Self-cleaning air conditioning equipment for wafer film thickness detection laboratory

Abstract

The present application relates to air purification and precision instrument environment control technical field, provide a kind of for wafer film thickness detection laboratory Self-cleaning air conditioning equipment, comprising: sequentially arranged from top to bottom purification pipeline, base, sequentially installed with filter screen, non-woven filter bag, condenser, activated carbon filter plate one, electric heater and fan in the purification pipeline, the base is provided with replacement module, the two sides of the purification pipeline outer wall are provided with cleaning device one, and the purification pipeline is provided with cleaning device two at non-woven filter bag;The present application can filter some chemical gas generated in laboratory by activated carbon filter plate one, improve the effect of purification, the replacement of activated carbon filter plate one can be realized by replacement module, prolong the service life of equipment;Dust on filter screen is cleaned by cleaning device one;Non-woven filter bag is cleaned by cleaning device two, improve the self-cleaning effect of air conditioning equipment.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of air purification and precision instrument environment control technology, in particular to a self-cleaning air conditioning equipment for a wafer film thickness detection laboratory. BACKGROUND

[0002] Wafer refers to a silicon wafer used for manufacturing silicon semiconductor circuits, wafer film thickness detection is an important detection link in the semiconductor manufacturing process, wafer film thickness detection needs to be carried out in a highly clean environment to avoid interference of small particulate matter, dust, chemical pollutants and the like in the air on the wafer surface and the detection process; at the same time, due to factors such as personnel activities and equipment operation inside the laboratory, various pollutants and heat will be continuously generated, if these pollutants cannot be treated in time, they will accumulate in the laboratory, further affecting the detection environment, in addition, fluctuations in temperature and humidity will also adversely affect the performance and accuracy of the detection equipment, so the air conditioning equipment needs to have precise temperature and humidity control capability.

[0003] Conventional household air conditioning equipment mostly sets a filter screen at the air inlet to intercept dust, so as to prevent dust from falling on the surface of the condenser and affecting the use effect of the air conditioner, while the wafer film thickness detection laboratory has a higher requirement for air cleanliness, the filter screen of the conventional air conditioner is often difficult to meet the cleanliness requirement in the wafer laboratory, and better filtering equipment is needed to filter the air, but the filter equipment will accumulate a lot of dust after a long time of filtering, resulting in low purification quality; at the same time, the accumulated dust will cause the reduction of the air supply, and further cause the reduction of the temperature regulation accuracy; and cleaning personnel are needed to clean, which wastes a lot of time and energy.

[0004] Therefore, the present application provides a self-cleaning air conditioning equipment for a wafer film thickness detection laboratory. SUMMARY

[0005] The present application provides a self-cleaning air conditioning equipment for a wafer film thickness detection laboratory, which improves the self-cleaning effect of the self-cleaning air conditioning equipment by setting a cleaning device, so as to solve the problems in the background art.

[0006] The technical scheme of the present application is as follows:

[0007] A kind of self-cleaning air conditioning equipment for wafer film thickness detection laboratory, comprising: the bottom of the purification pipeline that is arranged in sequence up and down, bottom, the purification pipeline two ends are provided with air inlet and air outlet respectively, filter screen, non-woven filter bag, condenser, activated carbon filter plate one, electric heater and fan are installed in sequence in the purification pipeline, installation groove is opened between the bottom of the purification pipeline and the bottom, and the bottom is provided with a replacement module, the two sides of the outer wall of the purification pipeline are provided with cleaning device one, the cleaning device one is between air inlet and filter screen, cleaning device two is provided in the purification pipeline and at non-woven filter bag place;

[0008] The replacement module can replace activated carbon filter plate one in the purification pipeline through installation groove, to further prolong the use time of the equipment, improve the filtering effect;

[0009] The cleaning device one is used for cleaning filter screen;

[0010] The cleaning device two is used for cleaning non-woven filter bag.

[0011] Preferably, the bottom is provided with a sealing door on one side.

[0012] Preferably, the replacement module includes a lead screw one, a motor one and an electric push rod, the lead screw one is rotatably connected to the top and bottom of the bottom at both ends, the motor one and the electric push rod are installed in the bottom, the motor one drives the lead screw one to rotate through a gear, a stop block is threadedly connected to the lead screw one, and the stop block is slidably connected to the inner wall of the bottom, the stop block and the installation groove are located on the same plane, and the output end of the electric push rod is fixedly connected to a limiting plate.

[0013] Preferably, the limiting plate is clamped with a plurality of sealing plates one through a plurality of protrusions, a plurality of the sealing plates one are located on the side of the bottom away from the air outlet, the upper edge of the sealing plate one is attached to the top of the bottom, the sealing plate one is a-shaped, a sealing plate two is slidably connected in the sealing plate one, the sealing plate two is L-shaped, activated carbon filter plate two is stored between the sealing plate one and the sealing plate two, one sealing plate two close to the installation groove is located on the same plane as the installation groove, and the width of the sealing plate two is the same as the width of the installation groove.

[0014] Preferably, the cleaning device one includes two fixed frames fixedly connected to the two sides of the purification pipeline, the fixed frames are communicated with the purification pipeline, the inner side of the opening at both ends of the fixed frame is rotatably connected with a baffle, the fixed frame is provided with a motor two for driving the baffle to rotate, a fixed plate one is fixedly connected to the baffle close to the inside of the purification pipeline, and the fixed plate one is located in the fixed frame.

[0015] The fixed plate one side is rotatably connected with connecting rod one and connecting rod two, one end of the connecting rod one is connected with a synchronous wheel, the synchronous wheel is located on the other side of the fixed plate one and is provided with a plurality of synchronous wheels, a plurality of synchronous wheels are installed on the synchronous belt, a motor three for driving one of the synchronous wheels to rotate is installed on the fixed plate one, the connecting rod one and the connecting rod two are connected with a connecting rod three, one end of the connecting rod three is rotatably connected with the other end of the connecting rod one, and the other end is rotatably connected with the middle part of the connecting rod two, the connecting rod two is slidably connected with a sliding rod, the sliding rod extends to the outside of the connecting rod two, a limiting block is fixedly connected to the fixed plate one, an arc-shaped groove is formed in the limiting block, and the top end and the bottom end of the arc-shaped groove are close to the side of the brush, the limiting block is located on one side of the connecting rod two, one end of the sliding rod in the connecting rod two is fixedly connected with a limiting column, a hollow groove is formed in one side of the connecting rod two, and the limiting column passes through the hollow groove and is located in the arc-shaped groove.

[0016] Preferably, one end of the connecting rod three located outside the connecting rod two is fixedly connected with an automatic telescopic rod, a brush two is rotatably connected between the two ends of the automatic telescopic rod, and one end of the automatic telescopic rod is provided with a motor four for driving the brush two to rotate, a plurality of fans are installed in the fixed frame of one of the cleaning devices one, and the fans are located between the brush two and the baffle away from the purification pipeline.

[0017] Preferably, the cleaning device two comprises a fixed plate two fixedly connected in the purification pipeline and a fixed frame slidably connected in the purification pipeline, a circular groove one and a circular groove two are formed in the fixed plate two and the fixed frame respectively, the non-woven fabric filter bag is fixedly connected with the fixed plate two and the fixed frame at two ends and located in the circular groove one and the circular groove two, a fixed rod is fixedly connected to one side of the fixed plate two, one end of the fixed rod penetrates through the fixed frame and is fixedly connected with a stop block at the penetrating end, a spring is sleeved on the outer side of the fixed rod and between the fixed plate two and the fixed frame, the cleaning device two further comprises a square groove formed above the purification pipeline, an inclined conveying belt and a motor five for driving the conveying belt are installed in the square groove, and a plurality of push plates are fixedly connected to the conveying belt.

[0018] Compared with the prior art, the present application has the following beneficial effects:

[0019] 1、The active carbon filter plate one can filter some chemical gases generated in the laboratory, improve the purification effect, and the replacement of the active carbon filter plate one can be realized through the material replacement module, thereby prolonging the service life of the equipment and further improving the purification effect.

[0020] 2、The non-woven fabric filter bag is arranged to filter the air, which can achieve better purification effect and meet the cleanliness requirement of the wafer film thickness laboratory.

[0021] 2, The application improves the air purification effect, reduces the manual cleaning work by cleaning the dust on the filter screen of the cleaning device one, and improves the self-purification effect of the air conditioning equipment by cleaning the non-woven fabric filter bag of the cleaning device two. BRIEF DESCRIPTION OF DRAWINGS

[0022] Figure 1 is a perspective view of the device of the application;

[0023] Figure 2 is a cross-sectional view of the device of the application;

[0024] Figure 3 is a cross-sectional view of the device of the application;

[0025] Figure 4 is a front perspective view of the updating device of the application;

[0026] Figure 5 is a side perspective view of the updating device of the application;

[0027] Figure 6 is a perspective view of the material replacement module of the application;

[0028] Figure 7 is a perspective view of the structure on the air supply pipe of the application;

[0029] Figure 8 is a partial enlarged view of A in the application Figure 7 ;

[0030] Figure 9 is a perspective view of the cleaning device one of the application;

[0031] Figure 10 is a cross-sectional view of the brush of the application;

[0032] Figure 11 is a cross-sectional perspective view of the cleaning device two of the application.

[0033] In the drawings:

[0034] 1. Purification duct; 2. Base; 21. Mounting slot; 22. Sealing door; 3. Air inlet; 4. Air outlet; 5. Filter screen; 6. Non-woven filter bag; 7. Condenser; 8. Activated carbon filter plate one; 9. Electric heater; 10. Fan; 11. Material changing module; 111. Lead screw one; 112. Motor one; 113. Electric push rod; 114. Stop block; 115. Limiting plate; 116. Sealing plate one; 117. Sealing plate two; 118. Activated carbon filter plate two; 12. Cleaning device one; 121. Fixing frame; 122. Baffle; 123. Motor two; 124. Fixing plate one; 125. Synchronous pulley; 126. 127. Synchronous belt; 128. Motor 3; 129. Link 1; 120. Link 2; 1211. Link 3; 1212. Slide rod; 1213. Limit block; 1214. Limit post; 1215. Automatic telescopic rod; 1216. Brush; 1217. Motor 4; 1218. Fan; 1219. Arc groove; 1210. Empty groove; 13. Cleaning device 2; 131. Fixing plate 2; 132. Fixing frame; 133. Circular groove 1; 134. Circular groove 2; 135. Fixing rod; 136. Stop block; 137. Spring; 138. Square groove; 139. Conveyor belt; 1310. Motor 5; 1311. Push plate. Detailed Implementation

[0035] The embodiments of the present invention will be described in further detail below with reference to the accompanying drawings and examples. The following examples are for illustrative purposes only and should not be construed as limiting the scope of the invention.

[0036] Example 1:

[0037] like Figures 1-10 As shown, the present invention provides a self-cleaning air conditioning device for a wafer film thickness testing laboratory, comprising: a purification pipe 1 and a base 2 arranged sequentially from top to bottom, wherein an air inlet 3 and an air outlet 4 are respectively provided at both ends of the purification pipe 1, and a filter screen 5, a non-woven filter bag 6, a condenser 7, an activated carbon filter plate 8, an electric heater 9 and a fan 10 are sequentially installed inside the purification pipe 1, an installation groove 21 is provided between the bottom of the purification pipe 1 and the base 2, and a material replacement module 11 is provided inside the base 2, a cleaning device 12 is provided on both sides of the outer wall of the purification pipe 1, the cleaning device 12 is located between the air inlet 3 and the filter screen 5, and a cleaning device 23 is provided inside the purification pipe 1 and located at the non-woven filter bag 6;

[0038] The material replacement module 11 can replace the activated carbon filter plate 8 in the purification pipeline 1 through the installation slot 21, thereby extending the service life of the equipment and improving the filtration effect.

[0039] Cleaning device 12 is used to clean filter screen 5;

[0040] Cleaning device 213 is used to clean the non-woven filter bag 6.

[0041] A sealed door 22 is provided on one side of the base 2 for inspecting the material replacement module 11 or replacing the activated carbon filter plate 118 inside the material replacement module 11.

[0042] like Figures 1-3 As shown, when this air conditioning equipment is working, the fan 10 draws the air in the laboratory from the air inlet 3 into the purification pipe 1, and filters out impurities in the air through the filter screen 5, non-woven filter bag 6, and activated carbon filter plate 8. At the same time, the condenser 7 regulates the temperature of the indoor air to reach the temperature required for the experiment. Finally, the purified air is sent back to the room from the air outlet 4.

[0043] It should be noted that when heating is performed, electric heater 9 is used to assist in heating, thereby reducing the energy consumption of the air conditioning equipment.

[0044] The material changing module 11 includes a lead screw 111, a motor 112, and an electric push rod 113. The two ends of the lead screw 111 are rotatably connected to the top and bottom of the base 2, respectively. The motor 112 and the electric push rod 113 are installed inside the base 2. The motor 112 drives the lead screw 111 to rotate through gears. A stop block 114 is threaded on the lead screw 111, and the stop block 114 is slidably connected to the inner wall of the base 2. The stop block 114 and the mounting groove 21 are located on the same plane. The output end of the electric push rod 113 is fixedly connected to a limit plate 115.

[0045] The limiting plate 115 is connected to multiple sealing plates 116 by multiple protrusions. The sealing plates 116 are located on the side of the base 2 away from the air outlet 4, and the upper edge of the sealing plates 116 is in contact with the top of the base 2. The sealing plates 116 are C-shaped, and a sealing plate 117 is slidably connected inside the sealing plates 116. The sealing plate 117 is L-shaped. An activated carbon filter plate 118 is placed inside the sealing plates 116 and the sealing plate 117. Near the mounting groove 21, one sealing plate 117 is on the same plane as the mounting groove 21, and the width of the sealing plate 117 is the same as the width of the mounting groove 21.

[0046] like Figures 4-6As shown, the abutting block 114 abuts below the sealing plate two 117, when replacement is needed, the motor one 112 drives the screw rod one 111 to rotate through the gear drive, since the abutting block 114 is threadedly connected with the screw rod one 111 and is slidingly connected with the inner wall of the base 2, thus the screw rod one 111 drives the abutting block 114 to descend when rotating, at the same time, the activated carbon filter plate one 8 in the purification pipeline 1 follows the sealing plate two 117 to descend, until the sealing plate two 117 is completely slid into the sealing plate one 116, then the electric push rod 113 is started to move the sealing plate one 116 and the sealing plate two 117 through the limiting plate 115, so that the adjacent sealing plate one 116 and the sealing plate two 117 are moved to the installation groove 21, then the abutting block 114 is started to ascend by the motor one 112, so that the abutting block 114 lifts the sealing plate two 117 to the installation groove 21, and drives the activated carbon filter plate two 118 to enter into the purification pipeline 1, the replacement is completed, and the side of the sealing plate two 117 is engaged with the installation groove 21, so as to close the installation groove 21 through the sealing plate two 117, to avoid the air in the purification pipeline 1 from entering the chamber two 32 to consume the activated carbon filter plate two 118.

[0047] Due to the complexity of the laboratory environment, some chemical gases generated in the laboratory can be adsorbed by the activated carbon filter plate one 8, improving the purification effect, the activated carbon filter plate one 8 can be replaced through the replacement module 11, prolonging the use time of the equipment, and further improving the purification effect.

[0048] Embodiment two:

[0049] The cleaning device one 12 includes two fixed frames 121 fixedly connected on both sides of the purification pipeline 1, and the fixed frames 121 are communicated with the purification pipeline 1, the inner sides of the two ends of the fixed frame 121 are rotatably connected with baffles 122, the fixed frame 121 is provided with a motor two 123 for driving the baffle 122 to rotate, the baffle 122 close to the inside of the purification pipeline 1 is fixedly connected with a fixed plate one 124 located in the fixed frame 121.

[0050] The fixed plate one 124 is rotatably connected with a connecting rod one 128 and a connecting rod two 129, one end of the connecting rod one 128 is connected with a synchronous wheel 125, the synchronous wheel 125 is located on the other side of the fixed plate one 124 and is provided with a plurality of synchronous wheels 125, a synchronous belt 126 is installed on the plurality of synchronous wheels 125, a motor three 127 for driving one of the synchronous wheels 125 to rotate is installed on the fixed plate one 124, a connecting rod three 1210 is connected between the connecting rod one 128 and the connecting rod two 129, one end of the connecting rod three 1210 is rotatably connected with the other end of the connecting rod one 128, and the other end is rotatably connected with the middle part of the connecting rod two 129, a sliding rod 1211 is slidably connected in the connecting rod two 129, the sliding rod 1211 extends out of the connecting rod two 129, a limiting block 1212 is fixedly connected on the fixed plate one 124, an arc-shaped groove 1218 is formed in the limiting block 1212, and the top end and the bottom end of the arc-shaped groove 1218 are close to one side of the brush 1215, the limiting block 1212 is located on one side of the connecting rod two 129, a limiting column 1213 is fixedly connected on one end of the sliding rod 1211 in the connecting rod two 129, an empty groove 1219 is formed on one side of the connecting rod two 129, the limiting column 1213 passes through the empty groove 1219 and is located in the arc-shaped groove 1218.

[0051] One end of the connecting rod three 1210 fixedly connected with an automatic telescopic rod 1214 outside the connecting rod two 129, a brush 1215 is rotatably connected between the two ends of the automatic telescopic rod 1214, a motor four 1216 for driving the brush 1215 to rotate is installed on one end of the automatic telescopic rod 1214, a plurality of fans 1217 are installed in the fixed frame 121 in one of the cleaning devices one 12, and the fans 1217 are located between the brush 1215 and the baffle 122 away from the purification pipeline 1.

[0052] As shown in Figures 7-9 , during use of the cleaning device one 12, the motor two 123 is started to drive the baffle 122 to rotate, so that the two baffles 122 close to the purification pipeline 1 are rotated into the purification pipeline 1 to close the air inlet 3, and at the same time, the two baffles 122 away from the purification pipeline 1 are rotated out of the fixed frame 121; at the same time, the brush 1215 on the fixed plate one 124 faces the filter screen 5; as shown in Figure 8As shown, in the cleaning process, the motor three 127 drives a synchronous wheel 125 to rotate, and through the synchronous belt 126 drives multiple synchronous wheels 125 to rotate synchronously, the synchronous wheel 125 drives the connecting rod one 128 to rotate, and through the connecting rod three 1210 connected with the connecting rod one 128 and the connecting rod two 129 drives the connecting rod two 129 to rotate: in the process of rotating the connecting rod one 128, the connecting rod two 129 can be pushed up or pulled down by the connecting rod three 1210, the connecting rod two 129 is intermittently swung up and down by the continuous rotation of the connecting rod one 128, and the reciprocating swing of the connecting rod two 129 is realized by the motor three 127, so that the brush 1215 repeatedly cleans the impurities and dust on the filter screen 5, and the cleaning efficiency is improved.

[0053] It should be noted that in the process of swinging the connecting rod two 129, the brush 1215 moves in a circular trajectory, which causes the brush 1215 to gradually move away from the filter screen 5 in the process of moving from the midpoint of the trajectory to the highest point or the lowest point, thereby reducing the cleaning intensity of the filter screen 5. To solve this problem, a limiting block 1212 is arranged on one side of the connecting rod two 129, an arc-shaped groove 1218 is formed in the limiting block 1212, and the top and bottom of the arc-shaped groove 1218 are close to the side of the brush 1215. In the process of moving the limiting column 1213 with the connecting rod two 129, the limiting column 1213 moves in the arc-shaped groove 1218, so that in the process of moving the brush 1215 from the midpoint of the trajectory to the top or bottom, the limiting column 1213 drives the slide rod 1211 to gradually extend from the connecting rod two 129, reducing the distance between the brush 1215 and the filter screen 5, and improving the cleaning intensity of the filter screen 5 in the process of moving the brush 1215 from the midpoint of the trajectory to the top or bottom.

[0054] As shown in the figure, Figure 10 The central axis of the brush 1215 is an extendable telescopic rod, the two ends of the telescopic rod are fixedly connected with a large sleeve and a small sleeve respectively, the small sleeve is located in the large sleeve and can slide relative to each other, and the outer sides of the large sleeve and the small sleeve are provided with bristles. When the automatic telescopic rod 1214 is extended, one end of the brush 1215 is pulled to make it extend, so that the small sleeve slides out of the large sleeve, thereby increasing the cleaning area of the brush 1215. At the same time, when the two baffles 122 are driven to rotate, the automatic telescopic rod 1214 is shortened to avoid the contact between the brush 1215 and the fixed frame 121 and damage the brush 1215.

[0055] In the cleaning process, the fan 1217 in one side of the fixed frame 121 blows the dust from the purification pipeline 1 to the other side of the fixed frame 121, and is recycled by the dust collecting equipment, and finally the two baffles 122 are closed.

[0056] The dust on the filter screen 5 is cleaned by the cleaning device 12, which improves the air purification effect and reduces the manual cleaning work.

[0057] The cleaning device two 13 comprises a fixed plate two 131 fixedly connected in the purification pipeline 1 and a fixed frame 132 slidably connected in the purification pipeline 1, a circular groove one 133 and a circular groove two 134 are respectively arranged on the fixed plate two 131 and the fixed frame 132, the non-woven fabric filter bag 6 is fixedly connected with the fixed plate two 131 and the fixed frame 132 and located in the circular groove one 133 and the circular groove two 134, a fixed rod 135 is fixedly connected on one side of the fixed plate two 131, one end of the fixed rod 135 penetrates through the fixed frame 132 and is fixedly connected with a stop block 136 at the penetrating end, a spring 137 is sleeved on the outer side of the fixed rod 135 and located between the fixed plate two 131 and the fixed frame 132, the cleaning device two 13 further comprises a square groove 138 arranged above the purification pipeline 1, an inclined conveying belt 139 and a motor five 1310 for driving the conveying belt 139 are arranged in the square groove 138, and a plurality of push plates 1311 are fixedly connected on the conveying belt 139.

[0058] As shown in Figure 11 the working process of the cleaning device two 13, the motor five 1310 is started to drive the conveying belt 139, so that the push plates 1311 on the conveying belt 139 push the fixed frame 132 to move towards the fixed plate two 131 and compress the spring 137, since the conveying belt 139 is arranged in an inclined manner, the push plates 1311 are separated from the fixed frame 132 after moving a distance, the fixed frame 132 is reset immediately under the pushing of the spring 137, so that the non-woven fabric filter bag 6 is first contracted and then immediately stretched by the fixed frame 132, thereby the dust adhered in the non-woven fabric filter bag 6 is bounced up and separated from the non-woven fabric filter bag 6; the fixed frame 132 after reset is pushed by the next push plate 1311, and the above process is repeated to further bounce up the dust in the non-woven fabric filter bag 6; at the same time, the bounced dust is blown to the cleaning device one 12 by the fan 10 and recycled by the dust collecting equipment at the fixed frame 121.

[0059] The non-woven fabric filter bag 6 has high purification effect in the purification air conditioning equipment, but the cleaning process is difficult, the non-woven fabric filter bag 6 can be cleaned by the cleaning device two 13, and the self-purification effect of the air conditioning equipment is improved.

[0060] The embodiments of the present application are given for example and description, although the embodiments of the present application have been shown and described above, it can be understood that the above embodiments are exemplary and cannot be understood as limiting the present application, and those skilled in the art can make changes, modifications, replacements and modifications to the above embodiments within the scope of the present application.

Claims

1. A self-cleaning air conditioning system for a wafer film thickness testing laboratory, comprising: The purification pipe (1) and base (2) are arranged vertically and vertically, characterized in that: the purification pipe (1) is provided with an air inlet (3) and an air outlet (4) at both ends respectively; the purification pipe (1) is provided with a filter screen (5), a non-woven filter bag (6), a condenser (7), an activated carbon filter plate (8), an electric heater (9) and a fan (10) in sequence; an installation groove (21) is provided between the bottom of the purification pipe (1) and the base (2); and a material replacement module (11) is provided in the base (2); a cleaning device (12) is provided on both sides of the outer wall of the purification pipe (1); the cleaning device (12) is located between the air inlet (3) and the filter screen (5); and a cleaning device (23) is provided in the purification pipe (1) and at the non-woven filter bag (6). The material replacement module (11) replaces the activated carbon filter plate (8) in the purification pipe (1) through the installation slot (21); The material changing module (11) includes a lead screw (111), a motor (112), and an electric push rod (113). The two ends of the lead screw (111) are rotatably connected to the top and bottom of the base (2), respectively. The motor (112) and the electric push rod (113) are installed inside the base (2). The motor (112) drives the lead screw (111) to rotate through gears. A stop block (114) is threaded on the lead screw (111), and the stop block (114) is slidably connected to the inner wall of the base (2). The stop block (114) and the mounting groove (21) are located on the same plane. The output end of the electric push rod (113) is fixedly connected to a limit plate (115). The limiting plate (115) is connected to multiple sealing plates (116) by multiple protrusions. The multiple sealing plates (116) are located on the side of the base (2) away from the air outlet (4), and the upper edge of the sealing plate (116) is in contact with the top of the base (2). The sealing plate (116) is U-shaped, and a sealing plate (117) is slidably connected inside the sealing plate (116). The sealing plate (117) is L-shaped. An activated carbon filter plate (118) is stored between the sealing plate (116) and the sealing plate (117). A sealing plate (117) near the mounting groove (21) is located on the same plane as the mounting groove (21), and the width of the sealing plate (117) is the same as the width of the mounting groove (21).

2. The self-cleaning air conditioning equipment for a wafer film thickness testing laboratory as described in claim 1, characterized in that: A sealing door (22) is provided on one side of the base (2).

3. The self-cleaning air conditioning equipment for a wafer film thickness testing laboratory as described in claim 1, characterized in that: The cleaning device (12) includes two fixed frames (121) fixedly connected to both sides of the purification pipe (1), and the fixed frames (121) are connected to the purification pipe (1). The inner sides of the openings at both ends of the fixed frames (121) are rotatably connected to baffles (122). The fixed frames (121) are equipped with a motor (123) that drives the baffles (122) to rotate. The baffles (122) near the inside of the purification pipe (1) are fixedly connected to a fixing plate (124), which is located inside the fixed frame (121).

4. The self-cleaning air conditioning equipment for a wafer film thickness testing laboratory as described in claim 3, characterized in that: One side of the fixed plate (124) is rotatably connected to a connecting rod (128) and a connecting rod (129). One end of the connecting rod (128) is connected to a synchronous pulley (125). Multiple synchronous pulleys (125) are located on the other side of the fixed plate (124). A synchronous belt (126) is installed on each of the multiple synchronous pulleys (125). A motor (127) is installed on the fixed plate (124) to drive one of the synchronous pulleys (125) to rotate. A connecting rod (1210) is connected between the connecting rod (128) and the connecting rod (129). One end of the connecting rod (1210) is rotatably connected to the other end of the connecting rod (128), and the other end is rotatably connected to the middle of the connecting rod (129). A sliding rod (1211) is slidably connected inside the second connecting rod (129). The sliding rod (1211) extends outside the second connecting rod (129). A limiting block (1212) is fixedly connected to the first fixing plate (124). An arc-shaped groove (1218) is provided on the limiting block (1212). The top and bottom ends of the arc-shaped groove (1218) are close to the side of the brush 1215. The limiting block (1212) is located on one side of the second connecting rod (129). A limiting post (1213) is fixedly connected to one end of the sliding rod (1211) inside the second connecting rod (129). A hollow groove (1219) is provided on one side of the second connecting rod (129). The limiting post (1213) passes through the hollow groove (1219) and is located in the arc-shaped groove (1218).

5. The self-cleaning air conditioning equipment for a wafer film thickness testing laboratory as described in claim 4, characterized in that: The connecting rod three (1210) is fixedly connected to an automatic telescopic rod (1214) at one end outside the connecting rod two (129). A brush two (1215) is rotatably connected between the two ends of the automatic telescopic rod (1214). A motor four (1216) for driving the brush two (1215) to rotate is installed at one end of the automatic telescopic rod (1214). Multiple fans (1217) are installed in the fixed frame (121) of one of the cleaning devices (12). The fans (1217) are located between the brush two (1215) and the baffle (122) away from the purification pipe (1).

6. The self-cleaning air conditioning equipment for a wafer film thickness testing laboratory as described in claim 5, characterized in that: The cleaning device 2 (13) includes a fixing plate 2 (131) fixedly connected to the purification pipe (1) and a fixing frame (132) slidably connected to the purification pipe (1). The fixing plate 2 (131) and the fixing frame (132) are respectively provided with a circular groove 1 (133) and a circular groove 2 (134). The two ends of the non-woven filter bag (6) are fixedly connected to the fixing plate 2 (131) and the fixing frame (132) respectively and are located in the circular groove 1 (133) and the circular groove 2 (134). A fixing rod (135) is fixedly connected to one side of the fixing plate 2 (131). One end of the fixed rod (135) passes through the fixed frame (132) and the end through is fixedly connected to a stop block (136). A spring (137) is sleeved on the outside of the fixed rod (135) and between the fixed plate two (131) and the fixed frame (132). The cleaning device two (13) also includes a square groove (138) opened above the purification pipe (1). An inclined conveyor belt (139) and a motor five (1310) for driving the conveyor belt (139) are installed in the square groove (138). Multiple push plates (1311) are fixedly connected on the conveyor belt (139).

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