Sensing device comprising a sensor matrix
By introducing mesh-connected networks and decoders into the sensor matrix, the sensor units of the sensor matrix output sine wave or cosine wave signals of specific frequency and amplitude, solving the complex wiring, limited reconfigurability and ease of sensor matrix during use. The problem of physical damage has achieved efficient data processing and improved resilience.
Patent Information
- Application Number
- CN202411058173.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Priority Date
- 2023-08-04
- Filing Date
- 2024-08-02
- Publication Date
- 2025-02-14
AI Technical Summary
The sensor matrix has problems such as complex wiring, limited reconfigurability and susceptibility to physical damage during use, and the prior art lacks scalability and reconfigurability.
Provided is a sensing device including a sensor matrix, the sensor matrix consists of a plurality of sensor units arranged in matrix form, each sensor unit outputs a sine wave or cosine wave signal, the frequency of the signal uniquely identifies the sensor unit, and the amplitude of the signal reflects the physical quantity strength. The decoder generates a two-dimensional distribution of physical quantity intensity by receiving and decoding these signals. The sensor unit is connected to the decoder through a mesh connection network, realizing parallel data processing and improving toughness.
The device can process all sensor information in parallel, improve data processing efficiency, simplify wiring, improve overall toughness and loss capacitance, and support rapid reconfiguration and maintenance.
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Figure CN119437306A_ABST
Abstract
Description
Technical Field
[0001] The present disclosure relates to the field of sensor technology, and in particular to a sensing device including a sensor matrix. Background Art
[0002] Sensor matrices provide high-resolution and multi-dimensional measurements of physical interactions, thereby improving precision and accuracy in robotics, human-machine interfaces, and medical device applications. However, the use of sensor matrices presents several difficulties, such as complex wiring, limited reconfigurability, and susceptibility to physical damage. These issues stem from the use of time-division multiplexing (TDM) for sensor interfaces, which results in sequential and periodic sampling (scanning pattern) of individual sensors to generate a two-dimensional map of the distribution of physical quantities. In addition, existing sensor matrices often lack scalability and reconfigurability, as many sensor elements are distributed on large substrates that are primarily treated as a monolith, with limited ability to change size, profile, and pattern for different applications. Summary of the invention
[0003] In order to solve the problems existing in the use of a traditional sensor matrix, the present disclosure provides a sensing device including a sensor matrix.
[0004] In a first aspect, the present disclosure provides a sensing device, comprising: a sensor matrix, comprising a plurality of sensor units arranged in a matrix form, each sensor unit outputting a sine wave or cosine wave signal, the frequency of the sine wave or cosine wave signal uniquely identifying the sensor unit, and the amplitude of the sine wave or cosine wave signal reflecting the intensity of a physical quantity sensed by the sensor unit; and a decoder, which simultaneously receives the sine wave or cosine wave signals output by the plurality of sensor units, and obtains a two-dimensional distribution of the intensity of the physical quantity based on the frequency spectrum information of the received sine wave or cosine wave signals.
[0005] The sensing device provided by the embodiment of the present disclosure can process information from all sensors in the sensor matrix in parallel, thereby improving data processing efficiency.
[0006] In an embodiment of the present disclosure, the sensor unit includes:
[0007] a signal generating circuit which generates a sine wave or a cosine wave having a predetermined frequency,
[0008] A sensor generates a sensing signal based on the intensity of the sensed physical quantity,
[0009] An amplitude modulator generates a modulation signal according to the sensing signal, modulates the amplitude of the sine wave generated by the signal generating circuit using the modulation signal, and outputs a sine wave or cosine wave signal having the predetermined frequency and the modulated amplitude.
[0010] In an embodiment of the present disclosure, the decoder comprises:
[0011] a summing circuit, which receives the sine wave or cosine wave signals outputted from the plurality of sensor units through a signal line, adds the sine wave or cosine wave signals outputted from the plurality of sensor units, and generates a single time-domain superposition signal,
[0012] an analog-to-digital converter that converts the time domain superposition signal into a digital signal, and
[0013] A fast Fourier transform actuator calculates frequency spectrum information according to the digital signal, and locates the multiple sensor units based on the frequency spectrum information to obtain a two-dimensional distribution of the intensity of the physical quantity.
[0014] In an embodiment of the present disclosure, adjacent sensor units among the plurality of sensor units are electrically connected to each other to form a mesh connection network, and the sensor matrix is connected to the decoder via a signal line.
[0015] In an embodiment of the present disclosure, adjacent sensor units among the plurality of sensor units are connected by a serpentine wire.
[0016] In an embodiment of the present disclosure, the serpentine wire includes a plurality of first wires for power supply, a second wire for grounding, and a third wire for signal transmission.
[0017] In an embodiment of the present disclosure, one end of the signal line is connected to any sensor unit at the outer edge of the sensor matrix, and the other end of the signal line is connected to an input end of a summing circuit of the decoder.
[0018] In an embodiment of the present disclosure, each sensor unit has a plurality of parallel connection interfaces, and the plurality of parallel connection interfaces are electrically connected in parallel.
[0019] It should be understood that the content described in this section is not intended to identify the key or important features of the embodiments of the present disclosure, nor is it intended to limit the scope of the present disclosure. Other features of the present disclosure will become easily understood through the following description. BRIEF DESCRIPTION OF THE DRAWINGS
[0020] The accompanying drawings are used to provide a further understanding of the present disclosure and constitute a part of the specification. Together with the embodiments of the present disclosure, they are used to explain the present disclosure and do not constitute a limitation of the present disclosure. The above and other features and advantages will become more apparent to those skilled in the art by describing detailed example embodiments with reference to the accompanying drawings, in which:
[0021] Figure 1a and Figure 1b The conventional connection method of the sensor matrix and the encoder is shown.
[0022] Figure 2 is a schematic diagram of a sensing device according to an embodiment of the present disclosure.
[0023] Figure 3 is a layout diagram of a sensor matrix according to an embodiment of the present disclosure.
[0024] Figure 4 A sensing arrangement comprising a matrix of pressure sensors is shown.
[0025] Figure 5 The layered design of the pressure sensor unit connected with three serpentine wires is shown.
[0026] Figure 6 A method of assembling a pressure sensor unit is shown.
[0027] Figure 7a The response time characteristics of the pressure sensor unit are shown.
[0028] Figure 7b The characteristic of the amplitude of the sinusoidal voltage signal output by the pressure sensor unit as a function of pressure is shown.
[0029] Figure 7c The effect of frequency resolution and spacing ratio (FRIR) on the output amplitude accuracy of the pressure sensor unit and the decoding time of the entire pressure sensor matrix is shown.
[0030] Figures 8a to 8c The ability of a 5×5 pressure sensor matrix to still function properly without crosstalk after being severely damaged is demonstrated. DETAILED DESCRIPTION
[0031] In order to enable those skilled in the art to better understand the technical solutions of the present disclosure, the exemplary embodiments of the present disclosure are described below in conjunction with the accompanying drawings, including various details of the embodiments of the present disclosure to facilitate understanding, which should be considered as merely exemplary. Therefore, those of ordinary skill in the art should recognize that various changes and modifications can be made to the embodiments described herein without departing from the scope and spirit of the present disclosure. Similarly, for the sake of clarity and conciseness, the description of well-known functions and structures is omitted in the following description.
[0032] In the absence of conflict, the various embodiments of the present disclosure and the various features therein may be combined with each other.
[0033] As used herein, the term "and / or" includes any and all combinations of one or more of the associated listed items.
[0034] The terms used herein are only used to describe specific embodiments and are not intended to limit the present disclosure. As used herein, the singular forms "a" and "the" are also intended to include plural forms, unless the context clearly indicates otherwise. It will also be understood that when the terms "including" and / or "consisting of" are used in this specification, the presence of the features, wholes, steps, operations, elements and / or components is specified, but the presence or addition of one or more other features, wholes, steps, operations, elements, components and / or groups thereof is not excluded. "Connect" or "connected" and similar words are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect.
[0035] Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by those of ordinary skill in the art. It will also be understood that terms such as those defined in commonly used dictionaries should be interpreted as having a meaning consistent with their meaning in the context of the relevant art and the present disclosure, and will not be interpreted as having an idealized or overly formal meaning unless explicitly defined as such herein.
[0036] Figure 1a and Figure 1b The traditional connection method between the sensor matrix and the encoder is shown. Figure 1a and Figure 1b In the example, the sensor matrix includes M rows and N columns of sensor units. Figure 1a As shown, each sensor unit is connected to the encoder through a separate wire, so the M rows and N columns of sensor units are connected to the encoder through M×N wires, and the encoder includes M×N signal input channels. Figure 1b As shown, each row of sensor units is connected to the encoder via a separate wire, and each column of sensor units is connected to the encoder via a separate wire. Therefore, M rows and N columns of sensor units are connected to the M+N multiplexed encoder via M+N wires, and the encoder includes M+N signal input channels. Figure 1a and Figure 1b The M rows and N columns of sensor units shown are sampled sequentially and periodically (scanning mode) to generate a two-dimensional map of the distribution of the physical quantity. Figure 1a and Figure 1b The sensor matrix shown has a large number of sensor units, and the wiring is complicated, the shape of the sensor matrix is limited, and it is not convenient to maintain. In addition, this design also needs to be equipped with equipment that can support multi-channel decoding, and to some extent affects the overall aesthetics.
[0037] Inspired by the tonotopic auditory signal transmission system, the present disclosure provides a sensing device including a sensor matrix, which is capable of processing information from all sensors of the sensor matrix in parallel. The device has simple wiring, improved data processing efficiency, and introduces redundancy in the sensor connection network, thereby improving the overall toughness and damage tolerance of the sensing device. It can be understood that the more sensor units the sensor matrix includes, the more obvious the above advantages of the sensing device according to the present disclosure.
[0038] Figure 2 is a schematic diagram of a sensing device according to an embodiment of the present disclosure. Figure 2 As shown, the sensing device according to an embodiment of the present disclosure includes a sensor matrix 100 and a decoder 200 . Figure 3 FIG. 1 is a layout diagram of a sensor matrix according to an embodiment of the present disclosure. Figure 3 As shown, the sensor matrix 100 includes a plurality of sensor units 110 arranged in a matrix form. Each sensor unit 110 outputs a sine wave or cosine wave signal, the frequency of which uniquely identifies the sensor unit, and the amplitude of which reflects the intensity of the physical quantity sensed by the sensor unit. The frequency of the sine wave or cosine wave signal output by each sensor unit serves as the unique identifier of the sensor unit, and therefore, the frequency of the sine wave or cosine wave signal output by each sensor unit is different. Figure 2 As shown, the decoder 200 simultaneously receives the sine wave or cosine wave signals output by all sensor units 110 of the sensor matrix, and obtains a two-dimensional distribution of the intensity of the physical quantity based on the spectrum information of the received sine wave or cosine wave signals.
[0039] In the sensing device according to the present disclosure, the frequency magnitudes of the sine wave or cosine wave signals output by the sensor units in the sensor matrix are different, so that the decoder can locate and distinguish different sensor units according to the frequency magnitudes of the sine wave or cosine wave signals. The decoder can locate all sensor units according to the spectrum distribution of the received superimposed signal in the frequency domain, and then obtain a two-dimensional distribution of the intensity of the physical quantity. Specifically, the two-dimensional distribution of the frequencies corresponding to each sensor unit is pre-stored, and the two-dimensional distribution of the amplitude can be obtained according to the correspondence between the frequency and the amplitude obtained by decoding the decoder. In addition, the sensing device processes the signals from all sensor units in parallel, which can improve the data processing efficiency and obtain a faster decoding response.
[0040] In an embodiment of the present disclosure, the sensor unit 110 includes a sensor 102 for measuring a physical quantity. In some embodiments, the sensor in the sensor unit may include a pressure sensor, a temperature sensor, a strain gauge, etc. The present disclosure does not limit this.
[0041] like Figure 2 As shown, in addition to the sensor 102, the sensor unit 110 also includes a signal generating circuit 101 and an amplitude modulator 103. The signal generating circuit 101 generates a sine wave or a cosine wave with a predetermined frequency. Figure 4 In the illustrated embodiment, the frequency of the generated sine wave or cosine wave can be set by adjusting the resistor R1. The sensor 102 generates a sensing signal based on the intensity of the sensed physical quantity. The amplitude modulator 103 generates a modulation signal according to the sensing signal generated by the sensor 102, modulates the amplitude of the sine wave or cosine wave generated by the signal generating circuit 101 using the modulation signal, and outputs a sine wave or cosine wave signal having the predetermined frequency and the modulated amplitude.
[0042] In an embodiment of the present disclosure, the frequency of the sine wave or cosine wave signal output by the sensor unit is determined by the signal generating circuit, and the amplitude of the sine wave or cosine wave signal output by the sensor unit is the amplitude obtained by modulating the amplitude of the sine wave or cosine wave generated by the signal generating circuit based on the sensing signal of the sensor. Therefore, different frequencies can be set for the signal generating circuits in different sensor units as unique identifiers of different sensor units. In some embodiments, the change of the physical quantity sensed by the sensor in the sensor unit is linearly correlated with the amplitude of the sine wave or cosine wave signal output by the sensor unit.
[0043] In an embodiment of the present disclosure, the sinusoidal wave signal output by the sensor unit may be a sinusoidal voltage.
[0044] It is understandable that the present disclosure does not limit the phase of the sine wave or cosine wave signal output by the sensor unit. For example, the phase of the sine wave or cosine wave signal output by the sensor unit can be random and does not affect the subsequent decoding operation.
[0045] like Figure 2As shown, all sensor units 101 of the sensor matrix 100 transmit their respective sine wave or cosine wave signals in parallel to the decoder 200. The decoder 200 includes a summing circuit 201, an analog-to-digital converter (ADC) 202, and a fast Fourier transform (FFT) executor 203. The summing circuit 201 adds the sine wave or cosine wave signals output by all sensor units 110 of the sensor matrix 100 to generate a single time-domain superposition signal. The summing circuit 201 can be a summing amplifier. The analog-to-digital converter 202 converts the time-domain superposition signal generated by the summing circuit 201 into a digital signal. The fast Fourier transform executor 203 calculates the spectrum information according to the digital signal, and locates the sensor unit based on the spectrum information to obtain a two-dimensional distribution of the intensity of the physical quantity. All sensor units can be located according to the spectrum distribution in the frequency domain and their sensing signals can be obtained, thereby reconstructing a two-dimensional map of the distribution of the physical quantity.
[0046] In an embodiment of the present disclosure, adjacent sensor units in the sensor matrix are electrically connected to each other to form a mesh connection network. The sensor matrix is connected to the decoder via a signal line. The sine wave or cosine wave signal of each sensor unit is transmitted and superimposed through a single wire to obtain a time domain superposition signal, and then the time domain superposition signal is decomposed by a fast Fourier transform algorithm to generate a spectrum representation that reflects the information content of all sensor units in real time.
[0047] like Figure 3 As shown, adjacent sensor units in the sensor matrix are connected by serpentine wires S to form a shared mesh connection network. Each sensor unit can have multiple parallel connection interfaces, which are electrically connected in parallel. The entire sensor matrix 100 is connected to the summing circuit 201 of the encoder 200 via a serpentine signal line. The serpentine wire can provide stretchability for the sensor matrix. Figure 3 In the embodiment of the present disclosure, one end of the serpentine signal line is connected to the sensor unit at the lower right corner of the sensor matrix 100, and the other end is connected to the summing circuit 201, but the present disclosure is not limited thereto. In an embodiment of the present disclosure, one end of the signal line connecting the sensor matrix and the encoder is connected to any sensor unit at the outer edge of the sensor matrix, and the other end of the signal line is connected to the input end of the summing circuit of the decoder.
[0048] The mesh connection network provides multiple paths, and when a problem occurs in one path, the signal can automatically continue to be transmitted through other paths. In a mesh connection network, if a node (sensor unit) or wire segment is damaged, the signal can bypass the damaged part and transmit through other intact paths, thereby achieving a certain degree of self-healing ability. Since there are multiple paths to choose from, the reliability of the entire structure can be improved and the risk of failure of the entire structure due to a single point failure can be reduced. In addition, the shape of the network connection network can be quickly changed according to specific application scenarios, thereby reconfiguring the layout of the sensor units. In addition, interconnecting all sensor units through a shared mesh connection network greatly reduces the complexity of wiring. This design also reduces the number of output lines required to transmit the signal of the sensor matrix to only one, thereby achieving a cleaner and more beautiful wiring solution, while also reducing the requirements for the number of decoding channels.
[0049] In an embodiment of the present disclosure, adjacent sensor units in the sensor matrix are electrically connected to each other through wires of self-healing material, which can further improve the damage resistance of the sensor matrix. In some embodiments, the repairable material includes a polyurethane elastomer self-healing material sPUU2000. In some embodiments, the serpentine conductive material includes a self-healing material.
[0050] In an embodiment of the present disclosure, the serpentine wire S includes a plurality of first wires for power supply, a second wire for grounding, and a third wire for signal transmission. The plurality of first wires for power supply are used to power the operational amplifiers in the signal generating circuit and the summing circuit. In some embodiments, the serpentine wire is an FPC (flexible printed circuit) wire. Using FPC serpentine wires to connect sensor units can enhance the stretchability and flexibility of the matrix and reduce crosstalk between adjacent sensor units from a mechanical connection perspective.
[0051] In the following, the sensing device according to the present disclosure is described by taking the case where the sensor unit includes a pressure sensor as an example.
[0052] Figure 4 A sensing device comprising a pressure sensor matrix is shown. Figure 4 As shown, the sensing device includes a pressure sensor matrix 300 and an encoder 400. The pressure sensor matrix 300 includes a plurality of pressure sensor units TSU1 ... TSUn arranged in a matrix form, each of which includes a Wein-Bridge oscillator 301 used as a signal generating circuit, a piezoresistive pressure sensor 302 and a voltage dividing resistor R D The piezoresistive pressure sensor 302 and the voltage dividing resistor R D The piezoresistive pressure sensor 302 and the voltage dividing resistor R DAs a resistor divider, the resistance (R Si ) changes the sinusoidal voltage signal V of the voltage divider Ci The frequency of the sinusoidal voltage signal (f i ) is kept constant as a unique identifier of each pressure sensor unit. The frequency (f i ) is determined by the following formula (1).
[0053]
[0054] Among them, R i and C i Respectively represent the resistor and capacitor of the RC series-parallel network constituting the Wein-Bridge oscillator of the i-th pressure sensor unit. For example, R1 and C1 respectively constitute Figure 4 The RC series-parallel network in the first pressure sensor unit TSU1 is shown.
[0055] The sinusoidal voltage signal V output by the Wein-Bridge oscillator 301 of the i-th pressure sensor unit Ci It is determined by the following formula (2).
[0056]
[0057] Where t represents time, V CC represents the supply voltage of the amplifier, θ i represents the phase of the sinusoidal signal assigned to the i-th pressure sensor unit, R di represents the voltage divider resistor in the i-th pressure sensor unit, R si The piezoresistive pressure sensor 302 of the i-th pressure sensor unit is shown.
[0058] The encoder 400 includes an inverse summing amplifier 401 used as a summing circuit, an ADC module 402, and an FFT executor 403. The inverse summing amplifier 401 adds up the sinusoidal voltage signals from all pressure sensor units to obtain a time domain analog signal containing all sensor information, as shown in the following equation (3).
[0059]
[0060] Among them, R f represents the feedback resistor of the summing circuit, R in Indicates the input drive resistance of the corresponding pressure sensor unit.
[0061] The ADC module 402 digitally samples the time domain analog signal to obtain a digital signal, and the FFT executor 403 then performs a fast Fourier transform on the digital signal to analyze the spectrum of the digital signal. Therefore, all sensor units (TSUs) can be located according to the spectrum distribution in the frequency domain and their perception information can be obtained.
[0062] Figure 5 Figure 2 shows the layered design of the pressure sensor unit connected with three serpentine wires. Figure 5 As shown, the pressure sensor unit includes a piezoresistive film, staggered electrodes, an epoxy board (FR-4), and an electronic component. The electronic component generates a sinusoidal signal and implements amplitude modulation. The staggered electrodes are designed as a piezoresistive sensor for better integration. The piezoresistive film with a microstructure covers the staggered electrodes, which can enhance sensitivity and applicability.
[0063] Figure 6 The method of assembling the pressure sensor unit is shown. First, apply 183℃ solder paste on the connection pads of the pressure sensor unit, then align the pads of the serpentine wire with the connection pads of the pressure sensor unit and use a 280℃ hot air gun to heat the pads for about 6 seconds. Repeat this process according to the required outline until all pressure sensor units and serpentine wires are connected.
[0064] In the embodiments of the present disclosure, each sensor unit has multiple parallel connection interfaces, which, coupled with simple traditional welding technology, can quickly reconfigure the shape and / or pattern of the sensor matrix and perform rapid maintenance based on a shared mesh connection network.
[0065] Figure 7a The response time characteristics of the pressure sensor unit are shown in FIG. Figure 7a As shown, in the shock test, the pressure sensor unit exhibited an ultra-short response time (1.6 ms for rise and 1.7 ms for fall). Figure 7b The characteristic of the amplitude of the sinusoidal voltage signal output by the pressure sensor unit as a function of pressure is shown in FIG. Figure 7b As shown, the amplitude of the sinusoidal voltage signal output by the pressure sensor unit has high linearity, low error and high sensitivity (1.64 mV / kPa) within a wide pressure range (33-630 kPa). Figure 7c The effect of frequency resolution and spacing ratio (FRIR) on the output amplitude accuracy of the pressure sensor unit and the decoding time of the entire pressure sensor matrix is shown. Figure 7c As shown, as the FRIR increases, the amplitude accuracy of two adjacent pressure sensor units (relative to the FFT amplitude when the FRIR is 0.002) decreases, because a larger FRIR leads to a decrease in spectral resolution and cannot ensure that every frequency point is included.
[0066] Figures 8a to 8c The ability of a 5×5 pressure sensor matrix to still function properly without crosstalk after being severely damaged is demonstrated. Figure 8a The following three test conditions of the pressure sensor matrix are shown: 1) a constant force is applied to the middle pressure sensor unit of the 5×5 pressure sensor matrix (position: 3, 3); 2) the same constant force is applied to the middle pressure sensor unit when some connections of the connection network are cut off; 3) the same constant force is applied to the middle pressure sensor unit when some connections of the connection network are cut off and other pressure sensor units are randomly pressed (positions: (3, 2), (3, 4), (5, 4)). Figure 8b Shown with Figure 8a The corresponding Fast Fourier Transform spectrum. Even if the connection network is damaged and other pressure sensor units are pressed, the output amplitude of the middle pressure sensor unit will only change slightly. Figure 8c Shown with Figure 8a Pressure distribution histogram of the pressure sensor matrix in .
[0067] The sensing device with the sensor matrix according to the present disclosure has simple wiring, can be reconfigured quickly and successfully, and is damage-resistant, and can be applied to various fields such as robotics, aviation, health care, and industrial machinery. By adopting a mesh connection network, the damage resistance of the sensor matrix can be further improved. A circuit designed using CMOS (complementary metal-oxide-semiconductor) technology can achieve high-resolution measurement.
[0068] Example embodiments have been disclosed herein, and although specific terms are employed, they are used and should be interpreted only in a general illustrative sense and not for limiting purposes. In some instances, it will be apparent to those skilled in the art that, unless otherwise expressly noted, features, characteristics, and / or elements described in conjunction with a particular embodiment may be used alone or in combination with features, characteristics, and / or elements described in conjunction with other embodiments. Therefore, those skilled in the art will appreciate that various changes in form and detail may be made without departing from the scope of the present disclosure as set forth in the appended claims.
Claims
1. A sensing device, comprising: A sensor matrix, comprising a plurality of sensor units arranged in a matrix form, each sensor unit outputting a sine wave or cosine wave signal, the frequency of the sine wave or cosine wave signal uniquely identifying the sensor unit, and the amplitude of the sine wave or cosine wave signal reflecting the intensity of the physical quantity sensed by the sensor unit; A decoder simultaneously receives the sine wave or cosine wave signals output by the plurality of sensor units, and obtains a two-dimensional distribution of the intensity of the physical quantity based on frequency spectrum information of the received sine wave or cosine wave signals.
2. The sensing device according to claim 1, wherein: The sensor unit includes: a signal generating circuit which generates a sine wave or a cosine wave having a predetermined frequency, A sensor generates a sensing signal based on the intensity of the sensed physical quantity, An amplitude modulator generates a modulation signal according to the sensing signal, modulates the amplitude of the sine wave generated by the signal generating circuit using the modulation signal, and outputs a sine wave or cosine wave signal having the predetermined frequency and the modulated amplitude.
3. The sensing device according to claim 1, wherein: The decoder comprises: a summing circuit, which receives the sine wave or cosine wave signals outputted from the plurality of sensor units through a signal line, adds the sine wave or cosine wave signals outputted from the plurality of sensor units, and generates a single time-domain superposition signal, an analog-to-digital converter that converts the time domain superposition signal into a digital signal, and A fast Fourier transform actuator calculates frequency spectrum information according to the digital signal, and locates the multiple sensor units based on the frequency spectrum information to obtain a two-dimensional distribution of the intensity of the physical quantity.
4. The sensing device according to claim 1, wherein: Adjacent sensor units among the plurality of sensor units are electrically connected to each other to form a mesh connection network, The sensor matrix is connected to the decoder via a signal line.
5. The sensing device according to claim 4, wherein: Adjacent sensor units among the plurality of sensor units are connected by a serpentine wire.
6. The sensing device according to claim 5, wherein: The serpentine conductors include a plurality of first conductors for power supply, a second conductor for grounding, and a third conductor for signal transmission.
7. The sensing device according to claim 4, wherein: One end of the signal line is connected to any sensor unit at the outer edge of the sensor matrix, and the other end of the signal line is connected to the input end of the summing circuit of the decoder.
8. The sensing device according to claim 1, wherein: Each sensor unit has a plurality of parallel connection interfaces, which are electrically connected in parallel.