Two-dimensional vector body holographic grating waveguide, manufacturing method thereof and optical waveguide module

Abstract

The invention relates to a near-to-eye display technology, in particular to a two-dimensional vector body holographic grating waveguide, a manufacturing method thereof and an optical waveguide module, and the manufacturing method comprises the steps: obtaining two-dimensional diffraction efficiency matrixes of the two-dimensional vector body holographic grating waveguide at different propagation angles according to a formula set provided by the invention, obtaining a diffraction efficiency matrix of two one-dimensional gratings forming the two-dimensional vector body holographic grating waveguide, and obtaining exposure energy required for manufacturing the two-dimensional vector body holographic grating waveguide according to a linear relation between the diffraction efficiency of the one-dimensional gratings and the exposure energy used during grating manufacturing; and performing exposure treatment on the holographic dry plate by adopting exposure energy to obtain the two-dimensional vector body holographic grating waveguide. According to the method, the optimized two-dimensional vector body holographic grating waveguide is obtained by optimizing the exposure energy of the two-dimensional vector body holographic grating waveguide, the exit pupil uniformity of the two-dimensional vector body holographic grating waveguide is optimized, and the final in-eye display effect of the near-eye device is improved.

Description

Technical Field

[0001] The present application relates to near-eye display technology, and in particular to a two-dimensional vector volume holographic grating waveguide and a manufacturing method thereof, and an optical waveguide module. Background Art

[0002] The holographic waveguide combines the total reflection characteristics of the waveguide with the diffraction characteristics of the holographic grating, which can achieve a large field of view and a large exit pupil image output, and the overall quality and volume are more compact. The holographic waveguide uses a reflective volume holographic grating as a coupling component, which can reduce stray light and lower dispersion. The two-dimensional vector volume holographic optical waveguide technology further uses a two-dimensional vector reflective volume holographic grating as a coupling component, optimizing the industry's current three-grating (coupling grating, turning grating, coupling grating) two-dimensional pupil expansion technology, greatly saving the production time and cost of the holographic waveguide. At the same time, it makes the optical machine lighter, and the overall shape can be closer to the real glasses shape, meeting various scene applications.

[0003] In order to obtain a larger exit pupil size in a volume holographic optical waveguide, the light wave energy transmitted in the waveguide is divided into two parts in the outcoupling grating, one part of the energy is coupled out, and the remaining part continues to be transmitted in the waveguide. The above process is repeated at different positions of the outcoupling grating to obtain a large exit pupil. Therefore, it is necessary to optimize the local diffraction efficiency of the outcoupling grating to control the proportion of the output light intensity to the total output light intensity, so as to achieve the goal of expanding the exit pupil while balancing the output brightness of the entire exit pupil.

[0004] The related technology on the uniformity of the exit pupil of volume holographic optical waveguide is only for one-dimensional grating, and the related optimization design of the local diffraction efficiency of two-dimensional vector volume holographic grating waveguide has not been involved. Summary of the invention

[0005] In order to optimize the light output uniformity of a two-dimensional vector volume holographic grating waveguide, the present application provides a two-dimensional vector volume holographic grating waveguide and a manufacturing method thereof, and an optical waveguide module.

[0006] The present application provides a method for manufacturing a two-dimensional vector volume holographic grating waveguide using the following technical solution: S1. According to the following formula group, the two-dimensional diffraction efficiency matrix of the two-dimensional vector volume holographic grating waveguide at different propagation angles is obtained, and then the diffraction efficiency matrix of the two one-dimensional gratings forming the two-dimensional vector volume holographic grating waveguide is obtained, and according to the linear relationship between the diffraction efficiency of the one-dimensional grating and the exposure energy used in the grating production, the exposure energy required for the production of the two-dimensional vector volume holographic grating waveguide is obtained; the formula group is: Among them, Angle t represents the propagation angle of the light wave in the two-dimensional vector volume holographic grating waveguide, and m and n represent the propagation angle Angle t The transmission period of the light wave in the two-dimensional vector volume holographic grating waveguide under (1, 2, ...T), Indicates the propagation angle Angle t The transmission light intensity of the light wave in the two-dimensional vector volume holographic grating waveguide under (1, 2, ...T), Indicates the propagation angle Angle t The out-coupling light intensity of the light wave in each local area of ​​the two-dimensional vector volume holographic grating waveguide under (1, 2, ...T), Indicates the propagation angle Angle t The average outgoing light intensity of the light wave in each local area of ​​the two-dimensional vector volume holographic grating waveguide under (1, 2, ...T), Indicates the propagation angle Angle t The two-dimensional diffraction efficiency matrix of the two-dimensional vector volume holographic grating waveguide under (1, 2, ...T); α is the absorptivity of the volume holographic grating.

[0007] S2. Expose the holographic dry plate with the exposure energy to obtain the two-dimensional vector volume holographic grating waveguide.

[0008] By adopting the above technical scheme, under the premise of balancing the output brightness of the entire exit pupil, the exposure energy for making a two-dimensional vector volume holographic grating waveguide is calculated, and the holographic dry plate is exposed using the exposure energy to obtain an optimized two-dimensional vector volume holographic grating waveguide. This method optimizes the exit pupil uniformity of the two-dimensional vector volume holographic grating waveguide and improves the final eye-in-eye display effect of the near-eye device.

[0009] In one embodiment of the present application, the step of obtaining the diffraction efficiency matrix of two one-dimensional gratings forming the two-dimensional vector volume holographic grating waveguide includes: Taking a weighted average of the two-dimensional diffraction efficiency matrix at all propagation angles to obtain a two-dimensional diffraction efficiency matrix at the full field of view; According to the two-dimensional diffraction efficiency matrix under the full field of view, the diffraction efficiency matrix of the two one-dimensional gratings forming the two-dimensional vector volume holographic grating waveguide is obtained.

[0010] By adopting the above technical solution and using weighted averaging, the influence of a single or certain fields of view on the entire field of view is weakened, and the light uniformity of the entire field of view is further improved.

[0011] In one embodiment of the present application, the step of obtaining the diffraction efficiency matrix of two one-dimensional gratings forming the two-dimensional vector volume holographic grating waveguide according to the two-dimensional diffraction efficiency matrix under the full field of view includes: According to the formula ξ=ξ1+(1-ξ1)ξ2, the diffraction efficiency matrices ξ1 and ξ2 of the two one-dimensional gratings forming the two-dimensional vector volume holographic grating waveguide are obtained; wherein, ξ represents the two-dimensional diffraction efficiency matrix under the full field of view, ξ1 and ξ2 respectively represent the diffraction efficiency matrices of the two one-dimensional gratings forming the two-dimensional vector volume holographic grating waveguide, and ξ1 and ξ2 are transposed of each other.

[0012] In one embodiment of the present application, the step of obtaining the diffraction efficiency matrix of two one-dimensional gratings forming the two-dimensional vector volume holographic grating waveguide includes: According to the formula Get the The corresponding diffraction efficiency matrix ξ of the two one-dimensional gratings t1 and t2 ; Among them, ξ t1 and t2 Respectively represent the formation of The diffraction efficiency matrix of the two one-dimensional gratings, ξ t1 and t2 Transpose each other; For all propagation angles, t1 Take the weighted average value for the ξ at all propagation angles t2 The weighted average is taken to obtain the diffraction efficiency matrices ξ1 and ξ2 of the two one-dimensional gratings forming the two-dimensional vector volume holographic grating waveguide.

[0013] By adopting the above technical solution and using weighted averaging, the influence of a single or certain fields of view on the entire field of view is weakened, and the light uniformity of the entire field of view is further improved.

[0014] In one embodiment of the present application, the step of exposing a holographic dry plate with the exposure energy to obtain the two-dimensional vector volume holographic grating waveguide includes: The energy of the exposure beam emitted by the exposure light source is adjusted so that the exposure energy of the exposure beam irradiated to the holographic dry plate is the exposure energy obtained according to the ξ1 or the ξ2.

[0015] In one embodiment of the present application, the step of adjusting the exposure light beam energy emitted by the exposure light source so that the exposure energy of the exposure light beam irradiated to the holographic dry plate is the exposure energy obtained according to the ξ1 or the ξ2 comprises: The energy of the exposure light beam emitted by the exposure light source is adjusted, and / or the exposure time of the holographic dry plate is adjusted.

[0016] At the same time, the present application also provides a two-dimensional vector volume holographic grating waveguide, which is obtained by optimizing the manufacturing method of the two-dimensional vector volume holographic grating waveguide described in any embodiment of the present application.

[0017] Correspondingly, the present application also provides an optical waveguide module, which includes an optical machine and the two-dimensional vector volume holographic grating waveguide described in the embodiment of the present application.

[0018] In summary, this application includes the following beneficial technical effects: The exposure energy for making a two-dimensional vector volume holographic grating waveguide is calculated by the formula group provided in the present application under the premise of balancing the output brightness of the entire exit pupil, and the holographic dry plate is exposed with the exposure energy to obtain an optimized two-dimensional vector volume holographic grating waveguide. This method optimizes the exit pupil uniformity of the two-dimensional vector volume holographic grating waveguide and improves the final eye-in-eye display effect of the near-eye device. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 is a CV diagram of the two-dimensional vector volume holographic grating waveguide in the central field of view in Example 1 of the present application; Figure 2 is a CV diagram of the two-dimensional vector volume holographic grating waveguide in the left field of view in Example 1 of the present application; Figure 3 This is the CV diagram of the two-dimensional vector volume holographic grating waveguide in Example 1 of the present application in the right field of view. DETAILED DESCRIPTION

[0020] The following is combined with Figure 1-3 This application is described in further detail.

[0021] The embodiments of the present application disclose a two-dimensional vector volume holographic grating waveguide and a manufacturing method thereof, and an optical waveguide module.

[0022] For a one-dimensional grating, considering that there will be absorption loss when light waves are transmitted in the grating, and for a specific grating material, the absorption rate of red light, green light and blue light is a constant α. Therefore, for a specific field of view, we have: Among them, ξ l (l=1,2…L) represents the diffraction efficiency of each local area, represents the intensity of the light wave that continues to propagate after the first diffraction, It represents the intensity of the light wave in the lth region diffracted out of the waveguide by the grating.

[0023] By comparing the intensity of the diffracted light waves in two consecutive regions, the diffraction efficiency ξ of the l+1th region grating can be obtained. l+1and the diffraction efficiency ξ of the lth area grating l The relationship between them is: For the full field of view, if the light intensity in each outcoupling area is to be uniform, the standard deviation of the output light intensity diffracted from each local area at different propagation angles must be minimized. That is, in, Indicates the propagation angle Angle t (1, 2, ...T) When the light wave is diffracted by the grating and leaves the waveguide, the average light intensity of each local area is Indicates the propagation angle Angle t (1, 2, ...T) is the light intensity of the light wave in the lth region diffracted out of the waveguide by the grating, and L is the propagation angle Angle t (1, 2, ...T) is the transmission period of the light wave in the grating. Among them, in is the propagation angle Angle t (1, 2, ...T) is the diffraction efficiency of the local area of ​​the grating.

[0024] Correspondingly, for a two-dimensional vector volume holographic grating waveguide, corresponding to a specific field of view, assuming that the two-dimensional diffraction efficiency matrix of the volume holographic grating is ξ(m,n), the total coupled light intensity is 1, considering the absorption loss of the volume holographic grating, and setting the absorption rate to α, the light wave intensity I propagating in the local area of ​​the M*N waveguide is in The function expression of (m,n) is: Among them, m and n are the transmission periods of light waves in the two-dimensional vector volume holographic grating waveguide.

[0025] The local area light intensity I of the light wave diffracted by the two-dimensional vector volume holographic grating waveguide dif The function expression of (m,n) is: Furthermore, the two-dimensional vector volume holographic grating waveguide is actually a full-field situation, that is, it includes multiple different propagation angles, and different propagation angles correspond to different propagation periods in the waveguide, and the propagation conditions of light waves in the waveguide are different. Two-dimensional vector volume holographic grating waveguide, the light wave intensity propagating in the local area of ​​the M*N waveguide The function expression is: The local light intensity of the light wave diffracted by the two-dimensional vector volume holographic grating waveguide The function expression is: To improve the overall light uniformity of the two-dimensional vector volume holographic grating waveguide, the standard deviation of the output light intensity diffracted from each local area at different propagation angles must be minimized. in, Indicates the propagation angle Angle t The average value of the outcoupled light intensity of the light wave in each local area of ​​the two-dimensional vector volume holographic grating waveguide under (1, 2, ...T).

[0026] When the standard deviation of the output light intensity of the two-dimensional vector volume holographic grating waveguide diffracted by each local area at each propagation angle is the smallest, the light output uniformity of the two-dimensional vector volume holographic grating waveguide is optimal. Therefore, according to formulas (7) to (9), it can be deduced that the two-dimensional vector volume holographic grating waveguide has the best light output uniformity at the propagation angle Angle t Diffraction efficiency matrix of the local area of ​​the two-dimensional vector volume holographic grating waveguide at (1, 2, ...T) The function expression is: When the two-dimensional vector volume holographic grating waveguide is formed by the interaction of two one-dimensional gratings whose grating vectors are perpendicular to each other, the diffraction efficiency matrix of the two-dimensional vector volume holographic grating waveguide is also formed by the interaction of the diffraction efficiency matrices of the two one-dimensional gratings, and they satisfy the formula: ξ=ξ1+(1-ξ1)ξ2 (11) Wherein, ξ is the diffraction efficiency matrix of the two-dimensional vector volume holographic grating waveguide, ξ1 and ξ2 are the diffraction efficiency matrices of the two one-dimensional gratings, and ξ1 and ξ2 are transposed of each other. The diffraction efficiency matrix of the two-dimensional vector volume holographic grating waveguide obtained according to formulas (7) to (10) can be used to obtain the diffraction efficiency matrix of the two one-dimensional gratings according to formula (11).

[0027] Example 1 This embodiment provides a method for manufacturing a two-dimensional vector volume holographic grating waveguide. The optimization method includes: Step S1, obtaining a two-dimensional diffraction efficiency matrix of a two-dimensional vector volume holographic grating waveguide at different propagation angles according to the following formula group, and then obtaining diffraction efficiency matrices ξ1 and ξ2 of two one-dimensional gratings forming the two-dimensional vector volume holographic grating waveguide, and obtaining the exposure energy required for the production of the two-dimensional vector volume holographic grating waveguide according to the linear relationship between the diffraction efficiency of the one-dimensional grating and the exposure energy used in the production of the grating; the formula group is: Among them, Angle t Represents the propagation angle of the light wave in the two-dimensional vector volume holographic grating waveguide, m and n are the propagation angles Angle t The transmission period of light waves in the two-dimensional vector volume holographic grating waveguide under (1, 2, ...T), Indicates the propagation angle Angle t The light intensity of the light wave propagating in the two-dimensional vector volume holographic grating waveguide under (1, 2, ...T), Indicates the propagation angle Angle t The outcoupled light intensity of the light wave in each local area of ​​the two-dimensional vector volume holographic grating waveguide under (1, 2, ...T), Indicates the propagation angle Angle t (1, 2, ...T) The average outgoing light intensity of each local area of ​​the two-dimensional vector volume holographic grating waveguide is Indicates the propagation angle Angle t The two-dimensional diffraction efficiency matrix of the two-dimensional vector volume holographic grating waveguide under (1, 2, ...T), α is the absorptivity of the volume holographic grating.

[0028] In one embodiment, the step of obtaining diffraction efficiency matrices ξ1 and ξ2 of two one-dimensional gratings forming a two-dimensional vector volume holographic grating waveguide according to two-dimensional diffraction efficiency matrices at different propagation angles comprises: The two-dimensional diffraction efficiency matrix under all propagation angles is weighted and averaged to obtain the two-dimensional diffraction efficiency matrix under the full field of view; According to the formula ξ=ξ1+(1-ξ1)ξ2, the diffraction efficiency matrices ξ1 and ξ2 of the two one-dimensional gratings forming the two-dimensional vector volume holographic grating waveguide are obtained; wherein ξ represents the two-dimensional diffraction efficiency matrix under the full field of view, ξ1 and ξ2 respectively represent the diffraction efficiency matrices of the two one-dimensional gratings forming the two-dimensional vector volume holographic grating waveguide, and ξ1 and ξ2 are transposed of each other.

[0029] In another embodiment, the step of obtaining diffraction efficiency matrices ξ1 and ξ2 of two one-dimensional gratings forming a two-dimensional vector volume holographic grating waveguide according to two-dimensional diffraction efficiency matrices at different propagation angles comprises: According to the formula get The corresponding diffraction efficiency matrix ξ of the two one-dimensional gratings t1 and t2 ; Among them, ξ t1 and t2 Respectively represent the formation The diffraction efficiency matrix of the two one-dimensional gratings, ξ t1 and t2 are transposed; for all propagation angles ξ t1 Take the weighted average value for ξ at all propagation angles t2 The weighted average is taken to obtain the diffraction efficiency matrices ξ1 and ξ2 of the two one-dimensional gratings that form the two-dimensional vector volume holographic grating waveguide.

[0030] The transmission period and local area division corresponding to different transmission angles in the two-dimensional vector volume holographic grating waveguide are different. For example: Assuming that the transmission angle of the transmission light wave in the waveguide is between 43°-63.4°, considering that the waveguide thickness is 1mm, the optical path length of one reflection is between 1.86-3.99. Assuming that the effective area size of the two-dimensional vector volume holographic grating waveguide is 23*23mm, the transmission period corresponding to the transmission angle is between 6*6-12*12. Generally, the local area diffraction efficiency of the two-dimensional vector volume holographic grating waveguide is divided according to the longest transmission period of 12*12, then the diffraction efficiency matrix of the two-dimensional vector volume holographic grating waveguide is a 12*12 diffraction efficiency matrix, and then the remaining fields of view map the 12*12 diffraction efficiency matrix in their respective diffraction efficiency matrices according to their respective transmission periods, and then the optimal solution of the diffraction efficiency matrix is ​​sought through the above-mentioned genetic algorithm. After obtaining the diffraction efficiency matrix at each transmission period, a weighted average is taken to obtain the final diffraction efficiency matrix of the two-dimensional vector volume holographic grating waveguide.

[0031] In a specific embodiment, the absorption coefficient of the two-dimensional vector volume holographic grating waveguide is 0.02, the waveguide thickness is 1mm, the transmission angle of the light wave in the waveguide is between 43°-63.4°, the optical path length of one reflection is between 1.86-3.99, the total coupled light intensity is 150e4nit, and the effective area size of the two-dimensional vector volume holographic grating waveguide is 23mm*23mm.

[0032] In the case of the central field of view, the transmission angle of the light wave in the waveguide is 53.51°, and the corresponding transmission period is 8. The 12*12 diffraction efficiency matrix is ​​first mapped to the 8*8 diffraction efficiency matrix, and the obtained diffraction efficiency matrix is: [0.03, 0.04, 0.05, 0.07, 0.09, 0.14, 0.25, 0.78] [0.04, 0.05, 0.06, 0.08, 0.10, 0.15, 0.26, 0.79] [0.05, 0.06, 0.07, 0.09, 0.11, 0.16, 0.27, 0.79] [0.07, 0.08, 0.09, 0.10, 0.12, 0.17, 0.28, 0.79] [0.09, 0.10, 0.11, 0.12, 0.14, 0.19, 0.30, 0.80] [0.14, 0.15, 0.16, 0.17, 0.19, 0.23, 0.33, 0.81] [0.25, 0.26, 0.27, 0.28, 0.30, 0.33, 0.42, 0.83] [0.78, 0.79, 0.79, 0.79, 0.80, 0.81, 0.83, 0.95] The outcoupling light intensity of the 8*8 local area is: [48599.83, 29085.40, 17595.69, 10390.08, 6386.20, 4323.45, 3347.71, 3767.58] [29085.4, 32952.91, 28416.07, 21435.70, 15755.98, 12167.63, 10326.72, 11622.99] [17595.69, 28416.07, 31052.94, 27987.33, 23511.11, 19996.72, 18068.7, 19977.02] [10390.08, 21435.7, 27987.33, 29007.57, 27096.72, 24823.36, 23407.47, 25090.81] [6386.20, 15755.98, 23511.11, 27096.72, 27346.40, 26221.77, 25024.28, 25206.39] [4323.45, 12167.63, 19996.72, 24823.36 26221.77, 25338.21, 23277.20, 20485.26] [3347.71, 10326.72, 18068.70, 23407.47, 25024.28, 23277.20, 19035.06, 12248.26] [3767.58, 11622.99, 19977.02, 25090.81, 25206.39, 20485.26, 12248.26, 2057.72] According to the formula ξ C =ξC1 +(1-ξ C1 )ξ C2 , and obtain the optimal one-dimensional diffraction efficiency matrix ξ C1 is: [0.016, 0.017, 0.029, 0.031, 0.049, 0.053, 0.071, 0.084, 0.143, 0.153, 0.416, 0.962].

[0033] The corresponding CV curve is as follows Figure 1 shown.

[0034] In the left field of view, the transmission angle of the light wave in the waveguide is 43°, and the corresponding transmission period is 12. The 12*12 diffraction efficiency matrix is ​​first mapped to the 12*12 diffraction efficiency matrix, and the obtained diffraction efficiency matrix is: [0.02, 0.02, 0.02, 0.03, 0.04, 0.05, 0.05, 0.07, 0.10, 0.15, 0.28, 0.99] [0.02, 0.03, 0.03, 0.04, 0.04, 0.05, 0.06, 0.07, 0.10, 0.15, 0.29, 0.99] [0.02, 0.03, 0.03, 0.04, 0.05, 0.06, 0.06, 0.07, 0.11, 0.15, 0.29, 0.99] [0.03, 0.04, 0.04, 0.05, 0.05, 0.06, 0.07, 0.08, 0.11, 0.16, 0.30, 0.99] [0.04, 0.04, 0.05, 0.05, 0.06, 0.07, 0.08, 0.09, 0.12, 0.16, 0.30, 0.99] [0.05, 0.05, 0.06, 0.06, 0.07, 0.08, 0.08, 0.10, 0.13, 0.17, 0.31, 0.99] [0.05, 0.06, 0.06, 0.07, 0.08, 0.08, 0.09, 0.10, 0.13, 0.18, 0.31, 0.99] [0.07, 0.07, 0.07, 0.08, 0.09, 0.10, 0.10, 0.11, 0.14, 0.19, 0.32, 0.99] [0.10, 0.10, 0.11, 0.11, 0.12, 0.13, 0.13, 0.14, 0.17, 0.22, 0.34, 0.99] [0.15, 0.15, 0.15, 0.16, 0.16, 0.17, 0.18, 0.19, 0.22, 0.26, 0.38, 0.99] [0.28, 0.29, 0.29, 0.30, 0.30, 0.31, 0.31, 0.32, 0.34, 0.38, 0.48, 0.99] [0.99, 0.99, 0.99, 0.99, 0.99, 0.99, 0.99, 0.99, 0.99, 0.99, 0.99, 0.99, 1.00] The outcoupling light intensity of the 12*12 local area is: [23904.00, 15108.81, 8621.32, 5102.87, 2967.50, 1728.60, 943.78, 531.84, 355.19, 235.10, 191.39, 230.38] [15108.81, 17913.24, 14783.46, 11226.25, 7903.85, 5366.46, 3348.20, 2108.65, 1533.79, 1094.26, 939.08, 1109.87] [8621.32, 14783.46, 15902.39, 14721.21, 12166.15, 9436.63, 6622.98, 4611.38, 3632.05, 2777.89, 2503.88, 2916.32] [5102.87, 11226.25, 14721.21, 15892.52, 14932.42, 12908.05, 9999.84, 7574.00, 6355.38, 5139.81, 4803.20, 5475.70] [2967.50, 7903.85, 12166.15, 14932.42, 15650.77, 14854.40, 12546.20, 10231.16, 9061.61, 7683.04, 7383.22, 8211.78] [1728.60, 5366.46, 9436.63, 12908.05, 14854.40, 15277.46, 13912.75, 12096.03, 11194.81, 9856.54, 9643.41, 10395.60] [943.78, 3348.20, 6622.98, 9999.84, 12546.20, 13912.75, 13592.47, 12557.52, 12141.08, 11090.06, 11044.39, 11582.87] [531.84, 2108.65, 4611.38, 7574.00, 10231.16, 12096.03, 12557.52, 12214.49, 12198.27, 11432.10, 11437.77, 11518.52] [355.19, 1533.79, 3632.05, 6355.38, 9061.61, 11194.81, 12141.08, 12198.27, 12204.35, 11362.31, 10917.64, 9929.47] [235.10, 1094.26, 2777.89, 5139.81, 7683.04, 9856.54, 11090.06, 11432.10, 11362.31, 10365.84, 9309.79, 7249.60] [191.39, 939.08, 2503.88, 4803.20, 7383.22, 9643.41, 11044.39, 11437.77, 10917.64, 9309.79, 7081.92, 3620.04] [230.38, 1109.87, 2916.32, 5475.70, 8211.78, 10395.60, 11582.87, 11518.52, 9929.47, 7249.60, 3620.04, -36.22] According to the formula ξ L =ξ L1 +(1-ξ L1 )ξ L2 , and obtain the optimal one-dimensional diffraction efficiency matrix ξ L1 is: [0.008, 0.013, 0.017, 0.023, 0.03, 0.039, 0.047, 0.059, 0.09, 0.139, 0.279, 0.986].

[0035] The corresponding CV curve is as follows Figure 2 shown.

[0036] In the right field of view, the transmission angle of the light wave in the waveguide is 63.6°, and the corresponding transmission period is 6. The 12*12 diffraction efficiency matrix is ​​first mapped to the 6*6 diffraction efficiency matrix, and the obtained diffraction efficiency matrix is: [0.06, 0.06, 0.09, 0.14, 0.24, 0.71] [0.06, 0.07, 0.10, 0.14, 0.25, 0.71] [0.09, 0.10, 0.13, 0.17, 0.27, 0.72] [0.14, 0.14, 0.17, 0.21, 0.31, 0.73] [0.24, 0.25, 0.27, 0.31, 0.39, 0.76] [0.71, 0.71, 0.72, 0.73, 0.76, 0.91] The outcoupling light intensity of the 6*6 local area is: [87194.62, 44888.11, 29441.36, 19251.03, 14336.94, 15388.09] [44888.11, 45343.22, 42596.13, 35483.01, 31063.39, 34577.00] [29441.36, 42596.13, 47704.13, 44691.54, 41379.30, 43636.74] [19251.03, 35483.01, 44691.54, 44895.43, 41849.32, 39504.45] [14336.94, 31063.39, 41379.30, 41849.32, 36001.77, 25866.69] [15388.09, 34577.00, 43636.74, 39504.45, 25866.69, 6661.09] According to the formula ξ R =ξ R1 +(1-ξ R1 )ξ R2 , and obtain the optimal one-dimensional diffraction efficiency matrix ξ R1 is: [0.029, 0.03, 0.036, 0.037, 0.062, 0.069, 0.109, 0.113, 0.215, 0.224, 0.664, 0.73].

[0037] The corresponding CV curve is as follows Figure 3 shown.

[0038] For other fields of view, the corresponding optimal one-dimensional diffraction efficiency matrix can also be calculated. Finally, the optimal one-dimensional diffraction efficiency matrix obtained under each field of view is weighted and averaged to obtain the optimal solution of the diffraction efficiency matrix of the two one-dimensional gratings forming the two-dimensional vector volume holographic grating waveguide.

[0039] Finally, according to the linear relationship between the diffraction efficiency of the one-dimensional grating and the exposure energy used in the grating production, the exposure energy required for the production of the two-dimensional vector volume holographic grating waveguide is obtained.

[0040] Step S2: using exposure energy to perform exposure processing on the two-dimensional vector volume holographic grating waveguide.

[0041] Specifically, the exposure energy of the exposure beam emitted by the exposure light source is adjusted, and / or the exposure time of the holographic dry plate is adjusted, so that the exposure energy of the exposure beam irradiated to the holographic dry plate is the exposure energy obtained according to the embodiment of the present application, thereby performing exposure processing on the holographic dry plate.

[0042] The implementation principle of the method for manufacturing the two-dimensional vector volume holographic grating waveguide provided in this embodiment is: the exposure energy for manufacturing the two-dimensional vector volume holographic grating waveguide is calculated under the premise of balancing the output brightness of the entire exit pupil through the formula group provided in this application, and the holographic dry plate is exposed using the exposure energy to obtain an optimized two-dimensional vector volume holographic grating waveguide. This method optimizes the exit pupil uniformity of the two-dimensional vector volume holographic grating waveguide and improves the final eye-in-eye display effect of the near-eye device.

[0043] Example 2 This embodiment provides a two-dimensional vector volume holographic grating waveguide, which is prepared by using the preparation method in Embodiment 1.

[0044] Example 3 This embodiment provides an optical waveguide module, including an optical machine and the two-dimensional vector volume holographic grating waveguide in Embodiment 2.

[0045] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A method for manufacturing a two-dimensional vector volume holographic grating waveguide, characterized in that: include: S1. According to the following formula group, the two-dimensional diffraction efficiency matrix of the two-dimensional vector volume holographic grating waveguide at different propagation angles is obtained, and then the diffraction efficiency matrix of the two one-dimensional gratings forming the two-dimensional vector volume holographic grating waveguide is obtained, and according to the linear relationship between the diffraction efficiency of the one-dimensional grating and the exposure energy used in the grating production, the exposure energy required for the production of the two-dimensional vector volume holographic grating waveguide is obtained; the formula group is: Among them, Angle t represents the propagation angle of the light wave in the two-dimensional vector volume holographic grating waveguide, and m and n represent the propagation angle Angle t The transmission period of the light wave in the two-dimensional vector volume holographic grating waveguide under (1, 2, ...T), Indicates the propagation angle Angle t The transmission light intensity of the light wave in the two-dimensional vector volume holographic grating waveguide under (1, 2, ...T), Indicates the propagation angle Angle t The out-coupling light intensity of the light wave in each local area of ​​the two-dimensional vector volume holographic grating waveguide under (1, 2, ...T), Indicates the propagation angle Angle t The average outgoing light intensity of the light wave in each local area of ​​the two-dimensional vector volume holographic grating waveguide under (1, 2, ...T), Indicates the propagation angle Angle t The two-dimensional diffraction efficiency matrix of the two-dimensional vector volume holographic grating waveguide under (1, 2, ...T); α is the absorptivity of the volume holographic grating. 2.S2. Use the exposure energy to expose the holographic dry plate to obtain the two-dimensional vector volume holographic grating waveguide.

3. The method for manufacturing a two-dimensional vector volume holographic grating waveguide according to claim 1, characterized in that: The step of obtaining the diffraction efficiency matrix of two one-dimensional gratings forming the two-dimensional vector volume holographic grating waveguide comprises: Taking a weighted average of the two-dimensional diffraction efficiency matrix at all propagation angles to obtain a two-dimensional diffraction efficiency matrix at the full field of view; According to the two-dimensional diffraction efficiency matrix under the full field of view, the diffraction efficiency matrix of the two one-dimensional gratings forming the two-dimensional vector volume holographic grating waveguide is obtained.

4. The method for manufacturing a two-dimensional vector volume holographic grating waveguide according to claim 2, characterized in that: The step of obtaining the diffraction efficiency matrices of two one-dimensional gratings forming the two-dimensional vector volume holographic grating waveguide according to the two-dimensional diffraction efficiency matrix under the full field of view comprises: According to the formula ξ=ξ1+(1-ξ1)ξ2, the diffraction efficiency matrices ξ1 and ξ2 of the two one-dimensional gratings forming the two-dimensional vector volume holographic grating waveguide are obtained; wherein, ξ represents the two-dimensional diffraction efficiency matrix under the full field of view, ξ1 and ξ2 respectively represent the diffraction efficiency matrices of the two one-dimensional gratings forming the two-dimensional vector volume holographic grating waveguide, and ξ1 and ξ2 are transposed of each other.

5. The method for manufacturing a two-dimensional vector volume holographic grating waveguide according to claim 2, characterized in that: The step of obtaining the diffraction efficiency matrix of two one-dimensional gratings forming the two-dimensional vector volume holographic grating waveguide comprises: According to the formula Get the The corresponding diffraction efficiency matrix ξ of the two one-dimensional gratings t1 and t2 ; Among them, ξ t1 and t2 Respectively represent the formation of The diffraction efficiency matrix of the two one-dimensional gratings, ξ t1 and t2 Transpose each other; For all propagation angles, t1 Take the weighted average value for the ξ at all propagation angles t2 The weighted average is taken to obtain the diffraction efficiency matrices ξ1 and ξ2 of the two one-dimensional gratings forming the two-dimensional vector volume holographic grating waveguide.

6. The method for manufacturing a two-dimensional vector volume holographic grating waveguide according to claim 3 or 4, characterized in that: The step of using the exposure energy to expose the holographic dry plate to obtain the two-dimensional vector volume holographic grating waveguide includes: adjusting the exposure beam energy emitted by the exposure light source so that the exposure energy of the exposure beam irradiated to the holographic dry plate is the exposure energy obtained according to the ξ1 or the ξ2.

7. The method for manufacturing a two-dimensional vector volume holographic grating waveguide according to claim 5, characterized in that: The step of adjusting the exposure light beam energy emitted by the exposure light source so that the exposure energy of the exposure light beam irradiated to the holographic dry plate is the exposure energy obtained according to the ξ1 or the ξ2 comprises: The energy of the exposure light beam emitted by the exposure light source is adjusted, and / or the exposure time of the holographic dry plate is adjusted.

8. A two-dimensional vector volume holographic grating waveguide, characterized in that: The two-dimensional vector volume holographic grating waveguide is manufactured by the manufacturing method of any one of claims 1 to 6.

9. An optical waveguide module, characterized in that: It comprises an optical machine and the two-dimensional vector volume holographic grating waveguide as described in claim 7.

Images