Jetting device and working method thereof

Abstract

The invention belongs to the technical field of spraying devices, and particularly relates to a spraying device and a working method thereof.The spraying device comprises a spraying device body, a spraying head, a spraying head and a driving device, the valve element is arranged in the mounting hole and comprises an on-off diaphragm and a linkage assembly, a diaphragm part of the on-off diaphragm is pressed by the linkage assembly to seal the mounting hole, and the linkage assembly is configured to push a piston of the on-off diaphragm to stretch into the medium flow channel and cut off the medium flow channel into a flow inlet channel and a flow outlet channel; according to the spraying device and the working method thereof, in the process that the piston of the on-off diaphragm opens and closes the medium flow channel, when a medium in the medium flow channel generates impact force on the piston, the direction of the impact force is coaxial with the moving direction of the piston, and therefore the piston is not prone to falling off. Compared with the prior art that the valve element can be subjected to radial impact force, the piston in the embodiment is not prone to bending after being used for a long time.

Description

Technical Field

[0001] The present invention belongs to the technical field of injection devices, and specifically relates to a device for controlling discharge volume, and more particularly to an injection device and a working method thereof. Background Art

[0002] In the related art, on a semiconductor production line, a spray device is generally used to connect a water pipe or an air pipe to clean and dry semiconductor devices, such as a "high-purity spray device" with a publication number of "CN103357530A", which uses a valve core to control the on and off of the flow channel.

[0003] However, in the above-mentioned "high-purity injection device", the movement direction of the valve core has a certain angle with the flow direction of the medium, resulting in that at the moment of opening and closing the flow channel, most of the impact force of the medium acts on the side wall of the valve core, which makes the valve core easy to bend after working for a long time, making it difficult to completely cut off the flow channel; at the same time, the valve core solves the sealing problem by installing a sealing ring on the side wall, and the valve core needs to be controlled to move every time the flow channel is opened and closed. This movement can easily cause the sealing ring to wear, shift and other problems, resulting in sealing failure.

[0004] Therefore, how to solve the technical problem that the valve core is subjected to a deflection force during movement, and the deflection force aggravates the wear and displacement of the sealing ring, thereby causing sealing failure, is urgently needed to be solved by technical personnel in this field.

[0005] It should be noted that the above information disclosed in this background technology section is only used to understand the background technology of the present application concept, and therefore, the above description is not considered to constitute information of the prior art. Summary of the invention

[0006] The embodiments of the present disclosure at least provide a spray device and a working method thereof.

[0007] In the first aspect, an embodiment of the present disclosure provides an injection device, comprising: an injection device body, in which a medium flow channel and a mounting hole connected to the medium flow channel are opened; a valve core, which is arranged in the mounting hole and comprises: an on-off diaphragm and a linkage assembly, the diaphragm portion of the on-off diaphragm is pressed by the linkage assembly to seal the mounting hole, and the linkage assembly is configured to push the piston of the on-off diaphragm to extend into the medium flow channel and cut the medium flow channel into an inlet channel and an outlet channel; a handle, which is connected to the linkage assembly of the valve core and is configured to drive the piston connected to the linkage assembly to move in the opposite direction by pressing to open the medium flow channel; wherein the moving direction F1 of the piston is coaxial with the impact direction F2 of the medium in the inlet channel.

[0008] In an optional embodiment, a hanging platform is arranged in the mounting hole; the diaphragm portion is arranged around the side wall of the piston; the diaphragm portion is against the hanging platform and is pressed by a linkage assembly.

[0009] In an optional embodiment, the linkage assembly includes: a connecting shaft and a return spring; wherein the inner end of the connecting shaft is connected to the piston, and the outer end of the connecting shaft is connected to the handle; the return spring is sleeved on the connecting shaft and is configured to push the connecting shaft to move so that the piston cuts off the medium flow channel.

[0010] In an optional embodiment, the linkage assembly also includes: a limiting sleeve; wherein the side wall of the limiting sleeve is provided with an external thread, and the inner wall of the mounting hole is provided with an internal thread; the limiting sleeve is threadedly connected to the mounting hole, and the inner end surface is pressed against the diaphragm part on the hanging platform.

[0011] In an optional embodiment, the limiting sleeve is provided with a guide portion; the side wall of the connecting shaft is provided with a guide ring; the guide ring is located in the guide portion to guide the piston connected to the connecting shaft to move along the F1 direction.

[0012] In an optional embodiment, a flange is provided on a side of the diaphragm portion facing the piston.

[0013] In an optional embodiment, an angle α is formed between the outlet end of the inlet channel and the inlet end of the outlet channel, and the angle α is in the range of 70-110°.

[0014] In an optional embodiment, the outlet end of the outflow channel is threadedly connected with a nozzle; and a detachable hook is provided on the upper part of the spray device body.

[0015] In an optional embodiment, a filter is provided between the nozzle and the outlet end of the outflow channel; the filter is threadedly connected to the nozzle, and the filter is threadedly connected to the outlet end of the outflow channel.

[0016] In the second aspect, the embodiment of the present disclosure also provides a working method of the injection device, including: pushing the piston of the on-off diaphragm through a linkage assembly to cut off the medium flow channel, and cutting the medium flow channel into an inlet channel and an outlet channel; pressing the diaphragm part of the on-off diaphragm through the linkage assembly to seal the mounting hole; driving the piston connected to the linkage assembly to move in the opposite direction by pressing the handle to open the medium flow channel; wherein the movement direction F1 of the piston is coaxial with the impact direction F2 of the medium in the inlet channel.

[0017] The beneficial effect of the present invention is that when the piston of the on-off diaphragm of the injection device and its working method opens and closes the medium flow channel, the medium in the medium flow channel generates an impact force on the piston, and the direction of the impact force is coaxial with the moving direction of the piston. Compared with the radial impact force of the valve core in the prior art, the piston in the present embodiment is not easy to bend after long-term use, that is, the sealing point of the piston is very precise and is not easy to deviate and cause sealing failure; at the same time, when the piston of the on-off diaphragm opens and closes the medium flow channel, only the piston is moving, the diaphragm part does not move, and the diaphragm part is always pressed, thereby avoiding problems such as displacement or wear of the sealing part of the diaphragm part due to piston movement, which in turn causes sealing failure.

[0018] Other features and advantages of the present invention will be described in the following description, and partly become apparent from the description, or understood by practicing the present invention. The purpose and other advantages of the present invention are realized and obtained by the structures particularly pointed out in the description and the drawings.

[0019] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, this article specifically cites preferred embodiments and provides detailed descriptions as follows in conjunction with the attached drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0021] Figure 1 A schematic diagram of the structure of a spray device provided in an embodiment of the present disclosure; Figure 2 A schematic diagram of the installation position of a valve core provided in an embodiment of the present disclosure; Figure 3 A schematic diagram of the structure of a medium flow channel provided in an embodiment of the present disclosure; Figure 4 A schematic diagram of the structure of a valve core provided in an embodiment of the present disclosure; Figure 5 A schematic diagram of the structure of a linkage component provided in an embodiment of the present disclosure.

[0022] In the figure: Spray device body 1; Medium flow channel 2, inlet channel 21, outlet channel 22; Mounting hole 3, hanging platform 31, internal thread 32; Valve core 4, on-off diaphragm 41, piston 411, diaphragm part 412, flange 413, linkage assembly 42, connecting shaft 421, guide ring 4211, return spring 422, limit sleeve 423, external thread 4231, guide part 4232; Handle 5, nozzle 6, filter 7, hook 8; The moving direction of the piston is F1, and the impact direction of the medium in the inlet channel is F2. DETAILED DESCRIPTION

[0023] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution of the present invention will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0024] It should be noted that similar reference numerals and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further defined and explained in the subsequent drawings. In addition, in the drawings, the thickness of the components may be exaggerated or reduced in order to effectively describe the technical content.

[0025] Some embodiments of the present invention are described in detail below in conjunction with the accompanying drawings. In the absence of conflict, the following embodiments and features in the embodiments can be combined with each other.

[0026] like Figure 1 , Figure 2 As shown, at least one embodiment provides an injection device, which includes: an injection device body 1, in which a medium flow channel 2 and a mounting hole 3 connected to the medium flow channel 2 are opened; a valve core 4, which is arranged in the mounting hole 3 and includes: an on-off diaphragm 41 and a linkage assembly 42, the diaphragm portion 412 of the on-off diaphragm 41 is pressed by the linkage assembly 42 to seal the mounting hole 3, and the linkage assembly 42 is configured to push the piston 411 of the on-off diaphragm 41 to extend into the medium flow channel 2, and cut the medium flow channel 2 into an inlet channel 21 and an outlet channel 22; a handle 5, which is connected to the linkage assembly 42 of the valve core 4, and is configured to drive the piston 411 connected to the linkage assembly 42 to move in the opposite direction by pressing to open the medium flow channel 2; wherein the moving direction F1 of the piston 411 is coaxial with the impact direction F2 of the medium in the inlet channel 21.

[0027] In the present embodiment, when the piston 411 of the on-off diaphragm 41 is in the process of opening and closing the medium flow channel 2, the medium in the medium flow channel 2 generates an impact force on the piston 411, and the direction of the impact force is coaxial with the moving direction of the piston 411. Compared with the radial impact force of the valve core in the prior art, the piston 411 in the present embodiment is not easy to bend after long-term use, that is, the sealing point of the piston 411 is very precise and is not easy to deviate and cause sealing failure; at the same time, when the piston 411 of the on-off diaphragm 41 is in the process of opening and closing the medium flow channel 2, only the piston 411 is moving, and the diaphragm part 412 will not move, and the diaphragm part 412 is always pressed, thereby avoiding the problem of displacement or wear of the sealing part of the diaphragm part 412 due to the movement of the piston 411, which in turn causes sealing failure.

[0028] like Figure 3 As shown, in some embodiments, a hanging platform 31 is provided in the mounting hole 3 ; the diaphragm portion 412 is disposed around the side wall of the piston 411 ; the diaphragm portion 412 abuts against the hanging platform 31 and is pressed by the linkage assembly 42 .

[0029] In this embodiment, the diaphragm portion 412 is pressed against the hanging platform 31 , and the diaphragm portion 412 does not move during the movement of the piston 411 , thereby avoiding wear and displacement.

[0030] like Figure 4 As shown, in some embodiments, a flange 413 is provided on the side of the diaphragm portion 412 facing the piston 411 .

[0031] In this embodiment, the existence of the flange 413 enables the sealing surface to form a right angle, thereby achieving a better sealing effect; at the same time, it can better prevent the diaphragm portion 412 from being pulled and displaced.

[0032] In some embodiments, an annular groove for accommodating the flange 413 is formed on the hanging platform 31 .

[0033] like Figure 4 As shown, in some embodiments, the linkage assembly 42 includes: a connecting shaft 421 and a return spring 422; wherein the inner end of the connecting shaft 421 is connected to the piston 411, and the outer end of the connecting shaft 421 is connected to the handle 5; the return spring 422 is sleeved on the connecting shaft 421, and is configured to push the connecting shaft 421 so that the piston 411 cuts off the medium flow channel 2.

[0034] In this embodiment, the function of the connecting shaft 421 is to drive the piston 411 to move along the F1 direction by pressing the handle 5, so that it remains coaxial with the impact direction F2 of the medium, thereby avoiding the impact force generated by the side wall of the piston 411; and the function of the reset spring 422 is to push the connecting shaft 421 when the handle 5 is released so that the connecting shaft 421 drives the piston 411 to reset, thereby cutting off the medium flow channel 2.

[0035] like Figure 2 , Figure 4 As shown, in some embodiments, the linkage assembly 42 also includes: a limiting sleeve 423; wherein the side wall of the limiting sleeve 423 is provided with an external thread 4231, and the inner wall of the mounting hole 3 is provided with an internal thread 32; the limiting sleeve 423 is threadedly connected to the mounting hole 3, and the inner end surface is pressed against the diaphragm portion 412 on the hanging platform 31.

[0036] In this embodiment, when the limiting sleeve 423 is connected, the inner end surface of the limiting sleeve 423 abuts against the diaphragm portion 412, so that the diaphragm portion 412 is pressed against the hanging platform 31, thereby achieving a sealing effect.

[0037] like Figure 5 As shown, in some embodiments, the limiting sleeve 423 is provided with a guide portion 4232 ; the side wall of the connecting shaft 421 is provided with a guide ring 4211 ; the guide ring 4211 is located in the guide portion 4232 to guide the moving direction of the connecting shaft 421 .

[0038] In this embodiment, the guide ring 4211 cooperates with the guide portion 4232 to guide the moving direction of the connecting shaft 421 , so that the piston 411 can accurately cut off the medium flow channel 2 .

[0039] like Figure 3 As shown, in some embodiments, the outlet end of the inlet channel 21 and the inlet end of the outlet channel 22 form an angle α, and the angle α ranges from 70° to 110°.

[0040] Optionally, the angle α ranges from 85° to 95°.

[0041] Preferably, the angle α is in the range of 90°.

[0042] like Figure 1 , Figure 2 As shown, in some embodiments, the outlet end of the outflow channel 22 is threadedly connected with a nozzle 6; and a detachable hook 8 is provided on the upper part of the spray device body 1.

[0043] In this embodiment, the presence of the hook 8 can effectively prevent the nozzle 6 from being contaminated after the spray device body 1 falls or is randomly placed.

[0044] like Figure 1 , Figure 2 As shown, in some embodiments, a filter 7 is provided between the nozzle 6 and the outlet end of the outlet channel 22 ; the filter 7 is threadedly connected to the nozzle 6 , and the filter 7 is threadedly connected to the outlet end of the outlet channel 22 .

[0045] In this embodiment, the filter 7 functions to filter impurities and particles in the medium flow channel 2 to prevent the impurities and particles from damaging the semiconductor surface.

[0046] At least one embodiment also provides a working method of the injection device, which includes: pushing the piston 411 of the on-off diaphragm 41 through the linkage component 42 to cut off the medium flow channel 2, and cutting the medium flow channel 2 into the inlet channel 21 and the outlet channel 22; pressing the diaphragm portion 412 of the on-off diaphragm 41 through the linkage component 42 to seal the mounting hole 3; driving the piston 411 connected to the linkage component 42 to move in the opposite direction by pressing the handle 5 to open the medium flow channel 2; wherein the moving direction F1 of the piston 411 is coaxial with the impact direction F2 of the medium in the inlet channel 21.

[0047] In some embodiments, the material of the injection device body 1 and the nozzle 6 can be, but is not limited to, PFA, PVDF, PP, and PTFE.

[0048] Regarding the specific structure and implementation process of the injection device, please refer to the relevant discussion in the above embodiments, which will not be repeated here.

[0049] To sum up, in the process of opening and closing the medium flow channel 2, when the piston 411 of the on-off diaphragm 41 of the present injection device and its working method generates an impact force on the piston 411, the direction of the impact force is coaxial with the moving direction of the piston 411. Compared with the radial impact force of the valve core in the prior art, the piston 411 in the present embodiment is not easy to bend after long-term use, that is, the sealing point of the piston 411 is very precise and is not easy to deviate and cause sealing failure; at the same time, in the process of opening and closing the medium flow channel 2, only the piston 411 of the on-off diaphragm 41 is moving, and the diaphragm part 412 will not move, and the diaphragm part 412 is always pressed, thereby avoiding the problem of displacement or wear of the sealing part of the diaphragm part 412 due to the movement of the piston 411, which further causes sealing failure.

[0050] Herein, when it is mentioned that a first component is located on a second component, this may mean that the first component may be directly formed on the second component, or a third component may be interposed between the first component and the second component.

[0051] In this article, when an element or layer is referred to as being "located on," "engaged to," "connected to," "attached to," or "coupled to" another element or layer, it may be directly located on, engaged, connected, attached to, or coupled to another element or layer, or there may be intermediate elements or layers. In contrast, when an element is referred to as being "directly on," "directly engaged to," "directly connected to," "directly attached to," or "directly coupled to" another element or layer, there may be no intermediate elements or layers. Other words used to describe the relationship between elements should be interpreted in a similar manner (e.g., "between" versus "directly between," "adjacent" versus "directly adjacent," etc.). As used herein, the term "and / or" includes any and all combinations of one or more of the associated listed items.

[0052] Herein, example embodiments of the present disclosure will be described in more detail with reference to the accompanying drawings. As used herein, expressions such as "at least one of..." modify the entire list of elements when following a list of elements, rather than modifying individual elements in the list. For example, the expression "at least one of a, b, and c" should be understood to include only a, only b, only c, both a and b, both a and c, both b and c, or all of a, b, and c.

[0053] The terms used herein are only used to describe specific exemplary configurations and are not intended to be limited. As used herein, the singular articles "one", "an" and "the" may also be intended to include plural forms, unless it is clearly indicated above that this is not the case. The terms "comprise", "include" and "have" are inclusive, and therefore specify the presence of features, steps, operations, elements and / or components, but do not exclude the presence or addition of one or more other features, steps, operations, elements, components and / or combinations thereof. The method steps, processes and operations described herein should not be interpreted as necessarily requiring them to be performed in the specific order discussed or shown, unless specifically identified as an execution order. Additional or alternative steps may be adopted.

[0054] As used herein, the phrases "in one embodiment," "according to one embodiment," "in some embodiments," and the like generally refer to the fact that the particular feature, structure, or characteristic following the phrase may be included in at least one embodiment of the present disclosure. Therefore, a particular feature, structure, or characteristic may be included in more than one embodiment of the present disclosure, so that these phrases do not necessarily refer to the same embodiment. As used herein, the terms "example," "exemplary," and the like are used to "serve as an example, instance, or illustration." Any implementation, aspect, or design described herein as "example" or "exemplary" is not necessarily to be construed as preferred or superior to other implementations, aspects, or designs. On the contrary, the use of the terms "example," "exemplary," and the like is intended to present concepts in a concrete manner.

[0055] In the description of the embodiments of the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0056] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc. is based on the orientation or positional relationship shown in the drawings, which is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present invention. In addition, terms such as "first", "second" and other numerical terms do not imply an order or sequence when used in this document unless explicitly indicated above. Therefore, without departing from the teachings of the example embodiments, the first element, component, region, layer or section discussed above may be referred to as a second element, component, region, layer or section.

[0057] Spatially relative terms, such as "inside", "outside", "below", "below", "down", "above", "on", etc., may be used herein to facilitate description of the relationship of one element or feature to another element or feature as illustrated in the figure. In addition to the orientation depicted in the figure, spatially relative terms may be intended to cover different orientations of the device in use or operation. For example, if the device in the figure is turned over, the elements described as "below" or "below" other elements or features will be oriented to be "above" other elements or features. Therefore, the example term "below" can cover the orientation above and below. The device can be oriented in other ways (rotated 90 degrees or in other orientations), and the spatially relative descriptors used herein are interpreted accordingly.

[0058] In the above discussion, unless otherwise stated, the terms "about," "approximately," "substantially," etc., when used to describe a numerical value, mean a variation of + / - 10% of the value.

[0059] Based on the above ideal embodiments of the present invention, the relevant staff can make various changes and modifications without departing from the technical concept of the present invention through the above description. The technical scope of the present invention is not limited to the contents of the specification, and its technical scope must be determined according to the scope of the claims.

Claims

1. A spraying device, characterized in that: include: An injection device body (1) is provided with a medium flow channel (2) and a mounting hole (3) communicating with the medium flow channel (2); The valve core (4) is arranged in the mounting hole (3) and comprises: an on-off diaphragm (41) and a linkage assembly (42); the diaphragm portion (412) of the on-off diaphragm (41) is compressed by the linkage assembly (42) to seal the mounting hole (3); the linkage assembly (42) is configured to push the piston (411) of the on-off diaphragm (41) to extend into the medium flow channel (2) and cut the medium flow channel (2) into an inlet channel (21) and an outlet channel (22); The handle (5) is connected to the linkage component (42) of the valve core (4) and is configured to drive the piston (411) connected to the linkage component (42) to move in the opposite direction to open the medium flow channel (2) by pressing; The moving direction F1 of the piston (411) is coaxial with the impact direction F2 of the medium in the inlet channel (21).

2. The spraying device according to claim 1, characterized in that A hanging platform (31) is provided in the mounting hole (3); The diaphragm portion (412) is disposed around the side wall of the piston (411); The diaphragm portion (412) abuts against the hanging platform (31) and is pressed tightly by the linkage assembly (42).

3. The spraying device according to claim 2, characterized in that The linkage assembly (42) comprises: a connecting shaft (421) and a return spring (422); wherein The inner end of the connecting shaft (421) is connected to the piston (411), and the outer end of the connecting shaft (421) is connected to the handle (5); The return spring (422) is sleeved on the connecting shaft (421) and is configured to push the connecting shaft (421) to move so that the piston (411) cuts off the medium flow channel (2).

4. The spraying device according to claim 3, characterized in that The linkage assembly (42) further comprises: a limiting sleeve (423); wherein The side wall of the limiting sleeve (423) is provided with an external thread (4231), and the inner wall of the mounting hole (3) is provided with an internal thread (32); The limiting sleeve (423) is threadedly connected to the mounting hole (3), and has its inner end surface pressed against the diaphragm portion (412) on the hanging platform (31).

5. The spraying device according to claim 4, characterized in that The limiting sleeve (423) is provided with a guide portion (4232); A guide ring (4211) is provided on the side wall of the connecting shaft (421); The guide ring (4211) is located inside the guide portion (4232) to guide the piston (411) connected to the connecting shaft (421) to move along the F1 direction.

6. The spraying device according to claim 2, characterized in that A flange (413) is provided on the side of the diaphragm portion (412) facing the piston (411).

7. The spraying device according to claim 1, characterized in that An angle α is formed between the direction of the outlet end of the inlet channel (21) and the direction of the inlet end of the outlet channel (22), and the angle range of the angle α is between 70° and 110°.

8. The spraying device according to claim 5, characterized in that The outlet end of the outlet channel (22) is threadedly connected to a nozzle (6); A detachable hook (8) is provided on the upper part of the spray device body (1).

9. The spraying device according to claim 8, characterized in that A filter (7) is provided between the nozzle (6) and the outlet end of the outflow channel (22); The filter (7) is threadedly connected to the nozzle (6), and the filter (7) is threadedly connected to the outlet end of the outflow channel (22).

10. A method for operating the spraying device according to any one of claims 1 to 9, characterized in that: include: Pushing the piston (411) of the on-off diaphragm (41) through the linkage assembly (42) to cut off the medium flow channel (2), and cutting the medium flow channel (2) into an inlet channel (21) and an outlet channel (22); The diaphragm portion (412) of the on-off diaphragm (41) is compressed by the linkage assembly (42) to seal the mounting hole (3); By pressing the handle (5), the piston (411) connected to the linkage assembly (42) is driven to move in the opposite direction to open the medium flow channel (2); The moving direction F1 of the piston (411) is coaxial with the impact direction F2 of the medium in the inlet channel (21).

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