Photocuring device and control method thereof, semiconductor process equipment

Abstract

The application discloses a light curing device and a control method thereof and a semiconductor process equipment. The light curing device comprises a driving mechanism (10), a light source device (20), a first sensing part (30) and a controller (40). The light source device (20) is connected with the driving mechanism (10), the controller (40) is connected with the driving mechanism (10), the controller (40) is used for controlling the driving mechanism (10) to drive the light source device (20) to reciprocate rotation between a first position and a second position, the first sensing part (30) is used for generating a first signal when the light source device (20) rotates to a third position, and the third position is located between the first position and the second position. The controller (40) is connected with the first sensing part (30), and during the reciprocating rotation of the light source device (20) between the first position and the second position, the controller (40) controls the driving mechanism (10) to be closed in the case that the first signal is not received.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of semiconductor process equipment, and particularly relates to a photocuring device and a control method thereof, and a semiconductor process equipment. BACKGROUND

[0002] The photocuring process is a common process in semiconductor processes. The photocuring process can improve the mechanical strength of a thin film deposited on a wafer. The photocuring process is usually completed by a photocuring device of a semiconductor process equipment. Taking the photocuring device as an ultraviolet photocuring device as an example, in a specific working process, the ultraviolet photocuring device projects ultraviolet light to the wafer, so as to heat the wafer by means of temperature compensation, and then relieve the temperature unevenness phenomenon existing in heating of a wafer bearing device.

[0003] In order to ensure the consistency of the photocuring process, the light source device in the photocuring device related to the related art rotates under the driving of the driving mechanism. However, the driving mechanism driving the rotation of the light source device may have transmission disconnection, so that when the driving mechanism operates according to the preset control rule, the light source device does not rotate, and then the photocuring process cannot be implemented. At this time, since the driving mechanism does not show abnormality, it cannot be detected, and finally the photocuring process cannot meet the requirements.

[0004] In addition, since the light source device needs to be connected with a cable, the cable is twisted in the process of rotation of the light source device. If the cable is excessively twisted, it will be broken, and then power supply problems will be caused. The photocuring device related to the related art has the problem that the cable is easily damaged and power supply is unstable. Obviously, this will affect the production capacity of the semiconductor process equipment performing the photocuring process. SUMMARY

[0005] The application discloses a photocuring device and a control method thereof, and a semiconductor process equipment, to solve the problem that the photocuring process cannot meet the requirements due to the phenomenon that the driving mechanism normally operates but the light source device does not rotate caused by transmission disconnection of the photocuring device related to the related art, which cannot be detected.

[0006] In order to solve the above technical problems, the application provides the following technical solutions:

[0007] In a first aspect, the application discloses a photocuring device of a semiconductor process equipment, and the disclosed photocuring device comprises a driving mechanism, a light source device, a first sensing part and a controller, wherein,

[0008] The light source device is connected with the driving mechanism, the controller is connected with the driving mechanism, the controller is used for controlling the driving mechanism to drive the light source device to reciprocate between the first position and the second position, the first sensing part is used for generating the first signal when the light source device rotates to the third position, and the third position is between the first position and the second position.

[0009] The controller is connected with the first sensing part, and during the reciprocation of the light source device between the first position and the second position, the controller controls the driving mechanism to be closed in the case that the first signal is not received.

[0010] In the second aspect, the embodiments of the present application disclose a semiconductor process equipment, and the disclosed semiconductor process equipment comprises the light curing device of the first aspect.

[0011] In the third aspect, the embodiments of the present application disclose a control method of a light curing device, and the light curing device is the light curing device of the first aspect, and the control method comprises the following steps.

[0012] The controller controls the driving mechanism to drive the light source device to reciprocate between the first position and the second position.

[0013] In the case that the controller does not receive the first signal, the driving mechanism is controlled to be closed.

[0014] The technical scheme adopted by the present application can achieve the following technical effects:

[0015] The light curing device of the semiconductor process equipment disclosed by the embodiments of the present application can generate an induction signal through the first sensing part when the light source device rotates to the third position, so that the controller can determine whether the light source device passes through the third position during the switching process between the first position and the second position according to whether the first signal can be received. If the controller does not receive the first signal, it indicates that the first sensing part does not generate the first signal, and then it indirectly indicates that the light source device reciprocating between the first position and the second position does not actually pass through the third position, and thus it is known that there is a power transmission problem between the driving mechanism and the light source device, so that the driving mechanism is controlled to be closed and stopped. It can be seen that the light curing device disclosed by the embodiments of the present application can solve the problem that the related art light curing device cannot be found that the driving mechanism normally operates but the light source device does not rotate, and thus the light curing process cannot meet the requirements. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 is a structure schematic view of a light curing device of the semiconductor process equipment disclosed by the embodiments of the present application.

[0017] Figure 2 is another structural schematic view of the light curing device of the semiconductor process equipment disclosed by the embodiments of the present application;

[0018] Figure 3 is a flow schematic view of the control method of the light curing device disclosed by the embodiments of the present application;

[0019] Figure 4 is another flow schematic view of the control method of the light curing device disclosed by the embodiments of the present application;

[0020] wherein, Figure 1 and Figure 2 the arc-shaped arrows in and represent the rotating direction of the light source device 20, of course, Figure 1 and Figure 2 the two light source devices 20 shown in and can also rotate in the direction opposite to the arc-shaped arrows, and the embodiments of the present application do not make any limitation.

[0021] Explanation of reference signs:

[0022] 10-driving mechanism, 11-driving motor, 12-driving wheel, 13-following wheel, 14-idler wheel, 15-transmission belt,

[0023] 20-light source device,

[0024] 30-first sensing part, 31-first sensor, 32-first trigger,

[0025] 40-controller,

[0026] 50-second sensing part, 51-second sensor, 52-second trigger,

[0027] 60-third sensing part, 61-third sensor, 62-third trigger,

[0028] 70-alarm,

[0029] 80-torque detection device,

[0030] 90-base. DETAILED DESCRIPTION

[0031] In order to make the objectives, technical solutions and advantages of the present application clearer, the technical solutions of the present application will be described clearly and completely below in combination with specific embodiments of the present application and corresponding drawings. Obviously, the described embodiments are only some of the embodiments of the present application, but not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without any creative work fall within the scope of protection of the present application.

[0032] The technical solutions disclosed by the embodiments of the present application will be described in detail below with reference to the accompanying drawings.

[0033] Please refer to Figure 1 and Figure 2 The present application discloses a light curing device of a semiconductor process equipment. The disclosed light curing device is part of the semiconductor process equipment. The light curing device disclosed by the embodiments of the present application comprises a driving mechanism 10, a light source device 20, a first sensing part 30 and a controller 40.

[0034] The driving mechanism 10 is a power mechanism of the light curing device. The driving mechanism 10 is connected with the light source device 20, and is used to drive the light source device 20 to rotate. The controller 40 is connected with at least the driving mechanism 10, and is used to control the driving mechanism 10 to drive the light source device 20 to reciprocate between a first position and a second position, so as to realize the rotation requirement of the light curing process.

[0035] In the embodiments of the present application, the first sensing part 30 is used to sense the position of the light source device 20, and generate a first signal when the light source device 20 rotates to a third position. In the embodiments of the present application, the third position is located between the first position and the second position.

[0036] It should be noted that, in the embodiments of the present application, the light source device 20 will change its position when it rotates under the driving of the driving mechanism 10. The reciprocation of the light source device 20 between the first position and the second position means that the light source device 20 rotates from the first position to the second position, and then rotates back from the second position to the first position under the driving of the driving mechanism 10, and this process is repeated until the preset process time is met. The third position is located between the first position and the second position, which means that the light source device 20 will pass through the third position in the process of rotating from the first position to the second position or rotating from the second position to the first position.

[0037] The controller 40 is also connected with the first sensing part 30. In the process of rotating the light source device 20 from the first position to the second position or from the second position to the first position, if the controller 40 receives the first signal, it controls the driving mechanism 10 to maintain in an open state, so that the reciprocation of the light source device 20 between the first position and the second position continues until the preset process time is met.

[0038] In the process of rotating the light source device 20 from the first position to the second position or from the second position to the first position, the controller 40 controls the driving mechanism 10 to be closed in the case that the first signal is not received. As described above, the third position is a position that the light source device 20 must pass through in the reciprocating rotation between the first position and the second position. In the process of rotating the light source device 20 from the first position to the second position or from the second position to the first position, in the normal case, the light source device 20 passes through the third position so that the controller 40 can receive the first signal; in the abnormal case, the light source device 20 does not pass through the third position so that the controller 40 fails to receive the first signal.

[0039] In this article, in the case that the controller 40 does not receive the first signal, it is indicated that the first sensing part 30 does not sense that the light source device 20 passes through the third position, and it is also essentially indicated that, in the process of driving, the light source device 20 does not rotate from the first position to the second position or from the second position to the first position under the driving of the driving mechanism 10 at least once, which obviously indicates that the driving of the driving mechanism 10 to the light source device 20 is abnormal. At this time, the controller 40 controls the driving mechanism 10 to be closed, so as to avoid the invalid driving to continue, and also to enable the operator to perform the corresponding maintenance operation.

[0040] The light curing device of the semiconductor process equipment disclosed in the embodiment of the application can determine whether the light source device 20 passes through the third position in the process of switching between the first position and the second position by adding the first sensing part 30 and enabling the first sensing part 30 to generate the sensing signal in the case that the light source device 20 rotates to the third position, so that the controller 40 can determine whether the light source device 20 passes through the third position in the process of switching between the first position and the second position according to whether the first signal is received. If the controller 40 does not receive the first signal, it is indicated that the first sensing part 30 does not sense the first signal, and it is further indirectly indicated that the light source device 20 actually does not pass through the third position in the reciprocating movement between the first position and the second position, and it is thus known that the power transmission between the driving mechanism 10 and the light source device 20 has a problem, so that the driving mechanism 10 is controlled to be closed and stopped. It can be seen that the light curing device disclosed in the embodiment of the application can solve the problem that the related art light curing device has the phenomenon that the transmission is disconnected, the driving mechanism normally operates but the light source device does not rotate, and the light curing process cannot meet the requirements, which cannot be found.

[0041] In the embodiments of the present application, the driving mechanism 10 can drive the light source device 20 to reciprocate between the first position and the second position through a preset rotation program of the driving mechanism 10. For example, the preset rotation program of the driving mechanism 10 is to drive the light source device 20 to reciprocate in a preset angle range, so that the light source device 20 stops at the two ends of the preset angle range and changes the rotation direction. In an alternative solution, the driving mechanism 10 drives the light source device 20 to reciprocate between 0° and 180°, and the light source device 20 is considered to be in the first position when it rotates to 0°, and the light source device 20 is considered to be in the second position when it rotates to 180°. It should be noted that the light source device 20 in the position of 0° can be considered to be in the initial position. The initial position can be considered to be the position of the light source device 20 corresponding to the output torque of the driving mechanism 10 being 0. In the embodiments of the present application, the first position is not limited to the initial position, and can also not be the initial position, which is not limited in the embodiments of the present application.

[0042] In another embodiment, the driving mechanism 10 drives the light source device 20 to reciprocate between 90° and 270°, and the light source device 20 is considered to be in the first position when it rotates to 90°, and the light source device 20 is considered to be in the second position when it rotates to 270°.

[0043] Of course, in other embodiments, the driving mechanism 10 can be started and stopped under the control of the additionally configured controller 40, and the controller 40 can determine the start and stop of the driving mechanism 10 according to the position detection device, so that the light source device 20 reciprocates between the first position and the second position. For example, the second sensing part 50 described below can detect whether the light source device 20 is in the initial position. Of course, in the case where the first position is the initial position, the second sensing part 50 can also detect whether the light source device 20 is in the first position.

[0044] In further technical solutions, the light curing device disclosed in the embodiments of the present application can further include a second sensing part 50. The second sensing part 50 is used to generate a second signal when the light source device 20 rotates to the first position. The controller 40 can be connected with the second sensing part 50, and the controller 40 receives the second signal, which indicates that the light source device 20 rotates back to the first position. The second sensing part 50 can realize the light source device 20 returning to the first position, so as to start rotating from the first position. Alternatively, in the case where the first position is the initial position, the second sensing part 50 can realize the light source device 20 returning to the initial position, so as to start rotating from the initial position.

[0045] The light curing device disclosed by the embodiment of the present application can comprise a cable. The cable is electrically connected with the light source device 20, thereby supplying power for the light source device 20. The cable has an increasing torsion when the light source device 20 rotates in a direction away from the first position. Of course, in order to reduce the torsion as much as possible, the first position is the initial position, and the torsion of the cable can be zero when the light source device 20 is in the initial position. During the process that the driving mechanism 10 drives the light source device 20 to rotate from the first position, the torsion of the cable gradually increases. Of course, it needs to be emphasized again that the first position can or can not be the initial position.

[0046] In order to avoid the problem that the cable is broken due to too large torsion, the light curing device disclosed by the embodiment of the present application can further comprise a third sensing part 60. The third sensing part 60 is used to generate a third signal when the light source device 20 rotates to a fourth position. It needs to be explained that the second position is between the first position and the fourth position. When the light source device 20 rotates to the fourth position, the torsion reaches an alarm value. In the embodiment of the present application, the controller 40 can control the driving mechanism 10 to be closed when the third signal is received. In the specific control process, when the third signal is received, it indicates that the light source device 20 rotates to the fourth position, and then it is known that the torsion of the cable has reached the alarm value at this time. At this time, it indicates that the light source device 20 has rotated to a relatively dangerous position, and the driving of the driving mechanism 10 to the light source device 20 is in an abnormal state. At this time, the controller 40 controls the driving mechanism 10 to be closed, thereby avoiding the cable from being further twisted to produce a larger torsion and being broken.

[0047] Please refer to Figure 2 The light curing device disclosed by the embodiment of the present application can further comprise an alarm 70. The controller 40 is connected with the alarm 70, and the controller 40 is used to control the alarm 70 to alarm when the first signal is not received or the third signal is received, thereby timely reminding the maintenance personnel. In the embodiment of the present application, the alarm 70 can be a sound alarm, or can be a light alarm, or can simultaneously comprise a sound alarm and a light alarm, and the embodiment of the present application does not limit the specific type of the alarm 70.

[0048] As described above, the driving mechanism 10 drives the light source device 20 to rotate, thereby making the torsion of the light source device 20 increase from the first position. The inventor of the present application finds that the output torque of the driving mechanism 10 also gradually increases in this process. In order to better avoid that the cable suffers from too large torsion, please refer to Figure 2The light curing device disclosed in the embodiments of the present application can further comprise a torque detection device 80. The torque detection device 80 is configured to detect the actual output torque of the driving mechanism 10. The controller 40 is connected to the torque detection device 80 and the driving mechanism 10 respectively. The controller 40 is configured to control the driving mechanism 10 to be turned off when the actual output torque is greater than a first torque threshold. It should be noted that the first torque threshold can be considered as the output torque of the driving mechanism 10 when the torque on the cable reaches the warning value. In this case, the controller 40 can timely control the driving mechanism 10 to be turned off when the torque reaches the warning value, so as to avoid the cable from being broken due to the further increase of the torque.

[0049] During the process of driving the light source device 20 by the driving mechanism 10, the driving mechanism 10 can have a slip phenomenon, for example, the transmission belt of the belt transmission mechanism can slip when the driving mechanism 10 comprises the belt transmission mechanism. In this case, the driving mechanism 10 can drive the light source device 20 to rotate, but the driving efficiency of the driving mechanism 10 on the light source device 20 is greatly reduced due to the slip phenomenon. Correspondingly, how to timely detect the slip phenomenon and make targeted adjustment can timely be repaired. Based on this, the inventors find that the output torque of the driving mechanism 10 can greatly decrease when the driving mechanism 10 has the slip phenomenon. Based on this, in the light curing device disclosed in the embodiments of the present application, the controller 40 is configured to control the driving mechanism 10 to be turned off when the actual output torque is less than a second torque threshold. It should be noted that the first torque threshold is greater than the second torque threshold in this document. The embodiments of the present application do not limit the specific values of the first torque threshold and the second torque threshold.

[0050] Optionally, the first torque threshold can be 50% of the output torque corresponding to the full load power of the driving mechanism 10, and the second torque threshold can be 15% of the output torque corresponding to the full load power of the driving mechanism 10.

[0051] In the light curing device disclosed in the embodiments of the present application, the structures of the first sensing part 30, the second sensing part 50 and the third sensing part 60 can be various, for example, the first sensing part 30, the second sensing part 50 and the third sensing part 60 can be image detection parts, which are configured to collect and process images of the light source device 20 to determine the position of the light source device 20. Of course, the embodiments of the present application do not limit the specific structures of the first sensing part 30, the second sensing part 50 and the third sensing part 60.

[0052] Please refer to Figure 1 or Figure 2The first sensing part 30 disclosed in the embodiments of the present application can include a first sensor 31 and a first trigger 32. The first sensor 31 can be arranged on the light source device 20 and can rotate with the light source device 20. The first trigger 32 is fixedly arranged. In an optional solution, the light curing device can include a base 90, which can be regarded as a fixed seat of the light curing device. The first trigger 32 can be fixed on the base 90. The light source device 20 is rotatably arranged on the base 90, so as to drive the first sensor 31 to rotate relative to the base 90, and finally to rotate relative to the first trigger 32.

[0053] When the light source device 20 rotates to the third position, the first sensor 31 rotates to a position opposite to the first trigger 32, and the first trigger 32 triggers the first sensor 31, so that the first sensor 31 generates a first signal, thereby realizing that the first sensing part 30 generates the first signal. In the embodiments of the present application, the first sensor 31 can be an optical signal sensor, and the first trigger 32 can be a second blocking piece. When the second blocking piece is not opposite to the first sensor 31, the first optical signal emitted by the first sensor 31 is not blocked. When the second blocking piece is opposite to the first sensor 31, the first optical signal emitted by the first sensor 31 is blocked, so that the first sensor 31 receives the first optical signal reflected back by the second blocking piece, thereby causing the first sensor 31 to generate the first signal.

[0054] Similarly, the second sensing part 50 can include a second sensor 51 and a second trigger 52. The second trigger 52 is arranged on the light source device 20 and can rotate with the light source device 20. The first sensor 31 and the second trigger 52 are arranged at intervals in the rotation direction of the light source device 20 (for example, the direction corresponding to the arc-shaped arrow in FIG. 1). Figure 1 And Figure 2 The second sensor 51 is fixedly arranged. Optionally, the second sensor 51 can be fixed on the base 90. When the light source device 20 rotates to the initial position, the second trigger 52 rotates to a position opposite to the second sensor 51 and triggers the second sensor 51 to generate a second signal. In the embodiments of the present application, the second sensor 51 can also be an optical signal sensor, and the second trigger 52 can be a first blocking piece. When the first blocking piece is not opposite to the second sensor 51, the second optical signal emitted by the second sensor 51 is not blocked. When the first blocking piece is opposite to the second sensor 51, the second optical signal emitted by the second sensor 51 is blocked, so that the second sensor 51 receives the second optical signal reflected back by the first blocking piece, thereby causing the second sensor 51 to generate the second signal.

[0055] Similarly, the third sensing portion 60 can include a third sensor 61 and a third trigger 62. The third sensor 61 is arranged on the light source device 20 and can rotate with the light source device 20. The third sensor 61, the first sensor 31 and the second trigger 52 are all arranged on the light source device 20 and are spaced apart in the rotation direction of the light source device 20. The third trigger 62 is fixedly arranged, and optionally, the third trigger 62 can be fixed on the base 90. When the light source device 20 rotates to the fourth position, the third sensor 61 rotates to a position opposite to the third trigger 62 and is triggered by the third trigger 62 to generate a third signal. In the embodiment of the present application, the third sensor 61 can be an optical signal sensor, and the third trigger 62 can be a third baffle. When the third baffle is not opposite to the third sensor 61, the third optical signal emitted by the third sensor 61 is not blocked. When the third baffle is opposite to the third sensor 61, the third optical signal emitted by the third sensor 61 is blocked, so that the third sensor 61 receives the third optical signal reflected back by the third baffle, thereby causing the third sensor 61 to generate a third signal.

[0056] In a further technical solution, the second sensor 51 can be multiplexed with the first trigger 32 and the third trigger 62 respectively, to serve as a second baffle and a third baffle capable of cooperating with the first sensor 31 and the third sensor 61 respectively.

[0057] That is, when the first sensor 31 rotates to a position opposite to the second sensor 51, the second sensor 51 can replace the second baffle to block the first optical signal emitted by the first sensor 31, so that the first sensor 31 receives the first optical signal reflected back by the second sensor 51 to generate a first signal.

[0058] When the third sensor 61 rotates to a position opposite to the second sensor 51, the second sensor 51 can replace the third baffle to block the third optical signal emitted by the third sensor 61, so that the third sensor 61 receives the third optical signal reflected back by the second sensor 51 to generate a third signal. In this case, there is no need to additionally configure the first trigger 32 and the third trigger 62, and only the second sensor 51 needs to be configured, which undoubtedly can reduce the number of components, and thus is conducive to simplifying the structure of the light curing device.

[0059] In the embodiment of the present application, the width of the second baffle can be equal to the product of the response time of the second sensor 51 and the linear speed of the light source device 20. It should be noted that, in the embodiment of the present application, the width of the second baffle refers to the size of the second baffle in the rotation direction of the light source device 20, and the linear speed of the light source device 20 refers to the linear speed of the edge of the light source device 20. Of course, in the case where the second sensor 51 is the second baffle or the third baffle, the width of the second sensor 51 can also be designed in the above manner. In the embodiment of the present application, the response time of the second sensor 51 can be a preset value, and the embodiment of the present application does not limit the specific value of the response time.

[0060] As described above, the controller 40 is configured to control the driving mechanism 10 to drive the light source device 20 to reciprocate between the first position and the second position. In a further technical solution, the controller 40 disclosed in the embodiment of the present application is further configured to, after the light source device 20 reciprocates between the first position and the second position for a first preset time period, control the driving mechanism 10 to drive the light source device 20 to reciprocate between the fifth position and the sixth position for a second preset time period, wherein the first position is the initial position. It should be noted that the fifth position is located between the third position and the first position, and the sixth position is located between the fourth position and the second position. In the process of reciprocating the light source device 20 between the fifth position and the sixth position, the controller 40 controls the driving mechanism 10 to be turned off in the case where the first signal is not received. In this case, the first sensing part 30 can be used to detect whether the driving is normal, regardless of whether the light source device 20 is reciprocating between the first position and the second position or reciprocating between the fifth position and the sixth position, so as to achieve the purpose of repeated use.

[0061] For example, the controller 40 controls the light source device 20 to reciprocate between 0°-180° for 30 minutes (at this time, the first preset time period is 30 minutes), and then controls the driving mechanism 10 to drive the light source device to reciprocate between 90°-270° for 30 minutes (at this time, the second preset time period is 30 minutes). When the light source device 20 rotates to 0°, the light source device 20 is at the first position, and the second sensor 51 is triggered by the second trigger 52 to generate the second signal. When the light source device 20 rotates to 180°, the light source device 20 is at the second position. When the light source device rotates to 170°, the light source device 20 is at the third position, and the first sensor 31 is triggered by the first trigger 32 to generate the first signal.

[0062] When the light source device 20 rotates to 90°, the light source device 20 is at the fifth position; when the light source device 20 rotates to 270°, the light source device 20 is at the sixth position. When the light source device 20 rotates to 275° or 280°, the light source device 20 is at the fourth position.

[0063] In the embodiments of the present application, the driving mechanism 10 can be of various types. For example, the driving mechanism 10 can include a driving motor 11, which can be directly connected to the light source device 20 to drive the light source device 20 to rotate. Of course, please refer again to Figure 1 or Figure 2 The driving mechanism 10 can also include a driving motor 11 and a transmission mechanism, and the driving motor 11 can be connected to the light source device 20 through the transmission mechanism to drive the light source device 20 to rotate.

[0064] In order to improve productivity, the photocuring device disclosed in the embodiments of the present application can include at least two light source devices 20, and the driving mechanism 10 can drive the at least two light source devices 20 to rotate at the same time, so that the at least two light source devices 20 irradiate the corresponding wafers, respectively.

[0065] As described above, the driving motor 11 can be connected to the light source device 20 through the transmission mechanism. The transmission mechanism can be of various types. Please refer again to Figure 1 In an alternative embodiment, the transmission mechanism can include a driven wheel 13, the light source device 20 is arranged on the driven wheel 13 and coaxially arranged with the driven wheel 13, and the driven wheel 13 can be rotatably arranged, for example, rotatably arranged on the base 90. In the case where the photocuring device simultaneously includes the first sensor 31, the second trigger 52 and the third sensor 61, the first sensor 31, the second trigger 52 and the third sensor 61 are arranged on the driven wheel 13, and the third sensor 61, the first sensor 31 and the second trigger 52 can be distributed on the rim of the driven wheel 13 in the rotation direction of the light source device 20.

[0066] The transmission mechanism can be a belt transmission mechanism. Based on this, in a further alternative, the transmission mechanism can also include a transmission belt 15, and the driven wheel 13 can be two and both transmissionally cooperate with the transmission belt 15. The driving motor 11 transmissionally cooperates with the transmission belt 15, and the driving motor 11 drives the two driven wheels 13 to rotate synchronously through the transmission belt 15. Of course, the light source device 20 can be two and correspondingly arranged on the two driven wheels 13. Specifically, the driving motor 11 has a driving wheel 12 fixed thereon, and two idler wheels 14 are arranged on both sides of the driving wheel 12, and the two idler wheels 14 and the driving wheel 12 are respectively located on the opposite sides of the transmission belt 15. The operation of the driving motor 11 drives the driving wheel 12 to rotate, and the rotation of the driving wheel 12 drives the driven wheel 13 to rotate through the transmission belt 15, thereby driving the light source device 20 to rotate. The two idler wheels 14 can play a tensioning role to improve the transmission stability.

[0067] Of course, in the embodiments of the present application, the transmission mechanism can also be a gear transmission mechanism, a chain transmission mechanism, etc., and the embodiments of the present application do not limit the specific type of the transmission mechanism.

[0068] In the embodiments of the present application, the light source device 20 can be at least two, and the driving mechanism 10 can be connected to drive all the light source devices 20 to rotate in the same direction and synchronously. Based on this, the light curing device can only configure the first sensing part 30, the second sensing part 50 and the third sensing part 60 for one of the light source devices 20, thereby achieving the purpose of detecting the position of all the light source devices 20, and this method has the advantage of simple structure.

[0069] In order to improve the working stability of the light curing device, in an alternative scheme, the light curing device can configure the first sensing part 30, the second sensing part 50 and the third sensing part 60 for each light source device 20 respectively, as shown in Figure 1 or Figure 2 Such a redundant design can enable other first sensing parts 30, second sensing parts 50 or third sensing parts 60 to replace the individual first sensing part 30, second sensing part 50 or third sensing part 60 that fails to work.

[0070] Of course, in the case that the first sensing part 30, the second sensing part 50 and the third sensing part 60 configured for each light source device 20 are all working normally, such a redundant design can also play a role of mutual verification, thereby improving the accuracy of position sensing detection.

[0071] In the embodiments of the present application, the light source device 20 can be an ultraviolet light source. In this case, the light curing device is an ultraviolet light curing device. Of course, the light source device 20 is not limited to an ultraviolet light source, and correspondingly, the light curing device is not limited to an ultraviolet light curing device, and the embodiments of the present application do not limit the specific types of the light source device 20 and the light curing device.

[0072] Based on the light curing device disclosed in the embodiments of the present application, the embodiments of the present application disclose a semiconductor process equipment. The disclosed semiconductor process equipment includes the light curing device described in the above embodiments.

[0073] Similarly, based on the light curing device disclosed in the embodiments of the present application, please refer to Figure 3 , the embodiments of the present application disclose a control method of a light curing device, the light curing device involved is the light curing device described in any one of the above embodiments, and the disclosed control method includes:

[0074] S101, the controller 40 controls the driving mechanism 10 to drive the light source device 20 to reciprocate between the first position and the second position.

[0075] S102, in the case that the controller 40 does not receive the first signal, the driving mechanism 10 is controlled to be closed.

[0076] The control method of the light curing device disclosed in the embodiments of the present application corresponds to the light curing device described in the above embodiments, and thus the technical effects brought by the control method can refer to the technical effects described above for the light curing device, which will not be repeated here.

[0077] In a further technical solution, as described above, the light curing device disclosed in the embodiments of the present application can further include a third sensing portion 60 and a cable electrically connected with the light source device 20; the cable has an increasing torsion when the light source device 20 rotates in a direction away from the first position; the third sensing portion 60 is configured to generate a third signal when the light source device 20 rotates to a fourth position, the second position being between the first position and the fourth position, and in the case that the light source device 20 rotates to the fourth position, the torsion reaches an alarm value, and the disclosed control method can further include: in the case that the controller 40 receives the third signal, controlling the driving mechanism 10 to be closed.

[0078] In this solution, the controller 40 controls the driving mechanism 10 to be closed in the case that the third signal is received, which can avoid the cable from being broken due to excessive torsion.

[0079] As described above, the light curing device disclosed in the embodiments of the present application can further include a torque detection device 80, and the controller 40 can be connected with the torque detection device 80 and the driving mechanism 10 respectively, and in a further technical solution, please refer to Figure 4 , the control method can further include:

[0080] S201, controlling the torque detection device 80 to detect the actual output torque of the driving mechanism 10.

[0081] S202, in the case that the actual output torque is greater than a first torque threshold or less than a second torque threshold, controlling the driving mechanism 10 to be closed. It should be noted that the first torque threshold is greater than the second torque threshold.

[0082] The corresponding technical effects of the control method can refer to the technical effect descriptions of the corresponding parts of the light curing device described above, which will not be repeated here.

[0083] In the above embodiments of the present application, the focus is on the differences between the various embodiments, and the technical features of the various embodiments that are not contradictory can be combined to form more specific embodiments. Considering the brevity of the writing, it will not be repeated here.

[0084] The embodiments of the present application are described above with reference to the accompanying drawings, but the present application is not limited to the above-described specific embodiments, and the above-described specific embodiments are merely illustrative, but not restrictive, and a person of ordinary skill in the art can make many forms under the inspiration of the present application without departing from the purpose of the present application and the scope protected by the claims, and all of them belong to the protection of the present application.

Claims

1. A photocuring apparatus for semiconductor process equipment, characterized in that, It includes a drive mechanism (10), a light source device (20), a first sensing unit (30), and a controller (40), wherein, The light source device (20) is connected to the driving mechanism (10), and the controller (40) is connected to the driving mechanism (10). The controller (40) is used to control the driving mechanism (10) to drive the light source device (20) to reciprocate between a first position and a second position. The first sensing unit (30) is used to generate a first signal when the light source device (20) rotates to a third position. The third position is located between the first position and the second position. The controller (40) is connected to the first sensing unit (30). During the process of the light source device (20) reciprocating between the first position and the second position, the controller (40) controls the drive mechanism (10) to shut down when it does not receive the first signal.

2. The photocuring apparatus according to claim 1, characterized in that, The photocuring device also includes a third sensing unit (60) and a cable electrically connected to the light source device (20); The torque of the cable increases as the light source device (20) rotates away from the first position; The third sensing unit (60) is used to generate a third signal when the light source device (20) is rotated to the fourth position, the second position being located between the first position and the fourth position. When the light source device (20) is rotated to the fourth position, the torque reaches a warning value, and the controller (40) controls the drive mechanism (10) to shut down upon receiving the third signal.

3. The photocuring apparatus according to claim 2, characterized in that, The photocuring device also includes an alarm (70), and the controller (40) is connected to the alarm (70). The controller (40) is used to control the alarm (70) to sound an alarm when the first signal is not received or the third signal is received.

4. The photocuring apparatus according to claim 2, characterized in that, The photocuring device further includes a second sensing unit (50), which is used to generate a second signal when the light source device (20) rotates to the initial position. The first sensing unit (30) includes a first sensor (31) and a first trigger (32). The second sensing unit (50) includes a second sensor (51) and a second trigger (52). The third sensing unit (60) includes a third sensor (61) and a third trigger (62). The third sensor (61), the first sensor (31) and the second trigger (52) are disposed on the light source device (20) and are distributed at intervals in the rotation direction of the light source device (20). The third trigger (62), the second sensor (51) and the first trigger (32) are all fixedly disposed. When the light source device (20) rotates to the third position, the first sensor (31) rotates to a position opposite to the first trigger (32) and is triggered by the first trigger (32) to generate the first signal; When the light source device (20) rotates to the initial position, the second trigger (52) rotates to a position opposite to the second sensor (52) and triggers the second sensor (51) to generate the second signal; When the light source device (20) rotates to the fourth position, the third sensor (61) rotates to a position opposite to the third trigger (62) and is triggered by the third trigger (62) to generate the third signal.

5. The photocuring apparatus according to claim 4, characterized in that, The second trigger (52) is a first baffle, and the second sensor (51) is reused with the first trigger (32) and the third trigger (62) respectively, so as to serve as a second baffle and a third baffle that can cooperate with the first sensor (31) and the third sensor (61) respectively.

6. The photocuring apparatus according to claim 5, characterized in that, The width of the first baffle is equal to the product of the response time of the second sensor (51) and the linear velocity of the light source device (20), wherein the width of the first baffle is the dimension of the first baffle in the rotation direction of the light source device (20).

7. The photocuring apparatus according to claim 2, characterized in that, The first position is the initial position. The controller (40) is also used to control the drive mechanism (10) to drive the light source device (20) to reciprocate between the first position and the second position for a second preset time period after the light source device (20) has reciprocated between the first position and the second position for a first preset time period. The fifth position is located between the third position and the first position, and the sixth position is located between the fourth position and the second position; during the process of the light source device (20) reciprocating between the fifth position and the sixth position, the controller (40) controls the drive mechanism (10) to shut down if it does not receive the first signal.

8. The photocuring apparatus according to claim 1, characterized in that, The photocuring device further includes a torque detection device (80), which is used to detect the actual output torque of the drive mechanism (10). The controller (40) is connected to the torque detection device (80) and the drive mechanism (10) respectively. The controller (40) is used to control the drive mechanism (10) to shut down when the actual output torque is greater than a first torque threshold or less than a second torque threshold. The first torque threshold is greater than the second torque threshold.

9. A semiconductor process apparatus, characterized in that, The photocuring apparatus includes any one of claims 1 to 8.

10. A method for controlling a photocuring apparatus, characterized in that, The photocuring apparatus is the photocuring apparatus according to claim 1, and the control method includes: The controller (40) controls the drive mechanism (10) to drive the light source device (20) to reciprocate between the first position and the second position; If the controller (40) does not receive the first signal, it controls the drive mechanism (10) to shut down.

11. The control method according to claim 10, characterized in that, The photocuring device further includes a third sensing unit (60) and a cable electrically connected to the light source device (20); the cable increases torque as the light source device (20) rotates away from the first position; the third sensing unit (60) generates a third signal when the light source device (20) rotates to a fourth position, the second position being located between the first position and the fourth position, and the torque reaches a warning value when the light source device (20) rotates to the fourth position; the control method further includes: When the controller (40) receives the third signal, it controls the drive mechanism (10) to close.

12. The control method according to claim 10, characterized in that, The photocuring device further includes a torque detection device (80), and the controller (40) is connected to the torque detection device (80) and the drive mechanism (10) respectively. The control method further includes: The torque detection device (80) is controlled to detect the actual output torque of the drive mechanism (10); If the actual output torque is greater than a first torque threshold or less than a second torque threshold, the drive mechanism (10) is controlled to close, where the first torque threshold is greater than the second torque threshold.

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