Tactile sensing substrate and tactile feedback device

Abstract

The invention provides a tactile sensing substrate and a tactile feedback device. The tactile sensing substrate comprises a substrate, a piezoelectric layer and an electrode layer, the piezoelectric layer is located on one side of the substrate and comprises at least one piezoelectric unit; the electrode layer comprises a first electrode and a second electrode; wherein the substrate comprises a substrate surface facing the piezoelectric layer, and the first electrode and the second electrode are located on the two sides of the piezoelectric unit respectively in the direction parallel to the substrate surface.

Description

Technical Field

[0001] The present disclosure relates to the field of display technology, and in particular to a tactile sensing substrate and a tactile feedback device. Background Art

[0002] The tactile feedback technology based on lead zirconate titanate (PZT) piezoelectric material can achieve lightweight and integrated tactile feedback devices. PZT piezoelectric materials include three main components: lead oxide (PbO), zirconium oxide (ZrO2) and titanium oxide (Ti02). These three components are mixed together in a certain proportion to form a PZT piezoelectric film. However, it is difficult to increase the thickness of the PZT piezoelectric film, and there are defects or cracks in the entire film layer. These defects or cracks will cause the PZT piezoelectric film that is too thin to be easily broken down by voltage during use, causing device failure.

[0003] The above information disclosed in this section is only for understanding the background of the inventive concept of the present disclosure and therefore the above information may contain information that does not constitute the prior art. Summary of the invention

[0004] In one aspect, a tactile sensing substrate is provided, which includes a substrate, a piezoelectric layer and an electrode layer, wherein the piezoelectric layer is located on one side of the substrate, and the piezoelectric layer includes at least one piezoelectric unit; the electrode layer includes a first electrode and a second electrode; wherein the substrate includes a substrate surface facing the piezoelectric layer, and in a direction parallel to the substrate surface, the first electrode and the second electrode are respectively located on both sides of the piezoelectric unit.

[0005] According to some exemplary embodiments, the tactile sensing substrate further includes a lead layer, the lead layer including a first lead and a second lead; and the first lead is connected to a first power supply voltage, the second lead is connected to a second power supply voltage, and the first power supply voltage is not equal to the second power supply voltage.

[0006] According to some exemplary embodiments, the piezoelectric layer includes a plurality of piezoelectric units; and first electrodes of the plurality of piezoelectric units are electrically connected to the same first lead, and second electrodes of the plurality of piezoelectric units are electrically connected to the same second lead.

[0007] According to some exemplary embodiments, the piezoelectric layer includes a plurality of piezoelectric units, and the plurality of piezoelectric units are divided into at least two groups; and the first electrodes of all the piezoelectric units in the same group are electrically connected to the same first lead, and the second electrodes of all the piezoelectric units in the same group are electrically connected to the same second lead.

[0008] According to some exemplary embodiments, the piezoelectric layer includes a plurality of piezoelectric units, the plurality of piezoelectric units are arranged in an array, and the plurality of piezoelectric units are divided into at least one group; and within the same group, the first electrodes of all the piezoelectric units in the same column are electrically connected to the same first lead, and the second electrodes of all the piezoelectric units in the same column are electrically connected to the same second lead.

[0009] According to some exemplary embodiments, the piezoelectric layer includes a plurality of piezoelectric units, and the plurality of piezoelectric units are arranged at intervals along a first direction; the plurality of piezoelectric units include adjacent first piezoelectric units and second piezoelectric units, the first electrode of the first piezoelectric unit is located on a side of the first piezoelectric unit away from the second piezoelectric unit, and the first electrode of the second piezoelectric unit is located on a side of the second piezoelectric unit close to the first piezoelectric unit; and the first electrode of the first piezoelectric unit is electrically connected to the first lead, the second electrode of the second piezoelectric unit is electrically connected to the first lead, and the second electrode of the first piezoelectric unit and the first electrode of the second piezoelectric unit are electrically connected to the same second lead.

[0010] According to some exemplary embodiments, the second electrode of the first piezoelectric unit is reused as the first electrode of the second piezoelectric unit.

[0011] According to some exemplary embodiments, the first electrode of the first piezoelectric unit and the second electrode of the second piezoelectric unit are electrically connected to the same first lead.

[0012] According to some exemplary embodiments, in a cross section parallel to a surface of the substrate, the piezoelectric unit has a polygonal or circular shape; and both the first electrode and the second electrode are in contact with an outer side of the piezoelectric unit.

[0013] According to some exemplary embodiments, in a cross section parallel to a surface of the substrate, the piezoelectric unit is ring-shaped; and the first electrode contacts an inner side of the piezoelectric unit, and the second electrode contacts an outer side of the piezoelectric unit.

[0014] According to some exemplary embodiments, one end of the first lead is located between the first electrode and the substrate and is electrically connected to the first electrode, and the other end of the first lead is located outside the piezoelectric unit.

[0015] According to some exemplary embodiments, in a direction perpendicular to the surface of the substrate, a ratio of a sum of a thickness of the electrode layer and a thickness of the lead layer to a thickness of the piezoelectric layer is between 0.8 and 1.2.

[0016] According to some exemplary embodiments, in a direction parallel to the surface of the substrate, a ratio of a width of the first lead to a width of the first electrode is greater than or equal to 1.5 and less than or equal to 2; and / or a ratio of a width of the second lead to a width of the second electrode is greater than or equal to 1.5 and less than or equal to 2.

[0017] According to some exemplary embodiments, in a direction parallel to the surface of the substrate, a distance between the first electrode and the second electrode respectively located on two sides of the same piezoelectric unit is greater than 5 micrometers.

[0018] In another aspect, a tactile feedback device is provided, comprising the tactile sensing substrate as described above. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Other objects and advantages of the present disclosure will be apparent from the following description of the present disclosure with reference to the accompanying drawings, and will help to have a comprehensive understanding of the present disclosure.

[0020] Figure 1 The structural diagram of the tactile sensing substrate in the related art is schematically shown.

[0021] Figure 2a and Figure 2b The structure diagram of the tactile sensing substrate according to some embodiments of the present disclosure is schematically shown.

[0022] Figure 3a to Figure 3c The structure diagram of the tactile sensing substrate according to some embodiments of the present disclosure is schematically shown.

[0023] Figure 4a and Figure 4b The figure schematically shows a deformation diagram of a tactile sensing substrate according to some embodiments of the present disclosure.

[0024] Figure 5a to Figure 5c The structure diagram of the tactile sensing substrate according to some embodiments of the present disclosure is schematically shown.

[0025] Figure 6a to Figure 6c The structure diagram of the tactile sensing substrate according to some embodiments of the present disclosure is schematically shown.

[0026] Figure 7a Schematically illustrates a top view of a lead layer according to some embodiments of the present disclosure.

[0027] Figure 7b and Figure 7c The structure diagram of the tactile sensing substrate according to some embodiments of the present disclosure is schematically shown.

[0028] Figure 8aSchematically illustrates a top view of a lead layer according to some embodiments of the present disclosure.

[0029] Figure 8b and Figure 8c The structure diagram of the tactile sensing substrate according to some embodiments of the present disclosure is schematically shown.

[0030] Figure 9a Schematically illustrates a top view of a lead layer according to some embodiments of the present disclosure.

[0031] Figure 9b and Fig.9c The structure diagram of the tactile sensing substrate according to some embodiments of the present disclosure is schematically shown. DETAILED DESCRIPTION

[0032] In the following description, for the purpose of explanation, many specific details are set forth to provide a comprehensive understanding of various exemplary embodiments. However, it is apparent that various exemplary embodiments may be implemented without these specific details or with one or more equivalent arrangements. In addition, various exemplary embodiments may be different, but not necessarily exclusive. For example, the specific shapes, configurations, and characteristics of an exemplary embodiment may be used or implemented in another exemplary embodiment without departing from the inventive concept.

[0033] In the accompanying drawings, the size and relative size of the elements may be exaggerated for the purpose of clarity and / or description. Thus, the size and relative size of the individual elements are not necessarily limited to the size and relative size shown in the drawings. When the exemplary embodiments may be implemented differently, the specific process sequence may be performed differently from the described sequence. For example, two processes described in succession may be performed substantially simultaneously or in an order opposite to the described sequence. In addition, the same reference numerals represent the same elements.

[0034] When an element is described as being "on" another element, "connected to" another element, or "coupled to" another element, the element may be directly on, directly connected to, or directly coupled to another element, or there may be intermediate elements. However, when an element is described as being "directly on" another element, "directly connected to" another element, or "directly coupled to" another element, there are no intermediate elements. Other terms and / or expressions used to describe the relationship between elements should be interpreted in a similar manner, for example, "between" versus "directly between", "adjacent" versus "directly adjacent", or "on" versus "directly on", etc. In addition, the term "connected" may refer to a physical connection, an electrical connection, a communication connection, and / or a fluid connection.

[0035] It should be understood that, although the terms first, second, etc. may be used herein to describe different elements, these elements should not be limited by these terms. These terms are only used to distinguish one element from another element. For example, without departing from the scope of the exemplary embodiment, the first element may be named as the second element, and similarly, the second element may be named as the first element.

[0036] Figure 1 It is a schematic diagram of the structure of a tactile sensing substrate in the related art.

[0037] Reference Figure 1 In the related art, a tactile sensing substrate includes a glass substrate 10, a bottom electrode 11, a PZT piezoelectric film 12 and a top electrode 13 which are stacked in sequence. The bottom electrode 11 and the top electrode 13 are respectively located on the upper and lower surfaces of the PZT piezoelectric film 12. When power is supplied to the bottom electrode 11 and the top electrode 13, the PZT piezoelectric film 12 can be driven to vibrate up and down, thereby achieving a tactile feedback effect.

[0038] It is understandable that the deposition thickness of the PZT piezoelectric film 12 is usually less than or equal to 3 microns (i.e., the thickness is difficult to increase), and there are defects or cracks in the PZT piezoelectric film 12. In actual use, after the bottom electrode 11 and the top electrode 13 are energized, breakdown is likely to occur, resulting in a short circuit between the bottom electrode 11 and the top electrode 13, thereby causing the tactile sensing substrate to fail. Therefore, in order to solve at least one aspect of the above technical problems, the embodiments of the present disclosure provide a tactile sensing substrate and a tactile feedback device, which are conducive to avoiding a short circuit when the two electrodes are energized, and achieving a better tactile feedback effect.

[0039] Figure 2a and Figure 2b is a schematic diagram of the structure of a tactile sensing substrate according to some embodiments of the present disclosure. Figure 2b is a three-dimensional image of a tactile sensing substrate. Figure 2a For Figure 2b A side view of a tactile sensing substrate is shown.

[0040] Reference Figure 2a and Figure 2b The tactile sensing substrate includes a substrate 20, a piezoelectric layer 21 and an electrode layer 22. The piezoelectric layer 21 is located on one side of the substrate 20, and the piezoelectric layer 21 includes at least one piezoelectric unit 210. For example, Figure 2a and Figure 2bAs shown, the piezoelectric layer 21 includes only one piezoelectric unit 210. The electrode layer 22 includes a first electrode 221 and a second electrode 222. The substrate 20 includes a substrate surface S1 facing the piezoelectric layer 21, and in a direction parallel to the substrate surface S1, the first electrode 221 and the second electrode 222 are respectively located on both sides of the piezoelectric unit 210, that is, the first electrode 221 and the second electrode 222 are respectively located on two sides of the piezoelectric unit 210.

[0041] It can be understood that in this embodiment, by arranging the first electrode 221 and the second electrode 222 on both sides of the piezoelectric unit 210, when different voltages are applied to the first electrode 221 and the second electrode 222, the piezoelectric unit 210 will expand and contract along the direction from the first electrode 221 to the second electrode 222, thereby driving the entire substrate 20 to bend and deform to achieve tactile feedback. Since the first electrode 221 and the second electrode 222 are respectively located on the two sides of the piezoelectric unit 210, the distance d between the first electrode 221 and the second electrode 222 can be increased without changing the deposition thickness h of the piezoelectric layer 21, so as to avoid short circuit between the first electrode 221 and the second electrode 222 when power is supplied, thereby achieving a better tactile feedback effect.

[0042] It should be noted that the material of the substrate 20 is, for example, glass. The material of the piezoelectric layer 21 is, for example, a PZT piezoelectric material, and the piezoelectric layer 21 can be prepared by a magnetron sputtering process. The material of the electrode layer 22 can be any one of gold (Au), platinum (Pt), and ruthenium (Ru), but the embodiments of the present disclosure are not limited thereto. The structures of the first electrode 221 and the second electrode 222 can be realized by a lift-off process.

[0043] In some embodiments of the present disclosure, Figure 2a As shown, in the direction parallel to the substrate surface, the distance d between the first electrode 221 and the second electrode 222 respectively located on two sides of the same piezoelectric unit 210 is greater than 5 microns.

[0044] It can be understood that by making the distance d between the first electrode 221 and the second electrode 222 greater than 5 micrometers, a short circuit can be avoided when the first electrode 221 and the second electrode 222 are powered on.

[0045] Figure 3a to Figure 3c is a schematic diagram of the structure of a tactile sensing substrate according to some embodiments of the present disclosure. Figure 3a is a top view of the tactile sensing substrate. Figure 3b For along Figure 3a The cross-section view along the A1-A1' direction, Figure 3c For along Figure 3a Sectional view along the B1-B1' direction.

[0046] Reference Figure 3a to Figure 3c The piezoelectric layer 21 includes a plurality of piezoelectric units 210. In the direction parallel to the substrate surface, the first electrode 221 and the second electrode 222 are respectively located on both sides of the piezoelectric unit 210, that is, the first electrode 221 and the second electrode 222 are respectively located on two side surfaces of the piezoelectric unit 210.

[0047] In some embodiments of the present disclosure, the tactile sensing substrate further includes a lead layer 23. The lead layer 23 includes a first lead 231 and a second lead 232. The first lead 231 is connected to a first power supply voltage, and the second lead 232 is connected to a second power supply voltage. The first power supply voltage is not equal to the second power supply voltage, that is, the first lead 231 and the second lead 232 are connected to different power supply voltages, and an electric field can be formed. The material of the lead layer 23 can be indium tin oxide (ITO) or titanium platinum alloy (Ti / Pt).

[0048] In some embodiments of the present disclosure, the first electrodes 221 of the plurality of piezoelectric units 210 are all electrically connected to the same first lead 231 , and the second electrodes 222 of the plurality of piezoelectric units 210 are all electrically connected to the same second lead 232 .

[0049] It can be understood that, in the present embodiment, the first electrodes 221 of the plurality of piezoelectric units 210 are led out through the same first lead 231, and the second electrodes 222 of the plurality of piezoelectric units 210 are led out through the same second lead 232. The first electrodes 221 and the second electrodes 222 of the plurality of piezoelectric units 210 can be energized simultaneously through a first lead 231 and a second lead 232, thereby driving the entire piezoelectric layer 21 to vibrate simultaneously, thereby realizing the full-range vibration of the tactile perception substrate.

[0050] In some embodiments of the present disclosure, the size of the piezoelectric unit 210 along the A1-A1' direction is greater than or equal to 5 microns and less than or equal to 20 microns, for example, the size of the piezoelectric unit 210 along the A1-A1' direction is any value of 5 microns, 8 microns, 12 microns, 16 microns, and 20 microns. The size of the piezoelectric unit 210 along the B1-B1' direction is greater than or equal to 10 microns and less than or equal to 50 microns, for example, the size of the piezoelectric unit 210 along the B1-B1' direction is any value of 10 microns, 20 microns, 30 microns, 40 microns, and 50 microns. Figure 3b As shown, in the direction perpendicular to the substrate surface, the thickness h of the piezoelectric layer 21 is greater than 0 and less than or equal to 3 microns. For example, the thickness h of the piezoelectric layer 21 is any value among 1 micron, 1.5 microns, 2 microns, 2.5 microns, and 3 microns. Figure 3a As shown, the spacing a between two adjacent piezoelectric units 210 is greater than or equal to 50 microns and less than or equal to 100 microns. For example, the spacing a between two adjacent piezoelectric units 210 is any value of 50 microns, 60 microns, 70 microns, 80 microns, and 100 microns.

[0051] It should be noted that if Figure 3a As shown, the first electrodes 221 of the plurality of piezoelectric units 210 in the same column are connected to each other and then to the first lead 231, and the second electrodes 222 of the plurality of piezoelectric units 210 in the same column are connected to each other and then to the second lead 232. In other embodiments, the first electrode 221 of each piezoelectric unit 210 may be directly connected to the first lead 231, and the second electrode 222 of each piezoelectric unit 210 may be directly connected to the second lead 232, but the embodiments of the present disclosure are not limited thereto.

[0052] In some embodiments of the present disclosure, Figure 3a As shown, in the direction along A1-A1', the width w11 of the first electrode 221 is greater than or equal to 2 microns and less than or equal to 3 microns, for example, the width w11 of the first electrode 221 is any value of 2 microns, 2.2 microns, 2.4 microns, 2.6 microns, and 3 microns. The width w12 of the second electrode 222 is greater than or equal to 2 microns and less than or equal to 3 microns, for example, the width w12 of the second electrode 222 is any value of 2 microns, 2.2 microns, 2.4 microns, 2.6 microns, and 3 microns. In the direction along B1-B1', the width w21 of the first lead 231 is greater than or equal to 50 microns and less than or equal to 100 microns, for example, the width w21 of the first lead 231 is any value of 50 microns, 60 microns, 70 microns, 80 microns, and 100 microns. The width w22 of the second lead 232 is greater than or equal to 50 microns and less than or equal to 100 microns, for example, the width w22 of the second lead 232 is any value of 50 microns, 60 microns, 70 microns, 80 microns, and 100 microns. By setting the width w21 of the first lead 231 to be greater than the width w11 of the first electrode 221 and setting the width w22 of the second lead 232 to be greater than the width w12 of the second electrode 222, it is convenient to conduct the subsequent power-on treatment of the first lead 231 and the second lead 232.

[0053] In some embodiments of the present disclosure, in a direction parallel to the surface of the substrate, the ratio of the width w21 of the first lead 231 to the width w11 of the first electrode 221 is greater than or equal to 1.5 and less than or equal to 2, for example, the ratio of the width w21 of the first lead 231 to the width w11 of the first electrode 221 is any value of 1.5, 1.6, 1.7, 1.8, and 2; and / or, the ratio of the width w22 of the second lead 232 to the width w12 of the second electrode 222 is greater than or equal to 1.5 and less than or equal to 2, for example, the ratio of the width w22 of the second lead 232 to the width w12 of the second electrode 222 is any value of 1.5, 1.6, 1.7, 1.8, and 2. The embodiments of the present disclosure are not limited thereto. In other embodiments, the ratio of the width w21 of the first lead 231 to the width w11 of the first electrode 221 may also be less than or equal to 1, and the ratio of the width w22 of the second lead 232 to the width w12 of the second electrode 222 may also be less than or equal to 1.

[0054] It should be noted that the thickness of the electrode layer 22 is consistent with the thickness h of the piezoelectric layer 21 to achieve the maximum contact area with the piezoelectric unit 210. The lead layer 23 can be prepared together with the electrode layer 22, that is, the thickness of the lead layer 23 can also be consistent with the thickness h of the piezoelectric layer 21.

[0055] Figure 4a and Figure 4b is a schematic diagram of deformation of a tactile sensing substrate according to some embodiments of the present disclosure. Figure 4a is the deformation simulation diagram. Figure 4b It is the amplitude line graph corresponding to the resonant frequency (unit: Hz).

[0056] It should be noted that in Figure 2b In the piezoelectric equation of the piezoelectric layer 21 shown in FIG. 1 , the formula corresponding to the deformation amount along the direction from the first electrode 221 to the second electrode 222 is x1=d 33 *E1. Where x1 is the deformation amount along the direction from the first electrode 221 to the second electrode 222, d 33 is the piezoelectric coefficient along the direction from the first electrode 221 to the second electrode 222, and E1 is the electric field strength along the direction from the first electrode 221 to the second electrode 222. When the first electrode 221 and the second electrode 222 are connected to an alternating current, the voltage can be selected from 50V to 150V, and the piezoelectric layer 21 will stretch and shrink along the direction from the first electrode 221 to the second electrode 222, thereby driving the substrate 20 to bend up and down, and obvious vibration can be felt at the resonant frequency. Figure 4a It can be seen that the deformation in the middle is greater than that on both sides.

[0057] In some embodiments of the present disclosure, the size of the tactile sensing substrate is, for example, 120 mm*60 mm. Under the control of 150 V AC, the entire substrate exhibits a first-order vibration mode at 247 Hz, and the maximum amplitude obtained by simulation is about 1.57 μm (e.g. Figure 4b As shown), it can satisfy the function of tactile feedback.

[0058] Figure 5a to Figure 5c is a schematic diagram of the structure of a tactile sensing substrate according to some embodiments of the present disclosure. Figure 5a is a top view of the tactile sensing substrate. Figure 5b For along Figure 5a The cross-section view along the A2-A2' direction, Figure 5c For along Figure 5a Sectional view along the B2-B2' direction.

[0059] Reference Figure 5a to Figure 5c The piezoelectric layer 21 includes a plurality of piezoelectric units 210. In the direction parallel to the substrate surface, the first electrode 221 and the second electrode 222 are respectively located on both sides of the piezoelectric unit 210, that is, the first electrode 221 and the second electrode 222 are respectively located on two side surfaces of the piezoelectric unit 210.

[0060] In some embodiments of the present disclosure, the plurality of piezoelectric units 210 are divided into at least two groups (Z1, Z2). The first electrodes 221 of all piezoelectric units 210 in the same group are electrically connected to the same first lead 231, and the second electrodes 222 of all piezoelectric units 210 in the same group are electrically connected to the same second lead 232.

[0061] It is understandable that in different application scenarios, the vibration area required by the tactile sensing substrate is different. For example, in a racing game scenario, it is usually only necessary to provide vibration feedback when operating the corresponding buttons at the lower left and lower right of the screen. In this embodiment, a plurality of piezoelectric units 210 are divided into at least two groups (Z1, Z2). Each group includes a plurality of piezoelectric units 210, and the first electrodes 221 of all piezoelectric units 210 in the same group are led out through the same first lead 231, and the second electrodes 222 of all piezoelectric units 210 in the same group are led out through the same second lead 232. By respectively energizing the first electrodes 221 and the second electrodes 222 of all piezoelectric units 210 in the same group, the group can be driven to vibrate. By respectively energizing the first electrodes 221 and the second electrodes 222 of the piezoelectric units 210 of different groups, separate control of different groups can be achieved, for example, vibration of a specific group can be achieved, and other groups other than the specific group do not vibrate.

[0062] For example, when the vibration of group Z1 needs to be controlled, it is only necessary to apply alternating current to the first lead 231 and the second lead 232 corresponding to group Z1, so that only local vibration can be generated in group Z1. For different key areas, only the vibration of the corresponding group can be generated, which can adapt to the key elements in the game scene and make the player more immersed.

[0063] It should be noted that the grouping method of the plurality of piezoelectric units 210 is not limited to Figure 5a As shown in the grouping, specifically, the distribution patterns of multiple groups can be patterned according to the key elements of different application scenarios to achieve partition control of different patterns and realize multiple vibration effects.

[0064] Figure 6a to Figure 6c is a schematic diagram of the structure of a tactile sensing substrate according to some embodiments of the present disclosure. Figure 6a is a top view of the tactile sensing substrate. Figure 6b For along Figure 6a The cross-section view along the A3-A3' direction, Figure 6c For along Figure 6a Sectional view along the B3-B3' direction.

[0065] Reference Figure 6a to Figure 6c The piezoelectric layer 21 includes a plurality of piezoelectric units 210. In the direction parallel to the substrate surface, the first electrode 221 and the second electrode 222 are respectively located on both sides of the piezoelectric unit 210, that is, the first electrode 221 and the second electrode 222 are respectively located on the side surfaces of the piezoelectric unit 210.

[0066] In some embodiments of the present disclosure, a plurality of piezoelectric units 210 are arranged in an array. The plurality of piezoelectric units 210 are divided into at least one group (Z3). In the same group, the first electrodes 221 of all piezoelectric units 210 in the same column are electrically connected to the same first lead 231, and the second electrodes 222 of all piezoelectric units 210 in the same column are electrically connected to the same second lead 232.

[0067] It can be understood that, in the present embodiment, the plurality of piezoelectric units 210 are divided into at least one group (Z3). In one group (Z3), a plurality of piezoelectric units 210 are included, and the plurality of piezoelectric units 210 are arranged in a plurality of columns, and the number of piezoelectric units 210 included in different columns may be the same or different. In the same group, the first electrodes 221 of all the piezoelectric units 210 in each column are led out through the same first lead 231, and the second electrodes 222 of all the piezoelectric units 210 in each column are led out through the same second lead 232. For a group, by respectively energizing the first electrodes 221 and the second electrodes 222 of the piezoelectric units 210 in the same column, the piezoelectric units 210 in the column can be driven to vibrate; by respectively energizing the first electrodes 221 and the second electrodes 222 of the piezoelectric units 210 in different columns, different columns can be controlled separately, for example, a specific column can be vibrated, and other columns except the specific column do not vibrate.

[0068] In some embodiments of the present disclosure, in a cross section parallel to the substrate surface, the shape of the piezoelectric unit 210 is a polygon (eg Figure 2b , Figure 3a , Figure 5a rectangular as shown) or circular (as Figure 6a Wherein, the first electrode 221 and the second electrode 222 are both in contact with the outer side of the piezoelectric unit 210.

[0069] It is understandable that in the game scene, the key elements are mostly circular. By setting the shape of the piezoelectric unit 210 to be circular, it is closer to the key elements in the game scene and the vibration effect is better. When the shape of the piezoelectric unit 210 is set to be circular, the diameter of the piezoelectric unit 210 can be greater than or equal to 10 microns and less than or equal to 30 microns. For example, the diameter of the piezoelectric unit 210 is any value of 10 microns, 15 microns, 20 microns, 25 microns, and 30 microns.

[0070] Figure 7a is a top view of the lead layer 23 according to some embodiments of the present disclosure. Figure 7b and Figure 7c is a schematic diagram of the structure of a tactile sensing substrate according to some embodiments of the present disclosure. Figure 7b is a top view of the tactile sensing substrate. Figure 7c For along Figure 7b Sectional view along the A4-A4' direction.

[0071] Reference Figure 7b and Figure 7c The piezoelectric layer 21 includes a plurality of piezoelectric units 210. In the direction parallel to the substrate surface, the first electrode 221 and the second electrode 222 are respectively located on both sides of the piezoelectric unit 210, that is, the first electrode 221 and the second electrode 222 are respectively located on two side surfaces of the piezoelectric unit 210.

[0072] In some embodiments of the present disclosure, a plurality of piezoelectric units 210 are arranged at intervals along a first direction (A4-A4' direction). The plurality of piezoelectric units 210 include adjacent first piezoelectric units 2101 and second piezoelectric units 2102. The first electrode 221 of the first piezoelectric unit 2101 is located on a side of the first piezoelectric unit 2101 away from the second piezoelectric unit 2102, and the second electrode 222 of the first piezoelectric unit 2101 is located on a side of the first piezoelectric unit 2101 close to the second piezoelectric unit 2102; the first electrode 221 of the second piezoelectric unit 2102 is located on a side of the second piezoelectric unit 2102 close to the first piezoelectric unit 2101, and the second electrode 222 of the second piezoelectric unit 2102 is located on a side of the second piezoelectric unit 2102 away from the first piezoelectric unit 2101. The first electrode 221 of the first piezoelectric unit 2101 is electrically connected to the first lead 231 , the second electrode 222 of the second piezoelectric unit 2102 is electrically connected to the first lead 231 , and the second electrode 222 of the first piezoelectric unit 2101 and the first electrode 221 of the second piezoelectric unit 2102 are electrically connected to the same second lead 232 .

[0073] It should be noted that the second electrode 222 of the first piezoelectric unit 2101 and the first electrode 221 of the second piezoelectric unit 2102 may also be electrically connected to different second leads 232. As long as the direction of the electric field formed between the first electrode 221 and the second electrode 222 of the first piezoelectric unit 2101 is opposite to the direction of the electric field formed between the first electrode 221 and the second electrode 222 of the second piezoelectric unit 2102, that is, the signals applied to the two adjacent piezoelectric units 210 are opposite.

[0074] It can be understood that in this embodiment, by making the signals applied by two adjacent piezoelectric units 210 opposite, the expansion and contraction directions of the two adjacent piezoelectric units 210 are also opposite. Under the excitation of the electric field, the strains generated by the two adjacent piezoelectric units 210 offset and enhance each other, thereby increasing the overall vibration amplitude, that is, the amplitude of the tactile perception substrate can be increased.

[0075] In some embodiments of the present disclosure, the plurality of piezoelectric units 210 further include a third piezoelectric unit 2103 adjacent to the second piezoelectric unit 2102, the first electrode 221 of the third piezoelectric unit 2103 is located on a side of the third piezoelectric unit 2103 close to the second piezoelectric unit 2102, and the second electrode 222 of the third piezoelectric unit 2103 is located on a side of the third piezoelectric unit 2103 away from the second piezoelectric unit 2102. The first electrode 221 of the third piezoelectric unit 2103 and the second electrode 222 of the second piezoelectric unit 2102 are electrically connected to the same first lead 231, and the second electrode 222 of the third piezoelectric unit 2103 is electrically connected to the second lead 232.

[0076] In some embodiments of the present disclosure, Figure 7b As shown, along the direction of A4-A4', the size of the piezoelectric unit 210 is greater than or equal to 5 microns and less than or equal to 20 microns. For example, the size of the piezoelectric unit 210 along the direction of A4-A4' is any value of 5 microns, 8 microns, 12 microns, 16 microns, and 20 microns. In the direction perpendicular to the direction of A4-A4', the size of the piezoelectric unit 210 is not limited and is determined according to actual needs. The number of piezoelectric units 210 is also not limited to suit different application scenarios.

[0077] In some embodiments of the present disclosure, Figure 7b As shown, in the direction along A4-A4', the width of the first electrode 221 is greater than or equal to 5 microns and less than or equal to 10 microns, for example, the width of the first electrode 221 is any value of 5 microns, 6 microns, 7 microns, 8 microns, and 10 microns. The width of the second electrode 222 is greater than or equal to 5 microns and less than or equal to 10 microns, for example, the width of the second electrode 222 is any value of 5 microns, 6 microns, 7 microns, 8 microns, and 10 microns.

[0078] In some embodiments of the present disclosure, Figure 7b As shown, in the direction along A4-A4', the ratio of the width of the first lead 231 to the width of the first electrode 221 is greater than or equal to 1.5 and less than or equal to 2, for example, the ratio of the width of the first lead 231 to the width of the first electrode 221 is any value of 1.5, 1.6, 1.7, 1.8, and 2; and / or, the ratio of the width of the second lead 232 to the width of the second electrode 222 is greater than or equal to 1.5 and less than or equal to 2, for example, the ratio of the width of the second lead 232 to the width of the second electrode 222 is any value of 1.5, 1.6, 1.7, 1.8, and 2. By setting the width of the first lead 231 to 1.5 to 2 times the width of the first electrode 221 and the width of the second lead 232 to 1.5 to 2 times the width of the second electrode 222, it is ensured that the first lead 231 can contact the first electrode 221 and the second lead 232 can contact the second electrode 222.

[0079] In some embodiments of the present disclosure, the first electrode 221 of the first piezoelectric unit 2101 and the second electrode 222 of the second piezoelectric unit 2102 are electrically connected to the same first lead 231 .

[0080] It can be understood that in this embodiment, by connecting multiple first leads 231 to each other and multiple second leads 232 to each other, only one pair of voltage signals can be provided to respectively control the first electrodes 221 and the second electrodes 222 of multiple piezoelectric units 210, and the voltage routing method is simpler.

[0081] Figure 8a is a top view of the lead layer 23 according to some embodiments of the present disclosure. Figure 8b and Figure 8c is a schematic diagram of the structure of a tactile sensing substrate according to some embodiments of the present disclosure. Figure 8b is a top view of the tactile sensing substrate. Figure 8c For along Figure 8b Cross-sectional view along the A5-A5' direction.

[0082] In some embodiments of the present disclosure, the second electrode 222 of the first piezoelectric unit 2101 is reused as the first electrode 221 of the second piezoelectric unit 2102, and the second electrode 222 of the second piezoelectric unit 2102 is reused as the first electrode 221 of the third piezoelectric unit 2103, which can reduce the distance between adjacent piezoelectric units 210, increase the overall deformation, and improve the vibration effect.

[0083] Figure 9a is a top view of the lead layer 23 according to some embodiments of the present disclosure. Figure 9b and Fig.9c is a schematic diagram of the structure of a tactile sensing substrate according to some embodiments of the present disclosure. Figure 9b is a top view of the tactile sensing substrate. Fig.9c For along Figure 9b Sectional view along the A6-A6' direction.

[0084] In some embodiments of the present disclosure, the piezoelectric unit 210 is in a ring shape in a cross section parallel to the substrate surface. The first electrode 221 contacts the inner side of the piezoelectric unit 210 , and the second electrode 222 contacts the outer side of the piezoelectric unit 210 .

[0085] It is understandable that if Figure 9b As shown, in this embodiment, the first electrode 221 is arranged inside the ring, and the second electrode 222 is arranged outside the ring. The shape of the first electrode 221 is, for example, circular, and the shape of the second electrode 222 is, for example, arc-shaped. The ratio of the arc length of the second electrode 222 to the outer circumference of the piezoelectric unit 210 can be greater than or equal to 0.4 and less than or equal to 0.8, for example, the ratio of the arc length of the second electrode 222 to the outer circumference of the piezoelectric unit 210 is any value of 0.4, 0.5, 0.6, 0.7, and 0.8.

[0086] In some embodiments of the present disclosure, one end of the first lead 231 is located between the first electrode 221 and the substrate 20 and is electrically connected to the first electrode 221 (eg, Fig.9c The other end of the first lead 231 is located outside the piezoelectric unit 210 (as shown in Figure 9b shown).

[0087] It is understandable that, since the first electrode 221 is disposed in the ring, the first lead 231 is required to lead the first electrode 221 out from below. In this embodiment, the first electrode 221 can be led out by positioning one end of the first lead 231 between the first electrode 221 and the substrate 20 and electrically connected to the first electrode 221, and positioning the other end of the first lead 231 outside the piezoelectric unit 210. The second electrode 222 is led out through the second lead 232.

[0088] It should be noted that, in the present embodiment, during the preparation of the tactile sensing substrate, it is necessary to prepare the lead layer 23 first, and then prepare the piezoelectric layer 21 and the electrode layer 22, so as to lead out the first electrode 221 through the first lead 231. The piezoelectric layer 21 may be prepared first and then the electrode layer 22, or the electrode layer 22 may be prepared first and then the piezoelectric layer 21.

[0089] It should be noted that, in this embodiment, when the first lead 231 and the second lead 232 are energized respectively, the direction of the electric field can be directed from the first electrode 221 to the second electrode 222, or from the second electrode 222 to the first electrode 221, and the piezoelectric unit 210 expands and contracts laterally from the first electrode 221 to the second electrode 222 to generate vibration.

[0090] In some embodiments of the present disclosure, the outer diameter of the piezoelectric unit 210 is greater than or equal to 15 microns and less than or equal to 40 microns, for example, the outer diameter of the piezoelectric unit 210 is any value of 15 microns, 20 microns, 30 microns, 35 microns, and 40 microns. The inner diameter of the piezoelectric unit 210 is substantially equal to the diameter of the first electrode 221 within a certain range of process error. In some embodiments of the present disclosure, the ratio of the diameter of the first electrode 221 to the outer diameter of the piezoelectric unit 210 is greater than or equal to 1 / 3 and less than or equal to 2 / 3.

[0091] In some embodiments of the present disclosure, Fig.9c As shown, in the direction perpendicular to the substrate surface, the ratio of the sum of the thickness h1 of the electrode layer 22 and the thickness h2 of the lead layer 23 to the thickness h3 of the piezoelectric layer 21 is between 0.8 and 1.2, for example, any value among 0.8, 0.9, 1, 1.1, and 1.2. That is, within a certain range, the sum of the thickness h1 of the electrode layer 22 and the thickness h2 of the lead layer 23 is substantially equal to the thickness h3 of the piezoelectric layer 21, so as to improve the flatness of the area corresponding to the piezoelectric unit 210.

[0092] The present disclosure also provides a tactile feedback device, including the tactile sensing substrate as described above. For the specific structure of the tactile sensing substrate, please refer to Figures 2a to 9c In some embodiments of the present disclosure, the tactile feedback device further comprises a cover plate, and the piezoelectric layer and the electrode layer may be located on a side of the cover plate away from the light emitting side.

[0093] Although some embodiments according to the general inventive concept of the present disclosure have been illustrated and described, it will be appreciated by those skilled in the art that changes may be made to these embodiments without departing from the principles and spirit of the general inventive concept of the present disclosure, the scope of which is defined by the claims and their equivalents.

Claims

1. A tactile sensing substrate, characterized in that: The tactile sensing substrate comprises: substrate; a piezoelectric layer, located on one side of the substrate, the piezoelectric layer comprising at least one piezoelectric unit; and an electrode layer, comprising a first electrode and a second electrode; The substrate includes a substrate surface facing the piezoelectric layer, and in a direction parallel to the substrate surface, the first electrode and the second electrode are respectively located on two sides of the piezoelectric unit.

2. The tactile sensing substrate according to claim 1, characterized in that: The touch sensing substrate further includes a lead layer, the lead layer including a first lead and a second lead; and The first lead is connected to a first power supply voltage, the second lead is connected to a second power supply voltage, and the first power supply voltage is not equal to the second power supply voltage.

3. The tactile sensing substrate according to claim 2, characterized in that: The piezoelectric layer includes a plurality of piezoelectric units; and The first electrodes of the plurality of piezoelectric units are all electrically connected to the same first lead, and the second electrodes of the plurality of piezoelectric units are all electrically connected to the same second lead.

4. The tactile sensing substrate according to claim 2, characterized in that: The piezoelectric layer includes a plurality of piezoelectric units, and the plurality of piezoelectric units are divided into at least two groups; and The first electrodes of all the piezoelectric units in the same group are electrically connected to the same first lead, and the second electrodes of all the piezoelectric units in the same group are electrically connected to the same second lead.

5. The tactile sensing substrate according to claim 2, characterized in that: The piezoelectric layer includes a plurality of piezoelectric units, the plurality of piezoelectric units are arranged in an array, and the plurality of piezoelectric units are divided into at least one group; and In the same group, the first electrodes of all the piezoelectric units in the same column are electrically connected to the same first lead, and the second electrodes of all the piezoelectric units in the same column are electrically connected to the same second lead.

6. The tactile sensing substrate according to claim 2, characterized in that: The piezoelectric layer includes a plurality of piezoelectric units, and the plurality of piezoelectric units are arranged at intervals along a first direction; The plurality of piezoelectric units include a first piezoelectric unit and a second piezoelectric unit adjacent to each other, wherein the first electrode of the first piezoelectric unit is located at a side of the first piezoelectric unit away from the second piezoelectric unit, and the first electrode of the second piezoelectric unit is located at a side of the second piezoelectric unit close to the first piezoelectric unit; as well as The first electrode of the first piezoelectric unit is electrically connected to the first lead, the second electrode of the second piezoelectric unit is electrically connected to the first lead, and the second electrode of the first piezoelectric unit and the first electrode of the second piezoelectric unit are electrically connected to the same second lead.

7. The tactile sensing substrate according to claim 6, characterized in that: The second electrode of the first piezoelectric unit is reused as the first electrode of the second piezoelectric unit.

8. The tactile sensing substrate according to claim 6 or 7, characterized in that: The first electrode of the first piezoelectric unit and the second electrode of the second piezoelectric unit are electrically connected to the same first lead.

9. The tactile sensing substrate according to any one of claims 1 to 8, characterized in that: In a cross section parallel to the surface of the substrate, the shape of the piezoelectric unit is polygonal or circular; and The first electrode and the second electrode are both in contact with an outer side of the piezoelectric unit.

10. The tactile sensing substrate according to any one of claims 2 to 8, characterized in that: In a cross section parallel to the surface of the substrate, the piezoelectric unit has a ring shape; and The first electrode contacts an inner side of the piezoelectric unit, and the second electrode contacts an outer side of the piezoelectric unit.

11. The tactile sensing substrate according to claim 10, characterized in that: One end of the first lead is located between the first electrode and the substrate and is electrically connected to the first electrode, and the other end of the first lead is located outside the piezoelectric unit.

12. The tactile sensing substrate according to claim 11, characterized in that: In a direction perpendicular to the substrate surface, a ratio of the sum of the thickness of the electrode layer and the thickness of the lead layer to the thickness of the piezoelectric layer is between 0.8 and 1.

2.

13. The tactile sensing substrate according to claim 2, characterized in that: In a direction parallel to the surface of the substrate, a ratio of a width of the first lead to a width of the first electrode is greater than or equal to 1.5 and less than or equal to 2; and / or, A ratio of a width of the second lead to a width of the second electrode is greater than or equal to 1.5 and less than or equal to 2.

14. The tactile sensing substrate according to claim 1, characterized in that: In a direction parallel to the substrate surface, a distance between the first electrode and the second electrode respectively located on two sides of the same piezoelectric unit is greater than 5 micrometers.

15. A tactile feedback device, characterized in that: The tactile feedback device comprises a tactile sensing substrate according to any one of claims 1-14.

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