An oil bath heated TMA liquid delivery device

Abstract

The invention relates to an oil bath heated TMA liquid conveying device applied to the field of liquid storage and distribution. Through the arrangement of a temperature regulating disk and its internal structure, a multi-path conveying and reversing conveying process of heating oil in the temperature regulating disk is realized. When it is monitored that the output temperature of the heating oil in the oil bath box is too low, the heating oil is heated in the temperature regulating disk through a refrigerator. At the same time, the conveying path of the heating oil is changed and its input and output directions in the oil bath box are switched, so that the heated heating oil is fully mixed with the original heating oil in the oil bath box, so that uniform temperature compensation is achieved for the heating oil in the oil bath box. When it is monitored that the output temperature of the heating oil is too high, the sealing control component is started, and the conveying path of the heating oil is changed again, so that the heating oil is cooled in the temperature regulating disk. Combined with the change of the input and output directions of the heating oil, uniform temperature consumption reduction of the heating oil is achieved, thereby achieving an oil bath heating effect approaching constant temperature for the TMA.

Description

Technical Field

[0001] The present invention relates to a conveying device, in particular to an oil bath heated TMA liquid conveying device applied to the field of liquid storage and distribution. Background Art

[0002] Since the existing production process often requires the coordinated use of multiple liquids and gases to meet production needs, a gas cabinet, a fluid conveying equipment, is needed to mix and convey multiple liquids and gases.

[0003] For example, the specification of Chinese patent CN116576390A discloses a hybrid gas cabinet for liquid gas, including a gas cabinet main body, an installation panel installed in the gas cabinet main body, and multiple purge equipment groups, multiple output regulating equipment groups, a waste liquid treatment station and multiple input regulating equipment groups are arranged on the installation panel; the purge equipment group is connected to the output regulating equipment group, the waste liquid treatment station is communicated with the output regulating equipment group and the input regulating equipment group, a plurality of gas cylinder fixing seats matching the input regulating equipment group are installed in the gas cabinet main body, and a high-pressure pump communicated with the waste liquid treatment station is installed in the gas cabinet main body. This solution can facilitate the coordinated use of multiple liquid gases, and facilitate the centralized treatment of the waste liquid of the equipment after use, to ensure that when the liquid gas cylinder is replaced, the liquid residual in the liquid gas cylinder can be fully treated.

[0004] For another example, the specification of Chinese patent CN219796907U discloses a large gas cabinet for liquid gas, including a cabinet body, an operating panel fixedly connected to the rear inner wall of the cabinet body, a plurality of bases fixedly connected to the lower inner wall of the cabinet body, a manual lifting rod fixedly connected to the upper end of the base, a lifting platform fixedly connected to the output end of the manual lifting rod, and a back plate fixedly connected to the rear end of the lifting platform. When the scheme is implemented, four steel cylinders are placed in the cabinet body at the same time, and two kinds of inert gases are used to assist during operation to reach the corresponding process machines. At the same time, the operating panel is equipped with a waste liquid treatment function, and the bottom of the steel cylinder is equipped with a lifting platform. When steel cylinders of different sizes are replaced according to requirements, the manual lifting rod between the lifting platform and the base can be used to adjust without replacing the piping. The exhaust treatment when replacing the steel cylinder can first use a Venturi vacuum to draw the vacuum degree to about one psi, and then use a vacuum pump to evacuate, which is more efficient than ordinary special gas systems.

[0005] When using conveying equipment to mix and convey TMA (trimethylaluminum), argon and hydrogen, since TMA (trimethylaluminum) is a liquid chemical that is easy to crystallize, in order to ensure the uniform mixing of TMA and other gases, it is generally necessary to set an oil bath heating device in the conveying equipment to keep TMA at a stable temperature to ensure that TMA is in a liquid state and is not easy to crystallize in the conveying pipeline. Since TMA is in the process of continuous conveying, it continuously consumes heat, and the conveying rate of TMA and changes in the external ambient temperature will affect the temperature of the oil bath heating. Therefore, how to maintain the stability of the oil bath temperature is an issue that urgently needs to be improved, so that TMA is not easily affected by large temperature fluctuations. The mixing of itself and the gas and subsequent use are not affected. Summary of the invention

[0006] In view of the above-mentioned prior art, the technical problem to be solved by the present invention is how to maintain the stability of the temperature of TMA by heating in an oil bath during the TMA transportation process.

[0007] In order to solve the above problems, the present invention provides an oil bath heating TMA liquid conveying device, comprising a conveying cabinet body with a raw liquid tank and an oil bath box installed inside, the oil bath box is fixedly sleeved on the outer end of the raw liquid tank, and the space between the two is filled with heating oil, and also comprises a constant temperature heater and a temperature regulating disk arranged on the outside of the conveying cabinet body, the temperature regulating disk is connected with the inner side of the constant temperature heater through oil pipe 1 and oil pipe 2, the temperature regulating disk is connected with the inner side of the oil bath box through oil pipe 3 and oil pipe 4, and the connection positions of the oil bath box with oil pipe 3 and oil pipe 4 are fixedly connected with temperature sensors;

[0008] The temperature regulating disk is internally rotatably connected with a main rotating ring and a secondary rotating ring that are in contact with each other, and there are gaps between the outer walls of the two and the inner wall of the temperature regulating disk, the main rotating ring is fixedly connected with a main oblique tube, and one end of the main oblique tube facing the center of the temperature regulating disk is fixedly connected with a main transverse tube, the secondary rotating ring is fixedly connected with a secondary oblique tube, and one end of the secondary oblique tube facing the center of the temperature regulating disk is fixedly connected with a secondary transverse tube, one end of the secondary transverse tube is rotatably connected to the inside of the main transverse tube and the two are connected, and the ends of the main transverse tube and the secondary transverse tube that are away from each other are respectively connected to the output end of the main motor and the output end of the secondary motor, the center lines of the main oblique tube, oil pipe one and oil pipe two are located on the same vertical plane, the center lines of the secondary oblique tube, oil pipe three and oil pipe four are located on the same vertical plane, and the center lines of the main oblique tube and the secondary oblique tube are located on different vertical planes;

[0009] The outer end of the main rotating ring is fixedly connected with an outer heat conducting plate, the interior of the main rotating ring is fixedly connected with a refrigerator, and the hot end of the refrigerator is in contact with the surface of the outer heat conducting plate.

[0010] As a further supplement to the present application, the outer end of the oil bath box is fixedly connected with conduit 1 and conduit 2 which are communicated with the interior thereof and have valves. A pair of temperature sensors are fixedly installed on the outer ends of conduit 1 and conduit 2, and their sensing ends extend to the interior of conduit 1 and conduit 2, respectively. Conduit 1 and conduit 2 are close to the top and bottom positions of the oil bath box, respectively. Conduit 1 is fixedly connected to oil pipe 3, and conduit 2 is fixedly connected to oil pipe 4.

[0011] As a further supplement to the present application, an annular groove is provided at one end of the main rotating ring close to the secondary rotating ring, and one end of the secondary rotating ring is rotatably connected to the inside of the annular groove.

[0012] As a further supplement to the present application, the curved end of the temperature control disk is fixedly connected to the outer end of the constant temperature heater through a support, the auxiliary motor and the main motor are respectively fixedly connected to a pair of flat ends of the temperature control disk, the output end of the main motor moves through the outer wall of the temperature control disk until it is fixedly connected to the end of the main cross tube, and the output end of the auxiliary motor moves through the outer wall of the temperature control disk until it is fixedly connected to the end of the auxiliary cross tube.

[0013] As a further supplement to the present application, a plurality of through holes are provided on the temperature control plate, and the plurality of through holes are respectively connected to the pipe openings of oil pipe one, oil pipe two, oil pipe three and oil pipe four.

[0014] As another improvement of the present application, sealing control components are provided on the main inclined tube and the secondary inclined tube, and the sealing control components are located on the inner sides of the main rotating ring and the secondary rotating ring. The inner end of the main rotating ring is fixedly connected with an inner heat conducting plate, and the cold end of the refrigerator inside the main rotating ring is in contact with the surface of the inner heat conducting plate.

[0015] As another improved supplement of the present application, a pair of sealing and control components have the same structure and both include an electromagnet and a ring. The pair of rings are slidably sleeved on the outer ends of the main inclined tube and the secondary inclined tube, respectively. A pair of electromagnets are fixedly connected to the outer ends of the main inclined tube and the secondary inclined tube, respectively. The rings are located on the side of the electromagnet away from the secondary cross tube, and a guide disk is fixedly connected to the end of the ring close to the electromagnet.

[0016] As another improved supplement of the present application, a main oil hole and a secondary oil hole are respectively opened on the main inclined tube and the secondary inclined tube. In the initial state, a pair of rings are respectively sleeved on the outer ends of the main oil hole and the secondary oil hole. The main inclined tube and the secondary inclined tube are both provided with blocking plates inside, and a pair of support rods are fixedly connected between the blocking plates and the rings.

[0017] As another improved supplement of the present application, the inner walls of the main inclined tube and the secondary inclined tube are fixedly connected with blocking rings, which are located on the side of the blocking disk close to the electromagnet, and the maximum outer diameter of the blocking disk is the same as the inner diameter of the blocking ring.

[0018] An oil bath heated TMA liquid delivery device, the use method of which comprises the following steps:

[0019] S1, in the initial state, the main inclined pipe is connected to the oil pipe one, and the auxiliary inclined pipe is connected to the oil pipe three, so that the heating oil in the constant temperature heater is introduced into the oil bath box to heat the stock liquid tank in the oil bath. At the same time, the heating oil in the oil bath box flows back to the constant temperature heater through the oil pipe four, the temperature adjustment plate and the oil pipe two in sequence, so that the heating oil in the oil bath box maintains a stable temperature range and heats the stock liquid tank at a constant temperature;

[0020] S2. When the temperature sensor detects that the temperature of the heating oil flowing out of the oil bath is lower than the preset value T1, it indicates that the oil bath temperature has dropped. At this time, the temperature compensation operation is performed:

[0021] S2.1. Power on the refrigerator, start the auxiliary motor and the main motor at the same time, drive the main inclined tube to rotate until it is connected to the oil pipe 2, and drive the auxiliary inclined tube to rotate until it is connected to the oil pipe 4. At this time, the heating oil output from the oil pipe 1 will enter between the main rotating ring and the temperature regulating plate, and after being heated by the external heat conducting plate, it will be input into the oil bath tank through the oil pipe 3;

[0022] S2.2. After a period of time in step S2.1, the auxiliary motor is started again to drive the auxiliary inclined pipe to rotate again until it is connected with the oil pipe three-phase. At this time, the heated heating oil in the temperature regulating plate is reversely input into the oil bath tank through the oil pipe four, that is, the input and output directions of the heating oil on the oil bath tank are adjusted to uniformly heat the heating oil in the oil bath tank;

[0023] S2.3, when it is detected that the temperature of the heating oil flowing out of the oil bath box returns to the normal range, the temperature compensation operation is stopped, and the main inclined tube and the auxiliary inclined tube are rotated to return to the position in step S1;

[0024] S3. When the temperature sensor detects that the temperature of the heating oil flowing out of the oil bath is higher than the preset value T2, it indicates that the oil bath temperature is too high. At this time, the temperature reduction operation is performed:

[0025] S3.1. Similarly, the refrigerator is powered on, and then the current direction of the electromagnet is changed. The change in the direction of the magnetic field drives the electromagnet to move. At this time, the heating oil entering the main inclined tube flows into the inner side of the main rotating ring and the auxiliary rotating ring through the main oil hole, and after being cooled by the inner heat conducting plate, it enters the auxiliary inclined tube through the auxiliary oil hole, and then enters the oil bath tank through the oil pipe three;

[0026] S3.2: After a period of time in step S3.1, the auxiliary motor is started to drive the auxiliary inclined tube to rotate until it is connected to the oil pipe 4. At this time, the heating oil in the auxiliary inclined tube after cooling down is reversely input into the oil bath tank through the oil pipe 4, that is, the input and output directions of the heating oil on the oil bath tank are adjusted to uniformly cool the heating oil in the oil bath tank;

[0027] S3.3. When it is monitored that the temperature of the heating oil flowing out of the oil bath box returns to the normal range, the consumption reduction operation is stopped, the direction of the electromagnet current is restored to the initial direction, and the auxiliary inclined pipe is rotated so that the two return to the position in step S1.

[0028] To summarize, the present application realizes multi-path and reversing conveying of heating oil by arranging rotatable main inclined tubes and auxiliary inclined tubes in the temperature regulating disk. When it is detected that the output temperature of the heating oil in the oil bath is too low, the heating oil is heated in the temperature regulating disk in combination with the use of a refrigerator. At the same time, by changing the conveying path of the heating oil in the temperature regulating disk, the input and output directions of the heating oil in the oil bath are switched, so that the heated heating oil is fully mixed with the original heating oil in the oil bath, thereby achieving uniform temperature compensation of the heating oil in the oil bath. When it is detected that the output temperature of the heating oil in the oil bath is too high, the sealing control component is started while using the refrigerator, and the conveying path of the heating oil in the temperature regulating disk is changed again, so that the heating oil is cooled in the temperature regulating disk. Combined with the change of the input and output directions of the heating oil in the oil bath, uniform temperature reduction of the heating oil in the oil bath is achieved, thereby achieving an oil bath heating effect approaching constant temperature for the TMA in the stock liquid tank. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 The overall three-dimensional structure of the first embodiment of the present application Figure 1 ;

[0030] Figure 2 The overall three-dimensional structure of the first embodiment of the present application Figure 2 ;

[0031] Figure 3 This is a front structural schematic diagram of the oil bath box of the first embodiment of the present application;

[0032] Figure 4 This is a three-dimensional view of the temperature control plate of the first embodiment of the present application;

[0033] Figure 5 The three-dimensional structure of the main rotating ring and the auxiliary rotating ring of the first embodiment of the present application Figure 1 ;

[0034] Figure 6 The three-dimensional structure of the main rotating ring and the auxiliary rotating ring of the first embodiment of the present application Figure 2 ;

[0035] Figure 7 This is a schematic diagram of the front structure of the temperature control plate of the first embodiment of the present application when conveying heating oil. Figure 1 ;

[0036] Figure 8 This is a schematic diagram of the front structure of the temperature control plate of the first embodiment of the present application when conveying heating oil. Figure 2 ;

[0037] Fig. 9 This is a schematic diagram of the front structure of the temperature control plate of the first embodiment of the present application when conveying heating oil. Figure 3 ;

[0038] Fig.10 The cross-sectional view of the temperature control plate of the second embodiment of the present application Figure 1 ;

[0039] Fig.11 The cross-sectional view of the temperature control plate of the second embodiment of the present application Figure 2 ;

[0040] Fig.12 This is a front cross-sectional view of the main rotating ring of the second embodiment of the present application;

[0041] Fig.13 This is a schematic diagram of the front structure of the temperature control plate of the second embodiment of the present application when conveying heating oil Figure 1 ;

[0042] Fig.14 This is a front schematic diagram of the position change of the sealing control component in the second embodiment of the present application;

[0043] Fig.15 This is a schematic diagram of the front structure of the temperature control plate of the second embodiment of the present application when conveying heating oil Figure 2 ;

[0044] Fig.16 This is a schematic diagram of the front structure of the temperature control plate of the second embodiment of the present application when conveying heating oil Figure 3 ;

[0045] Fig.17 The three-dimensional sealing component of the second embodiment of the present application Figure 1 ;

[0046] Fig.18 The three-dimensional sealing component of the second embodiment of the present application Figure 2 .

[0047] Description of the numbers in the figure:

[0048] 1 conveying cabinet body, 2 raw liquid tank, 3 oil bath box, 301 catheter 1, 302 catheter 2, 4 constant temperature heater, 401 oil pipe 1, 402 oil pipe 2, 403 oil pipe 3, 404 oil pipe 4, 5 temperature sensor, 6 temperature regulating plate, 71 main swivel, 7101 annular groove, 72 main inclined pipe, 7201 main oil hole, 73 main transverse pipe, 81 auxiliary swivel, 82 auxiliary inclined pipe, 8201 auxiliary oil hole, 83 auxiliary transverse pipe, 9 external heat conducting plate, 10 auxiliary motor, 11 main motor, 12 sealing control component, 1201 electromagnet, 1202 collar, 1203 guide disk, 1204 blocking disk, 1205 support rod, 1206 blocking ring, 13 internal heat conducting plate. DETAILED DESCRIPTION

[0049] The following describes two implementation modes of the present application in detail with reference to the accompanying drawings.

[0050] The first implementation method:

[0051] The present invention provides an oil bath heating TMA liquid delivery device, please refer to Figure 1 and Figure 3 , including a conveying cabinet body 1 with a raw liquid tank 2 and an oil bath box 3 installed inside. The oil bath box 3 is fixedly sleeved on the outer end of the raw liquid tank 2, and the space between the two is filled with heating oil. The conveying cabinet body 1 is used to mix and transport TMA in the raw liquid tank 2 with other gases (such as nitrogen and hydrogen). Please refer to Figure 2 The present invention also includes a constant temperature heater 4 and a temperature regulating disk 6 arranged on the outside of the conveying cabinet body 1. The curved end of the temperature regulating disk 6 is fixedly connected to the outer end of the constant temperature heater 4 through a support. The temperature regulating disk 6 is connected to the inner side of the constant temperature heater 4 through an oil pipe 1 401 and an oil pipe 2 402. The temperature regulating disk 6 is connected to the inner side of the oil bath box 3 through an oil pipe 3 403 and an oil pipe 4 404. The oil pipe 3 403 and the oil pipe 4 404 are respectively used for inputting and outputting the heating oil inside the oil bath box 3. The oil pipe 1 401 and the oil pipe 2 402 are respectively used for inputting and outputting the heating oil inside the constant temperature heater 4, so that the used heating oil in the oil bath box 3 returns to the constant temperature heater 4 for heating and heating, and is then transported to the inside of the oil bath box 3 after heating. Therefore, the heating oil in the oil bath box 3 is in a continuous replacement process, which is convenient for maintaining temperature stability and performing oil bath heating of the TMA inside the stock liquid tank 2 close to constant temperature.

[0052] like Figure 3As shown, the connection positions of the oil bath box 3 with the oil pipe 3 403 and the oil pipe 404 are fixedly connected with temperature sensors 5, the outer end of the oil bath box 3 is fixedly connected with the conduit 1 301 and the conduit 2 302 which are communicated with the inside and have valves, a pair of temperature sensors 5 are respectively fixedly installed on the outer ends of the conduit 1 301 and the conduit 2 302, and the sensing ends thereof extend to the inside of the conduit 1 301 and the conduit 2 302, respectively, the conduit 1 301 and the conduit 2 302 are respectively close to the top position and the bottom position of the oil bath box 3, the conduit 1 301 is fixedly communicated with the oil pipe 3 403, the conduit 2 302 is fixedly communicated with the oil pipe 4 404, 04 are fixedly connected, conduit 1 301 and conduit 2 302 are used for inputting and outputting the heating oil in the oil bath tank 3, and the flow direction of the heating oil in the two can be changed when necessary; the valve is used to control the opening or closing of conduit 1 301 and conduit 2 302, and the valve is in a normally open state without special circumstances; the temperature sensor 5 is located near the oil bath tank 3, and is used to monitor the temperature of the heating oil flowing in conduit 1 301 and conduit 2 302, and then determine the input and output temperatures of the heating oil in the oil bath tank 3, and then perform temperature compensation operation or temperature consumption reduction operation on the heating oil according to the temperature change.

[0053] See also Figure 4 , Figure 5 and Figure 6 The thermostat 6 is internally rotatably connected with a main rotating ring 71 and a secondary rotating ring 81 that are in contact with each other, and there is a gap between the outer walls of the two and the inner wall of the thermostat 6, which can be used for the flow and transportation of heating oil. The main rotating ring 71 is fixedly connected with a main inclined tube 72, and one end of the main inclined tube 72 facing the center of the thermostat 6 is fixedly connected with a main transverse tube 73, and one end of the main inclined tube 72 away from the main transverse tube 73 is fixedly penetrated through the main rotating ring 71 until it fits with the inner wall of the thermostat 6, and the secondary rotating ring 81 is fixedly connected with the secondary inclined tube 82 , one end of the secondary oblique tube 82 facing the center of the temperature regulating disk 6 is fixedly connected with the secondary transverse tube 83, and one end of the secondary oblique tube 82 away from the secondary transverse tube 83 is fixedly passed through the secondary swivel 81 until it fits with the inner wall of the temperature regulating disk 6, and the ends of the main oblique tube 72 and the secondary oblique tube 82 are in a surface contact sealing state with the inner wall of the temperature regulating disk 6, and one end of the secondary transverse tube 83 is rotatably connected to the inside of the main transverse tube 73 and the two are connected, that is, the main oblique tube 72, the main transverse tube 73, the secondary oblique tube 82 and the secondary transverse tube 83 are connected for conveying heating oil;

[0054] Combination Figure 4 and Figure 5As shown, the center lines of the main inclined tube 72, the oil pipe 1 401 and the oil pipe 2 402 are located on the same vertical plane, the center lines of the auxiliary inclined tube 82, the oil pipe 3 403 and the oil pipe 4 404 are located on the same vertical plane, and the center lines of the main inclined tube 72 and the auxiliary inclined tube 82 are located on different vertical planes, and the ends of the main transverse tube 73 and the auxiliary transverse tube 83 that are away from each other are respectively connected to the output end of the main motor 11 and the output end of the auxiliary motor 10, and the auxiliary motor 10 and the main motor 11 are respectively fixedly connected to a pair of planes of the temperature regulating plate 6. The output end of the main motor 11 moves through the outer wall of the temperature regulating disk 6 until it is fixedly connected to the end of the main transverse tube 73. The output end of the auxiliary motor 10 moves through the outer wall of the temperature regulating disk 6 until it is fixedly connected to the end of the auxiliary transverse tube 83. The auxiliary motor 10 drives the auxiliary transverse tube 83 and the auxiliary oblique tube 82 to rotate, so that the auxiliary oblique tube 82 is connected to one of the oil pipe three 403 or the oil pipe four 404. The main motor 11 drives the main transverse tube 73 and the main oblique tube 72 to rotate, so that the main oblique tube 72 is connected to one of the oil pipe one 401 or the oil pipe two 402.

[0055] Combination Figure 4 and Figure 7 As shown, a plurality of through holes are provided on the temperature control disk 6, and the plurality of through holes are respectively connected to the pipe openings of the oil pipe 1 401, the oil pipe 2 402, the oil pipe 3 403 and the oil pipe 4 404, and the through holes are used to realize the connection between the oil pipe 1 401 and the oil pipe 2 402 and the main inclined pipe 72 or the temperature control disk 6, and to realize the connection between the oil pipe 3 403 and the oil pipe 4 404 and the secondary inclined pipe 82 or the temperature control disk 6.

[0056] See also Figure 6 The outer end of the main rotating ring 71 is fixedly connected to the outer heat conducting sheet 9, and the interior of the main rotating ring 71 is fixedly connected to the refrigerator (combined with Fig.12 As shown), the hot end of the refrigerator is in contact with the surface of the external heat conducting plate 9. When the refrigerator is started, the external heat conducting plate 9 is heated, so that the external heat conducting plate 9 heats the heating oil between the main rotating ring 71 and the temperature regulating disk 6.

[0057] See also Figure 6 An annular groove 7101 is provided at one end of the main rotating ring 71 close to the auxiliary rotating ring 81, and one end of the auxiliary rotating ring 81 is rotatably connected to the inside of the annular groove 7101, and the two are in a surface contact sealing state, so that a relatively sealed heating oil delivery space is formed between the two and the temperature regulating disk 6.

[0058] An oil bath heated TMA liquid delivery device, the use method of which comprises the following steps:

[0059] S1, initial state, such as Figure 7As shown, the main inclined pipe 72 is connected to the oil pipe 1 401, and the secondary inclined pipe 82 is connected to the oil pipe 3 403, so that the heating oil in the constant temperature heater 4 is introduced into the oil bath box 3 to perform oil bath heating on the stock liquid tank 2. At the same time, the heating oil in the oil bath box 3 flows back to the constant temperature heater 4 through the oil pipe 4 404, the temperature adjustment plate 6 and the oil pipe 2 402 in sequence, so that the heating oil in the oil bath box 3 maintains a temperature within a stable range, and the stock liquid tank 2 is heated at a constant temperature;

[0060] When the heating oil flows and is transported in the gap formed by the main rotating ring 71, the secondary rotating ring 81 and the temperature regulating disk 6, there is a certain amount of heat exchange between the temperature regulating disk 6 and the outside world, so the heating oil in the temperature regulating disk 6 will have a certain amount of heat loss. In order to reduce the heat loss of the heating oil when it is transported into the oil bath box 3, in the initial state, the main inclined tube 72, the main transverse tube 73, the secondary transverse tube 83 and the secondary inclined tube 82 are used in the temperature regulating disk 6 as the flow path for inputting the heating oil into the oil bath box 3, and the gap between the main rotating ring 71 and the secondary rotating ring 81 and the temperature regulating disk 6 is used as the flow path for the heating oil in the oil bath box 3 to be output. Since the main inclined tube 72 and the secondary inclined tube 82 are wrapped by the temperature regulating disk 6, they cannot directly exchange heat with the outside world, which can effectively reduce the heat loss of the heating oil before entering the oil bath box 3 and maintain the heating temperature.

[0061] S2. When the temperature sensor 5 on the second conduit 302 detects that the temperature of the heating oil flowing out of the oil bath box 3 is lower than the preset value T1, it indicates that the oil bath temperature has dropped. At this time, the temperature compensation operation is performed:

[0062] S2.1, power on the refrigerator, and start the auxiliary motor 10 and the main motor 11 at the same time, such as Figure 8 As shown, the main inclined tube 72 is driven to rotate to communicate with the second oil pipe 402, and the auxiliary inclined tube 82 is driven to rotate to communicate with the fourth oil pipe 404. At this time, the heating oil output from the first oil pipe 401 will enter between the main rotating ring 71 and the temperature regulating plate 6, and after being heated by the external heat conducting plate 9, it will be input into the oil bath box 3 through the third oil pipe 403;

[0063] Through the above steps, the flow path of the heating oil in the temperature regulating disk 6 is changed. At this time, the internal gap area of ​​the temperature regulating disk 6 is used as the flow path for inputting the heating oil into the oil bath box 3, that is, the heating oil in the oil pipe 1 401 directly enters the temperature regulating disk 6, and performs heat exchange with the external heat conducting sheet 9 in the temperature regulating disk 6. After the heating oil is gathered and heated in the temperature regulating disk 6, it directly enters the oil pipe 3 403, and then is input into the oil bath box 3 through the conduit 1 301, thereby increasing the temperature of the heating oil entering the oil bath box 3 and realizing temperature compensation;

[0064] S2.2, after step S2.1 is performed for a period of time, if Fig. 9As shown, the auxiliary motor 10 is started again, driving the auxiliary inclined tube 82 to rotate again until it is connected to the oil pipe 3 403. At this time, the heated heating oil in the temperature regulating plate 6 is reversely input into the oil bath tank 3 through the oil pipe 4 404, that is, the input and output directions of the heating oil on the oil bath tank 3 are adjusted to uniformly heat the heating oil in the oil bath tank 3.

[0065] In step S2.1, the heated heating oil passes through the oil pipe three 403 and the conduit one 301 in sequence, and then is input from the upper position of the oil bath box 3 to achieve a mixing process from top to bottom with the original heating oil in the oil bath box 3. In order to improve the mixing sufficiency and uniformity of the heating oil in the oil bath box 3, the flow path of the heating oil in the temperature regulating plate 6 is changed again through the above step S2.2, and the flow direction of the heating oil in the oil pipe three 403 and the oil pipe four 404 is changed at the same time, so that the heated heating oil in the temperature regulating plate 6 enters the oil pipe four 404, and then is input from the lower position of the oil bath box 3 through the conduit two 302 to achieve a mixing process from bottom to top with the original heating oil in the oil bath box 3;

[0066] Therefore, the combination of step S2.1 and step S2.2 not only realizes the temperature compensation of the heating oil, but also makes the heated heating oil and the original heating oil in the oil bath tank 3 fully mixed by switching the input and output directions of the heating oil in the oil bath tank 3, thereby effectively improving the uniformity of the temperature compensation of the heating oil in the oil bath tank 3 and realizing uniform heating of the TMA in the stock liquid tank 2.

[0067] S2.3, repeat steps S2.1 and S2.2. When it is detected that the temperature of the heating oil flowing out of the oil bath box 3 returns to the normal range, stop the temperature compensation operation, and rotate the main inclined tube 72 and the auxiliary inclined tube 82 to return to the position in step S1.

[0068] During the temperature compensation process of step S2, the input temperature of the heating oil in the oil bath tank 3 can be monitored in real time by the temperature sensor 5 on the conduit 1 301. When it is detected that the temperature of the heating oil in the conduit 1 301 exceeds the set safety value, the refrigerator can be turned off in time to achieve temperature compensation without causing the heating oil input temperature to be too high, so that the TMA temperature in the raw liquid tank 2 is not prone to large fluctuations, thereby not easily affecting the mixing and transportation process of TMA and gas and the subsequent use process.

[0069] In addition, in this embodiment, when the temperature sensor 5 on the second conduit 302 detects that the temperature of the heating oil flowing out of the oil bath tank 3 is higher than the preset value T2, it indicates that the temperature of the heating oil input into the oil bath tank 3 is too high. At this time, the following temperature reduction operation can be performed:

[0070] like Figure 8As shown, without starting the refrigerator, the auxiliary motor 10 and the main motor 11 rotate the auxiliary inclined tube 82 to communicate with the oil pipe 404, and the main inclined tube 72 rotates to communicate with the oil pipe 2 402. At this time, the oil pipe 1 401 directly inputs the heating oil into the gap in the temperature regulating plate 6, and after gathering in the temperature regulating plate 6, it is transmitted to the oil bath box 3 through the oil pipe 3 403. This state is relatively Figure 7 In the initial transmission state shown, the heating oil is gathered in the temperature regulating disk 6 and heat is exchanged with the outside through the temperature regulating disk 6, which can increase the heat loss of the heating oil, thereby reducing the temperature of the heating oil entering the oil bath box 3, making it difficult for the heating oil in the oil bath box 3 to overheat, thereby achieving oil bath heating of the raw liquid tank 2 that approaches constant temperature.

[0071] Second implementation method:

[0072] This embodiment is based on the embodiment 1 and is additionally provided with a sealing control component 12 and an inner heat conducting sheet 13. The details are as follows: Fig.10 and Fig.12 A sealing control component 12 is provided on both the main inclined tube 72 and the secondary inclined tube 82, and the sealing control component 12 is located on the inner side of the main rotating ring 71 and the secondary rotating ring 81. The inner end of the main rotating ring 71 is fixedly connected with an inner heat conductive sheet 13. The cold end of the refrigerator inside the main rotating ring 71 fits with the surface of the inner heat conductive sheet 13. When the refrigerator is powered on, it not only heats the outer heat conductive sheet 9, but also cools the inner heat conductive sheet 13.

[0073] See also Fig.12 and Fig.14 A pair of sealing and control components 12 have the same structure and both include an electromagnet 1201 and a collar 1202. The pair of collars 1202 are slidably sleeved on the outer ends of the main inclined tube 72 and the secondary inclined tube 82, respectively. The pair of electromagnets 1201 are fixedly connected to the outer ends of the main inclined tube 72 and the secondary inclined tube 82, respectively. The collar 1202 is located on the side of the electromagnet 1201 away from the secondary cross tube 83, and the end of the collar 1202 close to the electromagnet 1201 is fixedly connected with a guide disk 1203.

[0074] Combination Fig.17 and Fig.18 As shown, the main inclined tube 72 and the auxiliary inclined tube 82 are respectively provided with a main oil hole 7201 and an auxiliary oil hole 8201. In the initial state, a pair of collars 1202 are respectively sleeved on the outer ends of the main oil hole 7201 and the auxiliary oil hole 8201. The main inclined tube 72 and the auxiliary inclined tube 82 are both provided with a plugging plate 1204 inside. A pair of support rods 1205 are fixedly connected between the plugging plate 1204 and the collar 1202. Fig.14 The inner walls of the main inclined tube 72 and the auxiliary inclined tube 82 are fixedly connected with a blocking ring 1206, which is located on the side of the blocking disk 1204 close to the electromagnet 1201, and the maximum outer diameter of the blocking disk 1204 is the same as the inner diameter of the blocking ring 1206.

[0075] In the initial state, if Fig.13 As shown, through the magnetic repulsion of the electromagnet 1201 on the magnetic guide disk 1203, the collar 1202 and the electromagnet 1201 are in a state of being far away, and the pair of collars 1202 respectively seal the main oil hole 7201 and the auxiliary oil hole 8201, while the blocking disk 1204 and the blocking ring 1206 are not in contact, and in the auxiliary inclined tube 82, the heating oil can flow between the blocking disk 1204 and the inner wall of the auxiliary inclined tube 82, and inside the blocking ring 1206, so that the auxiliary inclined tube 82 maintains the function of transmitting liquid, and similarly, the main inclined tube 72 also maintains the function of transmitting liquid, so that this embodiment can smoothly implement the process of step S1 and step S2 in embodiment 1;

[0076] When it is necessary to change the transmission mode of the heating oil between the main inclined tube 72 and the auxiliary inclined tube 82, the direction of the current of the electromagnet 1201 can be changed, thereby changing the direction of its magnetic field, so that it generates magnetic attraction to the conductive disk 1203 and adsorbs it, such as Fig.14 As shown, the blocking disk 1204 blocks the inside of the blocking ring 1206. The combination of the two makes it difficult for the main inclined tube 72 to transmit the heating oil to the main transverse tube 73. The heating oil flows out from the main oil hole 7201, enters the inner side of the main rotating ring 71 and the secondary rotating ring 81, and then enters the secondary inclined tube 82 through the secondary oil hole 8201 after being gathered. That is, the inner space of the main rotating ring 71 and the secondary rotating ring 81 is used to replace the main transverse tube 73 and the secondary transverse tube 83 to achieve the transmission of the heating oil. Therefore, through the change of the above-mentioned transmission path, the present embodiment can adopt the following temperature reduction operation to replace the temperature reduction operation in embodiment 1, which is as follows:

[0077] S3. When the temperature sensor 5 detects that the temperature of the heating oil flowing out of the oil bath box 3 is higher than the preset value T2, it indicates that the oil bath temperature is too high. At this time, the temperature consumption reduction operation is performed:

[0078] S3.1. Combination Fig.14 and Figure 5 As shown, the refrigerator is also powered on, and then the current direction of the electromagnet 1201 is changed, and the electromagnet 1201 is driven to move by the change in the direction of the magnetic field. At this time, the heating oil entering the main inclined tube 72 flows into the inner side of the main rotating ring 71 and the auxiliary rotating ring 81 through the main oil hole 7201, gradually gathers on the inner side of the two, and contacts with the cooled inner heat conducting plate 13. After being cooled by the inner heat conducting plate 13, it enters the auxiliary inclined tube 82 through the auxiliary oil hole 8201, and then is input into the oil bath box 3 through the oil pipe 3 403 (the heating oil does not flow through the main transverse tube 73 and the auxiliary transverse tube 83 in this process);

[0079] S3.2: After a period of time in step S3.1, the auxiliary motor 10 is started to drive the auxiliary inclined tube 82 to rotate until it is connected to the oil pipe 404. At this time, the heating oil in the auxiliary inclined tube 82 after cooling is reversely input into the oil bath tank 3 through the oil pipe 404, that is, the input and output directions of the heating oil on the oil bath tank 3 are adjusted to uniformly cool the heating oil in the oil bath tank 3.

[0080] S3.3. When it is monitored that the temperature of the heating oil flowing out of the oil bath box 3 returns to the normal range, the consumption reduction operation is stopped, the current direction of the electromagnet 1201 is restored to the initial direction, and the auxiliary inclined tube 82 is rotated so that the two return to the position in step S1.

[0081] Since the temperature reduction operation of heat exchange with the outside in Implementation 1 has the defects of slow cooling rate and being affected by ambient temperature, therefore, compared with Implementation 1, the temperature reduction operation of this implementation has the characteristics of fast response speed, high efficiency, and not easily affected by ambient temperature, thereby achieving rapid and effective cooling of the heating oil, while still having the effect of switching the input and output directions of the heating oil on the oil bath box 3, thereby achieving uniformity in the temperature reduction of the heating oil in the oil bath box 3. However, since this implementation increases the equipment cost compared with Implementation 1, those skilled in the art may make necessary settings for this implementation according to actual conditions. For example, when used in an environment with large temperature changes, due to the large influence of ambient temperature, in order to ensure the temperature stability of the oil bath heating and the high efficiency of temperature adjustment, this implementation may be selected for settings.

[0082] Moreover, in the above-mentioned temperature reduction process, the refrigerator cools the inner heat conducting plate 13 while simultaneously heating the outer heat conducting plate 9, so that the outer heat conducting plate 9 can heat the heating oil in the gap of the temperature regulating plate 6. Since the heating oil in the gap of the temperature regulating plate 6 is the heating oil output from the oil bath tank 3 and needs to be returned to the constant temperature heater 4 for reheating, the temperature of the heating oil returning to the constant temperature heater 4 can be increased by preheating the outer heat conducting plate 9, which has a certain maintaining effect on the stability of the temperature of the heating oil in the constant temperature heater 4 and reduces the energy consumption of the constant temperature heater 4.

[0083] In view of current practical needs, the above-mentioned implementation mode adopted in this application is not limited to the scope of protection. Various changes made within the knowledge scope of technical personnel in this field without departing from the concept of this application still fall within the scope of protection of the present invention.

Claims

1. An oil bath heated TMA liquid conveying device, comprising a conveying cabinet body (1) with a raw liquid tank (2) and an oil bath box (3) installed inside, wherein the oil bath box (3) is fixedly sleeved on the outer end of the raw liquid tank (2), and the space between the two is filled with heating oil, characterized in that: It also includes a constant temperature heater (4) and a temperature adjustment disk (6) arranged on the outside of the conveying cabinet body (1), the temperature adjustment disk (6) being connected to the inside of the constant temperature heater (4) through oil pipe 1 (401) and oil pipe 2 (402), the temperature adjustment disk (6) being connected to the inside of the oil bath box (3) through oil pipe 3 (403) and oil pipe 4 (404), and the connection positions of the oil bath box (3) with the oil pipe 3 (403) and the oil pipe 4 (404) are fixedly connected with temperature sensors (5); The temperature control disk (6) is internally rotatably connected with a main rotating ring (71) and a secondary rotating ring (81) which are in contact with each other, and there is a gap between the outer walls of the two and the inner wall of the temperature control disk (6). The main rotating ring (71) is fixedly connected with a main inclined tube (72), and one end of the main inclined tube (72) facing the center of the temperature control disk (6) is fixedly connected to a main transverse tube (73). The secondary rotating ring (81) is fixedly connected with a secondary inclined tube (82), and one end of the secondary inclined tube (82) facing the center of the temperature control disk (6) is fixedly connected to a secondary transverse tube (83). One end of the secondary transverse tube (83) is rotatably connected to the main inclined tube (72). connected to the inside of the main transverse tube (73) and the two are in communication, the ends of the main transverse tube (73) and the secondary transverse tube (83) that are away from each other are respectively connected to the output end of the main motor (11) and the output end of the secondary motor (10), the center lines of the main inclined tube (72), the first oil pipe (401) and the second oil pipe (402) are located on the same vertical plane, the center lines of the secondary inclined tube (82), the third oil pipe (403) and the fourth oil pipe (404) are located on the same vertical plane, and the center lines of the main inclined tube (72) and the secondary inclined tube (82) are located on different vertical planes; The outer end of the main rotating ring (71) is fixedly connected to an outer heat conducting plate (9), and the interior of the main rotating ring (71) is fixedly connected to a refrigerator, and the hot end of the refrigerator is in contact with the surface of the outer heat conducting plate (9).

2. The oil bath heated TMA liquid delivery device according to claim 1, characterized in that: The outer end of the oil bath box (3) is fixedly connected with a conduit 1 (301) and a conduit 2 (302) which are communicated with the inside and have a valve. A pair of temperature sensors (5) are respectively fixedly installed on the outer ends of the conduit 1 (301) and the conduit 2 (302), and their sensing ends extend to the inside of the conduit 1 (301) and the conduit 2 (302). The conduit 1 (301) and the conduit 2 (302) are respectively close to the top position and the bottom position of the oil bath box (3). The conduit 1 (301) is fixedly connected to the oil pipe 3 (403), and the conduit 2 (302) is fixedly connected to the oil pipe 4 (404).

3. The oil bath heated TMA liquid delivery device according to claim 1, characterized in that: An annular groove (7101) is formed at one end of the main rotating ring (71) close to the secondary rotating ring (81), and one end of the secondary rotating ring (81) is rotatably connected to the inside of the annular groove (7101).

4. The oil bath heated TMA liquid delivery device according to claim 1, characterized in that: The curved end of the temperature control disk (6) is fixedly connected to the outer end of the constant temperature heater (4) via a support, the auxiliary motor (10) and the main motor (11) are respectively fixedly connected to a pair of flat ends of the temperature control disk (6), the output end of the main motor (11) movably penetrates the outer wall of the temperature control disk (6) until it is fixedly connected to the end of the main transverse tube (73), and the output end of the auxiliary motor (10) movably penetrates the outer wall of the temperature control disk (6) until it is fixedly connected to the end of the auxiliary transverse tube (83).

5. The oil bath heated TMA liquid delivery device according to claim 1, characterized in that: The temperature regulating plate (6) is provided with a plurality of through holes, and the plurality of through holes are respectively connected to the pipe openings of oil pipe 1 (401), oil pipe 2 (402), oil pipe 3 (403) and oil pipe 4 (404).

6. The oil bath heated TMA liquid delivery device according to claim 1, characterized in that: The main inclined tube (72) and the secondary inclined tube (82) are both provided with a sealing control component (12), and the sealing control component (12) is located on the inner side of the main rotating ring (71) and the secondary rotating ring (81), the inner end of the main rotating ring (71) is fixedly connected to an inner heat conducting plate (13), and the cold end of the refrigerator inside the main rotating ring (71) is in contact with the surface of the inner heat conducting plate (13).

7. The oil bath heated TMA liquid delivery device according to claim 6, characterized in that: The pair of sealing and control components (12) have the same structure and both comprise an electromagnet (1201) and a collar (1202); the pair of collars (1202) are respectively slidably sleeved on the outer ends of the main inclined tube (72) and the secondary inclined tube (82); the pair of electromagnets (1201) are respectively fixedly connected to the outer ends of the main inclined tube (72) and the secondary inclined tube (82); the collar (1202) is located on a side of the electromagnet (1201) away from the secondary transverse tube (83); and one end of the collar (1202) close to the electromagnet (1201) is fixedly connected to a guide magnetic disk (1203).

8. The oil bath heated TMA liquid delivery device according to claim 7, characterized in that: The main inclined tube (72) and the secondary inclined tube (82) are respectively provided with a main oil hole (7201) and a secondary oil hole (8201); in an initial state, a pair of collars (1202) are respectively sleeved on the outer ends of the main oil hole (7201) and the secondary oil hole (8201); a plugging plate (1204) is provided inside the main inclined tube (72) and the secondary inclined tube (82); a pair of support rods (1205) are fixedly connected between the plugging plate (1204) and the collars (1202).

9. The oil bath heated TMA liquid delivery device according to claim 8, characterized in that: The inner walls of the main inclined tube (72) and the auxiliary inclined tube (82) are both fixedly connected with a blocking ring (1206), the blocking ring (1206) is located on a side of the blocking disk (1204) close to the electromagnet (1201), and the maximum outer diameter of the blocking disk (1204) is the same as the inner diameter of the blocking ring (1206).

10. The oil bath heated TMA liquid delivery device according to claim 9, characterized in that: The method of use includes the following steps: S1, in the initial state, the main inclined pipe (72) is connected to the oil pipe 1 (401), and the secondary inclined pipe (82) is connected to the oil pipe 3 (403), so that the heating oil in the constant temperature heater (4) is introduced into the oil bath box (3) to perform oil bath heating on the stock liquid tank (2). At the same time, the heating oil in the oil bath box (3) flows back to the constant temperature heater (4) through the oil pipe 4 (404), the temperature adjustment plate (6) and the oil pipe 2 (402) in sequence, so that the heating oil in the oil bath box (3) maintains a temperature within a stable range, and the stock liquid tank (2) is heated at a constant temperature; S2. When the temperature sensor (5) detects that the temperature of the heating oil flowing out of the oil bath box (3) is lower than the preset value T1, it indicates that the temperature of the oil bath has dropped. At this time, the temperature compensation operation is performed: S2.

1. Power on the refrigerator, and start the auxiliary motor (10) and the main motor (11) at the same time, driving the main inclined tube (72) to rotate until it is connected to the second oil tube (402), and driving the auxiliary inclined tube (82) to rotate until it is connected to the fourth oil tube (404). At this time, the heating oil output from the first oil tube (401) will enter between the main rotating ring (71) and the temperature regulating plate (6), and after being heated by the external heat conducting plate (9), it will be input into the oil bath box (3) through the third oil tube (403); S2.

2. After a period of time has passed since step S2.1, the auxiliary motor (10) is started again to drive the auxiliary inclined tube (82) to rotate again until it is connected to the oil pipe 3 (403). At this time, the heated heating oil in the temperature regulating plate (6) is reversely input into the oil bath box (3) through the oil pipe 4 (404), that is, the input and output directions of the heating oil in the oil bath box (3) are adjusted to uniformly heat the heating oil in the oil bath box (3); S2.3, when it is detected that the temperature of the heating oil flowing out of the oil bath box (3) returns to the normal range, the temperature compensation operation is stopped, and the main inclined tube (72) and the auxiliary inclined tube (82) are rotated to return to the positions in step S1; S3. When the temperature sensor (5) detects that the temperature of the heating oil flowing out of the oil bath box (3) is higher than the preset value T2, it indicates that the oil bath temperature is too high. At this time, the temperature reduction operation is performed: S3.

1. Similarly, the refrigerator is energized, and then the current direction of the electromagnet (1201) is changed. The change in the direction of the magnetic field drives the electromagnet (1201) to move. At this time, the heating oil entering the main inclined tube (72) flows into the inner side of the main rotating ring (71) and the auxiliary rotating ring (81) through the main oil hole (7201), and after being cooled by the inner heat conducting plate (13), it enters the auxiliary inclined tube (82) through the auxiliary oil hole (8201), and is then input into the oil bath box (3) through the oil pipe three (403); S3.

2. After step S3.1 is performed for a period of time, the auxiliary motor (10) is started to drive the auxiliary inclined tube (82) to rotate until it is connected to the oil pipe four (404). At this time, the heating oil in the auxiliary inclined tube (82) after cooling is reversely input into the oil bath box (3) through the oil pipe four (404), that is, the input and output directions of the heating oil on the oil bath box (3) are adjusted to uniformly cool the heating oil in the oil bath box (3); S3.

3. When it is detected that the temperature of the heating oil flowing out of the oil bath box (3) has returned to the normal range, the consumption reduction operation is stopped, the current direction of the electromagnet (1201) is restored to the initial direction, and the auxiliary inclined tube (82) is rotated so that the two return to the position in step S1.

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