Silicon-based liquid crystal device and its preparation process

Abstract

The present invention belongs to the field of semiconductor technology, and discloses a silicon-based liquid crystal device and a preparation process thereof. The silicon-based liquid crystal device comprises a silicon-based substrate, a pixel metal layer is fixedly installed on the top of the silicon-based substrate, a sealing frame is fixedly installed on the top of the pixel metal layer, the sealing frame is composed of two rectangular frames, a bottom alignment layer is fixedly installed on the top of the pixel metal layer at the edge of the inner wall of the inner rectangular frame of the sealing frame, a liquid crystal layer is fixedly arranged on the top of the bottom alignment layer, a top alignment layer is arranged on the top of the liquid crystal layer, and glass is fixedly installed on the top of the sealing frame. The present invention has the following beneficial effects: the purpose of protecting the top of the silicon-based liquid crystal device can be achieved, and the problem of damage to the top of the silicon-based liquid crystal device caused by external objects can be prevented, thereby protecting the top of the silicon-based liquid crystal device and increasing the service life of the top of the silicon-based liquid crystal device.

Description

Technical Field

[0001] The present invention belongs to the field of semiconductor technology, and in particular relates to a silicon-based liquid crystal device and a preparation process thereof. Background Art

[0002] As an emerging display technology, silicon-based liquid crystal devices have attracted much attention in recent years. They have inherent advantages that traditional liquid crystal display devices lack, including higher response speed, smaller size, lower power consumption and richer color performance. Liquid crystal is a material with high dielectric properties and special optical properties. It is in a special fluid state between solid and liquid. Its liquid crystal phase region exhibits certain solid properties within a specific temperature range, such as structural order, while maintaining some liquid fluidity. This unique property enables liquid crystal materials to change optical properties under the action of electric fields, thereby realizing display. As the mainstream material in the semiconductor field, silicon-based substrates have the advantages of high integration, low cost, and large-area manufacturing.

[0003] Since the silicon-based liquid crystal devices need an external protective structure to prevent collision between two silicon-based liquid crystal devices during placement after preparation, the problem of damage to the two silicon-based liquid crystal devices due to collision during placement occurs. Summary of the invention

[0004] The present invention aims at the problem that in the prior art, during the placement process of the prepared LCOS devices, an external protective structure is required to prevent the collision between the two LCOS devices, which causes the two LCOS devices to be damaged due to the collision during the placement process. The present invention proposes the following technical solution:

[0005] A silicon-based liquid crystal device comprises a silicon-based substrate, a pixel metal layer is fixedly installed on the top of the silicon-based substrate, a sealing frame is fixedly installed on the top of the pixel metal layer, the sealing frame is composed of two rectangular frames, a bottom alignment layer is fixedly installed on the top of the pixel metal layer at the edge of the inner wall of the inner rectangular frame of the sealing frame, a liquid crystal layer is fixedly installed on the top of the bottom alignment layer, a top alignment layer is arranged on the top of the liquid crystal layer, glass is fixedly installed on the top of the sealing frame, a spacer particle layer is fixedly installed at a position between the insides of the two rectangular frames in the sealing frame, and a protective overlap assembly is fixedly installed in the silicon-based substrate;

[0006] The protective overlap assembly includes an adjustment plate symmetrically and slidably connected to the inside of the silicon-based substrate, a connecting plate is hingedly installed on the top edge of one end of the adjustment plate, a flip plate is hingedly installed on the top edge of the connecting plate away from the adjustment plate, a protective bottom frame is horizontally and movably connected inside the flip plate, and a connecting frame is horizontally and movably connected inside the protective bottom frame.

[0007] As a preferred embodiment of the above technical solution, sliding blocks are symmetrically fixedly installed on both sides of the adjustment plate, a fitting groove is opened inside the silicon-based substrate corresponding to the outer side of the protective overlapping component, cylinders are fixedly installed at positions on both sides of the fitting groove inside the silicon-based substrate, and a guide hole is opened at a position at one end of the sliding block corresponding to one end of the cylinder.

[0008] As a preferred embodiment of the above technical solution, the number of the adjustment plate, connecting plate, flip plate, protective bottom frame, connecting frame and positioning strip is set to two respectively, the number of the sliding blocks is set to four in total, and the ratio of the number of the adjustment plates to the sliding blocks is one to two.

[0009] As a preferred embodiment of the above technical solution, circular holes are symmetrically opened inside the two connecting plates, and directional holes are opened at the bottom ends of the two connecting plates. A movable plate is horizontally movably connected inside the directional holes, and a friction plate that fits with the connecting plates is fixedly installed on the top of the movable plate, and a precise positioning column that is slidably connected to the circular hole is symmetrically embedded on one end surface of the movable plate.

[0010] As a preferred embodiment of the above technical solution, a positioning bar is fixedly installed inside one of the connecting frames, and a moving bar is movably connected inside the other connecting frame. One end face of the moving bar is rotatably connected to a rotating sleeve, and the inside of the rotating sleeve is connected to a screw rod by a thread. The screw rod is fixedly installed on one end face of the inner wall of the connecting frame, and a plug is symmetrically fixedly installed on one end face of the moving bar.

[0011] As a preferred embodiment of the above technical solution, a rounded corner is provided at one end of the plug, the plug is made of rubber, a convex ring is integrally formed on the outer side of the plug and the edge of the convex ring is arc-shaped.

[0012] As a preferred embodiment of the above technical solution, the rotating sleeve and the moving bar are connected via a bearing, and the outer side of the moving bar and the inner wall of the connecting frame are in contact with each other.

[0013] As a preferred embodiment of the above technical solution, the positioning bar and the moving bar have the same shape, and a connecting hole is formed on one end of the positioning bar corresponding to one end of the plug.

[0014] The present invention also provides a process for preparing the above-mentioned silicon-based liquid crystal device, comprising the following steps:

[0015] S1: Material preparation: Prepare the required raw materials.

[0016] S2: Processing of silicon-based substrate: cleaning the silicon-based substrate, and then performing oxidation treatment on the cleaned silicon-based substrate.

[0017] S3: Preparation of pixel metal layer: photoresist is coated on the silicon-based substrate, and then a pattern is formed by photolithography technology. Then, under the protection of the photoresist, the metal material is evaporated onto the silicon-based substrate, and then the excess metal layer is removed.

[0018] S4: Preparation of alignment layer: uniformly coating the alignment layer material on the top of the pixel metal layer and the liquid crystal layer, and then heat treating and curing the alignment layer.

[0019] S5: Preparation of liquid crystal layer: spacer particles are evenly distributed on the bottom alignment layer, and then liquid crystal material is injected between the bottom alignment layer and the top alignment layer.

[0020] S6: Glass packaging: The glass is bonded to the top orientation layer to form a sealing structure, and then a sealing frame is installed at the edge of the top orientation layer and the bottom of the glass.

[0021] S7: Installation of protective lap assembly: Install protective lap assembly inside the silicon-based substrate to protect the outside and top of the device from the influence of the external environment.

[0022] S8: Testing and debugging: Conduct electrical and optical performance tests on the prepared silicon-based liquid crystal devices.

[0023] The beneficial effects of the present invention are:

[0024] (1) It can achieve the purpose of protecting the top of the silicon-based liquid crystal device, preventing the top of the silicon-based liquid crystal device from being damaged by foreign objects, thereby protecting the top of the silicon-based liquid crystal device and increasing the service life of the top of the silicon-based liquid crystal device;

[0025] (2) It enables two Si-based liquid crystal devices to be vertically overlapped, which changes the difficulty of overlapping the two Si-based liquid crystal devices, thereby preventing the problem of shaking after overlapping the two Si-based liquid crystal devices, thereby facilitating the storage of multiple Si-based liquid crystal devices. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 The figure shows a schematic structural diagram of a liquid crystal on silicon device in Example 1;

[0027] Figure 2 The figure shows a schematic diagram of the installation structure of the liquid crystal layer in Example 1;

[0028] Figure 3 What is shown is a schematic diagram of the structure of the protective overlap assembly in Example 1;

[0029] Figure 4 The figure shows a schematic diagram of the installation structure of the precise positioning column in Example 1;

[0030] Figure 5 The figure shows a schematic diagram of the installation structure of the movable plate in the embodiment 1;

[0031] Figure 6 The figure shows a schematic diagram of the installation structure of the protective bottom frame in Example 1;

[0032] Figure 7 What is shown is a schematic diagram of the installation structure of the cylinder in Example 1.

[0033] In the figure: 1. Silicon-based substrate; 2. Pixel metal layer; 3. Sealing frame; 4. Bottom alignment layer; 5. Liquid crystal layer; 6. Top alignment layer; 7. Glass; 8. Spacer particle layer; 9. Protective overlap assembly; 91. Adjustment plate; 92. Sliding block; 93. Connecting plate; 94. Flip plate; 95. Protective bottom frame; 96. Connecting frame; 97. Positioning bar; 98. Rotating sleeve; 99. Moving bar; 910. Plug; 911. Round hole; 912. Directional hole; 913. Movable plate; 914. Friction plate; 915. Precision positioning column; 916. Screw; 10. Fitting groove; 11. Cylinder. DETAILED DESCRIPTION

[0034] In order to make the purpose, technical solution and advantages of the embodiments of the present invention more clear, the technical solution of the present invention will be clearly and completely described below in conjunction with the embodiments.

[0035] Embodiment 1: The present invention provides a liquid crystal on silicon device and a preparation process thereof, such as Figures 1 to 7 As shown, it comprises: a silicon-based substrate 1, a pixel metal layer 2 is fixedly installed on the top of the silicon-based substrate 1, a sealing frame 3 is fixedly installed on the top of the pixel metal layer 2, the sealing frame 3 is composed of two rectangular frames, a bottom alignment layer 4 is fixedly installed on the top of the pixel metal layer 2 at the edge of the inner wall of the inner rectangular frame of the sealing frame 3, a liquid crystal layer 5 is fixedly arranged on the top of the bottom alignment layer 4, a top alignment layer 6 is arranged on the top of the liquid crystal layer 5, a glass 7 is fixedly installed on the top of the sealing frame 3, a spacer particle layer 8 is fixedly installed at a position between the insides of the two rectangular frames in the sealing frame 3, and a protective overlap component 9 is fixedly installed inside the silicon-based substrate 1;

[0036] The protective overlapping assembly 9 includes an adjustment plate 91 symmetrically and slidably connected to the inside of the silicon-based substrate 1, a connecting plate 93 is hingedly installed on the top edge of one end of the adjustment plate 91, a flip plate 94 is hingedly installed on the top edge of the connecting plate 93 away from the adjustment plate 91, a protective bottom frame 95 is horizontally and movably connected inside the flip plate 94, and a connecting frame 96 is horizontally and movably connected inside the protective bottom frame 95.

[0037] like Figure 3 and Figure 7 As shown, sliding blocks 92 are symmetrically fixedly installed on both sides of the adjustment plate 91, a fitting groove 10 is opened inside the silicon-based substrate 1 corresponding to the outer side of the protective overlap assembly 9, and cylinders 11 are fixedly installed at positions on both sides of the fitting groove 10 inside the silicon-based substrate 1, and a guide hole is opened at a position at one end of the sliding block 92 corresponding to one end of the cylinder 11;

[0038] Under the action of the guide hole, it is convenient for the cylinder 11 to enter the sliding block 92. At this time, the sliding block 92 and the cylinder 11 are fixed by extrusion, so that the protective overlap assembly 9 is fixedly installed in the fitting groove 10 of the silicon-based substrate 1, which changes the difficulty of fixing the protective overlap assembly 9 and the silicon-based substrate 1.

[0039] like Figure 3 and Figure 4 As shown, the number of the adjusting plate 91, the connecting plate 93, the flip plate 94, the protective bottom frame 95, the connecting frame 96 and the positioning bar 97 is respectively set to two, the number of the sliding blocks 92 is set to four in total, and the ratio of the number of the adjusting plates 91 to the number of the sliding blocks 92 is one to two;

[0040] It can facilitate the horizontal displacement of the adjustment plate 91, the connecting plate 93, the flip plate 94, the protective bottom frame 95, the connecting frame 96 and the positioning bar 97, and prevent the adjustment plate 91, the connecting plate 93, the flip plate 94, the protective bottom frame 95, the connecting frame 96 and the positioning bar 97 from shaking after movement.

[0041] like Figure 4 and Figure 5 As shown, circular holes 911 are symmetrically opened inside the two connecting plates 93, and directional holes 912 are opened at the bottom ends of the two connecting plates 93. A movable plate 913 is horizontally movably connected inside the directional holes 912. A friction plate 914 that fits the connecting plates 93 is fixedly installed on the top of the movable plate 913. A precise positioning column 915 that is slidably connected to the circular hole 911 is symmetrically embedded and installed on one end surface of the movable plate 913. The precise positioning column 915 is installed at the end surface of the movable plate 913 close to one end surface of the flip plate 94.

[0042] Since the adjustment plate 91, the connecting plate 93 and the flip plate 94 can rotate, the connecting plate 93 can be made vertical at this time, and then the person pushes the movable plate 913. When the movable plate 913 moves, it drives the friction plate 914 to move. The movable plate 913 is fixed by friction, compression and fixation under the action of the friction plate 914. In this process, the movable plate 913 drives the precise positioning column 915 to move. When the precise positioning column 915 moves, it enters into the circular hole 911 of another vertically placed silicon-based liquid crystal device. At this time, the two silicon-based liquid crystal devices are vertically overlapped, which changes the difficulty of vertical overlap between the two silicon-based liquid crystal devices.

[0043] like Figure 2 and Figure 4As shown, a positioning bar 97 is fixedly installed inside one of the connection frames 96, and a moving bar 99 is movably connected inside the other connection frame 96. One end face of the moving bar 99 is rotatably connected to a rotating sleeve 98. A screw rod 916 is connected inside the rotating sleeve 98 through a thread. The screw rod 916 is fixedly installed on one end face of the inner wall of the connection frame 96. A plug 910 is symmetrically fixedly installed on one end face of the moving bar 99. A rounded corner is provided at one end of the plug 910. The material of the plug 910 is rubber. A convex ring is integrally formed on the outer side of the plug 910 and the convex ring edge The part is arc-shaped, which is convenient for the movement of the plug 910, so that the plug 910 is convenient for insertion into another object. The rotating sleeve 98 and the moving bar 99 are connected by a bearing. The outer side of the moving bar 99 and the inner wall of the connecting frame 96 fit each other, which is convenient for the rotation of the rotating sleeve 98 and changes the difficulty of rotating the rotating sleeve 98. The positioning bar 97 and the moving bar 99 have the same shape. A connecting hole is opened at one end of the positioning bar 97 corresponding to one end of the plug 910, which is convenient for the connection between the positioning bar 97 and the moving bar 99 and changes the difficulty of their connection.

[0044] The personnel rotates the rotating sleeve 98, and the rotating sleeve 98 moves along the outside of the screw rod 916 when it rotates. When the rotating sleeve 98 moves, it drives the moving bar 99 to move. When the moving bar 99 moves, it drives the plug 910 to move, so that the plug 910 is exposed to the outside of the connecting frame 96, and then the two connecting frames 96 are pulled. At this time, the connecting frame 96 drives the protective bottom frame 95 to move inside the flip plate 94. When the two connecting frames 96 are fitted together, the plug 910 enters the connecting hole of the positioning bar 97, thereby completing the connection between the two connecting frames 96, thereby achieving the purpose of protecting the top of the silicon-based liquid crystal device.

[0045] The present invention also provides a process for preparing the above-mentioned silicon-based liquid crystal device, comprising the following steps:

[0046] S1: Material preparation: Prepare the required raw materials.

[0047] S2: Processing of silicon-based substrate: cleaning the silicon-based substrate 1, and then performing oxidation treatment on the cleaned silicon-based substrate 1.

[0048] S3: Preparation of pixel metal layer: coating photoresist on the silicon-based substrate 1, then forming a pattern by photolithography technology, and then evaporating metal material onto the silicon-based substrate 1 under the protection of the photoresist, and then removing the excess metal layer.

[0049] S4: Preparation of alignment layer: uniformly coating the alignment layer material on the top of the pixel metal layer 2 and the liquid crystal layer 5, and then heat treating and curing the alignment layer.

[0050] S5: Preparation of liquid crystal layer: spacer particles are evenly distributed on the bottom alignment layer 4 , and then liquid crystal material is injected between the bottom alignment layer 4 and the top alignment layer 6 .

[0051] S6: Glass packaging: The glass 7 is bonded to the top orientation layer 6 to form a sealing structure, and then a sealing frame 3 is installed at the edge of the top orientation layer 6 and the bottom of the glass 7 .

[0052] S7: Installation of protective overlapping components: Install protective overlapping components 9 inside the silicon-based substrate 1 to protect the outside and top of the device from the influence of the external environment.

[0053] S8: Testing and debugging: Conduct electrical and optical performance tests on the prepared silicon-based liquid crystal devices.

[0054] Working principle: In actual use, the device assembles a silicon-based liquid crystal device by assembling a silicon-based substrate 1, a pixel metal layer 2, a sealing frame 3, a bottom alignment layer 4, a liquid crystal layer 5, a top alignment layer 6, a glass 7, a spacer particle layer 8 and a protective overlap assembly 9. Then, a person pulls the flip plate 94. When the flip plate 94 moves, it drives the connecting plate 93 to move. When the connecting plate 93 moves, it drives the adjusting plate 91 to move. When the adjusting plate 91 moves, it drives the sliding block 92 to move. When the sliding block 92 moves, it separates from the cylinder 11.

[0055] Then the personnel rotate the connecting plate 93, and then rotate the flip plate 94, so that the connecting plate 93 is vertical, and the flip plate 94 enters the top of the silicon-based liquid crystal device horizontally. Then the personnel rotate the rotating sleeve 98, and the rotating sleeve 98 rotates and moves along the outer side of the screw rod 916 when rotating, so that the plug 910 is exposed to the outside, and then the two connecting frames 96 are pulled to move. When the connecting frame 96 moves, it drives the protective bottom frame 95 to move inside the flip plate 94, so that the two connecting frames 96 are clamped and fixed between the plug 910 and the positioning strip 97, thereby achieving the purpose of protecting the top of the silicon-based liquid crystal device, preventing the top of the silicon-based liquid crystal device from being damaged by external objects, thereby protecting the top of the silicon-based liquid crystal device and increasing the service life of the top of the silicon-based liquid crystal device;

[0056] Then, the two protected silicon-based liquid crystal devices are installed vertically, and the movable plate 913 is pushed. When the movable plate 913 moves, it drives the friction plate 914 to move inside the connecting plate 93, and drives the precise positioning column 915 to move, so that the precise positioning column 915 enters the circular hole 911 of the movable plate 913 in the second silicon-based liquid crystal device. At this time, the two silicon-based liquid crystal devices are vertically overlapped, which changes the difficulty of overlapping the two silicon-based liquid crystal devices, and prevents the problem of shaking after overlapping the two silicon-based liquid crystal devices, thereby facilitating the storage of multiple silicon-based liquid crystal devices.

[0057] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit them.

Claims

1. A liquid crystal on silicon device, characterized in that: The invention comprises a silicon-based substrate (1), a pixel metal layer (2) is fixedly mounted on the top of the silicon-based substrate (1), a sealing frame (3) is fixedly mounted on the top of the pixel metal layer (2), the sealing frame (3) is composed of two rectangular frames, a bottom alignment layer (4) is fixedly mounted on the top of the pixel metal layer (2) at the edge of the inner wall of the inner rectangular frame of the sealing frame (3), a liquid crystal layer (5) is fixedly arranged on the top of the bottom alignment layer (4), a top alignment layer (6) is arranged on the top of the liquid crystal layer (5), a glass (7) is fixedly mounted on the top of the sealing frame (3), and a glass (8) is fixedly mounted on the inner side of the sealing frame (3). A spacer particle layer (8) is fixedly installed at a position between the two rectangular frames, and a protective overlap assembly (9) is fixedly installed inside the silicon-based substrate (1); the protective overlap assembly (9) comprises an adjustment plate (91) symmetrically slidably connected to the inside of the silicon-based substrate (1), a connecting plate (93) is hingedly installed at the top edge of one end of the adjustment plate (91), a flip plate (94) is hingedly installed at the top edge of the connecting plate (93) away from the adjustment plate (91), a protective bottom frame (95) is horizontally movably connected inside the flip plate (94), and a connecting frame (96) is horizontally movably connected inside the protective bottom frame (95); A positioning bar (97) is fixedly installed inside one of the connection frames (96), and a moving bar (99) is movably connected inside the other connection frame (96). One end face of the moving bar (99) is rotatably connected to a rotating sleeve (98). The rotating sleeve (98) is internally connected to a screw rod (916) via a thread. The screw rod (916) is fixedly installed on one end face of the inner wall of the connection frame (96), and a plug rod (910) is symmetrically fixedly installed on one end face of the moving bar (99); By rotating the rotating sleeve (98), the rotating sleeve (98) moves along the outer side of the screw rod (916) when rotating, and the rotating sleeve (98) drives the moving bar (99) to move when moving, and the moving bar (99) drives the plug (910) to move when moving, so that the plug (910) is exposed outside the connecting frame (96), and then the two connecting frames (96) are pulled, and the connecting frame (96) drives the protective bottom frame (95) to move inside the flip plate (94), and when the two connecting frames (96) are attached, the plug (910) enters the connecting hole of the positioning bar (97), thereby completing the connection between the two connecting frames (96).

2. The liquid crystal on silicon device according to claim 1, characterized in that: Sliding blocks (92) are symmetrically fixedly mounted on both sides of the adjustment plate (91); a fitting groove (10) is provided inside the silicon-based substrate (1) corresponding to the outer side of the protective overlapping component (9); cylinders (11) are fixedly mounted at positions on both sides of the fitting groove (10) inside the silicon-based substrate (1); and a guide hole is provided at a position at one end of the sliding block (92) corresponding to one end of the cylinder (11).

3. The liquid crystal on silicon device according to claim 2, characterized in that: The number of the adjusting plate (91), the connecting plate (93), the flip plate (94), the protective bottom frame (95), the connecting frame (96) and the positioning strip (97) is respectively set to two, the number of the sliding blocks (92) is set to four in total, and the ratio of the number of the adjusting plate (91) to the number of the sliding blocks (92) is one to two.

4. The liquid crystal on silicon device according to claim 3, characterized in that: The two connecting plates (93) are symmetrically provided with circular holes (911) inside, and the bottom ends of the two connecting plates (93) are provided with directional holes (912). A movable plate (913) is horizontally movably connected inside the directional holes (912). A friction plate (914) is fixedly installed on the top of the movable plate (913) and is in contact with the connecting plates (93). A precise positioning column (915) slidably connected to the circular hole (911) is symmetrically embedded and installed on one end surface of the movable plate (913).

5. The liquid crystal on silicon device according to claim 4, characterized in that: One end of the plug (910) is provided with a rounded corner. The plug (910) is made of rubber. A convex ring is integrally formed on the outer side of the plug (910), and the edge of the convex ring is arc-shaped.

6. The liquid crystal on silicon device according to claim 5, characterized in that: The rotating sleeve (98) and the moving bar (99) are connected via a bearing, and the outer side of the moving bar (99) and the inner wall of the connecting frame (96) are in contact with each other.

7. The liquid crystal on silicon device according to claim 6, characterized in that: The positioning bar (97) and the moving bar (99) have the same shape, and a connecting hole is provided on one end of the positioning bar (97) corresponding to one end of the plug (910).

8. A process for preparing a liquid crystal on silicon device according to claim 7, characterized in that: The following steps are involved: S1: Material preparation: prepare the required raw materials; S2: Processing of the silicon-based substrate: cleaning the silicon-based substrate (1), and then performing an oxidation treatment on the cleaned silicon-based substrate (1); S3: Preparation of a pixel metal layer: coating a photoresist on the silicon-based substrate (1), then forming a pattern by photolithography, then evaporating a metal material onto the silicon-based substrate (1) under the protection of the photoresist, and then removing excess metal layer; S4: Preparation of the alignment layer: uniformly coating the alignment layer material on the top of the pixel metal layer (2) and the liquid crystal layer (5), and then heat-treating and curing the alignment layer; S5: Preparation of a liquid crystal layer: evenly distributing spacer particles on the bottom alignment layer (4), and then injecting a liquid crystal material between the bottom alignment layer (4) and the top alignment layer (6); S6: glass encapsulation: the glass (7) is bonded to the top orientation layer (6) to form a sealing structure, and then a sealing frame (3) is installed at the edge of the top orientation layer (6) and the bottom of the glass (7); S7: Installation of a protective lap joint component: installing a protective lap joint component (9) inside the silicon-based substrate (1) to protect the outer side and top of the device from being affected by the external environment; S8: Testing and debugging: Conduct electrical and optical performance tests on the prepared silicon-based liquid crystal devices.

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