A warped marking device

Abstract

This invention discloses a warpage marking device, relating to the field of glass substrate warpage detection technology. It includes a detection equipment body with a detection stage fixedly connected to its center. A driving pneumatic cylinder is mounted above the detection stage, and a detector is mounted on the output shaft of the driving pneumatic cylinder. The detector is located at an off-center position above the substrate body, allowing detection to be expanded beyond the central area of ​​the substrate to fully cover the surface. This provides more accurate surface data feedback and analysis, facilitating a more precise assessment of the substrate's surface integrity. Furthermore, this process dynamically adjusts the detection area, reducing the detector's illumination range while increasing the number of different detection locations. This ensures that all parts of the substrate receive uniform and sufficient detection feedback, avoiding the problem of excessive light focusing on the central area and insufficient detection of edge areas in traditional methods. This ensures uniform distribution and comprehensive coverage of the detection light.

Description

Technical Field

[0001] This invention relates to the field of glass substrate warpage detection technology, specifically to a warpage marking device. Background Technology

[0002] This device is mainly used for the inspection of circular glass substrate materials used in high-end technology fields such as semiconductor devices and flat panel display devices. It is specifically designed to randomly select several circular glass substrates from a busy production line for detailed inspection, evaluation and calculation, thereby ensuring comprehensive monitoring and continuous optimization of product quality. At the same time, this device adopts non-contact measurement technology with a laser emitter to minimize potential damage to the surface of the glass substrate and ensure the accuracy of the measurement results.

[0003] However, compared with existing equipment technology, the following shortcomings still exist in practical use:

[0004] 1. Existing technologies generally use a laser emitter to project a laser beam onto the surface of the object being tested. After the laser beam illuminates the surface, it is received by the receiver lens to identify whether there are warping defects. However, when the size of the glass substrate being tested is larger than or far exceeds the field of view of the instrument lens, due to the mismatch between the substrate size and the coverage of the detection lens, the beam of the detection instrument will be concentrated in the central area of ​​the glass substrate, while the edge areas will be relatively shallow and difficult to obtain sufficient direct illumination for detection. This phenomenon will lead to non-uniform distribution of light detection on the substrate surface. The core area will have redundant detection due to excessive focusing of the detection light, while the edge areas will miss potential warping defects due to insufficient detection light distribution. This regional mismatch of light intensity not only reduces the comprehensiveness and accuracy of the detection, but also poses a potential threat to the quality and stability of subsequent products.

[0005] 2. Furthermore, when the current glass substrate warpage detection device performs the detection task, the glass substrate to be tested is usually in an unshielded and exposed state. In this environment, when the detection instrument is turned on and projects light onto the surface of the glass substrate to perform the detection, the lighting conditions of the surrounding environment, such as natural light, artificial light, and other light that directly or indirectly irradiates the surface of the glass substrate, will all be reflected. These reflected lights and the detection light emitted by the detection instrument will intertwine to form a complex light field environment, which will significantly interfere with the light receiving system of the detection instrument. In addition, when the glass substrate is in an unshielded and exposed state, dust, moisture, volatile substances, and other environmental factors present in the air will also adhere to the surface of the glass substrate in small quantities, thereby affecting the accuracy and reliability of the detection results.

[0006] 3. In addition, existing glass substrate warpage detection devices rely on advanced instruments to automatically record when warpage is detected. This mechanism provides workers with clear information about the presence of warpage after the detection process is completed. However, although this method can confirm the existence of warpage, it lacks a direct and precise means to indicate the specific area or location of warpage on the glass substrate surface. Even if warpage exists, its severity can vary greatly, from slight to severe. For slight warpage, this self-recording method cannot accurately locate the warpage area, making it difficult for workers to quickly and effectively identify and handle the warpage area in subsequent processing and repair. Therefore, this detection method, which lacks precise location indication, not only limits the practicality of the detection results but also reduces the detection efficiency of the device.

[0007] Therefore, in view of this, the present invention proposes a warping marking device to compensate for and improve the deficiencies of the prior art. Summary of the Invention

[0008] To address the aforementioned technical problems, the present invention provides a warping marking device to solve the technical problems mentioned in the background section.

[0009] To achieve the above objectives, the technical solution adopted by the present invention is as follows: a warpage marking device for detecting warpage of the entire substrate body, including a detection equipment body, a detection platform fixedly connected to the middle position of the detection equipment body, a driving pneumatic cylinder installed above the detection platform, a detector installed at the output shaft end of the driving pneumatic cylinder, and the detector located at an eccentric position above the substrate body;

[0010] Also includes:

[0011] The equalization control adjustment mechanism is used to precisely control the rotation angle of the entire substrate body;

[0012] The light-shielding testing mechanism is used to improve the overall testing accuracy of the testing instrument and to perform multi-dimensional warp testing simultaneously.

[0013] Furthermore, the equalization control adjustment mechanism includes a flat plate crank assembly fixedly connected to the outer wall of the detector. A connecting shaft is fixedly connected to the end of the flat plate crank assembly away from the detector. A lead screw is fixedly connected to the upper surface of the connecting shaft. An adjusting cylinder is installed on the outer wall of the connecting shaft. An inclined groove is opened on the inner side wall of the adjusting cylinder. A limit buckle is rotatably connected to the lower surface of the adjusting cylinder. The limit buckle is fixedly connected to the inner side wall of the main body of the detection equipment.

[0014] Furthermore, a storage cylinder is installed on the outer wall of the regulating cylinder, a magnetic plate pressure shaft is slidably connected to the inner wall of the storage cylinder, a spring is sleeved on the outer wall of the magnetic plate pressure shaft, and a trigger magnet is fixedly connected to the outer wall of the flat crank assembly.

[0015] Furthermore, the inclined groove is in the shape of a continuous N-shape, and elastic balls are installed at the corners of the inner wall of the inclined groove. A convex shaft is fixedly connected to the outer wall of the connecting shaft at the vertical part in the inclined groove. The connecting shaft and the adjusting cylinder are slidably connected through the convex shaft and the inclined groove.

[0016] Furthermore, the inside of the storage cylinder contains a coating material, and the outlet of the storage cylinder is located on the same vertical plane as the detector.

[0017] Furthermore, the two ends of the spring are fixedly connected to the storage cylinder and the magnetic plate pressure shaft, respectively. The magnetic plate pressure shaft is shaped like a cup lid, and the outer wall of the cup lid is made of a magnetic blocking sheet material. The magnetic plate pressure shaft corresponds to the positive magnetic sheet in the trigger magnetic sheet.

[0018] Furthermore, the light-shielding detection mechanism includes a linkage plate installed on the outer wall of the lead screw. A shaft-mounted fixing plate is installed on the surface of the linkage plate. A cross-shaped limiting frame is slidably connected to the outer wall of the shaft-mounted fixing plate. The cross-shaped limiting frame is fixedly connected to the lower surface of the detection table. A combination chamber is fixedly connected to the upper surface of the shaft-mounted fixing plate. A reflector is fixedly connected to the inner wall of each combination chamber. Light-absorbing plates are symmetrically and evenly installed on both sides of the reflector. Buffer balls are slidably connected to the bottom wall of the inner wall of the combination chamber. Marking blocks are slidably connected to the outer wall of the combination chamber at positions corresponding to the buffer balls.

[0019] Furthermore, the lead screw and the linkage plate form a ball screw structure, and the linkage plate is located at the bottom of the outer wall of the lead screw.

[0020] Furthermore, the surface of the linkage disk is uniformly provided with curved grooves, and the linkage disk and the shaft fixing plate are rotatably connected through the curved grooves.

[0021] Furthermore, the entire light-absorbing plate is covered with black absorbent paper, and the buffer ball and the substrate body are on the same horizontal plane.

[0022] Compared with the prior art, the beneficial effects of the present invention are:

[0023] (1) To solve the problem of uneven light distribution on the substrate surface caused by the mismatch between the size of the detector and the substrate, the main body of the detection equipment, after completing a single detection, performs a regular upward movement of the detector, while driving the flat crank group to trigger the adjustment cylinder to precisely control the substrate to rotate at an appropriate angle. The rotation of the controlled angle will not cause the detector to repeatedly cover the area that has already been detected. This improvement makes the detection no longer limited to the central area of ​​the board, but can fully cover the surface of the substrate, providing more comprehensive and accurate surface data feedback analysis, which helps to more accurately assess the surface integrity of the substrate. At the same time, this process, through the dynamic adjustment of the detection area, reduces the irradiation range of the detector while increasing the different positions detected by the detector, thereby ensuring that all parts of the substrate can receive uniform and sufficient detection feedback. Furthermore, through the rotation of the substrate, although the irradiation range of the detector remains unchanged physically, the actual detection area on the substrate is effectively reduced and diversified. This design avoids the problem of excessive light focusing on the central area and insufficient detection of the edge area in the traditional method, ensuring uniform distribution and full coverage of the detection light.

[0024] Compared to existing technologies that use concentrated beams projected onto the central area of ​​the substrate, this device's detection method dynamically adjusts the substrate position without adding an additional drive source or components, allowing the detector's beams to evenly cover every corner of the substrate. This improves the comprehensiveness of the detection, reduces the risk of missing defects, and also improves the existing detection method's problem of detection redundancy caused by excessive beam focusing on the central area, while the edge areas are difficult to accurately identify defects due to insufficient light.

[0025] The N-shaped inclined groove design allows the adjusting cylinder to rotate within a certain range within a limited space, improving the compactness and flexibility of the structure. Furthermore, the connecting shaft and the adjusting cylinder are slidably connected through the cooperation between the convex shaft and the inclined groove, ensuring precise guidance of the connecting shaft during movement and preventing offset and wobbling. This precise guiding mechanism is the basis for achieving precise control of the rotation of the substrate body. In addition, elastic balls are installed at the corners of the inner wall of the inclined groove, which allows the convex shaft to stop smoothly when it reaches the predetermined position through the buffering effect of the elastic balls. This achieves precise control of the subsequent rotation angle of the substrate body, ensuring that the detection rays can evenly cover every detection area of ​​the substrate.

[0026] (2) In order to solve the problem that staff cannot accurately locate the warped area in time for slight warping, this device is set up so that when the detector is in normal detection process, once the warping abnormality is detected, the detector will automatically move downward to ensure that the trigger magnetic sheet and the magnetic plate pressure shaft are on the same horizontal plane. Based on the magnetic principle of like poles repulsion, the magnetic plate pressure shaft will squeeze the coating material inside the storage cylinder. At this time, in conjunction with the above-mentioned substrate body, the angle control rotation is implemented for each detection, so that this process works in synergy with the dynamic rotation mechanism of the substrate body to ensure that the coating material sprayed each time is accurately sprayed on the lower surface of the warped area of ​​the substrate body, thereby realizing the accurate marking of the warped position. The accurate marking of the warped position enables the staff to quickly identify and locate the problem area in the subsequent processing and repair process, avoiding blind search and misjudgment, and greatly improving work efficiency and repair quality.

[0027] Compared to existing technologies that rely on advanced instruments for automatic recording, this method not only increases the cost of using the equipment itself, but also fails to provide workers with accurate and clear information about the existence of warping after the inspection process is completed. In contrast, this device integrates the inspection and marking processes, reducing the time interval and manual intervention between inspection and marking in traditional methods, optimizing the overall efficiency of the inspection process, and can directly and accurately indicate which specific area of ​​the substrate surface warps, significantly improving the practicality of the inspection results.

[0028] (3) In order to solve the problems of ambient light interference and micro-contamination in the existing technology, this device triggers the combined chamber to shrink inward by synchronously moving the lead screw in the first step during the process of the detector starting up and projecting light onto the surface of the substrate. Firstly, this shrinkage process can not only adjust the position of the substrate to be tested to ensure accurate positioning of the test, but also work together with the flat plate part in the flat plate curved rod group to form a sealed cylindrical chamber. The formation of this cylindrical chamber automatically provides a light-proof space for the detector. Through this dynamic sealed isolation structure design, ambient light interference is effectively isolated, and interference from other light in the environment to the light receiving system of the detector is avoided, which significantly improves the accuracy and stability of the test. In addition, it also controls the adhesion of micro-contaminants in the air to the surface of the substrate, reduces the impact of micro-contamination on the test results, and further improves the reliability and accuracy of the test.

[0029] Secondly, to address the issue of multiple reflections caused by the reflected light from the substrate re-illuminating the substrate surface when the detector shines light on it, this device incorporates reflectors evenly installed on the inner wall of the assembly compartment. These reflectors effectively collect and guide the reflected light towards the surface of the light-absorbing plate covered with black absorbent paper, thereby reducing multiple reflections. Furthermore, the black absorbent paper has an extremely high light absorption rate, rapidly absorbing light and preventing it from being reflected or scattered again. This significantly improves the light collection efficiency, enabling the detector to more accurately capture and analyze the reflected light from the substrate surface. By reducing light interference and increasing light collection efficiency, the detector can complete the scanning and analysis of the substrate surface more quickly, which helps to shorten the detection time and improve the overall detection efficiency of the equipment.

[0030] Finally, when the outer wall of the substrate body warps, the warped part will press against the buffer ball in contact with it, thus acting on the marker block and causing it to protrude outward. This real-time feedback mechanism allows the inspector to identify the warped area on the outer wall of the substrate body. Furthermore, by controlling the rotation angle of the substrate body and combining the even distribution of the buffer ball on the inner wall of the assembly chamber, the device can simultaneously perform multi-dimensional simultaneous inspection of the surface and edges of the substrate body. This all-round, multi-angle inspection method greatly improves the comprehensiveness and accuracy of the inspection, and reduces misjudgments or missed detections caused by blind spots. Compared to traditional inspection methods that require multiple steps and multiple devices to complete a comprehensive inspection of the substrate body, this device integrates multi-dimensional inspection functions and a real-time feedback mechanism, merging multiple inspection steps into a continuous process, simplifying the inspection process and improving inspection efficiency. Attached Figure Description

[0031] Figure 1 This is a front-view three-dimensional structural schematic diagram of the present invention;

[0032] Figure 2 This is a bottom-view three-dimensional structural diagram of the present invention;

[0033] Figure 3 This is a three-dimensional structural diagram of the equalization control adjustment mechanism of the present invention;

[0034] Figure 4 This is a schematic diagram of the overall three-dimensional structure of the equalization control adjustment mechanism of the present invention;

[0035] Figure 5 This is a partial exploded view of the equalization control adjustment mechanism of the present invention;

[0036] Figure 6 This is a schematic diagram of the internal three-dimensional structure of the regulating cylinder of the present invention;

[0037] Figure 7 This is a three-dimensional structural diagram of the light-shielding detection mechanism of the present invention;

[0038] Figure 8 This is an exploded view of the light-shielding detection mechanism of the present invention;

[0039] Figure 9 This is a three-dimensional structural diagram of the combined compartment component of the present invention;

[0040] Figure 10 For the present invention Figure 9 A magnified three-dimensional structural diagram of part A in the middle.

[0041] The numbers on the map are:

[0042] 1. Main body of the testing equipment; 11. Testing table; 12. Drive cylinder; 13. Testing instrument; 14. Substrate body;

[0043] 2. Balanced quantity control adjustment mechanism; 21. Flat plate crank assembly; 22. Connecting shaft; 23. Lead screw; 24. Adjusting cylinder; 25. Inclined groove; 26. Limit buckle; 27. Storage cylinder; 28. Magnetic plate pressure shaft; 29. ​​Spring; 210. Trigger magnetic plate;

[0044] 3. Light-shielding detection mechanism; 31. Linkage plate; 32. Shaft-mounted fixing plate; 33. Cross-shaped limit frame; 34. Combination compartment; 35. Reflector; 36. Light-absorbing plate; 37. Buffer ball; 38. Marking block. Detailed Implementation

[0045] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present invention.

[0046] Embodiments of the present invention

[0047] Please refer to Figure 1 - Figure 2 As shown, a warpage marking device is used to detect warpage of the entire substrate body 14. It includes a detection device body 1, a detection platform 11 is fixedly connected to the middle position of the detection device body 1, a driving pneumatic cylinder 12 is installed above the detection platform 11, and a detector 13 is installed at the output shaft end of the driving pneumatic cylinder 12. The detector 13 is located at an eccentric position above the substrate body 14.

[0048] Please refer to Figure 3 - Figure 6As shown, the equalization control adjustment mechanism 2 includes a flat bar assembly 21 fixedly connected to the outer wall of the detector 13. A connecting shaft 22 is fixedly connected to one end of the flat bar assembly 21 away from the detector 13. A lead screw 23 is fixedly connected to the upper surface of the connecting shaft 22. An adjustment cylinder 24 is installed on the outer wall of the connecting shaft 22. An inclined groove 25 is opened on the inner side wall of the adjustment cylinder 24. A limit buckle 26 is rotatably connected to the lower surface of the adjustment cylinder 24. The limit buckle 26 is fixedly connected to the inner side wall of the main body 1 of the detection equipment. A storage cylinder 27 is installed on the outer wall of the adjustment cylinder 24.

[0049] Specifically, this allows the detection to no longer be limited to the central area of ​​the board, but to fully cover the surface of the substrate body 14, providing more comprehensive and accurate surface data feedback analysis, which helps to more accurately assess the surface integrity of the substrate body 14. At the same time, this process, through the dynamic adjustment of the detection area, reduces the irradiation range of the detector 13 while increasing the number of different positions detected by the detector 13, thereby ensuring that all parts of the substrate can receive uniform and sufficient detection feedback.

[0050] A magnetic plate pressure shaft 28 is slidably connected to the inner wall of the storage cylinder 27. A spring 29 is sleeved on the outer wall of the magnetic plate pressure shaft 28. A trigger magnetic sheet 210 is fixedly connected to the outer wall of the flat crank assembly 21. The inclined groove 25 is in a continuous N-shape. Elastic balls are installed at the corners of the inner wall of the inclined groove 25. A convex shaft is fixedly connected to the outer wall of the connecting shaft 22 at the vertical part of the inclined groove 25. The connecting shaft 22 and the adjusting cylinder 24 are slidably connected through the convex shaft and the inclined groove 25. The storage cylinder 27 stores coating material inside. The output port of the storage cylinder 27 is on the same vertical plane as the detector 13. The two ends of the spring 29 are fixedly connected to the storage cylinder 27 and the magnetic plate pressure shaft 28, respectively. The magnetic plate pressure shaft 28 is in the shape of a cup lid, and the outer wall of the cup lid is made of magnetic blocking material. The magnetic plate pressure shaft 28 and the positive magnetic sheet in the trigger magnetic sheet 210 correspond to each other.

[0051] Specifically, the magnetic plate pressure shaft 28 is designed in the shape of a cup lid, which effectively restricts the direction of the magnetic repulsion force of the trigger magnetic sheet 210 on the magnetic plate pressure shaft 28. This ensures that the outer wall of the cup lid of the magnetic plate pressure shaft 28 blocks the magnetic repulsion force of the trigger magnetic sheet 210, so that the magnetic repulsion force can only act on the magnetic plate pressure shaft 28 through the opening inside the cup lid when the two are on the same horizontal plane. This achieves the directional transmission of the magnetic repulsion force. This design ensures that the magnetic plate pressure shaft 28 can move along the predetermined direction when it receives the repulsion force, which improves the accuracy and reliability of the movement. It also effectively isolates the influence of the weak magnetic force generated by the trigger magnetic sheet 210 on the position of the magnetic plate pressure shaft 28, thereby reducing unnecessary interference and avoiding malfunctions or inaccurate positioning caused by weak magnetic force, thus improving the stability and accuracy of the detection device.

[0052] Please refer to Figure 7 - Figure 10As shown, the light-shielding detection mechanism 3 includes a linkage plate 31 installed on the outer wall of the lead screw 23. A shaft-mounted fixing plate 32 is installed on the surface of the linkage plate 31. A cross-shaped limiting frame 33 is slidably connected to the outer wall of the shaft-mounted fixing plate 32. The cross-shaped limiting frame 33 is fixedly connected to the lower surface of the detection table 11. A combination chamber 34 is fixedly connected to the upper surface of the shaft-mounted fixing plate 32. A reflector 35 is fixedly connected to the inner wall of the combination chamber 34. Light-absorbing plates 36 are evenly and symmetrically installed on both sides of the reflector 35. The bottom wall of the combined compartment 34 is uniformly connected to the buffer ball 37. The outer wall of the combined compartment 34 is slidably connected to the corresponding position of the buffer ball 37. The lead screw 23 and the linkage plate 31 form a ball screw structure. The linkage plate 31 is located at the bottom of the outer wall of the lead screw 23. The surface of the linkage plate 31 is uniformly provided with bending grooves. The linkage plate 31 and the shaft fixing plate 32 are rotatably connected through the bending grooves. The light-absorbing plate 36 is entirely covered with black absorbent paper. The buffer ball 37 and the substrate body 14 are on the same horizontal plane.

[0053] Specifically, considering the lightweight, thin, and brittle characteristics of the substrate body 14, and to address the problem of damage to the substrate body 14 caused by existing clamps during clamping and limiting, this device uniformly installs buffer balls 37 on the inner wall of the combination chamber 34 at positions corresponding to the outer wall of the substrate body 14. The primary function of the buffer balls 37 is to protect the substrate body 14 from physical damage. Due to their spherical characteristics, the buffer balls 37 can provide effective buffering, absorb and disperse compressive force when in contact with the substrate body 14, thereby preventing the substrate body 14 from cracking or scratching due to direct force. Secondly, the contact method between the buffer balls 37 and the substrate body 14 is point contact. This contact method can significantly reduce the friction between the two compared to surface contact. The reduction of friction not only helps to protect the surface of the substrate body 14 from wear, but also ensures that the substrate body 14 can maintain a stable posture during the detection process, avoiding the impact of vibration or displacement caused by friction on the accuracy of the detection results.

[0054] Specifically, by synchronously moving the lead screw 23 downward in the first step, the combined chamber 34 is triggered to shrink inward. This shrinkage process not only adjusts the position of the substrate body 14 to be tested to ensure accurate positioning of the test, but also works together with the flat plate part in the flat plate crank assembly 21 to form a sealed cylindrical chamber. The formation of this cylindrical chamber automatically provides a light-proof space for the detector 13. Through this dynamic sealed isolation structure design, ambient light interference is effectively isolated.

[0055] The following are the complete usage steps and working principle of the above embodiments:

[0056] The procedure for using this device is as follows: First, place the selected substrate body 14 sample on the upper surface of the detection stage 11. Then, according to the size, shape and characteristics of the substrate body 14, set the corresponding measurement parameters of the detection device body 1, such as laser wavelength, measurement range, data sampling rate, etc. Then, start the detection device body 1, and the driving pneumatic cylinder 12 drives the detector 13 to scan and detect the surface of the substrate body 14 using a high-precision, non-contact irradiation method.

[0057] The equalization adjustment mechanism 2 for the overall rotation angle of the main body 14 of the precision control substrate is used as follows:

[0058] like Figure 3 and Figure 4 As shown, since the flat plate crank assembly 21 is fixedly connected to the outer wall of the detector 13, when the detector 13 moves up and down repeatedly during the detection of the substrate body 14, the flat plate crank assembly 21 will move synchronously with it, such as... Figure 5 As shown, since the inclined groove 25 is a continuous N-shape, and the outer wall of the connecting shaft 22 is fixedly connected with a convex shaft at the vertical part of the inclined groove 25, and the connecting shaft 22 and the adjusting cylinder 24 are slidably connected through the convex shaft and the inclined groove 25, when the detector 13 moves downward, the convex shaft on the outer wall of the connecting shaft 22 will first move downward along the vertical part of the N-shaped groove to the corner of the N-shaped groove, such as... Figure 6 As shown, since elastic balls are installed at the corners of the inner wall of the inclined groove 25, the cam shaft can stop smoothly when it reaches the predetermined position through the buffering effect of the elastic balls.

[0059] Subsequently, when the detector 13 moves upward to prepare for the second detection, the convex shaft on the outer wall of the connecting shaft 22 slides along the inclined part of the N-shaped groove, thereby synchronously triggering the adjusting cylinder 24 to drive the substrate body 14 on the upper surface to complete the rotation in the form of controlled angle. Through the rotation of the substrate body 14, although the illumination range of the detector 13 remains unchanged physically, the actual detection area on the substrate is effectively reduced and diversified. This design avoids the problem of excessive light focusing on the central area and insufficient detection of the edge area in the traditional method, ensuring the uniform distribution and full coverage of the detection light.

[0060] Since the detector 13 is electrically connected to the driving pneumatic cylinder 12, this device is designed so that when the detector 13 is in the normal testing process, once a warping abnormality is detected, the detector 13 will automatically move downwards a specific distance, such as... Figure 4As shown, when the detector 13 moves downward to the detection position, after moving downward a specific distance, the trigger magnetic sheet 210 and the positive magnetic sheet in the magnetic plate pressure shaft 28 will be on the same horizontal plane. At this time, based on the magnetic principle of like poles repulsion, the magnetic plate pressure shaft 28 will squeeze the coating material inside the storage cylinder 27 after being repelled by the like pole of the trigger magnetic sheet 210. Since the output port of the storage cylinder 27 is on the same vertical plane as the detector 13, the coating material sprayed from the output port of the storage cylinder 27 can cooperate with the angle-controlled rotation of the substrate body 14 each time it is detected. This process works in conjunction with the dynamic rotation mechanism of the substrate body 14 to ensure that the coating material sprayed each time is accurately sprayed on the lower surface of the warped area of ​​the substrate body 14. This achieves accurate marking of the warped position, enabling the staff to quickly identify and locate the problem area during subsequent processing and repair, avoiding blind searching and misjudgment, and greatly improving work efficiency and repair quality.

[0061] The light-shielding detection mechanism 3, used to improve the overall detection accuracy of the detector 13 and to simultaneously perform multi-dimensional warp detection, is specifically used as follows:

[0062] like Figure 8 As shown, since the lead screw 23 and the linkage plate 31 form a ball screw structure, and the linkage plate 31 is located at the bottom of the outer wall of the lead screw 23, when the above-mentioned flat crank assembly 21 drives the connecting shaft 22 to move downward, the lead screw 23 will synchronously drive the linkage plate 31 to rotate. Since the surface of the linkage plate 31 is uniformly provided with bending grooves, and the linkage plate 31 and the shaft fixing plate 32 are rotatably connected through the bending grooves, when the linkage plate 31 rotates, the bending grooves on its surface will continuously squeeze the shaft fixing plate 32, thereby driving the shaft fixing plate 32 to retract and move towards the center position under the limiting action of the cross limiting frame 33.

[0063] like Figure 9As shown, since the shaft fixing plate 32 is fixedly connected to the combination chamber 34, and buffer balls 37 are evenly installed on the inner wall of the combination chamber 34 at the position corresponding to the outer wall of the substrate body 14, and the buffer balls 37 and the substrate body 14 are on the same horizontal plane, when the combination chamber 34 moves synchronously with the shaft fixing plate 32 to retract and move closer, the buffer balls 37 will contact the outer wall area of ​​the substrate body 14. Due to its own spherical characteristics, the buffer balls 37 can provide effective buffering, absorb and disperse the extrusion pressure when in contact with the substrate body 14, thereby preventing the substrate body 14 from cracking or being scratched due to direct force. Secondly, the contact method between the buffer balls 37 and the substrate body 14 is point contact. This contact method can significantly reduce the friction between the two compared to surface contact. The reduction of friction not only helps to protect the surface of the substrate body 14 from wear, but also ensures that the substrate body 14 can maintain a stable posture during the detection process, avoiding the impact of vibration or displacement caused by friction on the accuracy of the detection results.

[0064] At the same time, when the combined chamber 34 retracts and closes to stop, the combined chamber 34 itself will work together with the flat plate part in the flat plate and curved rod assembly 21 to form a sealed cylindrical chamber. The formation of this cylindrical chamber automatically provides a light-proof space for the detector 13, thereby effectively isolating ambient light interference and avoiding interference from other light in the environment to the light receiving system of the detector 13.

[0065] At the same time, such as Figure 10 As shown, reflectors 35 are uniformly installed on the inner wall of the combination chamber 34, and light-absorbing plates 36 are symmetrically installed on both sides of the reflectors 35. When the detector 13 performs detection, the reflectors 35 can effectively collect and guide the light reflected by the substrate body 14 itself to the surface of the light-absorbing plate 36 covered with black absorbent paper, thereby reducing multiple reflections of light. The black absorbent paper has an extremely high light absorption rate, which can quickly absorb light and prevent it from being reflected or scattered again, thereby greatly improving the light collection efficiency. This allows the detector 13 to more accurately capture and analyze the reflected light on the surface of the substrate body 14. By reducing light interference and improving light collection efficiency, the detector 13 can complete the scanning and analysis of the surface of the substrate body 14 more quickly, which helps to shorten the detection time and improve the overall detection efficiency of the equipment.

[0066] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A warpage marking device for detecting warpage of a substrate body (14) as a whole, comprising a detection device body (1), wherein a detection stage (11) is fixedly connected to the middle position of the detection device body (1), a driving pneumatic cylinder (12) is installed above the detection stage (11), and a detector (13) is installed at the output shaft end of the driving pneumatic cylinder (12), wherein the detector (13) is located at an eccentric position above the substrate body (14), characterized in that: Also includes: The equalization control adjustment mechanism (2) is used to precisely control the rotation angle of the entire substrate body (14); The light-shielding detection mechanism (3) is used to improve the overall detection accuracy of the detector (13) and to perform multidimensional warp detection at the same time; The equalization control adjustment mechanism (2) includes a flat bar assembly (21) fixedly connected to the outer wall of the detector (13). A connecting shaft (22) is fixedly connected to one end of the flat bar assembly (21) away from the detector (13). A lead screw (23) is fixedly connected to the upper surface of the connecting shaft (22). An adjusting cylinder (24) is installed on the outer wall of the connecting shaft (22). An inclined groove (25) is opened on the inner side wall of the adjusting cylinder (24). A limit buckle (26) is rotatably connected to the lower surface of the adjusting cylinder (24). The limit buckle (26) is fixedly connected to the inner side wall of the main body (1) of the detection equipment. The light-shielding detection mechanism (3) includes a linkage plate (31) installed on the outer wall of the lead screw (23). The surface of the linkage plate (31) is equipped with a shaft fixing plate (32). The outer wall of the shaft fixing plate (32) is slidably connected with a cross limiting frame (33). The cross limiting frame (33) is fixedly connected to the lower surface of the detection table (11). The upper surface of the shaft fixing plate (32) is fixedly connected with a combination chamber (34). The inner side wall of the combination chamber (34) is fixedly connected with a reflector (35). Light-absorbing plates (36) are evenly and symmetrically installed on both sides of the reflector (35). The bottom wall of the inner side wall of the combination chamber (34) is evenly and slidably connected with a buffer ball (37). The outer wall of the combination chamber (34) is slidably connected with a marker block (38) at the position corresponding to the buffer ball (37).

2. The warping marking device according to claim 1, characterized in that: The outer wall of the regulating cylinder (24) is fitted with a storage cylinder (27), the inner wall of the storage cylinder (27) is slidably connected with a magnetic plate pressure shaft (28), the outer wall of the magnetic plate pressure shaft (28) is sleeved with a spring (29), and the outer wall of the flat crank assembly (21) is fixedly connected with a trigger magnet (210).

3. The warp marking device according to claim 1, characterized in that: The inclined groove (25) is in a continuous N-shape. Elastic balls are installed at the corners of the inner wall of the inclined groove (25). A convex shaft is fixedly connected to the outer wall of the connecting shaft (22) at the vertical part of the inclined groove (25). The connecting shaft (22) and the adjusting cylinder (24) are slidably connected through the convex shaft and the inclined groove (25).

4. A warping marking device according to claim 2, characterized in that: The storage cylinder (27) contains coating material, and the outlet of the storage cylinder (27) is located on the same vertical plane as the detector (13).

5. A warping marking device according to claim 2, characterized in that: The two ends of the spring (29) are fixedly connected to the storage cylinder (27) and the magnetic plate pressure shaft (28) respectively. The magnetic plate pressure shaft (28) is in the shape of a cup lid, and the outer wall of the cup lid is made of magnetic blocking sheet material. The magnetic plate pressure shaft (28) corresponds to the positive magnetic sheet in the trigger magnetic sheet (210).

6. A warping marking device according to claim 1, characterized in that: The lead screw (23) and the linkage plate (31) form a ball screw structure, and the linkage plate (31) is located at the bottom of the outer wall of the lead screw (23).

7. A warping marking device according to claim 1, characterized in that: The surface of the linkage disk (31) is uniformly provided with curved grooves, and the linkage disk (31) and the shaft fixing plate (32) are rotatably connected through the curved grooves.

8. A warping marking device according to claim 1, characterized in that: The light-absorbing plate (36) is entirely covered with black absorbent paper, and the buffer ball (37) and the substrate body (14) are on the same horizontal plane.

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