Probe station tester turnover machine

Abstract

A probe station tester tilter disclosed by the present invention comprises a front frame and a rear frame, the front frame and the rear frame are connected through a bottom frame, a main shaft is arranged between the front frame and the rear frame, a connecting support and an adjusting ring are arranged on the main shaft, and an angle limiting disc is arranged at one end, close to the adjusting ring, of the main shaft. And a speed reducing mechanism connected with the main shaft is arranged in the rear frame. The device has the advantages that the speed reducing mechanism is adopted to drive the main shaft with the angle limiting disc and drive the testing head installed on the main shaft to achieve overturning, the overturning angle is accurately controlled through cooperative use of the induction piece and the sensor, the testing range is expanded, and practicability is high.

Description

Technical Field

[0001] The present invention relates to the technical field of probe station testers, in particular to a probe station tester flip machine. Background Art

[0002] Currently, there are two types of measurement for the surface parameters of semiconductor devices: contact and non-contact. The contact measurement methods include the probe method, the Van der Pauw method, the Hall effect method, etc. Among them, the probe tester method is the most widely used in semiconductor measurement technology.

[0003] Currently on the market, testers for different probe stations are basically not universal. Most probe station testers are specially designed and customized to test certain parameters and functions. Most of them are desktop probe station testers. Therefore, the test range is limited and generally cannot meet specific test requirements. Summary of the Invention

[0004] The object of the present invention is to provide a probe station tester flip machine to solve the problems raised in the above background technology.

[0005] To achieve the above object, the present invention provides the following technical solutions:

[0006] The present invention provides a probe station tester flip machine, which includes a front frame and a rear frame. The front frame and the rear frame are connected by a bottom frame. A main shaft is provided between the front frame and the rear frame. A connecting bracket and an adjustment ring are respectively provided on the main shaft. An angle limit plate is provided at one end of the main shaft close to the adjustment ring. A deceleration mechanism connected to the main shaft is provided in the rear frame.

[0007] Furthermore, the reduction mechanism includes a motor and a primary reducer and a secondary reducer connected thereto, and the driving end of the secondary reducer is connected to the main shaft.

[0008] Furthermore, there is a certain distance between the connecting bracket and the adjusting ring, and the connecting bracket, the adjusting ring and the angle limiting plate are all sleeved on the main shaft.

[0009] Furthermore, one side of the angle limiting disk has a convex portion, and both upper and lower ends of the angle limiting disk are provided with a first sensing piece, and the rear end of the convex portion is provided with a second sensing piece.

[0010] Furthermore, a limiting block, a sensor 1, a sensor 2 and a sensor 3 are further provided on a side of the rear frame close to the angle limiting plate, and the limiting block is arranged corresponding to the convex portion.

[0011] Furthermore, the sensor 1 and the sensor 3 are matched with the sensor sheet 1, and the sensor 2 is matched with the sensor sheet 2.

[0012] Furthermore, the limit block, the sensor 1, the sensor 2 and the sensor 3 are all fixedly connected to the rear frame.

[0013] Furthermore, a control center is provided in the front frame, which includes a buzzer and an emergency stop button. A start button, a stop button, a normal operation indicator light and a stop indicator light are provided at the lower ends of the buzzer and the emergency stop button. Key button switch 1 and key button switch 2 are respectively provided on both sides of the start button and the stop indicator light.

[0014] Furthermore, the bottom frame is arranged at the lower ends of the front frame and the rear frame, and both ends are fixedly connected to the front frame and the rear frame respectively.

[0015] Furthermore, the front frame, the rear frame and the lower ends of the bottom frame are also provided with a plurality of feet and universal wheels.

[0016] Beneficial effects: A probe station tester flipping machine adopts a reduction mechanism to drive a main shaft with an angle limit plate, drives a test head mounted on the main shaft to realize flipping, and utilizes the coordinated use of induction sheets and sensors to accurately control the flipping angle, thereby expanding the test range and having strong practicality. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0018] Figure 2 This is a schematic diagram of the overall structure of the present invention from another angle;

[0019] Figure 3 It is a schematic diagram of the local structure of the present invention;

[0020] Figure 4 This is a schematic diagram of the control center structure of the present invention;

[0021] Figure 5 It is a schematic structural diagram of the speed reduction mechanism of the present invention.

[0022] Reference numerals

[0023] 1-Universal wheel, 2-Foot, 3-Bottom frame, 4-Front frame, 5-Rear frame, 6-Control center, 7-Spindle, 8-Connecting bracket, 9-Adjusting ring, 10-Limit block, 11-Angle limit plate, 12-Sensor plate 1, 13-Sensor plate 2, 14-Sensor 1, 15-Sensor 2, 16-Sensor 3, 17-Key button switch 1, 18-Key button switch 2, 19-Start button, 20-Stop button, 21-Normal operation indicator light, 22-Stop indicator light, 23-Buzzer, 24-Emergency stop button, 25-Motor, 26-First-stage reducer, 27-Second-stage reducer, 28-Reduction mechanism, 29-Protrusion. DETAILED DESCRIPTION

[0024] The following are specific embodiments of the present invention and the accompanying drawings to further describe the technical solutions of the present invention, but the present invention is not limited to these embodiments.

[0025] Example

[0026] like Figure 1-5 As shown, a probe station tester flip machine includes a front frame 4 and a rear frame 5, the front frame 4 and the rear frame 5 are connected by a bottom frame 3, a main shaft 7 is provided between the front frame 4 and the rear frame 5, a connecting bracket 8 and an adjusting ring 9 are respectively provided on the main shaft 7, an angle limit plate 11 is provided at one end of the main shaft 7 close to the adjusting ring 9, and a deceleration mechanism 28 connected to the main shaft 7 is provided in the rear frame 5.

[0027] In the first embodiment, the reduction mechanism 28 includes a motor 25 and a primary reducer 26 and a secondary reducer 27 connected thereto. The driving end of the secondary reducer 27 is connected to the main shaft 7. The reduction mechanism 28 is placed in the rear frame 5. After the motor 25 is started, it is transmitted to the main shaft 7 through the primary reducer 26 and the secondary reducer 27, driving the main shaft 7 to rotate. There is a certain distance between the connecting bracket 8 and the adjusting ring 9. The connecting bracket 8, the adjusting ring 9 and the angle limit plate 11 are all mounted on the main shaft 7. The connecting bracket 8 and the adjusting ring 9 are used to fix the test head to the main shaft 7 and have a position adjustment function.

[0028] In the second embodiment, a convex portion 29 is provided on one side of the angle limit plate 11. The angle limit plate 11 rotates as the main shaft 7 rotates. The convex portion 29 is used in conjunction with the limit block 10 to limit the maximum rotation angle of the angle limit plate 11. The angle limit plate 11 is provided with a sensor piece 12 at both ends, and a sensor piece 2 13 is provided at the rear end of the convex portion 29. A limit block 10, a sensor 1 14, a sensor 2 15 and a sensor 3 16 are also provided on the side of the rear frame 5 close to the angle limit plate 11. The limit block 10 is provided corresponding to the convex portion 29. Sensor 1 14 and sensor 3 16 are matched with sensor piece 12, and sensor 2 15 is matched with sensor piece 2 13. The limit block 10, sensor 1 14, sensor 2 15 and sensor 3 16 are all fixedly connected to the rear frame 5. During the rotation of the angle limit plate 11, the sensor piece 14 and sensor piece 2 13 are tested by sensor 1 14, sensor 2 15 and sensor 3 16. If the sensor piece is rotated into place, the main shaft 7 is controlled to stop rotating after receiving the signal through the sensor, thereby achieving the operational accuracy of controlling the rotation angle.

[0029] A control center 6 is also provided in the front frame 4. The control center 6 includes a buzzer 23 and an emergency stop button 24. A start button 19, a stop button 20, a normal operation indicator light 21 and a stop indicator light 22 are provided at the lower ends of the buzzer 23 and the emergency stop button 24. Key button switch 1 17 and key button switch 2 18 are respectively provided on both sides of the start button 19 and the stop indicator light 22. The bottom frame 3 is provided at the lower ends of the front frame 4 and the rear frame 5, and the two ends are fixedly connected to the front frame 4 and the rear frame 5 respectively. The control center 6 is arranged as a whole in the front frame 4, and the control panel is located on one side of the front frame 4. The overall operation and stop of the equipment are controlled by buttons.

[0030] In this embodiment, the test head of the probe tester is indirectly fixed to the main shaft 7 before use, and the device is started by the button of the control center 6. The main shaft 7 is powered by the deceleration mechanism 28 and rotates to drive the test head to perform a flipping action. During the rotation of the main shaft 7, the angle limit plate 11 at one end is used in conjunction with the sensor to accurately control the rotation angle, which is beneficial for the test head to flip to the specified direction and improve the detection efficiency. In another embodiment, the device can be mirror-assembled according to the test environment and the test product, and can realize the function of left flipping or right flipping.

[0031] Finally, it should be noted that the above descriptions are merely preferred embodiments of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art will be able to modify the technical solutions described in the aforementioned embodiments or substitute equivalents for some of the technical features. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the present invention.

Claims

1. A probe station tester flip machine, characterized in that: The invention comprises a front frame (4) and a rear frame (5), wherein the front frame (4) and the rear frame (5) are connected via a bottom frame (3), a main shaft (7) is arranged between the front frame (4) and the rear frame (5), a connecting bracket (8) and an adjusting ring (9) are arranged on the main shaft (7), an angle limiting plate (11) is arranged at one end of the main shaft (7) close to the adjusting ring (9), and a speed reducing mechanism (28) connected to the main shaft (7) is arranged inside the rear frame (5).

2. A probe station tester flip machine according to claim 1, characterized in that: The speed reduction mechanism (28) comprises a motor (25) and a primary speed reducer (26) and a secondary speed reducer (27) connected thereto, wherein a driving end of the secondary speed reducer (27) is connected to the main shaft (7).

3. A probe station tester flip machine according to claim 1, characterized in that: There is a certain distance between the connecting bracket (8) and the adjusting ring (9), and the connecting bracket (8), the adjusting ring (9) and the angle limiting plate (11) are all sleeved on the main shaft (7).

4. A probe station tester flip machine according to claim 1, characterized in that: One side of the angle limit plate (11) has a convex portion (29), the upper and lower ends of the angle limit plate (11) are both provided with a first sensing piece (12), and the rear end of the convex portion (29) is provided with a second sensing piece (13).

5. A probe station tester flip machine according to claim 4, characterized in that: A limiting block (10), a sensor 1 (14), a sensor 2 (15) and a sensor 3 (16) are also provided on one side of the rear frame (5) close to the angle limiting plate (11), and the limiting block (10) is arranged corresponding to the convex portion (29).

6. A probe station tester flip machine according to claim 5, characterized in that: The sensor one (14) and the sensor three (16) are matched with the sensing sheet one (12), and the sensor two (15) is matched with the sensing sheet two (13).

7. A probe station tester flip machine according to claim 6, characterized in that: The limit block (10), the sensor one (14), the sensor two (15) and the sensor three (16) are all fixedly connected to the rear frame (5).

8. The probe station tester flip machine according to claim 1, characterized in that: A control center (6) is also provided in the front frame (4), and the control center (6) includes a buzzer (23) and an emergency stop button (24). A start button (19), a stop button (20), a normal operation indicator light (21) and a stop indicator light (22) are provided at the lower ends of the buzzer (23) and the emergency stop button (24), and a key button switch 1 (17) and a key button switch 2 (18) are provided on both sides of the start button (19) and the stop indicator light (22).

9. The probe station tester flip machine according to claim 1, characterized in that: The bottom frame (3) is arranged at the lower ends of the front frame (4) and the rear frame (5), and both ends are fixedly connected to the front frame (4) and the rear frame (5) respectively.

10. The probe station tester flip machine according to claim 1, characterized in that: The lower ends of the front frame (4), the rear frame (5) and the bottom frame (3) are also provided with a plurality of feet (2) and universal wheels (1).

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