A multi-channel high-precision wide-temperature pressure sensor

Abstract

The present invention discloses a multi-channel high-precision wide-temperature pressure sensor, belonging to the field of sensor technology. The sensor comprises a shell, an inner cavity is provided in the shell, a plurality of chips are arranged side by side in the inner cavity, a plurality of lead pins are vertically provided in the shell, the plurality of chips are respectively connected to the lead pins, an isolation diaphragm is provided at the lower end of the inner cavity, and the inner cavity and the isolation diaphragm are filled with fillers; grooves are provided on both sides of the bottom surface of the shell, and a protection mechanism is provided in the groove. The present invention improves the reliability of the whole equipment, reduces the number of replacements, prolongs the service life, and effectively reduces the cost by integrating multiple chips in a pressure sensor. Moreover, for equipment that is difficult to replace and disassemble, the work efficiency can be improved by reducing the number of replacements. The present invention sets a protection mechanism on both sides of the shell. When the sensor detects that the pressure value is close to the limit value, the protection mechanism starts to work to protect the isolation diaphragm and the sensor element to prevent damage.

Description

Technical Field

[0001] The present invention relates to the field of sensor technology, and more specifically to a multi-channel high-precision wide-temperature pressure sensor. Background Art

[0002] Diffused silicon pressure sensors are widely used in many industries due to their small size, low cost, high accuracy and good stability. However, most current diffused silicon pressure sensors only use a single silicon sensitive chip as their core, which has obvious limitations.

[0003] The limitation of the single-chip design is that once the silicon sensitive chip is damaged, the entire pressure sensor will not be able to continue to work and must be disassembled and replaced with a new sensor. This frequent damage and replacement not only increases the cost of use, but also greatly affects the work efficiency and even causes long-term equipment downtime in some equipment that is difficult to replace, such as deep well detection and aerospace equipment. In view of this, we propose a multi-channel, high-precision, wide-temperature pressure sensor. Summary of the invention

[0004] The purpose of the present invention is to provide a multi-channel high-precision wide temperature pressure sensor to solve the problems raised in the above background technology:

[0005] To achieve the above object, the present invention provides the following technical solutions:

[0006] A multi-channel high-precision wide-temperature pressure sensor, comprising a housing, an inner cavity is provided in the housing, a plurality of chips are arranged side by side in the inner cavity, a plurality of lead pins are vertically provided in the housing, the plurality of chips are respectively connected to the lead pins, an isolation diaphragm is provided at the lower end of the inner cavity, and a filler is provided between the inner cavity and the isolation diaphragm;

[0007] Grooves are provided on both sides of the bottom surface of the shell, and protective mechanisms are provided in the grooves;

[0008] The protection mechanism comprises a moving block, the moving block is slidably matched with the groove, an elastic piece is arranged on the top of the moving block, a first clamping block is arranged on the side of the moving block, and a limiting mechanism is arranged on the side of the first clamping block.

[0009] Preferably, the limiting mechanism includes a fixed plate, a second clamping block is arranged on one side of the fixed plate, the second clamping block cooperates with the first clamping block, a rotating shaft is arranged through the lower end of the fixed plate, the fixed plate is rotatably connected to the rotating shaft, the rotating shaft is installed in the groove, and a pushing mechanism is arranged on the upper end of the fixed plate, and the pushing mechanism is slidably connected to the fixed plate.

[0010] Preferably, a rectangular groove is provided at the upper end of the fixing plate, and slide rails are provided on both side walls of the rectangular groove along the vertical direction;

[0011] The pushing mechanism includes a moving plate, both ends of the moving plate are rotatably connected with sliders, the sliders are slidably matched with the slide rails, sliding rods are arranged on both sides of the moving plate, the ends of the two sliding rods are connected with mounting plates, the mounting plates are fixed in the grooves, the inner sides of the two mounting plates are respectively provided with a first permanent magnet and a second permanent magnet with the same magnetic properties, a magnetic core is arranged through the middle of the moving plate, the magnetic core is divided into a first magnetic core segment and a second magnetic core segment by the moving plate, a first coil is arranged around the first magnetic core segment, and a second coil is arranged around the second magnetic core segment.

[0012] Preferably, it also includes a fixing frame, which is arranged in the groove, and a limiting hole is provided in the fixing frame. A limiting rod is arranged on the top of the moving block, and the limiting rod is slidably matched with the limiting hole.

[0013] Preferably, the elastic member is a spring, which is sleeved on the limiting rod, the lower end of the spring is connected to the moving block, and the upper end of the spring is connected to the inner wall of the fixing frame at the lower end of the limiting hole.

[0014] Preferably, the end of the rotating shaft is rotatably connected to the inner wall of the fixing frame, and a torsion spring is sleeved on the end of the rotating shaft, one end of the torsion spring is connected to the inner wall of the fixing frame, and the other end of the torsion spring is connected to the side wall of the fixing plate.

[0015] Preferably, the filler is dimethyl silicone oil, the lead pins are gold-plated lead pins, and the chip is a silicon sensitive chip.

[0016] Preferably, a sealing ring is provided on the outer wall of the housing.

[0017] Preferably, a supporting tube is disposed on the outer shell of the shell, the supporting tube is slidably matched with the shell, a supporting ring is disposed at the bottom of the supporting tube, and the moving block is in contact with the supporting ring.

[0018] Preferably, a welding ring is provided at the lower end of the shell, and the edge of the isolation diaphragm is located between the welding ring and the shell.

[0019] Compared with the prior art, the present invention has the following beneficial effects:

[0020] (1) The present invention integrates three chips inside a pressure sensor to achieve the effects of two in use and one in reserve, one in use and two in reserve, and three in use at the same time, thereby improving the reliability of the entire equipment, reducing the number of replacements, extending the service life, and effectively reducing costs. In addition, for equipment that is difficult to replace and disassemble, work efficiency can be improved by reducing the number of replacements.

[0021] (2) The present invention arranges a protection mechanism on both sides of the shell. When the sensor detects that the pressure value is close to the limit value, the protection mechanism starts to work and uses the moving block to lift the shell. The isolation diaphragm will also be lifted upward relative to the moving block, so that the isolation diaphragm is separated from the medium pressure, thereby achieving the protection of the isolation diaphragm and the sensor element; when the moving block moves downward, the fixed plate moves inward to restore to the initial position. At this time, the second card block is located above the first card block. The second card block can also provide a certain supporting force for the first card block, thereby limiting the position of the moving block and further improving the stability of the protection mechanism. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a schematic cross-sectional view of the overall structure of the multi-channel high-precision wide-temperature pressure sensor of the present invention;

[0023] Figure 2 It is a cross-sectional view of the housing and a schematic diagram of the installation of the protection mechanism of the present invention;

[0024] Figure 3 It is a cross-sectional schematic diagram of the protection mechanism and the fixing frame of the present invention;

[0025] Figure 4 It is a schematic cross-sectional side view of the protection mechanism and the fixing frame of the present invention;

[0026] Figure 5 It is a schematic diagram of the protection mechanism structure of the present invention;

[0027] Figure 6 It is a schematic diagram of the structure of the pushing mechanism of the present invention.

[0028] Explanation of the numbers in the figure: 1. shell; 101. inner cavity; 102. groove; 2. chip; 3. lead pin; 4. isolation diaphragm; 5. welding ring; 6. filler; 7. protection mechanism; 701. moving block; 702. elastic member; 703. first clamping block; 704. fixed plate; 705. rotating shaft; 706. rectangular groove; 707. slide rail; 708. moving plate; 709. slide rod; 710. mounting plate; 711. first permanent magnet; 712. second permanent magnet; 713. first core segment; 714. second core segment; 715. limiting rod; 716. second clamping block; 717. slider; 8. fixing frame; 801. limiting hole; 9. torsion spring; 10. sealing ring; 11. support cylinder; 12. support ring. DETAILED DESCRIPTION

[0029] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0030] Example:

[0031] See also Figure 1-6 A multi-channel high-precision wide-temperature pressure sensor comprises a shell 1, an inner cavity 101 is provided in the shell 1, a plurality of chips 2 are arranged side by side in the inner cavity 101, a plurality of lead pins 3 are vertically penetrated in the shell 1, the plurality of chips 2 are respectively connected to the lead pins 3, an isolation diaphragm 4 is provided at the lower end of the inner cavity 101, and a filler 6 is filled between the inner cavity 101 and the isolation diaphragm 4; for example, by integrating three chips 2 in a pressure sensor, if one or two of the chips 2 are damaged, the other chip 2 can still be used, thereby reducing the number of replacements, extending the service life, and effectively reducing the cost; and for equipment that is difficult to replace and disassemble, the work efficiency can be improved by reducing the number of replacements.

[0032] Grooves 102 are provided on both sides of the bottom surface of the housing 1. A protection mechanism 7 is provided in the groove 102. When the sensor detects that the pressure value is close to the limit value, the protection mechanism 7 protects the isolation diaphragm 4.

[0033] The protection mechanism 7 includes a moving block 701, which is slidably matched with the groove 102. An elastic member 702 is arranged on the top of the moving block 701, and a first clamping block 703 is arranged on the side of the moving block 701. A limiting mechanism is arranged on the side of the first clamping block 703. In the initial state, the position of the first clamping block 703 is limited by the limiting mechanism, and the elastic member 702 is in a force storage state; when the pressure on the isolation diaphragm 4 is too large and close to the limit value, the limiting mechanism moves to one side, and the moving block 701 slides to the outside of the groove 102 under the elastic force of the elastic member 702, and the shell 1 and the isolation diaphragm 4 move upward relative to the moving block 701, so that the isolation diaphragm 4 is separated from the pressure-applying member, thereby protecting the isolation diaphragm 4.

[0034] In the present application, the limiting mechanism includes a fixing plate 704, and a second clamping block 716 is provided on one side of the fixing plate 704. The second clamping block 716 cooperates with the first clamping block 703. Figure 5As shown, the second clamping block 716 is located below the first clamping block 703, and the second clamping block 716 abuts against the first clamping block 703; a rotating shaft 705 is provided through the lower end of the fixed plate 704, the fixed plate 704 is rotatably connected with the rotating shaft 705, the rotating shaft 705 is installed in the groove 102, and a pushing mechanism is provided at the upper end of the fixed plate 704, and the pushing mechanism is slidably connected with the fixed plate 704. The pushing mechanism is used to push the fixed plate 704 to rotate around the rotating shaft 705. The rotation of the fixed plate 704 drives the second clamping block 716 to move outward, so that the second clamping block 716 is separated from the first clamping block 703. Then the elastic member 702 pushes the movable block 701 to move downward. Thereafter, the pushing mechanism is used to rotate the fixed plate 704 to the initial position. At this time, the second clamping block 716 is located above the first clamping block 703. The second clamping block 716 can also provide a certain supporting force for the first clamping block 703. The lower side surface of the second clamping block 716 is set to a step shape, which is convenient for providing supporting force for the first clamping block 703 and preventing the movable block 701 from moving upward.

[0035] In the present application, a rectangular groove 706 is provided at the upper end of the fixed plate 704, and slide rails 707 are provided on both side walls of the rectangular groove 706 in the vertical direction; the pushing mechanism includes a moving plate 708, and sliders 717 are rotatably connected at both ends of the moving plate 708, and the sliders 717 are slidably matched with the slide rails 707. Through the cooperation between the moving plate 708 and the slide rails 707, the fixed plate 704 is driven to make an arc motion when the moving plate 708 moves horizontally. The sliders 717 are rotatably connected at both ends of the moving plate 708, so that when the fixed plate 704 makes an arc motion, the block will rotate relative to the fixed plate 704, ensuring that the block can always cooperate with the slide rails 707, and the slider 717 will slide along the slide rails 707.

[0036] Slide bars 709 are provided on both sides of the moving plate 708, and the ends of the two slide bars 709 are connected to mounting plates 710, which are fixed in the groove 102, and the inner sides of the two mounting plates 710 are provided with first permanent magnets 711 and second permanent magnets 712 with the same magnetic properties, respectively. A magnetic core is provided in the middle of the moving plate 708, and the magnetic core is divided into a first magnetic core segment 713 and a second magnetic core segment 714 by the moving plate 708, and a first coil is provided around the first magnetic core segment 713, and a second coil is provided around the second magnetic core segment 714. The moving plate 708 can slide on the slide bars 709, and the magnetic core and the moving plate 708 move simultaneously.

[0037] like Figure 6As shown in , when a positive current is applied to the first coil and the second coil, the first coil and the second coil generate a positive magnetic field, and after the magnetic core is magnetized, an attraction force is generated with the first permanent magnet 711, and a repulsion force is generated with the second permanent magnet 712. Under the action of the magnetic field force, the magnetic core moves toward the side of the first permanent magnet 711, and the magnetic core drives the moving plate 708 to move. During the horizontal movement of the moving plate 708, the slider 717 slides along the slide rail 707. At this time, the fixed plate 704 rotates outward around the rotating shaft 705, so that the second block 716 does not contact the first block 703. The moving block 701 slides to the outside of the groove 102 under the elastic force of the elastic member 702, and the shell 1 is moved upward and lifted up to separate the isolation diaphragm 4 from the pressure-applying member, and then reverse current is passed through the first coil and the second coil, and the first coil and the second coil generate reverse magnetic fields. After the magnetic core is magnetized, the magnetic core generates attraction with the second permanent magnet 712 and repulsion with the first permanent magnet 711. Under the action of the magnetic field force, the magnetic core moves toward the second permanent magnet 712 until it fits with the second permanent magnet 712. At this time, the second clamping block 716 is located above the first clamping block 703, and the second clamping block 716 provides support force for the first clamping block 703, and at the same time, the moving block 701 can be limited to prevent the moving block 701 from moving to the inside of the groove 102.

[0038] The present application also includes a fixing frame 8, which is arranged in the groove 102, and a limiting hole 801 is provided in the fixing frame 8. A limiting rod 715 is provided on the top of the moving block 701, and the limiting rod 715 is slidably matched with the limiting hole 801. The end of the mounting plate 710 is connected to the fixing frame 8 to fix the pushing mechanism, and the setting of the limiting rod 715 limits the position of the elastic member 702, so that the released elastic force of the elastic member 702 pushes the moving block 701 in the vertical direction.

[0039] In the present application, the elastic member 702 is a spring, which is sleeved on the limiting rod 715. The lower end of the spring is connected to the moving block 701, and the upper end of the spring is connected to the inner wall of the fixing frame 8 at the lower end of the limiting hole 801. When the second clamping block 716 is located below the first clamping block 703, the spring is in a compressed and force-storing state.

[0040] In the present application, the end of the rotating shaft 705 is rotatably connected to the inner wall of the fixing frame 8, and a torsion spring 9 is sleeved on the end of the rotating shaft 705. One end of the torsion spring 9 is connected to the inner wall of the fixing frame 8, and the other end of the torsion spring 9 is connected to the side wall of the fixing plate 704. Through the setting of the torsion spring 9, when the magnetic core is not energized, the force of the torsion spring 9 is used to make the fixing plate 704 have a certain inward force, so that the second clamping block 716 is located below the first clamping block 703, thereby improving the stability of the second clamping block 716.

[0041] In the present application, the filler 6 adopts dimethyl silicone oil, the lead pin 3 adopts a gold-plated lead pin, the gold-plated lead pin has good conductivity and corrosion resistance, and can ensure stable signal transmission, the chip 2 adopts a silicon sensitive chip, and the silicon sensitive chip has the characteristics of high sensitivity, high stability and low power consumption, and the isolation diaphragm 4 adopts a 316L corrugated diaphragm. The 316L corrugated diaphragm is made of high-quality stainless steel material and has excellent corrosion resistance and high temperature resistance.

[0042] In the present application, a sealing ring 10 is provided on the outer wall of the housing 1 to improve the sealing performance when connected to the mounting base.

[0043] In a possible embodiment, a support tube 11 is provided on the outer sleeve of the shell 1. At this time, the sealing ring 10 is arranged on the outside of the support tube 11, and is connected to the mounting base of the sensor through the support tube 11. The support tube 11 and the shell 1 are slidably matched. A support ring 12 is provided at the bottom of the support tube 11, and the moving block 701 is in contact with the support ring 12. By providing the support tube 11 and the support ring 12, when the moving block 701 moves downward, the support tube 11 and the support ring 12 move simultaneously, and the shell 1 and the support tube 11 slide relative to each other, which makes it more convenient to lift the shell 1 upward.

[0044] In the present application, a welding ring 5 is provided at the lower end of the shell 1, and the edge of the isolation diaphragm 4 is located between the welding ring 5 and the shell 1. The welding ring 5 is welded to the shell 1 to ensure sealing and stability, and is suitable for occasions requiring high strength and sealing, such as high pressure, high temperature or corrosive environment.

[0045] Working principle: When the medium pressure is applied to the isolation diaphragm 4, it is transmitted to the silicon sensitive chip through dimethyl silicone oil, and the signal sensed by the silicon sensitive chip is transmitted through the lead pin 3. Since three chips 2 are integrated inside a pressure sensor, if one chip 2 or two chips 2 are damaged, the other chip 2 can still be used, reducing the number of replacements, extending the service life, and effectively reducing costs. In addition, for equipment that is difficult to replace and disassemble, the work efficiency can be improved by reducing the number of replacements. By arranging the protection mechanism 7 on both sides of the shell 1, when the sensor detects that the pressure value is close to the limit value, the protection mechanism 7 starts to work, and the fixed plate 704 is rotated outward around the rotating shaft 705, so that the fixed plate 704 rotates and drives the second clamping block 716 to move outward, so that the second clamping block 716 is separated from the first clamping block 703, and then the restoring elastic force of the elastic member 702 pushes the moving block 701 to move downward, and the shell 1 is lifted up by the moving block 701, and the isolation diaphragm 4 is also lifted upward relative to the moving block 701, so that the isolation diaphragm 4 is separated from the medium pressure, and the isolation diaphragm 4 and the sensor element are protected; after the moving block 701 moves downward, the fixed plate 704 is moved inward to restore to the initial position, and at this time, the second clamping block 716 is located above the first clamping block 703, and the second clamping block 716 can also provide a certain support force for the first clamping block 703, limit the position of the moving block 701, and further improve the stability of the protection mechanism.

[0046] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited by the above embodiments. The above embodiments and descriptions are only preferred examples of the present invention and are not intended to limit the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, which fall within the scope of the present invention. The scope of protection of the present invention is defined by the attached claims and their equivalents.

Claims

1. A multi-channel high-precision wide-temperature pressure sensor, comprising a housing (1), characterized in that: An inner cavity (101) is provided in the shell (1), a plurality of chips (2) are arranged side by side in the inner cavity (101), a plurality of lead pins (3) are vertically penetrated in the shell (1), the plurality of chips (2) are respectively connected to the lead pins (3), an isolation diaphragm (4) is provided at the lower end of the inner cavity (101), and a filler (6) is provided between the inner cavity (101) and the isolation diaphragm (4); Grooves (102) are provided on both sides of the bottom surface of the shell (1), and a protection mechanism (7) is provided in the groove (102); The protection mechanism (7) comprises a moving block (701), the moving block (701) is slidably matched with the groove (102), an elastic member (702) is arranged on the top of the moving block (701), a first clamping block (703) is arranged on the side of the moving block (701), and a limiting mechanism is arranged on the side of the first clamping block (703); The limiting mechanism comprises a fixed plate (704), a second clamping block (716) is arranged on one side of the fixed plate (704), the second clamping block (716) cooperates with the first clamping block (703), a rotating shaft (705) is arranged through the lower end of the fixed plate (704), the fixed plate (704) is rotatably connected to the rotating shaft (705), the rotating shaft (705) is installed in the groove (102), and a pushing mechanism is arranged on the upper end of the fixed plate (704), and the pushing mechanism is slidably connected to the fixed plate (704); It also comprises a fixing frame (8), the fixing frame (8) being arranged in the groove (102), a limiting hole (801) being provided in the fixing frame (8), a limiting rod (715) being arranged on the top of the moving block (701), and the limiting rod (715) being slidably matched with the limiting hole (801).

2. A multi-channel high-precision wide temperature pressure sensor according to claim 1, characterized in that: A rectangular groove (706) is provided at the upper end of the fixing plate (704), and two side walls of the rectangular groove (706) are provided with slide rails (707) along the vertical direction; The pushing mechanism comprises a moving plate (708), two ends of the moving plate (708) are rotatably connected with sliders (717), the sliders (717) and the slide rails (707) are slidably matched, two sides of the moving plate (708) are provided with sliding rods (709), the ends of the two sliding rods (709) are connected with mounting plates (710), the mounting plates (710) are fixed in the groove (102), the inner sides of the two mounting plates (710) are respectively provided with a first permanent magnet (711) and a second permanent magnet (712) with the same magnetic properties, a magnetic core is provided in the middle of the moving plate (708), the magnetic core is divided into a first magnetic core segment (713) and a second magnetic core segment (714) by the moving plate (708), the first magnetic core segment (713) is surrounded by a first coil, and the second magnetic core segment (714) is surrounded by a second coil.

3. The multi-channel high-precision wide temperature pressure sensor according to claim 1, characterized in that: The elastic member (702) is a spring, which is sleeved on the limiting rod (715), the lower end of the spring is connected to the moving block (701), and the upper end of the spring is connected to the inner wall of the fixing frame (8) at the lower end of the limiting hole (801).

4. The multi-channel high-precision wide temperature pressure sensor according to claim 1, characterized in that: The end of the rotating shaft (705) is rotatably connected to the inner wall of the fixing frame (8), and a torsion spring (9) is sleeved on the end of the rotating shaft (705). One end of the torsion spring (9) is connected to the inner wall of the fixing frame (8), and the other end of the torsion spring (9) is connected to the side wall of the fixing plate (704).

5. The multi-channel high-precision wide temperature pressure sensor according to claim 1, characterized in that: The outer shell of the shell (1) is provided with a support tube (11), the support tube (11) is slidably matched with the shell (1), a support ring (12) is provided at the bottom of the support tube (11), and the moving block (701) is in contact with the support ring (12).

6. The multi-channel high-precision wide temperature pressure sensor according to claim 1, characterized in that: A welding ring (5) is provided at the lower end of the shell (1), and an edge of the isolation diaphragm (4) is located between the welding ring (5) and the shell (1).

7. The multi-channel high-precision wide temperature pressure sensor according to claim 1, characterized in that: The filler (6) is dimethyl silicone oil, the lead pin (3) is a gold-plated lead pin, and the chip (2) is a silicon sensitive chip.

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