A cryogenic pump

Abstract

The present invention relates to a cryopump, comprising a cryopump body, a heat pipe comprising a pipe body and a plug body, the plug body being located inside the pipe body, a first permanent magnet being located outside the pipe body, the first permanent magnet driving the plug body to move by magnetic force, the pipe body comprising a heat absorbing section, a heat releasing section, and a reduced diameter section, the reduced diameter section being integrally formed with the heat absorbing section and the heat releasing section at both ends, the plug body being used to seal the reduced diameter section, the heat releasing section being in contact with a primary cold head and a secondary cold head inside the cryopump body, the heat absorbing section being located outside a cylinder housing of the cryopump body and being fixedly connected to a heat source. In the present invention, ice crystals in the heat pipe are moved in the heat pipe by gravity, allowing the working fluid in the heat pipe to still undergo phase change heat conduction after solidification, thereby greatly improving the heat conduction efficiency of the heat pipe; the plug body in the pipe body is driven to move by magnetic force, separating the heat absorbing section from the heat releasing section, preventing ice crystals from moving into the heat absorbing section, thereby stopping phase change heat conduction and reducing the interference of the external temperature on the internal temperature of the cryopump body.

Description

Technical Field

[0001] The present invention relates to the field of cryogenic pumps, in particular to a cryogenic pump. Background Art

[0002] Cryopumps are storage vacuum pumps with an extremely low-temperature surface inside the pump that captures gases through condensation and adsorption, achieving an ultra-high vacuum state. They can achieve a clean vacuum with the highest pumping rate and the lowest ultimate pressure. They are widely used in the research and production of semiconductors and integrated circuits, as well as in molecular beam research, vacuum coating equipment, vacuum surface analysis instruments, ion implanters, and space simulation devices.

[0003] When a cryopump reaches saturation capacity after long-term operation, its pumping speed drops dramatically. At this point, the pump needs to be stopped and heated to release the gas adsorbed on the cryopanel, restoring its original pumping performance. Heating the temperature and using a pre-pump to remove the condensed and adsorbed gas is called "regeneration."

[0004] There are several ways to regenerate:

[0005] ① Natural heating method: Turn off the power of the refrigerator and use the heat of the pump wall to slowly heat up the cryopump. The temperature rise is very slow at the beginning. When the pressure in the pump rises to the point where convection heat transfer takes effect, the temperature rise rate accelerates and finally reaches a stable temperature value.

[0006] ② Venting and heating method: After stopping the refrigerator, open the vent valve to let in clean and dry air to quickly heat up the cryopump cryopanel

[0007] ③ Electric heating method: Electric heaters are installed on the first and second stage cold heads in the cryopump. During regeneration, electric heating is applied to quickly heat up the cryopanel, thus shortening the regeneration time.

[0008] The existing electric heating method uses an electric heating rod with a metal shell that penetrates into the interior of the cryopump. Inside the empty metal shell are multiple heating wires and silicone. The silicone is located between the heating wires and the metal shell to prevent the heating wires from contacting each other or the heating rod shell, thereby preventing short circuits.

[0009] The thinner the silicone, the better the thermal conductivity, but the heater rod is more susceptible to short circuits, which can cause electromagnetic interference. Thicker silicone reduces short circuits, but the thermal conductivity deteriorates. Because silicone's thermal conductivity is poor, and the thickness of the silicone in existing heater rods is too high, the heater rod's ability to heat the cold head cannot be further increased, resulting in a longer regeneration time. Furthermore, due to the limited space within the cryopump and the need to minimize the number of sealing interfaces, increasing the heating capacity by simply adding heater rods is not an option. Summary of the Invention

[0010] The present invention provides a cryogenic pump that solves the above technical problems.

[0011] A cryogenic pump comprises a cryogenic pump body, and also comprises: a heat pipe, a first permanent magnet and a heat source, the heat pipe comprises a tube body and a plug body, the plug body is located inside the tube body, the first permanent magnet is located outside the tube body, the first permanent magnet drives the plug body to move by magnetic force, the tube body comprises a heat absorption section, a heat release section and a reduced diameter section, the two ends of the reduced diameter section are respectively integrally formed with the heat absorption section and the heat release section, the plug body is used to seal the reduced diameter section, the heat release section is in contact with the first-stage cold head and the second-stage cold head inside the cryogenic pump body, the heat absorption section is located outside the cylinder shell of the cryogenic pump body and is fixedly connected to the heat source.

[0012] Furthermore, the heat pipe is composed of a heat release section, a diameter reduction section and a heat absorption section from top to bottom. The heat pipe decreases in height from top to bottom. The pipe body is filled with a working fluid, and the working fluid moves from the heat release section to the heat absorption section by gravity.

[0013] Furthermore, it also includes a heat insulation sleeve, which is sleeved on the outside of the heat absorption section and the heat source.

[0014] Furthermore, the heat pipe also includes a second permanent magnet, which is located inside the pipe body and is fixed relative to the plug body. The first permanent magnet drives the second permanent magnet through magnetic force.

[0015] Furthermore, the heat pipe also includes a connecting rod and a slider, the two ends of the connecting rod are respectively fixedly connected to the plug body and the second permanent magnet, the slider is fixedly connected to the connecting rod, the slider is slidably connected to the inner wall of the tube body, and the slider is formed with a vent.

[0016] Furthermore, it also includes a driving device, which is located inside the insulation sleeve, the insulation sleeve is fixedly connected to the cylinder housing, a vacuum environment is formed inside the insulation sleeve, the driving device is fixedly connected to the cylinder housing or the insulation sleeve, and the driving device is connected to the first permanent magnet and drives the first permanent magnet to move.

[0017] Furthermore, it also includes an exhaust valve, a ventilation valve and a fan, the heat insulation sleeve is fixedly connected to the exhaust valve and the ventilation valve respectively, the exhaust valve is fixedly connected and communicated with the fan, and the exhaust valve is communicated with the vacuum pump.

[0018] Furthermore, the heat source is a radiator or a heater.

[0019] Furthermore, a non-stick coating is fixedly provided in the tube body;

[0020] A first channel is formed above the plug body, communicating with the heat release section and the diameter reduction section.

[0021] Furthermore, it also includes a permanent magnet housing, which is sleeved on the outside of the first permanent magnet and fixedly connected to the first permanent magnet, and the permanent magnet housing is slidably connected to the heat absorption section;

[0022] It also includes a track, which is fixedly connected to the heat release section. The permanent magnet housing is slidably connected to the track and moves along the track direction.

[0023] The present invention has the following advantages:

[0024] 1. The ice crystals in the heat pipe move in the heat pipe due to gravity, so that the working fluid in the heat pipe can still conduct heat through phase change after solidification, greatly improving the heat conduction efficiency of the heat pipe;

[0025] 2. The plug in the tube is driven by magnetic force to move. When the cryopump is cooling, the plug separates the heat absorption section from the heat release section, preventing ice crystals from moving to the heat absorption section, stopping phase change heat conduction, and reducing the interference of external temperature on the internal temperature of the cryopump.

[0026] 3. Heat conduction through heat pipes allows the heater to be located outside the cryopump body, allowing for the installation of a heater with a larger area and power, increasing the amount of heat supplied to the cold head per unit time, reducing regeneration time, and improving production efficiency;

[0027] 4. The heater is located outside the cryopump body, and there is sufficient space between the heater and the heat pipe for insulation treatment, which avoids the short circuit of the heating rod in the existing technology affecting the normal operation of the cryopump and improves the reliability of the cryopump;

[0028] 5. A thicker insulation layer can be used between the heat pipe and the heater, or the heater can be provided with an insulating shell. The heat pipe is not energized, thus avoiding the electromagnetic interference of the prior art short circuit on the equipment inside and outside the pump. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] To more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only one embodiment of the present invention. Those skilled in the art can also derive other implementation drawings based on the provided drawings without inventive effort.

[0030] Figure 1 : Schematic diagram of the three-dimensional structure of the cryopump body;

[0031] Figure 2 : Schematic diagram of the three-dimensional structure of the cryopump body with some components removed;

[0032] Figure 3 : A schematic cross-sectional view of the present invention with some components removed;

[0033] Figure 4 : Figure 3 A partial enlarged view of point A in the middle;

[0034] Figure 5 : The second schematic cross-sectional view of the present invention with some components removed;

[0035] Figure 6 : Figure 5 A partial enlarged view of point B in the middle;

[0036] Figure 7 : The third schematic diagram of the cross-sectional structure of the present invention with some components removed;

[0037] Figure 8 : Figure 7 A partial enlarged view of point C in the middle;

[0038] Figure 9 : Figure 7 Cross-sectional view at DD in the middle;

[0039] Figure 10 : Figure 9 A partial enlarged view of point E in the middle;

[0040] Figure 11 : Cross-sectional view of the track. DETAILED DESCRIPTION

[0041] The present invention will be further described below with reference to the accompanying drawings and examples:

[0042] The following describes embodiments of the present invention in detail. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended only to explain the present invention and are not to be construed as limiting the present invention.

[0043] In the description of the present invention, it should be noted that, unless otherwise specified or limited, the terms "mounted," "connected," and "connected" should be understood broadly. For example, they may refer to fixed connections, detachable connections, or integral connections; they may refer to direct connections or indirect connections through an intermediary. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on the specific circumstances.

[0044] In the description of the present invention, it should be understood that the terms "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0045] like Figures 1 to 11 As shown, a cryogenic pump includes a cryogenic pump body 1, and also includes: a heat pipe 2, a first permanent magnet 7 and a heat source, the heat pipe 2 includes a tube body 20 and a plug body 25, the plug body 25 is located inside the tube body 20, the first permanent magnet 7 is located outside the tube body 20, the first permanent magnet 7 drives the plug body 25 to move by magnetic force, the tube body 20 includes a heat absorption section 23, a heat release section 22 and a reduced diameter section 24, the two ends of the reduced diameter section 24 are respectively integrally formed with the heat absorption section 23 and the heat release section 22, the plug body 25 is used to seal the reduced diameter section 24, the heat release section 22 is in contact with the first-stage cold head 14 and the second-stage cold head 15 inside the cryogenic pump body 1, the heat absorption section 23 is located outside the cylinder shell 10 of the cryogenic pump body 1 and is fixedly connected to the heat source.

[0046] Preferably, the tube body 20 is made of aluminum, copper, aluminum alloy or copper alloy. A sealing process is adopted between the tube body 20 and the cylinder housing 10.

[0047] More preferably, the heat pipe body 20 is fixed to the cylinder housing 10 by welding.

[0048] Optionally, the heat pipe 2 is fixed to the primary cold head 14 by brazing, and the heat pipe 2 is fixed to the secondary cold head 15 by brazing.

[0049] Optionally, a first fixing device 4 and a second fixing device 5 are further included, wherein the first fixing device 4 fixes the heat pipe 2 to the first-level cold head 14 , and the second fixing device 5 fixes the heat pipe 2 to the second-level cold head 15 .

[0050] Preferably, the first fixing device 4 and the second fixing device 5 can be fixed blocks (such as Figure 2 and Figure 3 The fixing block is fixedly connected to the cold head by screws; the clamp tightens the cold head and the heat pipe 2 inside it so that they are in contact with each other.

[0051] Furthermore, the heat pipe 2 is composed of a heat release section 22, a diameter reduction section 24 and a heat absorption section 23 from top to bottom. The heat pipe 2 decreases in height from top to bottom. The tube body 20 is filled with a working fluid, and the working fluid moves from the heat release section 22 to the heat absorption section 23 by gravity.

[0052] Furthermore, the angle between the heat pipe 2 and the horizontal plane is greater than 45 degrees, so that ice crystals fall more easily.

[0053] Furthermore, a non-stick coating 201 is fixedly provided in the tube body 20 , and the non-stick coating 201 is used to reduce the friction of ice crystals.

[0054] Preferably, the non-stick coating 201 is fixed to the inner wall of the tube body 20 by existing processes such as electroplating, evaporation, sintering, and coating. Preferably, the plug body 25 is made of polytetrafluoroethylene or silicone.

[0055] Preferably, the non-stick coating 201 is a polytetrafluoroethylene coating.

[0056] Furthermore, the melting point of the working fluid in the tube body 20 is lower than -100°C and the critical temperature is higher than 0°C.

[0057] Preferably, the working fluid is ethanol, R23, ‌R508B or R600a.

[0058] Furthermore, the heat pipe 2 further includes a second permanent magnet 27 , which is located inside the pipe body 20 . The second permanent magnet 27 is fixed relative to the plug body 25 , and the first permanent magnet 7 drives the second permanent magnet 27 through magnetic force.

[0059] Furthermore, the heat pipe 2 further includes a connecting rod 26 and a slider 28. The connecting rod 26 is fixedly connected to the plug 25 and the second permanent magnet 27 at both ends, respectively. The slider 28 is fixedly connected to the connecting rod 26 and slidably connected to the inner wall of the pipe body 20. The slider 28 is formed with a vent 281. At least one vent 281 is located on the slider 28 to provide a passage for ice crystals to pass through.

[0060] Furthermore, the heat source is a radiator 9 , and the radiator 9 is fixedly connected to the heat absorption section 23 .

[0061] Furthermore, the heat source is a heater 3 , and the heater 3 is fixedly connected to the heat absorption section 23 .

[0062] Preferably, the heater 3 is an electric heater.

[0063] Furthermore, it also includes a permanent magnet housing 72, which is sleeved outside the first permanent magnet 7 and fixedly connected to the first permanent magnet 7, and the permanent magnet housing 72 is slidably connected to the heat absorption section 23. The permanent magnet housing 72 is a static magnetic field shielding layer.

[0064] Furthermore, it also includes a track 71 , which is fixedly connected to the heat release section 22 , and the permanent magnet housing 72 is slidably connected to the track 71 and moves along the direction of the track 71 .

[0065] Furthermore, a flat plate portion 21 is formed at one end of the heat absorbing section 23, distal from the reduced diameter section 24. This flat plate portion 21 is fixedly connected to the heat source. The heat source is in contact with and fixedly connected to the flat plate portion 21. This increases the surface area of ​​the flat plate portion 21, thereby increasing the contact area with the heater 3 or heat sink 9. The flat plate portion 21 conducts a greater amount of heat per unit time, allowing the associated heater 3 to utilize a higher heating power or the heat sink 9 to have more fins 92 formed on its base plate 91.

[0066] Furthermore, a first channel 251 is formed above the plug body 25 to connect the heat release section 22 and the diameter reduction section 24. The first channel 251 is used to balance the pressure difference between the two ends; to prevent ice crystals from passing through the first channel 251, the first channel 251 cannot be located at the bottom of the plug body 25.

[0067] In one embodiment, if Figure 3 and Figure 4 As shown, the heat source is a radiator, and further includes a fan 83, which is fixedly connected to the radiator 9 and drives the air flow of the radiator 9. Figure 3 Wherein, the fan 83 is an axial flow fan.

[0068] Preferably, a bracket 101 is further included, and the bracket 101 is in contact with the cylinder housing 10 and the radiator 9 respectively to play a supporting role.

[0069] Furthermore, it also includes a heat insulation sleeve 8, which is sleeved on the outside of the heat absorption section 23 and the heat source.

[0070] In one embodiment, the heat source is a radiator 9, and the insulation sleeve 8 is a flexible sleeve with one end open. The insulation sleeve 8 is made of existing insulation materials, such as aerogel flexible insulation felt. When the cryopump 1 is in cooling operation, the insulation sleeve 8 is positioned outside the radiator 9 to reduce heat exchange between the radiator 9 and the insulation sleeve 8. Before regenerating the cryopump 1, the insulation sleeve 8 is removed from the radiator 9 to prevent it from blocking heat exchange between the radiator 9 and the outside world.

[0071] In one embodiment, the heat source is a heater 3, and the heat insulating sleeve 8 is a hard shell with a vacuum inside, such as Figure 5 and Figure 6 As shown, the thermal insulation sleeve 8 is fixedly connected to the cylinder housing 10. The thermal insulation sleeve 8 does not contact the heat pipe 2 or the heater 3, and a vacuum environment is formed inside the thermal insulation sleeve 8. The vacuum environment inside the thermal insulation sleeve 8 reduces heat exchange between the heat pipe 2 and the outside of the thermal insulation sleeve 8, avoiding heat exchange through the metal tube 10 when the cryopump body 1 is in operation.

[0072] Furthermore, it also includes a driving device 6, which is located inside the thermal insulation sleeve 8, the thermal insulation sleeve 8 is fixedly connected to the cylinder housing 10, a vacuum environment is formed inside the thermal insulation sleeve 8, the driving device 6 is fixedly connected to the cylinder housing 10 or the thermal insulation sleeve 8, and the driving device 6 is connected to the first permanent magnet 7 and drives the first permanent magnet 7 to move.

[0073] Preferably, the driving device 6 is an electric push rod.

[0074] The driving device 6 is used to drive the movement of the permanent magnet housing 72 and the first permanent magnet 7 instead of manual operation, so that the plug body 25 can be driven to move without destroying the vacuum environment in the thermal insulation sleeve 8.

[0075] In one embodiment, the heat source is a radiator 9 and the heat insulating sleeve 8 is a hard shell with a vacuum inside. Figures 7 to 11 As shown, the cryopump 81 further includes an exhaust valve 81, a vent valve 82, and a fan 83. The thermal insulation sleeve 8 is fixedly connected to the exhaust valve 81 and the vent valve 82, respectively. The exhaust valve 81 is fixedly connected and communicates with the fan 83. The exhaust valve 81 is communicated with the vacuum pump. Preferably, the vacuum pump is a fore pump of the cryopump body 1.

[0076] Furthermore, it also includes a driving device 6, which is located inside the thermal insulation sleeve 8, the thermal insulation sleeve 8 is fixedly connected to the cylinder housing 10, a vacuum environment is formed inside the thermal insulation sleeve 8, the driving device 6 is fixedly connected to the cylinder housing 10 or the thermal insulation sleeve 8, and the driving device 6 is connected to the first permanent magnet 7 and drives the first permanent magnet 7 to move.

[0077] Preferably, the driving device 6 is an electric push rod.

[0078] Before cryopump 1 operates, vent valve 82 is closed, and the vacuum pump draws air from exhaust valve 81, evacuating inner cavity 80 of thermal insulation sleeve 8. Drive mechanism 6 drives permanent magnet housing 72 and first permanent magnet 7, which in turn drives plug 25 to seal the junction between heat release section 22 and reduced diameter section 24. Cryopump 1 then operates.

[0079] During cryopump regeneration, vent valve 82 opens and exhaust valve 81 closes. Fans 83 on both sides operate, drawing ambient air from the outside into the fins 92 of radiator 9 for heat exchange. Fans 83 then force the air out of inner cavity 80 and back to the outside. By increasing the airflow, fans 83 speed up heat exchange between radiator 9 and the outside world, increasing the rate at which heat pipe 2 heats the cold head.

[0080] Furthermore, the heat insulating sleeve 8 of the hard shell is made of metal material, and the heat insulating sleeve 8 is fixed to the cylinder housing 10 by welding.

[0081] Furthermore, a reflective layer is fixedly provided on the inner wall of the thermal insulation sleeve 8 .

[0082] Preferably, the reflective layer is a silver-plated layer.

[0083] It should be noted that the cryopump body 1 is a prior art cryopump, such as the cryopump disclosed in Chinese invention patent publication number CN117489563B. The primary and secondary cold heads 14, 15 of the cryopump body 1 are located within the cylinder housing 10 and outer housing 11, respectively, which are fixedly connected. The cold shield 2 and cold umbrella 3 of the cryopump body 1 are disposed within the outer housing 11, with the end of the cylinder housing 10 secured to the base via a cold head base 16.

[0084] When working: Figure 3 、 Figure 5 and Figure 7 As shown, the outer shell 11 needs to be located above the cylinder housing 10. The permanent magnet housing 72 is moved manually or by the drive device 6. The first permanent magnet 7 drives the second permanent magnet 27 to move synchronously through magnetic force. After the plug 25 seals the heat release section 22 and the reduced diameter section 24, the first permanent magnet 7 stops moving and is fixed to the tube body 20. The first permanent magnet 7 can be fixed in position by the friction between the track 71 and the permanent magnet housing 72 or by the locking capability of the drive device 6.

[0085] Afterwards, the temperature inside the cryopump body 1 is lowered, causing the cold shield 12 and cold umbrella 13 to adsorb molecules in the gas at low temperatures. During the temperature reduction process, the working fluid in the tube body 20 solidifies into ice crystals due to the excessively low temperature of the cryopump body 1. Under the action of gravity, the ice crystals slide downward along the tube body 20 until they are blocked by the plug 25, preventing them from moving downward to the heat absorption section 23, thereby stopping the phase change heat conduction of the heat pipe 2. After stopping the phase change heat conduction, the heat pipe 2 reduces the impact of the temperature outside the cryopump body 1 on its interior, allowing the cold shield 2 and cold umbrella 3 inside the cryopump body 1 to be smoothly lowered to the specified temperature.

[0086] During regeneration, the permanent magnet housing 72 is moved, and the first permanent magnet 7, through magnetic force, drives the second permanent magnet 27 to move synchronously, moving the plug 25 away from the junction of the heat release section 22 and the reduced diameter section 24. Ice crystals, under the force of gravity, slide along the lower inner wall of the tube body 20 to the heat absorption section 23. The heat source transfers heat to the heat absorption section 23, melting the ice crystals and then vaporizing or sublimating them. The vaporized working fluid moves to the contact point between the heat release section 22 and the primary and secondary cold heads 14, 15, where it liquefies or condenses. After releasing heat, the working fluid or the resulting ice crystals, under the force of gravity, moves downward along the heat pipe 2 to the flat plate section 21 to continue absorbing heat, completing the phase change cycle of the heat pipe 20.

[0087] After the working fluid solidifies, the heat pipe 2 smoothly undergoes phase change to conduct heat, and the heat conduction efficiency is greatly improved, so that a large amount of heat can be transferred to the primary cold head 14 and the secondary cold head 15 in a short time, so that the primary cold head 14 and the secondary cold head 15 are quickly heated, shortening the regeneration time.

[0088] When the heat source is the heater 3 , the heater 3 stops working when the temperature reaches a specified temperature according to the temperature sensor inside the cryopump body 1 .

[0089] When the heat source is the radiator 9 , the primary cold head 14 and the secondary cold head 15 can eventually reach a temperature close to room temperature.

[0090] The present invention has been described above by way of examples, but the present invention is not limited to the above specific embodiments. Any changes or modifications based on the present invention fall within the scope of protection claimed by the present invention.

Claims

1. A cryogenic pump, comprising a cryogenic pump body (1), characterized in that: Also includes: A heat pipe (2), a first permanent magnet (7) and a heat source, wherein the heat pipe (2) comprises a tube body (20) and a plug body (25), wherein the plug body (25) is located inside the tube body (20), and the first permanent magnet (7) is located outside the tube body (20), wherein the first permanent magnet (7) drives the plug body (25) to move by magnetic force, wherein the tube body (20) comprises a heat absorbing section (23), a heat releasing section (22) and a diameter reduction section (24), wherein both ends of the diameter reduction section (24) are integrally formed with the heat absorbing section (23) and the heat releasing section (22), respectively, wherein the plug body (25) is used to block the diameter reduction section (24), wherein the heat releasing section (22) contacts the first-stage cold head (14) and the second-stage cold head (15) inside the cryogenic pump body (1), and wherein the heat absorbing section (23) is located outside the cylinder housing (10) of the cryogenic pump body (1) and is fixedly connected to the heat source; The heat pipe (2) comprises a heat release section (22), a diameter reduction section (24), and a heat absorption section (23) from top to bottom. The heat pipe (2) decreases in height from top to bottom. The pipe body (20) is filled with a working fluid, and the working fluid moves from the heat release section (22) to the heat absorption section (23) by gravity.

2. A cryopump according to claim 1, characterized in that: It also includes a heat-insulating sleeve (8), which is sleeved on the heat-absorbing section (23) and the outside of the heat source.

3. The cryopump according to claim 2, wherein: The heat pipe (2) further comprises a second permanent magnet (27), the second permanent magnet (27) being located inside the pipe body (20), the second permanent magnet (27) being fixed relative to the plug body (25), and the first permanent magnet (7) driving the second permanent magnet (27) through magnetic force.

4. The cryopump according to claim 3, wherein: The heat pipe (2) further comprises a connecting rod (26) and a slider (28), wherein both ends of the connecting rod (26) are fixedly connected to the plug body (25) and the second permanent magnet (27), respectively, and the slider (28) is fixedly connected to the connecting rod (26). The slider (28) is slidably connected to the inner wall of the pipe body (20), and a vent hole (281) is formed on the slider (28).

5. The cryopump according to claim 3, wherein: The invention also includes a driving device (6), wherein the driving device (6) is located inside the heat-insulating sleeve (8), the heat-insulating sleeve (8) is fixedly connected to the cylinder housing (10), a vacuum environment is formed inside the heat-insulating sleeve (8), the driving device (6) is fixedly connected to the cylinder housing (10) or the heat-insulating sleeve (8), and the driving device (6) is connected to the first permanent magnet (7) and drives the first permanent magnet (7) to move.

6. The cryopump according to claim 5, wherein: It also includes an exhaust valve (81), a vent valve (82) and a fan (83), wherein the heat insulation sleeve (8) is fixedly connected to the exhaust valve (81) and the vent valve (82), respectively, the exhaust valve (81) is fixedly connected to and communicates with the fan (83), and the exhaust valve (81) is communicated with a vacuum pump.

7. The cryopump according to claim 2, wherein: The heat source is a radiator (9) or a heater (3).

8. The cryopump according to claim 1, wherein: A non-stick coating (201) is fixedly provided inside the tube body (20); A first channel (251) is formed above the plug body (25) and communicates with the heat release section (22) and the diameter reduction section (24).

9. The cryopump according to claim 3, wherein: It also includes a permanent magnet housing (72), the permanent magnet housing (72) is sleeved on the outside of the first permanent magnet (7) and fixedly connected to the first permanent magnet (7), and the permanent magnet housing (72) is slidably connected to the heat absorption section (23); It also includes a track (71), wherein the track (71) is fixedly connected to the heat release section (22), and the permanent magnet housing (72) is slidably connected to the track (71) and moves along the direction of the track (71).

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