Optical multichannel imaging system of detection equipment

Abstract

The invention relates to an optical multichannel imaging system for detection equipment, which comprises a light source module, an imaging module, a camera module and a color separation module, and is characterized in that the light source module is configured to emit an illumination light beam; the imaging module is configured to guide the illumination light beam and emit the illumination light beam to a measured object; the camera module comprises a plurality of cameras; the color separation module is configured to separate the imaging light into light beams with different colors and emit the light beams to the camera in different directions so as to carry out imaging respectively; the imaging light is an illumination light beam reflected by the measured object and a light beam transmitted by the imaging module. In the invention, by using the matching of multiple cameras and the color separation module, when the multiple cameras are all linear array cameras, on the basis of ensuring the advantages of a linear array scanning imaging technology, the scanning imaging of three cameras can be completed at the same time through one-time scanning; when a plurality of cameras are all area-array cameras, the bottleneck of the data capability (frame rate) of the cameras can be avoided, and during detection, multi-channel (such as three-channel) imaging can be completed through one-time full-frame-rate scanning operation of the cameras.

Description

Technical Field

[0001] The present application relates to the field of optical detection, and in particular to an optical multi-channel imaging system of detection equipment. Background Art

[0002] Currently, there are two types of optical imaging systems used in optical inspection equipment on the market: one is to use line array cameras, and the other is to use area array cameras. Both have different advantages and disadvantages and scopes of application.

[0003] The advantages of linear array cameras are high resolution and sensitivity, the ability to capture tiny changes in light signals, and the time delay integration (TDI) feature that improves the utilization rate of light source intensity. The disadvantage is that a single scan cannot use light sources of different wavelength ranges, that is, it is impossible to achieve simultaneous scanning, imaging and detection of red, blue and green light, nor is it possible to achieve simultaneous scanning, imaging and detection of bright and dark fields.

[0004] The advantages of area array cameras are that they have higher quality single-frame images, the pixel size detected within the frame is more accurate, and their single frames have a certain frame length, so there is no need for a too high trigger frame rate. Therefore, when used in scanning imaging systems, interpolation processing can be performed to achieve simultaneous scanning and imaging of light sources with different lighting methods. The disadvantage is that when an optical imaging system using area array cameras is used for scanning, each frame of the image needs to be spliced; when the interpolation is for multi-channel scanning, the scanning speed will be greatly reduced (for example, when scanning three channels, the speed is reduced to 1 / 3 of that of a single channel).

[0005] Therefore, whether the current imaging system is equipped with a linear array camera or an area array camera, when multi-channel imaging is required, the efficiency of scanning imaging and detection is relatively low. Summary of the invention

[0006] The present application provides an optical multi-channel imaging system for detection equipment, which can solve the problem that the current imaging system in the related art, whether it is equipped with a linear array camera or an area array camera, has a relatively low efficiency in scanning imaging and detection when multi-channel imaging is required.

[0007] An embodiment of the present application provides an optical multi-channel imaging system for a detection device, comprising: a light source module, an imaging module, a camera module and a color separation module, wherein the light source module is configured to emit an illumination light beam; the imaging module is configured to guide the illumination light beam and direct it toward an object to be measured; the camera module comprises a plurality of cameras; the color separation module is configured to separate the imaging light into light beams of different colors and direct them toward the camera in different directions to form images respectively; the imaging light is the illumination light beam reflected by the object to be measured and transmitted through the imaging module.

[0008] In some embodiments, the imaging module includes: an objective lens and a beam splitter prism, the objective lens is configured to guide the illumination beam and emit it to the object to be measured; the beam splitter prism is configured to guide the illumination beam and emit it to the objective lens.

[0009] In some embodiments, the imaging module further includes: a reflector configured to guide the illumination light beam toward the beam splitter prism.

[0010] In some embodiments, the light source module includes a light source, and an illumination light beam emitted by the light source includes a first light beam, a second light beam, and a third light beam of three different colors;

[0011] Alternatively, the light source module includes three light sources, and the illumination light beam includes a first light beam, a second light beam and a third light beam of three different colors respectively emitted by the three light sources.

[0012] In some embodiments, the color separation module includes: a first dichroic mirror and a second dichroic mirror, wherein the first dichroic mirror is located on one side of the imaging module, and the first dichroic mirror is configured to reflect the first light beam and transmit the second light beam and the third light beam; the second dichroic mirror is located on one side of the first dichroic mirror, and the second dichroic mirror is configured to reflect the second light beam and transmit the third light beam.

[0013] In some embodiments, the camera module includes: a first camera, a second camera and a third camera, wherein the first camera is arranged on one side of the first dichroic mirror and is used to capture the first light beam imaging; the second camera is arranged on one side of the second dichroic mirror and is used to capture the second light beam imaging; the third camera is arranged on one side of the second dichroic mirror and is used to capture the third light beam imaging.

[0014] In some embodiments, the first camera includes a first barrel lens and a first camera body, and the first camera is configured such that the first barrel lens converges the first light beam reflected by the first dichroic mirror to reach the target surface of the first camera body, thereby completing imaging of the first light beam;

[0015] The second camera includes a second barrel lens and a second camera body, and the second camera is configured such that the second barrel lens converges the second light beam reflected by the second dichroic mirror to reach the target surface of the second camera body, thereby completing imaging of the second light beam;

[0016] The third camera includes a third barrel lens and a third camera body. The third camera is configured such that the third barrel lens converges the third light beam transmitted by the second dichroic mirror to reach the target surface of the third camera body, thereby completing imaging of the third light beam.

[0017] In some embodiments, when the light source module includes three light sources, the emission times of the first light beam, the second light beam, and the third light beam are the same, or the emission times of the first light beam, the second light beam, and the third light beam are different.

[0018] In some embodiments, when the illumination beam of the light source module is the first beam, the second beam, or the third beam, the imaging channel of the imaging system is a single channel;

[0019] When the illumination beam of the light source module is the first beam and the second beam, or the third beam and the second beam, the imaging channel of the imaging system is a dual channel;

[0020] When the illumination light beams of the light source module are the first light beam, the second light beam and the third light beam, the imaging channels of the imaging system are three channels.

[0021] In some embodiments, when the multiple cameras are all linear array cameras, the light source module emits the illumination light beam in a continuous lighting manner;

[0022] When the multiple line arrays are all area array cameras, the light source module emits an illumination beam in a triggering and lighting manner.

[0023] The beneficial effects brought by the technical solution provided in the embodiments of the present application include:

[0024] The embodiment of the present application provides an optical multi-channel imaging system for detection equipment, which uses a combination of multiple cameras and color separation modules. When multiple cameras are linear array cameras, while ensuring the advantages of linear array scanning imaging technology, it is possible to achieve one scan to complete three camera scanning imaging at the same time, that is, imaging of light sources with different wavelengths such as red light, blue light and green light is performed respectively, which greatly improves the detection capability; when multiple cameras are area array cameras, the bottleneck of camera data capacity (frame rate) can be avoided. During detection, multi-channel (such as three-channel) imaging can be completed by scanning and running the camera at full frame rate once. At this time, the imaging frame rate of a single light source is still full frame. Therefore, the imaging system can realize multi-channel scanning detection of the area array optical system without reducing the scanning imaging speed, thereby greatly improving the efficiency of scanning detection. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0026] Figure 1 A schematic diagram of an imaging system provided in an embodiment of the present application;

[0027] Figure 2 A schematic diagram of an imaging system provided in an embodiment of the present application;

[0028] Figure 3 A timing model for three-channel triggering provided in an embodiment of the present application.

[0029] In the figure: 1. light source module; 2. imaging module; 20. reflector; 21. beam splitter prism; 22. objective lens; 3. camera module; 30. first camera; 31. second camera; 32. third camera; 4. object to be measured; 5. color separation module; 50. first dichroic mirror; 51. second dichroic mirror. DETAILED DESCRIPTION

[0030] In order to enable those skilled in the art to better understand the solution of the present application, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0031] An embodiment of the present application provides an optical multi-channel imaging system for detection equipment, which can solve the problem that the current imaging system in the related art, whether it is equipped with a linear array camera or an area array camera, has a relatively low efficiency in scanning imaging and detection when multi-channel imaging is required.

[0032] See also Figures 1 to 3 An embodiment of the present application provides an optical multi-channel imaging system of a detection device, which includes: a light source module 1, an imaging module 2, a camera module 3 and a color separation module 5, wherein the light source module 1 is configured to emit an illumination beam; the imaging module 2 is configured to guide the illumination beam and direct it toward the object to be measured 4; the camera module 3 includes a plurality of cameras; the color separation module 5 is configured to separate the imaging light into beams of different colors and direct them toward the camera in different directions to form images respectively; the imaging light is the illumination beam reflected by the object to be measured 4 and transmitted through the imaging module 2.

[0033] In the present application, a combination of multiple cameras and a color separation module 5 is used. When multiple cameras are all linear array cameras, while ensuring the advantages of the linear array scanning imaging technology, three camera scanning imaging can be completed simultaneously in one scan, that is, imaging of light sources with different wavelengths such as red light, blue light and green light is performed respectively, which greatly improves the detection capability; when multiple cameras are all area array cameras, the bottleneck of the camera data capacity (frame rate) can be avoided. During detection, multi-channel (such as three-channel) imaging can be completed by scanning and running the camera at full frame rate once. At this time, the imaging frame rate of a single light source is still full frame. Therefore, the imaging system can realize multi-channel scanning detection of the area array optical system without reducing the scanning imaging speed, thereby greatly improving the efficiency of scanning detection.

[0034] First, the light source module 1 emits an illumination light beam, which then passes through the imaging module 2 and illuminates the object 4 under test. It should be noted that the imaging light reflected from the surface of the object 4 also passes through the imaging module 2, is transmitted from the imaging module 2, and is separated into light beams of different colors through the color separation module 5, and then is collected by the corresponding camera. The light beams of different colors here also refer to light beams of different wavelengths. For example, the illumination light beam includes three colors: red, blue and green light beams. The wavelengths of the three colors are different. The wavelength range of the red light beam is 615-650nm, the wavelength range of the green light beam is 510-550nm, and the wavelength range of the blue light beam is 450-480nm.

[0035] Based on the above embodiments, in this embodiment, the light source module 1 can be arranged in a variety of ways:

[0036] In some possible embodiments, the light source module 1 includes a light source, and an illumination light beam emitted by the light source includes a first light beam, a second light beam, and a third light beam of three different colors.

[0037] That is to say, when the light source emits an illumination beam, it will only emit one beam of light. According to the needs, the illumination beam includes a first beam, a second beam and a third beam of three different colors; it can also include only a first beam and a second beam of two different colors; it can also include a first beam, a second beam and a third beam, a fourth beam of four different colors...

[0038] In some other possible embodiments, the light source module 1 includes three light sources, and the illumination light beam includes a first light beam, a second light beam, and a third light beam of three different colors respectively emitted by the three light sources.

[0039] In this embodiment, the light source module 1 has multiple light sources, each of which emits a light beam of different colors, and the light beams emitted by each light source are combined to form an illumination light beam. It should be noted that the light sources are not limited to three, and four or five light sources can also be set as needed.

[0040] The above embodiments are merely multiple possible implementations of the embodiments of the present application, and the embodiments of the present application are not limited thereto.

[0041] In the present application, the light source module 1 may use an LED containing three colors of light: R, G, and B, or may use an optical fiber to introduce different colors of light from other light sources.

[0042] Furthermore, when there is only one color of light in the illumination beam, that is, the illumination beam of the light source module 1 is the first beam, the second beam, or the third beam, the imaging channel of the imaging system is a single channel; when there are only two colors of light in the illumination beam, that is, the illumination beam of the light source module 1 is the first beam and the second beam, or the third beam and the second beam, the imaging channel of the imaging system is a dual channel; when there are only three colors of light in the illumination beam, that is, the illumination beam of the light source module 1 is the first beam, the second beam, and the third beam, the imaging channel of the imaging system is a three-channel.

[0043] The illumination beam can be continuously lit or triggered: when the multiple cameras in the camera module 3 are all linear array cameras, the light source module 1 emits the illumination beam in a continuously lit manner; when the multiple linear arrays in the camera module 3 are all area array cameras, the light source module 1 emits the illumination beam in a triggered manner.

[0044] It should also be noted that when the light source module 1 includes three light sources, the emission time of the first light beam, the second light beam and the third light beam is the same, or the emission time of the first light beam, the second light beam and the third light beam is different. In other words, the difference in the emission time of light beams of different colors will not affect the camera imaging in this application.

[0045] On the basis of the above embodiments, in this embodiment, the imaging module 2 includes: an objective lens 22 and a beam splitter prism 21 , the objective lens 22 is configured to guide the illumination beam and emit it to the object 4 to be measured; the beam splitter prism 21 is configured to guide the illumination beam and emit it to the objective lens 22 .

[0046] Among them, the beam splitter prism 21 is a semi-transmitting and semi-reflecting mirror. When the illumination light beam is irradiated to the surface of the semi-transmitting and semi-reflecting mirror, part of the illumination light beam will pass through the semi-transmitting and semi-reflecting mirror, while the other part of the illumination light beam will be reflected by the semi-transmitting and semi-reflecting mirror to the objective lens 22, and illuminate the object 4 to be measured through the objective lens 22.

[0047] The beam splitter prism 21 is an optical element that can reflect and transmit light into two beams in a certain proportion. It is used in systems such as lasers, lighting and spectrometers, and can adjust the percentage of the transmitted light beam and the reflected light beam and the polarization state as needed.

[0048] Furthermore, the imaging module 2 further includes a reflector 20 , and the reflector 20 is configured to guide the illumination light beam and direct it toward the beam splitter prism 21 .

[0049] It should be noted that the reflector 20 is a plane reflector, which can be adjusted to reflect almost all of the illumination light beam to the dichroic prism 21; therefore, by setting the reflector 20 and the dichroic prism 21, the percentage of the incident light beam and the reflected light beam can be adjusted to adjust the utilization rate of the light source.

[0050] In addition, the beam splitter prism 21 may also be a flat beam splitter, and the functions are basically the same; if the polarization of the light source needs to be adjusted, the beam splitter prism 21 may also be a polarization beam splitter prism.

[0051] On the basis of the above embodiments, in this embodiment, the color separation module 5 includes: a first dichroic mirror 50 and a second dichroic mirror 51, wherein the first dichroic mirror 50 is located on one side of the imaging module 2, and the first dichroic mirror 50 is configured to reflect the first light beam and transmit the second light beam and the third light beam; the second dichroic mirror 51 is located on one side of the first dichroic mirror 50, and the second dichroic mirror 51 is configured to reflect the second light beam and transmit the third light beam.

[0052] It should be noted that the number of light beams in the illumination light beam is not limited. In the present application, the illumination light beam is described by taking the example that the illumination light beam includes a first light beam, a second light beam and a third light beam with three different colors.

[0053] The first dichroic mirror 50 and the second dichroic mirror 51 can reflect and transmit different light beams, and can be set according to actual needs. For example, in this embodiment, the first light beam, the second light beam and the third light beam are divided into R light, G light and B light, and the first dichroic mirror 50 is set to reflect B light and transmit R light and G light; the second dichroic mirror 51 is set to reflect G light and transmit R light. And the camera module 3 includes: a first camera 30, a second camera 31 and a third camera 32, the first camera 30 is set on one side of the first dichroic mirror 50, and is used to collect the first light beam imaging; the second camera 31 is set on one side of the second dichroic mirror 51, and is used to collect the second light beam imaging; the third camera 32 is set on one side of the second dichroic mirror 51, and is used to collect the third light beam imaging:

[0054] The beam splitter prism 21 and the objective lens 22 are arranged on the same illumination path. The imaging light reflected from the surface of the object 4 to be measured passes through the objective lens 22 and reaches the beam splitter prism 21. About half of the imaging light is transmitted to the first dichroic mirror 50. The B light is reflected at the first dichroic mirror 50 and reaches the first camera 30 to complete the imaging of the B light; the R light and the G light are transmitted from the first dichroic mirror 50 to the second dichroic mirror 51. The G light is reflected at the second dichroic mirror 51 and reaches the second camera 31 to complete the imaging of the G light; the R light is transmitted from the second dichroic mirror 51 to the third camera 32 to complete the imaging of the R light.

[0055] Furthermore, the first camera 30 includes a first barrel lens and a first camera 30 body, and the first camera 30 is configured such that the first barrel lens converges the first light beam reflected by the first dichroic mirror 50 and reaches the target surface of the first camera 30 body to complete the imaging of the first light beam; the second camera 31 includes a second barrel lens and a second camera 31 body, and the second camera 31 is configured such that the second barrel lens converges the second light beam reflected by the second dichroic mirror 51 and reaches the target surface of the second camera 31 body to complete the imaging of the second light beam; the third camera 32 includes a third barrel lens and a third camera 32 body, and the third camera 32 is configured such that the third barrel lens converges the third light beam transmitted by the second dichroic mirror 51 and reaches the target surface of the third camera 32 body to complete the imaging of the third light beam.

[0056] In the present application, the multiple cameras in the camera module 3 may be line array cameras or area array cameras.

[0057] When the area array camera is used for scanning, it uses a triggering method for exposure, that is, the light source module 1 emits an illumination beam by triggering. The triggering frequency is generally within a few hundred frames, and the frame rate is represented by F. In the traditional single-camera mode, the matching scanning speed is recorded as V. Since the length of the single-frame object plane at the same optical system magnification is fixed, L, V = F * L, and the single scanning time is recorded as T, which is inversely proportional to V, that is, the faster the scanning speed, the shorter the scanning time, and the higher the scanning efficiency.

[0058] The imaging system of the present application is different from the traditional multi-channel method in that when the traditional single channel is expanded to multi-channel, one or more exposure actions need to be inserted in the interval of each single camera exposure. Due to the camera frame rate limit, the maximum frame rate of each channel is equal to the camera limit frame rate / number of channels. For example, the three-channel scanning speed will also be reduced to 1 / 3V accordingly, thus affecting the efficiency of scanning imaging. In the technology of the present invention, the imaging light is simultaneously split according to different colors, that is, the three-color light of R, G, and B is exposed and imaged in the corresponding camera respectively, so that the scanning imaging and detection of the three channels can be completed in one scan while maintaining the scanning speed V unchanged.

[0059] It should be noted that the present application is compatible with dark field design, and a dark field light source can be added to the imaging system. For example, G light is used for bright field illumination and B light is used for dark field illumination, that is, the two use light sources of different wavelengths. Multi-channel technology can be used to achieve simultaneous scanning and detection of bright field and dark field, which can improve the detection effect for different defects.

[0060] See also Figure 3 The typical three-channel trigger timing model shown in Figure 3 IMG_R, IMG_G, and IMG_B correspond to R light, G light, B light and the trigger signal of the camera respectively. The illumination beam and the trigger signal of the camera are basically simultaneous (due to the exposure characteristics of the camera and other reasons, the delay parameters may be slightly adjusted, and the adjustment amount is at the microsecond level), and the Trigger signal is at a fixed position interval, which is related to the position of the scanning axis.

[0061] During the use of the linear array camera, unlike the working mode of the area array camera, the linear array camera requires a higher frequency trigger signal, such as 500KHz, and its imaging adopts the time integration method, so it is impossible to use the interpolation method for multi-channel imaging. The present application uses a dichroic mirror to ensure that even if the three-color LED light sources of R, G, and B are all in a continuous lighting mode, the imaging light can still be incident to the corresponding camera at different wavelengths (i.e., the wavelengths corresponding to the R, G, and B lights). At the same time, the linear array camera scanning can make full use of the characteristics of time integration to ensure the effective use of light intensity. After using this imaging system, the imaging detection under the three-color light sources of R, G, and B can be completed within a scanning time T, which will greatly improve the detection effect; in addition, the linear array camera scanning can also introduce a dark field light source, for example, the bright field illumination uses G light and the dark field illumination uses B light, that is, the two use light sources of different wavelengths. The use of multi-channel technology can realize the simultaneous scanning and detection of bright field and dark field, which can improve the detection effect for different defects.

[0062] In summary, the present application can realize multi-channel scanning and detection of the area array optical system without reducing the scanning and imaging speed, greatly improving the efficiency of scanning and detection, about 3 times the efficiency when three channels are used and about 2 times the efficiency when two channels are used; at the same time, it is compatible with bright field and dark field combination methods for multi-channel scanning and detection.

[0063] The present application can realize multi-channel detection technology in the linear array optical system, which can improve the detection efficiency while ensuring the advantages of the linear array scanning imaging technology, especially under the technology that is compatible with bright field and dark field (bright field and dark field use light sources of different wavelengths), which can realize one-time scanning imaging and complete the imaging and detection of simultaneous bright and dark field linear array scanning.

[0064] The compatibility of the present application allows the integration of devices such as multi-rate switches into optical systems to enhance system functionality and practicality.

[0065] In the description of the present application, it should be noted that the terms "upper", "lower", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application. Unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be a connection between the two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to the specific circumstances.

[0066] It should be noted that, in this application, relational terms such as "first" and "second" are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "comprise a ..." do not exclude the presence of other identical elements in the process, method, article or device including the elements.

[0067] The above description is only a specific implementation of the present application, so that those skilled in the art can understand or implement the present application. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the present application. Therefore, the present application will not be limited to the embodiments shown herein, but will conform to the widest range consistent with the principles and novel features applied for herein.

Claims

1. An optical multi-channel imaging system for detection equipment, characterized in that: It includes: A light source module (1), the light source module (1) being configured to emit an illumination light beam; An imaging module (2), wherein the imaging module (2) is configured to guide an illumination light beam and project it toward an object to be measured (4); A camera module (3), wherein the camera module (3) comprises a plurality of cameras; A color separation module (5), wherein the color separation module (5) is configured to separate the imaging light into light beams of different colors and emit the light beams toward the camera in different directions to form images respectively; The imaging light is an illumination light beam reflected by the object to be measured (4) and transmitted through the imaging module (2).

2. The optical multi-channel imaging system of the detection equipment according to claim 1, characterized in that: The imaging module (2) comprises: An objective lens (22), wherein the objective lens (22) is configured to guide the illumination light beam and project it toward the object to be measured (4); A beam splitter prism (21) is configured to guide the illumination light beam and direct it toward the objective lens (22).

3. The optical multi-channel imaging system of the detection equipment according to claim 2, characterized in that: The imaging module (2) further comprises: a reflector (20), wherein the reflector (20) is configured to guide the illumination light beam and direct it toward the beam splitter prism (21).

4. The optical multi-channel imaging system for detection equipment according to claim 1, characterized in that: The light source module (1) comprises a light source, wherein an illumination light beam emitted by the light source comprises a first light beam, a second light beam and a third light beam of three different colors; Alternatively, the light source module (1) comprises three light sources, and the illumination light beam comprises a first light beam, a second light beam and a third light beam of three different colors respectively emitted by the three light sources.

5. The optical multi-channel imaging system of the detection device according to claim 4, characterized in that: The color separation module (5) comprises: A first dichroic mirror (50), the first dichroic mirror (50) being located on one side of the imaging module (2), the first dichroic mirror (50) being configured to reflect the first light beam and transmit the second light beam and the third light beam; A second dichroic mirror (51), the second dichroic mirror (51) is located on one side of the first dichroic mirror (50), and the second dichroic mirror (51) is configured to reflect the second light beam and transmit the third light beam.

6. The optical multi-channel imaging system of the detection device according to claim 5, characterized in that: The camera module (3) comprises: A first camera (30), the first camera (30) being arranged on one side of the first dichroic mirror (50) and being used for collecting an image of the first light beam; A second camera (31), the second camera (31) being arranged on one side of the second dichroic mirror (51) and being used for collecting an image of the second light beam; A third camera (32), the third camera (32) is arranged on one side of the second dichroic mirror (51) and is used to collect the third light beam for imaging.

7. The optical multi-channel imaging system of the detection equipment according to claim 6, characterized in that: The first camera (30) comprises a first lens barrel and a first camera (30) body, and the first camera (30) is configured such that the first lens barrel lens converges the first light beam reflected by the first dichroic mirror (50) to reach the target surface of the first camera (30) body, thereby completing imaging of the first light beam; The second camera (31) comprises a second barrel lens and a second camera (31) body, and the second camera (31) is configured such that the second barrel lens converges the second light beam reflected by the second dichroic mirror (51) to reach the target surface of the second camera (31) body, thereby completing imaging of the second light beam; The third camera (32) comprises a third lens barrel and a third camera (32) body. The third camera (32) is configured such that the third lens barrel lens converges the third light beam transmitted by the second dichroic mirror (51) to reach the target surface of the third camera (32) body, thereby completing imaging of the third light beam.

8. The optical multi-channel imaging system for detection equipment according to claim 4, characterized in that: When the light source module (1) comprises three light sources, the emission times of the first light beam, the second light beam and the third light beam are the same, or the emission times of the first light beam, the second light beam and the third light beam are different.

9. The optical multi-channel imaging system for detection equipment according to claim 4, characterized in that: When the illumination light beam of the light source module (1) is the first light beam, the second light beam, or the third light beam, the imaging channel of the imaging system is a single channel; When the illumination light beam of the light source module (1) is the first light beam and the second light beam, or the third light beam and the second light beam, the imaging channel of the imaging system is a dual channel; When the illumination light beam of the light source module (1) is a first light beam, a second light beam and a third light beam, the imaging channels of the imaging system are three channels.

10. The optical multi-channel imaging system for detection equipment according to claim 1, characterized in that: When the multiple cameras are all linear array cameras, the light source module (1) emits an illumination light beam in a continuously lit manner; When the multiple line arrays are all area array cameras, the light source module (1) emits an illumination light beam in a triggering and lighting manner.

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