Precursor container
By designing a multi-channel turbulent flow field and a limiting block gap structure in the precursor container, the problems of low precursor material utilization and uneven mass transfer efficiency in traditional containers are solved, achieving efficient and stable precursor carry-out and carrier gas utilization.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- HUAWEI TECH CO LTD
- Filing Date
- 2023-07-31
- Publication Date
- 2026-05-29
AI Technical Summary
The serpentine flow channel structure of traditional solid precursor containers results in low space utilization of precursor materials and uneven mass transfer efficiency. In particular, the mass transfer driving force weakens in the latter half of the flow channel, leading to uneven precursor consumption and low mass transfer efficiency.
A precursor container is designed, which adopts a multi-channel structure in a tray. A turbulent flow field is formed by the gap between the first and second partitions. The carrier gas is uniformly mixed with the precursor in the channel. The stable input and output of the carrier gas is ensured by limiting blocks and gap design, thereby improving the mass transfer driving force and efficiency.
It achieves uniform and stable mass transfer of precursors, improves precursor carry-out and mass transfer efficiency, is applicable to a variety of precursor materials, has high carrier gas utilization, and features a reasonable miniaturized container design.
Smart Images
Figure CN119429381B_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of semiconductor manufacturing technology, and more particularly to a precursor container. Background Technology
[0002] Traditional solid precursor containers employ a serpentine flow channel structure, which is pipe-like. However, this pipe-like structure occupies a large space for filling precursor materials, resulting in low space utilization of the precursor materials. Furthermore, while this pipe-like structure has a high mass transfer rate in the early stage of mass transfer, the mass transfer driving force weakens in the latter half of the flow channel. This leads to uneven consumption of precursor materials in the front and rear sections of the flow channel, resulting in low mass transfer efficiency. Summary of the Invention
[0003] The purpose of this application is to provide a precursor container to enhance the mass transfer driving force and improve the mass transfer efficiency.
[0004] This application provides a precursor container, comprising a body, a cover, and at least one tray. The body has a first cavity; the tray is disposed within the first cavity, with an air inlet at one end and an air outlet at the other end along a first direction; the tray has a second cavity, and at least one first partition is disposed within the second cavity, extending along the first direction and dividing the second cavity into multiple channels. The air inlet communicates with one end of each of the multiple channels, and the air outlet communicates with the other end of each of the multiple channels; the cover is fastened. The cover has an air inlet and an air outlet, the air inlet being connected to the air inlet port and the air outlet being connected to the air outlet port; at least one second partition is provided on the side of the cover facing the body, the second partition extending along a second direction perpendicular to the first direction; at least one of the first partition and the second partition has a gap, the first partition and the second partition are inserted through the gap, and there is a first gap between the bottom surface of the channel and the second partition in a third direction, the third direction being perpendicular to the first direction and the second direction.
[0005] The precursor container provided in this application can form a uniform and stable turbulent flow field within the tray, increasing the mass transfer driving force of the precursor and thus achieving a higher precursor carry-out rate. It is applicable to various precursor materials; optionally, the precursor can be a Newtonian liquid precursor, a non-Newtonian liquid precursor, or an extremely low vapor pressure solid precursor. Simultaneously, the carrier gas can flow in multiple channels formed within the tray, mixing with the precursor in each channel and carrying it out of the container at the same time, thereby improving the efficiency and stability of vapor carry-out. Furthermore, both the first and second partitions are plate-like structures with a small thickness, reducing the space occupied by the carrier gas flow. While ensuring the mixing effect of the carrier gas and precursor, this facilitates the miniaturization design of the container.
[0006] In one possible design, multiple trays are provided, and the multiple trays are stacked on top of the third-party; at least some of the trays have a second partition on the side facing away from the second cavity, and the second partition of the upper tray is inserted into the first partition of the tray in the adjacent lower layer through the gap.
[0007] Therefore, by stacking multiple trays, the number of channels can be increased, thereby increasing the amount of precursor carried out by the carrier gas and improving mass transfer efficiency.
[0008] In one possible design, along the first direction, there is a second gap between the end of the tray where the air inlet is located and the body, and a third gap between the end of the tray where the air outlet is located and the body. The air inlet communicates with the second gap, and the air outlet communicates with the third gap.
[0009] When carrier gas is introduced into the container, the carrier gas can enter the second gap through the air inlet. Since the space formed by the body and each tray in the second gap is small, when a large amount of carrier gas rushes in, the carrier gas can quickly fill the second gap and generate a relatively high pressure, so that the carrier gas can enter the air inlet of each tray evenly and generate a large mass transfer driving force and mass transfer velocity, thereby improving the mass transfer efficiency.
[0010] In one possible design, at least two limiting blocks are provided within the first cavity, and the at least two limiting blocks are respectively disposed at both ends of the first cavity in the first direction. One end of the tray in the first direction contacts and limits at least one of the limiting blocks, and the other end of the tray in the first direction contacts and limits at least another limiting block. Wherein, at least one limiting block has a gap with one side wall of the body in the first direction, and at least another limiting block has a gap with the other side wall of the body in the first direction.
[0011] The pallet is positioned in the first direction by at least two limiting blocks distributed at both ends of the main body. Since the two ends of the pallet are respectively attached to the side walls of the main body in the second direction, the pallet is also positioned in the second direction, thus ensuring the stability of the pallet within the first cavity and preventing shaking. Furthermore, the gaps between the limiting blocks and the adjacent side walls of the main body allow the two ends of the pallet in the first direction to form the second and third gaps with the main body after installation, facilitating the input and output of carrier gas.
[0012] In one possible design, the two side walls of the tray in the second direction are respectively attached to the inner wall of the body, thereby eliminating gaps between the body and each tray in the second direction. This allows the carrier gas to enter each channel only through the air inlet on the tray and carry the precursor out of the tray through the air outlet, thereby improving the utilization rate of the carrier gas and the mass transfer efficiency.
[0013] In one possible design, the tray includes a first sidewall, a second sidewall, a third sidewall, a fourth sidewall, and a base plate. The first and second sidewalls are connected to the base plate at both ends in a first direction, and the third and fourth sidewalls are connected to the base plate at both ends in a second direction. The first, second, third, and fourth sidewalls and the base plate together form a second cavity. Along the third direction, the height of the first sidewall is less than the height of the third and fourth sidewalls, and the end of the first sidewall away from the base plate forms the air inlet with the third and fourth sidewalls. Along the third direction, the height of the second sidewall is less than the height of the third and fourth sidewalls, and the end of the second sidewall away from the base plate forms the air outlet with the third and fourth sidewalls.
[0014] In this configuration, when multiple pallets are stacked within the main body, the bottom plate of the upper pallet can press against the third and fourth side walls of the lower pallet, preventing the bottom plate of the upper pallet from contacting the first and second side walls of the lower pallet. In other words, an air inlet and an air outlet are formed between the bottom plate of the upper pallet and the first and second side walls of the lower pallet. The carrier gas can only enter the channel through the air inlet and carry the precursor out through the air outlet. Thus, the air inlet and air outlet formed by the cooperation of adjacent pallets can constrain the flow path of the carrier gas, reduce space occupation, and prevent the carrier gas from flowing to locations other than the air inlet and air outlet, thereby improving the utilization rate of the carrier gas and the mass transfer efficiency.
[0015] In one possible design, along the third direction, the bottom of the first partition is connected to the base plate, and the top of the first partition protrudes from the first sidewall and the second sidewall.
[0016] When the carrier gas enters the air inlet, it can be guided by each of the first baffles into the channel between any two adjacent first baffles and can be evenly distributed in each channel, thereby ensuring the uniformity of mass transfer in each channel.
[0017] In one possible design, the top of the first partition is flush with the top of the third sidewall and the top of the fourth sidewall, and is intended to contact the bottom of the cover or the bottom of the adjacent upper tray.
[0018] For example, for two adjacent pallets, the bottom of the upper pallet can press against the top of the first partition, the third sidewall, and the fourth sidewall on the pallet of the next lower pallet, thereby sealing the top of the channel in the pallet of the next lower pallet, so that the carrier gas can only flow from the channel, ensuring that the carrier gas has a high utilization rate and can fully contact and mix with the precursor in the channel, thereby improving the mass transfer efficiency.
[0019] For example, for the topmost tray, the cover can press against the top of the first partition, the third sidewall and the fourth sidewall on the topmost tray, thereby sealing the top of the channel of the topmost tray and ensuring that the carrier gas at the topmost tray can only flow through the channel, ensuring that the carrier gas has a high utilization rate and can fully contact and mix with the precursor in the channel, thereby improving the mass transfer efficiency.
[0020] In one possible design, the first partition is a continuous elongated strip structure, and the second partition has the aforementioned gaps.
[0021] In one possible design, the second partition is a continuous elongated strip structure, and the first partition has the aforementioned gaps.
[0022] In one possible design, multiple first partitions and multiple second partitions are provided, with the multiple first partitions evenly spaced apart in the second direction and the multiple second partitions evenly spaced apart in the first direction.
[0023] The first baffles are evenly distributed in parallel, thus forming multiple identical channels. The air inlet and outlet have a certain length in the second direction and can be connected to each channel. Thus, on the one hand, the carrier gas can flow simultaneously in multiple channels, improving mass transfer efficiency, and on the other hand, the carrier gas flow rate can be evenly and consistently distributed among the channels.
[0024] In one possible design, along the third direction, the bottom of the lowest tray is attached to the body, so that the bottom of the lowest tray can be attached to the bottom of the first cavity, which can eliminate the gap between the bottom of the lowest tray and the body, and prevent the carrier gas from passing between the bottom of the lowest tray and the body and not participating in the mass transfer process of mixing with the precursor, thus causing carrier gas waste and reducing mass transfer efficiency.
[0025] In one possible design, the width of the air inlet and the air outlet in the third direction is between 0.5 mm and 2 mm, thereby ensuring the uniform distribution of carrier gas in each tray layer and improving mass transfer efficiency.
[0026] In one possible design, the width of the first gap is between 3 mm and 6 mm, which can ensure sufficient mixing of the carrier gas and the precursor, as well as obtain a high mass transfer rate and mass transfer driving force, thereby improving mass transfer efficiency.
[0027] It should be understood that the above general description and the following detailed description are merely exemplary and do not limit this application. Attached Figure Description
[0028] Figure 1 This is a schematic diagram of the precursor container provided in an embodiment of this application;
[0029] Figure 2 This is a schematic diagram of the structure of a precursor container (hidden cover) provided in one embodiment of this application;
[0030] Figure 3 This is a schematic diagram of the structure of the body provided in the embodiments of this application;
[0031] Figure 4 This is a schematic diagram of the structure of a tray provided in one embodiment of this application;
[0032] Figure 5 This is a schematic diagram of the structure of a cover provided in one embodiment of this application;
[0033] Figure 6 The precursor container provided in the embodiments of this application is in Figure 1 Sectional view at point AA;
[0034] Figure 7 A schematic diagram of the precursor container (hidden cover) provided for another embodiment of this application;
[0035] Figure 8 This is a schematic diagram of the structure of the cover provided in another embodiment of this application;
[0036] Figure 9 The precursor container provided in the embodiments of this application is in Figure 1 Sectional view at point BB;
[0037] Figure 10 An exploded view of the precursor container provided in an embodiment of this application;
[0038] Figure 11 This is a schematic diagram of a structure in which a limit block is provided in the body according to an embodiment of this application;
[0039] Figure 12 for Figure 11 Top view;
[0040] Figure 13 This is a schematic diagram of a structure in which a finite block is provided in the body according to another embodiment of this application;
[0041] Figure 14 for Figure 13 Top view;
[0042] Figure 15 A schematic diagram of the structure of a tray provided in another embodiment of this application;
[0043] Figure 16 A side view of the tray provided in an embodiment of this application.
[0044] Figure label:
[0045] 1-Ontology;
[0046] 11-First cavity;
[0047] 12-Open Terminal;
[0048] 13-Second gap;
[0049] 14 - Third gap;
[0050] 2-Cap;
[0051] 21 - Air intake port;
[0052] 22- Vent hole;
[0053] 3-Tray;
[0054] 31 - Air intake;
[0055] 32 - Air outlet;
[0056] 33-Second cavity;
[0057] 34-channel;
[0058] 35 - First sidewall;
[0059] 36 - Second sidewall;
[0060] 37 - Third sidewall;
[0061] 38 - Fourth sidewall;
[0062] 39 - Base plate;
[0063] 4-First partition;
[0064] 5-Second partition;
[0065] 6- Gap;
[0066] 7-First gap;
[0067] 8-Limit block;
[0068] 81-Gap;
[0069] H1 - Width;
[0070] H2 - Width;
[0071] X - First direction;
[0072] Y - Second direction;
[0073] Z - Third-party orientation.
[0074] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with this application and, together with the description, serve to explain the principles of this application. Detailed Implementation
[0075] To better understand the technical solutions of this application, the embodiments of this application will be described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are merely illustrative of this application and are not intended to limit this application.
[0076] In the description of this application, unless otherwise expressly specified and limited, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance; unless otherwise specified or explained, the term "multiple" refers to two or more; the terms "connected," "fixed," etc., should be interpreted broadly. For example, "connected" can be a fixed connection, a detachable connection, an integral connection, or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.
[0077] In semiconductor manufacturing processes, Chemical Vapor Deposition (CVD) and Atomic Layer Deposition (ALD) require introducing a precursor gaseous source at a specific temperature and pressure into a reaction chamber, where a chemical reaction occurs on the wafer substrate to form a thin film. The precursor is a chemical substance that can participate in the chemical reaction, resulting in the formation of another chemical substance.
[0078] Precursors are typically contained in solid-source containers, and the solid precursor vapor is delivered through sublimation. Specifically, the gas-solid mass transfer rate can be increased by introducing a high-flow-rate carrier gas into the solid-source container to achieve a higher precursor carry-out rate. Therefore, the dynamic mass transfer process of the precursor within the container determines the precursor carry-out rate. However, in some critical processes, many precursor materials with low vapor pressure and solid / viscous liquid state at room temperature are selected. Commonly used containers cannot output stable, high-throughput precursors, making it difficult to meet process requirements.
[0079] Furthermore, for solid source containers that adopt a serpentine flow channel structure, the serpentine flow channel structure will occupy the space originally used for filling the precursor material in the container, resulting in low space utilization of the precursor material. Moreover, the mass transfer driving force of this serpentine flow channel structure is significantly weakened in the later stage, which will lead to uneven consumption of precursor material in the front and rear stages of the flow channel, resulting in low mass transfer efficiency.
[0080] This application provides a precursor container (hereinafter referred to as the container). Figure 1 This is a schematic diagram of the precursor container provided in an embodiment of this application. Figure 2 This is a schematic diagram of the precursor container (with hidden cover) provided in one embodiment of this application, referring to... Figure 1 and Figure 2 The container includes a body 1, a lid 2, and at least one tray 3. Figure 3 This is a schematic diagram of the structure of the body 1 provided in the embodiments of this application, with reference to... Figure 3 The main body 1 has a first cavity 11, which can accommodate one or more trays 3. The top of the first cavity 11 is an open end 12, which is in an open state to facilitate the placement of the trays 3 into the first cavity 11. The cover 2 can be fastened to the top of the main body 1 to close the first cavity 11.
[0081] Reference Figure 2 The tray 3 is placed in the first cavity 11. Figure 4 This is a schematic diagram of the structure of the tray 3 provided in one embodiment of this application, with reference to... Figure 4Along the first direction X, one end of the tray 3 is provided with an air inlet 31, and the other end of the tray 3 is provided with an air outlet 32. The tray 3 is provided with a second cavity 33, which can be used to hold the precursor. At least one first partition 4 is provided in the second cavity 33. The first partition 4 extends along the first direction X and divides the second cavity 33 into multiple channels 34. Each channel 34 can be provided with a precursor. The air inlet 31 is connected to one end of the multiple channels 34, and the air outlet 32 is connected to the other end of the multiple channels 34.
[0082] Figure 5 This is a schematic diagram of the structure of the cover 2 provided in one embodiment of this application, with reference to... Figure 5 The cover 2 is provided with an air inlet 21 and an air outlet 22. The air inlet 21 is connected to the air inlet 31, and the air outlet 22 is connected to the air outlet 32. The air inlet 21 can be used to input carrier gas into the main body 1. The carrier gas can enter each channel 34 through the air inlet 31 and can contact the precursor in each channel 34, thereby bringing the precursor out of the tray 3 through the air outlet 32 and further outputting it to the outside of the container through the air outlet 22. At least one second partition 5 is provided on the side of the cover 2 facing the main body 1. The second partition 5 extends along a second direction Y, which is perpendicular to the first direction X.
[0083] In this embodiment, at least one of the first partition 4 and the second partition 5 is provided with a gap 6, and the first partition 4 and the second partition 5 are inserted into each other through the gap 6, so that at least a portion of the second partition 5 can extend into each channel 34. For example, referring to… Figure 4 Each of the first partitions 4 has multiple gaps 6, as shown in the reference. Figure 5 The second partition 5 of the cover 2 does not have gaps 6, and the second partition 5 can be a continuous long strip structure. Figure 6 The precursor container provided in the embodiments of this application is in Figure 1 The sectional view at point AA is shown in the reference diagram. Figure 6 The second partition 5 can be inserted into the corresponding slot 6 on the first partition 4. For example, Figure 7 This is a schematic diagram of the precursor container (hidden cover 2) provided in another embodiment of this application, referring to... Figure 7 The first partition 4 on the tray 3 has no gaps 6, and the first partition 4 can be a long strip-shaped structure. Figure 8 This is a schematic diagram of the structure of the cover 2 provided in another embodiment of this application, with reference to... Figure 8 Each of the second partitions 5 on the cover 2 can be provided with multiple gaps 6, so that the first partition 4 and the second partition 5 can also be inserted.
[0084] Figure 9 The precursor container provided in the embodiments of this application is in Figure 1 The sectional view at point BB is shown in the reference section. Figure 9 A first gap 7 exists between the bottom surface of channel 34 and the second partition 5 in the third direction Z, which is perpendicular to the first direction X and the second direction Y. That is, the portion of the second partition 5 extending into channel 34 does not contact the bottom surface of channel 34, but is separated by the first gap 7. A portion of this first gap 7 can be used to place the precursor and also to allow the passage of carrier gas. In other words, the bottom of channel 34 can hold the precursor, and the thickness of the precursor in the third direction Z is less than the width of the first gap 7, allowing the portion of the first gap 7 located between the precursor and the second partition 5 to allow the flow of carrier gas. This carrier gas can be an inert gas, such as nitrogen.
[0085] During use, an external device for providing carrier gas can be connected to the air inlet 21 on the cover 2. The carrier gas can enter the precursor container through the air inlet 21, and the carrier gas can further enter the various channels 34 in the tray 3 through the air inlet 31 on the tray 3. Since the precursor is provided at the bottom of the channel 34, the carrier gas can come into contact with and mix with the precursor when it passes through, and the precursor can be output from the air outlet 32 of the tray 3 along with the carrier gas, and further output to the outside through the air outlet 22 on the cover 2.
[0086] At least a portion of the second partition 5 can extend into the channel 34, thereby dividing the channel 34 into multiple small spaces in the first direction X. The carrier gas can enter each small space through the first gap 7 and form vortices upon contact with the sidewalls of the small spaces, increasing the mixing of the precursor in the gas phase, thereby increasing the mass transfer driving force and accelerating the mass transfer rate. In addition, due to the small width of the first gap 7, the flow velocity of the carrier gas increases when it passes through the first gap 7, thereby reducing the thickness of the mass transfer boundary layer.
[0087] Therefore, the precursor container provided in this application embodiment can form a uniform and stable turbulent flow field within the tray 3, increasing the mass transfer driving force of the precursor and thus achieving a higher precursor carry-out amount. It is applicable to various precursor materials; optionally, the precursor can be a Newtonian liquid precursor, a non-Newtonian liquid precursor, or an extremely low vapor pressure solid precursor. Simultaneously, the carrier gas can flow in multiple channels 34 formed in the tray 3, mixing with the precursor in each channel 34 and carrying it out of the container at the same time, thereby improving the efficiency and stability of the carried-out vapor. Furthermore, both the first partition 4 and the second partition 5 are plate-like structures with a small thickness, reducing the space occupied by the carrier gas flow. While ensuring the mixing effect of the carrier gas and the precursor, this facilitates the miniaturization design of the container.
[0088] As a specific implementation method, refer to Figure 9The width H2 of the first gap 7 needs to be within an appropriate range to ensure efficient mass transfer. If the width H2 of the first gap 7 is too large, for example, greater than 6 mm, it will cause excessive flow of carrier gas in channel 34, and some carrier gas will not be fully mixed with the precursor before flowing out from the outlet 32, resulting in underutilization of carrier gas and reduced mass transfer efficiency. If the width H2 of the first gap 7 is too small, for example, less than 3 mm, the resistance to carrier gas flow will be large, which is not conducive to improving the mass transfer rate of carrier gas and reduces mass transfer efficiency. Therefore, in this embodiment, the width H2 of the first gap 7 can be between 3 mm and 6 mm, so as to ensure sufficient mixing of carrier gas and precursor, and obtain a high mass transfer rate and mass transfer driving force, thereby improving mass transfer efficiency. Specifically, the width H2 of the first gap 7 can be 3 mm, 4 mm, 5 mm or 6 mm.
[0089] As a specific implementation method, refer to Figure 4 and Figure 5 Multiple first partitions 4 and multiple second partitions 5 can be provided. The multiple first partitions 4 are evenly spaced in the second direction Y, and the multiple second partitions 5 are evenly spaced in the first direction X. The multiple first partitions 4 are evenly distributed in parallel, thereby forming multiple identical channels 34. The air inlet 31 and the air outlet 32 have a certain length in the second direction Y and can communicate with each channel 34. Thus, on the one hand, the carrier gas can flow simultaneously in multiple channels 34, improving mass transfer efficiency, and on the other hand, the carrier gas flow rate can be evenly distributed among the channels 34.
[0090] As a specific implementation method, Figure 10 An exploded view of the precursor container provided in the embodiments of this application, referring to... Figure 10 Multiple trays 3 can be provided, and multiple trays 3 are stacked in the third direction Z. At least some of the trays 3 have a second partition 5 on the side facing away from the second cavity 33. The second partition 5 on the upper tray 3 is connected to the first partition 4 on the tray 3 on the lower adjacent layer through a gap 6.
[0091] The connection between adjacent trays 3 via the first partition 4 and the second partition 5 can be the same as the connection between tray 3 and cover 2 via the first partition 4 and the second partition 5. For example, the second partition 5 in the upper tray 3 can have a gap 6, allowing the first partition 4 in the lower tray to be inserted into the gap 6; similarly, the first partition 4 in the lower tray 3 can have a gap 6, allowing the second partition 5 in the upper tray to be inserted into the gap 6. Carrier gas can enter each channel 34 through the air inlet 31 on each tray 3, mix with the precursor in the channel 34, and then be output to the outside sequentially through the air outlet 32 on the tray 3 and the air outlet 22 on the cover 2. Thus, by stacking multiple trays 3, the number of channels 34 can be increased, thereby increasing the amount of precursor carried out by the carrier gas and improving mass transfer efficiency.
[0092] The top tray 3 can be connected to the first partition 4 and the second partition 5 on the cover 2. The flow of the carrier between the top tray 3 and the cover 2 is the same as the flow between two adjacent trays 3, which will not be described in detail here.
[0093] As a specific implementation method, refer to Figure 2 The two side walls of the tray 3 in the second direction Y are respectively attached to the inner wall of the body 1.
[0094] Each tray 3 can be placed inside the first cavity 11 of the main body 1. The outer side wall of each tray 3 in the second direction Y can fit against the inner side wall of the main body 1, so that there is no gap between the main body 1 and each tray 3 in the second direction Y. This allows the carrier gas to enter into each channel 34 only through the air inlet 31 on the tray 3, and carry the precursor out of the tray 3 through the air outlet 32, thereby improving the utilization rate of the carrier gas and improving the mass transfer efficiency.
[0095] As a specific implementation method, refer to Figure 6 Along the first direction X, there is a second gap 13 between the end of the tray 3 with the air inlet 31 and the body 1, and a third gap 14 between the end of the tray 3 with the air outlet 32 and the body 1. The air inlet 21 is connected to the second gap 13, and the air outlet 22 is connected to the third gap 14.
[0096] When carrier gas is introduced into the container, it can enter the second gap 13 through the air inlet 21. Since the space formed by the body 1 and each tray 3 at the second gap 13 is small, when a large amount of carrier gas rushes in, it can quickly fill the second gap 13 and generate relatively high pressure. This allows the carrier gas to enter the air inlets 31 of each tray 3 evenly, generating a large mass transfer driving force and mass transfer velocity, thereby improving mass transfer efficiency. Furthermore, the carrier gas mixed with the precursor can be quickly output from the air outlets 32 of each tray 3 to the second gap 13, and can be further transported to the outside through the air outlets 22 on the cover 2.
[0097] As a specific implementation method, Figure 11 This is a schematic diagram of the structure of the body 1 with a limiting block 8 provided in one embodiment of this application. Figure 12 for Figure 11 Top view, refer to Figure 11 and Figure 12 At least two limiting blocks 8 are provided within the first cavity 11, and the at least two limiting blocks 8 are respectively disposed at both ends of the first cavity 11 in the first direction X. One end of the tray 3 in the first direction X contacts and limits at least one limiting block 8, and the other end of the tray 3 in the first direction X contacts and limits at least another limiting block 8. At least one limiting block 8 has a gap 81 between itself and one side wall of the body 1 in the first direction X, and at least another limiting block 8 has a gap 81 between itself and the other side wall of the body 1 in the first direction X. For example, referring to… Figure 12 The limiting block 8 can be positioned at a symmetrical center of the body 1. For example, Figure 13 This is a schematic diagram of the structure of the body 1 with finite block 8 provided in another embodiment of this application. Figure 14 for Figure 13 Top view, refer to Figure 13 and Figure 14 The limiting block 8 can also be located at the two corners of the diagonal of the body 1. In some other embodiments, the limiting block 8 can also be located at all four corners, or at other locations that can clamp and fix the tray 3.
[0098] The pallet 3 is positioned in the first direction X by at least two limiting blocks 8 distributed at both ends of the main body 1. Since the two ends of the pallet 3 in the second direction Y are respectively attached to the sidewalls of the main body 1, the pallet 3 is also positioned in the second direction Y, thus ensuring the stability of the pallet 3 within the first cavity 11 and preventing shaking. Furthermore, the gap 81 between the limiting blocks 8 and the adjacent sidewalls of the main body 1 allows the two ends of the pallet 3 in the first direction X to form the second gap 13 and the third gap 14 with the main body 1 after installation, facilitating the input and output of carrier gas.
[0099] As a specific implementation method, Figure 15 This is a schematic diagram of the structure of the tray 3 provided in another embodiment of this application, with reference to... Figure 4 and Figure 15 The tray 3 includes a first sidewall 35, a second sidewall 36, a third sidewall 37, a fourth sidewall 38, and a base plate 39. The first sidewall 35 and the second sidewall 36 are connected to the two ends of the base plate 39 in the first direction X, and the third sidewall 37 and the fourth sidewall 38 are connected to the two ends of the base plate 39 in the second direction Y. The first sidewall 35, the second sidewall 36, the third sidewall 37, the fourth sidewall 38, and the base plate 39 together form a second cavity 33. In this embodiment, the tray 3 forms a cuboid structure with four sidewalls and a base plate 39, so that the four sidewalls and the base plate 39 form a second cavity 33 that can accommodate the precursor.
[0100] Figure 16 A side view of the tray 3 provided in an embodiment of this application, with reference to... Figure 16 Along the third direction Z, the height of the second sidewall 36 is less than the height of the third sidewall 37 and the fourth sidewall 38, and the end of the second sidewall 36 away from the bottom plate 39 forms an air outlet 32 between the third sidewall 37 and the fourth sidewall 38; correspondingly, along the third direction Z, the height of the first sidewall 35 is less than the height of the third sidewall 37 and the fourth sidewall 38, and the end of the first sidewall 35 away from the bottom plate 39 forms an air inlet 31 between the third sidewall 37 and the fourth sidewall 38.
[0101] When multiple trays 3 are stacked in the body 1, the bottom plate 39 of the upper tray 3 can press against the third side wall 37 and the fourth side wall 38 of the lower tray 3, so that the bottom plate 39 of the upper tray 3 does not contact the first side wall 35 and the second side wall of the lower tray. That is to say, an air inlet 31 and an air outlet 32 are formed between the bottom plate 39 of the upper tray 3 and the first side wall 35 and the second side wall 36 of the lower tray 3. The carrier gas can only enter the channel 34 through the air inlet 31 and carry the precursor out through the air outlet 32. Thus, the air inlet 31 and the air outlet 32 formed by the cooperation of two adjacent trays 3 can constrain the flow path of the carrier gas, reduce the space occupation, and prevent the carrier gas from flowing to a position other than the air inlet 31 and the air outlet 32, thereby improving the utilization rate of the carrier gas and improving the mass transfer efficiency.
[0102] In order to improve the structural reliability of the pallet 3, the pallet 3 can be a one-piece molded structure. That is, during the processing and manufacturing of the pallet 3, the above-mentioned side walls and bottom plate 39 can be integrally molded, and the first partition 4 can also be integrally molded.
[0103] As a specific implementation method, refer to Figure 16Along the third direction Z, the bottom of the first partition 4 is connected to the bottom plate 39, and the top of the first partition 4 protrudes from the first side wall 35 and the second side wall 36. When the carrier gas enters the air inlet 31, the carrier gas can be guided by each of the first partitions 4 into the channel 34 between any two adjacent first partitions 4, and can be evenly distributed in each channel 34, thereby ensuring the uniformity of mass transfer in each channel 34.
[0104] As a specific implementation method, refer to Figure 16 The top of the first partition 4 is flush with the top of the third side wall 37 and the top of the fourth side wall 38, and is used to contact the bottom of the cover 2 or the bottom of the adjacent upper tray 3.
[0105] For example, for two adjacent trays 3, the bottom of the upper tray 3 can press against the top of the first partition 4, the third side wall 37 and the fourth side wall 38 on the lower adjacent tray 3, thereby closing the top of the channel 34 in the lower adjacent tray 3, so that the carrier gas can only flow from the channel 34, ensuring that the carrier gas has a high utilization rate and can fully contact and mix with the precursor in the channel 34, thereby improving the mass transfer efficiency.
[0106] For example, for the topmost tray 3, the cover 2 can press against the top of the first partition 4, the third side wall 37 and the fourth side wall 38 on the topmost tray 3, thereby sealing the top of the channel 34 of the topmost tray 3. This also ensures that the carrier gas at the topmost tray 3 can only flow through the channel 34, ensuring that the carrier gas has a high utilization rate and can fully contact and mix with the precursor in the channel 34, thereby improving the mass transfer efficiency.
[0107] As a specific implementation method, refer to Figure 6 Along the third direction Z, the bottom of the lowest tray 3 is in contact with the body 1. In this embodiment, the bottom of the lowest tray 3 can be a plane, and the bottom of the first cavity 11 can also be a plane, so that the bottom of the lowest tray 3 can be in contact with the bottom of the first cavity 11, which can eliminate the gap between the bottom of the lowest tray 3 and the body 1, and prevent the carrier gas from passing between the bottom of the lowest tray 3 and the body 1 and not participating in the mass transfer process of mixing with the precursor, resulting in carrier gas waste and reduced mass transfer efficiency.
[0108] As a specific implementation method, refer to Figure 16The width H1 of the inlet 31 and outlet 32 in the third direction Z needs to be within an appropriate range to ensure that the carrier gas is evenly distributed in each channel 34 and can be fully mixed with the precursor to ensure mass transfer efficiency. If the width H1 of the inlet 31 and outlet 32 is too large, for example, greater than 2 mm, the carrier gas will tend to flow from the inlet 31 closer to the inlet hole 21. For example, the carrier gas input from the inlet hole 21 on the cover 2 will mostly pass through the inlet 31 on the top tray 3, while the flow rate of carrier gas through the lower trays 3 is less. This results in uneven distribution of carrier gas in each tray 3 and reduces mass transfer efficiency. On the other hand, if the width H1 of the inlet 31 and outlet 32 is too small, for example, less than 0.5 mm, the resistance of the carrier gas at each inlet 31 will be too large, which is not conducive to the flow of carrier gas. Therefore, in this embodiment, the width H1 of the air inlet 31 and the air outlet 32 in the third direction Z can be between 0.5mm and 2mm, thereby ensuring the uniform distribution of carrier gas in each tray 3 and improving mass transfer efficiency. Specifically, the width H1 of the air inlet 31 and the air outlet 32 in the third direction Z can be 0.5mm, 0.8mm, 1.1mm, 1.4mm, 1.7mm, or 2mm.
[0109] The above are merely preferred embodiments of this application and are not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.
Claims
1. A precursor container, characterized in that, include: The main body, wherein a first cavity is provided within the main body; At least one tray is disposed in the first cavity. Along a first direction, one end of the tray is provided with an air inlet and the other end of the tray is provided with an air outlet. The tray contains a second cavity, in which at least one first partition is disposed. The first partition extends along the first direction and divides the second cavity into multiple channels. The air inlet is connected to one end of the multiple channels, and the air outlet is connected to the other end of the multiple channels. A cover body is fastened to the main body. The cover body is provided with an air inlet and an air outlet. The air inlet is connected to the air inlet port, and the air outlet port is connected to the air outlet port. At least one second partition is provided on the side of the cover body facing the main body. The second partition extends along a second direction, which is perpendicular to the first direction. At least one of the first partition and the second partition is provided with a gap, the first partition and the second partition are inserted through the gap, and there is a first gap between the bottom surface of the channel and the second partition in a third direction, the third direction being perpendicular to the first direction and the second direction.
2. The precursor container according to claim 1, characterized in that, The tray is provided in multiple ways, and the multiple trays are stacked on top of the third party; At least a portion of the tray has a second partition on the side facing away from the second cavity, and the second partition of the upper tray is inserted into the first partition of the tray in the adjacent lower layer through the gap.
3. The precursor container according to claim 1 or 2, characterized in that, Along the first direction, there is a second gap between the end of the tray where the air inlet is located and the body, and a third gap between the end of the tray where the air outlet is located and the body. The air inlet communicates with the second gap, and the air outlet communicates with the third gap.
4. The precursor container according to claim 3, characterized in that, At least two limiting blocks are provided in the first cavity, and the at least two limiting blocks are respectively provided at both ends of the first cavity in the first direction. The tray is in contact with at least one of the limiting blocks at one end in the first direction and is limited, and the tray is in contact with at least another limiting block at the other end in the first direction. Wherein, at least one of the limiting blocks has a gap between itself and one side wall of the body in the first direction, and at least one other limiting block has a gap between itself and the other side wall of the body in the first direction.
5. The precursor container according to claim 3, characterized in that, The two side walls of the tray in the second direction are respectively attached to the inner wall of the body.
6. The precursor container according to any one of claims 1-2 and 4-5, characterized in that, The tray includes a first sidewall, a second sidewall, a third sidewall, a fourth sidewall, and a bottom plate. The first sidewall and the second sidewall are connected to the bottom plate at both ends in the first direction, and the third sidewall and the fourth sidewall are connected to the bottom plate at both ends in the second direction. The first sidewall, the second sidewall, the third sidewall, the fourth sidewall, and the bottom plate together form a second cavity. Along the third direction, the height of the first sidewall is less than the height of the third sidewall and the fourth sidewall, and the end of the first sidewall away from the bottom plate forms the air inlet between the third sidewall and the fourth sidewall; Along the third direction, the height of the second sidewall is less than the height of the third and fourth sidewalls, and the end of the second sidewall away from the bottom plate forms the air outlet between the third and fourth sidewalls.
7. The precursor container according to claim 6, characterized in that, Along the third direction, the bottom of the first partition is connected to the base plate, and the top of the first partition protrudes from the first side wall and the second side wall.
8. The precursor container according to claim 7, characterized in that, The top of the first partition is flush with the top of the third sidewall and the top of the fourth sidewall, and is intended to contact the bottom of the cover or the bottom of the adjacent upper tray.
9. The precursor container according to any one of claims 1-2, 4-5, and 7-8, characterized in that, The first partition is a continuous long strip structure, and the second partition has the aforementioned gap.
10. The precursor container according to any one of claims 1-2, 4-5, and 7-8, characterized in that, The second partition is a continuous long strip structure, and the first partition has the aforementioned gap.
11. The precursor container according to any one of claims 1-2, 4-5, and 7-8, characterized in that, Multiple first partitions and multiple second partitions are provided, with the multiple first partitions evenly spaced in the second direction and the multiple second partitions evenly spaced in the first direction.
12. The precursor container according to any one of claims 1-2, 4-5, and 7-8, characterized in that, Along the third direction, the bottom of the tray at the bottom layer is in contact with the body.
13. The precursor container according to any one of claims 1-2, 4-5, and 7-8, characterized in that, The width of the air inlet and the air outlet in the third direction is between 0.5mm and 2mm.
14. The precursor container according to any one of claims 1-2, 4-5, and 7-8, characterized in that, The width of the first gap is between 3mm and 6mm.