Nozzle and nozzle unit

Abstract

The nozzle has a base mainly composed of a ceramic, and a through-hole. The base portion has a first portion, a second portion, and a third portion. The first portion has a cylindrical first outer wall surface. The second portion has a conical second outer wall surface that is connected to the first outer wall surface and has a first outer diameter that decreases as the second outer wall surface departs from the first end surface. The third portion has a cylindrical third outer wall surface connected to the second outer wall surface. The through hole has a first hole portion, a second hole portion, and a third hole portion. The first hole portion has a first aperture and is located in the first portion. The second hole portion has a second aperture and is disposed from the first portion to the second portion. The third hole portion has a third aperture and is disposed from the second portion to the third portion. The second aperture becomes smaller as it leaves the first portion. The third aperture is constant.

Description

Technical Field

[0001] The present disclosure relates to a nozzle and a nozzle unit. Background Art

[0002] In recent years, a large number of electronic components have been installed in electronic devices. In addition, the size of electronic components has also been miniaturized and finer, and the amount of adhesive that should be applied to the mounting substrate is also very small. In addition, it is necessary to accurately apply the adhesive in a small area.

[0003] As a nozzle for applying an adhesive used when bonding the electronic component as described above to a mounting substrate or the like, the invention described in Patent Document 1 is known (see Patent Document 1). In the invention described in Patent Document 1, a nozzle (for example, see Patent Document 1) is described which is composed of a cylindrical cylindrical portion (12 of Patent Document 1) and a conical tapered portion (13 of Patent Document 1) and is made of a ceramic material. Figure 2 wait).

[0004] Prior art literature

[0005] Patent Literature

[0006] Patent Document 1: Japanese Patent Application Publication No. 2019-58886 Summary of the invention

[0007] In one embodiment of the present disclosure, (1) the nozzle has a base with ceramic as a main component and a through hole. The base has a first end face and a second end face located on the side opposite to the first end face. The through hole passes from the first end face to the second end face and has a central axis extending in the first direction. In addition, the base also has a first part, a second part and a third part. The first part has: a first end face; and a cylindrical first outer wall surface, the first outer wall surface is connected to the first end face and at least a part is pressed into a fixing member. The second part has a conical second outer wall surface, the second outer wall surface is connected to the first outer wall surface and has a first outer diameter that decreases as it moves away from the first end face in the first direction. The third part has: a second end face; and a cylindrical third outer wall surface, the third outer wall surface is connected to the second outer wall surface and the second end face and has a second outer diameter less than the first outer diameter. The through hole also has a first hole portion, a second hole portion and a third hole portion. The first hole portion has a first hole diameter and is located in the first portion. The second hole portion has a second hole diameter and is configured from the first portion to the second portion. The third hole portion has a third aperture and is arranged from the second portion to the third portion. The second aperture decreases as it moves away from the first portion in the first direction. The third aperture is constant in the first direction.

[0008] (2) In the nozzle of (1) above, the first hole diameter is constant in the first direction.

[0009] (3) In the nozzle of (1) or (2) above, the first hole portion has a first inner wall surface connected to the first end surface. The second hole portion has a second inner wall surface connected to the first inner wall surface. The third hole portion has a third inner wall surface connected to the second inner wall surface. The second inner wall surface has a first end connected to the first inner wall surface and a second end connected to the third inner wall surface. When viewed in a cross-section passing through the center axis and parallel to the first direction, when a straight line connecting the first end and the second end is set as a first imaginary line, an inclination θ1 of the first imaginary line relative to the center axis is less than an inclination θ2 of the second outer wall surface relative to the center axis.

[0010] (4) In the nozzle of (3) above, the surface roughness Ra1 of the second inner wall surface is greater than the surface roughness Ra2 of the third inner wall surface.

[0011] (5) In the nozzles of (1) to (4) above, the base contains zirconium oxide as a main component.

[0012] (6) In the nozzles of (3) to (5) above, the second inner wall surface has an arc shape when viewed in a cross section passing through the central axis and parallel to the first direction.

[0013] (7) In the nozzles of (3) to (6) above, in a cross-sectional view passing through the central axis and parallel to the first direction, an inclination θ3 of the second inner wall surface with respect to the central axis is 10 to 20 degrees.

[0014] (8) In the nozzles of (3) to (7) above, in a cross-sectional view passing through the central axis and parallel to the first direction, the second outer wall surface and the third outer wall surface are connected via a first connecting portion having an arc shape.

[0015] (9) In the nozzles of (1) to (8) above, when the dimension of the third portion in the first direction is L1, the third aperture is D3, and the second outer diameter is D13, L1 ≤ 378 × [D13 3 -(D3 4 / D13)].

[0016] (10) In the nozzles of (1) to (9) above, the base portion further includes a fourth portion connected to the second end surface. The fourth portion includes a cylindrical fourth outer wall surface having a third outer diameter smaller than the second outer diameter. The third hole portion further extends from the third portion to the fourth portion.

[0017] (11) In the nozzle of (10) above, in a cross-sectional view passing through the central axis and parallel to the first direction, the third outer wall surface and the fourth outer wall surface are connected via a second connecting portion having an arc shape.

[0018] (12) In the nozzle of (10) or (11) above, a dimension of the fourth portion in the first direction is less than or equal to a half of a dimension of the fourth portion and the third portion combined in the first direction.

[0019] (13) In the nozzles of (10) to (12) above, when the dimension of the fourth portion in the first direction is L2, the third aperture is D3, and the third outer diameter is D14, L2 ≤ 378 × [D14 3 -(D3 4 / D14)].

[0020] (14) In the nozzle of (13) above, when the dimension of the fourth portion and the third portion combined in the first direction is L12 and the second outer diameter is D13, L12 ≤ 378 × [D13 3 -(D3 4 / D13)].

[0021] (15) A nozzle unit according to one embodiment of the present disclosure includes the nozzle according to (1) to (14) above and a fixing member. The fixing member has a first opening. At least a portion of the first portion of the nozzle is pressed into the first opening. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a perspective view of a nozzle according to an embodiment of the present disclosure.

[0023] Figure 2 is a top view of a nozzle according to an embodiment of the present disclosure.

[0024] Figure 3 yes Figure 1 II sectional view of the nozzle shown.

[0025] Figure 4 yes Figure 3 An enlarged view of the main part A is shown.

[0026] Figure 5 yes Figure 4 An enlarged view of the main part B is shown.

[0027] Figure 6 It is an exploded cross-sectional view of a nozzle and a nozzle unit according to an embodiment of the present disclosure.

[0028] Figure 7 It is a perspective view of a nozzle according to another embodiment of the present disclosure.

[0029] Figure 8 yes Figure 7 A II-II cross-sectional view of the nozzle is shown.

[0030] Fig. 9 yes Figure 8 An enlarged view of the main portion C is shown. DETAILED DESCRIPTION

[0031] <Nozzle structure>

[0032] Hereinafter, several exemplary embodiments of the present disclosure are described with reference to the accompanying drawings. In addition, any direction of the nozzle can be set to the top or the bottom, but for convenience, an orthogonal coordinate system xyz is defined and the negative side of the z direction is set to the bottom. In addition, in the following, the first direction refers to the z direction mentioned in the accompanying drawings, for example. In addition, in the present disclosure, the concept of looking down includes the perspective of looking down.

[0033] Reference Figure 1 to Figure 5 The nozzle 3 according to the embodiment of the present disclosure will be described. The nozzle 3 includes a base 1 mainly made of ceramic and a through hole 2.

[0034] like Figure 1 and Figure 2 As shown, the base 1 has a first end face 1a and a second end face 1b located on the opposite side of the first end face 1a. As the material of the base 1, ceramic materials such as alumina sintered body, mullite sintered body, silicon carbide sintered body, aluminum nitride sintered body or silicon nitride sintered body, glass ceramic materials, etc. can be used. In addition, the size of the base 1 in the z direction is, for example, 5 mm to 50 mm. Ceramic materials and glass ceramic materials are easier to process than general metal materials, so the nozzle 3 can be easily manufactured.

[0035] In addition, the base 1 also includes a first portion 11, a second portion 12, and a third portion 13. The first portion 11 includes a first end surface 1a and a first outer wall surface 111. The first outer wall surface 11 is a cylindrical surface connected to the first end surface 1a and at least a portion of which is pressed into the fixing member 4. The size of the first portion 11 in the z direction is, for example, 0.5 mm to 10 mm.

[0036] The second portion 12 has a second outer wall surface 122. The second outer wall surface 122 is a conical surface connected to the first outer wall surface 111 and has a first outer diameter D12 that decreases as it moves away from the first end surface 1a in the z direction (first direction). The size of the second portion 12 in the z direction is, for example, 1 mm to 45 mm. The size of the first outer diameter D12 is, for example, 0.1 mm to 5 mm. Figure 2 and Figure 3 As shown, in one embodiment, the first outer diameter D12 decreases at a certain ratio as it moves away from the first end surface 1 a in the z direction (first direction).

[0037] The third portion 13 has a second end surface 1b and a third outer wall surface 133. The third outer wall surface 133 is a cylindrical surface connected to the second outer wall surface 122 and the second end surface 1b and has a second outer diameter D13 less than the first outer diameter D12. The size of the third portion 13 in the z direction is, for example, 0.1 mm to 3 mm. The size of the second outer diameter D13 is, for example, 0.01 mm to 2 mm.

[0038] The through hole 2 passes through from the first end face 1a to the second end face 1b, and has a central axis C1 extending in the z direction (first direction). The through hole 2 can be manufactured by injection molding a ceramic material or the like, or by punching a ceramic material formed into the shape of the nozzle 3. When the nozzle 3 is used to apply a fluid such as an adhesive, the fluid flows through the through hole 2 in the positive direction of the z axis. By pressurizing the fluid from the first end face 1a side, the fluid can pass through the first hole portion 21, the second hole portion 22, and the third hole portion 23 in sequence and be ejected from the second end face 1b side. Here, as a fluid, for example, epoxy adhesives, acrylic adhesives, conductive adhesives such as silver paste, paste solder, etc. can be cited. In addition, in the present disclosure, the concept of fluid includes paste-like fluids.

[0039] The through hole 2 further includes a first hole portion 21, a second hole portion 22, and a third hole portion 23. The first hole portion 21 has a first hole diameter D1 and is located in the first portion 11. The size of the first hole diameter D1 is, for example, 0.5 mm to 4 mm.

[0040] The second hole portion 22 has a second hole diameter D2 and is arranged from the first portion 11 to the second portion 12. The second hole diameter D2 decreases in the z direction as it moves away from the first portion 11. The size of the second hole diameter D2 is, for example, 0.5 mm to 4 mm.

[0041] The third hole portion 23 has a third aperture D3 and is configured from the second portion 12 to the third portion 13. The third aperture D3 is constant in the z direction. In this way, compared with the case where the third hole portion 23 is a tapered shape (the third aperture changes), the straightness of the fluid passing through the third hole portion 23 can be improved. The size of the third aperture D3 is, for example, 0.005mm to 3mm. In other words, the length of the third hole portion in the z direction is longer than the length of the third portion 13 in the z direction. Here, constant may also include manufacturing errors.

[0042] The longer the third hole portion 23 is, the more the flow resistance to the fluid in the third hole portion 23 can be increased. If the flow resistance to the fluid increases, pressure is required for the fluid to be ejected. Therefore, by adjusting the length of the third hole portion 23, the flow resistance can be adjusted to reduce the possibility of the fluid accidentally dripping from the second end surface 1b of the nozzle 3. In addition, by adjusting the pressure on the fluid, the nozzle 3 can be used to apply a fluid such as an adhesive to a desired position with high precision. Here, when the viscosity of the fluid is, for example, 100,000 cP to 500,000 cP, the above effect can be further effectively exerted.

[0043] By disposing the third hole portion 23 of the nozzle 3 from the second portion 12 to the third portion 13, the second outer diameter D13 of the third portion 13 can be reduced, and the nozzle 3 having a long length in the z direction of the third portion 13 can be easily manufactured. For example, when manufacturing by the manufacturing method described later, the length in the z direction of the third portion 13 can be easily adjusted by cutting / grinding the second outer wall surface 122.

[0044] In addition, since the third portion 13 of the nozzle 3 is long in the z direction, when the nozzle 3 is used to apply adhesive to electronic components and mounting substrates, the fluid such as adhesive flowing in the positive direction of the z axis of the through hole 2 can be applied to the desired position with high precision.

[0045] like Figure 3 As shown, the first aperture D1 can be constant in the z direction. With such a structure, by cutting / grinding the first end surface 1a, the protruding length of the nozzle 3 pressed into the fixing member 4 described later in the z direction can be adjusted (refer to Figure 6 ), so that the first hole diameter D1 can be adjusted to match the second opening diameter D42 of the second opening 42. Therefore, it is easy to manufacture various nozzles 3 according to user needs.

[0046] In addition, Figure 3 Different from the embodiment shown in the figure, the first hole portion 21 and the second hole portion 22 may be continuous and flush. Furthermore, in this case, when the second inner wall surface 222 described later is a straight line having an inclination relative to the central axis C1, the inclination of the second inner wall surface 211 relative to the central axis C1 may be the same as that of the first inner wall surface 211 in a cross-section passing through the central axis C1 and parallel to the z direction (for example, the xz plane or the yz plane).

[0047] like Figure 3As shown, the first hole portion 21 has a first inner wall surface 211 connected to the first end surface 1a. The second hole portion 22 has a second inner wall surface 222 connected to the first inner wall surface 211. The third hole portion 23 has a third inner wall surface 233 connected to the second inner wall surface 222. The second inner wall surface 222 has a first end 222a connected to the first inner wall surface 211 and a second end 222b connected to the third inner wall surface 233. When viewed in a cross-section (e.g., xy plane) passing through the center axis C1 and parallel to the z direction, when the straight line connecting the first end 222a and the second end 222b is set as the first imaginary line T1, the inclination θ1 of the second outer wall surface 122 relative to the center axis C1 may be greater than the inclination θ2 of the first imaginary line T1 relative to the center axis C1. That is, the wall thickness of at least a portion of the second portion 12 of the nozzle 3 (the distance between the second inner wall surface 222 and the second outer wall surface 122) may not be constant. With such a configuration, when the nozzle 3 is pressed into a first opening 41 of a fixing member 4 described later by holding the second portion 12 (second outer wall surface 122 ), the possibility of damage to the nozzle 3 can be reduced.

[0048] In addition, the surface roughness Ra1 of the second inner wall surface 222 may also be greater than the surface roughness Ra2 of the third inner wall surface 233. When the surface roughness Ra1 of the second inner wall surface 222 is the same as the surface roughness Ra2 of the third inner wall surface 233, since the third aperture D3 is less than the second aperture D2, the flow resistance to the fluid in the third hole portion 23 is greater than that in the second hole portion 22. Therefore, by making the surface roughness Ra1 of the second inner wall surface 222 greater than the surface roughness Ra2 of the third inner wall surface 233, the flow resistance of the fluid in the third hole portion 23 can be made close to the flow resistance in the second hole portion 22. In this way, when pressure is applied to the fluid, the possibility of deviation in the timing of fluid ejection can be reduced. Therefore, the possibility of difference in the coating diameter of the fluid ejected from the second end face 1b can be reduced. By adopting such a structure, the possibility of the fluid flowing through the through hole 2 accidentally dripping from the second end face 1b of the nozzle 3 can be reduced.

[0049] The base 1 may also be composed mainly of zirconium oxide. Here, the "main component" in the present disclosure refers to at least the component with the highest content, for example, a component with a content of 90% or more. Zirconia has a higher strength than aluminum oxide, so Figure 5 As shown, the second outer diameter D13 can be reduced and the length of the third portion 13 in the z direction can be lengthened. In addition, the wall thickness (the distance between the third inner wall surface 233 and the third outer wall surface 133) in the third portion 13 of the nozzle 3 can be reduced. In addition, zirconium oxide has excellent wear resistance and chemical resistance compared to aluminum oxide, etc., so the possibility of wear and damage to the nozzle 3 can be reduced.

[0050] like Figure 3As shown, in a cross-section through the central axis C1 and parallel to the z direction, the second inner wall surface 222 may also be in an arc shape. In one embodiment, the second inner wall surface 222 is in an arc shape that is convex toward the central axis C1 side. By adopting such a structure, the flow path resistance of the fluid passing through the second hole portion 22 can be reduced. In this way, when pressure is applied to the fluid, the possibility of deviation in the timing of fluid ejection can be reduced. Therefore, the possibility of difference in the coating diameter of the fluid ejected from the second end face 1b can be reduced.

[0051] like Figure 3 As shown, in a cross-sectional view through the central axis C1 and parallel to the z direction, the inclination θ3 of the second inner wall surface 222 relative to the central axis C1 can also be 10 to 20 degrees. With such a structure, when the nozzle 3 is manufactured by the manufacturing method described later, the molded body of the injection-molded nozzle 3 can be easily removed from the molding die.

[0052] like Figure 4 As shown, in a cross-sectional view through the central axis C1 and parallel to the z direction, the second outer wall surface 122 and the third outer wall surface 133 may be connected via the arc-shaped first connection portion 123. With such a structure, the possibility of damage to the nozzle 3 caused by stress concentration on the first connection portion 123 can be reduced.

[0053] like Figure 4 and Figure 5 As shown, when the dimension of the third portion 13 in the z direction is set to L1 [mm], the second outer diameter is set to D13 [mm], and the third aperture is set to D3 [mm], the following mathematical formula (1) can also be satisfied. If it is this structure, the possibility of the third portion 13 being bent from the second portion 12 can be further reduced.

[0054] In this case, the thickness of the third portion 13 (ie, D13 - D3) may be 0.04 [mm] or more. With this structure, the possibility of the third portion 13 being damaged during processing or manufacturing of the nozzle 3 can be reduced.

[0055] L1≤378× [D13 3 -(D3 4 / D13)] · · · (1)

[0056] (Other embodiments)

[0057] Reference Figure 7 to Figure 9 The nozzle 3 of another embodiment of the present disclosure will be described. In addition, only the structures of the other embodiments that are different from the structures of the above-described embodiments will be described below, and the other structures are denoted by the same reference numerals as those of the above-described embodiments and description thereof will be omitted.

[0058] In one embodiment, the base 1 may further have a fourth portion 14 connected to the second end surface 1b. The fourth portion 14 may also have a cylindrical fourth outer wall surface 144, and the fourth outer wall surface 144 has a third outer diameter D14 that is smaller than the second outer diameter D13. The third hole portion 23 also extends from the third portion 13 to the fourth portion 14. That is, a fourth portion 14 with a small outer diameter may also be connected to the front end of the third portion 13. Through this structure, even if the diameter of the top end of the nozzle 3 (the third outer diameter D14) is reduced and the top end of the nozzle 3 is lengthened, the possibility of damage to the top end portion of the nozzle 3 (here, the portion where the third portion 13 and the fourth portion 14 are combined) can be reduced. Such a nozzle 3 enables the fluid to be applied to a narrower area.

[0059] In one embodiment, if Fig. 9 As shown, the third aperture D3 of the third hole portion 23 in the fourth portion 14 may be the same as or different from the third aperture D3 of the third hole portion 23 in the third portion.

[0060] like Fig. 9 As shown, in a cross-section through the center axis C1 and parallel to the z direction (for example, the xz plane or the yz plane), the third outer wall surface 133 and the fourth outer wall surface 144 may also be connected via a second connecting portion 134 having an arc shape. With this structure, it is possible to reduce the abrupt change in the size from the second outer diameter D13 to the third outer diameter D14, thereby improving the strength of the fourth portion 14. In addition, even in the case where an obstacle hits the fourth portion 14 from the outside, the possibility of the fourth portion 14 bending from the third portion 13 can be reduced. Furthermore, in the case where a fluid flows into the nozzle 3, the possibility of the third portion 13 and the fourth portion 14 being damaged due to the pressure of the fluid can be reduced. In the case of the above structure, the second connecting portion 134 may also be consistent with the second end face 1b.

[0061] More specifically, when the dimension of the fourth portion 14 in the z direction is set to L2 [mm], the third aperture D3 is set to D3 [mm], and the third outer diameter D14 is set to D14 [mm], the following mathematical formula (2) can also be satisfied. In addition, in this case, the wall thickness of the fourth portion 14 (i.e., D14-D3) can also be greater than 0.04 [mm].

[0062] L2≤378×[D14 3 -(D3 4 / D14)] · · · (2)

[0063] Furthermore, when the dimension of the fourth portion 14 and the third portion 13 in the z direction is L12 [mm] and the second outer diameter D13 is D13 [mm], the following mathematical formula (3) can also be satisfied. In addition, in this case, the wall thickness of the third portion 13 (i.e., D13-D3) can also be 0.04 [mm] or more.

[0064] L12≤378×[D13 3 -(D3 4 / D13)] · · · (3)

[0065] <Nozzle Manufacturing Method>

[0066] Here, an example of a method for manufacturing the nozzle 3 will be described. In this example, ceramics (zirconia-based ceramics) containing zirconium oxide as a main component will be described as a constituent material of the nozzle 3. In addition, the present disclosure is not limited to the following embodiments.

[0067] (1) First, a molding material constituting a molded body serving as a prototype of the nozzle 3 is prepared. Specifically, the molding material is prepared by thoroughly mixing and pulverizing a mixed powder of zirconium oxide powder and yttrium oxide powder using a ball mill or the like, and then adding a binder to the pulverized material and mixing the mixture. The mixed powder may be a powder obtained by mixing 1 to 15% by mass of yttrium oxide powder with 85 to 99% by mass of zirconium oxide powder, and more particularly, a powder obtained by mixing 2 to 10% by mass of yttrium oxide powder with 90 to 98% by mass of zirconium oxide powder. As the zirconium oxide powder, the purity of zirconium oxide can be set to 95% or more, and more particularly, 98% or more.

[0068] (2) Next, the prepared molding material is used to obtain a molded body having a through hole 2. Specifically, the molding material is filled into a mold cavity of a molding die having a mold cavity including a structure for molding the through hole 2, and injection molding is performed at a predetermined pressure to obtain a molded body. In addition, the method for obtaining the molded body is not limited to the above-mentioned injection molding, and a method such as stamping molding, casting molding, cold isostatic pressing molding or extrusion molding may also be used.

[0069] (3) Next, the obtained molded body is fired to obtain a sintered body. Specifically, the obtained molded body is placed in a degreasing furnace at 500 to 600°C for 2 to 10 hours for degreasing, and then the degreasing molded body is fired in an oxygen atmosphere at 1300 to 1500°C for 0.5 to 3 hours to obtain a sintered body.

[0070] (4) Next, the inner peripheral surface of the through hole 2 of the obtained sintered body is subjected to grinding or the like to form the third inner wall surface 233. Specifically, the third inner wall surface 233 is formed by pressing the grinding material onto the through hole 2 while the nozzle 3 is rotated with the central axis C1 as the rotation axis. In addition, similarly to the third inner wall surface 233, grinding or the like may be applied to the first inner wall surface 211 and the second inner wall surface 222. At this time, grinding oil is used so that grinding can be performed while reducing the increase in surface roughness.

[0071] (5) Next, the outer shape of the obtained sintered body is subjected to cutting, grinding, etc. to form the first outer wall surface 111, the second outer wall surface 122, and the third outer wall surface 133. As described above, the nozzle 3 can be manufactured.

[0072] <Structure of nozzle unit>

[0073] like Figure 6 As shown, the nozzle unit 5 includes a nozzle 3 and a fixing member 4. The fixing member 4 includes a first opening 41. At least a portion of the first portion 11 of the nozzle 3 is pressed into the first opening 41.

[0074] As a material of the fixing member 4, for example, a metal material can be cited. In addition, the first opening portion 41 may also have a first opening portion diameter D41. In addition, the fixing member 4 may also have a second opening portion 42 connected to the first opening portion 41. The second opening portion 42 has a second opening portion diameter D42. In this case, the second opening portion diameter D42 may also be less than the first opening portion diameter D41. With such a structure, the second opening portion 42 becomes a guide, and the nozzle 3 pressed into the first opening portion 41 is fixed at a desired position. In addition, the second opening portion diameter D42 may also be the same as the first aperture D1 of the nozzle 3.

[0075] When applying a fluid such as a conductive adhesive to an object to be applied using the nozzle unit 5, the fluid is pressurized inside a pressurizing device (not shown) to which the fixing member 4 is attached, and the fluid is squeezed out into the through hole 2 of the nozzle 3 through the second opening 42 by the pressure. The fluid is ejected from the second end surface 1b of the nozzle 3 through the through hole 2 and applied to the object to be applied.

[0076] With such a structure, it is possible to easily manufacture a nozzle in which the portion that ejects the fluid is in an elongated shape.

[0077] Furthermore, with such a configuration, it is possible to provide a nozzle capable of applying a fluid even in a narrow area such as between electronic components.

[0078] In addition, various combinations of characteristic parts in one embodiment are not limited to the examples in the above-mentioned embodiment, and combinations of the respective embodiments are also possible.

[0079] Industrial Applicability

[0080] The present disclosure can be used as a nozzle and a nozzle unit.

[0081] Description of Reference Numerals

[0082] 1 base

[0083] 1a First end face

[0084] 1b Second end face

[0085] 11 Part 1

[0086] 111 first outer wall

[0087] 12 Part 2

[0088] 122 Second outer wall

[0089] 123 first connection part

[0090] 13 Part 3

[0091] 133 Third outer wall

[0092] 134 Second connection part

[0093] 14 Part 4

[0094] 144 Fourth outer wall

[0095] 2 Through Holes

[0096] 21 First hole

[0097] 211 first inner wall surface

[0098] 22 Second hole

[0099] 222 second inner wall surface

[0100] 222a First end

[0101] 222b Second end

[0102] 23Third hole

[0103] 233 Third inner wall

[0104] C1 Center Axis

[0105] T1 first imaginary line

[0106] D1 first aperture

[0107] D2 Second Aperture

[0108] D3 third aperture

[0109] D12 first outer diameter

[0110] D13 second outer diameter

[0111] D14 third outer diameter

[0112] D41 Diameter of the first opening

[0113] D42 Second opening diameter

[0114] L1 The dimension of the third part in the first direction

[0115] L2 The dimension of the fourth portion in the first direction

[0116] L12 The dimension of the fourth and third parts combined in the first direction

[0117] θ1 The slope of the first imaginary line

[0118] θ2 The inclination of the second outer wall

[0119] θ3 The inclination of the second inner wall

[0120] 3 Nozzles

[0121] 4Fixed components

[0122] 41 first opening

[0123] 42 second opening

[0124] 5 nozzle units

Claims

1. A nozzle, wherein: have: a base having a first end surface and a second end surface located on a side opposite to the first end surface, and having ceramic as a main component; and a through hole extending from the first end surface to the second end surface and having a central axis extending along a first direction; The base also has: The first part has: the first end surface; and a cylindrical first outer wall surface, the first outer wall surface is connected to the first end surface and at least a portion of the first outer wall surface is pressed into a fixing member; A second portion having a conical second outer wall surface, the second outer wall surface is connected to the first outer wall surface and has a first outer diameter that decreases as it moves away from the first end surface in the first direction; as well as A third portion having: the second end surface; and a cylindrical third outer wall surface, the third outer wall surface being connected to the second outer wall surface and the second end surface and having a second outer diameter less than the first outer diameter; The through hole has: A first hole portion having a first hole diameter and located at the first portion; a second hole portion having a second hole diameter and arranged from the first portion to the second portion; as well as a third hole portion having a third hole diameter and arranged from the second portion to the third portion; The second aperture becomes smaller as it moves away from the first portion in the first direction, The third aperture is constant in the first direction.

2. The nozzle according to claim 1, wherein The first aperture is constant in the first direction.

3. The nozzle according to claim 1 or 2, wherein: The first hole portion has a first inner wall surface connected to the first end surface, The second hole portion has a second inner wall surface connected to the first inner wall surface, The third hole portion has a third inner wall surface connected to the second inner wall surface, The second inner wall surface has a first end connected to the first inner wall surface and a second end connected to the third inner wall surface. In a cross-sectional view passing through the central axis and parallel to the first direction, When a straight line connecting the first end portion and the second end portion is defined as a first imaginary line, An inclination θ1 of the first imaginary line with respect to the central axis is less than or equal to an inclination θ2 of the second outer wall surface with respect to the central axis.

4. The nozzle according to claim 3, wherein: The surface roughness Ra1 of the second inner wall surface is greater than the surface roughness Ra2 of the third inner wall surface.

5. The nozzle according to any one of claims 1 to 4, wherein The base has zirconium oxide as a main component.

6. The nozzle according to claim 3 or 4, wherein: In a cross-sectional view passing through the central axis and parallel to the first direction, the second inner wall surface has an arc shape.

7. The nozzle according to any one of claims 3, 4 and 6, wherein: In a cross-sectional view passing through the central axis and parallel to the first direction, an inclination θ3 of the second inner wall surface with respect to the central axis is 10 to 20 degrees.

8. The nozzle according to any one of claims 1 to 7, wherein In a cross-sectional view passing through the central axis and parallel to the first direction, the second outer wall surface and the third outer wall surface are connected via a first connecting portion having an arc shape.

9. The nozzle according to any one of claims 1 to 8, wherein When the dimension of the third portion in the first direction is L1, the third aperture is D3, and the second outer diameter is D13, L1≤378×[D14 3 -D3 4 / D14)].

10. The nozzle according to any one of claims 1 to 9, wherein The base also has a fourth portion connected to the second end surface, The fourth portion has a cylindrical fourth outer wall surface, and the fourth outer wall surface has a third outer diameter smaller than the second outer diameter. The third hole portion also extends from the third portion to the fourth portion.

11. The nozzle according to claim 10, wherein In a cross-sectional view passing through the central axis and parallel to the first direction, the third outer wall surface and the fourth outer wall surface are connected via a second connecting portion having an arc shape.

12. The nozzle according to claim 10 or 11, wherein: The dimension of the fourth portion in the first direction is less than or equal to half of the dimension of the fourth portion and the third portion combined in the first direction.

13. The nozzle according to any one of claims 10 to 12, wherein: When the dimension of the fourth portion in the first direction is L2, the third aperture is D3, and the third outer diameter is D14, L2≤378×[D14 3 -(D3 4 / D14)].

14. The nozzle according to any one of claims 10 to 13, wherein When the combined dimension of the fourth portion and the third portion in the first direction is L12 and the second outer diameter is D13, L12≤378×[D13 3 -(D3 4 / D13)].

15. A nozzle unit, wherein: have: The nozzle according to claims 1 to 14; and The fixing member has a first opening portion which is pressed into the first portion.

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