 10 can be shortened, and then the adsorption block 10 can be rotated to the inside of the mounting frame 1 for storage.

[0055] like Figure 8 As shown, as a preferred embodiment of the present invention, a limiting ring groove 13 is opened inside the mounting frame 1, and a limiting rod 24 is slidably installed inside the slider 9, one end of the limiting rod 24 extends to the inside of the adsorption block 10, and the other end extends to the inside of the limiting ring groove 13.

[0056] One end of the limiting rod 24 is fixedly passed through the slider 9 and the adsorption block 10. Therefore, when the connecting rod 8 rotates, the limiting rod 24 cooperates with the limiting ring groove 13 to prevent the slider 9 from rotating under the kinetic energy of the connecting rod 8, thereby ensuring the stability of the slider 9 driving the adsorption block 10 to slide.

[0057] like Fig. 9 As shown, as a preferred embodiment of the present invention, a sliding block 28 is slidably installed on the outer wall of the rotating block 14, and a connecting shaft 27 is fixedly installed on one end of the connecting rod 8 close to the sliding block 28, one end of the connecting shaft 27 extends to the interior of the sliding block 28, and the connecting shaft 27 and the sliding block 28 are connected by a torsion spring.

[0058] When the second motor 30 drives the rotating shaft 7 to rotate, the connecting rod 8 will rotate under the action of the transmission gear 12 and the gear ring 17, and at the same time will drive the connecting shaft 27 to rotate, causing the torsion spring to deform and store elastic potential energy until the transmission gear 12 and the gear ring 17 are released from the meshing state, and the torsion spring can release the elastic potential energy to drive the connecting shaft 27 to reset.

[0059] As a preferred embodiment of the present invention, a guide ring 15 is fixedly installed inside the mounting frame 1 , and a notch 16 for the sliding block 28 to enter is formed on the guide ring 15 .

[0060] The guide ring 15 can effectively support the sliding block 28. When the rotating shaft 7 drives the sliding block 28 and the connecting rod 8 to rotate to the top of the notch 16, the suction block 10 on the connecting rod 8 is also located above the mounting frame 4. At this time, through the notch 16, the sliding block 28 and the connecting rod 8 will slide down to the inside of the notch 16 under the action of gravity. Therefore, the suction block 10 will also slide down above the mounting frame 4, so that the suction cup 23 can fit the mask. At the same time, the transmission gear 12 is separated from the gear ring 17, and the connecting rod 8 is driven to reset and rotate under the action of the torsion spring. With the cooperation of the guide block 26 and the spiral groove 25, the suction block 10 will slide toward the end away from the rotating shaft 7 and slide to the top of the mounting frame 4. At this time, the first motor 18 is started again to drive the sliding plate 20 to slide downward. Through the separation of the air cylinder 22 and the piston rod 21, negative pressure is generated inside the suction cup 23, and when the sliding plate 20 slides down, it will also drive the suction cup 23 to slide down, further assisting the suction cup 23 to adsorb the mask plate. The air pump 29 is powered off to release the adsorption of the mask plate by the adsorption port 5, and then the sliding block 28 is driven to continue to rotate through the rotating shaft 7. The sliding block 28 passes through the inclined surface of the notch 16, and can drive the connecting rod 8 to slide upward, and is rotated to the inside of the mounting frame 1 through the rotating shaft 7 for storage.

[0061] When the mask needs to be reused, the adsorption block 10 that adsorbs the mask is rotated to the top of the mounting frame 4 through the rotating shaft 7. At this time, the first motor 18 is controlled to reverse. At this time, the sliding plate 20 is driven to slide upward inside the adsorption block 10 under the action of the threaded rod 19, so that the adsorption of the suction cup 23 on the mask can be released, and the mask falls onto the mounting frame 4. By repeating this step, effective assistance can be provided in multiple replacement cycles of masks with different phases and multiple and repeated measurement steps, thereby reducing the time for replacing the mask as much as possible to improve the detection efficiency.

[0062] As a preferred embodiment of the present invention, a moving groove 11 is formed on the outer wall of the rotating block 14 , and a moving block 6 is fixedly mounted on one end of the sliding block 28 close to the rotating block 14 , and the moving block 6 is slidably mounted inside the moving groove 11 .

[0063] Through the cooperation between the moving groove 11 and the moving block 6 , the sliding track of the sliding block 28 can be limited.

[0064] like Fig.10 As shown, a detection method of a lithography illumination system, the method adopts the detection device of the lithography illumination system mentioned above, and comprises the following steps:

[0065] S1: placing the mask on the mounting frame 4, starting the air pump 29, and adsorbing the mask through the provided adsorption port 5, and then performing pupil illumination detection;

[0066] S2: The second motor 30 drives the rotating shaft 7 to rotate, and the connecting rod 8 and the adsorption block 10 are rotated to the top of the placement frame 4. Then, the first motor 18 drives the sliding plate 20 to rotate, and the air cylinder 22 and the piston rod 21 cooperate to make the suction cup 23 adsorb the mask plate on the placement frame 4. The second motor 30 is rotated again to complete the storage of the mask plate.

[0067] S3: The second motor 30 drives the rotating shaft 7 to rotate the other connecting rod 8 to the top of the mounting frame 4, and then the first motor 18 rotates to make the sliding plate 20 slide up. At this time, the suction cup 23 will release the adsorption of the mask plate, and the mask plate will fall on the mounting frame 4, completing the replacement of the mask plate, and continuing the pupil illumination detection.

[0068] Working principle: The second motor 30 can be used to drive the rotating shaft 7 to rotate, and one of the connecting rods 8 and the adsorption block 10 can be rotated to the top of the mounting frame 4. Then, the first motor 18 can be used to drive the sliding plate 20 to slide downward, which will cause the piston rod 21 to stretch inside the cylinder 22. At this time, the mask can be adsorbed by the suction cup 23, and it can be rotated into the inside of the mounting frame 1 through the rotating shaft 7. When the mask needs to be reused, the adsorption block 10 adsorbing the mask is rotated to the top of the mounting frame 4 through the rotating shaft 7. At this time, the first motor 18 is controlled to reverse, and the sliding plate 20 is driven to slide upward inside the adsorption block 10 under the action of the threaded rod 19, so that the adsorption of the mask by the suction cup 23 can be released, so that the mask falls on the mounting frame 4. By repeating this step, effective help can be provided in the case of multiple replacement cycles of masks with the same and different phases and multiple and repeated measurement steps, so as to reduce the time of replacing the mask as much as possible to improve the detection efficiency.

[0069] When the rotating shaft 7 drives the sliding block 28 and the connecting rod 8 to rotate to the top of the notch 16, at this time, through the provided notch 16, the sliding block 28 and the connecting rod 8 will slide downward to the inside of the notch 16 under the action of gravity, so the adsorption block 10 will also slide down above the mounting frame 4, so that the suction cup 23 can be fitted with the mask plate, and at the same time, the transmission gear 12 is separated from the gear ring 17, and the connecting rod 8 is driven to reset and rotate under the action of the torsion spring, and with the cooperation of the guide block 26 and the spiral groove 25, the adsorption block 10 will slide toward the end away from the rotating shaft 7 and slide to the top of the mounting frame 4, and then the first motor 18 is started again to drive the sliding plate 20 to slide downward, and the separation of the air cylinder 22 and the piston rod 21 will generate negative pressure inside the suction cup 23, and when the sliding plate 20 slides down, it will also drive the suction cup 23 to slide down, further assisting the suction cup 23 to adsorb the mask plate and ensuring the stability of adsorption.

[0070] The above-mentioned front, back, left, right, top and bottom are all based on the figures in the specification. Figure 1As a benchmark, according to the person's observation perspective, the side of the device facing the observer is defined as the front, the left side of the observer is defined as the left, and so on.

[0071] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the scope of protection of the present invention.

[0072] The above shows and describes the basic principles, main features and advantages of the present invention. It should be understood by those skilled in the art that the present invention is not limited to the above embodiments. The above embodiments and descriptions are only for explaining the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, which fall within the scope of the present invention to be protected. The scope of protection of the present invention is defined by the attached claims and their equivalents.

Claims

1. A detection device for a lithography illumination system, characterized in that: It comprises a mounting frame (1), an objective lens (2), a carrier platform (3) for placing a silicon wafer, and a mounting frame (4) for placing a mask; The mounting frame (1) is a rectangular hollow frame with an upper opening, an air pump (29) is provided on one of the two short sides of the upper opening, the output end of the air pump (29) is connected to the inner cavity of the mounting frame (4) through an air pipe, and a suction port (5) is provided on the upper surface of the mounting frame (4); A second motor (30) is fixedly mounted on the other side of the two short sides of the upper opening of the mounting frame (1); an output shaft of the second motor (30) is fixedly connected to a rotating shaft (7); a rotating block (14) is fixedly mounted on the bottom end of the rotating shaft (7); a connecting rod (8) is slidably mounted on the rotating block (14); an adsorption block (10) is slidably mounted on the connecting rod (8); and a plurality of adsorption blocks (10) are provided; An adsorption component is arranged inside the adsorption block (10) and is used for adsorbing the mask plate on the placement frame (4).

2. The detection device of a lithography illumination system according to claim 1, characterized in that: The adsorption assembly comprises a sliding plate (20), an air cylinder (22), a piston rod (21) and a suction cup (23); the sliding plate (20) is slidably mounted inside the adsorption block (10); the air cylinder (22) is hollow and fixedly mounted on the sliding plate (20); one end of the piston rod (21) extends out of the outer wall of the air cylinder (22) and is fixedly connected to the inside of the adsorption block (10); the other end of the piston rod (21) is slidably connected to the inside of the air cylinder (22); the suction cup (23) is fixedly mounted on one end of the air cylinder (22), and the suction cup (23) is communicated with the inner cavity of the air cylinder (22).

3. The detection device of a lithography illumination system according to claim 2, characterized in that: A first motor (18) is fixedly mounted on the top of the adsorption block (10), a threaded rod (19) is fixedly mounted on the output shaft of the first motor (18), one end of the threaded rod (19) passes through the sliding plate (20) and is connected to the sliding plate (20) by means of a thread.

4. The detection device of a lithography illumination system according to claim 3, characterized in that: A transmission gear (12) is fixedly mounted on one end of the connecting rod (8) close to the rotating block (14), a gear ring (17) is fixedly mounted inside the mounting frame (1), and the transmission gear (12) meshes with the gear ring (17).

5. The detection device of a lithography illumination system according to claim 4, characterized in that: A slider (9) is fixedly mounted on one end of the adsorption block (10) close to the connecting rod (8), one end of the connecting rod (8) passes through the slider (9), a spiral groove (25) is formed on the connecting rod (8), and a guide block (26) is fixedly mounted on the inner wall of the slider (9), one end of the guide block (26) extends into the interior of the spiral groove (25).

6. The detection device of a lithography illumination system according to claim 5, characterized in that: A limiting ring groove (13) is provided inside the mounting frame (1), a limiting rod (24) is slidably mounted inside the sliding block (9), one end of the limiting rod (24) extends into the interior of the adsorption block (10), and the other end extends into the interior of the limiting ring groove (13).

7. The detection device of a lithography illumination system according to claim 6, characterized in that: A sliding block (28) is slidably mounted on the outer wall of the rotating block (14); a connecting shaft (27) is fixedly mounted on one end of the connecting rod (8) close to the sliding block (28); one end of the connecting shaft (27) extends into the interior of the sliding block (28); and the connecting shaft (27) and the sliding block (28) are connected via a torsion spring.

8. The detection device of a lithography illumination system according to claim 7, characterized in that: A guide ring (15) is fixedly mounted inside the mounting frame (1), and a notch (16) is provided on the guide ring (15) for the sliding block (28) to enter.

9. The detection device of a lithography illumination system according to claim 8, characterized in that: The outer wall of the rotating block (14) is provided with a moving groove (11), and a moving block (6) is fixedly mounted on one end of the sliding block (28) close to the rotating block (14), and the moving block (6) is slidably mounted inside the moving groove (11).

10. A method for detecting a lithography illumination system, the method using the detection device for a lithography illumination system according to any one of claims 1 to 9, characterized in that: The following steps are involved: S1: placing the mask plate on the mounting frame (4), starting the air pump (29), and adsorbing the mask plate through the provided adsorption port (5), and then performing pupil illumination detection; S2: The second motor (30) drives the rotating shaft (7) to rotate, and rotates the connecting rod (8) and the adsorption block (10) to the top of the placement frame (4). The first motor (18) drives the sliding plate (20) to rotate, and the air cylinder (22) and the piston rod (21) cooperate to make the suction cup (23) adsorb the mask plate on the placement frame (4). The second motor (30) rotates again to complete the storage of the mask plate. S3: The second motor (30) drives the rotating shaft (7) to rotate the other connecting rod (8) to the top of the mounting frame (4), and the first motor (18) is rotated to make the sliding plate (20) slide upward, and the suction cup (23) releases the adsorption of the mask plate, and the mask plate falls onto the mounting frame (4), completing the replacement of the mask plate, and continuing the pupil illumination detection.

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